CN106104213B - Encoder and motor with encoder - Google Patents
Encoder and motor with encoder Download PDFInfo
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- CN106104213B CN106104213B CN201480077269.8A CN201480077269A CN106104213B CN 106104213 B CN106104213 B CN 106104213B CN 201480077269 A CN201480077269 A CN 201480077269A CN 106104213 B CN106104213 B CN 106104213B
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- 238000005259 measurement Methods 0.000 claims abstract description 101
- 238000009792 diffusion process Methods 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 abstract description 169
- 238000003491 array Methods 0.000 abstract description 108
- 238000001514 detection method Methods 0.000 abstract description 33
- 230000008859 change Effects 0.000 description 22
- 230000000694 effects Effects 0.000 description 19
- 239000000758 substrate Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 238000009826 distribution Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000012886 linear function Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 4
- 238000009966 trimming Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 230000005520 electrodynamics Effects 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012887 quadratic function Methods 0.000 description 3
- 230000032683 aging Effects 0.000 description 2
- 230000033228 biological regulation Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000012888 cubic function Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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Abstract
The present invention provides encoder and motor with encoder, it is possible to increase accuracy of detection.The encoder has：Along measurement direction (C) pattern (SA1, SA2)；The light source (131) of light is projected to pattern (SA1, SA2)；And arranged along measurement direction (C), receive and projected from light source (131) and by the light of pattern (SA1, SA2) reflection by optical arrays (PA1, PA2), by optical arrays (PA1, PA2) each with multiple photo detectors (P1~P9) include the 1st photo detector (P2~P8) of the point (Ps) with the tapered shape in end.
Description
Technical field
Embodiment disclosed in the present application is related to encoder and motor with encoder.
Background technology
In patent document 1, following such encoder is described：Definitely with multiple photo detectors point of photo detector group
The not separately detect optical signal from absolute pattern, the absolute pattern can pass through the position in the reflection gap in predetermined angular
Put combination and uniquely represent the absolute position of rotating disk.
Prior art literature
Patent document
Patent document 1：No. 4945674 publications of Japanese Patent Publication No.
The content of the invention
The invention problem to be solved
In the case of accuracy of detection being improved in above-mentioned encoder, it is desirable to the further optimization of apparatus structure.
The present invention be in view of such problem points and complete, its object is to provide that the coding of accuracy of detection can be improved
Device and motor with encoder.
Means for solving the problems
In order to solve above-mentioned problem, according to the viewpoint of the present invention, there is provided a kind of encoder, it has：Along measurement
The absolute pattern in direction；Light source, consist of to the absolute pattern and project light；Multiple photo detectors, they be configured to along
The measurement direction arrangement, receives the absolute pattern is projected and passed through from the light source or is reflected by the absolute pattern
Light, the multiple photo detector include the 1st photo detector, and the 1st photo detector has the point of the tapered shape in end.
In addition, another viewpoint according to the present invention, there is provided a kind of motor with encoder, it has motor and above-mentioned volume
Code device.
Invention effect
In accordance with the invention it is possible to improve accuracy of detection.
Brief description of the drawings
Fig. 1 is the explanation figure for being illustrated to the servo-drive system of an embodiment.
Fig. 2 is the explanation figure for being illustrated to the encoder of the embodiment.
Fig. 3 is the explanation figure for being illustrated to the disk of the embodiment.
Fig. 4 is the explanation figure for being illustrated to the pattern of the embodiment.
Fig. 5 is the explanation figure illustrated for the optical module to the embodiment and by optical arrays.
Fig. 6 is the explanation figure illustrated for the light action at the Section A-A to Fig. 4 and Fig. 5.
Fig. 7 is that the light intensity distributions of the reflected light on the substrate to the optical module of the embodiment illustrate
Illustrate figure.
Fig. 8 is the explanation figure that the shape and size of the photo detector of the embodiment are set for explanation.
Fig. 9 be for the photo detector to the rectangular shape without point in the case of analog detection signal change
Change the explanation figure that characteristic illustrates.
Figure 10 is for the variation characteristic progress to the analog detection signal in the case of the photo detector with point
The explanation figure of explanation.
Figure 11 be for the photo detector without point and with point the respective light light of photo detector
The explanation figure that the difference of the variation characteristic of amount illustrates.
Figure 12 is the saying of illustrating of shape for the multiple photo detectors being had by optical arrays to the embodiment
Bright figure.
Figure 13 be for being had by optical arrays in the light-receiving area identical variation to 3 photo detectors it is multiple by
The explanation figure that the shape of optical element illustrates.
Figure 14 be for being had by optical arrays in the light-receiving area identical variation to 7 photo detectors it is multiple by
The explanation figure that the shape of optical element illustrates.
Figure 15 be for all 9 photo detectors light-receiving area identical variation in had by optical arrays it is more
The explanation figure that the shape of individual photo detector illustrates.
Figure 16 is for the multiple light being had by optical arrays in the variation to being only made up of photo detector point
The explanation figure that the shape of element illustrates.
Figure 17 is more for being had by optical arrays in the different variations of light-receiving area to all 9 photo detectors
The explanation figure that the shape of individual photo detector illustrates.
Embodiment
Hereinafter, an embodiment is illustrated referring to the drawings.
In addition, the encoder of embodiments described below can be applied to rotary-type (rotation class) or linear pattern (straight line
Class) etc. various types of encoders.Hereinafter, in order that encoder is readily appreciated that, said by taking rotary-type encoder as an example
It is bright., can be by applying appropriate change for example by measurand from rotary-type when applied to other kinds of encoder
Disk is changed to linear linear scale etc. to realize, therefore detailed description will be omitted.
<1. servo-drive system>
First, reference picture 1 illustrates to the structure of the servo-drive system of the encoder with present embodiment.Such as Fig. 1 institutes
Show, servo-drive system S has servomotor SM and control device CT.Servomotor SM has encoder 100 and motor M.
Motor M is one of the power generating source for not including encoder 100.Motor M be rotor (omit diagram) relative to
The rotary-type motor that stator (omitting diagram) is rotated, is rotated to export by making to be fixed on the axle SH on rotor around axle center AX
Revolving force.
In addition, motor M monomers are also referred to as servomotor sometimes, but in the present embodiment, by including encoder 100
Structure is referred to as servomotor SM.That is, one of servomotor SM equivalent to motor with encoder.Hereinafter, say for convenience
It is bright, it is to be controlled as follow the situation of the servomotor of the desired value of position and speed etc. to say to motor with encoder
It is bright, but it is not limited to servomotor.As long as motor with encoder is attached to encoder, such as the output by encoder
Situation of display etc. is served only for, in addition to applied to the motor in the system beyond servo-drive system.
In addition, motor M is not particularly limited, as long as such as the electricity of the test position data of encoder 100 etc. can be utilized
Machine.In addition, motor M is not limited to the situation of the electrically electrodynamic machine as power source, such as can also be hydraulic pressure
Formula motor, pneumatic type motor, steam-type motor etc. have used the motor of other power sources.But for convenience of explanation, below,
The situation that motor M is electrodynamic machine is illustrated.
Encoder 100 is connected to the motor M axle SH side opposite with revolving force outlet side.But do not limit
For opposite side, encoder 100 can also be connected to axle SH revolving force outlet side.Encoder 100 is by detecting axle SH
The position of (rotor), motor M position (the also referred to as anglec of rotation) is detected, and export the position data for representing the position.
In addition, encoder 100 is not limited to situation about being directly connected to motor M, for example, can also via brake apparatus, decelerator,
Other mechanisms such as direction of rotation converter are attached.
Can also be that encoder 100 also detects motor M speed (also referred to as rotation speed in addition to motor M position
Degree, angular speed etc.) and motor M acceleration (also referred to as rotary acceleration, angular acceleration etc.) in it is at least one, or replace
Detected at least one in motor M speed and motor M acceleration for motor M position.In this case, such as can
To detect motor M speed and acceleration by waiting processing as follows, i.e.,：For in time to position carry out first differential or
Detection signal obtained from second-order differential (such as increment signal described later), carries out the counting of stipulated time.For convenience of explanation,
Hereinafter, the physical quantity that encoder 100 detects is illustrated for the situation of position.
Control device CT obtains the position data exported from encoder 100, and motor M is rotated into according to the position data
Row control.Therefore, in present embodiment of the electrodynamic machine as motor M is used, control device CT is according to position data pair
Curtage being applied on motor M etc. is controlled, and the thus rotation to motor M is controlled.In addition, control device CT
Also motor M can be controlled as follows, i.e.,：Upper control signal is obtained from host control device is (not shown), from
Motor M axle SH outputs can realize the revolving force of the position represented by the upper control signal etc..In addition, used in motor M
In the case of other power sources such as fluid pressure type, pneumatic type, steam-type, control device CT can pass through the supply to these power sources
It is controlled and is controlled come the rotation to motor M.
<2. encoder>
Then, the encoder 100 of present embodiment is illustrated.As shown in Fig. 2 encoder 100 has disk 110, light
Learn module 130 and position data generating unit 140.Encoder 100 is the light source 131 that optical module 130 possesses and by optical arrays
PA1, PA2 etc. are configured in the encoder of homonymy, so-called reflection-type relative to pattern SA1, SA2 of disk 110 etc..But
Encoder 100 be not limited to reflective encoder or light source 131 and by optical arrays PA1, PA2 etc. across disk 110 and
Configure the encoder in opposite side, so-called transmission-type.But for convenience of explanation, it is reflection to encoder 100 below
The situation of type encoder illustrates.
Here, the construction of encoder 100 for convenience of explanation, sets the direction such as upper and lower and is suitably used as follows.
In Fig. 2, by disk 110 in face of the direction of optical module 130 be Z axis forward direction be set as " on ", Z axis negative sense is set as " under ".No
Cross, the direction is changed with the setting form of the grade of encoder 100, not to the position relationship of each structure of encoder 100
It is defined.
(2-1. disks)
As shown in figure 3, disk 110 is formed as discoideus, it is configured as disk center O and axle center AX is substantially uniform.Disk 110 is connected
It is connected on motor M axle SH, is rotated by axle SH rotation.In addition, in the present embodiment, the rotation as measurement motor M
Turn measurand example, illustrated by taking discoideus disk 110 as an example, but such as can also use axle SH end face its
His part is as measurand.In addition, though in the example shown in Fig. 2, disk 110 is directly connected to axle SH, but can also be through
It is attached by connection members such as wheel hubs.
As shown in figure 3, disk 110 has multiple pattern SA1, SA2, SI.Disk 110 and motor M driving simultaneously rotates, but
Optical module 130 is configured as relative with a part for disk 110 and fixed.Therefore, pattern SA1, SA2, SI and optical mode
Block 130 is with motor M driving and each other in the measurement direction (direction of the arrow C shown in Fig. 3." measurement is suitably recited as below
Direction C ") on relatively move.
Here, when " measurement direction " refers to carry out optical measurement to each pattern for being formed at disk 110 using optical module 130
Measurement direction.In the rotary-type encoder that measurand as in this embodiment is disk 110, measurement direction and disk
110 circumferencial direction is consistent, still, such as in measurand is the linear pattern that linear scale and rotor move relative to stator
Encoder in, measurement direction is the direction along linear scale.
(2-2. optical de-tection means)
Optical de-tection means are made up of pattern SA1, SA2, SI and optical module 130 etc..
(2-2-1. patterns)
Each pattern is formed as track on the upper surface of disk 110, and the track is configured as the ring centered on disk center O
Shape.Each pattern has the complete cycle throughout track, multiple reflection gaps (Fig. 4 bend shadow parts arranged along measurement direction C
Point).The light that each reflection gap reflection is irradiated from light source 131.
Disk 110 is formed such as reflective material as metal.Also, pass through being reflected without light on the surface of disk 110
Part at using the relatively low material (such as chromium oxide etc.) of the configuration reflectivity such as coating, so as in the portion for being configured without the material
Office forms reflection gap.Alternatively, it is also possible to be, the part reflected by sputtering etc. without light turns into mat surface to drop
Antiradar reflectivity, so as to form reflection gap.
In addition, material and manufacture method for disk 110 etc. is not particularly limited.For example, it is also possible to by glass or transparent
The material of the transmitted lights such as resin forms disk 110.In this case, by reflective using the configuration such as evaporation on the surface of disk 110
Material (such as aluminium etc.), can be formed reflection gap.
In addition, in the case of the transmission-type encoder that encoder 100 is configured to above-mentioned, formed each on disk 110
Pattern has the complete cycle throughout track, the multiple transmission gaps arranged along measurement direction C.Each transmission gap is transmitted from light
The light that source 121 is irradiated.
In the upper surface of the disk 110 (direction of the arrow R shown in Fig. 3 in the width direction." width side is suitably recited as below
To R ".) it is set side by side with 3 patterns.In addition, the radial direction that " width " is graduated dial 110 substantially hangs down with measurement direction C
Straight direction, the width of the length along width R of each pattern equivalent to each pattern.3 patterns R in the width direction
Inner side is configured as concentric circles towards outside according to SA1, SI, SA2 order.It is more detailed in order to be carried out to each pattern
Illustrate, the partial enlarged drawing of the areas adjacent relative with optical module 130 of disk 110 is shown in Fig. 4.
(2-2-1-1. absolute patterns)
As shown in figure 4, pattern SA1, SA2 with multiple reflection gaps with along measurement direction C with absolute pattern
Mode is configured in the complete cycle of disk 110.One of these patterns SA1, SA2 equivalent to absolute pattern.
In addition, " absolute pattern " refers to such pattern：Have with optical module 130 described later relative by optical arrays
The position in the reflection gap in angle and ratio etc. uniquely determine in 1 rotation of disk 110.That is, for example, in Fig. 4 institutes
In the example for the absolute pattern shown, when motor M is in a certain angle position, according to the multiple light by optical arrays faced
Element each detect or undetected situation obtained from the combination of bit mode uniquely represent the exhausted of the angle position
To position.In addition, " absolute position " is relative to the angle position of origin in 1 rotation of graduated dial 110.Origin is set at disk
Appropriate angle position in 110 1 rotation, absolute pattern is formed on the basis of the origin.
In addition, according to the one of the pattern, such pattern can be generated：Utilize the photo detector quantity by optical arrays
Bit one-dimensionally represents motor M absolute position.However, absolute pattern is not limited to the example.For example, it is also possible to it is to utilize
The bit of photo detector quantity represents the pattern of motor M absolute position with carrying out multidimensional.In addition, except defined bit mode it
The physical quantitys such as light quantity and phase that outer or photo detector receives are changed in a manner of uniquely representing absolute position
Pattern, or pattern modulated to the coded sequence of absolute pattern etc., it can also be other various patterns.
In addition, in the present embodiment, identical absolute pattern is for example staggered 1/2 length of 1 bit on measurement direction C
The amount of degree, be formed as 2 patterns SA1, SA2.The spacing P in reflection gap of the offset for example equivalent to pattern SI half.
Assuming that in the case where being not configured to make pattern SA1, SA2 stagger in this wise, it is possible to following such situation occurs.That is, exist
During as in the present embodiment using one-dimensional absolute pattern representing absolute position, due to by each of optical arrays PA1, PA2
Photo detector is located near the end in reflection gap and in the region of the turning point of caused bit mode in face of ground, absolute position
Accuracy of detection be possible to decline.In the present embodiment, due to making pattern SA1, SA2 stagger, thus, for example in pattern SA1
Turning point of the absolute position equivalent to bit mode in the case of, calculated by using the detection signal from pattern SA2
Absolute position, or opposite to that carry out, it is possible to increase the accuracy of detection of absolute position.In addition, in such form, although
It is required that 2 light incomes by optical arrays PA1, PA2 are uniform, but in the present embodiment, due to by 2 by optical arrays PA1,
PA2 is configured to roughly equal from a distance from light source 131, therefore can realize said structure.
Alternatively, it is also possible to substitute the mode for making pattern SA1, SA2 each absolute pattern offset one from another, such as do not make definitely to scheme
Case offsets one from another, but makes and pattern SA1, SA2 are corresponding respectively is offset one from another by optical arrays PA1, PA2.
In addition, absolute pattern is not required to form 2,1 can also be only formed.But hereinafter, say for convenience
It is bright, the situation formed with two patterns SA1, SA2 is illustrated.
(2-2-1-2. increments pattern)
On the other hand, pattern SI with multiple reflection gaps by along measurement direction C with increment pattern in a manner of quilt
Configure the complete cycle in disk 110.
" increment pattern " refers to the pattern regularly repeated with regulation spacing as shown in Figure 4.Here, " spacing " refers to
The configuration space in each reflection gap in the pattern SI with increment pattern.As shown in figure 4, pattern SI spacing is P.With will be more
The situation whether individual photo detector detects represents the absolute pattern of absolute position difference respectively as bit, and increment pattern is
Every 1 spacing or the motor M in 1 spacing position are represented by the detection signal sum of photo detector more than at least one.
Therefore, although increment pattern is not used in the absolute position for representing motor M, but can be with very high precision compared with absolute pattern
To represent position.
In addition, in the present embodiment, the minimum length and figure of pattern SA1, SA2 reflection gap on measurement direction C
The spacing P in case SI reflection gap is consistent.As a result, the resolution ratio and pattern SI of the absolute signal based on pattern SA1, SA2
Reflection gap quantity it is consistent.However, minimum length is not limited to this example, it is preferred that pattern SI reflection gap
Quantity is set to identical with the resolution ratio of absolute signal or bigger than the resolution ratio of absolute signal.
(2-2-2. optical modules)
As shown in Figure 2 and Figure 5, optical module 130 is formed the one piece substrate BA parallel with disk 110.Thereby, it is possible to make
Encoder 100 is thinning, makes the manufacture of optical module 130 become easy.Therefore, as the rotation of disk 110, optical module 130 exist
Relatively moved on measurement direction C relative to pattern SA1, SA2, SI.In addition, optical module 130 is not necessarily to be configured to one
Block substrate BA, each structure can also be configured to polylith substrate.In this case, these substrates can be configured intensively.In addition,
Optical module 130 may not be substrate shape.
As shown in Figure 2 and Figure 5, optical module 130 has light source 131 and more on the substrate BA face relative with disk 110
It is individual by optical arrays PA1, PA2, PI1, PI2.
(2-2-2-1. light sources)
As shown in figure 3, light source 131 is configured in the opening position relative with pattern SI.Also, light source 131 is towards 3 patterns
The opposite segments of SA1, SA2, SI the process position relative with optical module 130 project light.
As light source 131, as long as it can be not particularly limited to the light source of irradiation area irradiation light, such as can
To use LED (Light Emitting Diode：Light emitting diode).As shown in fig. 6, light source 131 is specially constructed not match somebody with somebody
The spot light of optical lens etc. is put, diffusion light is projected from illuminating part.In addition, for " spot light ", it is not necessary to be strictly to anticipate
Point in justice, as long as in design or in operation principle, the light source that diffusion light is sent from the position of substantially point-like can be regarded as
Or light can be sent from limited exit facet.In addition, " diffusion light " is not limited to from spot light towards comprehensive hair
The light gone out, also include the light diffusely projected towards limited constant bearing.That is, as long as have than directional light diffusible
Light, it is included in diffusion light mentioned here.By using spot light in this wise, light source 131 can be to passing through relative position
3 patterns SA1, SA2, the SI put substantially uniformly irradiation lights.Further, since without optically focused/diffusion based on optical element,
Therefore error caused by optical element etc. is not allowed to be also easy to produce, it is possible to increase the straight trip of the light of directive pattern.
(magnifying power of 2-2-2-2. projection images)
It is multiple by optical arrays have be configured in around light source 131, receive the reflection gap by corresponding pattern respectively
Multiple photo detectors (Fig. 5 dot-hatched part) of the light of reflection.As shown in figure 5, multiple photo detectors are along measurement direction C
Arrangement.
As shown in fig. 6, the just diffusion light projected from light source 131.Therefore, the pattern being projected on optical module 130
Seem with corresponding to the regulation magnifying power ε of optical path length amplify after picture.That is, as shown in Fig. 4~Fig. 6, by pattern SA1,
Length on the respective width R of SA2, SI is set to WSA1, WSA2, WSI, by their reflected light on optical module 130
The length projected on the width R of obtained shape is set to WPA1, WPA2, WPI, then WPA1, WPA2, WPI length are
ε times of WSA1, WSA2, WSI.In addition, in the present embodiment, as shown in Figure 5 and Figure 6, show respectively by the light of optical arrays
The shape that length of the element on width R is set to project to obtain on optical module 130 with each gap is roughly equal
Example.However, the length on the width R of photo detector is not limited to this example.
Equally, the measurement direction C that the measurement direction C on optical module 130 also turns on disk 110 is projected in optical module
The shape that is obtained on 130, i.e. by magnifying power ε influence shape.In order to be readily appreciated that, as shown in Fig. 2 with light source 131
It is specifically described exemplified by the measurement direction C of opening position.Measurement direction C on disk 110 is the round shape centered on the AX of axle center.With
Relative, the measurement direction C being projected on optical module 130 center turns into is configured with position in the face of light source 131 with disk 110
Put the position that i.e. optical centre Op has separated distance ε L.Distance ε L are the distance between axle center AX and optical centre Op L to amplify
Distance after rate ε is exaggerated.The position is schematically illustrated as measuring center Os in fig. 2.Therefore, on optical module 130
Measurement direction C be in centered on measuring center Os, using distance ε L as on the line of radius, wherein, the measuring center Os exists
Towards axle center AX directions on line residing for optical centre Op and axle center AX, distance ε L have been separated with optical centre Op.
In Fig. 4~Fig. 6, by the respective measurement direction C of line Lcd, Lcp indicating panel 110 and optical module 130 of arc-shaped
Corresponding relation.Line Lcd shown in Fig. 4 etc. represents the line along the measurement direction C on disk 110, on the other hand, shown in Fig. 5 etc.
Line Lcp represent line (line Lcd be projected on optical module 130 line) along the measurement direction C on substrate BA.
As shown in fig. 6, the gap length between optical module 130 and disk 110 is being set into G, by light source 131 from substrate BA
Overhang be set to △ d in the case of, magnifying power ε following (formula 1) is represented.
ε=(2G- Δs d)/(G- Δs d) ... (formula 1)
(2-2-2-3. is definitely with, increment by optical arrays)
As each photo detector, such as photodiode can be used.Each photo detector is respectively formed as having rule
Determine the shape of light-receiving area, and export the light summation (hereinafter referred to as " light light quantity ") with being received in its whole light-receiving area
The analog detection signal of corresponding size.But as photo detector, photodiode is not limited to, as long as it can receive
From light source 131 project light and be converted to the photo detector of electric signal, be not particularly limited.
Present embodiment is accordingly configured by optical arrays and 3 patterns SA1, SA2, SI.By optical arrays PA1 by structure
The light reflected by pattern SA1 as reception, it is configured to receive the light reflected by pattern SA2 by optical arrays PA2.In addition, light
Array PI1, PI2 are configured to receive the light reflected by pattern SI.Although by optical arrays PI1 and by optical arrays PI2 in midway quilt
Segmentation, but correspond to same track.So, it is corresponding with 1 pattern to be not limited to 1 or multiple by optical arrays.
Light source 131 and the position relationship shown in Fig. 5 is configured as by optical arrays PA1, PA2.That is, it is corresponding with absolute pattern
By optical arrays PA1, PA2 between in a manner of light source 131 points 2 groups configure the position mutually staggered on width R side by side
Put place.In this example, inner circumferential side is configured in by optical arrays PA1, outer circumferential side is configured in by optical arrays PA2, by optical arrays
The distance between PA1, PA2 and light source 131 are roughly equal.It is to pass through light source 131 (in optics respectively by optical arrays PA1, PA2
Heart Op) and the line Lo parallel with Y-axis centered on be in the symmetrical shape of line.Also, by optical arrays PA1, PA2 have it is multiple (
It is, for example, 9 in present embodiment) photo detector arranges respectively along measurement direction C (line Lcp) with constant spacing.In addition, this
The shape of multiple photo detectors will be described below.
In the present embodiment, as the exemplified one-dimensional pattern of absolute pattern.Therefore, it is corresponding with the pattern by
Optical arrays PA1, PA2 have multiple (being, for example, 9 in present embodiment) light members along measurement direction C (line Lcp) arrangements
Part, to receive respectively by the light of corresponding pattern SA1, SA2 reflection gap reflection.As described above, in this multiple photo detector
In, the light of each photo detector or non-light are handled as bit, represent the absolute position of 9 bits.Multiple light
What element each received put in data generating section 140 (with reference to figure 2) in place by optical signal is processed independently of each other, according to these
Combined by optical signal, the absolute position that (coding) is encrypted according to serial bit pattern is decoded.By these by optical arrays
PA1, PA2's is referred to as " absolute signal " by optical signal.In addition, in the situation using the absolute pattern different from present embodiment
Under, turned into structure corresponding with its pattern by optical arrays PA1, PA2.In addition, by optical arrays PA1, PA2 photo detector having
Quantity can also be the quantity beyond 9, and the bit number of absolute signal is also not limited to 9.
Light source 131 and the position relationship shown in Fig. 5 is configured as by optical arrays PI1, PI2.That is, it is corresponding with increment pattern
Configured by optical arrays PI1, PI2 on measurement direction C in a manner of light source 131 between.Specifically, by optical arrays PI1,
PI2 is configured as symmetrical in line by symmetry axis of above-mentioned line Lo.Light source 131 is configured between by optical arrays PI1, PI2, should be by
Optical arrays PI1, PI2 are configured as a track on measurement direction C.
There are the multiple photo detectors arranged along measurement direction C (line Lcp) by optical arrays PI1, PI2, to receive respectively
The light reflected by corresponding pattern SI reflection gap.These photo detectors be of similar shape respectively (in this example for
It is generally rectangular).
In the present embodiment, 1 spacing (1 spacing in the picture of projection of pattern SI increment pattern.That is ε × P.)
Inside it is arranged with including adding up to the group (being expressed as in Figure 5 " group ") of 4 photo detectors, also, is also arranged with along measurement direction C
Multiple groups for including 4 photo detectors.Also, because increment pattern every 1 spacing has been concatenated to form reflection gap, therefore respectively
Photo detector generates the periodic signal of 1 cycle (electrical angle is 360 °) in the case where disk 110 rotates in 1 spacing.And
And due to being configured with 4 photo detectors in equivalent to the 1 of 1 spacing group, therefore photo detector adjacent in 1 group exports that
It is increment phase signals that this, which has the periodic signal of 90 ° of phase differences,.Each increment phase signals are referred to as A+ phase signals, B+ phase signals (phases
Phase difference for A+ phase signals is 90 °), A- phase signals (phase difference relative to A+ phase signals is 180 °), B- phase signals (phases
Phase difference for B+ phase signals is 180 °).
Because increment pattern represents the position in 1 spacing, therefore the signal and therewith of its value and each phase in 1 group
The signal of each phase in other corresponding groups similarly changes.Therefore, the signal of same phase is added in multiple groups.Cause
This, detects that phase staggers 90 ° of 4 signals one by one from multiple photo detectors by optical arrays PI shown in Fig. 5.Therefore, from
Phase is generated respectively by optical arrays PI1, PI2 one by one to stagger 90 ° of 4 signals.This 4 signals are referred to as " increment signal ".
In addition, in the present embodiment, to include 4 light members in 1 group of 1 spacing equivalent to increment pattern
Part, and each had a case that mutually isostructural group illustrates for one with by optical arrays PI2 by optical arrays PI1, but 1 group
In photo detector quantity be not particularly limited, such as can be 1 group and include 2 photo detectors etc..In addition, by optical arrays
PIL, PIR overall photo detector quantity is also not limited to the example shown in Fig. 5 etc..Alternatively, it is also possible to be configured to, by optical arrays
PI1, PI2 obtain respectively out of phase by optical signal.
In addition, it is corresponding with increment pattern by optical arrays be not limited to as by optical arrays PI1, PI2 with interval
The mode for light source 131 configures the form of 2.For example, it is also possible to the outer circumferential side or inner circumferential in light source 131 are measured and put along measurement
1 of direction C is by optical arrays.Furthermore it is also possible to the different increment pattern of resolution ratio is formed on multiple tracks of disk 110, and
And set corresponding with each track multiple by optical arrays.
Hereinbefore, the overview by optical arrays is illustrated.Then, each to being had by optical arrays PA1, PA2
Before shape of photo detector etc. illustrates, the position data generating unit 140 in remaining structure is illustrated.
(2-3. position datas generating unit)
On the opportunity that position data generating unit 140 measures in the absolute position to motor M, obtained from optical module 130
Increment signal and two absolute signals, described two absolute signals have the bit mode for representing the 1st absolute position respectively, described
The phase that increment signal includes staggers 90 ° of 4 signals one by one.Also, position data generating unit 140 is according to the signal obtained,
Calculate the 2nd absolute position of the motor M represented by these signals, and the position data for the 2nd absolute position that expression is calculated
It is output to control device CT.
In addition, the generation method for the position data that position data generating unit 140 is carried out can use a variety of methods, not
It is particularly limited to.Here, entered in case of calculating absolute position according to increment signal and absolute signal and generating position data
Row explanation.
Position data generating unit 140 is converted to carrying out binaryzation respectively from the absolute signal by optical arrays PA1, PA2
Represent the bit data of absolute position.Also, according to the corresponding relation between bit data set in advance and absolute position, really
Fixed 1st absolute position.That is, " the 1st absolute position " mentioned here refer to be superimposed increment signal before low resolution it is absolute
Position.On the other hand, in 4 respective increment signals of phase by optical arrays PI1, PI2, there is 180 ° of phase differences
Increment signal is subtracted from one another.By subtracting each other in this wise to the signal with 180 ° of phase differences, can offset in 1 spacing
Reflect foozle and the measurement error in gap etc..Here, by it is above-mentioned subtracted each other like that after the signal of result be referred to as " the
1 increment signal " and " the 2nd increment signal ".1st increment signal and the 2nd increment signal have the phase that electrical angle is 90 ° each other
Difference (is referred to as merely " A phase signals ", " B phase signals " etc.).Therefore, position data generating unit 140 determines 1 according to this 2 signals
Position in individual spacing.Method for determining position in 1 spacing is not particularly limited.Periodic signal is used as example, working as
Increment signal be sine wave signal in the case of, as one of above-mentioned determination method, have by 2 to A phases and B phases just
The result of calculation of being divided by of string ripple signal carries out arctan computings to calculate electrical angle φ method.Or there is also use tracking electricity
The method that 2 sine wave signals are converted to electrical angle φ by road.Or determined and A phases and B also in the form of pre-production
Electrical angle φ method corresponding to the value of the signal of phase.In addition now, position data generating unit 140 is preferably believed according to each detection
Number to 2 sine wave signals of A phases and B phases carry out analog-digital conversion.
Position data generating unit 140 is superimposed true according to increment signal at the 1st absolute position determined according to absolute signal
Position in 1 fixed spacing.Thereby, it is possible to calculate high the 2nd exhausted in 1st absolute position of the resolution ratio based on absolute signal
To position.Position data generating unit 140 carries out multiplication processing in the 2nd absolute position to so calculating and further increased
After resolution ratio, control device CT is output to as the position data for representing high-precision absolute position.
(2-4. is definitely with the shape of each photo detector by optical arrays)
Then, the shape of each photo detector to being had by optical arrays PA1, PA2 illustrates.
Assuming that the diffusion light irradiated from light source 131 is all reflected on disk 110 and is irradiated to the substrate of optical module 130
During BA, as shown in fig. 7, the intensity distribution of reflected light turns into point with the concentric circles for being away from optical centre Op and decaying
Cloth.In addition, the broken circle in Fig. 7 represents the isophote of reflected light, closer to inner circumferential side, luminous intensity is higher, closer to outer circumferential side
Luminous intensity is lower.The reason for luminous intensity on reflected light is distributed as concentric circles in this wise, on the one hand it is because light has
The property to decay with optical path length, on the other hand it is because employing in the irradiation space of the diffusion light from light source 131
In (in reflection space), the structure that is received using the plane substrate BA vertical with optical axis.It is it should be noted that actual
Upper reflected light is irradiated in the region corresponding with each pattern SA1, SA2, SI of disk 110 on substrate BA.
Also, as described above, definitely respectively in by optical arrays PA1, PA2, along using measuring center Os as in curvature
The line Lcp of the arc-shaped of the heart is configured with multiple photo detectors, and on the other hand, optical centre Op is configured in be divided with measuring center Os
From remote position.Therefore, by optical arrays PA1, PA2 each photo detector luminous intensity on measurement direction C according to and light source
131 distance and change.To being specifically described by optical arrays PA2, as described above, being centered on line Lo by optical arrays PA2
Line symmetric shape, therefore for the luminous intensity of each optical element, the photo detector P5 highests on line Lo, and according to from
The orders of line Lo from the near to the remote, i.e., according to photo detector P4, P6, photo detector P3, P7, photo detector P2, P8, photo detector
P1, P9 order, symmetrically reduced in line.It is also same by optical arrays PA1.Further, since by optical arrays PA1 and by optical arrays
PA2 is arranged side by side between in a manner of light source 131, thus by optical arrays PA1, PA2 each photo detector luminous intensity all
The highest at the end Eo of light source side, with the end En of the opposite side of light source 131 at it is minimum.
Here, each photo detector in the present embodiment, such as by photodiode formed basis as described above
The overall light light quantity of its light-receiving area and export the detection signal of the analogue value.Also, light light quantity is in light-receiving area
Respectively the light quantity after adding up is carried out by the luminous intensity at luminous point.Therefore, the distribution of above-mentioned luminous intensity is different between photo detector
In the case of, even if respective light-receiving area is identical, light light quantity is also different, and the change of analog detection signal is special between photo detector
Property is also different.In this case, the change moment of two-value signal staggers between these photo detectors, it is therefore possible to
Cause the error detection of absolute position.And in order that between photo detector the change moment of two-value signal do not stagger, can also examine
Consider and accordingly adjust threshold value for being converted to two-value signal with the variation characteristic of each photo detector, but circuit structure and
Signal transacting can become complicated, turn into the factor for causing cost increase etc..
On the other hand, also contemplate using following means：To respective measurement direction C or width R between photo detector
On appearance and size be adjusted and change light-receiving area, make light light quantity uniform.However, changing the measurement of each photo detector
In the case of appearance and size on the C of direction, the interval between adjacent photo detector is uneven, thus these photo detectors that
Between this, the amount of crosstalk leaked mutually due to the influence of diffusing reflection etc., received is uneven, as a result there is a possibility that light light quantity not
Uniformly.In addition, in the case of appearance and size on the width R for changing each photo detector, the length of width is shorter
Photo detector, the dislocation of reflected light in the direction of the width caused by the easier bias by as disk 110 influenceed, it is possible to
Generation error detection.
Therefore in the present embodiment, by optical arrays PA1 and by optical arrays PA2 each in, the measurement of each photo detector
The maximum appearance and size in maximum appearance and size and width R on the C of direction is set to be equal to each other, and from light source
The different photo detector of 131 distance is formed configurations differing from one so that respective light light quantity is equal to each other.Separately
Outside, outside dimension mentioned here and such record of light light quantity " equal " are not proper equal, but are permitted
Perhaps design is upper, the tolerance in manufacture, error, and expression is substantial equal.In addition, " light light quantity " mentioned here is each
Photo detector receives maximum light light quantity during reflected light with respective whole light-receiving area.
In the present embodiment, one of shape as condition as realization is more in by optical arrays PA1, PA2
Part or all in individual photo detector is respectively formed as the shape with the point of the tapered shape in end.Point
Position is not particularly limited, and in the present embodiment, has a case that point enters in measurement direction C end to photo detector
Row explanation.Here, to carry out more specific description in by optical arrays PA1, PA2 exemplified by by optical arrays PA2.In addition, for by
For optical arrays PA1, due to its except on width R turn into in addition to by the symmetrical shape this point of optical arrays PA2, with
It is identical by optical arrays PA2 shapes, therefore omit the description.
(2-4-1. has illustrating for the shape of the photo detector of point)
Carried out in fig. 8 by taking the shape of a photo detector P6 in 9 photo detectors being had by optical arrays PA2 as an example
Enlarged representation.With reference to the Fig. 8 being set for specifically to the shape and size of each several part of the photo detector with point
It is bright.
Said on outline, photo detector P6 shape is the shape after the corner of the quadrilateral shape to based on is trimmed
Shape.Quadrilateral shape based on this is that the length on measurement direction C is that TPA2 (is pattern SA2 reflection gap in this example
Measurement direction C on minimum length P (basic bit length) ε times of length), the length on width R is WPA2's
Rectangular shape.In the arbitrary photo detector P1~P9 being had by optical arrays PA2, the rectangular shape based on being somebody's turn to do measures
The maximum appearance and size WPA2 on maximum appearance and size TPA2 and width R on the C of direction is jointly set as equal.Separately
Outside, the quadrilateral shape based on above-mentioned need not be relative two sides it is strictly parallel each other, it is not required that each corner is
Strict right angle, as long as essentially quadrangular shape.
In addition, " trimming " here refers to a corner for above-mentioned quadrilateral shape, fallen with defined inclination angle
Angle.Also, in each in photo detector P6 measurement direction C both ends Ec, Er, to respectively be located at end Ec,
The trimming at inclination angle, is consequently formed the general triangular that summit is located on the end Ec, Er as defined in 2 corners progress on Er
The above-mentioned point Ps of shape.In addition, in the present embodiment, because each photo detector is symmetric shape on measurement direction C, because
This 1 photo detector P6 both ends Ec, Er each on form above-mentioned point Ps, and these points Ps
Measurement direction size TPs can be set to that identical size d1, the maximum appearance and size on photo detector P6 measurement direction C
(i.e. distance between each point Ps at both ends summit) is maintained length TPA2.In addition, by from the end Eo of the side of light source 131
Width size untill point Ps summit is set to Wo, by from the end En with 131 opposite side of light source to point
In the case that width size untill Ps summit is set to Wn, total Wo+Wn of these width sizes is equal to light
Maximum appearance and size WPA2 on the width R of element.In addition, basically, both ends Ec, Er on measurement direction C are each
From width size Wo be equal to each other, width size Wn is also equal each other.Thus, photo detector P6 be formed with
By the measuring center Os and line Loc of measurement direction C center be symmetry axis and on the symmetrical hexagons of measurement direction C
Shape.
As long as in addition, the shape that point Ps shape end is tapered, in addition to above-mentioned triangle, such as
Can also be trapezoidal shape, the arc-shaped with circularity.In addition, point Ps can also be based on quadrilateral shape angle
Method beyond the trimming in portion is formed.
In addition, for photo detector equal total TPs+TPs of point Ps measurement direction size each other for, can
To say that the light-receiving area of these photo detectors is also equal.In other words, if TPs+TPs photo detector measurement direction C most
It is shared in big appearance and size TPA2 to be in equal proportions, then it may be said that light-receiving area is also equal.
In addition, hereinafter, also by the photo detector at measurement direction C both ends Ec, Er with point, change speech
TPs+TPs value more than 0 photo detector (being in this example photo detector P2~P8) be referred to as " the 1st photo detector ".In addition,
Also by any one end in both ends Ec, Er all photo detector of the quadrilateral shape without point Ps, in other words TPs
The photo detector (being in this example photo detector P1, P9) that+TPs is essentially 0 (d1=0) is referred to as " the 2nd photo detector ".
Also, as above it is illustrated in fig. 7 like that, the luminous intensity of each photo detector highest at the end Eo of light source side,
It is minimum with the end En of 131 opposite side of light source.Therefore, even in the identical i.e. light-receiving area phases of TPs+TPs between photo detector
Together, position of the point Ps summit on width R from light source 131 remote (width size Wo large percentage) by
Optical element can make light light quantity relatively reduced.Conversely, point Ps summit is closely located to light source on width R
The photo detector of 131 (width size Wn large percentages) can make light light quantity is relative to increase.
In addition, as being equally illustrated in Figure 7, for the light of multiple photo detector P1~P9 by optical arrays PA2
It is higher close to the photo detector of light source 131, luminous intensity on substrate BA closer to line Lo for intensity；Further away from line
Lo is that the photo detector away from light source 131, luminous intensity are lower on substrate BA.Therefore, in the present embodiment, positioned at from
Light source 131 most far from 2 photo detectors P1, P9 by above-mentioned 2nd photo detector maximum as light-receiving area, other
Photo detector P2~P8 as above-mentioned 1st photo detector, light member is adjusted on the basis of photo detector P1, P9 light light quantity
Part P2~P8 shape so that as identical light light quantity.
Thus, for example can be the shape shown in Fig. 5, Fig. 7 by optical arrays PA2 multiple photo detector P1~P9 shape
State.In addition, width size d1, d2 in following explanation is illustrated in Figure 12 described later.That is, positioned at the 2 of most both ends
Individual photo detector P1, P9 are the 2nd photo detectors of the quadrilateral shape not being trimmed to about completely.And in photo detector P1, P9
2 photo detectors P2, P8 of side are the tips for having at both ends Ec, Er smaller width size TPs (=d2)
1st photo detector of portion Ps roughly the same shape.Also, 2 photo detectors P3, P7 on the inside of photo detector P2, P8
It is the roughly the same shape of the point Ps with bigger width size TPs (=d1) at both ends Ec, Er
1st photo detector.Also, 2 photo detectors P4, P6 on the inside of photo detector P3, P7 are also to have at both ends Ec, Er
There is the 1st photo detector of bigger width size TPs (=d1) point Ps roughly the same shape.It is in addition, tight
By on the inside of photo detector P4, P6 and close to the photo detector P5 of light source 131 be also that there is bigger width at both ends Ec, Er
Spend direction size TPs (=d1) point Ps the 1st photo detector.
In addition, in this example, configured in by optical arrays PA2 9 photo detector P1~P5, close to light source 131 5 by
Optical element P3~P7 above-mentioned TPs+TPs is equal, i.e., light-receiving area is equal.Form these photo detectors P3~P7 photo detector
P3~P5 and photo detector P5~P7 is equivalent to from multiple 1st light that different and area is equal to each other with a distance from light source 131
One of element.Also, between photo detector P3~P7 of these area equations, it is set as：Connect on measurement direction C
The photo detector of close to sources 131, the position of point Ps summit on width R are more remote from light source 131.In other words, more
It is to be set bigger close to the 1st photo detector of light source 131, above-mentioned width size Wo ratio on measurement direction C.
Specifically, the position on photo detector P4, P6 point Ps summit is more remote from light source 131 than photo detector P3, P7, photo detector
The position on P5 point Ps summit is more remote from light source 131 than photo detector P4, P6.
Also, it is in this example, light for the 1st photo detector in photo detector P1~P9, area is different from each other
For element P2, P3 and photo detector P7, P8, got on measurement direction C close to the photo detector of light source 131, TPs+TPs
Greatly.Specifically, TPs+TPss (=2 × D2) of the photo detector P3 TPs+TPs (=2 × D1) than photo detector P2 greatly, equally,
TPs+TPss (=2 × D2) of the photo detector P7 TPs+TPs (=2 × D1) than photo detector P8 is big.In addition, for light member
For part P2, P3 and photo detector P7, P8, the width position on point Ps summit is identical.These photo detectors P2, P3
One of multiple 1st photo detectors different equivalent to from a distance from light source and different from each other area with photo detector P7, P8.
In addition, it is not limited to the above situation by the form of optical arrays PA2 multiple photo detector P1~P9 shape.Example
Such as, it by photo detector P1, the P9 at optical arrays PA2 both ends can also be have point Ps the 1st photo detector.In addition, by
The quantity for the photo detector that area in optical element P1~P9 is equal to each other can also be the quantity outside above-mentioned 5, Suo Youshou
The area of optical element can also be different from each other.In addition, the above-mentioned point Ps for the 1st photo detector that area is equal to each other summit
The above-mentioned TPs+TPs of the relation and area of position the 1st photo detector different from each other relation can also be the above situation with
Outer form.But, in the present embodiment, it is that the situation of above-mentioned shape is illustrated for convenience of description.
As can be seen here, for by optical arrays PA1 and by optical arrays PA2 each for, enable to the survey of each photo detector
The maximum appearance and size in maximum appearance and size and width R on amount direction C is equal to each other, while causes respective light
Light quantity is equal to each other.
In addition, the 1st photo detector has above-mentioned point Ps, thus, its detection signal is being converted into two-value signal
When can obtain favourable effect.Hereinafter, the effect is described in detail.
(effect of point when 2-4-2. two-value signals are changed)
First, as comparative example, the situation with reference to figure 9 to the photo detector PD ' of the rectangular shape without point Ps
Under the variation characteristic of analog detection signal illustrate.In the Fig. 9, relative to the photo detector PD ' of rectangular shape, come from
The processes of the shadow surface Rs of the reflected light in the reflection gap that pattern SA1, SA2 have over time are along measurement direction C according to position
Put sequentially travelling for X1~X11.In addition, shadow surface Rs be on width R than photo detector PD ' greatly, on measurement direction C
With the rectangular shape of photo detector PD ' formed objects.In addition, the distribution for the luminous intensity being set to here in shadow surface Rs is uniform
's.These positions X1~X11 is corresponded respectively to, photo detector PD' light light quantity is with such variation characteristic shown in thick line VX
And change over time.
In this case, shadow surface is played at the time of the position X2 that shadow surface Rs is overlapping with photo detector PD'
Untill at the time of Rs and photo detector PD' completely overlapped position X6, light light quantity is increased monotonically according to linear function.Also,
From the light light quantity maximum position X6 at the time of play the shadow surface Rs position X10s no longer overlapping with photo detector PD' when
Untill quarter, light light quantity is according to linear function monotone decreasing.
In contrast, the analog detection signal in the case of the photo detector PD with point Ps is shown in Figure 10
Variation characteristic.In addition, in the Figure 10, in order to be readily appreciated that, it is illustrated that photo detector PD is from two tips of the 1st photo detector
The situation that portion Ps vertex is only formed with the half part of end En sides.In addition, same as above, shadow surface Rs is in width side
It is bigger than photo detector PD on to R, on measurement direction C with photo detector PD size identical rectangular shapes, in shadow surface Rs
Luminous intensity is evenly distributed.In the Figure 10, relative to photo detector PD, shadow surface Rs processes over time and according to position
In the case of the sequentially travelling of Y1~Y11, corresponding to each position Y1~Y11, photo detector PD light light quantity is with thick line VY institutes
Show such variation characteristic and change over time.
In this case, shadow surface Rs is played at the time of the position Y2 that shadow surface Rs is overlapping with photo detector PD
With the point Ps of end Ec sides at the time of completely overlapped position Y3 untill, light light quantity (can also be according to quadratic function
Multiple function more than cubic function) increase.Also, from the position Y3 at the time of play shadow surface Rs and end Er sides tip
In (linearly interval 1 in Figure 11 described later being referred to during untill at the time of portion Ps starts overlapping position Y5), light light quantity
It is increased monotonically according to linear function.Also, from the position Y5 at the time of to play shadow surface Rs and photo detector PD completely overlapped
Untill at the time of the Y6 of position, light light quantity increases according to quadratic function.So far, from above-mentioned position Y3 at the time of to upper rheme
The time rate of change (inclination of curve) of light light quantity is maximum in a period of untill at the time of putting Y5.Also, from light light quantity most
Untill at the time of playing the shadow surface Rs position X10s no longer overlapping with photo detector PD at the time of big position Y6, with it is above-mentioned with
The change of time is relatively symmetrically reduced.During this period, from position no longer overlapping with the point Ps of end Ec sides shadow surface Rs
Phase untill being played at the time of Y7 at the time of shadow surface Rs is overlapping with the point Ps's of end Er sides to start reduced position Y9
Between (with reference to the linearly interval 2 in Figure 11 described later) in, light light quantity is according to linear function monotone decreasing, the time of light light quantity
Rate of change (inclination of curve) is maximum.
Here, as shown in figure 11, to respective light light quantity in the case of photo detector PD ' situation and photo detector PD
Variation characteristic be compared.In addition, in the Figure 11, in order to easily compare, if respective light-receiving area is equal, with uniform
The irradiation light of illuminated identical luminous intensity is distributed, and the maximum light light quantity in respective variation characteristic is equal.
All it is overlapping with shadow surface Rs for any of photo detector PD ', PD in the Figure 11
At the time of region reaches i.e. above-mentioned Fig. 9, Figure 10 position X4, X8, Y4, Y8 at the time of the half of light-receiving area, light light quantity into
For the half of maximum light light quantity, respective characteristic line VX, VY intersect.For the analog detection signal from photo detector to be turned
Be changed to two-value signal threshold value be preferably set to the maximum light light quantity half value.However, for example due to light source 131
Chronological aging and manufacture individual difference caused by irradiation light luminous intensity variation, or photo detector with the time
Aging and manufacture individual difference caused by the variation of receiving sensitivity etc., threshold value is special relative to the change of light light quantity sometimes
Property and relative variability.The variation of the threshold value is in the amplitude of fluctuation centered on the half i.e. a reference value of above-mentioned maximum light light quantity
Changed in the range of △ T, but in the case of photo detector PD ', because variation characteristic is according to linear function increase and decrease,
Therefore the change moment of two-value signal changes according to corresponding amplitude of fluctuation △ tx.
In contrast, it is as described above benchmark in the half of maximum light light quantity in the case of photo detector PD
Around value, tilt to characteristic curve amplitude peak., can be by two-value signal accordingly, with respect to the amplitude of fluctuation △ T of threshold value
The change moment variation be suppressed to much than photo detector PD ' in the case of the small amplitudes of fluctuation of above-mentioned amplitude of fluctuation △ tx
△ty.Thus, the 1st photo detector of present embodiment is formed as the shape with point Ps, thus by its analog detection
When signal is converted to two-value signal, there is the effect for inhibiting the influence caused by the variation of threshold value.
<3. the example of the effect of present embodiment>
In the embodiment described above, encoder 100 has by optical arrays PA1, PA2, and they are along measurement direction C
Arrangement, receive the light for projecting from light source 131 and being reflected by pattern SA1, SA2.Also, these are had by optical arrays PA1, PA2
Multiple photo detectors (being photo detector P1~P9 in the example that Fig. 5 etc. is shown) include the point with the tapered shape in end
Ps the 1st photo detector (being photo detector P2~P8 in the example that Fig. 5 etc. is shown).Thus, the shape to point Ps is passed through
Shape and size etc. are adjusted, and can adjust the light light quantity of the 1st photo detector.Thereby, it is possible to cause multiple photo detectors each
From light light quantity it is uniform, therefore can make each bit accuracy of detection uniformly and suppress the error detection of absolute position, can
Improve accuracy of detection.Further, since the processing that the signal output of each photo detector need not be adjusted, and each light member
Part can jointly use the threshold value that the analog signal from photo detector is converted to two-value signal, therefore can make circuit
Structure simplifies.
In addition, (it is light in the example that Fig. 5 etc. is shown for the 2nd photo detector without point (quadrangle)
Element P1, P9) for, because measurement direction C edge is parallel with width R directions, thus pattern by when signal output
Change is in the monotone increasing and monotone decreasing (referring to above-mentioned Fig. 9) of linear function.On the other hand, with point Ps the 1st by
Optical element in measurement direction C edge relative to the inclined shape of width, therefore pattern by when signal output change
Change the increase and reduction in quadratic function, the intensity of variation (can make inclination precipitous) of the signal output of Near Threshold can be increased
(referring to above-mentioned Figure 10).Thus, reduce relative to the phase deviation of threshold variation, therefore in the case of threshold variation,
Also it is difficult to the detection error (referring to above-mentioned Figure 11) for producing absolute position.
In addition, in the present embodiment, there is point Ps in measurement direction C end in the 1st photo detector
Under, following such effect can be obtained.That is, by the way that point Ps to be arranged on to measurement direction C end Ec, Er, can make
Obtaining the half of the width R of the 1st photo detector each side of both ends Eo, En turns into generally trapezoidal shape.Thus, with by tip
Portion Ps is arranged on width R end Eo, En situation, and (in this case, the time rate of change of light light quantity is maximum
Region is a little) compare, the big section of the intensity of variation of the signal output of above-mentioned Near Threshold (point → line can be increased；Reference chart
Each linearly interval in 11).As a result, it is smaller relative to the phase deviation of threshold variation, therefore can further improve phase
For the robustness of threshold variation.
In addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 are (in the example that Fig. 5 etc. is shown
It is photo detector P1~P9 in son) maximum on maximum appearance and size TPA2 and width R on respective measurement direction C is outer
Shape size WPA2 is equal to each other, and the photo detector different from a distance from light source 131 has configurations differing from one so that each
From light light quantity be equal to each other.In this case, following such effect can be obtained.That is, due to each photo detector
Measurement direction C on maximum appearance and size TPA2 be equal to each other, therefore between each photo detector can be made on measurement direction C
Every generally uniform.Thereby, it is possible to cause the amount of crosstalk between each photo detector adjacent on measurement direction C uniform, therefore can
Further improve the uniformity of the light light quantity of each photo detector.In addition, easily carry out removing from the signal of each photo detector
The processing of noise caused by crosstalk.
In addition, for example shortening the situation of the length WPA2 on the width R of photo detector with close to light source 131
Under, the shorter photo detector of length on width R, by mistake of the light caused by the bias of disk 110 on width R
The influence of position is bigger, easier generation detection error.In the present embodiment, due to making on the width R of each photo detector
Maximum appearance and size WPA2 be equal to each other, therefore can reduce it is above-mentioned it is eccentric caused by influence, exist even in disk 110 eccentric
In the case of, it is also difficult to produce the detection error of absolute position.
In addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 are included from light source 131
Multiple 1st photo detectors (being photo detector P3~P7 in the example that Fig. 5 etc. is shown) that distance difference and area are equal to each other.
In this case, following such effect can be obtained.That is, due to being tied in the 1st photo detector that is equal to each other in area
Electric capacity (electrostatic capacitance) is equal, therefore the response speed of each 1st photo detector can be made uniform.The result is that, it is possible to increase electricity
The accuracy of detection of absolute position during machine M high speed rotation.
In addition, in the present embodiment, in multiple photo detectors for being had by optical arrays PA1, PA2, area each other
Equal multiple 1st photo detectors (being photo detector P3~P7 in the example that Fig. 5 etc. is shown), point Ps measurement direction
Total TPs+TPs of size is equal to each other, also, on measurement direction C close to the 1st photo detector of light source 131, tip
Position of the portion Ps summit on width R directions is more remote from light source 131.In this case, can obtain following such
Effect.That is, because light is decayed with optical path length, therefore projected and by the photograph of the light of pattern SA1, SA2 reflection from light source 131
Penetrating intensity turns into centered on light source 131 and from the distribution of the more remote concentric circles for decaying more of light source 131.Such
In light intensity distributions, the 1st photo detector of light source 131 is nearer it is to, the width position on point Ps summit is from light source
131 is more remote, for the 1st photo detector away from light source 131, it can be ensured that the relatively large region of luminous intensity
Light-receiving area, and enable to：The 1st photo detector of light source 131 is nearer it is to, is gradually reduced the relatively large area of luminous intensity
The light-receiving area in domain.Therefore, it is possible to cause the area of each photo detector uniformly and the homogenization of light light quantity can be realized.
In addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 are included in measurement direction C
On configured between in a manner of the 1st photo detector, (Fig. 5 etc. is shown for 2 the 2nd photo detectors without point Ps
Example in be photo detector P1, P9).In this case, following such effect can be obtained.That is, without tip
Portion Ps the 2nd photo detector is bigger than the area of the 1st photo detector with point Ps.Therefore, by will be farthest from light source 131
Opening position the both ends by optical arrays PA1, PA2 photo detector as the 2nd photo detector, and between them configure the 1st
Photo detector, can by optical arrays PA1, PA2 each among ensure the overall light light of multiple photo detectors to greatest extent
Amount, and the light light quantity of each photo detector can be made uniform.
In addition, in the present embodiment, the 2nd photo detector (being photo detector P1, P9 in the example that Fig. 5 etc. is shown) is in
Quadrilateral shape, the 1st photo detector (being photo detector P2~P8 in the example that Fig. 5 etc. is shown) are to repair the corner of quadrilateral shape
Shape after cutting.In this case, following such effect can be obtained.That is, for each 1st photo detector, only
Area and position of trimming etc. are adjusted on the basis of the quadrilateral shape of the 2nd photo detector, therefore the 1st light can be made first
The design of the shape of part becomes easy.
In addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 are included from light source 131
Multiple 1st photo detectors that distance is different and area is different from each other (are photo detector P2, P3 in the example that Fig. 5 etc. is shown
With photo detector P7, P8), in different multiple 1st photo detectors of the area, close to light source 131 on measurement direction C
The 1st photo detector, total TPs+TPs of point Ps measurement direction size is set bigger.In this case,
Following such effect can be obtained.That is, in above-mentioned light intensity distributions, the 1st photo detector of light source 131 is nearer it is to, point
End Ps measurement direction size is bigger, thus, nearer it is to the 1st photo detector of light source 131, can make its light-receiving area by
It is decrescence small.Therefore, it is possible to make the light light quantity of each photo detector uniform.
In addition, in the present embodiment, each multiple photo detectors by optical arrays PA1, PA2 are formed with across light source
2 groups of 131 mode point configures the opening position mutually to stagger on width R side by side.In this case, can obtain with
Lower such effect.That is, definitely figure is being corresponded to due to the multiple photo detectors (such as by optical arrays PA2) by optical arrays
Turning point of case etc. and in the case of causing the reliability decrease of detection signal, can use from another by the more of optical arrays
The detection signal of individual photo detector (such as by optical arrays PA1), or carry out in contrast to this.Thereby, it is possible to improve light member
The reliability of the detection signal of part, it is possible to increase the accuracy of detection of absolute position.
In addition, in the present embodiment, encoder 100 is configured to the encoder of reflection-type, wherein, light source 131 is to figure
Case SA1, SA2 projects the spot light of diffusion light, and pattern SA1, SA2 are the patterns reflected the light projected by light source 131, by
Optical arrays PA1, PA2 multiple photo detectors receive the light reflected by pattern SA1, SA2.In this case, can obtain
Such effect below.That is, in the encoder of reflection-type, make to come from pattern by using the spot light for spreading light is projected
The light quantity distribution of SA1, SA2 reflected light easily becomes the ladder further expanded from the irradiation area corresponding to pattern SA1, SA2
Shape shape, therefore crosstalk is easily produced between adjacent photo detector on measurement direction C.Therefore, it is possible to make amount of crosstalk uniform
This structure changed is more efficient in the case of the encoder applied to reflection-type.In addition, the coding by being configured to reflection-type
It device, can will be configured to by optical arrays PA1, PA2 multiple photo detector P1~P9 close to light source 131, therefore coding can be made
Device 100 minimizes.
<4. variation etc.>
Above, an embodiment is illustrated in detail referring to the drawings.However, the scope of technological thought is obvious
It is not limited to embodiment described herein.As long as the people with the general knowledge in the technical field belonging to embodiment
Member, it can expect carrying out various changes, amendment and combination in the range of the technological thought that claims are described
Deng this is obvious.Therefore, the technology after these changes, amendment and combination etc. has been carried out falls within skill certainly
The scope of art thought.Hereinafter, such variation is illustrated in order.In addition, in the following description, for it is above-mentioned
Embodiment identical part add same-sign, suitably omit the description.
The form of above-mentioned embodiment is not limited to by the shape of optical arrays PA1, PA2 each photo detector, can also
Consider other various forms.Hereinafter, using Figure 12~Figure 17, the deformation to the shape of these photo detectors illustrates.Separately
Outside, in Figure 12~Figure 17, the shape of each photo detector by optical arrays PA2 is illustrate only, omits and illustrates for other structures.
In addition, actually each photo detector is configured and (configured along measurement direction C) along arc-shaped line Lcp, but in Figure 12~Figure 17, it is
The shape relation being readily appreciated that between each photo detector, with the configuration of straight line schematically shows each photo detector.
(the shape of the photo detector of 4-1. embodiments：Photo detector of the same area is the situation of 5)
In order to compare, figure 12 illustrates the shape of each photo detector by optical arrays PA2 of above-mentioned embodiment.
In this example, 2 photo detectors P1, P9 positioned at the both ends by optical arrays PA2 are the 2nd photo detectors without point Ps,
The 1st photo detector P2~P8 with point Ps is configured between them.Also, the 1st photo detector P3~P7 smooth surface
Product is equal, in these the 1st photo detector P3~P7, nearer it is to the 1st photo detector of light source 131, point Ps summit
Width position it is more remote from light source 131.In addition, for area the 1st photo detector P2, P2 different from each other and the 1st light
Element P7, P8, add up on measurement direction C close to the photo detector of light source 131, point Ps measurement direction size
TPs+TPs is bigger.In this example, point Ps measurement direction size TPs is set as 2 kinds, and d1 is more than d2.
In addition, for the maximum profile in the maximum appearance and size and width R on the measurement direction C of each photo detector
Size is equal to each other, and the photo detector different from a distance from light source 131 has different shape so that respective light each other
Light quantity is equal to each other this point, in each variation that will be discussed below and same.
(4-2. photo detectors of the same area are the situation of 3)
It can also be the shape shown in Figure 13.In this example, point Ps measurement direction size TPs is set as 3 kinds, d2
Further it is more than d2 more than d3, d1.Also, for 3 the 1st photo detector P4~P6, light-receiving area is equal, these
In 1 photo detector P4~P6, nearer it is to the 1st photo detector of light source 131, the width position on point Ps summit from
Light source 131 is more remote.In addition, for area the 1st photo detector P2~P4 and the 1st photo detector P6~P8 different from each other,
It is bigger close to the photo detector of light source 131, TPs+TPs on measurement direction C.In addition, for the 1st photo detector P2, P3
For the 1st photo detector P7, P8, the width position on point Ps summit is identical.In this variation, it can also obtain
Obtain and above-mentioned embodiment identical effect.
(4-3. photo detectors of the same area are the situation of 7)
In addition it is also possible to it is the shape shown in Figure 14.In this example, point Ps measurement direction size TPs is set
It is a kind of for only d1.Also, for 7 the 1st photo detector P2~P8, light-receiving area is equal, in these the 1st photo detector P2
In~P8, the 1st photo detector of light source 131 is nearer it is to, the width position on point Ps summit is got over from light source 131
Far.In addition, in this variation, area the 1st photo detector different from each other is configured without.In this variation, it can also obtain
Obtain and above-mentioned embodiment identical effect.
(photo detectors all 4-4. is situation of the same area)
Alternatively, it is also possible to being the shape shown in Figure 15.In this example, all photo detector P1~P9 are to have tip
Portion Ps the 1st photo detector, it is configured without the 2nd photo detector without point Ps.In addition, point Ps measurement direction
Size TPs is set to only d1 one kind.Also, for all 1st photo detector P1~P9, light-receiving area is equal, at this
In a little 1st photo detector P1~P9, the 1st photo detector of light source 131, the width position on point Ps summit nearer it is to
Put more remote from light source 131.In addition, in this variation, area the 1st photo detector different from each other is also configured without.In this change
In shape example, it can also obtain and above-mentioned embodiment identical effect.
(4-5. is only made up of the situation of photo detector point)
Alternatively, it is also possible to being the shape shown in Figure 16.In this example, all photo detector P1~P9 are only by point Ps
Form.That is, the measurement direction size TPs of point Ps is set to only d1 one kind, and photo detector P1~P9 is that d1 is maximum
Appearance and size TPA2 half.Also, for all 1st photo detector P1~P9, light-receiving area is equal, these the 1st
In photo detector P1~P9, nearer it is to the 1st photo detector of light source 131, the width position on point Ps summit from
Light source 131 is more remote.In addition, in this variation, area the 1st photo detector different from each other is also configured without.In this variation
In, it can also obtain and above-mentioned embodiment identical effect.
(the different situation of the area of photo detectors all 4-6.)
Alternatively, it is also possible to being the shape shown in Figure 17.In this example, 2 photo detectors P1, P9 positioned at both ends are that do not have
There is point Ps the 2nd photo detector.Also, point Ps measurement direction size TPs is set to 4 kinds, and d3 is more than d4, d2
Further it is more than d3, d1 is further more than d2.Also, all photo detector P1~P9 light-receiving area is different from each other.Also,
In light-receiving area the 1st photo detector P2~P8 different from each other, close to the light member of light source 131 on measurement direction C
Part, TPs+TPs are bigger.In addition, the 1st photo detector P2~P8 be point Ps summit width position it is identical.
In this variation, it can also obtain and above-mentioned embodiment identical effect.
In addition, in the above description, exist " vertical ", " it is parallel ", in the case of the contents such as " plane ", the record
Content is not proper concept.That is, these " vertical ", " it is parallel ", " plane " allow to deposit in design with manufacture
Tolerance and error, represent " substantial orthogonality ", " substantial parallel ", " being essentially plane ".
In addition, in the above description, the record such as apparent size or shape " identical ", " equal ", " difference " be present
In the case of content, the contents are not proper concept.That is, these " identical ", " equal ", " difference " allow to deposit
In design with the tolerance and error in manufacture, " substantially the same ", " being substantially equal ", " being different in essence " are represented.
Label declaration
S：Servo-drive system；SM：Servomotor；CT：Control device；M：Motor；SH：Axle；100：Encoder；110：Disk；
130：Optical module；131：Light source；140：Position data generating unit；SA 1、SA 2、SI：Pattern；PA1、PA2：By optical arrays；
PI1、PI2：By optical arrays；P1、P2、P3、P4、P5、P6、P7、P8、P9：Photo detector；C：Measurement direction；R：Width；
AX：Rotary shaft；O：Disk center；Op：Optical centre；Lcd、Lcp、Lo、Loc：Line；BA：Substrate.
Claims (9)
1. a kind of encoder, wherein, the encoder has：
Along the absolute pattern of measurement direction；
Light source, consist of to the absolute pattern and project light；
Multiple photo detectors, they are configured to arrange along the measurement direction, receive and projected from the light source and described in passing through
Absolute pattern or the light reflected by the absolute pattern,
Characterized in that,
Maximum appearance and size in the multiple respective measurement direction of photo detector and vertical with the measurement direction
Width on maximum appearance and size be equal to each other, also, the photo detector different from a distance from the light source that
This has different shapes so that and respective light light quantity is equal to each other,
The multiple photo detector includes the 1st photo detector, and the 1st photo detector has end in the end of the measurement direction
Hold the point of tapered shape.
2. encoder according to claim 1, wherein,
The multiple photo detector is included from multiple 1st light that different and area is equal to each other with a distance from the light source
Element.
3. encoder according to claim 2, wherein,
For multiple 1st photo detectors that area is equal to each other,
The total of measurement direction size of the point is equal to each other, also, in the measurement direction close to described
The 1st photo detector of light source, the position of the summit of the point on the width are more remote from the light source.
4. encoder according to claim 3, wherein,
The multiple photo detector is included in the measurement direction to be configured between in a manner of the 1st photo detector
, 2 the 2nd photo detectors without the point.
5. encoder according to claim 4, wherein,
2nd photo detector is in quadrilateral shape,
1st photo detector is in the shape after the corner of the quadrilateral shape is trimmed to about.
6. the encoder described in any one in Claims 1 to 5, wherein,
The multiple photo detector is included from multiple 1st light different and different from each other area with a distance from the light source
Element,
In different multiple 1st photo detectors of the area, close to the institute of the light source in the measurement direction
State the 1st photo detector, the measurement direction size of the point it is total bigger.
7. encoder according to claim 1, wherein,
The multiple photo detector divides 2 groups in a manner of across the light source and configured side by side vertical with the measurement direction
The opening position mutually to stagger on width.
8. encoder according to claim 1, wherein,
The light source is the spot light for being configured to project diffusion light to the absolute pattern,
The absolute pattern is the pattern for being configured to reflect the light projected by the light source,
The multiple photo detector is configured to receive the light reflected by the absolute pattern.
9. a kind of motor with encoder, wherein,
The motor with encoder has：
Motor；And
The encoder described in any one in claim 1~8.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2014/082598 WO2016092639A1 (en) | 2014-12-09 | 2014-12-09 | Encoder and encoder-equipped motor |
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| Publication Number | Publication Date |
|---|---|
| CN106104213A CN106104213A (en) | 2016-11-09 |
| CN106104213B true CN106104213B (en) | 2018-02-13 |
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| JP (1) | JP6037258B2 (en) |
| CN (1) | CN106104213B (en) |
| WO (1) | WO2016092639A1 (en) |
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| JP2019158850A (en) * | 2018-03-16 | 2019-09-19 | 富士電機株式会社 | Reflection type encoder |
| CN109737998B (en) * | 2018-12-29 | 2021-11-19 | 苏州汇川技术有限公司 | Encoder electric tuning method, device and storage medium |
| JP7520595B2 (en) | 2019-07-05 | 2024-07-23 | キヤノン株式会社 | Optical encoder and drive control device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103348219A (en) * | 2011-02-10 | 2013-10-09 | 株式会社安川电机 | Encoder, optical module and servo system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6073418A (en) * | 1983-09-30 | 1985-04-25 | Yokogawa Hokushin Electric Corp | Displacement transducer |
| JPH0360019U (en) * | 1989-10-14 | 1991-06-13 | ||
| JPH11183201A (en) * | 1997-12-19 | 1999-07-09 | Yaskawa Electric Corp | Encoder |
| JP4437340B2 (en) * | 1998-12-22 | 2010-03-24 | 株式会社ミツトヨ | Photoelectric encoder |
| JP3695398B2 (en) * | 2002-01-30 | 2005-09-14 | 富士ゼロックス株式会社 | Optical encoder and encoder scale |
| US6972402B2 (en) * | 2002-06-03 | 2005-12-06 | Mitsubishi Denki Kabushiki Kaisha | Photoelectric rotary encoder |
| CN1601232A (en) * | 2003-09-27 | 2005-03-30 | 光栅科技有限公司 | Light source for optical encoder |
| JP4951885B2 (en) * | 2005-06-29 | 2012-06-13 | ミツミ電機株式会社 | Encoder device |
| JP4945674B2 (en) * | 2010-11-08 | 2012-06-06 | 株式会社安川電機 | Reflective encoder, servo motor and servo unit |
| JP5979033B2 (en) * | 2013-02-13 | 2016-08-24 | 株式会社ニコン | Encoder |
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2014
- 2014-12-09 CN CN201480077269.8A patent/CN106104213B/en active Active
- 2014-12-09 JP JP2016537031A patent/JP6037258B2/en active Active
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| CN103348219A (en) * | 2011-02-10 | 2013-10-09 | 株式会社安川电机 | Encoder, optical module and servo system |
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| JPWO2016092639A1 (en) | 2017-04-27 |
| CN106104213A (en) | 2016-11-09 |
| JP6037258B2 (en) | 2016-12-07 |
| WO2016092639A1 (en) | 2016-06-16 |
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