CN106145021A - Optical micro/nano cavity resonator structure and preparation method thereof - Google Patents
Optical micro/nano cavity resonator structure and preparation method thereof Download PDFInfo
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- CN106145021A CN106145021A CN201510137590.7A CN201510137590A CN106145021A CN 106145021 A CN106145021 A CN 106145021A CN 201510137590 A CN201510137590 A CN 201510137590A CN 106145021 A CN106145021 A CN 106145021A
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Abstract
The present invention provides a kind of optical micro/nano cavity resonator structure and preparation method thereof, described optical micro/nano cavity resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, described single particle chain is made up of multiple spaced particles, and the spacing distance between the single particle chain of said two makes the wavelength that resonant wavelength is working electromagnet ripple of described optical micro/nano cavity resonator structure.Present invention utilizes the single particle chain total reflection characteristic for specific polarization light, by the distance between structure and two single particle chains of the single particle chain of optimization, it is thus achieved that a kind of novel high-quality-factor optical micro/nano resonator cavity.The present invention utilizes the resonator cavity designed by the total reflection of two single particle chains, has low-loss, high-quality-factor and undersized feature, has good application prospect in integrated optics field.
Description
Technical field
The present invention relates to structure of a kind of optical micro/nano resonator cavity and preparation method thereof, especially relate to a kind of based on two single grains
Optical resonator of high-quality-factor of micro-nano structure of subchain and preparation method thereof.
Background technology
Optical resonator has huge application at optical field, and wherein Fabry Paro resonator cavity is to apply in optical resonator
Widest a kind of.Quality factor reflection is one of most critical index of Fabry Paro resonator cavity performance level, and resonator cavity
Quality factor depend primarily on the performance of reflecting mirror.Reflecting mirror employed in major part Fabry Paro resonator cavity is tradition
Reflecting mirror based on metallic film, this reflecting mirror based on metallic film can realize the reflection to electromagnetic wave under certain bandwidth；
But, for blue light or the light of higher frequency, owing to the skin depth of metal material significantly becomes big, thus metal itself is to light
Absorption loss is greatly increased, and this makes conventional mirror performance based on metallic film be greatly reduced, and very big limits resonator cavity
Quality factor.
In order to avoid the electromagnetic consumable problem of metal material, manufacture the resonator cavity of the higher quality factor at specific band, grind in recent years
Study carefully personnel to do a lot of work in terms of nonmetal medium material and realize the total reflection of light.Such as, distributed Bragg reflector
(DBR), photonic crystal based on band gap mechanism, resonant grating etc..
In recent years, the micronano optical structure of single-particle and close-packed arrays particle thereof has been widely used in physics and engineering.
Specific single particle chain micro-nano structure can realize the broadband to incident illumination, wide angle total reflection, therefore can be as high performance
Reflecting mirror.
In view of the above, it is provided that one has the real genus of high-quality-factor, low-loss and undersized optical micro/nano cavity resonator structure
Necessary.
Summary of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide a kind of optical micro/nano cavity resonator structure and system thereof
Make method, there is high-quality-factor, low-loss and undersized optical micro/nano cavity resonator structure realizing one.
For achieving the above object and other relevant purposes, the present invention provides a kind of optical micro/nano cavity resonator structure, described optical micro/nano
Cavity resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, and described single particle chain is by multiple
Every the particle composition of arrangement, the spacing distance between the single particle chain of said two makes being total to of described optical micro/nano cavity resonator structure
The wavelength that shakes is the wavelength of working electromagnet ripple.
As a kind of preferred version of the optical micro/nano cavity resonator structure of the present invention, the lattice paprmeter of described single particle chain and medium,
The radius of its each particle determines according to the electromagnetic wavelength of the specific polarization that optical micro/nano cavity resonator structure works, so that single particle
Chain has total reflection function to the electromagnetic wavelength of described specific polarization.
As a kind of preferred version of the optical micro/nano cavity resonator structure of the present invention, the distance between the single particle chain of said two is
The chamber of optical micro/nano cavity resonator structure is long.
As a kind of preferred version of the optical micro/nano cavity resonator structure of the present invention, in described single particle chain, each particle is linearly
Periodic arrangement.
As a kind of preferred version of the optical micro/nano cavity resonator structure of the present invention, the medium of described single particle chain include Si, Ge,
And the one in GaN.
As a kind of preferred version of the optical micro/nano cavity resonator structure of the present invention, in described single particle chain, each particle is shaped as
Spheroidal.
The present invention also provides for the manufacture method of a kind of optical micro/nano cavity resonator structure, including step:
1) electromagnetic wavelength of the specific polarization worked according to optical micro/nano cavity resonator structure, designs each particle in single particle chain
Radius and the lattice paprmeter of single particle chain, and determine the medium of corresponding single particle chain, so that described single particle chain pair
The electromagnetic wavelength of described specific polarization has the reflectance of maximum；
2) according to step 1) in the parameter of single particle chain of design, determine the distance between two row's particle chains, i.e. optical micro/nano
The chamber of cavity resonator structure is long, so that the wavelength that the resonant wavelength of optical micro/nano cavity resonator structure is working electromagnet ripple.
As a kind of preferred version of manufacture method of the optical micro/nano cavity resonator structure of the present invention, the medium of described single particle chain
Including the one in Si, Ge and GaN.
As a kind of preferred version of manufacture method of the optical micro/nano cavity resonator structure of the present invention, each grain in described single particle chain
The linearly periodic arrangement of son.
As a kind of preferred version of manufacture method of the optical micro/nano cavity resonator structure of the present invention, each grain in described single particle chain
Sub is shaped as spheroidal.
As it has been described above, the present invention provides a kind of optical micro/nano cavity resonator structure and preparation method thereof, described optical micro/nano resonator cavity is tied
Structure includes two single particle chains to working electromagnet ripple with total reflection function, and described single particle chain is by multiple spaced
Particle forms, and the spacing distance between the single particle chain of said two makes the resonant wavelength of described optical micro/nano cavity resonator structure to be
The wavelength of working electromagnet ripple.Present invention utilizes the single particle chain total reflection characteristic for specific polarization light, single by optimizing
Distance between the structure of particle chain and two single particle chains, it is thus achieved that a kind of novel high-quality-factor optical micro/nano resonance
Chamber.The present invention utilizes the resonator cavity designed by the total reflection of two single particle chains, has low-loss, high-quality-factor and little chi
Very little feature, has good application prospect in integrated optics field.
Accompanying drawing explanation
Fig. 1 is shown as the structural representation of the optical micro/nano cavity resonator structure of the present invention.
Fig. 2 is shown as the optical micro/nano cavity resonator structure of the present invention surface of intensity distribution when resonance.
Fig. 3 is shown as the optical micro/nano cavity resonator structure of the present invention normalized spatial spectrum when the long L of different cavity, the unit of L in figure
For micron.
Element numbers explanation
10 single particle chains
101 particles
Detailed description of the invention
Below by way of specific instantiation, embodiments of the present invention being described, those skilled in the art can be by disclosed by this specification
Content understand other advantages and effect of the present invention easily.The present invention can also be added by the most different detailed description of the invention
To implement or application, the every details in this specification can also be based on different viewpoints and application, in the essence without departing from the present invention
Various modification or change is carried out under god.
Refer to Fig. 1～Fig. 3.It should be noted that the diagram provided in the present embodiment illustrates the present invention's the most in a schematic way
Basic conception, the most graphic in component count time only display with relevant assembly in the present invention rather than is implemented according to reality, shape and
Size is drawn, and during its actual enforcement, the kenel of each assembly, quantity and ratio can be a kind of random change, and its assembly layout type
State is likely to increasingly complex.
As it is shown in figure 1, the present embodiment provides a kind of optical micro/nano cavity resonator structure, described optical micro/nano cavity resonator structure includes two
The individual single particle chain 10 to working electromagnet ripple with total reflection function, described single particle chain 10 is by multiple spaced grains
Son 101 composition, the spacing distance between the single particle chain of said two 10 makes the resonance wave of described optical micro/nano cavity resonator structure
The wavelength of a length of working electromagnet ripple.
As example, the radius of the lattice paprmeter of described single particle chain and medium, its each particle is tied according to optical micro/nano resonator cavity
The electromagnetic wavelength of the specific polarization of structure work determines, so that the electromagnetic wavelength of described specific polarization is had entirely by single particle chain
Reflection function.
As example, the chamber that distance is optical micro/nano cavity resonator structure between the single particle chain of said two is long.
As example, the linearly periodic arrangement of each particle in described single particle chain.
As example, the medium of described single particle chain includes the one in Si, Ge and GaN.
As example, in described single particle chain, each particle is shaped as spheroidal.
In the present embodiment, described optical micro/nano cavity resonator structure selects GaN as the medium of particle chain, the refractive index of this medium
It is 2.5.Lattice paprmeter a of single particle chain is 445nm, and the radius r of particle post is 132nm.Now, the spy of described work
Determine the blue light that electromagnetic wave is TE polarization, when the light normal incidence that wavelength is 482nm is to single particle chain, can obtain through calculating
Its reflectance is 0.9999185, i.e. has total reflection function.For the single particle chain of above-mentioned parameter, Fig. 2 gives and works as resonance
Corresponding normalized spatial spectrum, when several long L in different chambeies, is distinguished in chamber.According to shown in Fig. 2, the optical micro/nano of the present embodiment is humorous
The long L of resonator of resonator structure can be identified as 1um, and now resonant wavelength is 482nm, just equal with lambda1-wavelength；
Now the quality factor of resonator cavity is 166555.There is distribution such as Fig. 3 of the light intensity of the optical micro/nano cavity resonator structure of above-mentioned parameter
Shown in.
As it is shown in figure 1, the present embodiment also provides for the manufacture method of a kind of optical micro/nano cavity resonator structure, including step:
First step 1 is carried out), according to the electromagnetic wavelength of the specific polarization of optical micro/nano cavity resonator structure work, design single
The radius of each particle 101 and the lattice paprmeter of single particle chain in particle chain 10, and determine the medium of corresponding single particle chain,
So that described single particle chain has the reflectance of maximum to the electromagnetic wavelength of described specific polarization；
As example, the medium of described single particle chain includes the one in Si, Ge and GaN.
As example, the linearly periodic arrangement of each particle in described single particle chain.
As example, in described single particle chain, each particle is shaped as spheroidal.
In the present embodiment, selecting GaN as the medium of particle chain, its refractive index is 2.5.Lattice paprmeter a of single particle chain
It is 132nm for 445nm, the radius r of particle post.Now, the specific electromagnetic wave of described optical micro/nano cavity resonator structure work is
The blue light of TE polarization, when the light normal incidence that wavelength is 482nm is to single particle chain, can obtain its reflectance through calculating is
0.9999185。
Then carry out step 2), according to step 1) in the parameter of single particle chain 10 of design, determine two row's particle chains 10 it
Between distance, i.e. the chamber of optical micro/nano cavity resonator structure is long, so that the resonant wavelength of optical micro/nano cavity resonator structure is working electromagnet
The wavelength of ripple.Fig. 2 gives when resonator cavity is at several long L in different chambeies, the most corresponding normalized spatial spectrum.For above-mentioned
The single particle chain of parameter, it may be determined that when the long L of resonator is 1um, its resonant wavelength is 482nm, just with incident light wave
Long equal；Now the quality factor of resonator cavity is 166555.Have the optical micro/nano cavity resonator structure of above-mentioned parameter light intensity point
Cloth is as shown in Figure 3.
It is seen that, the present invention utilizes single particle chain to replace designed by the effect that electromagnetic wave is totally reflected by conventional planar mirror
The structure of laser resonant cavity, its quality factor is at a relatively high.It addition, again due to the low-loss of this structure and the compact characteristic of height,
The present invention has good development prospect in integrated optics field, can be widely used in photoelectric chip.
As it has been described above, the present invention provides a kind of optical micro/nano cavity resonator structure and preparation method thereof, described optical micro/nano resonator cavity is tied
Structure includes two single particle chains to working electromagnet ripple with total reflection function, and described single particle chain is by multiple spaced
Particle forms, and the spacing distance between the single particle chain of said two makes the resonant wavelength of described optical micro/nano cavity resonator structure to be
The wavelength of working electromagnet ripple.Present invention utilizes the single particle chain total reflection characteristic for specific polarization light, single by optimizing
Distance between the structure of particle chain and two single particle chains, it is thus achieved that a kind of novel high-quality-factor optical micro/nano resonance
Chamber.The present invention utilizes the resonator cavity designed by the total reflection of two single particle chains, has low-loss, high-quality-factor and little chi
Very little feature, has good application prospect in integrated optics field.So, the present invention effectively overcomes kind of the prior art
Plant shortcoming and have high industrial utilization.
The principle of above-described embodiment only illustrative present invention and effect thereof, not for limiting the present invention.Any it is familiar with this skill
Above-described embodiment all can be modified under the spirit and the scope of the present invention or change by the personage of art.Therefore, such as
All that in art, tool usually intellectual is completed under without departing from disclosed spirit and technological thought etc.
Effect is modified or changes, and must be contained by the claim of the present invention.
Claims (10)
1. an optical micro/nano cavity resonator structure, it is characterised in that:
Described optical micro/nano cavity resonator structure includes two single particle chains to working electromagnet ripple with total reflection function, institute
Stating single particle chain to be made up of multiple spaced particles, the spacing distance between the single particle chain of said two makes institute
State the wavelength that resonant wavelength is working electromagnet ripple of optical micro/nano cavity resonator structure.
Optical micro/nano cavity resonator structure the most according to claim 1, it is characterised in that: the lattice paprmeter of described single particle chain and
The electromagnetic wavelength of the specific polarization that medium, the radius of its each particle work according to optical micro/nano cavity resonator structure determines, so that
Single particle chain has total reflection function to the electromagnetic wavelength of described specific polarization.
Optical micro/nano cavity resonator structure the most according to claim 1, it is characterised in that: between the single particle chain of said two away from
Long from the chamber for optical micro/nano cavity resonator structure.
Optical micro/nano cavity resonator structure the most according to claim 1, it is characterised in that: the medium of described single particle chain includes
One in Si, Ge and GaN.
Optical micro/nano cavity resonator structure the most according to claim 1, it is characterised in that: in described single particle chain, each particle is in directly
Wire periodic arrangement.
Optical micro/nano cavity resonator structure the most according to claim 1, it is characterised in that: the shape of each particle in described single particle chain
Shape is spheroidal.
7. the manufacture method of an optical micro/nano cavity resonator structure, it is characterised in that described manufacture method includes step:
1) electromagnetic wavelength of the specific polarization worked according to optical micro/nano cavity resonator structure, designs each grain in single particle chain
The radius of son and the lattice paprmeter of single particle chain, and determine the medium of corresponding single particle chain, so that described single
Particle chain has the reflectance of maximum to the electromagnetic wavelength of described specific polarization；
2) according to step 1) in the parameter of single particle chain of design, determine the distance between two row's particle chains, i.e. optics
The chamber of micro-nano cavity resonator structure is long, so that the wavelength that the resonant wavelength of optical micro/nano cavity resonator structure is working electromagnet ripple.
The manufacture method of optical micro/nano cavity resonator structure the most according to claim 7, it is characterised in that: described single particle chain
Medium includes the one in Si, Ge and GaN.
The manufacture method of optical micro/nano cavity resonator structure the most according to claim 7, it is characterised in that: in described single particle chain
The linearly periodic arrangement of each particle.
The manufacture method of optical micro/nano cavity resonator structure the most according to claim 7, it is characterised in that: described single particle
In chain, each particle is shaped as spheroidal.
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| CN201510137590.7A CN106145021B (en) | 2015-03-26 | 2015-03-26 | Optical micro/nano cavity resonator structure and preparation method thereof |
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| JP2011524021A (en) * | 2008-05-30 | 2011-08-25 | オパラックス インコーポレーテッド | Variable Bragg stack |
| CN102306897A (en) * | 2011-08-22 | 2012-01-04 | 华南理工大学 | Ultra narrow linewidth low noise high power single frequency fiber laser |
| US8320425B1 (en) * | 2009-11-23 | 2012-11-27 | University Of Central Florida Research Foundation, Inc. | Pump cavities for diode laser array pumped laser rods |
| WO2013152310A1 (en) * | 2012-04-06 | 2013-10-10 | Reald Inc. | Laser architectures |
| CN204529301U (en) * | 2015-03-26 | 2015-08-05 | 江苏尚飞光电科技有限公司 | Optical micro/nano cavity resonator structure |
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2015
- 2015-03-26 CN CN201510137590.7A patent/CN106145021B/en active Active
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| US20050254529A1 (en) * | 2001-11-02 | 2005-11-17 | Patel C Kumar N | Tunable semiconductor laser |
| CN101036271A (en) * | 2004-09-28 | 2007-09-12 | 费姆托激光产品股份有限公司 | Multiple-reflection delay line for a laser beam and resonator or short pulse laser device comprising a delay line of this type |
| JP2011524021A (en) * | 2008-05-30 | 2011-08-25 | オパラックス インコーポレーテッド | Variable Bragg stack |
| US8320425B1 (en) * | 2009-11-23 | 2012-11-27 | University Of Central Florida Research Foundation, Inc. | Pump cavities for diode laser array pumped laser rods |
| CN102306897A (en) * | 2011-08-22 | 2012-01-04 | 华南理工大学 | Ultra narrow linewidth low noise high power single frequency fiber laser |
| WO2013152310A1 (en) * | 2012-04-06 | 2013-10-10 | Reald Inc. | Laser architectures |
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Effective date of registration: 20170614 Address after: 226017 Jiangsu city of Nantong province science and Technology Industrial Park of Su Tong Jiang Cheng Road No. 1088 Jiang Bei Lou Park Development Research Applicant after: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Applicant after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226009 Nantong science and Technology Industrial Park, Su Tong Road, Jiangsu, No. 14, No. 30 Applicant before: JIANGSU SUNFY OPTOELECTRONICS TECHNOLOGY CO.,LTD. Applicant before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Applicant before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Nantong Xinwei Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address after: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee after: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226017 R & D Park, Jiangcheng road 1088, Sutong science and Technology Industrial Park, Nantong, Jiangsu Patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |