CN106153028A - Inside and outside discrete distributed gyroscope of bipolar electrode and preparation method thereof - Google Patents
Inside and outside discrete distributed gyroscope of bipolar electrode and preparation method thereof Download PDFInfo
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- CN106153028A CN106153028A CN201610633735.7A CN201610633735A CN106153028A CN 106153028 A CN106153028 A CN 106153028A CN 201610633735 A CN201610633735 A CN 201610633735A CN 106153028 A CN106153028 A CN 106153028A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
Abstract
The present invention proposes a kind of inside and outside discrete distributed gyroscope of bipolar electrode and preparation method thereof, including: monocrystal silicon substrate, center fix support column, miniature resonant, external electrode, interior electrode, substrate of glass.Described dispatch from foreign news agency is the most multiple, is evenly distributed on the outside of miniature resonant, constitutes and is uniformly distributed formula external electrode；Described interior electrode is multiple, and multiple interior electrodes are evenly distributed on the inner side of miniature resonant, constitutes and is uniformly distributed electrode in formula；The present invention combines MEMS Bulk micro machining and surface silicon processing technique makes；The present invention can provide different driving, detection mode and different mode of operations, can be operated in the system needing complex control；The present invention may utilize inner and outer electrodes and is driven respectively and detects, and reduces the parasitic capacitance between drive electrode and detecting electrode, improves accuracy of detection.
Description
Technical field
The present invention relates to the minisize gyroscopes of field of micro electromechanical technology, in particular it relates to a kind of inside and outside discrete bipolar electrode
Distributed gyroscope and preparation method thereof.
Background technology
Gyroscope is a kind of inertia device that can detect carrier angle or angular velocity, at gesture stability and navigator fix etc.
There is very important effect in field.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system is for gyro
The requirement of instrument also to low cost, small size, in high precision, many shaft detection, high reliability, the direction that adapts to various adverse circumstances send out
Exhibition.Therefore, the importance of MEMS microthrust test is self-evident.Especially, micro hemispherical resonator gyro instrument is as MEMS microthrust test
One important research direction, has become as a study hotspot in this field.
For minisize gyroscopes, use full angle to control technology, there is stability height, strong shock resistance, precision
The advantageous characteristic such as height, error are little, before the fields such as Aero-Space, inertial navigation and civilian consumer electronics have a wide range of applications
Scape.The number of electrodes of the gyroscope of design is less at present, limits its application in complex control system；And general top
A set of electrode on spiral shell instrument only one of which face, drives, detects and controls to there is certain parasitic capacitance between electrode and signal is done
Disturb, limit its accuracy of detection.
Based on this, in the urgent need to proposing a kind of new gyroscope arrangement so that it is avoid or reduce above-mentioned influence factor, simultaneously
Extend its range of application.
Through retrieving, Publication No. CN104165623A, the Chinese invention patent application of Application No. 201410389616.2,
The invention provides Double-electrode type micro hemispherical resonator gyro instrument and preparation method thereof inside and outside one, including: monocrystal silicon substrate, in
The heart fixes support column, miniature hemisphere harmonic oscillator, external electrode, external electrode metal welding fishplate bar, substrate of glass, metal lead wire, circular weldering
Drum, external electrode metal connect electrode and Seed Layer in post.This invention may utilize inner and outer electrodes be driven respectively and
Detection, reduces the parasitic capacitance between drive electrode and detecting electrode, improves accuracy of detection；Provide for inner and outer electrodes
Metal lead wire and circular bonding wire dish, it is simple to signal applies and signal extraction.
But above-mentioned patent provide only the structure of the miniature hemisphere gyroscope of internal discrete electrodes and external discrete electrode
Scheme, it is impossible to provide different distribution of electrodes schemes for multiple minisize gyroscopes.
Summary of the invention
For defect of the prior art, it is an object of the invention to provide a kind of inside and outside discrete bipolar electrode and be distributed the top that declines
Spiral shell instrument and preparation method thereof, it is possible to provide different driving, detection mode and different mode of operations, can be operated in needs complexity control
In the system of system, and can make in conjunction with MEMS Bulk micro machining and surface silicon processing technique.
According to an aspect of the present invention, it is provided that a kind of inside and outside discrete distributed gyroscope of bipolar electrode, including monocrystalline
Silicon base, center fix support column, miniature resonant, external electrode, interior electrode, substrate of glass；Wherein:
Described dispatch from foreign news agency is the most multiple, and multiple external electrodes are evenly distributed on the outside of miniature resonant, constitutes and is uniformly distributed formula
External electrode, the most described external electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described interior electrode is multiple, and multiple interior electrodes are evenly distributed on the inner side of miniature resonant, constitutes and is uniformly distributed formula
Interior electrode, the most described interior electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described center is fixed one end of support column and is connected with described monocrystal silicon substrate, and another of support column is fixed at described center
End is connected with described miniature resonant；Described monocrystal silicon substrate is bonded with described substrate of glass；
Described miniature resonant is used for described as the pendulum of described gyroscope, described external electrode and described interior electrode
The driving of gyroscope, detect and control.
When gyroscope of the present invention is operated under angular speed pattern, apply alternating current drive signal, described miniature humorous
Apply DC bias signal on oscillator, be uniformly distributed formula external electrode and make described miniature resonant be operated in required by electrostatic force
Under driven-mode, the vibration amplitude of driven-mode and frequency keep constant；Additional angle is there is when being perpendicular to monocrystal silicon substrate direction
During speed, the vibration amplitude of sensed-mode can change, and the size of this vibration amplitude is directly proportional to the size of additional angular velocity,
Cause the electric capacity being uniformly distributed between formula external electrode and described miniature resonant to change simultaneously；It is uniformly distributed formula by collection
Signal intensity on external electrode calculates the size of sensed-mode vibration amplitude, and then calculates the size of additional angular velocity.
Further, in gyroscope collection of the present invention is uniformly distributed formula, the signal intensity on electrode calculates detection mould
The size of state vibration amplitude, and then calculate the size of additional angular velocity, thus reduce and be uniformly distributed the parasitism between formula external electrode
Electric capacity, improves accuracy of detection.
Further, gyroscope of the present invention applies alternating current drive signal being uniformly distributed in formula on electrode, and
Acquisition testing signal on electrode in being uniformly distributed formula external electrode or being uniformly distributed formula, it is provided that different driving, detection and controlling parties
Formula.
Further, the present invention judges the work of described gyroscope by the signal intensity being uniformly distributed in formula on electrode
State, under abnormal operating state, applies control signal by control algolithm being uniformly distributed described in part in formula on electrode,
The duty of gyroscope described in scalable, so that described gyroscope normally works.
Further, gyroscope of the present invention can be operated under dynamic balance pattern and full angle pattern, dynamic balance mould
Formula directly detects the size of additional angular velocity, and full angle pattern directly detects the size of the additional anglec of rotation.
Preferably, the material of described external electrode and described interior electrode is boron ion or phosphonium ion doped silicon or is metal
Nickel；When external electrode or interior electrode are positioned in monocrystal silicon substrate, material is boron ion or phosphonium ion doped silicon；When external electrode or
When in person, electrode is positioned in substrate of glass, material is metallic nickel.
Preferably, described gyroscope be bird-nest-shaped resonator gyroscope, annular resonance gyroscope, hemispherical resonant gyro,
Cup-shaped resonator gyroscope.
Preferably, the material of described monocrystal silicon substrate and substrate of glass is respectively the high resistant material of High Resistivity Si and silicon dioxide
Material, highly resistant material is for reducing the signal disturbing between external electrode and interior electrode.
Preferably, the material of support column is fixed at described center is High Resistivity Si or silicon dioxide.
Preferably, the material of described miniature resonant is doped diamond or DOPOS doped polycrystalline silicon, is the main of gyroscope
Pendulum.
In the present invention, the distribution of described inner and outer electrodes can be used in the control system of complexity, it is achieved full angle controls.
The present invention can be the multiple minisize gyroscopes structure of equally distributed inside and outside discrete bipolar electrode distribution, and electrode divides
There is greatest differences in mode for cloth, can be suitably used for special drives and detection scheme (as be shown in the examples), miniature resonant
Son is not limited solely to micro hemispherical resonator gyro instrument, also can provide different distribution of electrodes sides for multiple minisize gyroscopes
Case.
The bipolar electrode distribution of interior discrete outer ring of the present invention, be inside and outside distribution rather than adjacent distributions or
Being distributed up and down, and lateral electrode is annular integral type, technique is the simplest compared with inside and outside pair of discrete electrodes.
According to another aspect of the present invention, it is provided that the preparation side of a kind of inside and outside discrete distributed gyroscope of bipolar electrode
Method, comprises the steps:
The first step, monocrystal silicon substrate and substrate of glass are carried out, gluing, photoetching, development, boron ion implanting, sputtering,
Degumming process, obtains boron ion or the interior electrode of phosphonium ion doped silicon material or external electrode in monocrystal silicon substrate；
Second step, monocrystal silicon substrate carries out gluing, photoetching, development, the isotropic etching of silicon, remove photoresist, with at list
The groove that the sub-shape of miniature resonant is corresponding is obtained in crystal silicon substrate；
3rd step, in monocrystal silicon substrate, deposit silicon dioxide, for making that miniature resonant is sub and interior electrode or dispatch from foreign news agency interpolar
Gap provides sacrifice layer；
4th step, in monocrystal silicon substrate, deposit doped diamond or DOPOS doped polycrystalline silicon, and chemically-mechanicapolish polish, with
Making miniature resonant；
5th step, on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control etch period, with
Release miniature resonant, and nubbin is fixed support column as center；
6th step, carry out gluing, photoetching, development, electronickelling on the glass substrate, remove photoresist, to make metallic nickel materials
Interior electrode or external electrode；
7th step, inversion substrate of glass, and be bonded with monocrystal silicon substrate, make core and the monocrystalline of substrate of glass
The center alignment of support column is fixed at the center of silicon base, it is achieved two substrates are fixed, thus obtains inside and outside discrete bipolar electrode and divide
Cloth gyroscope.
Compared with prior art, the present invention has a following beneficial effect:
(1) described gyroscope combines MEMS Bulk micro machining and surface silicon processing technique makes, and is one
Plant novel processing technique；
(2) described gyroscope can provide different driving, detection mode and different mode of operations, is not reducing electrode
In the case of area, add number of electrodes, described gyroscope can be made to be operated in the system needing complex control；
(3) described gyroscope may utilize inner and outer electrodes and is driven respectively and detects, reduce drive electrode and
Parasitic capacitance between detecting electrode, improves accuracy of detection；Can be used in the control system of complexity, it is achieved full angle controls.
Accompanying drawing explanation
By the detailed description non-limiting example made with reference to the following drawings of reading, the further feature of the present invention,
Purpose and advantage will become more apparent upon:
Fig. 1 (a)-Fig. 1 (c) is bipolar electrode distributed type minisize hemispherical resonant gyro structure discrete inside and outside the present invention one；
Fig. 2 (a)-Fig. 2 (c) is bipolar electrode distributed type minisize annular resonance gyroscope arrangement discrete inside and outside the present invention one；
Fig. 3 (a)-Fig. 3 (c) is bipolar electrode distributed type minisize cup-shaped resonator gyroscope structure discrete inside and outside the present invention one；
Fig. 4 (a)-Fig. 4 (g) is the inside and outside discrete cup-shaped resonant gyroscope of bipolar electrode distributed type minisize of one embodiment of the invention
The preparation method flow chart of instrument；
In figure: 1 is miniature resonant, and 2 for being uniformly distributed formula external electrode, 3 for being uniformly distributed electrode in formula, and 4 is monocrystal silicon
Substrate, 5 is substrate of glass, fixes support column centered by 6.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.Following example will assist in the technology of this area
Personnel are further appreciated by the present invention, but limit the present invention the most in any form.It should be pointed out that, the ordinary skill to this area
For personnel, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement.These broadly fall into the present invention
Protection domain.
Embodiment 1
As shown in Fig. 1 (a)-Fig. 1 (c), the present embodiment provides a kind of inside and outside discrete bipolar electrode distributed type minisize hemisphere humorous
Shake gyroscope arrangement, including:
One hemispheric miniature resonant 1；
16 are uniformly distributed formula external electrode 2；
16 are uniformly distributed electrode 3 in formula；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 1 (a)) with described miniature resonant 1；
It is uniformly distributed formula external electrode 2 described in 16 and is arranged at the surface (as shown in Fig. 1 (b)) of described substrate of glass 5, and
It is evenly distributed in the periphery (as shown in Fig. 1 (c)) of described miniature resonant 1；In being uniformly distributed formula described in 16, electrode 3 sets
Be placed in the surface (as shown in Fig. 1 (b)) of described substrate of glass 5, and be evenly distributed in described miniature resonant 1 inner chamber (as
Shown in Fig. 1 (c))；Described monocrystal silicon substrate 4 is bonded with substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature half
The principal vibration body of ball resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula external electrode 2 be boron ion doping silicon, it is also possible to be that phosphonium ion is mixed
Miscellaneous silicon, for described micro hemispherical resonator gyro instrument driving, detect and control.
In the present embodiment, described in be uniformly distributed in formula that the material of electrode 3 is for being boron ion or phosphonium ion doped silicon, for institute
State the driving of micro hemispherical resonator gyro instrument, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula external electrode 2 and 16 be uniformly distributed in formula electrode 3 it
Between signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described micro hemispherical resonator gyro instrument can be operated under angular speed pattern, applies exchange and drives letter
Number, described miniature resonant 1 applies DC bias signal, described in be uniformly distributed described in formula external electrode 2 made by electrostatic force
Miniature resonant 1 is operated under required driven-mode, and the vibration amplitude of driven-mode and frequency keep constant；When being perpendicular to list
When crystal silicon substrate 4 direction exists additional angular velocity, the vibration amplitude of sensed-mode can change, the size of this vibration amplitude with
The size of additional angular velocity is directly proportional, cause simultaneously described in be uniformly distributed the electricity between formula external electrode 2 and described miniature resonant 1
Appearance changes；Sensed-mode vibration amplitude can be calculated by being uniformly distributed the signal intensity on formula external electrode 2 described in collection
Size, and then calculate the size of additional angular velocity.
In the present embodiment, described micro hemispherical resonator gyro instrument can also gather described in be uniformly distributed in formula on electrode 3
Signal intensity calculates the size of sensed-mode vibration amplitude, and then calculates the size of additional angular velocity, thus reduce described uniformly
Parasitic capacitance between distributed external electrode 2, improves accuracy of detection.
In the present embodiment, described micro hemispherical resonator gyro instrument can apply on electrode 3 to hand over described being uniformly distributed in formula
Stream drives signal, and described be uniformly distributed formula external electrode 2 or described in be uniformly distributed in formula acquisition testing signal on electrode 3, carry
For different driving, detection and control mode.
In the present embodiment, described micro hemispherical resonator gyro instrument can pass through described in the letter that is uniformly distributed in formula on electrode 3
Number change judges the duty of described micro hemispherical resonator gyro instrument, under abnormal operating state, is existed by control algolithm
It is uniformly distributed described in part in formula and on electrode 3, applies control signal, the work shape of micro hemispherical resonator gyro instrument described in scalable
State, so that described micro hemispherical resonator gyro instrument normally works.
In the present embodiment, described micro hemispherical resonator gyro instrument also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 2
As shown in Fig. 2 (a)-Fig. 2 (c), the present embodiment provides a kind of inside and outside discrete bipolar electrode distributed type minisize annular humorous
Shake gyroscope, including:
One annular miniature resonant 1；
16 are uniformly distributed formula external electrode 2；
16 are uniformly distributed electrode 3 in formula；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 2 (a)) with described miniature resonant 1；It is uniformly distributed formula external electrode 2 described in 16 and is arranged at institute
State monocrystal silicon substrate 4 surface, and be evenly distributed in the periphery (as shown in Fig. 2 (a)) of described miniature resonant 1；16 institutes
State electrode 3 in the formula of being uniformly distributed and be arranged at the surface (as shown in Fig. 2 (b)) of described substrate of glass 5, and be evenly distributed in described
The inner side (as shown in Fig. 2 (c)) of miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described Micro-ring
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula external electrode 2 be boron ion doping silicon, it is also possible to be that phosphonium ion is mixed
Miscellaneous silicon, for described micro loop resonator gyroscope driving, detect and control.
In the present embodiment, described in be uniformly distributed in formula that the material of electrode 3 is for being boron ion or phosphonium ion doped silicon, for institute
State the driving of micro loop resonator gyroscope, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula external electrode 2 and 16 be uniformly distributed in formula electrode 3 it
Between signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described micro loop resonator gyroscope also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Embodiment 3
As shown in Fig. 3 (a)-Fig. 3 (c), the present embodiment provides a kind of inside and outside discrete bipolar electrode distributed type minisize cup-shaped humorous
Shake gyroscope, including:
One cup-shaped miniature resonant 1；
16 are uniformly distributed formula external electrode 2；
16 are uniformly distributed electrode 3 in formula；
One monocrystal silicon substrate 4；
One substrate of glass 5；
Support column 6 is fixed at one center；Wherein:
Described center is fixed one end of support column 6 and is connected with described monocrystal silicon substrate 4, and support column 6 is fixed at described center
The other end is connected (as shown in Fig. 3 (a)) with described miniature resonant 1；It is uniformly distributed formula external electrode 2 described in 16 and is arranged at institute
State monocrystal silicon substrate 4 surface, and be evenly distributed in the periphery (as shown in Fig. 3 (a)) of described miniature resonant 1；16 institutes
State electrode 3 in the formula of being uniformly distributed and be arranged at the surface (as shown in Fig. 3 (b)) of described substrate of glass 5, and be evenly distributed in described
The inner side (as shown in Fig. 3 (c)) of miniature resonant 1；Described monocrystal silicon substrate 4 is bonded with substrate of glass 5.
In the present embodiment, the material of described miniature resonant 1 is doped diamond or DOPOS doped polycrystalline silicon, is described miniature cup
The principal vibration body of shape resonator gyroscope.
In the present embodiment, described in be uniformly distributed the material of formula external electrode 2 be boron ion doping silicon, it is also possible to be that phosphonium ion is mixed
Miscellaneous silicon, for described miniature cup-shaped resonator gyroscope driving, detect and control.
Further, described gyroscope can arrange metal lead wire, one end of described metal lead wire and described external electrode, institute
Stating interior electrode to connect, the other end of described metal lead wire is as external interface, and described metal lead wire applies for signal and letter
Number extract.
In the present embodiment, described in be uniformly distributed in formula that the material of electrode 3 is for being boron ion or phosphonium ion doped silicon, for institute
State the driving of miniature cup-shaped resonator gyroscope, detect and control.
In the present embodiment, the material of described monocrystal silicon substrate 4 and substrate of glass 5 is respectively High Resistivity Si and silicon dioxide so
Highly resistant material, highly resistant material can reduce 16 be uniformly distributed formula external electrode 2 and 16 be uniformly distributed in formula electrode 3 it
Between signal disturbing.
In the present embodiment, it is silicon dioxide that the material of support column 6 is fixed at described center, it is also possible to be High Resistivity Si.
In the present embodiment, described miniature cup-shaped resonator gyroscope also can be operated under dynamic balance pattern and full angle pattern,
Dynamic balance pattern can directly detect the size of additional angular velocity, and full angle pattern can directly detect the size of the additional anglec of rotation.
Present invention incorporates MEMS Bulk micro machining and surface silicon processing technique makes, be the processing of a kind of novelty
Technique；Gyroscope in the present invention can provide different driving, detection mode and different mode of operations, can be operated in needs
In the system of complex control；Gyroscope in the present invention may utilize inner and outer electrodes and is driven respectively and detects, and subtracts
Parasitic capacitance between little drive electrode and detecting electrode, improves accuracy of detection；In gyroscope in the present invention, electrode is with outer
Electrode provides metal lead wire, it is simple to signal applies and signal extraction.
Embodiment 4
As shown in Fig. 4 (a)-Fig. 4 (g), the present embodiment provides a kind of inside and outside discrete bipolar electrode distributed type minisize hemisphere humorous
Shake the preparation method of gyroscope, comprise the steps:
The first step, as shown in Fig. 4 (a), monocrystal silicon substrate 4 is carried out, gluing, photoetching, development, boron ion implanting,
Sputtering, degumming process, to obtain the external electrode of the boron ion doping silicon materials that thickness is 10 μm-50 μm in monocrystal silicon substrate 1
2；
Second step, as shown in Fig. 4 (b), monocrystal silicon substrate is carried out gluing, photoetching, development, silicon isotropism carve
Lose, remove photoresist, to obtain the hemispherical groove that radius is 300 μm-700 μm in monocrystal silicon substrate 4；
3rd step, as shown in Fig. 4 (c), in monocrystal silicon substrate, deposit thickness is the silicon dioxide of 1 μm-5 μm, for make
Miniature hemisphere harmonic oscillator 1 and electrode gap provide sacrifice layer；
4th step, as shown in Fig. 4 (d), on the basis of the 3rd step, deposit doped diamond or DOPOS doped polycrystalline silicon, and carry out
Chemically mechanical polishing, to make the miniature hemisphere harmonic oscillator 1 that thickness is 1 μm-5 μm；
5th step, as shown in Fig. 4 (e), on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control
Etch period processed, to discharge miniature hemisphere harmonic oscillator 1, supports fixing as the center that radius is 15 μm-35 μm for nubbin
Post 6；
6th step, as shown in Fig. 4 (f), gluing, photoetching, development, electronickelling in substrate of glass 5, remove photoresist, to make height
Degree is the interior electrode 3 of the metallic nickel materials of 20 μm-70 μm.
7th step, as shown in Fig. 4 (g), be inverted substrate of glass 5, and be bonded with monocrystal silicon substrate 4, make substrate of glass 5
The core center of fixing support column with the center of monocrystal silicon substrate 4 be directed at, it is achieved two substrates are fixed, thus in obtaining
The distributed gyroscope of the most discrete bipolar electrode.
Above the specific embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make various deformation or amendment within the scope of the claims, this not shadow
Ring the flesh and blood of the present invention.
Claims (10)
1. the distributed gyroscope of bipolar electrode discrete inside and outside a kind, it is characterised in that including: monocrystal silicon substrate, center are fixed
Support column, miniature resonant, external electrode, interior electrode and substrate of glass；Wherein:
Described dispatch from foreign news agency is the most multiple, and multiple external electrodes are evenly distributed on the outside of miniature resonant, constitutes and is uniformly distributed formula dispatch from foreign news agency
Pole, the most described external electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described interior electrode is multiple, and multiple interior electrodes are evenly distributed on the inner side of miniature resonant, constitutes electricity in the formula that is uniformly distributed
Pole, the most described interior electrode is arranged at the surface of described monocrystal silicon substrate or the surface of substrate of glass；
Described center is fixed one end of support column and is connected with described monocrystal silicon substrate, described center fix the other end of support column with
Described miniature resonant connects；Described monocrystal silicon substrate is bonded with described substrate of glass；
Described miniature resonant is used for described micro-top as the pendulum of described gyroscope, described external electrode and described interior electrode
The driving of spiral shell instrument, detect and control.
A kind of inside and outside discrete distributed gyroscope of bipolar electrode the most according to claim 1, it is characterised in that described micro-
When gyroscope is operated under angular speed pattern, apply alternating current drive signal, described miniature resonant applies direct current biasing letter
Number, it is uniformly distributed formula external electrode and makes described miniature resonant be operated under required driven-mode by electrostatic force, driven-mode
Vibration amplitude and frequency keep constant；When being perpendicular to monocrystal silicon substrate direction and there is additional angular velocity, shaking of sensed-mode
Dynamic amplitude can change, and the size of this vibration amplitude is directly proportional to the size of additional angular velocity, causes the formula of being uniformly distributed simultaneously
Electric capacity between external electrode and described miniature resonant changes；It is uniformly distributed the signal intensity on formula external electrode by collection
Calculate the size of sensed-mode vibration amplitude, and then calculate the size of additional angular velocity.
A kind of inside and outside discrete distributed gyroscope of bipolar electrode the most according to claim 1, it is characterised in that described micro-
The signal intensity that gyroscope collection is uniformly distributed in formula on electrode calculates the size of sensed-mode vibration amplitude, and then calculates additional
The size of angular velocity, thus reduce and be uniformly distributed the parasitic capacitance between formula external electrode, improve accuracy of detection.
A kind of inside and outside discrete distributed gyroscope of bipolar electrode the most according to claim 1, it is characterised in that described micro-
Gyroscope applies alternating current drive signal being uniformly distributed in formula on electrode, and being uniformly distributed formula external electrode or be uniformly distributed in formula
Acquisition testing signal on electrode, it is provided that different driving, detection and control modes.
A kind of inside and outside discrete distributed gyroscope of bipolar electrode the most according to claim 1, it is characterised in that by all
Signal intensity on even distributed interior electrode judges the duty of described gyroscope, under abnormal operating state, passes through
Control algolithm applies control signal being uniformly distributed described in part in formula on electrode, the work shape of gyroscope described in scalable
State, so that described gyroscope normally works.
A kind of inside and outside discrete distributed gyroscope of bipolar electrode the most according to claim 1, it is characterised in that described
Gyroscope can be operated under dynamic balance pattern and full angle pattern, and dynamic balance pattern directly detects the size of additional angular velocity,
Full angle pattern directly detects the size of the additional anglec of rotation.
7., according to a kind of inside and outside discrete distributed gyroscope of bipolar electrode described in any one of claim 1-6, its feature exists
In, the material of described external electrode and described interior electrode is boron ion or phosphonium ion doped silicon or is metallic nickel；When external electrode or
When in person, electrode is positioned in monocrystal silicon substrate, material is boron ion or phosphonium ion doped silicon；When external electrode or interior electrode are positioned at
Time in substrate of glass, material is metallic nickel.
8., according to a kind of inside and outside discrete distributed gyroscope of bipolar electrode described in any one of claim 1-6, its feature exists
In, the material of described monocrystal silicon substrate and substrate of glass is respectively the highly resistant material of High Resistivity Si and silicon dioxide, and highly resistant material is used
In the signal disturbing reduced between external electrode and interior electrode.
9., according to a kind of inside and outside discrete distributed gyroscope of bipolar electrode described in any one of claim 1-6, its feature exists
In, it is High Resistivity Si or silicon dioxide that the material of support column is fixed at described center；
The material of described miniature resonant is doped diamond or DOPOS doped polycrystalline silicon.
10. the preparation side according to the distributed gyroscope of bipolar electrode discrete inside and outside described in any one of claim 1-9
Method, it is characterised in that comprise the steps:
The first step, monocrystal silicon substrate and substrate of glass are carried out, gluing, photoetching, development, boron ion implanting, sputter, remove photoresist
Technique, obtains boron ion or the interior electrode of phosphonium ion doped silicon material or external electrode in monocrystal silicon substrate；
Second step, monocrystal silicon substrate carries out gluing, photoetching, development, the isotropic etching of silicon, remove photoresist, with at monocrystal silicon
The groove that the sub-shape of miniature resonant is corresponding is obtained in substrate；
3rd step, in monocrystal silicon substrate, deposit silicon dioxide, for making that miniature resonant is sub and interior electrode or external electrode gap carry
For sacrifice layer；
4th step, in monocrystal silicon substrate, deposit doped diamond or DOPOS doped polycrystalline silicon, and chemically-mechanicapolish polish, to make
Miniature resonant；
5th step, on the basis of the 4th step, utilize BOE solution etches silicon dioxide sacrificial layer and control etch period, with release
Miniature resonant, and nubbin is fixed support column as center；
6th step, carry out gluing, photoetching, development, electronickelling on the glass substrate, remove photoresist, to make the interior electricity of metallic nickel materials
Pole or external electrode；
7th step, inversion substrate of glass, and be bonded with monocrystal silicon substrate, the core making substrate of glass is silica-based with monocrystalline
The center alignment of support column is fixed at the center at the end, it is achieved two substrates are fixed, thus it is distributed to obtain inside and outside discrete bipolar electrode
Gyroscope.
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| CN114505629A (en) * | 2022-03-15 | 2022-05-17 | 哈尔滨工业大学 | Electrode substrate fixing device for welding hemispherical harmonic oscillator and electrode substrate |
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