CN106104213A - encoder and motor with encoder - Google Patents
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- CN106104213A CN106104213A CN201480077269.8A CN201480077269A CN106104213A CN 106104213 A CN106104213 A CN 106104213A CN 201480077269 A CN201480077269 A CN 201480077269A CN 106104213 A CN106104213 A CN 106104213A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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Abstract
The present invention provides encoder and motor with encoder, it is possible to increase accuracy of detection.This encoder has: along the pattern (SA1, SA2) measuring direction (C)；Light source (131) to pattern (SA1, SA2) injection light；And along measuring direction (C) arrangement, receive from light source (131) injection the light that reflected by pattern (SA1, SA2) by optical arrays (PA1, PA2), the multiple photo detectors (P1～P9) each being had by optical arrays (PA1, PA2) include having the 1st photo detector (P2～P8) of the point (Ps) of the tapered shape of end.
Description
Technical field
Embodiment disclosed in the present application relates to encoder and motor with encoder.
Background technology
In patent documentation 1, describe following such encoder: definitely divide with multiple photo detectors of photo detector group
The most separately detect optical signal from absolute pattern, described absolute pattern can be by the position in the reflection gap in predetermined angular
Put combination and represent the absolute position of rotating disk uniquely.
Prior art literature
Patent documentation
Patent documentation 1: No. 4945674 publications of Japanese Patent Publication No.
Summary of the invention
The problem that invention is to be solved
In the case of improving accuracy of detection in above-mentioned encoder, it is desirable to the further optimization of apparatus structure.
The present invention completes in view of such problem points, its object is to provide the coding that can improve accuracy of detection
Device and motor with encoder.
For solving the means of problem
In order to solve above-mentioned problem, according to a viewpoint of the present invention, it is provided that a kind of encoder, it has: along measurement
The absolute pattern in direction；Light source, consists of and penetrates light to described absolute pattern；Multiple photo detectors, they be configured to along
Described measurement direction arranges, and receives and penetrates and pass through described absolute pattern from described light source or reflected by described absolute pattern
Light, the plurality of photo detector includes that the 1st photo detector, described 1st photo detector have the point of the tapered shape of end.
It addition, according to another viewpoint of the present invention, it is provided that a kind of motor with encoder, it has motor and above-mentioned volume
Code device.
Invention effect
In accordance with the invention it is possible to raising accuracy of detection.
Accompanying drawing explanation
Fig. 1 is the explanatory diagram for illustrating the servosystem of an embodiment.
Fig. 2 is the explanatory diagram for illustrating the encoder of this embodiment.
Fig. 3 is the explanatory diagram for illustrating the dish of this embodiment.
Fig. 4 is the explanatory diagram for illustrating the pattern of this embodiment.
Fig. 5 is for the optical module of this embodiment and the explanatory diagram that illustrated by optical arrays.
Fig. 6 is the explanatory diagram that the light action at the Section A-A to Fig. 4 and Fig. 5 illustrates.
Fig. 7 is that the light intensity distributions of the reflection light on the substrate to the optical module of this embodiment illustrates
Explanatory diagram.
Fig. 8 is the explanatory diagram that the shape and size of the photo detector to this embodiment are set for explanation.
Fig. 9 is the change of the analog detection signal in the case of the photo detector to the rectangular shape without point
Change the explanatory diagram that characteristic illustrates.
Figure 10 is for carrying out the variation characteristic of the analog detection signal having in the case of the photo detector of point
The explanatory diagram illustrated.
Figure 11 is for not having the photo detector of point and having the photo detector respective light light of point
The explanatory diagram that the difference of the variation characteristic of amount illustrates.
Figure 12 is for saying of illustrating the shape of the multiple photo detectors being had by optical arrays of this embodiment
Bright figure.
Figure 13 be in the variation identical to the light-receiving area of 3 photo detectors had by optical arrays multiple be subject to
The explanatory diagram that the shape of optical element illustrates.
Figure 14 be in the variation identical to the light-receiving area of 7 photo detectors had by optical arrays multiple be subject to
The explanatory diagram that the shape of optical element illustrates.
Figure 15 be in the variation identical to the light-receiving area of whole 9 photo detectors had by optical arrays many
The explanatory diagram that the shape of individual photo detector illustrates.
Figure 16 is the multiple light being had by optical arrays in the variation being only made up of photo detector point
The explanatory diagram that the shape of element illustrates.
Figure 17 be in the variation different to the light-receiving area of whole 9 photo detectors had by optical arrays many
The explanatory diagram that the shape of individual photo detector illustrates.
Detailed description of the invention
Hereinafter, referring to the drawings an embodiment is illustrated.
It addition, the encoder of embodiments described below can be applied to rotary-type (rotation class) or linear type (straight line
Class) etc. various types of encoders.Hereinafter, in order to make encoder easy to understand, say as a example by rotary-type encoder
Bright.When being applied to other kinds of encoder, can by apply appropriate change such as by measurand from rotary-type
Dish is changed to linear linear scale etc. and realizes, therefore detailed.
1. servosystem
First, the structure with reference to the servosystem of the Fig. 1 encoder to having present embodiment illustrates.Such as Fig. 1 institute
Showing, servosystem S has servomotor SM and controls device CT.Servomotor SM has encoder 100 and motor M.
Motor M is not include the example that the power of encoder 100 produces source.Motor M be rotor (omit diagram) relative to
Stator (omitting diagram) carries out the rotary-type motor rotated, and exports by making the axle SH being fixed on rotor rotate around axle center AX
Revolving force.
It addition, the most also motor M monomer to be referred to as servomotor, but in the present embodiment, encoder 100 will be included
Structure is referred to as servomotor SM.That is, servomotor SM is equivalent to an example of motor with encoder.Hereinafter, say for convenience
Bright, it is that the situation of the servomotor of the desired value being controlled as follow position and speed etc. is said to motor with encoder
Bright, but it is not limited to servomotor.As long as motor with encoder is attached to encoder, such as by the output of encoder
It is served only for the situation etc. of display, also includes the motor being applied in the system beyond servosystem.
It addition, motor M is not particularly limited, as long as encoder 100 such as can be utilized to detect the electricity of position data etc.
Machine.It addition, motor M is not limited to the situation of the electrodynamic machine by being electrically used as power source, such as, can also be hydraulic pressure
Formula motor, pneumatic type motor, steam type motor etc. employ the motor of other power sources.But, for convenience of explanation, below,
The situation that motor M is electrodynamic machine is illustrated.
Encoder 100 is connected to the side contrary with revolving force outlet side of the axle SH of motor M.But, do not limit
For contrary side, encoder 100 can also be connected to the revolving force outlet side of axle SH.Encoder 100 is by detection axle SH
The position of (rotor), detects the position (the also referred to as anglec of rotation) of motor M, and exports the position data representing this position.
It addition, encoder 100 is not limited to situation about being directly connected to motor M, such as can also via brake unit, decelerator,
Other mechanisms such as direction of rotation transducer are attached.
Can also be that encoder 100 also detects the speed of motor M in addition to the position of motor M and (also referred to as rotates speed
Degree, angular velocity etc.) and the acceleration (also referred to as rotary acceleration, angular acceleration etc.) of motor M at least one, or replace
At least one in the speed of motor M and the acceleration of motor M is detected for the position of motor M.In this case, such as may be used
With by the following speed and the acceleration that wait process to detect motor M, it may be assumed that in time position is carried out first differential or
Second-order differential and the detection signal (increment signal the most described later) that obtains, carry out the counting of stipulated time.For convenience of explanation,
Hereinafter, the situation that physical quantity is position of encoder 100 detection is illustrated.
Control device CT and obtain the position data from encoder 100 output, according to this position data, motor M is rotated into
Row controls.Therefore, in using the electrodynamic machine present embodiment as motor M, control device CT according to position data pair
The curtage etc. being applied on motor M is controlled, and thus the rotation to motor M is controlled.Additionally, control device CT
It also is able to as follows motor M is controlled, it may be assumed that obtain upper control signal from host control device (not shown), from
The axle SH output of motor M is capable of the revolving force of this position etc. represented by upper control signal.It addition, use at motor M
In the case of other power sources such as fluid pressure type, pneumatic type, steam type, controlling device CT can be by the supply to these power sources
It is controlled the rotation of motor M is controlled.
2. encoder
Then, the encoder 100 of present embodiment is illustrated.As in figure 2 it is shown, encoder 100 has dish 110, light
Learn module 130 and position data generating unit 140.Encoder 100 is the light source 131 that possesses of optical module 130 and by optical arrays
PA1, PA2 etc. are configured in homonymy, the encoder of so-called reflection-type relative to pattern SA1, SA2 etc. of dish 110.But,
Encoder 100 is not limited to reflective encoder, it is also possible to be light source 131 and by optical arrays PA1, PA2 etc. across dish 110
It is arranged in opposition side, the encoder of so-called transmission-type.But, for convenience of explanation, below, it is reflection to encoder 100
The situation of type encoder illustrates.
Here, the structure of encoder 100 for convenience of explanation, set the direction such as upper and lower as follows and be suitably used.?
In Fig. 2, the direction i.e. Z axis forward of optical module 130 faced by dish 110 is set as " on ", Z axis negative sense is set as D score.No
Crossing, the direction is as arranging form and changing of encoder 100 grade, not the position relationship to each structure of encoder 100
It is defined.
(2-1. dish)
As it is shown on figure 3, dish 110 is formed as discoideus, it is configured to disk center O substantially uniform with axle center AX.Dish 110 is connected
It is connected on the axle SH of motor M, is rotated by the rotation of axle SH.It addition, in the present embodiment, as the rotation measuring motor M
The example of measurand turned, illustrates as a example by discoideus dish 110, but such as can also use the end face of axle SH etc. its
His parts are as measurand.Although it addition, in the example shown in Fig. 2, dish 110 is directly connected to axle SH but it also may warp
It is attached by connection members such as wheel hubs.
As it is shown on figure 3, dish 110 has multiple pattern SA1, SA2, SI.Dish 110 simultaneously rotates with the driving of motor M, but
Optical module 130 is configured to relative with a part for dish 110 and is fixed.Therefore, pattern SA1, SA2, SI and optical mode
Block 130 is measuring the (direction of the arrow C shown in Fig. 3, direction each other along with the driving of motor M.Hereinafter suitably it is recited as " measuring
Direction C ") upper relative movement.
Here, when " measurement direction " refers to utilize optical module 130 that each pattern being formed at dish 110 is carried out optical measurement
Measurement direction.Measurand as in this embodiment be dish 110 rotary-type encoder in, measure direction and dish
The circumferencial direction of 110 is consistent, but, such as at the linear type that measurand is linear scale and rotor moves relative to stator
Encoder in, measure direction be the direction along linear scale.
(2-2. optical de-tection means)
Optical de-tection means is made up of pattern SA1, SA2, SI and optical module 130 etc..
(2-2-1. pattern)
Each pattern is formed as track on the upper surface of dish 110, and described track is configured to the ring centered by disk center O
Shape.Each pattern has the complete cycle throughout track, along multiple reflection gaps (Fig. 4 bend shadow part measuring direction C arrangement
Point).The light that each reflection gap reflection is irradiated from light source 131.
Dish 110 is such as formed by reflective materials such as metals.Further, luminous reflectance is not carried out by the surface at dish 110
Part at utilize the relatively low material (such as chromium oxide etc.) of the configuration reflectance such as coating, thus in the portion being configured without this material
Office forms reflection gap.Alternatively, it is also possible to be, make the part not carrying out luminous reflectance become matsurface by sputtering etc. and drop
Antiradar reflectivity, thus form reflection gap.
It addition, be not particularly limited for the material of dish 110 and manufacture method etc..For example, it is also possible to by glass or transparent
The material formation dish 110 of the transmission light such as resin.In this case, by utilizing the configurations such as evaporation reflective on the surface of dish 110
Material (such as aluminum etc.), it is possible to formed reflection gap.
It addition, in the case of encoder 100 is configured to above-mentioned transmission-type encoder, be formed on dish 110 is each
Pattern has the complete cycle throughout track, along the multiple transmission gaps measuring direction C arrangement.Each transmission gap transmission is from light
The light that source 121 is irradiated.
Upper surface (the direction of the arrow R shown in Fig. 3 in the width direction at dish 110.Hereinafter " width side suitably it is recited as
To R ".) it is set side by side with 3 patterns.It addition, " width " be graduated dial 110 radial direction i.e. with measure direction C the most vertical
Straight direction, the length along this width R of each pattern is equivalent to the width of each pattern.3 pattern R's in the width direction
Inner side, towards outside, is configured to concentric circles according to the order of SA1, SI, SA2.In order to each pattern is carried out in more detail
Illustrate, Fig. 4 shows the partial enlarged drawing of the areas adjacent relative with optical module 130 of dish 110.
(2-2-1-1. absolute pattern)
As shown in Figure 4, multiple reflection gaps that pattern SA1, SA2 has are to have absolute pattern along measurement direction C
Mode is configured in the complete cycle of dish 110.These patterns SA1, SA2 are equivalent to an example of absolute pattern.
It addition, " absolute pattern " refers to such pattern: relative by optical arrays with what optical module 130 described later had
The position in the reflection gap in angle and ratio etc. are well-determined in 1 rotation of dish 110.I.e., such as, in Fig. 4 institute
In the example of the absolute pattern shown, when motor M is in a certain angle position, according to faced by the multiple light by optical arrays
Element each detect or undetected situation and the combination of bit mode that obtains represents the exhausted of this angle position uniquely
To position.It addition, " absolute position " is the interior angle position relative to initial point of 1 rotation of graduated dial 110.Initial point is set at dish
Appropriate angle position in 1 rotation of 110, forms absolute pattern on the basis of this initial point.
It addition, according to an example of this pattern, such pattern can be generated: utilize the photo detector quantity by optical arrays
Bit represents the absolute position of motor M one-dimensionally.But, absolute pattern is not limited to this example.For example, it is also possible to be to utilize
The bit of photo detector quantity represents the pattern of the absolute position of motor M with carrying out multidimensional.It addition, except regulation bit mode it
Outward, it is also possible to be the light quantity that receives of photo detector and the physical quantity such as phase place changes in the way of representing absolute position uniquely
Pattern, or the pattern etc. that the coded sequence of absolute pattern is modulated, it is also possible to be other various patterns.
It addition, in the present embodiment, identical absolute pattern is such as staggered 1/2 length of 1 bit measuring on the C of direction
The amount of degree, is formed as 2 patterns SA1, SA2.This offset is such as equivalent to the half of spacing P in the reflection gap of pattern SI.
Assume in the case of being not configured to make pattern SA1, SA2 stagger in this wise, it is possible to following such situation occurs.That is, exist
When utilizing one-dimensional absolute pattern as in the present embodiment to represent absolute position, each due to by optical arrays PA1, PA2
In the region of the turning point that photo detector is positioned at the bit mode produced near the end in reflection gap in the face of ground, absolute position
Accuracy of detection likely decline.In the present embodiment, owing to making pattern SA1, SA2 stagger, it is thus possible, for instance at pattern SA1
Absolute position be equivalent to the turning point of bit mode in the case of, by using the detection signal from pattern SA2 to calculate
Absolute position, or opposite to that carry out, it is possible to increase the accuracy of detection of absolute position.It addition, when so constituting, although
It is required that 2 light incomes by optical arrays PA1, PA2 are uniform, but in the present embodiment, due to by 2 by optical arrays PA1,
The distance that PA2 is configured to from light source 131 is roughly equal, therefore, it is possible to realize said structure.
Alternatively, it is also possible to substitute the mode making each absolute pattern of pattern SA1, SA2 offset one from another, the most do not make definitely to scheme
Case offsets one from another, but makes by optical arrays PA1, PA2 offset one from another the most corresponding with pattern SA1, SA2.
It addition, absolute pattern is not necessary to form 2, it is also possible to only form 1.But, hereinafter, say for convenience
Bright, the situation being formed with two patterns SA1, SA2 is illustrated.
(2-2-1-2. increment pattern)
On the other hand, multiple reflection gaps that pattern SI has are by along measuring quilt in the way of direction C has increment pattern
It is arranged in the complete cycle of dish 110.
" increment pattern " refers to the pattern repeated regularly as shown in Figure 4 with prescribed distance.Here, " spacing " refers to
There is each configuration space reflecting gap in the pattern SI of increment pattern.As shown in Figure 4, the spacing of pattern SI is P.With will be many
The situation whether individual photo detector detects is different to the absolute pattern representing absolute position respectively as bit, and increment pattern is
Detection signal sum by the photo detector of more than at least 1 represents the position of the motor M in every 1 spacing or 1 spacing.
Therefore, although increment pattern is not used in the absolute position representing motor M, but can be with the highest precision compared with absolute pattern
Represent position.
It addition, in the present embodiment, the reflection gap of pattern SA1, SA2 is at the minimum length measured on the C of direction and figure
Spacing P in the reflection gap of case SI is consistent.As a result of which it is, the resolution of absolute signal based on pattern SA1, SA2 and pattern SI
Reflection gap quantity consistent.But, minimum length is not limited to this example, it is preferred that the reflection gap of pattern SI
Quantity is set to identical or bigger than the resolution of absolute signal with the resolution of absolute signal.
(2-2-2. optical module)
As shown in Figure 2 and Figure 5, optical module 130 is formed parallel with dish 110 piece substrate BA.Thereby, it is possible to make
Encoder 100 is thinning, makes the manufacture of optical module 130 become easy.Therefore, along with the rotation of dish 110, optical module 130 exists
Measure and carry out relative movement relative to pattern SA1, SA2, SI on the C of direction.It addition, optical module 130 is not necessarily to be configured to one
Block substrate BA, each structure can also be configured to polylith substrate.In this case, these substrates can intensively configure.It addition,
Optical module 130 may not be substrate shape.
As shown in Figure 2 and Figure 5, optical module 130 has light source 131 and many on the face relative with dish 110 of substrate BA
Individual by optical arrays PA1, PA2, PI1, PI2.
(2-2-2-1. light source)
As it is shown on figure 3, light source 131 is configured in the position relative with pattern SI.Further, light source 131 is towards 3 patterns
Opposite segments through the position relative with the optical module 130 injection light of SA1, SA2, SI.
As light source 131, as long as the light source of light can be irradiated to irradiation area, it is not particularly limited, such as may be used
To use LED (Light Emitting Diode: light emitting diode).As shown in Figure 6, light source 131 is specially constructed as not joining
Put the point source of optical lens etc., from illuminating part injection diffusion light.It addition, for " point source ", it is not necessary to it is strict meaning
Point in justice, as long as in design or in operation principle, it is possible to regard the light source sending diffusion light from the position of substantially point-like as
, it is also possible to it is to send light from limited exit facet.It addition, " diffusion light " is not limited to from point source towards comprehensive
The light gone out, also includes the light penetrated diffusely towards limited constant bearing.As long as it is that is, more diffusible than directional light has
Light, is included in diffusion light mentioned here.By using point source in this wise, light source 131 can be to through relative position
3 patterns SA1, SA2, SI putting irradiate light substantially uniformly.Further, since do not carry out the optically focused/diffusion of optically-based element,
Therefore it is not easy to produce the error etc. caused because of optical element, it is possible to increase the craspedodrome of the light of directive pattern.
(amplification of 2-2-2-2. projection image)
Multiple had by optical arrays be configured in light source 131 around, receive respectively by the reflection gap of corresponding pattern
Multiple photo detectors (the dot-hatched part of Fig. 5) of the light of reflection.As it is shown in figure 5, multiple photo detectors are along measuring direction C
Arrangement.
As shown in Figure 6, from the just diffusion light of light source 131 injection.Therefore, the pattern on optical module 130 it is projected in
Seem with corresponding to optical path length regulation amplification ε amplify after picture.That is, as shown in Fig. 4～Fig. 6, by pattern SA1,
Length on SA2, SI respective width R is set to WSA1, WSA2, WSI, by their reflection light on optical module 130
Length on the width R of the shape that projection obtains is set to WPA1, WPA2, WPI, then the length of WPA1, WPA2, WPI is
ε times of WSA1, WSA2, WSI.It addition, in the present embodiment, as shown in Figure 5 and Figure 6, it is shown that respectively by the light of optical arrays
Element length on width R is set to each gap that to project the shape obtained on optical module 130 roughly equal
Example.But, the length on the width R of photo detector is not limited to this example.
Equally, the measurement direction C that the measurement direction C on optical module 130 also becomes on dish 110 is projected in optical module
The shape obtained on 130, the shape i.e. affected by amplification ε.In order to easy to understand, as in figure 2 it is shown, with light source 131
It is specifically described as a example by the measurement direction C of position.Measurement direction C on dish 110 is the round shape centered by the AX of axle center.With
Relative, the center of the measurement direction C being projected on optical module 130 becomes and position in the face being configured with light source 131 of dish 110
Put i.e. optical center Op and separate the position of distance ε L.Distance ε L is that distance L between axle center AX and optical center Op is to amplify
Distance after rate ε is exaggerated.This position is schematically illustrated as measuring center Os in fig. 2.Therefore, on optical module 130
Measurement direction C be in centered by measuring center Os, on the line with distance ε L as radius, wherein, described measuring center Os exists
Towards AX direction, axle center on line residing for optical center Op and axle center AX, separate distance ε L with optical center Op.
In Fig. 4～Fig. 6, by line Lcd, Lcp indicating panel 110 and the optical module 130 respective measurement direction C of arc-shaped
Corresponding relation.Line Lcd shown in Fig. 4 etc. represents the line along the measurements direction C on dish 110, and on the other hand, Fig. 5 etc. is shown
Line Lcp represent the line (line Lcd is the line being projected on optical module 130) along the measurement direction C on substrate BA.
As shown in Figure 6, the gap length between optical module 130 and dish 110 is being set to G, by light source 131 from substrate BA
Overhang be set to △ d in the case of, amplification ε following (formula 1) represents.
ε=(2G-Δ d)/(G-Δ d) ... (formula 1)
(2-2-2-3. definitely with, increment by optical arrays)
As each photo detector, such as, can use photodiode.Each photo detector is respectively formed as having rule
Determine the shape of light-receiving area, and export the light summation (hereinafter referred to as " light light quantity ") received in light-receiving area whole with it
The analog detection signal of corresponding size.But, as photo detector, it is not limited to photodiode, as long as be able to receive that
The light penetrated from light source 131 photo detector being converted to the signal of telecommunication, be not particularly limited.
Being configured accordingly by optical arrays and 3 patterns SA1, SA2, SI of present embodiment.By optical arrays PA1 by structure
Become and receive the light reflected by pattern SA1, be configured to by optical arrays PA2 receive the light reflected by pattern SA2.It addition, light
Array PI1, PI2 are configured to receive the light reflected by pattern SI.Although by optical arrays PI1 and by optical arrays PI2 at midway quilt
Segmentation, but corresponding to same track.So, corresponding with 1 pattern 1 it is not limited to by optical arrays, it is also possible to be multiple.
Light source 131 and be configured to the position relationship shown in Fig. 5 by optical arrays PA1, PA2.That is, corresponding with absolute pattern
By optical arrays PA1, PA2 by between in the way of light source 131, divide 2 groups be arranged on width R the position mutually staggered side by side
Put place.In this example, it is configured in inner circumferential side by optical arrays PA1, is configured in outer circumferential side by optical arrays PA2, by optical arrays
Distance between PA1, PA2 and light source 131 is roughly equal.It is with through light source 131 (in optics respectively by optical arrays PA1, PA2
Heart Op) and the line Lo parallel with Y-axis centered by the shape symmetrical in line.Further, by optical arrays PA1, PA2 have multiple (
In present embodiment e.g. 9) photo detector respectively along measure direction C (line Lcp) with constant spacing arrange.It addition, this
The shape of multiple photo detectors will be described below.
In the present embodiment, as the exemplified one-dimensional pattern of absolute pattern.Therefore, corresponding with this pattern it is subject to
Optical arrays PA1, PA2 have along measuring multiple (in present embodiment for example, 9) light unit that direction C (line Lcp) arranges
Part, to receive respectively by the light of the reflection gap reflection of corresponding pattern SA1, SA2.As it has been described above, at these multiple photo detectors
In, light or the non-light of each photo detector are processed as bit, represent the absolute position of 9 bits.Multiple light
What element each received put in place by optical signal data generating section 140 (with reference to Fig. 2) is processed independently of each other, according to these
Combined by optical signal, be decoded according to the absolute position of serial bit pattern encryption (coding).By these by optical arrays
PA1, PA2 are referred to as " absolute signal " by optical signal.It addition, in the situation using the absolute pattern different from present embodiment
Under, become the structure corresponding with its pattern by optical arrays PA1, PA2.It addition, the photo detector being had by optical arrays PA1, PA2
Quantity can also be the quantity beyond 9, and the bit number of absolute signal is also not limited to 9.
Light source 131 and be configured to the position relationship shown in Fig. 5 by optical arrays PI1, PI2.That is, corresponding with increment pattern
By optical arrays PI1, PI2 measure on the C of direction by between configure in the way of light source 131.Specifically, by optical arrays PI1,
It is that line is symmetrical that PI2 is configured to above-mentioned line Lo for axis of symmetry.Light source 131 is configured in by between optical arrays PI1, PI2, and this is subject to
Optical arrays PI1, PI2 are configured to a track on measurement direction C.
Had along measuring multiple photo detectors that direction C (line Lcp) arranges by optical arrays PI1, PI2, to receive respectively
The light reflected by the reflection gap of corresponding pattern SI.These photo detectors are respectively provided with identical shape
Generally rectangular).
In the present embodiment, 1 spacing (1 spacing in the picture of projection of the increment pattern of pattern SI.I.e. ε × P.)
Inside it is arranged with the group (being expressed as " group " in Figure 5) including adding up to 4 photo detectors, and, also it is arranged with along measuring direction C
Multiple groups including 4 photo detectors.Further, owing to increment pattern has been concatenated to form reflection gap every 1 spacing, respectively
Photo detector, in the case of dish 110 rotates, generates the periodic signal of 1 cycle (electrical angle is 360 °) in 1 spacing.And
And, owing to being configured with 4 photo detectors in be equivalent to 1 spacing 1 group, therefore adjacent photo detector exports that in 1 group
This has the periodic signal i.e. increment phase signals of 90 ° of phase contrasts.Each increment phase signals is referred to as A+ phase signals, B+ phase signals (phase
Phase contrast for A+ phase signals is 90 °), A-phase signals (being 180 ° relative to the phase contrast of A+ phase signals), B-phase signals (phase
Phase contrast for B+ phase signals is 180 °).
Due to the position in 1 spacing of increment pattern representation, the therefore signal and therewith of its value and each phase place in 1 group
The signal of the corresponding each phase place in other groups similarly changes.Therefore, the signal of same phase place is added in multiple groups.Cause
From the multiple photo detectors by optical arrays PI shown in Fig. 5, this, detect that phase place staggers 4 signals of 90 ° one by one.Therefore, from
Generated phase place respectively by optical arrays PI1, PI2 to stagger one by one 4 signals of 90 °.These 4 signals are referred to as " increment signal ".
It addition, in the present embodiment, to include 4 light units at 1 group of 1 spacing being equivalent to increment pattern
Part, and be that an example illustrates by optical arrays PI1 with the situation each by optical arrays PI2 with mutually isostructural group, but 1 group
In photo detector quantity be not particularly limited, can be such as 1 group and include 2 photo detectors etc..It addition, by optical arrays
The photo detector quantity of PIL, PIR entirety is also not limited to the shown examples such as Fig. 5.Alternatively, it is also possible to be configured to, by optical arrays
PI1, PI2 obtain respectively out of phase by optical signal.
It addition, and increment pattern corresponding be not limited to by optical arrays as by optical arrays PI1, PI2 with interval
The mode light source 131 configures the form of 2.For example, it is also possible to outer circumferential side or inner circumferential at light source 131 are measured and put along measurement
1 of direction C by optical arrays.Furthermore it is also possible to form the increment pattern that resolution is different on multiple tracks of dish 110, and
And arrange corresponding with each track multiple by optical arrays.
Hereinbefore, the overview by optical arrays is illustrated.Then, each to had by optical arrays PA1, PA2
Before the shape of photo detector etc. illustrate, the position data generating unit 140 in remaining structure is illustrated.
(2-3. position data generating unit)
Position data generating unit 140, on the opportunity measuring the absolute position of motor M, obtains from optical module 130
Increment signal and two absolute signals, said two absolute signal is respectively provided with the bit mode representing the 1st absolute position, described
The phase place that includes increment signal staggers 4 signals of 90 ° one by one.Further, position data generating unit 140 according to the signal obtained,
Calculate the 2nd absolute position of motor M represented by these signals, and would indicate that the position data of the 2nd absolute position calculated
Output is to controlling device CT.
It addition, the generation method of position data that position data generating unit 140 is carried out can use multiple method, not
It is particularly limited to.Here, enter in case of calculating absolute position according to increment signal and absolute signal and to generate position data
Row explanation.
Position data generating unit 140, to carrying out binaryzation respectively from the absolute signal by optical arrays PA1, PA2, is converted to
Represent the Bit data of absolute position.Further, according to the corresponding relation between Bit data set in advance and absolute position, really
Fixed 1st absolute position.That is, mentioned here to " the 1st absolute position " refer to superposition increment signal before low resolution absolute
Position.On the other hand, to from by 4 respective increment signals of phase place of optical arrays PI1, PI2, there are 180 ° of phase contrasts
Increment signal is subtracted from one another.By in this wise the signal with 180 ° of phase contrasts being subtracted each other, it is possible to offset in 1 spacing
The foozle in reflection gap and measurement error etc..Here, by above-mentioned subtract each other like that after the signal of result be referred to as " the
1 increment signal " and " the 2nd increment signal ".1st increment signal and the 2nd increment signal have the phase place that electrical angle is 90 ° each other
Difference (simple referred to as " A phase signals ", " B phase signals " etc.).Therefore, position data generating unit 140 determines 1 according to these 2 signals
Position in individual spacing.Method for determining position in this 1 spacing is not particularly limited.Such as, when as periodic signal
Increment signal be sine wave signal in the case of, as the above-mentioned example determining method, have by 2 of A phase and B phase just
The result of calculation of being divided by of string ripple signal carries out arctan computing to the method calculating electrical angle φ.Or there is also use and follow the trail of electricity
The method that 2 sine wave signals are converted to electrical angle φ by road.Or, also have and determine in the form made in advance and A phase and B
The method of electrical angle φ that the value of the signal of phase is corresponding.The most now, position data generating unit 140 is preferably according to each detection letter
Number 2 sine wave signals of A phase and B phase are simulated-numeral conversion.
Position data generating unit 140 superposition at the 1st absolute position determined according to absolute signal is true according to increment signal
The fixed position in 1 spacing.Thereby, it is possible to calculate high the 2nd exhausted in resolution ratio the 1st absolute position based on absolute signal
To position.Position data generating unit 140 further increases the 2nd absolute position so calculated is carried out multiplication process
After resolution, export control device CT as the position data representing high-precision absolute position.
(2-4. is definitely by the shape of each photo detector by optical arrays)
Then, the shape of each photo detector being had by optical arrays PA1, PA2 is illustrated.
Assume that the diffusion light irradiated from light source 131 is all reflected on dish 110 and is irradiated to the substrate of optical module 130
During BA, as it is shown in fig. 7, the intensity distributions of reflection light become the concentric circles that decays along with being away from optical center Op point
Cloth.It addition, the broken circle in Fig. 7 represents the isophote of reflection light, the highest the closer to inner circumferential side light intensity, the closer to outer circumferential side
Light intensity is the lowest.It is distributed in this wise about the light intensity reflecting light and becomes the reason of concentric circles, be on the one hand because light and have
The character decayed along with optical path length, is on the other hand because have employed the irradiation space at the diffusion light from light source 131
In (in reflection space), utilize the structure that the plane substrate BA vertical with optical axis is received.It should be noted that it is actual
In the region corresponding with each pattern SA1, SA2, SI of dish 110 that upper reflection is just irradiated on substrate BA.
Further, as it has been described above, absolute respectively by optical arrays PA1, PA2, in measuring center Os as curvature
The line Lcp of the arc-shaped of the heart is configured with multiple photo detector, and on the other hand, optical center Op is configured in and divides with measuring center Os
From remote position.Therefore, basis and light source on the C of direction are being measured by the light intensity of each photo detector of optical arrays PA1, PA2
The distance of 131 and change.It is specifically described by optical arrays PA2, as it has been described above, be centered by line Lo by optical arrays PA2
Line symmetric shape, therefore for the light intensity of each optical element, the photo detector P5 on line Lo is the highest, and according to from
Line Lo order from the near to the remote, i.e. according to photo detector P4, P6, photo detector P3, P7, photo detector P2, P8, photo detector
The order of P1, P9, reduces symmetrically in line.Also it is same by optical arrays PA1.Further, since by optical arrays PA1 with by optical arrays
PA2 by between be arranged side by side in the way of light source 131, therefore by optical arrays PA1, PA2 each photo detector light intensity all
The highest at the end Eo of light source side, with the end En of light source 131 opposite side at minimum.
Here, in the present embodiment, each photo detector basis as described above being such as made up of photodiode
Light light quantity that its light-receiving area is overall and export the detection signal of the analogue value.Further, light light quantity is in light-receiving area
Respectively carried out the light quantity after adding up by the light intensity at luminous point.Therefore, between photo detector, the distribution of above-mentioned light intensity is different
In the case of, even if respective light-receiving area is identical, light light quantity is the most different, and between photo detector, the change of analog detection signal is special
Property is the most different.In this case, between these photo detectors, the change moment of two-value signal staggers, it is therefore possible to
Cause the error detection of absolute position.And in order to make the change moment of two-value signal between photo detector not stagger, it is also possible to examine
Consider and adjust the threshold value for being converted to two-value signal accordingly with the variation characteristic of each photo detector, but circuit structure and
Signal processing can become complicated, becomes the factor causing cost increase etc..
To this, it is also contemplated that the following means of employing: between photo detector to respective measurement direction C or width R
On overall dimensions be adjusted and change light-receiving area, make light light quantity uniform.But, in the measurement changing each photo detector
In the case of overall dimensions on the C of direction, the adjacent interval between photo detector is uneven, therefore these photo detectors that
Between this, the amount of crosstalk leak mutually due to the impact of diffuse-reflectance etc., received is uneven, and result there is a possibility that light light quantity not
Uniformly.It addition, change each photo detector width R on overall dimensions in the case of, the length of width is the shortest
Photo detector, the impact of the reflection light dislocation in the direction of the width being more easily subject to be caused by the bias of dish 110, it is possible to
There is error detection.
The most in the present embodiment, by optical arrays PA1 and by optical arrays PA2 each in, the measurement of each photo detector
Maximum overall dimensions on the C of direction and the maximum overall dimensions on width R are set to be equal to each other, and from light source
The photo detector that the distance of 131 is different is formed configurations differing from one so that respective light light quantity is equal to each other.Separately
Outward, outside dimension mentioned here and light light quantity " equal " such record are not proper equal, but permit
Being permitted the tolerance in design, in manufacture, error, expression is substantial equal.It addition, " light light quantity " mentioned here is each
Photo detector receives maximum light light quantity during reflection light with respective whole light-receiving area.
In the present embodiment, as an example of the shape realizing such condition, by optical arrays PA1, PA2, many
Part or all in individual photo detector is respectively formed as the shape with the point of the tapered shape of end.Point
Position is not particularly limited, and in the present embodiment, the situation that in the end measuring direction C, photo detector is had point is entered
Row explanation.Here, by by optical arrays PA1, PA2 by optical arrays PA2 as a example by carry out more specific description.It addition, for being subject to
For optical arrays PA1, due to its except become on width R with the shape this point symmetrical by optical arrays PA2 in addition to, with
Identical by optical arrays PA2 shape, therefore omit the description.
The illustrating of shape of photo detector of point (2-4-1. have)
Carry out as a example by the shape of a photo detector P6 in 9 photo detectors being had by optical arrays PA2 in fig. 8
Enlarged representation.Being set for specifically of shape and size with reference to each several part of this Fig. 8 photo detector to having point
Bright.
Say on outline, the shape of this photo detector P6 be to based on the corner of quadrilateral shape prune after shape
Shape.Quadrilateral shape based on Gai be a length of TPA2 measured on the C of direction (be the reflection gap of pattern SA2 in this example
Measurement direction C on the length of ε times of minimum length P (basic bit length)), a length of WPA2's on width R
Rectangular shape.In arbitrary photo detector P1～P9 being had by optical arrays PA2, the rectangular shape based on being somebody's turn to do i.e. is measured
Maximum overall dimensions TPA2 on the C of direction and the maximum overall dimensions WPA2 on width R is jointly set as equal.Separately
Outward, it is the most parallel that the quadrilateral shape based on above-mentioned need not relative two limit, it is not required that each corner is
Strict right angle, as long as essentially quadrangular shape.
It addition, " pruning " here refers to a corner for above-mentioned quadrilateral shape, carry out down with the inclination angle of regulation
Angle.Further, in each in both ends Ec, Er of the measurement direction C of photo detector P6, to lay respectively at this end Ec,
2 corners on Er carry out the pruning at the inclination angle specified, are consequently formed the general triangular that summit is positioned on this end Ec, Er
The above-mentioned point Ps of shape.It addition, in the present embodiment, owing to each photo detector is symmetric shape on measurement direction C, because of
This 1 photo detector P6 both ends Ec, Er each on define above-mentioned point Ps, and these points Ps
Measure direction size TPs and can be set to that same size d1, the maximum overall dimensions on the measurement direction C of this photo detector P6
(i.e. the summit spacing of each point Ps at two ends) is maintained length TPA2.It addition, by the end Eo from light source 131 side
Width size to the summit of point Ps is set to Wo, by from the end En with light source 131 opposition side to point
In the case of width size till the summit of Ps is set to Wn, total Wo+Wn of these width sizes is equal to light
Maximum overall dimensions WPA2 on the width R of element.It addition, basically, both ends Ec, the Er on the C of direction is measured each
From width size Wo be equal to each other, width size Wn is the most equal.Thus, photo detector P6 be formed with
By measuring center Os with measure the line Loc of center of direction C and be axis of symmetry and the hexagon symmetrical about measuring direction C
Shape.
As long as it addition, the shape that the shape end of point Ps is tapered, in addition to above-mentioned triangle, such as
Can also be trapezoidal shape, the arc-shaped of band circularity.It addition, point Ps can also pass through based on the angle of quadrilateral shape
Method beyond the pruning in portion is formed.
It addition, for point Ps measure the photo detector equal for total TPs+TPs of direction size each other for, can
The most equal to say the light-receiving area of these photo detectors.In other words, if TPs+TPs photo detector measurement direction C
Shared being in equal proportions, then it may be said that light-receiving area is the most equal in big overall dimensions TPA2.
It addition, hereinafter, also at both ends Ec, the Er measuring direction C, will there is the photo detector of point, change speech
Photo detector (be photo detector P2～P8 in this example) referred to as " the 1st photo detector " more than 0 of the value of TPs+TPs.It addition,
Any one end in both ends Ec, Er the most do not had the photo detector of quadrilateral shape of point Ps, in other words TPs yet
+ TPs is essentially the photo detector (in this example for photo detector P1, P9) of 0 (d1=0) and is referred to as " the 2nd photo detector ".
Further, the most illustrated in fig. 7, the light intensity of each photo detector is the highest at the end Eo of light source side,
Minimum with at the end En of light source 131 opposition side.Therefore, even if between photo detector, TPs+TPs is identical is light-receiving area phase
With, position on width R, the summit of point Ps being subject to of (large percentage of width size Wo) away from light source 131
Optical element can make light light quantity relatively reduced.Otherwise, the summit of point Ps is closely located to light source on width R
The photo detector of 131 (large percentages of width size Wn) can make light light quantity relatively increase.
It addition, as be illustrated in Figure 7 equally, for the light of multiple photo detector P1～P9 by optical arrays PA2
For intensity, closer to line Lo the most on substrate BA close to the photo detector of light source 131, light intensity is the highest；Further away from line
Lo the most on substrate BA away from the photo detector of light source 131, light intensity is the lowest.Therefore, in the present embodiment, be positioned at from
Light source 131 far from 2 photo detectors P1, P9 by above-mentioned 2nd photo detector maximum as light-receiving area, other
Photo detector P2～P8 as above-mentioned 1st photo detector, on the basis of the light light quantity of photo detector P1, P9 adjust light unit
The shape of part P2～P8 so that become identical light light quantity.
Thus, can be such as the shape shown in Fig. 5, Fig. 7 by the shape of multiple photo detector P1～P9 of optical arrays PA2
State.It addition, width size d1, d2 in following description illustrate in Figure 12 described later.That is, it is positioned at the 2 of two ends
Individual photo detector P1, P9 are the 2nd photo detectors entirely without the quadrilateral shape being trimmed to about.And in photo detector P1, P9
2 photo detectors P2, P8 of side are the tips at both ends Ec, Er with smaller width size TPs (=d2)
1st photo detector of the roughly the same shape of portion Ps.Further, 2 photo detectors P3, P7 inside photo detector P2, P8
It it is the roughly the same shape of the point Ps at both ends Ec, Er with bigger width size TPs (=d1)
1st photo detector.Further, 2 photo detectors P4, P6 inside photo detector P3, P7 are also to have at both ends Ec, Er
There is the 1st photo detector of the roughly the same shape of the point Ps of bigger width size TPs (=d1).It addition, it is tight
By being also that there is at both ends Ec, Er bigger width inside photo detector P4, P6 and close to the photo detector P5 of light source 131
1st photo detector of the point Ps of degree direction size TPs (=d1).
It addition, in this example, by 9 photo detector P1～P5 of optical arrays PA2, be subject to close to 5 of light source 131 configuration
The above-mentioned TPs+TPs of optical element P3～P7 is equal, i.e. light-receiving area is equal.Constitute the photo detector of these photo detectors P3～P7
P3～P5 and photo detector P5～P7 is equivalent to multiple 1st light that the distance from light source 131 is different and area is equal to each other
One example of element.Further, between photo detector P3～P7 of these area equation, it is set as: connect on measurement direction C
The photo detector of close to sources 131, position on width R, the summit of point Ps from light source 131 more away from.In other words, more
Being the 1st photo detector close to light source 131 on measurement direction C, the ratio of above-mentioned width size Wo is set the biggest.
Specifically, the position on the summit of the point Ps of photo detector P4, P6 than photo detector P3, P7 away from light source 131, photo detector
The position on the summit of the point Ps of P5 than photo detector P4, P6 away from light source 131.
Further, in this example, for the 1st i.e. light of photo detector in photo detector P1～P9, that area is different from each other
For element P2, P3 and photo detector P7, P8, measuring on the C of direction the photo detector close to light source 131, TPs+TPs is more
Greatly.Specifically, the TPs+TPs (=2 × D1) of photo detector P3 is bigger than the TPs+TPs (=2 × D2) of photo detector P2, equally,
The TPs+TPs (=2 × D1) of photo detector P7 is bigger than the TPs+TPs (=2 × D2) of photo detector P8.It addition, for light unit
For part P2, P3 and photo detector P7, P8, the width position on the summit of point Ps is identical.These photo detectors P2, P3
An example of multiple 1st photo detectors that distance is different and area is different from each other from light source is equivalent to photo detector P7, P8.
It addition, be not limited to above-mentioned situation by the form of the shape of multiple photo detector P1～P9 of optical arrays PA2.Example
As, can also be the 1st photo detector with point Ps by photo detector P1, the P9 at the two ends of optical arrays PA2.It addition, be subject to
The quantity of the photo detector that the area in optical element P1～P9 is equal to each other can also be the quantity outside above-mentioned 5, all is subject to
The area of optical element can also be different from each other.It addition, the summit of the above-mentioned point Ps of the 1st photo detector that area is equal to each other
The relation of the above-mentioned TPs+TPs of the relation of position and area the 1st photo detector different from each other can also be above-mentioned situation with
Outer form.But, in the present embodiment, the convenience that illustrates that and the situation of above-mentioned shape is illustrated.
As can be seen here, for by optical arrays PA1 and by optical arrays PA2 each for, it is possible to make the survey of each photo detector
Maximum overall dimensions on amount direction C and the maximum overall dimensions on width R are equal to each other, and make respective light simultaneously
Light quantity is equal to each other.
It addition, the 1st photo detector has above-mentioned point Ps, thus, be converted to two-value signal detecting signal
Time be obtained in that favourable effect.Hereinafter, this effect is described in detail.
(effect of the point during conversion of 2-4-2. two-value signal)
First, as comparative example, with reference to the situation of the photo detector PD ' of the Fig. 9 rectangular shape to not having point Ps
Under the variation characteristic of analog detection signal illustrate.In this Fig. 9, relative to the photo detector PD ' of rectangular shape, from
The shadow surface Rs of the reflection light in the reflection gap that pattern SA1, SA2 have process over time is along measuring direction C according to position
Put sequentially travelling of X1～X11.It addition, shadow surface Rs is that ratio photo detector PD ' is big on width R, measuring on the C of direction
Rectangular shape with photo detector PD ' formed objects.It addition, the distribution of the light intensity being set to here in shadow surface Rs is uniform
's.Corresponding respectively to these positions X1～X11, the light light quantity of photo detector PD' is with the variation characteristic as shown in thick line VX
And change over time.
In this case, start moment of overlapping position X2 from shadow surface Rs and photo detector PD' and play shadow surface
Till the moment of position X6 completely overlapped with photo detector PD' for Rs, light light quantity is according to linear function monotone increasing.Further,
From the moment of maximum this position X6 of light light quantity play position X10 the most overlapping with photo detector PD' for shadow surface Rs time
Till quarter, light light quantity is according to linear function monotone decreasing.
In contrast, Figure 10 shows analog detection signal in the case of the photo detector PD with point Ps
Variation characteristic.It addition, in this Figure 10, in order to easy to understand, it is illustrated that photo detector PD is from the two of the 1st photo detector most advanced and sophisticated
The situation that the vertex of portion Ps is only formed with half part of En side, end.It addition, same as above, shadow surface Rs is in width side
Rectangular shape bigger than photo detector PD, identical with photo detector PD size on measurement direction C on R, in shadow surface Rs
Being evenly distributed of light intensity.In this Figure 10, relative to photo detector PD, shadow surface Rs over time through and according to position
In the case of the sequentially travelling of Y1～Y11, corresponding to each position Y1～Y11, the light light quantity of photo detector PD is with thick line VY institute
Show that such variation characteristic changes over.
In this case, start moment of overlapping position Y2 from shadow surface Rs and photo detector PD and play shadow surface Rs
Till the moment of completely overlapped for the point Ps position Y3 of Ec side, end, light light quantity according to quadratic function (can also be
Repeatedly function more than cubic function) increase.Further, the moment from this position Y3 plays the tip of shadow surface Rs and Er side, end
In period (with reference to linear interval 1 in Figure 11 described later) till the moment of the position Y5 that portion Ps starts overlap, light light quantity
According to linear function monotone increasing.Further, to play shadow surface Rs completely overlapped with photo detector PD the moment from this position Y5
Till the moment of position Y6, light light quantity increases according to quadratic function.Hereto, from the moment of above-mentioned position Y3 to above-mentioned position
In period till the moment putting Y5, the time rate of change (inclination of curve) of light light quantity is maximum.Further, from light light quantity
Till the moment of big position Y6 plays the moment of position X10 the most overlapping with photo detector PD for shadow surface Rs, with above-mentioned with
The change of time reduces relatively symmetrically.During this period, from the position the most overlapping for point Ps of shadow surface Rs and Ec side, end
The moment of Y7 plays the phase till the moment of the shadow surface Rs position Y9 that start reduce overlapping with the point Ps of Er side, end
Between in (with reference to linear interval 2 in Figure 11 described later), light light quantity is according to linear function monotone decreasing, the time of light light quantity
Rate of change (inclination of curve) is maximum.
Here, as shown in figure 11, to respective light light quantity in the case of the situation of photo detector PD ' and photo detector PD
Variation characteristic compare.It addition, in this Figure 11, in order to easily compare, if respective light-receiving area is equal, with uniformly
It is distributed the irradiation light of illuminated same light intensity, and the maximum light light quantity in respective variation characteristic is equal.
In this Figure 11, for any one in photo detector PD ', PD, it is all overlapping with shadow surface Rs
In the moment of position X4, X8, Y4, Y8 of moment the most above-mentioned Fig. 9, Figure 10 of the half that region reaches light-receiving area, light light quantity becomes
For the half of maximum light light quantity, respective characteristic line VX, VY intersect.For the analog detection signal from photo detector is turned
It is changed to the value that the threshold value of two-value signal is preferably set to the half of this maximum light light quantity.But, such as due to light source 131
Chronological aging and manufacture the variation of light intensity irradiating light that individual variation is caused, or photo detector is in time
Aging and manufacture the variation etc. of receiving sensitivity that individual variation is caused, threshold value is special relative to the change of light light quantity sometimes
Property and relative variability.The variation of this threshold value is the amplitude of fluctuation centered by the half i.e. reference value by above-mentioned maximum light light quantity
Change in the range of △ T, but in the case of photo detector PD ', owing to variation characteristic is according to linear function increase and decrease,
Therefore the change moment of two-value signal changes according to corresponding amplitude of fluctuation △ tx.
In contrast, in the case of photo detector PD, as described above at the half i.e. benchmark of maximum light light quantity
Around, characteristic curve amplitude peak ground tilts value.Amplitude of fluctuation △ T accordingly, with respect to threshold value, it is possible to by two-value signal
The variation suppression in change moment be the above-mentioned amplitude of fluctuation little for amplitude of fluctuation △ tx in the case of ratio photo detector PD ' far away
△ty.Thus, the 1st photo detector of present embodiment is formed as the shape with point Ps, thus by its analog detection
When signal is converted to two-value signal, there is the effect of the impact inhibiting the variation of threshold value to be caused.
<the 3. example of the effect of present embodiment>
In the embodiment described above, encoder 100 has by optical arrays PA1, PA2, and they are along measuring direction C
Arrangement, receives and penetrates from light source 131 and by the light of pattern SA1, SA2 reflection.Further, these are had by optical arrays PA1, PA2
Multiple photo detectors (being photo detector P1～P9 in the example that Fig. 5 etc. illustrates) include the point with the tapered shape of end
1st photo detector (for photo detector P2～P8 in the example that Fig. 5 etc. illustrates) of Ps.Thus, by the shape to point Ps
Shape and size etc. are adjusted, it is possible to adjust the light light quantity of the 1st photo detector.Thereby, it is possible to make multiple photo detector each
From light light quantity uniform, therefore, it is possible to make the accuracy of detection of each bit uniformly suppress the error detection of absolute position, it is possible to
Improve accuracy of detection.Further, since need not the signal to each photo detector to export the process being adjusted, and each light unit
Part can jointly use the threshold value that the analogue signal from photo detector is converted to two-value signal, therefore, it is possible to make circuit
Structure simplifies.
It addition, for not there is the 2nd photo detector of point (tetragon) (for light in the example that Fig. 5 etc. illustrates
Element P1, P9) for, owing to the edge of measurement direction C is parallel with width R direction, signal output when therefore pattern passes through
Change the monotone increasing in linear function and monotone decreasing (with reference to above-mentioned Fig. 9).On the other hand, there is the 1st of point Ps be subject to
The shape that optical element tilts relative to width in the edge measuring direction C, the change of signal output when therefore pattern passes through
Change increase in quadratic function and minimizing, it is possible to increase the intensity of variation (can make inclination precipitous) of the signal output of Near Threshold
(with reference to above-mentioned Figure 10).Thus, reduce relative to the phase deviation of threshold variation, even if therefore in the case of threshold variation,
Also it is difficult to produce the detection error (with reference to above-mentioned Figure 11) of absolute position.
It addition, in the present embodiment, in the end measuring direction C, there is the situation of point Ps at the 1st photo detector
Under, it is possible to obtain following such effect.That is, by point Ps being arranged on end Ec, the Er measuring direction C, it is possible to make
The half of each side of both ends Eo, En obtaining the width R of the 1st photo detector becomes generally trapezoidal shape.Thus, with by tip
Portion Ps is arranged on the situation of end Eo, En of width R, and (in this case, the time rate of change of light light quantity is maximum
Region is a little) compare, it is possible to increase the big interval (point → line of intensity of variation of the signal output of above-mentioned Near Threshold；With reference to figure
Each linear interval in 11).As a result of which it is, less relative to the phase deviation of threshold variation, therefore, it is possible to improve phase further
Robustness for threshold variation.
It addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 are (in the example that Fig. 5 etc. illustrates
Son is photo detector P1～P9) outside the maximum overall dimensions TPA2 on respective measurement direction C and the maximum on width R
Shape size WPA2 is equal to each other, and has configurations differing from one from the photo detector that the distance of light source 131 is different so that each
From light light quantity be equal to each other.In this case, it is possible to obtain following such effect.That is, due to each photo detector
Measurement direction C on maximum overall dimensions TPA2 be equal to each other, therefore, it is possible to make each photo detector between measuring on the C of direction
Every generally uniform.Thereby, it is possible to make the amount of crosstalk measuring between each photo detector adjacent on the C of direction uniform, therefore, it is possible to
Improve the uniformity of the light light quantity of each photo detector further.It addition, easily carry out removing from the signal of each photo detector
The process of the noise that crosstalk causes.
It addition, such as along with shortening the situation of length WPA2 on the width R of photo detector close to light source 131
Under, the photo detector that length on width R is the shortest, the light caused by the bias of dish 110 mistake on width R
The impact of position is the biggest, the most easily produces detection error.In the present embodiment, owing to making on the width R of each photo detector
Maximum overall dimensions WPA2 be equal to each other, therefore, it is possible to reduce the impact that above-mentioned bias causes, even if there is bias at dish 110
In the case of, it is also difficult to produce the detection error of absolute position.
It addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 include from light source 131
Multiple 1st photo detectors (for photo detector P3～P7 in the example that Fig. 5 etc. illustrate) that distance difference and area are equal to each other.
In this case, it is possible to obtain following such effect.That is, owing to the 1st photo detector that is equal to each other at area being tied
Electric capacity (electrostatic capacitance) is equal, therefore, it is possible to make the response speed of each 1st photo detector uniform.As a result of which it is, electricity can be improved
The accuracy of detection of the absolute position during high speed rotating of machine M.
It addition, in the present embodiment, in multiple photo detectors of being had by optical arrays PA1, PA2, area each other
Equal multiple 1st photo detectors (for photo detector P3～P7 in the example that Fig. 5 etc. illustrates), the measurement direction of point Ps
Total TPs+TPs of size is equal to each other, and, close to the 1st photo detector of light source 131 on measurement direction C, most advanced and sophisticated
Position on width R direction, the summit of portion Ps from light source 131 more away from.In this case, it is possible to obtain following such
Effect.That is, decay along with optical path length due to light, therefore penetrate from light source 131 and by the photograph of light of pattern SA1, SA2 reflection
Penetrate intensity become centered by light source 131 and from light source 131 more away from decay the most the distribution of concentric circles.Such
In light intensity distributions, nearer it is to the 1st photo detector of light source 131, the width position on the summit of point Ps is from light source
131 is the most remote, for away from the 1st photo detector of light source 131, it can be ensured that the region that light intensity is relatively large
Light-receiving area, and enable to: nearer it is to the 1st photo detector of light source 131, be gradually reduced the district that light intensity is relatively large
The light-receiving area in territory.Therefore, it is possible to make the area of each photo detector uniformly and be capable of the homogenization of light light quantity.
It addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 are included in measurement direction C
On by between configure in the way of the 1st photo detector, (Fig. 5 etc. illustrate for 2 the 2nd photo detectors without point Ps
Example in be photo detector P1, P9).In this case, it is possible to obtain following such effect.That is, not there is tip
2nd photo detector of portion Ps is bigger than the area of the 1st photo detector with point Ps.Therefore, by will be farthest from light source 131
The photo detector at the two ends by optical arrays PA1, PA2 of position as the 2nd photo detector, and configuration the 1st between which
Photo detector, it is possible to by optical arrays PA1, PA2 each among guarantee the light light that multiple photo detector is overall to greatest extent
Amount, and the light light quantity of each photo detector can be made uniform.
It addition, in the present embodiment, the 2nd photo detector (in the example that Fig. 5 etc. illustrates for photo detector P1, P9) in
Quadrilateral shape, the 1st photo detector (for photo detector P2～P8 in the example that Fig. 5 etc. illustrates) is for repair the corner of quadrilateral shape
Shape after cutting.In this case, it is possible to obtain following such effect.That is, for each 1st photo detector, only
Area and the position etc. of pruning are adjusted, therefore, it is possible to make the 1st light unit on the basis of the quadrilateral shape of the 2nd photo detector
The design of the shape of part becomes easy.
It addition, in the present embodiment, the multiple photo detectors being had by optical arrays PA1, PA2 include from light source 131
Multiple 1st photo detectors that distance is different and area is different from each other are (for photo detector P2, P3 in the example that Fig. 5 etc. illustrates
With photo detector P7, P8), in multiple 1st photo detectors that this area is different, measuring on the C of direction close to light source 131
The 1st photo detector, total TPs+TPs measuring direction size of point Ps is set the biggest.In this case,
It is obtained in that following such effect.That is, in above-mentioned light intensity distributions, nearer it is to the 1st photo detector of light source 131, point
The measurement direction size of end Ps is the biggest, thus, nearer it is to the 1st photo detector of light source 131, it is possible to make its light-receiving area by
The least.Therefore, it is possible to make the light light quantity of each photo detector uniform.
It addition, in the present embodiment, each multiple photo detectors by optical arrays PA1, PA2 are constituted with across light source
The mode of 131 divides 2 groups to be arranged on width R the position mutually staggered side by side.In this case, it is possible to obtain with
Under such effect.That is, owing to the multiple photo detectors by optical arrays (such as by optical arrays PA2) are corresponding to definitely figure
The turning point of case etc. and cause detect signal reliability decrease in the case of, it is possible to use many by optical arrays from another
The detection signal of individual photo detector (such as by optical arrays PA1), or carry out in contrast to this.Thereby, it is possible to improve light unit
The reliability of the detection signal of part, it is possible to increase the accuracy of detection of absolute position.
It addition, in the present embodiment, encoder 100 is configured to the encoder of reflection-type, and wherein, light source 131 is to figure
The point source of case SA1, SA2 injection diffusion light, pattern SA1, SA2 are the patterns reflecting the light penetrated by light source 131, are subject to
Multiple photo detectors of optical arrays PA1, PA2 receive by the light of pattern SA1, SA2 reflection.In this case, it is possible to obtain
The most such effect.That is, in the encoder of reflection-type, make from pattern by using the point source of injection diffusion light
The light quantity distribution of the reflection light of SA1, SA2 easily becomes the ladder expanded further from the irradiation area corresponding to pattern SA1, SA2
Shape shape, easily produces crosstalk between therefore adjacent on measurement direction C photo detector.Therefore, it is possible to make amount of crosstalk uniform
This structure changed is more efficient in the case of being applied to the encoder of reflection-type.It addition, by the coding being configured to reflection-type
Device, it is possible to multiple photo detector P1～P9 by optical arrays PA1, PA2 are configured to close to light source 131, therefore, it is possible to make coding
Device 100 miniaturization.
<4. variation etc.>
Above, referring to the drawings an embodiment is illustrated in detail.But, the scope of technological thought is obvious
It is not limited to embodiment described herein.As long as the people of the general knowledge having in the technical field belonging to embodiment
Member, can expect carrying out various change, correction and combination in the range of the technological thought that claims are described
Deng, this is apparent from.Therefore, the technology after having carried out these changes, correction and combination etc. falls within skill certainly
The scope of art thought.Hereinafter, in order such variation is illustrated.It addition, in the following description, for above-mentioned
The identical additional same-sign of part of embodiment, suitably omit the description.
The form of above-mentioned embodiment it is not limited to by the shape of each photo detector of optical arrays PA1, PA2, it is also possible to
Consider other various forms.Hereinafter, using Figure 12～Figure 17, the deformation to the shape of these photo detectors illustrates.Separately
Outward, in Figure 12～Figure 17, illustrate only the shape of each photo detector by optical arrays PA2, other incomplete structures are illustrated.
It addition, the most each photo detector configures (along measuring direction C configuration) along arc-shaped line Lcp, but in Figure 12～Figure 17, for
Shape relation between each photo detector easy to understand, schematically shows each photo detector with the configuration of straight line.
(shape of the photo detector of 4-1. embodiment: photo detector of the same area is the situation of 5)
In order to compare, figure 12 illustrates the shape of each photo detector by optical arrays PA2 of above-mentioned embodiment.?
In this example, 2 photo detectors P1, P9 being positioned at the two ends by optical arrays PA2 are the 2nd photo detectors without point Ps,
The 1st photo detector P2～P8 with point Ps it is configured with between them.Further, the sensitive surface of the 1st photo detector P3～P7
Long-pending equal, in these the 1st photo detector P3～P7, nearer it is to the 1st photo detector of light source 131, the summit of point Ps
Width position from light source 131 more away from.It addition, for area the 1st photo detector P2, P2 different from each other and the 1st light
Element P7, P8, close to the photo detector of light source 131, the total measuring direction size of point Ps on measurement direction C
TPs+TPs is the biggest.In this example, measurement direction size TPs of point Ps is set as 2 kinds, and d1 is more than d2.
It addition, measure the maximum overall dimensions on the C of direction and the maximum profile on width R for each photo detector
Size is equal to each other, and has difformity each other from the photo detector that the distance of light source 131 is different so that respective light
Light quantity is equal to each other this point, is also same in each variation that will be discussed below.
The situation of 3 (the 4-2. photo detector of the same area be)
It can also be the shape shown in Figure 13.In this example, measurement direction size TPs of point Ps is set as 3 kinds, d2
More than d3, d1 further more than d2.Further, for 3 the 1st photo detector P4～P6, light-receiving area is equal, these
In 1 photo detector P4～P6, nearer it is to the 1st photo detector of light source 131, the width position on the summit of point Ps from
Light source 131 is the most remote.It addition, for area the 1st photo detector P2～P4 different from each other and the 1st photo detector P6～P8,
Close to the photo detector of light source 131 on measurement direction C, TPs+TPs is the biggest.It addition, for the 1st photo detector P2, P3
For the 1st photo detector P7, P8, the width position on the summit of point Ps is identical.In this variation, it is also possible to obtain
Effect that must be identical with above-mentioned embodiment.
The situation of 7 (the 4-3. photo detector of the same area be)
In addition it is also possible to be the shape shown in Figure 14.In this example, measurement direction size TPs of point Ps is set
For only d1 mono-kind.Further, for 7 the 1st photo detector P2～P8, light-receiving area is equal, at these the 1st photo detector P2
～in P8, nearer it is to the 1st photo detector of light source 131, the width position on the summit of point Ps is from light source 131 more
Far.It addition, in this variation, be configured without the 1st photo detector that area is different from each other.In this variation, it is also possible to obtain
Effect that must be identical with above-mentioned embodiment.
(all of photo detector of 4-4. is situation of the same area)
Alternatively, it is also possible to be the shape shown in Figure 15.In this example, all of photo detector P1～P9 is to have tip
1st photo detector of portion Ps, is configured without the 2nd photo detector without point Ps.It addition, the measurement direction of point Ps
Size TPs is set to only d1 mono-kind.Further, for all 1st photo detector P1～P9, light-receiving area is equal, at this
In a little 1st photo detector P1～P9, nearer it is to the 1st photo detector of light source 131, the width position on the summit of point Ps
Put from light source 131 more away from.It addition, in this variation, be also configured without the 1st photo detector that area is different from each other.In this change
In shape example, it is also possible to obtain the effect identical with above-mentioned embodiment.
The situation of photo detector (4-5. be only made up of point)
Alternatively, it is also possible to be the shape shown in Figure 16.In this example, all of photo detector P1～P9 is only by point Ps
Constitute.That is, measurement direction size TPs of point Ps is set to only d1 mono-kind, photo detector P1～P9 be all d1 be maximum
The half of overall dimensions TPA2.Further, for all 1st photo detector P1～P9, light-receiving area is equal, these the 1st
In photo detector P1～P9, nearer it is to the 1st photo detector of light source 131, the width position on the summit of point Ps from
Light source 131 is the most remote.It addition, in this variation, be also configured without the 1st photo detector that area is different from each other.In this variation
In, it is also possible to obtain the effect identical with above-mentioned embodiment.
(situations that the area of all of photo detector of 4-6. is the most different)
Alternatively, it is also possible to be the shape shown in Figure 17.In this example, 2 photo detectors P1, P9 being positioned at two ends are not have
There is the 2nd photo detector of point Ps.Further, measurement direction size TPs of point Ps is set to 4 kinds, and d3 is more than d4, d2
Further more than d3, d1 further more than d2.Further, the light-receiving area of all of photo detector P1～P9 is different from each other.Further,
In the 1st photo detector P2～P8 that light-receiving area is different from each other, close to the light unit of light source 131 on measurement direction C
Part, TPs+TPs is the biggest.It addition, the 1st photo detector P2～P8 to be all the width position on the summit of point Ps identical.?
In this variation, it is also possible to obtain the effect identical with above-mentioned embodiment.
It addition, in the above description, exist " vertically ", " parallel ", in the case of the contents such as " plane ", this record
The most proper concept of content.That is, these " vertically ", " parallel ", " plane " allow to deposit in design with manufacture on
Tolerance and error, represent " substantial orthogonality ", " substantial parallel ", " being essentially plane ".
It addition, in the above description, there is apparent size or the record such as shape " identical ", " equal ", " different "
In the case of content, the most proper concept of this contents.That is, these " identical ", " equal ", " different " allow to deposit
In design with the tolerance manufactured and error, represent " being substantially the same ", " being substantially equal ", " being different in essence ".
Label declaration
S: servosystem；SM: servomotor；CT: control device；M: motor；SH: axle；100: encoder；110: dish；
130: optical module；131: light source；140: position data generating unit；SA 1, SA 2, SI: pattern；PA1, PA2: by optical arrays；
PI1, PI2: by optical arrays；P1, P2, P3, P4, P5, P6, P7, P8, P9: photo detector；C: measure direction；R: width；
AX: rotary shaft；O: disk center；Op: optical center；Lcd, Lcp, Lo, Loc: line；BA: substrate.
Claims (11)
1. an encoder, wherein, this encoder has:
Along the absolute pattern measuring direction；
Light source, consists of and penetrates light to described absolute pattern；
Multiple photo detectors, they are configured to arrange along described measurement direction, receive and penetrate and pass through described from described light source
Absolute pattern or the light reflected by described absolute pattern,
The plurality of photo detector includes that the 1st photo detector, described 1st photo detector have the point of the tapered shape of end.
Encoder the most according to claim 1, wherein,
Described 1st photo detector has described point in the end in described measurement direction.
Encoder the most according to claim 2, wherein,
Maximum overall dimensions on the respective described measurement direction of the plurality of photo detector and vertical with described measurement direction
Width on maximum overall dimensions be equal to each other, and, the different described photo detector of distance from described light source that
This has different shapes so that respective light light quantity is equal to each other.
4. according to the encoder described in any one in claims 1 to 3, wherein,
The plurality of photo detector includes multiple described 1st light being equal to each other from distance difference and the area of described light source
Element.
Encoder the most according to claim 4, wherein,
For multiple described 1st photo detector that area is equal to each other,
The total measuring direction size of described point is equal to each other, and, in described measurement side upwardly close to described
Described 1st photo detector of light source, position on described width, the summit of described point from described light source more away from.
6. according to the encoder described in any one in Claims 1 to 5, wherein,
The plurality of photo detector be included on described measurement direction by between configure in the way of described 1st photo detector
, 2 the 2nd photo detectors without described point.
Encoder the most according to claim 6, wherein,
Described 2nd photo detector is quadrilateral shape,
Described 1st photo detector is the shape after the corner of described quadrilateral shape is trimmed to about.
8. according to the encoder described in any one in claim 1～7, wherein,
The plurality of photo detector includes multiple described 1st light that distance is different and area is different from each other from described light source
Element,
In multiple described 1st photo detector that this area is different, in described measurement side upwardly close to the institute of described light source
Stating the 1st photo detector, the total measuring direction size of described point is the biggest.
9. according to the encoder described in any one in claim 1～8, wherein,
The plurality of photo detector is arranged on described width mutually wrong dividing 2 groups in the way of described light source side by side
The position opened.
10. according to the encoder described in any one in claim 1～9, wherein,
Described light source is to be configured to the point source to described absolute pattern injection diffusion light,
Described absolute pattern is the pattern being configured to reflect the light penetrated by described light source,
The plurality of photo detector is configured to receive the light reflected by described absolute pattern.
11. 1 kinds of motors with encoder, wherein,
This motor with encoder has:
Motor；And
The encoder described in any one in claim 1～10.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2014/082598 WO2016092639A1 (en) | 2014-12-09 | 2014-12-09 | Encoder and encoder-equipped motor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106104213A true CN106104213A (en) | 2016-11-09 |
| CN106104213B CN106104213B (en) | 2018-02-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480077269.8A Active CN106104213B (en) | 2014-12-09 | 2014-12-09 | Encoder and motor with encoder |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6037258B2 (en) |
| CN (1) | CN106104213B (en) |
| WO (1) | WO2016092639A1 (en) |
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| CN109737998A (en) * | 2018-12-29 | 2019-05-10 | 苏州汇川技术有限公司 | Encoder electricity tune method, equipment and storage medium |
| CN110274619A (en) * | 2018-03-16 | 2019-09-24 | 富士电机株式会社 | Reflective encoder |
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| JP4437340B2 (en) * | 1998-12-22 | 2010-03-24 | 株式会社ミツトヨ | Photoelectric encoder |
| JP4951885B2 (en) * | 2005-06-29 | 2012-06-13 | ミツミ電機株式会社 | Encoder device |
| JP5979033B2 (en) * | 2013-02-13 | 2016-08-24 | 株式会社ニコン | Encoder |
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| CN1285037A (en) * | 1997-12-19 | 2001-02-21 | 株式会社安川电机 | Encoder |
| CN1435675A (en) * | 2002-01-30 | 2003-08-13 | 富士施乐株式会社 | Optical encoder and scale for encoder |
| US20040004181A1 (en) * | 2002-06-03 | 2004-01-08 | Mitsubishi Denki Kabushiki Kaisha | Photoelectric rotary encoder |
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| CN109737998A (en) * | 2018-12-29 | 2019-05-10 | 苏州汇川技术有限公司 | Encoder electricity tune method, equipment and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6037258B2 (en) | 2016-12-07 |
| JPWO2016092639A1 (en) | 2017-04-27 |
| CN106104213B (en) | 2018-02-13 |
| WO2016092639A1 (en) | 2016-06-16 |
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