CN102023028B - Rotary encoder and manufacturing method thereof, rotary motor, rotary motor system and disk - Google Patents
Rotary encoder and manufacturing method thereof, rotary motor, rotary motor system and disk Download PDFInfo
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- CN102023028B CN102023028B CN201010287102.8A CN201010287102A CN102023028B CN 102023028 B CN102023028 B CN 102023028B CN 201010287102 A CN201010287102 A CN 201010287102A CN 102023028 B CN102023028 B CN 102023028B
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- 238000004519 manufacturing process Methods 0.000 title claims description 43
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- 238000012360 testing method Methods 0.000 description 104
- 238000001514 detection method Methods 0.000 description 37
- 230000000052 comparative effect Effects 0.000 description 36
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/3473—Circular or rotary encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/06—Rolling motors, i.e. motors having the rotor axis parallel to the stator axis and following a circular path as the rotor rolls around the inside or outside of the stator ; Nutating motors, i.e. having the rotor axis parallel to the stator axis inclined with respect to the stator axis and performing a nutational movement as the rotor rolls on the stator
- H02K41/065—Nutating motors
Abstract
An encoder includes a disc-shaped disk disposed so as to be rotatable about a rotation axis and having at least one ring-shaped track in which a rotating grating is formed and at least one fixed grating which is fixedly disposed opposed to the disk so that the fixed grating and the rotating grating construct a diffraction interference optical system. Each of a plurality of slits included in the at least one rotating grating is formed along a curved line obtained by making each of a plurality of radial lines using the rotation axis as a center curved in the circumferential direction at a predetermined curve degree so that a pitch of the slits can be set to a predetermined value.
Description
The present patent application is advocated the right of priority of No. 2009-216447th, the Japanese patent application submitted on September 18th, 2009 according to 35U.S.C. § 119.The full content of this application is incorporated into this in the mode of quoting as proof.
Technical field
The present invention relates to rotary encoder and manufacture method thereof, electric rotating machine, dynamo-electric machine system and rotating disk (disk).
Background technology
In order to measure the physical quantitys such as the position (angle) of moving body (rotary body) of rotation and speed (rotational speed), can use rotary encoder.And scrambler is roughly divided into incremental and absolute type.Incremental encoder mainly detects moving body with respect to the relative position of origin position.Particularly, in incremental encoder, detect in advance origin position, obtain the periodic signals such as pulse signal corresponding with amount of movement with respect to this origin position, this periodic signal is carried out to the processing of multiplication etc., come thus detection position etc.On the other hand, absolute type encoder, also referred to as absolute value encoder, detects the absolute position of moving body.
Developed the scrambler of various detection principles, characteristic that can be required according to use, carrys out the various forms of scramblers of suitable choice and operation.Especially for such as carrying out for the servomotor etc. of the controls such as position control and speed control, scrambler plays a part very important at aspects such as grasping current location.In other words, for motor and the performance of selected and the scrambler that uses and characteristic also performance and the characteristic of this motor of meeting left and right.
As the scrambler that can realize high resolving power, for example, shown in No. 3509830th, Japanese Patent and Japanese kokai publication hei 6-347293 communique, developed the optical encoders, angle sensors that utilizes the diffraction interference light being produced by a plurality of slits (comprising reflection-type and transmission-type).But in these scramblers, owing to will forming diffraction interference optical system, so miniaturization and design, exploitation, manufacture etc. are all very difficult.
Summary of the invention
Therefore, the present invention is just in view of such problem completes, the object of the invention is to, can utilize diffraction interference light to improve resolution and make miniaturization and the manufacture method of become easy rotary encoder, electric rotating machine, dynamo-electric machine system, rotating disk and the rotary encoder such as design, exploitation and manufacture.
In order to solve above-mentioned problem, according to a viewpoint of the present invention, a kind of rotary encoder is provided, this rotary encoder has: discoideus rotating disk, it is configured to rotate around rotation, and has 1 or 2 above tracks of the ring-type of the rotating grating that is formed with respectively optics; And the fixed grating of 1 or 2 above optics, it is in the mode with described rotating grating formation diffraction interference optical system, with described rotating disk fixed configurations relatively, wherein, a plurality of slits that comprise in the rotating grating of at least 1 described track form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, and a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively.
In addition, can be: the degree of crook of the slit of described at least 1 track is set to that the spacing of the slit of the described track of other that the spacing that makes the slit in this track is above with 1 equates.
In addition, can be: the rotating grating of other track and the gap between corresponding at least 1 the described fixed grating of this rotating grating described in the gap between corresponding at least 1 the described fixed grating of the rotating grating of described at least 1 track and this rotating grating equals.
In addition, can be: the degree of crook of the described slit of described at least 1 track is different from described other the degree of crook of described slit of track.
In addition, can be: the bending direction of the slit of described at least 1 track be other the bending direction of described slit of track with this track institute adjacency contrary circumferentially.
In addition, can be: a plurality of slits that comprise in the rotating grating of described track are reflection slits, and 2 the described fixed gratings corresponding with 1 this rotating grating are configured in the same face side of described rotating disk.
In addition, can be: the described fixed grating corresponding with the described track that is formed with described slit along described sweep forms parallel with the tangent line of described sweep.
In addition, in order to solve above-mentioned problem, according to another viewpoint of the present invention, provide a kind of electric rotating machine, this electric rotating machine has: the motor portion that makes turning axle rotation; And rotary encoder, it is connected with described turning axle, measure the position of described turning axle, described rotary encoder has: discoideus rotating disk, it is configured to around rotation, to rotate along with the rotation of described turning axle, and has 1 or 2 above tracks of the ring-type of the rotating grating that is formed with respectively optics; And the fixed grating of 1 or 2 above optics, it is in the mode with described rotating grating formation diffraction interference optical system, with described rotating disk fixed configurations relatively, wherein, a plurality of slits that comprise in the rotating grating of at least 1 described track form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, and a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively.
In addition, in order to solve above-mentioned problem, according to another viewpoint of the present invention, provide a kind of dynamo-electric machine system, this dynamo-electric machine system has: the motor portion that makes turning axle rotation; Rotary encoder, it is connected with described turning axle, measures the position of described turning axle; And control part, it is according to the detected position of described rotary encoder, control the rotation of described motor portion, described rotary encoder has: discoideus rotating disk, it is configured to around rotation, to rotate along with the rotation of described turning axle, and has 1 or 2 above tracks of the ring-type of the rotating grating that is formed with respectively optics; And the fixed grating of 1 or 2 above optics, it is in the mode with described rotating grating formation diffraction interference optical system, with described rotating disk fixed configurations relatively, wherein, a plurality of slits that comprise in the rotating grating of at least 1 described track form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, and a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively.
In addition, in order to solve above-mentioned problem, according to another viewpoint of the present invention, a kind of rotating disk is provided, it forms discoideus, be configured to relative with the fixed grating of 1 or 2 optics above, and can rotate around rotation, this rotating disk has 1 or 2 above tracks of the ring-type of the rotating grating that is formed with respectively optics, in the situation that this rotating disk is applied to rotary encoder, the rotating grating of described optics and described fixed grating form diffraction interference optical system, wherein, a plurality of slits that comprise in the rotating grating of at least 1 described track form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively.
In addition, in order to solve above-mentioned problem, according to another viewpoint of the present invention, a kind of manufacture method of rotary encoder is provided, this rotary encoder has: discoideus rotating disk, it is configured to rotate around rotation, and has 1 or 2 above tracks of the ring-type of the rotating grating that is formed with respectively optics; And the fixed grating of 1 or 2 above optics, it is in the mode with described rotating grating formation diffraction interference optical system, with described rotating disk fixed configurations relatively, this manufacture method comprises: slot number deciding step, can access the mode of the periodic signal of expectation, determine the quantity of a plurality of slits of comprising in the above track of described 1 or 2 rotating grating separately; Radial line is set step, at least 1 described track, sets to equal angles centered by described rotation and a plurality of radial line that equate with the slot number determining in described slot number deciding step centered by described rotation; Sweep is set step, at least 1 track so that the spacing of described a plurality of slits becomes the mode of setting, make described a plurality of radial line respectively with the degree of crook of regulation to circumferential skewing, set a plurality of sweeps; And slit forms step, along described a plurality of sweeps, described a plurality of slits of at least 1 track described in formation.
In addition, can be; At described sweep, set in step, the degree of crook of the slit of described at least 1 track is set as, the spacing that makes the slit in this track equates with 1 other spacing of slit of described track above.
In addition, can be; This manufacture method also has mask configuration step, in this mask configuration step, the mask configuration that is formed with described fixed grating is become to the rotating grating of other track and the gap between corresponding at least 1 the described fixed grating of this rotating grating described in the gap described in making between corresponding at least 1 the described fixed grating of the rotating grating of at least 1 track and this rotating grating equals.
According to the present invention described above, the degree of crook of the rotating grating forming along sweep by suitable setting, can be suitable value by spacing setting, therefore, can at random set the formation position of gap and rotating grating etc.Therefore, can utilize diffraction interference light to improve resolution, can improve the degree of freedom of design and development simultaneously.Consequently, miniaturization that can implement device self, and can use the diffraction interference optical system of easy manufacture.
Accompanying drawing explanation
By reference to the accompanying drawings with reference to following detailed narration, can be more easily and more completely understand the present invention with and subsidiary plurality of advantages, wherein:
Fig. 1 is the key diagram for the structure of the dynamo-electric machine system of the 1st embodiment of the present invention is described.
Fig. 2 is the key diagram for the structure of the rotary encoder of this embodiment is described.
Fig. 3 is the key diagram that the rotating disk for the rotary encoder of this embodiment is had describes.
Fig. 4 is the key diagram that the optical de-tection means for the rotary encoder of this embodiment is had describes.
Fig. 5 is the key diagram that the optical de-tection means for the rotary encoder of this embodiment is had describes.
Fig. 6 is the key diagram that the curved slit for the rotary encoder of this embodiment is had describes.
Fig. 7 A is the key diagram that the position data generating unit for the rotary encoder of this embodiment is had describes.
Fig. 7 B is the key diagram that the position data generating unit for the rotary encoder of this embodiment is had describes.
Fig. 7 C is the key diagram that the position data generating unit for the rotary encoder of this embodiment is had describes.
Fig. 7 D is the key diagram that the position data generating unit for the rotary encoder of this embodiment is had describes.
Fig. 8 is the key diagram for the manufacture method of the rotary encoder of this embodiment is described.
Fig. 9 is the key diagram that the rotating disk for the rotary encoder of the embodiment of this embodiment is had describes.
Figure 10 is the key diagram that the rotating disk for the rotary encoder of comparative example 1 is had describes.
Figure 11 is the key diagram that the rotating disk for the rotary encoder of comparative example 2 is had describes.
Figure 12 is the key diagram that the rotating disk for the rotary encoder of comparative example 3 is had describes.
Figure 13 is the key diagram that the structure of the rotating disk for the rotary encoder of the 2nd embodiment of the present invention is had describes.
Figure 14 is the key diagram that the structure of the rotating disk for the rotary encoder of the 3rd embodiment of the present invention is had describes.
Embodiment
Below, with reference to accompanying drawing, describe the preferred embodiment of the present invention in detail.Note, in this instructions and accompanying drawing, to thering is in fact the textural element of identical function and structure, mark identical label, and omit the repeat specification of these textural elements.
In addition, before explanation the embodiments of the present invention, the summary of the related optical encoders, angle sensors of the technology being associated with each embodiment is described.As optical encoders, angle sensors, developed the scrambler that utilizes the grating being formed by a plurality of slits (comprising reflection-type and transmission-type).This has utilized the scrambler of optical grating to be roughly divided into: merely utilize " the geometrical optics type " of the light that carries out transmission or reflection on grating and utilized " diffraction interference optical type " (for example, with reference to No. 3509830th, Japanese Patent and Japanese kokai publication hei 6-347293 communique) of the diffraction interference light being formed by a plurality of gratings.
In geometrical optics type scrambler, in the situation that not carrying out diffraction and interference, receive by the slit that forms grating and reflect or the light of this slit is crossed in transmission, according to it, be subject to light number of times etc. to determine change in location etc.In this geometrical optics type scrambler, there is following characteristic: the slit separation of 1 grating (below also referred to as " spacing p ") is being made as when constant, distance (below also referred to as " gap g ") between grating and other gratings or light accepting part etc. is longer, and accuracy of detection is lower.
On the other hand, diffraction interference optical type scrambler is to utilize the diffraction interference light formed by a plurality of gratings, according to the light number of times etc. of being subject to of this diffraction interference light, determines change in location etc.Therefore, compare with geometrical optics type scrambler, this diffraction interference optical type scrambler can improve S/N than (Signal toNoise Ratio, signal to noise ratio (S/N ratio)).In addition, diffraction interference optical type scrambler also has following characteristic: even gap g is set longlyer, be also difficult to accuracy of detection to impact.This also means can reduce the possibility that machinery interference occurs between structure member, thus the environmental resistance of raising impact resistance etc.Like this, compare with geometrical optics type scrambler, the advantage of diffraction interference optical type scrambler is more.
But in diffraction interference optical type scrambler, pattern of wants diffraction interference optical system, so spacing p separately of a plurality of grating (diffraction grating) and the interval of each grating are that gap g will be set to appropriate value.The restriction that relation between this spacing p and gap g becomes the exploitation of scrambler self and manufactures.That is, if spacing p or gap g deviate from appropriate value, the quality of diffraction interference light reduces, and the S/N of the periodic signal of detection is than reducing.On the other hand, for spacing p or gap g are remained to appropriate value, except spacing p and gap g, also need to consider that the periodicity (changing accordingly with slit number) of periodic signal and the formation position of slit etc. carry out design and development diffraction interference optical system.
Therefore, degree of freedom reduces, and is difficult for carrying out design and development, in addition, need to adjust for every kind of diffraction interference optical system, therefore manufactures and is also not easy.And, due to the restriction on such design and development, be difficult to the miniaturization of implement device self.
Even in the situation that obtaining 1 periodic signal by 1 group of diffraction interference optical system, also may produce this restriction in design, exploitation and manufacture.But, particularly for example as absolute type encoder, by many groups diffraction interference optical system, obtain in the situation of a plurality of periodic signals, need to organize diffraction interference optical system for each and design, develop and manufacture, therefore their restriction degree is further increased.
Therefore, the present inventor etc. conduct in-depth research such optical encoders, angle sensors, its result, has invented and can utilize diffraction interference light to improve resolution, miniaturization and design, exploitation and manufacture etc. are become be easy to the rotary encoder of each embodiment etc. simultaneously.Below, the embodiments of the present invention are elaborated.
Wherein, below in the embodiments of the present invention of explanation, the dynamo-electric machine system with absolute rotary encoder of take describes as example.That is, the rotary encoder of each embodiment is applied to electric rotating machine, detects the anglec of rotation θ of electric rotating machine as position x.But the rotary encoder of each embodiment described herein also can be applicable to the various rotary bodies that rotate around fixing turning axle as such as prime mover or steering gear (steering) etc. certainly.
In addition, for the ease of understanding, the embodiments of the present invention illustrate in the following order.
<1. the 1st embodiment >
(dynamo-electric machine system of 1-1. the 1st embodiment)
(rotary encoder of 1-2. the 1st embodiment)
(1-2-1. rotating disk 110)
(track TA～TC)
(shape of slit S)
(magnet MG)
(1-2-2. test section MX, test section 130A～130C)
(1X testing agency)
(optical de-tection means)
(structure of 1-2-3. curved slit)
(curved slit in a track T)
(position relationship between the slit of curved slit and fixed grating side)
(curved slit under a plurality of interorbital relations)
(1-2-4. position data generating unit 140)
(action of the dynamo-electric machine system of 1-3. the 1st embodiment)
(manufacture method of the rotary encoder of 1-4. the 1st embodiment)
(example of the effect of the rotary encoder system of 1-5. the 1st embodiment)
(embodiment of the rotary encoder of 1-6. the 1st embodiment)
<2. the 2nd embodiment >
<3. the 3rd embodiment >
<1. the 1st embodiment >
(dynamo-electric machine system of 1-1. the 1st embodiment)
First, with reference to Fig. 1, the structure of the dynamo-electric machine system of the present invention's the 1st embodiment is described.Fig. 1 is the key diagram for the structure of the dynamo-electric machine system of the present invention's the 1st embodiment is described.
As shown in Figure 1, the dynamo-electric machine system of present embodiment (below also referred to as " electric system ") 1 has electric rotating machine (below also referred to as " motor ") 10 and control part 20.In addition, motor 10 has rotary encoder (below also referred to as " scrambler ") 100 and electric rotating machine portion (below also referred to as " motor portion ") 200.
Motor portion 200 is that the power that does not comprise scrambler 100 produces an example in source.Sometimes also by this motor portion 200 referred to as motor.Motor portion 200 at least has turning axle 201 in a side, by this turning axle 201 is rotated around rotation AX, exports revolving force.
In addition, motor portion 200 so long as the servomotor being controlled according to position data be not particularly limited.And motor portion 200 is not limited to the electrodynamic machine portion as power source by electricity, such as being also the motor portion that hydraulic motor portion, pneumatic type motor portion, steam-type motor portion etc. are used other power sources.But below motor portion 200 is described for the situation of electrodynamic machine portion for convenience of explanation.
Scrambler 100 is configured in a side contrary with turning axle 201 of motor portion 200, and is connected to other turning axles (turning axle 202 in Fig. 2) that rotate accordingly with this turning axle 201.And this scrambler 100 is by detecting the position of turning axle 202, detect output revolving force the position x (also referred to as the position x of anglec of rotation θ, motor portion 200 etc.) of turning axle 201, output represents the position data of this position x.
But, except the position x of motor portion 200 or do not detect the position x of motor portion 200, scrambler 100 can also detect at least one in the speed v (also referred to as speed v of rotational speed, angular velocity, motor portion 200 etc.) of turning axle 201 and acceleration a (also referred to as acceleration a of rotary acceleration, angular acceleration, motor portion 200 etc.).In this case, can, by putting with time contraposition that x carries out 1 time or 2 subdifferentials or the processing that counts etc. periodic signal described later at interval in accordance with regulations, detect speed v and the acceleration a of motor portion 200.For convenience of explanation, below suppose that the physical quantity that scrambler 100 detects is that position x describes.
In addition, the allocation position of scrambler 100 is not particularly limited.For example, scrambler 100 can be configured to turning axle 201 and is directly connected, and in addition, also can be connected with rotary bodies such as turning axles 201 via other mechanisms such as reductor or sense of rotation interpreters.
Control part 20 is obtained from the position data of scrambler 100 outputs, according to this position data, controls the rotation of motor portion 200.Therefore, motor portion 200 is being used as in the present embodiment of electrodynamic machine portion, control part 20 is according to position data, and the curtage that control applies motor portion 200 etc., control the rotation of motor portion 200 thus.And control part 20 also can be obtained upper control signal from host control device (not shown), controls motor portion 200, make from the position shown in turning axle 201 these upper control signals of output of motor portion 200 or speed etc.In addition, the in the situation that of using other power sources such as fluid pressure type, pneumatic type, steam-type in motor portion 200, control part 20 can be controlled by controlling the supply of these power sources the rotation of motor portion 200.
(rotary encoder of 1-2. the 1st embodiment)
Then,, with reference to Fig. 2 and Fig. 3, the structure of the scrambler 100 of present embodiment is described.Fig. 2 is the key diagram for the structure of the rotary encoder of present embodiment is described.Fig. 3 is the key diagram that the rotating disk for the rotary encoder of present embodiment is had describes.
As shown in Figure 2, the scrambler 100 of present embodiment has turning axle 101, rotating disk 110, test section MX, test section 130A～130C and position data generating unit 140.
(1-2-1. rotating disk 110)
As shown in Figure 3, rotating disk 110 forms discoideus, and it is roughly consistent with rotation AX to be configured to center of turntable O.And rotating disk 110 is connected to the turning axle corresponding with the turning axle 201 of motor portion 200 202 via the turning axle 101 that can rotate around this rotation AX.Therefore, rotating disk 110 is configured to around turning axle AX, to rotate accordingly with the rotation of motor portion 200.
As shown in Figure 3, rotating disk 110 has track TA～TC and magnet MG.
In the present embodiment, because being take the scrambler 100 of absolute type to describe as example, therefore, in order to detect accurately the absolute position x of motor portion 100 in rotation, rotating disk 110 has 3 track TA～TC.Here, the number of this track T is not limited to 3, can process and suitably set number according to the desired accuracy of detection of absolute position x and signal.In addition, in the situation that the embodiments of the present invention are applied to the scrambler 100 of incremental, if there is curved slit described later, as long as the number of track T is at least 1 above.
(track TA～TC)
Track TA～TC difference is width w in accordance with regulations
a～w
cbe set to the ring-type centered by the center of turntable O of rotating disk 110.In the present embodiment, the width w of each track TA～TC
a～w
cbe set to same width w (w=w
a=w
b=w
c).
And each track TA～TC is configured to, the center of width w position (orbit radius r diametrically
a～r
c) differ from one another.That is, track TA～TC forms the concentric circles centered by center of turntable O, and towards periphery, by the order of track TA, TB, TC, is configured (r from center of turntable O
a< r
b< r
c).
In addition, in the present embodiment, exemplified with the width w of each track TA～TC
a～w
cidentical situation, but this track width w
a～w
calso can be different.
As shown in Figure 3, in each track TA～TC, be formed with respectively the rotating grating LA～LC (optical diffraction gratings of rotation) of optics.
Rotating grating LA～LC has respectively a plurality of slit SLA～SLC of optics, and each rotating grating LA～LC forms respectively an independently part for single diffraction interference optical system.
Slit SLA～SLC forms in the mode of reflective (reflection slit) or printing opacity (transmission slit) respectively.
Forming reflection slit in the situation that, slit SL is such as forming by carrying out the method for the evaporation etc. of the material that reflectivity is high.On the other hand, the position beyond the slit SLA～SLC on rotating disk 110 is such as forming by the method with inferior: utilize the material of the method configuration extinctions such as evaporation, or rotating disk 110 self uses the material of printing opacity.In addition, can also be: rotating disk 110 self uses reflective material, and by etching etc., the position beyond slit SLA～SLC be processed.And, can also be: the position beyond slit SLA～SLC and SLA～SLC all forms with the high material of reflectivity, then, for the position beyond slit SLA～SLC and SLA～SLC, the step in gap direction is set, form thus slit, as phase grating.
On the other hand, in the situation that forming transmission slit, can adopt and form as inferior method, that is: rotating disk 110 forms by the material of printing opacity self, position beyond slit SLA～SLC, configuration carrys out the material of shading by absorb or reflection etc., or implements the processing of shading.But, the formation method of slit SLA～SLC is not particularly limited.
In a word, in the situation that being reflection-type slit, slit SLA～SLC reflects light, position beyond slit SLA～SLC does not make light reflect, and in the situation that being transmission-type slit, slit SLA～SLC can make light transmission, light is covered at the position beyond slit SLA～SLC.
Below, in the present embodiment, for convenience of explanation, slit SLA～SLC of each track TA～TC of rotating disk 110 is described for reflecting the situation of slit.Like this, the in the situation that of using reflection slit on rotating disk 110, can form the diffraction interference optical system of reflection-type, therefore compare with use the situation of transmission slit on rotating disk 110, can reduce noise and the impact on accuracy of detection that the change because of the gap g between rotating disk 110 and mask described later 120 causes.
Preferably, each track TA～TC forms, orbit radius r
a～r
clarger, the number n of slit SLA～SLC
a～n
cmore.That is, because orbit radius is " r
a< r
b< r
c", therefore, track TA～TC slit number is separately set to " n
a< n
b< n
c".Can obtain respectively and slit number n from each track TA～TC
a～n
c3 periodic signals of corresponding multiplicity.Multiplicity (360 °), these 3 periodic signals that rotating disk 110 is often circled are called periodicity m
a～m
c.That is, periodicity m
a～m
cbe respectively and each slit number n
a～n
ccorresponding number.Therefore, preferably, the slit number n of each track TA～TC
a～n
cbe set to the number corresponding with required resolution, to can detect the absolute position x of desired precision.
In the present embodiment, the interval of each track TA～TC slit SLA～SLC is separately spacing p
lA～p
lCin track TA～TC, be set to roughly the same spacing p
l(p
l=p
lA=p
lB=p
lC).But, also can comprise the track of different spacing, as long as there is the spacing p of 2 above track TA～TC
lA～p
lCroughly the same.By in this wise by each spacing p of a plurality of track TA～TC
lA～p
lCbe set as about equally, can similarly form the plurality of track TA～TC diffraction interference optical system separately, thus can simplified design, exploitation and manufacture (also referred to as manufacturing etc.).Special as present embodiment, by by the spacing p of all track TA～TC
lA～p
lCbe made as roughly the samely, can simplify significantly manufacture etc.Here, in the present embodiment, so-called " spacing p
lA～p
lC", refer to the configuration space of slit adjacent in each slit SLA～SLC.That is, spacing p
lA～p
lCrefer to the distance between the center of each slit.
(shape of slit S)
Here, to each track TA～TC, the shape of the slit SLA～SLC in separately describes.
In being disposed at the track TC of most peripheral, slit SLC is formed in the radial line (the radial line LINE1 of Fig. 6) of setting by equal angles interval centered by center of turntable O (rotation AX).The slit of this shape is called " radiation slit ".
On the other hand, in the scrambler 100 of present embodiment, as mentioned above, for can be by the spacing p of a plurality of track TA～TC
lA～p
lCbe unified into spacing p
l, and be more prone in order to make significantly miniaturization and manufacture etc. become, slit SLA, the SLB of track TA, TB forms " curved slit " different from radiating slit.And the slit SLC of track TC also can form curved slit.That is, in a plurality of track TA～TC at least any one above can form curved slit.Like this, in the situation that including curved slit, can realize above-mentioned spacing p
lA～p
lCthe simplification of adjustment, miniaturization and manufacture etc.After can be described in detail this curved slit.
In addition, the radiation slit in present embodiment and the spacing p of curved slit
lA～p
lC, the width w referring at track T
a～w
cthe slit separation (spacing) of center.
(magnet MG)
Magnet MG is configured for detecting a part of rotating an example of testing agency for 1 week of the absolute position x roughly in rotation in 1 week.Magnet MG is configured to: two magnetic poles (the N utmost point and the S utmost point) in the direction parallel with turntable surface across center of turntable O (rotation AX) in symmetrical position.In the situation that use, within 1 week different from present embodiment, rotate testing agency, this magnet MG also can change to structure corresponding to Yu Gai mechanism (such as the 3rd embodiment etc.).
Within this 1 week, rotation testing agency is also referred to as " 1X testing agency " etc.
On the other hand, in the present embodiment, as mentioned above, the slit number n of track TA～TC
a～n
cbe set to n
a< n
b< n
c.And, the periodicity m of the periodic signal obtaining from each track TA～TC
a～m
bthe position detection accuracy that represents each track TA～TC, respectively with slit number n
a～n
ccorresponding.
In other words, as mentioned above, the absolute position x roughly in rotation in 1 week detects in 1X testing agency.
On the other hand, the testing agency of track TA can the high precision of Yi Bi 1X testing agency detect than the absolute position x in the little scope of rotation in 1 week.Here, the testing agency of this track TA is also referred to as " middle L (low: low) testing agency ".
And the testing agency of track TB can be to detect than the higher precision of middle L testing agency than the absolute position x in the less scope of middle L testing agency.Here, the testing agency of this track TB is also referred to as " middle H (high: height) testing agency ".
And the testing agency of track TC can be to detect than the higher precision of middle H testing agency than the absolute position x in the less scope of middle H testing agency.Here, the testing agency of this track TC is also referred to as " incremental detection mechanism ".
That is, the scrambler 100 of the absolute type of present embodiment, by the detection position x of 1X, middle L, middle H, this each testing agency of increment is processed, detects the absolute position x roughly the same with the accuracy of detection of incremental detection mechanism.
In addition, middle L testing agency, middle H testing agency and incremental detection mechanism are respectively at slit number n
a～n
cthere are differences with the aspect such as shape of slit, but be identical in the following areas, that is: each mechanism has respectively 1 independently diffraction interference optical system, thereby as detecting principle, has all used the diffraction interference optical system of optical profile type.Therefore, below, also middle L testing agency, middle H testing agency and incremental detection mechanism are referred to as to " optical de-tection means ".
(1-2-2. test section MX, test section 130A～130C)
Then,, with reference to Fig. 2～Fig. 5, test section MX and test section 130A～130C are described, and these testing agencies are carried out to more specific description.Fig. 4 and Fig. 5 are the key diagrams that the optical de-tection means for the rotary encoder of present embodiment is had describes.
(1X testing agency)
It is relative with magnet MG that test section MX is configured to, and jointly forms 1X testing agency with magnet MG.As shown in Figure 2, test section MX be set to gap g between magnet MG and other test sections 130A～130C and rotating disk 110 between gap g identical.Its result can be adjusted the gap g of detecting device MX, 130A～130C simultaneously, makes to manufacture to wait to become easy.But, also the gap g of this test section MX can be made as to the value different from the gap g of detecting device 130A～130C.
And test section MX detects the rotation of the magnetic direction of the magnet MG corresponding with the rotation of rotating disk 110.Test section MX be so long as can detect in this wise the structure of magnetic direction, and is not particularly limited.Here, as an example of test section MX, such as using MR (magnetoresistance: Magnetro Resistive effect) element, GMR (giant magnetoresistance effect: Giant MagnetroResistive effect) the magnetic degree sensor of element etc.And, as test section MX, such as using the magnetic field detecting elements such as Hall element, detect the 2 axial magnetic field intensitys vertical with rotation AX, according to the detection signal from magnetic field detection element, calculate the magnetic direction of magnet MG, detect thus the rotation of rotating disk 110.
The detection signal of test section MX be during the anglec of rotation θ of rotating disk 110 (position x) rotating 360 degrees in electrical angle
the sinuous electric signal of rotating 360 degrees.And this detection signal represents the absolute position x roughly of rotation in every 1 week of rotating disk 110.Here, electric signal test section MX being detected is called " 1X signal ".This 1X signal is output to position data generating unit 140.
(optical de-tection means)
It is relative with track TA that test section 130A is configured to, L testing agency in the middle of jointly forming with track TA.It is relative with track TB that test section 130B is configured to, H testing agency in the middle of jointly forming with track TB.It is relative with track TC that test section 130C is configured to, and jointly forms incremental detection mechanism with track TC.
As mentioned above, each optical de-tection means of test section 130A～130C have respectively diffraction interference optical system independently aspect etc. be identical.Therefore, here, with reference to Fig. 4, the optical de-tection means of take describes as example, and for the difference of each optical de-tection means, individually supplements narration.
Follow in this, take an optical de-tection means as example describes in the situation that, below, as shown in Figure 4, by the test section corresponding with this optical de-tection means (test section 130A～130C), track (track TA～TC) and rotating grating (rotating grating LA～LC) referred to as " test section 130 ", " track T " and " rotating grating L ", by the slit comprising in this rotating grating L (slit SLA～SLC) referred to as " slit SL ".And, by spacing (the spacing p of this slit SL
lA～p
lC) referred to as " spacing p
l", by slit number (slit number n
a～n
c) referred to as " slit number n ", by the periodicity of the periodic signal obtaining from this optical de-tection means (periodicity m
a～m
c) referred to as " periodicity m ".
As shown in Figure 4, test section 130 has mask 120, illuminating part 131 and light accepting part 132.
Mask 120 is configured regularly to separate the mode that gap g is relative with rotating disk 110.In addition, mask 120 is formed by the material of shading, on the other hand, has fixed grating G1, the G2 (fixing diffraction grating) of 2 optics, and these 2 fixed grating G1, G2 have respectively a plurality of slit SG1, the SG2 of printing opacity.That is, in mask 120, slit SG1, the SG2 of fixed grating G1, G2 can make light transmission, the common formation of this fixed grating G1, G2 and rotating grating L three grating diffration interference opticses.
In the present embodiment, fixed grating G1 and fixed grating G2 are formed on same mask 120.Here, fixed grating G1 and fixed grating G2 also can be formed on the mask 120 of split.In the situation that fixed grating G1 and fixed grating G2 are formed on the mask 120 of split, preferred disposition becomes: in the same face side of rotating disk 110, fixed grating G1 equates with the distance (gap g) between fixed grating G2 with distance (gap g) and rotating grating L between rotating grating L.When having used equidistant 2 fixed grating G1, G2 between this and rotating grating L and use reflection-type slit as the slit SL of rotating grating L, even the position relationship change between rotating disk 110 and test section 130, two fixed grating G1, G2 gap g is separately also constant all the time.Therefore, can reduce the impact that the change of gap g brings diffraction interference optical system.
Here, the relation of the test section 130A～130C of each optical de-tection means gap g is separately described.
In the present embodiment, the spacing p of slit SLA～SLC of each track TA～TC
lA～p
lCbe set to each other about equally, be set to spacing p
l, therefore, the gap g between test section 130A～130C and track TA～TC (being rotating disk 110) can be set as each other about equally.; in the present embodiment; can be as shown in Figure 2, by gap g, rotating grating LB between rotating grating LA and fixed grating G1, the G2 corresponding with it and with its corresponding fixed grating G1, G2 between gap g and rotating grating LC and be all set as about equally with the gap g between its corresponding fixed grating G1, G2.
In the situation that setting in this wise, can for test section 130A～130C, design and develop in the same manner the diffraction interference optical system corresponding with gap g respectively, and the adjustment of the gap g can simultaneously manufacture for each test section 130A～130C time.Therefore, can make manufacture wait and become easy.And, owing in this wise the gap g of test section 130A～130C being set as equating, therefore,, by the mask 120 separately of the test section 130A～130C shown in Fig. 4 is formed as one or test section 130A～130C is configured to one, can make manufacture wait and be more prone to.
In addition, though only make any 2 rotating grating LA～LC (examples of 1 track and other tracks) with and its corresponding fixed grating G1, G2 between gap g consistent, obviously also can obtain such action effect.But, preferably, g consistent optical de-tection means in gap is the spacing p of track T
lbe set to equal optical de-tection means.
Then, illuminating part 131 and light accepting part 132 are described, and respectively fixed grating G1, G2 are described.
Illuminating part 131 has light source, to the fixed grating G1 irradiation light of mask 120.Light wavelength and intensity that illuminating part 131 irradiates are not particularly limited, and can suitably determine according to the characteristic of diffraction interference optical system and desired position resolution etc.In addition, in the present embodiment, this irradiates light and uses diffused light.By using diffused light, each slit SG1 of fixed grating G1 described later roughly can be considered as to line source, can improve diffraction interference effect.And, in the time can roughly slit SG1 being considered as to line source in this wise, also can use directional light, laser, converging light etc. as irradiating light.Obviously, the characteristic of the light that illuminating part 131 can will be used according to directional light/laser/converging light/scattered light etc. etc., and there is the optical element of the regulations such as diffusing lens.
Fixed grating G1 is formed on the position of the light institute incident of illuminating part 131 irradiations.This fixed grating G1 has a plurality of slit SG1 of transmission-type, and by the plurality of slit SG1, makes the light generation diffraction of incident.Its result, each slit SG1 can convert the light that is irradiated to respectively rotating disk 110 to the light using each slit SG1 as line source roughly.
Spacing p between a plurality of slit SG1 of fixed grating G1
g1form: this spacing p
g1and the spacing p between a plurality of slit SL of rotating grating L
lbecome " p
g1=i * p
l(i=1,2,3...) " relation.Wherein, particularly, in the situation of " i=1,2 ", the strengthened situation of resulting periodic signal is in the majority, further says, " i=2 " in the situation that, the situation that the strength ratio of periodic signal " i=1 " is stronger is in the majority.On the other hand, the periodicity m of periodic signal not only changes according to slit number n, also according to this i, changes.Particularly, at least, in the situation of " i=1,2 ", periodicity m is " m=2 * n/i ".Below, for convenience of explanation, to " i=2 " i.e. " p
g1=2p
l" and the situation of " m=n " describe.
In addition, the light that sees through fixed grating G1 can the incident angle when inciding fixed grating G1 be expanded on the Width of fixed grating G1.Therefore, consider this extended corner, in order to improve signal intensity, preferably the width of the slit SL of rotating grating L is set as larger than the width of the slit SG1 of fixed grating G1.Now, the width of predicting when the width of the slit SL of rotating grating L being set as arrive than the light that sees through fixed grating G1 is large or little, can further improve signal with respect to the stability of the alignment error between fixed grating G1 and rotating grating L.
Identical therewith, the light that reflects on rotating grating L can the incident angle when inciding rotating grating L be expanded on the Width of rotating grating L.Therefore, considering this spread angle, in order to improve signal intensity, is also the width that preferably width of the slit SG2 of fixed grating G2 described later is set as being greater than the slit SL of rotating grating L.Now, equally, the width of predicting when the width of the slit SL of fixed grating G2 being set as arrive than the light that is rotated grating L reflection is large or little, can further improve signal with respect to the stability of the alignment error between fixed grating G2 and rotating grating L.
But, obviously, in the situation that can guarantee enough signal intensities and can fully guarantee that signal is with respect to the stability of alignment error, the relation of fixed grating G1, fixed grating G2 and rotating grating L slit width is separately not particularly limited.
In order to improve with the diffraction interference effect of the common diffraction interference optical system forming of other rotating gratings L and fixed grating G2, reduce noise, a plurality of slit SG1 that preferably fixed grating G1 had form the slit SL almost parallel with position in relative.
; as shown in Figure 3, because slit SLA, the SLB of rotating grating LA, LB is curved slit, therefore; preferably, a plurality of slit SG1, the SG2 of the fixed grating G1 of test section 130A, 130B form curved slit in the parallel mode of the curved slit with relative.On the other hand, because the slit S of rotating grating LC is radiation slit, therefore, preferably, a plurality of slit SG1, the SG2 of the fixed grating G1 of test section 130C forms radiation slit in the parallel mode of radiation slit with relative.
But, about radiation slit, as described in " No. 5559600 instructions of United States Patent (USP) ", the spacing p of radiation slit
lmuch smaller than the all-round length of track T, therefore optically radiation slit can be considered as to parallel slits.Therefore, a plurality of slit SG1 of the fixed grating G1 of the test section 130C corresponding with radiation slit can be made as to " parallel slits " parallel to each other.On the other hand, identical therewith, as shown in Figure 5, also a plurality of slit SG1 of the fixed grating G1 of test section 130A, the 130B corresponding with curved slit can be made as to parallel slits.In this case, preferably, will be configured to the parallel slits of fixed grating G1 corresponding to radiation slit, this parallel slits when radiation slit is considered as to parallel slits is parallel.And, preferably, as illustrated in fig. 5 the parallel slits of the fixed grating G1 corresponding with curved slit is configured to, with at least 1 tangent line LINE3 almost parallel of locating of each curved slit.By in this wise the two kind fixed grating G1s corresponding with radiation slit and curved slit being made as to parallel slits, can use same fixed grating G1 for two kinds of fixed grating G1, not only can make manufacture wait and be more prone to, can also reduce manufacturing cost.
As shown in Figure 4, the be fixed illumination of grating G1 diffraction is mapped to the rotating grating L corresponding with fixed grating G1.So the slit SL that the light that is irradiated to rotating grating L is rotated grating L reflects.Now, the light of reflection is rotated the further diffraction of grating L.Then, by the illumination of this rotating grating L diffraction, be mapped to fixed grating G2.
Fixed grating G2 is formed on the position of the light institute incident that is rotated grating L diffraction.The spacing p of the slit SG2 of this fixed grating G2
g2be set to the spacing p with the slit SG1 of fixed grating G1
g1identical.That is, in the present embodiment, " p
g1=p
g2=2 * p
l" set up.And, the shape of this slit SG2 and also identical with the slit SG1 of above-mentioned fixed grating G1 with the position relationship etc. between the slit SG1 of fixed grating G1.Therefore, omit their detailed description.
In addition, G1 is different from fixed grating, and this fixed grating G2 is divided into 2 above regions (example region G2A, G2B as shown in Figure 5).And the slit SG2 in each region is with spacing p in region separately
g2being formed uniformly, but between region, is with the interval " p that staggers respectively
g2/ 4 " mode forms.In addition, for convenience of explanation, below, to as illustrated in fig. 5 fixed grating G2 being divided into the situation of 2 region G2A, G2B, describe.
On the other hand, as shown in Figure 4, the illumination that is rotated grating L diffraction is mapped to fixed grating G2.Being irradiated to the light of this fixed grating G2 interferes with the light that is rotated respectively a plurality of slit SL diffraction of grating L and becomes interference fringe shape.The fixed grating G1 that the position of the highlights of interference fringe causes along with the rotation by rotating disk 110 and the variation of the position relationship between rotating grating L and move.Consequently, through staggering each other " p
g2/ 4 " light intensity of each region G2A, G2B slit SG2 separately staggers 90 ° and be sinusoidal wave shape and increase and decrease.
Light accepting part 132 is configured to receive the light of the slit SG2 that sees through fixed grating G2.And light accepting part 132 has for example such photo detector of light emitting diode, and the light intensity receiving is converted to electric signal.But, now, light accepting part 132 for example has 2 sensitive surfaces, generating respectively electric signal for each region G2A, G2B.
And the electric signal that light accepting part 132 generates is the roughly sinuous electric signal (also referred to as " periodic signal ") of specified period, it is when rotating disk 110 moves the amount corresponding with spacing p etc. and repeat.On the other hand, with identical through the light intensity of region G2A, G2B slit SG2 separately, with this regional G2A, G2B respectively corresponding periodic signal be 2 periodic signals of 90 ° of phase shiftings.
Respectively these 2 periodic signals are called " A phase cycle signal " and " B phase cycle signal ".And,, 2 periodic signals that obtained respectively by middle L testing agency, middle H testing agency and incremental detection mechanism are referred to as to " middle L signal ", " middle H signal " and " increment signal " here.
Like this, three optical grating diffraction interference opticses in optical de-tection means, have been formed.Therefore, as long as independently utilize and spacing p with the size of gap g
l, p
g1, p
g2deng between relation produce to interfere, can detect the periodic signal of expectation.
On the other hand, in geometrical optics type scrambler, be only to receive to see through slit S
llight, therefore, gap g is larger, the impact of the light of diffraction composition and diffusion composition will more cause noise to increase, and therefore need to reduce gap g.On the other hand, in the diffraction interference optical system described in present embodiment, can increase the gap g between fixed part and rotary part, consequently, can improve the degree of freedom of designing and developing, and, can reduce because impacting to wait and cause fixed part and rotary part that the unfavorable condition of disturbing occurs.
In addition, in the present embodiment, as mentioned above, the diffraction interference optical system of three gratings (rotating grating L and fixed grating G1, G2) of take is illustrated as example, but the invention is not restricted to this.For example, as substituting of fixed grating G2, the slit SG2 that can use at this fixed grating G2 position separately has the banded photo detector of sensitive surface, thus, can form in analog three grating diffration interference opticses.Further say, as substituting of fixed grating G1, the slit SG1 that also can use at this fixed grating G1 carries out position separately the light-emitting component of luminous band shape or wire etc., thus, also can form in analog three grating diffration interference opticses.In addition, obviously, the quantity of grating is not particularly limited, as long as can form identical diffraction interference optical system.
(structure of 1-2-3. curved slit)
Above the structure of the rotary encoder 100 of the 1st embodiment of the present invention is illustrated.Then,, with reference to Fig. 5 and Fig. 6, the curved slit that above-mentioned rotating grating LA, LB are used is elaborated.Fig. 6 is the key diagram that the curved slit for the rotary encoder of present embodiment is had describes.
(curved slit in a track T)
First, with reference to Fig. 6, to be the slit SLA of rotating grating LA of track TA or the slit SLB of the rotating grating LB of track TB describe as example the curved slit of any one party of take.Then, the difference of slit SLA and slit SLB is described separately.
It is upper that the slit SL of the rotating grating L of present embodiment is configured in the track T of ring-type, and as described above and as shown in Figure 6, the slit SL of at least 1 above rotating grating L is formed the curved slit different from radiating slit.
As shown in Figure 6, form the slit SL of curved slit (here, referred to as " slit SL ") along sweep LINE2, form, this sweep LINE2 is that the degree of crook C stipulating makes the radial line LINE1 centered by center of turntable O (rotation AX) form along circumferential skewing.
About such slit SL along sweep LINE2, can expect various formation example, below, for of this slit SL, form example and describe.
About the radial line LINE1 corresponding with each slit SL, with as the interval of lower angle, set this radial line LINE1 of the quantity corresponding with slit number n, described angle is carried out equal angles to 2 π (360 °) that rotate 1 week and is cut apart and obtain with being configured in slit number n in its track T.Then, make each radial line LINE1 crooked with same degree of crook C on same Zhou Fangxiang, set thus the sweep LINE2 of each slit SL.Then, each sweep LINE2 along such setting, forms each slit SL with Rack.
Use formula, to one of slit SL, form example and carry out more specific description.
If: center of turntable O is initial point, be 1 with the distance of initial point, with respect to the angle of the datum line by initial point, being θ, track T, internal diameter and external diameter are r
iN, r
oUT.And the slit number that the rotating grating L of track T is comprised is made as n, with j (j=0,1,2..., n-1), identify each slit.So radial line LINE1 represents with following formula with polar form.
LINE1=(1, j * 2 π/n) ... (formula 1)
Wherein, r
iN≤ 1≤r
oUT
And, establish degree of crook be C and rotating grating L a plurality of slit SL spacing for expectation p
ltime radius (radius of the Width center of track T) be r
0situation under, sweep LINE2 represents with following formula 2 with polar form.Slit SL is along this sweep LINE2 and at the Rack w of track T (=r
oUT-r
iN) interior formation.
LINE2=(r
0x (1-C θ), θ+j * 2 π/n) ... (formula 2)
Wherein, r
iN≤ r
0(1-C θ)≤r
oUT
In this curved slit, form in example, degree of crook C is represented by following formula 3.
C=tan[sin
-1{ p
l* n/ (2 π r
0)] ... (formula 3)
In addition, preferably track T forms such width w (=r
oUT-r
iN), this width makes the reflected light from rotating grating L being received by photo detector after seeing through diffraction grating G2 have enough light quantities.In the diffraction interference optical system of present embodiment, for example, as long as the width w of track T is made as to the spacing p of rotating grating L
l20 times～50 times left and right, can obtain enough light quantities.Therefore, known according to formula 3, as the slit SL of curved slit from inner track radius (r
iN) position rise and at angle θ, be 180 ° and arrive outer track radius (r with interior position
oUT).Each crooked slit SL forms respectively: angle θ is in 180 °, and equal surround orbit T mono-week not.By forming in this wise curved slit, can improve the intensity of rotating disk 110, and make the formation of slit SL become easy.
On the other hand, in the diffraction interference optical system forming at the rotating grating L by present embodiment, generally speaking, relation between position on the spacing of a plurality of slit SL that comprise in rotating grating L and the length direction of slit SL is less, the spacing that is a plurality of slit SL is more even, more the noise of resulting sine wave period signal can be reduced, more position detection accuracy can be improved.In other words, along slit SL to inner track radius or when external diameter moves, corresponding to its amount of movement spacing p in the center of the width w from track T
lincrement rate or the slip of departure less, noise is suppressed must be lower, accuracy of detection is higher.
On the other hand, according to the such curved slit of present embodiment, by forming agley slit SL, can be reduced in the spacing variable quantity (, also referred to as " spacing rate of change ") of the slit SL in the formation direction (sweep LINE2 direction) of slit SL here.Result is according to the scrambler 100 of present embodiment, can improve the accuracy of detection of the periodic signal being obtained by each optical de-tection means, thereby improve position detection accuracy.
More specifically, for example, if radiation slit, on radial line LINE1, to form slit SL, at the width w that forms length in direction (radial line LINE1) and track T about equally, therefore, the spacing rate of change of the slit SL in this formation direction is larger for slit SL.This larger spacing rate of change will cause the accuracy of detection of periodic signal to reduce.And n is fewer for slit number, the reduction of this accuracy of detection is larger.On the other hand, if curved slit is compared with radiation slit, slit SL can be elongated to the length corresponding with degree of crook C in the length forming in direction (sweep LINE2).Consequently, can make the spacing rate of change of slit SL relatively little, thereby can improve the accuracy of detection of periodic signal.
Therefore, the scrambler of present embodiment 100 is by using such curved slit, can be in the situation that do not reduce the degree of freedom of designing and developing etc. and do not reduce the accuracy of detection of periodic signal, the different a plurality of track TA～TC of periodicity m of setting cycle signal.Therefore,, according to present embodiment, can easily form high precision and small-sized scrambler 100.
And generally in diffraction interference optical system, the best clearance g between rotating grating L and fixed grating G1, G2 depends on the spacing p of a plurality of slit SL of light wavelength λ that illuminating part 131 sends and rotating grating L
l.For example, in three grating optical systems, if establish k, be positive integer, at p
g1=p
l=p
g2situation under, gap g when meeting following formula 4 for best, at p
g1=2 * p
l=p
g2situation under, gap g when meeting following formula 5 for best.
G=(2 * k-1) * p
l 2/ 4 λ ... (formula 4)
G=(2 * k) * p
l 2/ λ ... (formula 5)
On the other hand, according to the curved slit of present embodiment, the spacing p of a plurality of slit SL
lsuc as formula being expressed as slit number n, orbit radius r (=r shown in (6)
0) and the function f of degree of crook C.
P
l=f (n, r, C) ... (formula 6)
＝(2πr/n)×sin(tan
-1C)
Therefore, without changing slit number n (that is, corresponding to the cycle of periodic signal) and orbit radius r, and only need suitably set degree of crook C, just spacing p can be set as forming the optimum value of diffraction interference optical system.Consequently, can free setting track number n and orbit radius r etc., easily realize miniaturization, and design and development etc. also becomes easy.
In addition, in the situation that with present embodiment differently, in the mode of rotating more than 1 week around track T, form slit SL, such slit is called " multi-spiral slit ".For such multi-spiral slit, on radial direction, the quantity of stacking slit SL increases, and it is large that the width w of track T becomes, and is difficult to realize miniaturization.Therefore, the degree of freedom of designing and developing diminishes, and manufactures the difficulty that self also becomes.On the other hand, the slit SL of present embodiment forms multi-spiral slit, but forms curved slit.Consequently, as mentioned above, can improve the degree of freedom of designing and developing, can make manufacture and miniaturization become easy.
In addition, to form example and the formula of sweep LINE2 etc. be an example to the curved slit of explanation here, in fact do not need to set up such formula.That is,, as long as can form the slit SL of the sweep LINE2 along being bent upwards in week as described above, its formation method and method for designing etc. are just not particularly limited.
(position relationship between curved slit and fixed grating side slit)
In the situation that using parallel slits as fixed grating G1, G2, as shown in Figure 5, fixed grating G1, G2 are configured to: the tangent line LINE3 of the sweep LINE2 of the slit SL of corresponding rotating grating L is parallel with each slit SG1, SG2.If the such curved slit of present embodiment, even in the situation that the allocation position of fixed grating G1, G2 some deviation slightly, due to the spacing p of curved slit
labove-mentioned variable quantity less, therefore, also can guarantee as fixed grating G1, the G2 of parallel slits larger with the region that rotating grating L parallels.Therefore, can further improve the accuracy of detection of periodic signal, and make to manufacture etc. and become very easy.
(curved slit under a plurality of interorbital relations)
Above the curved slit in a track T is illustrated.Here, with reference to Fig. 2 and Fig. 3, the curved slit under the relation between a plurality of track TA～TB is described.
In the present embodiment, as shown in Figure 2, the gap g between rotating grating LA～LC of all track TA～TC and the mask 120 of the test section 130A～130C corresponding with it is set to about equally.On the other hand, when forming diffraction interference optical system, in order to meet above formula 4 or formula 5, realize the spacing p of the slit SL corresponding with gap g
lvery important.
Therefore, in the present embodiment, as shown in Figure 3, the degree of crook C of the slit SLA of track TA is set to, and makes the spacing p of this slit SLA
lAspacing p with the slit SLC of another track TC
lCequate.And as shown in Figure 3, the degree of crook C of the slit SLB of track TB is also set to, and makes the spacing p of this slit SLB
lBspacing p with the slit SLC of another track TC
lCequate.
On the other hand, the slit number n of track TA
aslit number n with track TB
bdifferent.Therefore, known according to above formula 3, it is different from the degree of crook C of track TB that the degree of crook C of track TA is set to.Therefore, can make to have adopted respectively the spacing p of the track TA of curved slit
lAspacing p with track TB
lBabout equally.
Consequently, can be by the spacing p of slit SLA～SLB of all track TA～TC
lA～p
lCbe made as constant.Therefore, test section 130A～130C forms respectively diffraction interference optical system, and can be configured to make gap g constant.In the situation that can form a plurality of test section 130A～130C with constant gap g in this wise, not only the adjustment of test section 130A～130C in the g direction of gap becomes easily, these test sections 130A～130C can also be formed as one.And in the situation that test section 130A～130C is formed as one, it is 1 mask that the mask 120 having separately also can be formed integrally as.In this case, can improve the degree of freedom of design etc., and make to manufacture and become easy.
(1-2-4. position data generating unit 140)
Then, with reference to Fig. 2 and Fig. 7 A～Fig. 7 D, to the remaining structure of scrambler 100, be, that position data generating unit 140 describes.
Position data generating unit 140 obtains sinuous 1X signal, middle L signal, middle H signal and increment signal from above-mentioned test section MX and test section 130A～130C.Then, position data generating unit 140 is determined the absolute position x of motor portion 200 according to these signals, and output represents the position data of this position x.Below, the example that the decision of the position x being carried out by position data generating unit 140 is processed is carried out more specific description.
Here, as mentioned above, in the present embodiment, obtained middle L signal, middle H signal and the increment signal of position data generating unit 140 comprises respectively A phase cycle signal and these 2 periodic signals of B phase cycle signal of 90 ° of phase shiftings.
On the other hand, test section MX also has and detects 90 ° 2 (can be also more than 2) the magnetic degree sensors of magnetic direction that stagger, and output and above-mentioned periodic signal be the phase place of electrical angle 2 the 1X signals (also referred to as A phase 1X signal and B phase 1X signal) of same period of 90 ° that stagger each other in the same manner.And 1X signal is also the sinusoidal wave shape electric signal repeating whenever rotating disk 110 rotations 1 week, therefore, it is also periodic signal.But, owing to detecting the differences such as principle, for convenience of explanation, here 1X signal and middle L signal, middle H signal and increment signal are distinguished, referred to as periodic signal in the situation that, refer to the middle L signal except 1X signal, middle H signal and increment signal.
Therefore, position data generating unit 140, for 1X signal, middle L signal, middle H signal and increment signal, obtains respectively A phase and B these 2 sine wave signals mutually.Then, position data generating unit 140 is for 1X signal, middle L signal, middle H signal and increment signal, respectively A phase and these 2 sine wave signals of B phase are implemented to multiplication processing etc., the signal that generates thus monotone increasing within each cycle (can be also the signal that dullness reduces.Below also referred to as " monotone increasing signal ").
Below, by the monotone increasing signal after the processing of 1X signal referred to as 1X signal, by the monotone increasing signal after the processing of middle L signal referred to as middle L signal, by the monotone increasing signal after the processing of middle H signal referred to as middle H signal, and, by the monotone increasing signal after the processing of increment signal referred to as increment signal.
Fig. 7 A illustrates the example of 1X signal, the example of L signal in the middle of Fig. 7 B illustrates, and the example of H signal in the middle of Fig. 7 C illustrates, Fig. 7 D illustrates the example of increment signal.In Fig. 7 A～Fig. 7 C, transverse axis represents the position x suitable with mechanical angle (angle θ), and the longitudinal axis represents the electrical angle of each signal
and, here 1X signal, middle L signal, middle H signal and increment signal electrical angle are separately called
In Fig. 7 A, for 1X signal, show the every rotating 360 degrees of position x, electrical angle
rotate the example of 1 week, carry out the example of 1 monotone increasing.
In Fig. 7 B, for middle L signal, show the every rotating 360 degrees of position x, electrical angle
rotate the example of 4 weeks, repeatedly carry out the example of 4 monotone increasings.
In Fig. 7 C, for middle H signal, show the every rotating 360 degrees of position x, electrical angle
rotate the example of 16 weeks, repeatedly carry out the example of 16 monotone increasings.
In Fig. 7 D, for increment signal, show the every rotating 360 degrees of position x, electrical angle
rotate the example of 64 weeks, repeatedly carry out the example of 64 monotone increasings.
That is, this represents that middle L signal has the position resolution of 4 times of 1X signal, and middle H signal has the position resolution of 4 times of middle L signal, and increment signal has the position resolution of 4 times of middle H signal.
As present embodiment, spacing is being made as to " p
g1=2 * p
l=p
g2" situation under, in order to realize such resolution, respectively by the slit number n of each track TA～TC
a～n
cbe made as 4,16,64.But this is an example, be not will be to each track TA～TC slit number n
a～n
climit the slit number n of each track TA～TC
a～n
ccan be according to the periodicity m of the desired expectation of periodic signal obtaining from separately
a～m
csuitably set.In addition, as embodiment, by spacing setting, be " p
g1=2 * p
l=p
g2" time, " m
a=n
a, m
a=n
a, m
a=n
a" set up, be set as " p
g1=1 * p
l=p
g2" time, " m
a=2 * n
a, m
a=2 * n
a, m
a=2 * n
a" set up.Can decide and the periodicity m expecting according to these relations
a～m
ccorresponding slit number n
a～n
c.
In addition, in Fig. 7 A～Fig. 7 C, show each signal of monotone increasing linearly, but, position data generating unit 140 for example also can be exported the 1X signal of stepped ground monotone increasing, middle L signal, middle H signal and increment signal.Wherein, preferably, the ladder amplitude in the x direction of position is corresponding with the cycle of the signal of high 1 grade of resolution respectively length.
Position data generating unit 140 generates such 1X signal, middle L signal, middle H signal and increment signal, according to these signals, determines the absolute position x of motor portion 200.
More specifically, in the situation that the example shown in Fig. 7 A～Fig. 7 C, first position data generating unit 140 determines the position of every 90 ° in 360 ° of mechanical angle according to 1X signal.
Then, position data generating unit 140 use in the middle of L signals, determine the position of every (90/4) in these 90 ° °.
Then, position data generating unit 140 use in the middle of H signals, determine the position of every (90/16) in should (90/4) ° °.
Finally, position data generating unit 140 is used increment signals, determines the position of every (90/64) in should (90/16) ° °.
Consequently, the resolution that position data generating unit 140 can be identical with the resolution with outermost incremental detection mechanism is determined the absolute position x of motor portion 200.Then, position data generating unit 140 represents the position data of definite like this absolute position x to control part 20 outputs.
In addition, position data generating unit 140 also can not carried out such processing, but stores the table of the absolute position x corresponding with the combination of 1X signal, middle L signal, middle H signal and increment signal, and shows to determine absolute position x with this.In addition, the processing in the position data 140 illustrating here can certainly be undertaken by control part 20.In this case, position data generating unit 140 can output to control part 20 as position data using 1X signal and each periodic signal of sinuous 1X signal and each periodic signal or the monotone increasing after the processing of multiplication etc.
(action of the dynamo-electric machine system of 1-3. the 1st embodiment)
Then, the action of the electric system 1 of present embodiment is described.Here, because the action of each structure and effect etc. have had been described in detail in the explanation of each structure, therefore suitably elliptically describe.
Control part 20 is obtained upper control signal from host control device etc., and from scrambler 100, obtains the position data of the absolute position x that represents motor portion 200.Then, control part 20, according to upper control signal and position data, generates control signal, and outputs to motor portion 200.
Consequently, motor portion 200, according to this control signal, makes turning axle 201 rotations.So, via turning axle 101, be connected to rotating disk 110 turning axle corresponding with this turning axle 201 202, scrambler 100 and be rotated.On the other hand, each test section MX, 130A～130C detect respectively 1X signal and periodic signal along with the rotation of rotating disk 110, and output to position data generating unit 140.Then, position data generating unit 140, according to these signals of obtaining, generates position data, outputs to control part 20.
In addition, as mentioned above, the scrambler 100 of present embodiment can detect the high-precision absolute position x of motor portion 200, offers control part 20 using it as position data.Therefore, this electric system 1 can, according to this high-precision absolute position x, be controlled the position x of motor portion 200 accurately.
(manufacture method of the rotary encoder of 1-4. the 1st embodiment)
Above the dynamo-electric machine system of the 1st embodiment of the present invention is illustrated.
Then,, with reference to Fig. 8, the manufacture method of the scrambler 100 of present embodiment is described.Fig. 8 is for the key diagram of manufacture method of the rotary encoder of present embodiment is described.
As shown in Figure 8, in the manufacture method of scrambler 100, first carry out the processing of step S101.In this step S101 (example of slot number deciding step), for 1 track T of rotating disk 110, the resolution obtaining from this track T according to hope, the periodicity m of the periodic signal of the expectation that decision will obtain in rotation in 1 week.And, according to this cycle, set and be formed on the slit number n on this track T.Then, advance to step S103.
In step S103 one example of step (radial line set), as shown in Figure 6, separate the radial line LINE1 that equal angles centered by center of turntable O (rotation AX) is set in the quantity determining in step S101.Then, advance to step S105.
In step S105 (sweep is set an example of step), so that the spacing p of slit SL
lthe mode that becomes the value of expectation is set degree of crook C.Then, make a plurality of radial line LINE1 of setting in step S103 with the degree of crook C that sets to identical circumferential skewing, set a plurality of sweep LINE2.But such as in the situation that be the radiation slit of track TC etc., in this step S105, degree of crook C was set to for 0 (representing not crooked).
In addition, in this step S105, degree of crook C is set as, makes the spacing p of the slit SL of the track T (example of 1 track) that after this will form
lspacing p with the slit SL of the track T having formed or the follow-up track T that will form (example of other tracks T)
lequate.After the processing of this step S105, advance to step S107.
In step S107 (slit forms an example of step), along a plurality of sweep LINE2 that set, with Rack w, in track T, form a plurality of slit SL in step S105.Then, advance to step S109.
In step S109, be confirmed whether all to have formed slit SL on a plurality of track T of expectation.Then, if there is the track T that does not form slit SL, the later processing of repeating step S101.On the other hand, if formed all slit SL, advance to step S111.
In step S111 (example of mask configuration step), at least for spacing p
l2 above track T that equate, so that the mode that rotating grating L equates with gap g between fixed grating G1, G2, configuration packet contains the test section 130 of mask 120.
In addition, process simultaneously with these or in the front and back of these processing, carry out the processing that turning axle 101 is connected with rotating disk 110, the processing that each test section 130 is connected with position data generating unit 140 and each structure be housed in housing and to fix or processing that rotatable mode supports it etc., completed thus scrambler 100.But, omit the detailed description of these processing here.
(the effect example of the rotary encoder system of 1-5. the 1st embodiment)
Above the manufacture method of the rotary encoder of the 1st embodiment of the present invention, electric rotating machine, dynamo-electric machine system, rotating disk and rotary encoder is illustrated.
According to scrambler 100 of present embodiment etc., a plurality of slit SL of at least 1 track T form along the curved slit of sweep LINE2.About this curved slit, by adjusting the degree of crook C of sweep LINE2, thus, without the slit number n comprising in the formation position of change track T and track T, i.e. adjustable interval p
l.Therefore, can improve the degree of freedom of design, exploitation etc.
In addition, about the curved slit of using in scrambler 100 grades, can make slit SL length separately extend the amount corresponding with its degree of crook C.Consequently, can reduce the spacing p of slit SL
lat slit, form the variable quantity in direction.This expression can form the spacing p that makes each slit SL in direction at slit
lhomogenization, that is, can make each slit SL as curved slit close to parallel slits.On the other hand, the scrambler 100 of present embodiment has utilized the diffraction interference optical system of using this curved slit.In diffraction interference optical system, a plurality of slit SL are more close to parallel slits, and the S/N that more can improve detection signal compares etc., thereby more can improve accuracy of detection.Therefore, in the scrambler 100 of present embodiment, by adopting curved slit, can make a plurality of slit SL close to parallel slits, therefore, the S/N that can improve detection signal compares etc., can improve accuracy of detection.
Therefore, according to the scrambler 100 of present embodiment, can improve accuracy of detection with diffraction interference light, can reduce again the restriction of the design and development while forming diffraction interference optical system etc., so that the mode of manufacturing is carried out design and development etc.
Orbit radius r is being set large or by the periodicity m of periodic signal
lin the situation of setting littlely, this effect is effective especially.That is, conventionally, when forming diffraction interference optical system, if increase orbit radius r,, in order to form diffraction interference optical system, need to make the spacing p of slit SL
lenough little.So, have to increase its slit number n, the periodicity m of the periodic signal corresponding with its slit number n
lalso increase.On the other hand, same, reducing periodicity m
lsituation under, contrary with it, have to reduce orbit radius r.But, as mentioned above, in the scrambler 100 of present embodiment, by adjusting degree of crook C, can adjust independently slit number n or orbit radius r.Therefore, the restriction in the time of can significantly reducing design and development, can also realize miniaturization etc.
In addition, in the present embodiment, the scrambler 100 of absolute type is illustrated.But the effect of the curved slit of 1 the track T illustrating here etc. is equally applicable to the scrambler of incremental.And, in this case, for example, have a plurality of slit SL of 1 above track T to be formed curved slit.
On the other hand, in the situation that present embodiment being applied to absolute type encoder 100 as present embodiment, by least 1 above track T is formed to curved slit, can make 2 spacing p in above track T
lequate.Consequently, can make the test section 130 (being mask 120) corresponding to these tracks T equate with the gap g between track T.Therefore,, for these tracks T, can carry out the roughly the same design and development of diffraction interference optical system etc.In addition, can carry out the adjustment of gap g for the test section 130 corresponding with these tracks T simultaneously.Therefore, significantly simplified design, exploitation and manufacture etc.
(embodiment of the rotary encoder of 1-6. the 1st embodiment)
Here, in order to make the effect of scrambler 100 grades of present embodiment clearer and more definite, comparative example to the scrambler of the embodiment of the scrambler 100 of present embodiment and the structure different from present embodiment compares, and above-mentioned effect is described in detail.
In addition, for convenience of explanation, on rotating disk 110, only form 1 track T here, action effect of this 1 track T etc. is compared.But scrambler 100 grades of present embodiment, except the action effect etc. of explanation here, also can play other action effects of recording in above-mentioned embodiment certainly.
When comparing, as the scrambler 100 of the embodiment of present embodiment, for rotating disk 110, radius (orbit radius) r by track T in width w direction center is made as 8mm, and its track width w (thickness radially) is made as to 0.5mm.And, on this track T, with the spacing p between the slit SL at orbit radius r=8mm place
lbe the mode of 20 μ m, along above-mentioned sweep LINE2, formed 512 crooked slit SL of the rotating grating T of rotating disk 110.Now, the width of slit SL is set as to spacing p
lhalf i.e. 10 μ m.And, along the tangential direction of this crooked rotating grating L, with " p
g1=2 * p
l=p
g2" mode, with the spacing of 40 μ m, form each fixed grating G1, G2, as the periodicity m of every rotation periodic signal of 1 week, obtained 512/often turn, formed thus the scrambler of the present embodiment.In addition, because light source has been used the LED of wavelength X=880nm, therefore, by the distance between fixed grating G1, G2 and rotating grating L, be that gap g is set as g=p
l 22 times of/λ is 0.9mm.
On the other hand, for action effect of the scrambler of the embodiment of clear and definite present embodiment etc., scrambler as a comparative example, following three kinds of scramblers have for example been prepared: the first scrambler has the rotating disk 310 that is only formed with unbending radiation slit, to obtain the periodic signal (comparative example 1) of same periodicity m=512 in the track T3～T5 same (r=8mm, w=0.5mm); The second scrambler has the rotating disk 410 that is only formed with angled slots, and this angled slots is to radiate (comparative example 2) that slit does not tilt with the mode that is circumferentially predetermined angular A θ agley; The third scrambler is the scrambler of recording in Japanese kokai publication hei 6-347293 communique, and it has the rotating disk 510 (comparative example 3) that is only formed with multi-spiral slit.
More specifically, for make track T3～T5 impose a condition and gap g impose a condition identical with the present embodiment, in comparative example 1～3, all the width of slit SL to be made as to half of spacing p, orbit radius r is made as to 8mm, track width w is made as to 0.5mm, and gap g is made as to 0.9mm.And, in order to obtain the periodic signal of identical periodicity (m=512/often turn), in comparative example 1～3, on track T, according to form separately, formed 512 slit SL3～SL5.
That is,, in comparative example 1, along the radial line LINE1 drawing with equal angles interval from center of turntable O, formed the slit SL3 of 512 rotating grating L.
In comparative example 2, do not make the radial line LINE1 in comparative example 1 crooked, but make its degree of peripheral, oblique A θ=0.35 to track T, and formed slit SL4 along this line.
In this comparative example 1,2, fixed grating G1, G2 form parallel slits, and are configured to rotating grating L3, L4 almost parallel with at least a portion.
On the other hand, in comparative example 3, centered by center of turntable O, so that 512 slit SL5 are accommodated in to the mode in above-mentioned track T5, spirally they are wound around more than 1 week.But, in Figure 13, carried out suitable omission and only conceptually shown 512 slit SL5.In this comparative example 3, fixed grating G1, G2 form parallel slits, and are configured to parallel with the tangent to helix of rotating disk 510.
As shown in table 1, for the comparative example 1～3 of such formation, in the situation that orbit radius r is made as to 8mm, each spacing p
lin comparative example 1,2, be 98 μ m, be 0.98 μ m in comparative example 3.
In comparative example 1,2, due to spacing p
lvery large, be 98 μ m, therefore, very difficult formation is utilized the scrambler of above-mentioned diffraction interference phenomenon.On the other hand, in comparative example 3, due to spacing p
lvery little, be 0.98 μ m, therefore, for rotating grating L and the exigent making precision of fixed grating G1, G2, thereby manufacture the difficulty that becomes.In addition, these spacing p
lcannot be set to the optimum value (20 μ m) with respect to gap g.
On the other hand, in the present embodiment, by adjusting degree of crook C etc., can be by spacing p
lbe adjusted into the optimum value 20 μ m with respect to gap g.
Here, at the spacing p of comparative example 1,2
land between periodicity m, " m=2 π r/p
l" relation set up.On the other hand, at the spacing p of comparative example 3
land between periodicity m, " m≤2 π r/p
l" relation set up, still, by spiral when all number of times are made as q, " p
l=2w/ (q * m) " relation set up.That is,, orbit radius r etc. being remained while wishing change periodicity m under constant state, in comparative example 1～3, must need to change the spacing p of rotating grating L3～L5
lvalue, consequently, also need change with this spacing p
lcorresponding best gap g.
On the other hand, at the p of the present embodiment
land between periodicity m, m≤2 π r/p
lrelation set up, but by adjusting the degree of crook C of rotating grating L, can in meeting the scope of above-mentioned relation, freely set spacing p
l.Therefore, can be by spacing p
lbe made as constant and gap g is made as and under constant state, changes periodicity m.
In addition, when supposing in comparative example 1～3 spacing p
lbe made as (p when identical with the present embodiment
l=20 μ m), in order to utilize 512 slit SL3～S5 to obtain the periodic signal in 512 cycles, in comparative example 1,2, orbit radius r need to be made as to 1.63mm.And in comparative example 3, more than orbit radius r need to being made as to 10.24mm, cause more than track width reaches 10.24mm.Therefore, in this case, the inevitable configuration that also need to change fixed grating G1, G2 and light accepting part 132 etc.And in this case, if orbit radius r is set very littlely as comparative example 1,2, be 1.63mm, the extended corner between slit is excessive, that is, and spacing p
lrate of change excessive, be difficult to utilize diffraction interference phenomenon.On the other hand, if orbit radius r is set very greatly as comparative example 3, be 10.24m, need very large rotating disk 110, scrambler self also can maximize.
On the other hand, below show the comparative result between the periodic signal being obtained by the present embodiment and the periodic signal being obtained by comparative example 1～3.That is, in orbit radius r being remained to the comparative example 1,2 of 8mm, spacing p
lvery large, be 98 μ m, can not obtain the periodic signal (-) of diffraction interference optical system.In addition, by spacing p
lunification is in the situation of 20 μ m, in using the comparative example 1 of radiation slit, and spacing p
lrate of change increase, periodic signal significantly deviates from sinuous signal, characteristics of signals poor (*), in being used the comparative example 2 of angled slots, owing to having adopted angled slots, so spacing p
lrate of change reduce, periodic signal is to some extent close to sine wave, but do not reach enough good characteristics of signals (△).
And, about comparative example 3, in the situation that orbit radius r is remained to 8mm, slit separation p
lvery little, be 0.98 μ m, the best clearance producing is the multiple of 2 μ m.That is, output changes (*) with the gap variation of every 2 μ m.In addition, by spacing p
lunification is in the situation of 20 μ m, multi-spiral slit and radial direction equal intervals between the fixed grating G2 that forms, the scope that shape is consistent is little, is difficult to obtain enough good characteristics of signals (△).
On the other hand, in the present embodiment, because being forms slit SL agley, therefore, slit SL increases in parallel region, and periodic signal is sinusoidal wave substantially, can realize very good characteristics of signals (◎).
(table 1)
Above, as shown in table 1, to compare with the scrambler of comparative example 1～3, the scrambler of the present embodiment not only can easily carry out spacing p
ladjustment, can also realize very good characteristics of signals.
<2. the 2nd embodiment >
Above the dynamo-electric machine system of the present invention's the 1st embodiment is illustrated.
Then,, with reference to Figure 13, the dynamo-electric machine system of the present invention's the 2nd embodiment is described.Figure 13 is the key diagram that the structure of the rotating disk for the rotary encoder of the 2nd embodiment of the present invention is had describes.
In the 1st embodiment of the invention described above, as shown in Figure 3, to forming the slit SLA of track TA, the TB of curved slit, the bending direction of SLB is that identical circumferential situation is illustrated.But the present invention is not limited to this example, can be also: adjacent track bending direction is each other upwards contrary in week.Therefore, here, as the 2nd embodiment of the present invention, adjacent orbit bending direction is each other set at the contrary example that makes progress in week and is described.In addition, except the bending direction of track be set to contrary on Zhou Fangxiang, the scrambler of present embodiment etc. can be configured to identical with above-mentioned the 1st embodiment, therefore, centered by the difference with the 1st embodiment, describes.
As shown in figure 13, the rotating disk 610 that the scrambler of present embodiment has has rotating grating LD on track TA (example of at least 1 track), carrys out the rotating grating LA shown in alternate figures 3.And this rotating grating LD has a plurality of slit SLD.
Different from the slit SLA shown in Fig. 3, the bending direction of slit SLD be set to bending direction with the slit SLB of adjacent track TB (examples of other tracks) contrary circumferentially.That is, along making the radial line LINE1 sweep LINE2 that bending forms toward the clockwise direction form slit SLB, in contrast, along making the radial line LINE sweep that counterclockwise bending forms form this slit SLD.
On the other hand, the diffraction interference light producing from each slit SL forms such interference fringe: this interference fringe repeats in the substantially vertical direction of the length direction with each slit SL.On the other hand, owing to being subject to bending, therefore radially the becoming close to circumferentially from rotating disk as the length direction of the slit SL of curved slit.Therefore, sometimes in the direction of adjacent orbit, repeatedly form interference fringe.Consequently, interference fringe is likely crosstalked with the diffraction interference optical system of adjacent orbit.And in order to prevent such crosstalking, the design and development of scrambler can be restricted sometimes.
In this case, by as present embodiment, each slit SLD of adjacent track TA, TB, the bending direction of SLB are set as to opposite directions, thus, the direction that forms interference fringe can be changed, the design and development of crosstalking can be easily do not produced.
In addition, obviously in the present embodiment, special action effect of other that also can bring into play that above-mentioned the 1st embodiment plays etc.
<3. the 3rd embodiment >
Above the dynamo-electric machine system of the 2nd embodiment of the present invention is illustrated.
Then,, with reference to Figure 14, the dynamo-electric machine system of the 3rd embodiment of the present invention is described.Figure 14 is for the key diagram of the structure of the rotating disk that the rotary encoder of the 3rd embodiment of the present invention has is described.
In the 1st and the 2nd embodiment of the invention described above, to using magnet MG to be illustrated as the situation of 1X testing agency.But, as mentioned above, as 1X testing agency, as long as can generally detect the absolute position x of motor portion 200 in rotation in 1 week, and be not particularly limited.Therefore, here, as the 3rd embodiment of the present invention, another example of Dui1X testing agency describes.First talk about in advance, 1X testing agency described herein is an example, also can use other 1X testing agency.In addition, the structure beyond 1X testing agency can be configured to identical with the above-mentioned the 1st or the 2nd embodiment, therefore, here by with the 1st and the difference of the 2nd embodiment centered by describe.
As shown in figure 14, in the rotating disk 710 that the scrambler of present embodiment has, be formed with rotating grating LX, the LY of 2 above optics, substitute magnet MG.
LA～LC is different from rotating grating, and rotating grating LX, LY have neither radiate a plurality of slit SLX, the SLY that slit is not again curved slit.
A plurality of slit SLX form has spacing p
lXmultiple concentric circles, a plurality of slit SLY form has spacing p
lYmultiple concentric circles.And, preferably, spacing p
lX, p
lYbe set to the spacing p with slit SLA～SLC
lA～p
lCequate (p
l=p
lA=p
lB=p
lC=p
lX=p
lY).And except shape difference, each slit SLX, that SLY forms is identical with slit SLA～SLC.
A plurality of slit SLX that form multiple concentric circles are to depart from 1 spacing p from center of turntable O in the 1st direction
lXsome OX centered by and form.A plurality of slit SLY that form multiple concentric circles are to stagger in the 2nd direction of 90 ° and to depart from 1 spacing p from center of turntable O with the 1st direction
lYsome OY centered by and form.
On the other hand, with these slits SLX, SLY relatively, the configuration test section 130 identical with test section 130A～130C, carrys out the test section MX shown in alternate figures 2 successively.Here, the test section corresponding with slit SLX 130 is called to " test section 130X " (not shown), the test section corresponding with slit SLY 130 is called to " test section 130Y " (not shown).And this test section 130X, 130Y also can be different from test section 130A～130C, that is, the fixed grating G2 of mask 120 can not be divided into a plurality of region G2A, G2B.And test section 130X, 130Y are configured to, slit SG1, the SG2 of fixed grating G1, the G2 of each mask 120 is parallel with the tangent line of slit SLX, the SLY of corresponding concentric circles.Consequently, slit SLX forms the three optical grating diffraction interference opticses identical with above-mentioned optical de-tection means with the test section 130X corresponding with it.And slit SLY also forms the three optical grating diffraction interference opticses identical with above-mentioned optical de-tection means with the test section 130Y corresponding with it.
Because central point OX, the OY of slit SLX, SLY have only departed from 1 spacing p from center of turntable O
lX, p
lY, therefore, can from 2 diffraction interference optical systems of such formation, obtain the sinuous 1X signal that rotates to be 1 cycle for 1 week with rotating disk 710.In addition, the direction departing from from center of turntable O due to central point OX, the OY of slit SLX, SLY differs 90 °, therefore, can from 2 diffraction interference optical systems, generate respectively the 1X signal of A phase and the B phase of 90 ° of phase shiftings.
Therefore, position data generating unit 140 can be used the 1X signal of the 1X signal substituting magnet MG obtaining from slit SLX, SLY, generates the absolute position x roughly of motor portion 200.And identical with above-mentioned the 1st embodiment, position data generating unit 140 can be determined high-precision absolute position x according to 1X signal and other periodic signals, and position data is outputed to control part 20.
The in the situation that of present embodiment, as 1X testing agency, do not use magnetic mechanism, and as test section 130X, 130Y, can use the structure identical with position detection part 130A～130C.And, by by the spacing p of slit SLX, SLY
lX, p
lYbe made as the spacing p with slit SLA～SLC
lA～p
lCequating, can be identical value with the gap g unification of position detection part 130A～130C by the gap g of test section 130X, 130Y.Consequently, compare with the 1st and the scrambler of the 2nd embodiment etc., can make to manufacture to wait and be more prone to, and can also reduce manufacturing cost.
Obviously, can be according to above explanation, to the various modifications of the invention process and distortion.Therefore, should be understood that, the present invention can implement within the scope of the appended claims, and is not limited to specific descriptions herein.
And in this manual, the step of recording in process flow diagram not only comprises the processing of carrying out successively in time by the order of recording, also comprise be not by the time carry out successively but side by side or the processing of carrying out individually.In addition, even for the step of processing successively by the time, obvious also according to circumstances and suitably change order.
Claims (10)
1. a rotary encoder, this rotary encoder has:
Discoideus rotating disk, it is configured to rotate around rotation, and has 2 above tracks of the ring-type that is formed with respectively optics rotating grating; And
The fixed grating of 2 above optics, it to be to form the mode of diffraction interference optical system with described rotating grating, with described rotating disk fixed configurations relatively,
Wherein, a plurality of slits that comprise in the rotating grating of 2 above described tracks form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively
The described a plurality of slits that form along sweep are to form along the all-round of described track,
The degree of crook of the slit of at least 1 track is different from the degree of crook of the slit of other tracks, thus, the spacing of the slit of described at least 1 track and slit number are different from the spacing of slit that this track and degree of crook be different from other tracks of this track and equate.
2. rotary encoder according to claim 1, wherein,
The rotating grating of other track and the gap between corresponding at least 1 the described fixed grating of this rotating grating described in gap between corresponding at least 1 the described fixed grating of the rotating grating of described at least 1 track and this rotating grating equals.
3. rotary encoder according to claim 1, wherein,
The bending direction of the slit of described at least 1 track be the bending direction with the described slit of other tracks of this track institute adjacency contrary circumferentially.
4. rotary encoder according to claim 1, wherein,
A plurality of slits that comprise in the rotating grating of described track are reflection slits,
2 the described fixed gratings corresponding with 1 this rotating grating are configured in the same face side of described rotating disk.
5. rotary encoder according to claim 1, wherein,
The described fixed grating corresponding with the described track that is formed with described slit along described sweep forms parallel with the tangent line of described sweep.
6. an electric rotating machine, this electric rotating machine has:
Make the motor portion of turning axle rotation; And
Rotary encoder, it is connected with described turning axle, measures the position of described turning axle,
Described rotary encoder has:
Discoideus rotating disk, it is configured to around rotation, to rotate along with the rotation of described turning axle, and has 2 above tracks of the ring-type that is formed with respectively optics rotating grating; And
The fixed grating of 2 above optics, it to be to form the mode of diffraction interference optical system with described rotating grating, with described rotating disk fixed configurations relatively,
Wherein, a plurality of slits that comprise in the rotating grating of 2 above described tracks form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively
The described a plurality of slits that form along sweep are to form along the all-round of described track,
The degree of crook of the slit of at least 1 track is different from the degree of crook of the slit of other tracks, thus, the spacing of the slit of described at least 1 track and slit number are different from the spacing of slit that this track and degree of crook be different from other tracks of this track and equate.
7. a dynamo-electric machine system, this dynamo-electric machine system has:
Make the motor portion of turning axle rotation;
Rotary encoder, it is connected with described turning axle, measures the position of described turning axle; And
Control part, it is according to the detected position of described rotary encoder, controls the rotation of described motor portion,
Described rotary encoder has:
Discoideus rotating disk, it is configured to around rotation, to rotate along with the rotation of described turning axle, and has 2 above tracks of the ring-type that is formed with respectively optics rotating grating; And
The fixed grating of 2 above optics, it to be to form the mode of diffraction interference optical system with described rotating grating, with described rotating disk fixed configurations relatively,
Wherein, a plurality of slits that comprise in the rotating grating of 2 above described tracks form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively
The described a plurality of slits that form along sweep are to form along the all-round of described track,
The degree of crook of the slit of at least 1 track is different from the degree of crook of the slit of other tracks, thus, the spacing of the slit of described at least 1 track and slit number are different from the spacing of slit that this track and degree of crook be different from other tracks of this track and equate.
8. a rotating disk, it forms discoideus, the fixed grating that is configured to the optics above with 2 is relative, and can rotate around rotation, this rotating disk has 2 above tracks of the ring-type that is formed with respectively optics rotating grating, in the situation that this rotating disk is applied to rotary encoder, described optics rotating grating and described fixed grating form diffraction interference optical system
Wherein, a plurality of slits that comprise in the rotating grating of 2 above described tracks form along sweep respectively, this sweep is to take the mode that can be setting by the spacing setting of this slit, a plurality of radial line centered by described rotation are formed towards circumferential skewing with the degree of crook of regulation respectively
The described a plurality of slits that form along sweep are to form along the all-round of described track,
The degree of crook of the slit of at least 1 track is different from the degree of crook of the slit of other tracks, thus, the spacing of the slit of described at least 1 track and slit number are different from the spacing of slit that this track and degree of crook be different from other tracks of this track and equate.
9. a manufacture method for rotary encoder, this rotary encoder has: discoideus rotating disk, it is configured to rotate around rotation, and has 2 above tracks of the ring-type that is formed with respectively optics rotating grating; And the fixed grating of 2 above optics, it to be to form the mode of diffraction interference optical system with described rotating grating, with described rotating disk fixed configurations relatively,
This manufacture method comprises:
Slot number deciding step, can access the mode of the periodic signal of expectation, determines the quantity of a plurality of slits of comprising in described 2 above tracks rotating grating separately;
Radial line is set step, for 2 above described tracks, sets to equal angles centered by described rotation and a plurality of radial line that equate with the slot number determining in described slot number deciding step centered by described rotation;
Sweep is set step, for 2 above tracks so that the spacing of described a plurality of slits becomes the mode of setting, make described a plurality of radial line respectively with the degree of crook of regulation to circumferential skewing, set a plurality of sweeps; And
Slit forms step, along described a plurality of sweeps, forms described a plurality of slits of described 2 above tracks,
Wherein, the described a plurality of slits that form along sweep are to form along the all-round of described track,
The degree of crook of the slit of at least 1 track is different from the degree of crook of the slit of other tracks, thus, the spacing of the slit of described at least 1 track and slit number are different from the spacing of slit that this track and degree of crook be different from other tracks of this track and equate.
10. the manufacture method of rotary encoder according to claim 9, wherein,
This manufacture method also has mask configuration step, in this mask configuration step, the mask configuration that is formed with described fixed grating is become to the rotating grating of other track and the gap between corresponding at least 1 the described fixed grating of this rotating grating described in the gap described in making between corresponding at least 1 the described fixed grating of the rotating grating of at least 1 track and this rotating grating equals.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009216447A JP5170046B2 (en) | 2009-09-18 | 2009-09-18 | Rotary encoder, rotary motor, rotary motor system, disk, and method for manufacturing rotary encoder |
| JP2009-216447 | 2009-09-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102023028A CN102023028A (en) | 2011-04-20 |
| CN102023028B true CN102023028B (en) | 2014-10-15 |
Family
ID=43091281
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010287102.8A Expired - Fee Related CN102023028B (en) | 2009-09-18 | 2010-09-16 | Rotary encoder and manufacturing method thereof, rotary motor, rotary motor system and disk |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8546744B2 (en) |
| EP (1) | EP2302333A3 (en) |
| JP (1) | JP5170046B2 (en) |
| KR (1) | KR20110031118A (en) |
| CN (1) | CN102023028B (en) |
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| US11221238B2 (en) * | 2019-07-05 | 2022-01-11 | Canon Kabushiki Kaisha | Optical encoder and drive control device comprising a light receiving element to receive a first interference fringe formed by a first periodic pattern and a second diffracted light from a second periodic pattern toward the first periodic pattern |
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Also Published As
| Publication number | Publication date |
|---|---|
| EP2302333A2 (en) | 2011-03-30 |
| US8546744B2 (en) | 2013-10-01 |
| JP5170046B2 (en) | 2013-03-27 |
| KR20110031118A (en) | 2011-03-24 |
| US20110069390A1 (en) | 2011-03-24 |
| EP2302333A3 (en) | 2012-10-24 |
| JP2011064612A (en) | 2011-03-31 |
| CN102023028A (en) | 2011-04-20 |
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