CN106115270A - A kind of air supporting vac sorb carrying device - Google Patents
A kind of air supporting vac sorb carrying device Download PDFInfo
- Publication number
- CN106115270A CN106115270A CN201610753607.6A CN201610753607A CN106115270A CN 106115270 A CN106115270 A CN 106115270A CN 201610753607 A CN201610753607 A CN 201610753607A CN 106115270 A CN106115270 A CN 106115270A
- Authority
- CN
- China
- Prior art keywords
- air supporting
- work platforms
- conveyance
- vac sorb
- manufacturing process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to a kind of air supporting vac sorb carrying device, this device includes: lower work platforms, upper conveyance work platforms, four pylon sheet separation position-limit mechanisms, air supporting vac sorb exchange conveyance atmospheric control；Lower work platforms is the work platforms of manufacturing process equipment, configuration motion structure, manufacturing process functional entity and relevant frame composition manufacturing process equipment；Upper conveyance platform is the conveyance work platforms of manufacturing process equipment loading and unloading transport device, configuration relative motion structure composition conveyance transfer equipment automatically；Four pylon sheet separation position-limit mechanisms are connected with lower work platforms and upper conveyance platform；Air supporting vac sorb exchange conveyance atmospheric control is connected with lower work platforms and upper conveyance platform.The present invention makes workpiece in ultra thin glass substrates class workpiece, ultrathin flexible display base plate manufacturing process loading and unloading conveyance without deformation, yields is greatly improved such that it is able to realize extensive, automatic production line manufacture.
Description
Technical field
The present invention relates to semiconductor microelectronic, flat pannel display and photoelectron technical field, specifically, the present invention relates to one
Plant the Work carrying device being applied to semiconductor microelectronic, flat pannel display and photoelectron technical field.
Background technology
Ultra-thin glass 0.1-1.5mm, pole ultra-thin glass ＜ 0.1mm, ultra-thin glass 0.3-1.1mm is generally used for liquid crystal display
The workpiece such as LCD glass substrate workpiece, organic light emitting display OLED glass substrate workpiece and touch screen, pole ultra-thin glass and polyester
Film 0.03-0.2mm is used for Flexible Displays workpiece.Corning Incorporated in 2012 produces 100 μm windable screen glass, and 2013
Year Schott AG of Germany produces 25-100 μm web-like ultra-thin glass, and it is ultra-thin floating that Japan AGC company in 2014 illustrates 50 μm
Method glass.In ultra-thin glass and pole production process of ultrathin glass, relevant Work carrying device plays very important effect.
In prior art, display workpiece ultra-thin glass 0.3-1.1mm generally uses traditional roller wheel bearing formula transporter
With arrangement (locally) the adsorbent support workpiece loading and unloading logistics conveyance of mechanical hand vacuum cup.But, ultra-thin glass display base plate class
Workpiece, ultrathin flexible display base plate workpiece increase with size, thickness reduces, i.e. slenderness ratio increases to a certain degree, ultra-thin glass
Use mechanical arm local adsorbent support cannot transport workpiece loading and unloading on planar working table with polyester flexible thin film display workpiece
Operation.The ultra-thin glass of thickness ＜ 0.3mm and mylar display glass substrate move the ambient windstream vibration caused to be caused turning round
Turn vibrating fatigue and bending vibration fatigue glass substrate breakage；Ultra-thin liquid crystal glass becomes the double-side-turning segmentation of box processing procedure to break liquid
During crystal display screen, the justifying glass liquid crystal display screen having line of cut is produced and becomes by the adsorbent support vacuum cup conveyance of mechanical hand local
Shape stress, makes line of cut free diffusing directly destroy display screen；Mechanical arm conveyance ultrathin flexible thin film display base plate, vacuum is inhaled
The twisting vibration of the local deformation of dish absorption is tired and bending vibration fatigue causes quality to be damaged；Roller transmits vibration and causes ultra-thin
Glass substrate vibrating fatigue is damaged.At present, thickness ＜ 0.3mm ultra thin glass substrates and ultrathin flexible transparent membrane transport mechanism,
The most partially manual equipment, uses substrate backing plate slowly to drag attached technique to transport, and uses robot to separate finger sucker or the most single
And many people coordinate cannot travelling workpiece (cause workpiece stress to rupture or gauffer damages), it is impossible to realize automatic production line manufacture.
Therefore, the carrying device that ultra-thin glass of the prior art is relevant is further improved.
Summary of the invention
It is an object of the invention to provide a kind of air supporting vac sorb carrying device, ask with the most above-mentioned prior art of solution
Topic.
The invention discloses a kind of air supporting vac sorb carrying device, this device includes: lower work platforms, upper conveyance work
Platform, four pylon sheet separation position-limit mechanisms, air supporting vac sorb exchange conveyance atmospheric control；
Described lower work platforms is the work platforms of manufacturing process equipment, configures motion structure, manufacturing process functional entity
And relevant frame composition manufacturing process equipment；
Described upper conveyance platform is the conveyance work platforms of manufacturing process equipment loading and unloading transport device, configures relative motion
Structure composition automatically conveyance transfer equipment, with by the workpiece vac sorb blanking of the work platforms of manufacturing process equipment, and transports
Work platforms feeding to the manufacturing process equipment of subsequent processing；
Described four pylon sheet separation position-limit mechanisms are connected with described lower work platforms and described upper conveyance platform, so that described
Four pylon sheet separation position-limit mechanisms regulate the parallel clearance between described lower work platforms and described upper conveyance platform；
Described air supporting vac sorb exchange conveyance atmospheric control and described lower work platforms and described upper conveyance platform
Connect, so that described air supporting vac sorb exchange conveyance atmospheric control controls described lower work platforms and described upper conveyance is put down
Platform cooperating.
The action principle of the air supporting vac sorb carrying device of the present invention with have the beneficial effect that described:
Lower work platforms is the work platforms for manufacturing process equipment, configures motion structure, manufacturing process functional entity
Forming related process process apparatus with relevant frame, each different size workpiece air supporting vacuum subregion connects relevant with gas-tpe fitting
Electromagnetic valve control；
Upper conveyance platform is the conveyance work platforms of manufacturing process equipment loading and unloading transport device, configures relative motion structure
Composition conveyance transfer equipment automatically, by the workpiece vac sorb blanking of the work platforms of manufacturing process equipment, is transported to next work
The work platforms feeding of the manufacturing process equipment of sequence, each different size workpiece air supporting vacuum subregion connects relevant with gas-tpe fitting
Electromagnetic valve control；
Four pylon sheet separation position-limit mechanisms can limited control lower work platen parallel clearance, working plate is greatly reduced
Own working face degree difficulty of processing, it is provided that on lower table plate during workpiece blanking, vacuum breaking absorption air supporting freely discharge
The stress-space that workpiece processes produces；And
Exchange conveyance atmospheric control controls lower work platform and coordinates lower table workpiece vacuum breaking release, air supporting
Release workpiece stress, and coordinate upper table vac sorb to fix workpiece, upper table moves and realizes two workbench blanking exchanges
Conveyance function；During two workbench feeding exchange conveyances, upper table plate carries workpiece and transfers load on lower table plate, and between platen
Gap position-limit mechanism spacing lower work platen gap, lower table air supporting supports workpiece, upper table plate vacuum breaking release work
Part, workpiece freely open and flat release stress in air supporting, air supporting lifts closedown, and workpiece is freely placed on lower table plate, lower work
Make platen vac sorb and fix workpiece, it is achieved lower table plate feeding, transfer upper table plate, it is achieved workpiece feeding exchange conveyance
Operation.
Optionally, described four pylon sheet separation position-limit mechanisms are provided with different-thickness size or difform gap limit
Block and limit limited block.Thus, by changing different-thickness size gap limited block and limit limited block, it is possible to regulating platform sheet separation is fitted
Answer the exchange conveyance state of arts of different-thickness workpiece, so that the air supporting vac sorb carrying device scope of application of the present invention is more
Adding extensively, market popularization value is bigger.
Preferably, described gap limit block is metal material, and described limit limited block is nonmetallic materials.Thus, by more
Change group gap limit into and limit limited block is adapted to different materials, thickness and dimension workpiece, metal material gap limit rigidity
Location, nonmetallic materials margin position block protection workpiece.
Optionally, described air supporting vac sorb exchange conveyance atmospheric control is by clean gas source pressure adjusting pressuring valve, air supporting
Pressure adjusting pressuring valve, vacuum source pressure regulator valve, vacuum pressure sensor, multichannel vacuum district control hand-operated valve or electromagnetic valve, air supporting vacuum
Destroy at least one in electromagnetic valve, pressure release balanced solenoid valve and current limliting hand-operated valve to constitute.
Thus, vacuum source pressure regulator valve is used for ultrathin workpieces procedure for producing process adjustments vac sorb pressure, clean gas source pressure
Power pressure regulator valve and the regulation of air supporting pressure adjusting pressuring valve control lower work platform air supporting vacuum breaking pressure respectively, and clean gas source prevents
Workpiece is contaminated, and air supporting pressure adjusting pressuring valve is replaced with electric proportional servo valve, it is achieved air supporting pressure parameterization controls.Multichannel vacuum
District controls hand-operated valve or electromagnetic valve and air supporting vacuum breaking electromagnetic valve and breaks for the vacuum controlling different size workpiece manufacturing process
Bad, air supporting and vac sorb.Pressure release balanced solenoid valve and current limliting hand-operated valve control composition air supporting Stress control and overflow balance is let out
Pressure bypass, air supporting provides pressure support to workpiece, liquidates with bypass flow pressure release Self Adaptive Control, air supporting flow perturbation impact work
Part.Vacuum pressure sensor instruction air supporting pressure value parameter.
Optionally, described lower work platforms and the described upper non-one_to_one corresponding of conveyance platform, it is possible to achieve multiple upper conveyances are put down
Platform and multiple lower work platforms coordinate and realize feeding blanking conveyance operation, upper conveyance work platforms be mounted in robot upper or
Realizing Work carrying device on motion, lower work platforms can be the work platforms of each manufacturing process equipment.
Optionally, lower work platforms is made up of lower table plate and leave from office base plate, and described lower table plate and leave office the end
Plate composition vacuum cavity.Thereby, it is possible to workpiece more efficiently carries out vac sorb gentle over draft support, the scope of application is wider
General.
Optionally, described lower table pallet face is provided with vacuum apertures or micropore, it is possible to for different size workpiece
The gentle over draft of vac sorb is supportted.
Optionally, described lower work platforms and upper conveyance platform are provided with Fibre Optical Sensor and vacuum pressure sensor.By
This, Fibre Optical Sensor and vacuum pressure sensor can perception workpiece on work platforms, it is ensured that operate during workpiece transfer
Safety.
Optionally, described pressure release balanced solenoid valve and current limliting hand-operated valve control composition air supporting Stress control and overflow balance is let out
Pressure bypass.Thus, air supporting provides pressure support to workpiece, liquidates with bypass flow pressure release Self Adaptive Control, air supporting flow perturbation
Impact workpiece.
Optionally, electric proportional servo valve is also included.Thus, air supporting pressure adjusting pressuring valve is replaced with electric proportional servo valve,
It is capable of air supporting pressure parameterization to control.
Air supporting vac sorb carrying device according to the present invention, can obtain beneficial effect the most as described below:
1, the air supporting vac sorb carrying device of the present invention is utilized, it is possible to achieve ultra-thin glass, pole ultra-thin glass and ultra-thin
The integrated artistic platform loading and unloading conveyance of flexible polyester substrate, such as, apply at the ultra-thin glass of thickness ＜ 0.3mm, the most ultra-thin glass
In glass technique such that it is able to realize extensive, the automatic production line manufacture of ultra-thin glass, pole ultra-thin glass etc..
2, the air supporting vac sorb carrying device of the present invention is utilized, saturating with light in ultra thin glass substrates transmission and work surface
When the glass of bright thin flm circuit (being not allow for abrasion mark) or the conveyance of flexible film substrate, the free release conditions of air supporting workpiece are without answering
Power, in conveyance exchange, workpiece does not produce friction and distortional stress, and the vibrating fatigue that twists in being possible to prevent to transmit is damaged, bending
Vibrating fatigue breakage or light transparent membrane circuit scratch, thus frangible ultrathin workpieces and wrinkle resistant thin film flexible work are greatly improved
Part yield rate and yields.
3, utilize the air supporting vac sorb carrying device of the present invention, can effectively solve vast scale slenderness ratio ultra-thin glass and show
The handing-over conveyance process requirements of base plate type part and ultrathin flexible thin film display base plate manufacturing process automated production processing procedure, reduces
Working plate working face degree difficulty of processing own, increases substantially the manufacturing process high limit of size, widens ultrathin workpieces technique system
Journey lower thickness size, expansion glass display device, flexible display device, the frivolous and superbright technology of touch display device are sent out
Exhibition.
4, utilize the air supporting vac sorb carrying device of the present invention, significantly improve frangible ultra-thin glass workpiece, ultra-thin thin
The yields of film workpiece, considerably reduces glass substrate process thickness such that it is able to large-scale manufactures frivolous superbright liquid crystal
Display screen, ultra-thin organic light emitting display and flexible display screen, and effectively solution ultra-thin glass shows and fexible film shows work
Part automatic producing technology bottleneck, particularly ultra-thin glass justifying display screen cutting splitting automated production is possibly realized, and then
Significantly improve rate of return on investment.
5, utilizing the air supporting vac sorb carrying device of the present invention, the present invention makes ultra thin glass substrates or ultrathin flexible thin film
Substrate is in pixel plated film, integrated circuit etching, coating oriented machining, bridgt circuit printing, display screen para-position laminating, touch screen patch
Conjunction, manufacturing process optics electrical detection, module group procedure and logistics transmission etc. are all widely used such that it is able to obtain and preferably combine
Close benefit.
6, utilize the air supporting vac sorb carrying device of the present invention, save substantial amounts of carrying device manufacturing cost, and show
Work shortens the production cycle.
7, utilizing the air supporting vac sorb carrying device of the present invention, the present invention carries traditional mechanical people or platform motor control
Mechanism, can realize rapidly legacy equipment upgrading, so that the air supporting vac sorb carrying device of the present invention has broader
Market application foreground.
Accompanying drawing explanation
Fig. 1 is the structural representation according to the air supporting vac sorb carrying device in one embodiment of the invention；
Fig. 2 is the structural representation according to the air supporting vac sorb carrying device in another embodiment of the present invention；
Fig. 3 be according to embodiments of the present invention in many dimension workpieces air supporting vacuum partitioned organization figure, this figure designates many chis
Very little substrate conveyance air supporting vacuum hole and vacuum cavity and runner are distributed；
Fig. 4 be according to embodiments of the present invention in air supporting vac sorb exchange conveyance atmospheric control figure, this figure is indicated
Clean gas source pressure adjusting pressuring valve that air supporting vac sorb exchange conveyance atmospheric control is relevant, air supporting pressure adjusting pressuring valve, gas
Floating vacuum breaking electromagnetic valve, vacuum source pressure regulator valve, vital qi district control electromagnetic valve, vacuum pressure sensor, the control of multichannel vacuum district
Hand-operated valve or the pipeline piping diagram of electromagnetic valve, pressure release balanced solenoid valve and current limliting hand-operated valve.
Reference:
1-lower table plate；2-leave from office base plate；Platen is transported on 3-；4-upper mounting plate base plate；5-lower platform limited block；Between 6-
Gap limited block；7-upper mounting plate positioning seat；8-limit limited block；9-gas-tpe fitting；10-support；11-sensor stand；12-optical fiber passes
Sensor.
Detailed description of the invention
Below by specific embodiment, and combine accompanying drawing the present invention is described in further detail.Need explanation
It is that, in the case of not conflicting, the embodiment in the application and the feature in embodiment can be mutually combined.It addition, embodiment
It is exemplary, is only used for explaining the present invention, and is not considered as limiting the invention.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " is installed ", " is unloaded
Carry ", should be interpreted broadly " being connected ", " connection ", for example, it may be fix connection, it is also possible to be to removably connect, or integratedly
Connect；Can be to be mechanically connected, it is also possible to be electrical connection；Can be to be joined directly together, it is also possible to be indirectly connected to by intermediary,
It can be the connection of two element internals.For the ordinary skill in the art, on can understanding as the case may be
State term concrete meaning in the present invention.
The invention discloses a kind of air supporting vac sorb conveyance to put, according to embodiments of the invention, the effect of this device is former
Manage as described below with technique effect:
As shown in Figures 1 to 3, lower work platforms is the work platforms for manufacturing process equipment, configures motion structure, technique
Processing procedure functional entity and relevant frame composition related process process apparatus.Lower table plate 1 and the lower work of leave from office base plate 2 composition are flat
Platform, the absorption aperture of lower table plate 1 subregion compartmentalized design different size workpiece or the vacuum subregion of installation poromerics, leave office
Gas-tpe fitting 9 is installed on base plate 2 and connects each different size workpiece air supporting vacuum subregion；
Upper conveyance platform is the conveyance work platforms of manufacturing process equipment loading and unloading transport device, configures relative motion structure
Composition conveyance transfer equipment automatically, by the workpiece vac sorb blanking of the work platforms of manufacturing process equipment, is transported to next work
The work platforms feeding of the manufacturing process equipment of sequence.Platform, upper transport table is transported on upper conveyance platen 3 and base plate 4 composition of appearing on the stage
The absorption aperture of plate 3 subregion compartmentalized design different size workpiece or the vacuum subregion of installation poromerics, base plate 4 of appearing on the stage is installed
Gas-tpe fitting 9 connects each different size workpiece air supporting vacuum subregion；
Four pylon sheet separation position-limit mechanisms are to control lower work platen parallel clearance accurate limiting, reduce working plate originally
Body working face degree difficulty of processing, it is provided that on lower table plate 1 under workpiece during feeding, vacuum breaking absorption air supporting freely discharge
Workpiece stress space.Platform limited block 5, appear on the stage positioning seat 7 and gap limit block 6, limit limited block 8 compound table sheet separation position restrainer
Structure, by changing different-thickness size gap limited block 6, the friendship of limit limited block 8 regulating platform sheet separation adaptation different-thickness workpiece
Change conveyance technique；
As shown in Figure 4, exchange conveyance atmospheric control control lower work platform coordinates lower table workpiece vacuum to break
Bad release, air supporting release workpiece stress, and coordinate upper table vac sorb to fix workpiece, upper table moves and realizes two work
Platform blanking exchange conveyance function；During two workbench feeding exchange conveyances, upper table plate carries workpiece and transfers load to lower table plate
On, and platen gap limit mechanism's spacing lower work platen gap, lower table air supporting supports workpiece, upper table plate vacuum
Destroying release workpiece, workpiece is free open and flat release stress in air supporting, and air supporting is closed, and workpiece is freely placed into lower table plate
On, lower table plate vac sorb fixes workpiece, it is achieved lower table plate feeding, transfer upper table plate, it is achieved workpiece feeding
Exchange conveyance operation.Control the clean gas source pressure adjusting pressuring valve of lower work platform, air supporting pressure adjusting pressuring valve, vacuum source tune respectively
Pressure valve, vacuum pressure sensor, multichannel vacuum district control hand-operated valve or electromagnetic valve, air supporting vacuum breaking electromagnetic valve, pressure release balance
Electromagnetic valve and current limliting hand-operated valve composition air supporting vac sorb exchange conveyance atmospheric control.Multichannel vacuum district control hand-operated valve or
Electromagnetic valve adapts to different size workpiece processing procedure and controls.Pressure release balanced solenoid valve and current limliting hand-operated valve control composition air supporting Stress control
With overflow balance pressure release bypass, vacuum pressure sensor instruction air supporting pressure value parameter.Air supporting pressure adjusting pressuring valve is replaced with electricity
Gas proportional servo valve, it is achieved air supporting pressure parameterization controls.The air supporting vac sorb exchange of the embodiment of the present invention transports pneumatic control
System processed uses SMC company pneumatic element to be sample, uses other company's pneumatic element equally to realize above-mentioned functions.
In lower work platform pneumatic control gas circuit, vacuum pressure sensor detection workpiece vacuum breaking release and safety are true
The attached fixing operation of suction completes.The support 10 that is respectively mounted on lower work platen, sensor stand 11, Fibre Optical Sensor 12 groups
Become workpiece sensing sensing, lower work platform transfer workpiece fabrication operates safety.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, the present invention can have respectively
Plant change and change.All within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. made, all should wrap
Within being contained in protection scope of the present invention.
Claims (10)
1. an air supporting vac sorb carrying device, it is characterised in that this device includes: lower work platforms, upper conveyance work are put down
Platform, four pylon sheet separation position-limit mechanisms, air supporting vac sorb exchange conveyance atmospheric control；
Described lower work platforms is the work platforms of manufacturing process equipment, configuration motion structure, manufacturing process functional entity and
Relevant frame composition manufacturing process equipment；
Described upper conveyance platform is the conveyance work platforms of manufacturing process equipment loading and unloading transport device, configures relative motion structure
Composition automatically conveyance transfer equipment, with by the workpiece vac sorb blanking of the work platforms of manufacturing process equipment, and is transported to down
The work platforms feeding of the manufacturing process equipment of one operation；
Described four pylon sheet separation position-limit mechanisms are connected with described lower work platforms and described upper conveyance platform, so that described four posts
Parallel clearance between platen gap limit mechanism's described lower work platforms of regulation and described upper conveyance platform；
Described air supporting vac sorb exchange conveyance atmospheric control is connected with described lower work platforms and described upper conveyance platform,
So that described air supporting vac sorb exchange conveyance atmospheric control controls described lower work platforms and described upper conveyance platform is joined
Close work.
Air supporting vac sorb carrying device the most according to claim 1, it is characterised in that described four pylon sheet separations are spacing
Mechanism is provided with different-thickness size or difform gap limit block and limit limited block.
Air supporting vac sorb carrying device the most according to claim 2, it is characterised in that described gap limit block is metal
Material, described limit limited block is nonmetallic materials.
4. according to the air supporting vac sorb carrying device according to any one of claims 1 to 3, it is characterised in that described air supporting
Vac sorb exchange conveyance atmospheric control by clean gas source pressure adjusting pressuring valve, air supporting pressure adjusting pressuring valve, vacuum source pressure regulator valve,
Vacuum pressure sensor, multichannel vacuum district control hand-operated valve or electromagnetic valve, air supporting vacuum breaking electromagnetic valve, pressure release balanced solenoid valve
And at least one in current limliting hand-operated valve is constituted.
Air supporting vac sorb carrying device the most according to claim 4, it is characterised in that described lower work platforms and described
The upper non-one_to_one corresponding of conveyance platform.
Air supporting vac sorb carrying device the most according to claim 4, it is characterised in that lower work platforms is by lower table
Plate and leave from office base plate form, and described lower table plate and leave from office base plate form vacuum cavity.
Air supporting vac sorb carrying device the most according to claim 6, it is characterised in that described lower table pallet face sets
It is equipped with vacuum apertures or micropore.
Air supporting vac sorb carrying device the most according to claim 6, it is characterised in that described lower work platforms and on remove
Platform is sent to be provided with Fibre Optical Sensor and vacuum pressure sensor.
Air supporting vac sorb carrying device the most according to claim 4, it is characterised in that described pressure release balanced solenoid valve and
Current limliting hand-operated valve controls composition air supporting Stress control and overflow balance pressure release bypass.
Air supporting vac sorb carrying device the most according to claim 9, it is characterised in that also include electric proportional servo
Valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610753607.6A CN106115270B (en) | 2016-08-29 | 2016-08-29 | A kind of air bearing vacuum suction carrying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610753607.6A CN106115270B (en) | 2016-08-29 | 2016-08-29 | A kind of air bearing vacuum suction carrying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106115270A true CN106115270A (en) | 2016-11-16 |
| CN106115270B CN106115270B (en) | 2018-12-11 |
Family
ID=57272963
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610753607.6A Active CN106115270B (en) | 2016-08-29 | 2016-08-29 | A kind of air bearing vacuum suction carrying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106115270B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN107053037A (en) * | 2016-12-08 | 2017-08-18 | 广东工业大学 | Based on fuzzy control self-adaptive electromagnetic formula vacuum cup |
| CN107814199A (en) * | 2017-10-25 | 2018-03-20 | 郑州旭飞光电科技有限公司 | Airfloat equipment and its airflow guiding device and glass substrate transmission system |
| CN109375396A (en) * | 2018-11-30 | 2019-02-22 | 苏州威创达智能设备有限公司 | A kind of liquid crystal display panel conducting luminescence detection apparatus |
| CN109677929A (en) * | 2019-01-23 | 2019-04-26 | 彩虹（合肥）液晶玻璃有限公司 | A kind of air flowing type glass conveying device |
| CN112103206A (en) * | 2019-06-17 | 2020-12-18 | 上海微电子装备（集团）股份有限公司 | Workpiece transmission system, workpiece transmission method and laser annealing equipment |
| CN113084402A (en) * | 2021-04-08 | 2021-07-09 | 杭州瞩日能源科技有限公司 | Battery piece placing floating device |
| CN113602813A (en) * | 2021-08-10 | 2021-11-05 | 江苏科技大学 | Glass substrate air floatation device with deformation control function and control method |
| CN114634026A (en) * | 2022-03-31 | 2022-06-17 | 迅得机械（东莞）有限公司 | Automatic feeding and discharging device of air-floatation positioning type circuit board |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003023060A (en) * | 2001-07-10 | 2003-01-24 | Shimadzu Corp | Suspended type substrate holding apparatus and apparatus for manufacturing liquid crystal panel |
| CN101432236A (en) * | 2006-04-25 | 2009-05-13 | 旭硝子株式会社 | Method of bend forming of glass plate and glass plate bend forming apparatus |
| CN202492458U (en) * | 2011-10-28 | 2012-10-17 | 蔡少华 | Mobile glass sheet-taking and air-floatation table |
| CN205328207U (en) * | 2015-11-16 | 2016-06-22 | 钟伟 | Glass substrate's air supporting conveyer |
| CN206351951U (en) * | 2016-08-29 | 2017-07-25 | 北京京城清达电子设备有限公司 | A kind of air supporting vacuum suction carrying device |
-
2016
- 2016-08-29 CN CN201610753607.6A patent/CN106115270B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003023060A (en) * | 2001-07-10 | 2003-01-24 | Shimadzu Corp | Suspended type substrate holding apparatus and apparatus for manufacturing liquid crystal panel |
| CN101432236A (en) * | 2006-04-25 | 2009-05-13 | 旭硝子株式会社 | Method of bend forming of glass plate and glass plate bend forming apparatus |
| CN202492458U (en) * | 2011-10-28 | 2012-10-17 | 蔡少华 | Mobile glass sheet-taking and air-floatation table |
| CN205328207U (en) * | 2015-11-16 | 2016-06-22 | 钟伟 | Glass substrate's air supporting conveyer |
| CN206351951U (en) * | 2016-08-29 | 2017-07-25 | 北京京城清达电子设备有限公司 | A kind of air supporting vacuum suction carrying device |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107053037A (en) * | 2016-12-08 | 2017-08-18 | 广东工业大学 | Based on fuzzy control self-adaptive electromagnetic formula vacuum cup |
| CN106938785B (en) * | 2017-02-28 | 2022-07-19 | 江苏科技大学 | Glass substrate air floatation device with deformation detection function and detection method |
| CN106938785A (en) * | 2017-02-28 | 2017-07-11 | 江苏科技大学 | A kind of glass substrate air-floating apparatus and detection method with shape changing detection function |
| CN107814199A (en) * | 2017-10-25 | 2018-03-20 | 郑州旭飞光电科技有限公司 | Airfloat equipment and its airflow guiding device and glass substrate transmission system |
| CN107814199B (en) * | 2017-10-25 | 2023-11-07 | 日本电气硝子株式会社 | Air floatation device, air flow guiding device thereof and glass substrate conveying system |
| CN109375396A (en) * | 2018-11-30 | 2019-02-22 | 苏州威创达智能设备有限公司 | A kind of liquid crystal display panel conducting luminescence detection apparatus |
| CN109677929A (en) * | 2019-01-23 | 2019-04-26 | 彩虹（合肥）液晶玻璃有限公司 | A kind of air flowing type glass conveying device |
| CN112103206A (en) * | 2019-06-17 | 2020-12-18 | 上海微电子装备（集团）股份有限公司 | Workpiece transmission system, workpiece transmission method and laser annealing equipment |
| CN113084402A (en) * | 2021-04-08 | 2021-07-09 | 杭州瞩日能源科技有限公司 | Battery piece placing floating device |
| CN113084402B (en) * | 2021-04-08 | 2023-01-31 | 杭州瞩日能源科技有限公司 | Battery piece placing floating device |
| CN113602813A (en) * | 2021-08-10 | 2021-11-05 | 江苏科技大学 | Glass substrate air floatation device with deformation control function and control method |
| CN114634026A (en) * | 2022-03-31 | 2022-06-17 | 迅得机械（东莞）有限公司 | Automatic feeding and discharging device of air-floatation positioning type circuit board |
| CN114634026B (en) * | 2022-03-31 | 2024-04-16 | 迅得机械（东莞）有限公司 | Automatic feeding and discharging device of air-floatation positioning type circuit board |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106115270B (en) | 2018-12-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106115270A (en) | A kind of air supporting vac sorb carrying device | |
| JP3795907B2 (en) | Bonded substrate manufacturing apparatus and substrate bonding method | |
| CN101980935B (en) | Method and device for fixing and transporting impact-sensitive sheets in sputter feed systems | |
| TWI659462B (en) | Cutting or bonding device for substrate | |
| WO2010090147A1 (en) | Method for manufacturing electronic device and separation apparatus used therefor | |
| CN206351951U (en) | A kind of air supporting vacuum suction carrying device | |
| JP4549697B2 (en) | Film forming apparatus and film forming method | |
| CN101794077A (en) | Operating platform and method of automatically installing shims | |
| KR101947805B1 (en) | laminating apparatus | |
| JP2006178476A (en) | Manufacturing apparatus of aligned panel | |
| WO2016068050A1 (en) | Substrate suction device, substrate bonding device, substrate bonding method, and electronic device manufacturing method | |
| JP2007212572A (en) | Method and device for manufacturing laminated substrate | |
| CN101738870A (en) | Proximity exposure apparatus, method of delivering a mask of a proximity exposure apparatus and method of manufacturing a display panel substrate | |
| CN206818996U (en) | Display panel lighting system | |
| JP2004151325A (en) | Method of bonding substrates together | |
| JP2019016779A (en) | Plate retainer | |
| JP2006126862A (en) | Apparatus for manufacturing laminated substrate, and substrate lamination method | |
| KR200400671Y1 (en) | Auto prism sheet protective film peeler of backlight manufacturing apparatus for lcd | |
| TW201718427A (en) | Method for producing glass film, and method for producing electronic device including glass film | |
| KR101238992B1 (en) | Laminating apparatus | |
| KR102626399B1 (en) | Scribing apparatus | |
| KR102626398B1 (en) | Scribing apparatus | |
| JP2008122555A (en) | Optical film sticking method and device, and manufacturing method of display panel | |
| US20200105569A1 (en) | Methods for processing a substrate | |
| JP4118922B2 (en) | Bonded substrate manufacturing apparatus and bonded substrate manufacturing method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |