CN106098850B - A kind of multiple row dynamic scanning type transparent conductive film etching device - Google Patents
A kind of multiple row dynamic scanning type transparent conductive film etching device Download PDFInfo
- Publication number
- CN106098850B CN106098850B CN201610612594.0A CN201610612594A CN106098850B CN 106098850 B CN106098850 B CN 106098850B CN 201610612594 A CN201610612594 A CN 201610612594A CN 106098850 B CN106098850 B CN 106098850B
- Authority
- CN
- China
- Prior art keywords
- spray
- wool
- making herbs
- scanning type
- dynamic scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005530 etching Methods 0.000 title claims abstract description 20
- 239000007921 spray Substances 0.000 claims abstract description 234
- 235000008216 herbs Nutrition 0.000 claims abstract description 141
- 210000002268 wool Anatomy 0.000 claims abstract description 141
- 239000007788 liquid Substances 0.000 claims abstract description 45
- 230000005540 biological transmission Effects 0.000 claims abstract description 27
- 239000002253 acid Substances 0.000 claims abstract description 22
- 238000004140 cleaning Methods 0.000 claims abstract description 17
- 238000004064 recycling Methods 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 37
- 239000003595 mist Substances 0.000 claims description 14
- 230000001360 synchronised effect Effects 0.000 claims description 14
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 6
- 230000008030 elimination Effects 0.000 claims description 5
- 238000003379 elimination reaction Methods 0.000 claims description 5
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 239000004744 fabric Substances 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 238000002834 transmittance Methods 0.000 abstract description 7
- 230000003746 surface roughness Effects 0.000 abstract description 5
- 239000010408 film Substances 0.000 description 36
- 238000000034 method Methods 0.000 description 28
- 230000008569 process Effects 0.000 description 14
- 238000005516 engineering process Methods 0.000 description 11
- 238000009826 distribution Methods 0.000 description 10
- 230000003068 static effect Effects 0.000 description 8
- 238000005507 spraying Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000003513 alkali Substances 0.000 description 4
- 239000002585 base Substances 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000000739 chaotic effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 241000209140 Triticum Species 0.000 description 1
- 235000021307 Triticum Nutrition 0.000 description 1
- 230000004308 accommodation Effects 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 235000013312 flour Nutrition 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/08—Etching
- C30B33/10—Etching in solutions or melts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Paper (AREA)
- Electrostatic Spraying Apparatus (AREA)
Abstract
The invention discloses a kind of multiple row dynamic scanning type transparent conductive film etching devices, including rack, dynamic scanning type spray making herbs into wool section, spray cleaning section, baking section, eliminate electrostatic section and transmission platform, the dynamic scanning type spray making herbs into wool section includes dynamic scanning type spray making herbs into wool device, photoelectric sensor and Woolen-making liquid cache pool, and the dynamic scanning type spray making herbs into wool device includes acid and alkali-resistance flexible hose, spray head (7) and support frame (1)；The acid and alkali-resistance flexible hose is connected with spray head (7)；The photoelectric sensor is fixedly installed on support frame (1), and the dynamic scanning type spray making herbs into wool device is connected by electric connection line with photoelectric sensor；The Woolen-making liquid of the recycling of spray making herbs into wool section is connected by pipeline with Woolen-making liquid cache pool.Smooth production process of the invention, yields is high, and the surface uniformity of flannelette transparent conductive film is good, and the high and low square resistance of light transmittance, surface roughness reduce.
Description
Technical field
The present invention relates to the production preparation fields of transparent conductive film making herbs into wool, lead more particularly to multiple row dynamic scanning type is transparent
Conductive film etching device.
Background technique
In industries such as intelligent light modulation film, display, touch screen, solar batteries, transparent conductive film is widely applied,
Preceding electrode of the transparent conductive film as film solar battery structure, function are to realize that the charge for generating photovoltaic effect carries out
It collects and is oriented to battery or electric appliance uses, it is desirable that preceding electrode conductivity with higher, i.e. transparent conductive film has lower
Square resistance；Simultaneously as the corresponding wavelength spectral transmittance of thin-film solar cells photovoltaic function demand sufficient amount, i.e., right
It answers and has high light transmittance on wavelength.Therefore, for thin-film solar cells, it is desirable that the transparent conductive film as preceding electrode is necessary
Meet low square resistance and high spectral transmittance simultaneously.For industries such as light modulation film, display, touch screens, also other side
Block resistance and transmitance propose corresponding requirements.
For the generating efficiency for improving solar battery, the solar energy spectrum energy entered inside thin-film solar cells is improved
As one of solution route, the solar energy loss before entering PIN or PN junction is reduced as far as possible, that is, electrode is transparent before improving
The spectral transmittance of conductive film, meanwhile, square resistance cannot have large change.The surface suede technology of transparent conductive film can be with
Significantly improve too can light transmission rate, by electrically conducting transparent film formed cratering, cratering or diamond shaped it is small recessed
Hole falls into effect to generate light, sunlight is made to generate multiple reflections in pit, improves transmission probability, that is, light transmittance, increase and enter
The sunlight of inside battery improves the generating efficiency of thin-film solar cells.
It is said from flannelette technology, measurement standard is mist degree, uniformity and surface roughness, in conjunction with transparent conductive film in square
The requirement of resistance and transmitance, it is thick that the technical standard of evaluation flannelette transparent conductive film superiority and inferiority respectively includes mist degree, uniformity, surface
Rugosity, transmitance, square resistance etc..Mist degree refers to that the incident light that wavelength is 700nm is incident by the non-flannelette of film, and light is in film
Flannelette dispersion transmitance and the total transmitance of incident ray ratio；The mist degree and Biao Mian Cu Unfeigned degree that uniformity refers to flannelette are in list
Uniformity coefficient in plane product.
Magnetron sputtering technology is the major technique of transparent conductive film large-scale production, and the film surface of preparation uniformly causes
Close, excellent performance needs to carry out flannelette processing applied to electrode before thin-film solar cells, and making herbs into wool technology is divided into dry and wet
Two kinds, dry method carves film surface using the methods of laser, electron beam, and production process takes a long time, energy consumption is high, can not
It is used for industrialized production on a large scale；Wet process corrodes film surface with acid-base solution appropriate, by controlling acid base concentration
Reach surface suede purpose with technology, is the main flow direction of current industrial applications.
Wet-method etching technology includes two kinds of techniques: impregnating and sprays, immersion is mainly used for the research of laboratory small sample, big to advise
Mould production is difficult to realize；Traditional static spray process performs etching film surface using fixed multiple spray heads, on the one hand sprays
The soda acid Woolen-making liquid distribution drenched within the scope of taper is not substantially uniformity, and center abundance is larger, and periphery is smaller, on the other hand each
It sprays the contact of taper range or the soda acid Woolen-making liquid in intersection region is distributed confusion, have larger shadow to the uniformity of film surface
It rings, the film surface after leading to making herbs into wool forms bar shaped lines, brings surface uniformity, mist degree, transmitance, square resistance, surface
The performance loss such as roughness, current traditional spray process and equipment are difficult to meet industry to mist degree, uniformity, square resistance etc.
The technical requirements of performance.
For convenience of description, to spray process etching device, in making herbs into wool substrate transfer plane, before transmission direction of advance is
To vertical direction is defined as laterally.Traditional static method is in its forward direction since the Woolen-making liquid particle of spray generation is larger and is distributed
Unevenly, several size dimensions are not easy to control, influence film along preceding surface uniformity and surface roughness to distribution；At it
Laterally, being respectively unevenly distributed within the scope of spray taper will lead to the area inside to being unevenly distributed, meanwhile, two adjacent sprays are bored
The distribution of shape intersection region is chaotic, particles collision leads to lateral distribution uniformity and roughness reduced performance.
Current traditional static spray process etching device and the technology Woolen-making liquid that spray generates during making herbs into wool distribution
And non-homogeneous, central area comparatively dense, while the lateral chaotic bar shaped flannelette lines easy to form of intersection region distribution, it causes
The inhomogeneities of bright conductive film making herbs into wool, substantially reduces yield rate, so that the performance parameters such as mist degree, light transmittance, square resistance exist
Laterally there is inhomogeneities in forward direction；Static method can cause technical arrangement plan using fixed spray head method simultaneously
Freedom degree reduces, and is unfavorable for improving process flow and technological parameter, limits further increasing for transparent conductive film performance parameter.
The surface uniformity of industrialization production requirements flannelette is excellent, and parameter distribution is uniform, and each properties of product are stablized, using traditional spray side
Method can not be realized effectively, and its industrial adjustability is poor, it is more difficult to meet the improvement and adjustment of technological parameter.
Summary of the invention
Regarding the issue above, the present invention provides a kind of multiple row dynamic that conductive film flannelette uniformity obtained is good
Scan-type transparent conductive film etching device.
In order to achieve the above objectives, present invention employs following technical proposals: a kind of multiple row dynamic scanning type of the invention is saturating
Bright conductive film etching device, including rack, dynamic scanning type spray making herbs into wool section, spray cleaning section, baking section, elimination
Electrostatic section and transmission platform, the dynamic scanning type spray making herbs into wool section are installed on support frame, on the transmission platform according to
It is secondary that spray making herbs into wool section, spray cleaning section, baking section are installed and eliminate electrostatic section, the dynamic scanning type spray spray
Mist making herbs into wool section includes dynamic scanning type spray making herbs into wool device and Woolen-making liquid cache pool, the dynamic scanning type spray making herbs into wool
Device includes photoelectric sensor, acid and alkali-resistance flexible hose, spray head and support frame；The acid and alkali-resistance flexible hose and spray spray
Mist head is connected；The photoelectric sensor is fixedly installed on support frame, and the photoelectric sensor is swept by control line and dynamic
Formula spray making herbs into wool device is retouched to be connected；The Woolen-making liquid of the recycling of spray making herbs into wool section passes through pipeline and Woolen-making liquid cache pool phase
Connection, the acid & alkali liquid of spray head are connected by acid and alkali-resistance flexible hose with Woolen-making liquid cache pool.The Woolen-making liquid caching
Pond is used for the recycling of making herbs into wool acid & alkali liquid, and the acid & alkali liquid of spray head enters Woolen-making liquid cache pool by flexible hose.
Further, the dynamic scanning type spray making herbs into wool device include support frame, support gear, synchronous toothed belt,
Synchronous motor or servo motor, spray head fixing seat, sliding rail and spray head；The support gear is set to support frame
Two sides, synchronous motor or servo motor are fixedly installed on the middle part at the top of support frame, spray head fixing seat and synchronous gear
Shape band Joint, the spray head fixing seat for capableing of reciprocal dynamic scanning type movement are connected with sliding rail, the spray
Fog-spray nozzle is fixedly installed on the lower section of spray head fixing seat, is provided with making herbs into wool substrate below the spray head.
Further, the number for the spray head being arranged on the dynamic scanning type spray making herbs into wool device be one or
Two, the distance range of the spray head away from making herbs into wool substrate is 5~30cm.
Further, the dynamic scanning type spray making herbs into wool device is a column or even column；The spray head
Spray head for spray head or fog-spray nozzle, even column dynamic scanning type spray making herbs into wool device mutually staggers setting, two-phase
The distance between adjacent dynamic scanning type spray making herbs into wool device is greater than making herbs into wool substrate making herbs into wool direction biggest size of element, the making herbs into wool
Substrate making herbs into wool direction biggest size of element is 0.3~3m.
Further, the material of the Woolen-making liquid cache pool and spray head is resistant material.
Further, the dynamic scanning type spray making herbs into wool section is additionally provided with strong air knife up and down, described strong up and down
Power air knife is distributed in pairs up and down in transmission platform, and the strong air knife up and down and transmission platform are 1-6cm.
Further, online pH detection meter is provided in the Woolen-making liquid cache pool.
Further, the spray head is set to dynamic scanning type spray before sensing that making herbs into wool substrate reaches
The side of making herbs into wool device, making herbs into wool substrate are resetted by rear spray head.
Further, the range of scanned frequencies of the dynamic scanning type spray making herbs into wool device is 20~300 beats/min.
Further, the spray cleaning section includes multiple rows of spray tube, fog-spray nozzle and injection spray pipe, respectively arranges spray tube
It is spaced apart from each other setting with injection spray pipe, i.e., spray/spraying/spray/Sprayable, every row's injection spray pipe are uniformly connected by several fog-spray nozzles
It is formed in same pipeline.
The utility model has the advantages that smooth production process of the present invention, yields is high, and the surface uniformity of flannelette transparent conductive film is good, thoroughly
The high and low square resistance of light rate, surface roughness reduce.Technical process Woolen-making liquid usage amount and technological difficulty are reduced, from
Dynamicization degree is high.By using multiple row dynamic scanning type spray making herbs into wool device, making herbs into wool production capacity can be improved, performance parameter is stablized,
Using circulating Woolen-making liquid mode, its usage amount is saved.
Compared with traditional static sprays making herbs into wool technology, the present invention has the advantage that
(1) using the multiple row dynamic scanning type spray device for being different from static mode, make transparent conductive film making herbs into wool wheat flour
Suede liquid etch period and Woolen-making liquid are evenly distributed steadily, overcome the bar shaped lines for solving lateral distribution, and improve preceding to equal
Even property.
(2) present invention efficiently solves tradition spray etching device and technology in lateral distribution using dynamic scanning type method
The bar shaped lines of appearance, solve the Woolen-making liquid that fixed spray head occurs be unevenly distributed, intersection region distribution confusion etc.
Problem, production technology can be stablized from main modulation, manufacturing process, have high yields, product quality and production capacity, especially flannelette
Uniformity, surface roughness effectively improve the performance parameter of flannelette transparent conductive film.
Detailed description of the invention
Fig. 1 is single-row dynamic scanning type spray making herbs into wool device schematic diagram；
Fig. 2 is multiple row dynamic scanning type spray making herbs into wool production equipment schematic diagram；
Wherein, 1 rack, 2 support gears, 3 synchronous toothed belts, 4 synchronous motors or servo motor, 5 spray heads are fixed
Seat, 6 sliding rails, 7 spray heads, 8 making herbs into wool substrates, 9 transmission platforms, 10 the 1st column dynamic scanning type spray making herbs into wool devices arrangement,
11 the 2nd column dynamic scanning type spray making herbs into wool devices arrangement.
Specific embodiment
Following embodiment only exists in illustrative purpose, limits the scope of the invention without being intended to.
Embodiment 1
As depicted in figs. 1 and 2, a kind of multiple row dynamic scanning type transparent conductive film etching device of the invention, including rack,
Dynamic scanning type spray making herbs into wool section, baking section, eliminates electrostatic section and transmission platform, the dynamic at spray cleaning section
Scan-type spray making herbs into wool section is installed on support frame, and spray making herbs into wool section, spray are sequentially installed on the transmission platform 9
It sprays mist cleaning section, baking section and eliminates electrostatic section, the dynamic scanning type spray making herbs into wool section includes dynamic scanning type spray
Mist making herbs into wool device and Woolen-making liquid cache pool are sprayed, the dynamic scanning type spray making herbs into wool device includes photoelectric sensor, acid and alkali-resistance
Flexible hose, spray head 7 and support frame 1；The acid and alkali-resistance flexible hose is connected with spray head 7；The photoelectricity
Inductor is fixedly installed on support frame 1, and the photoelectric sensor passes through control line and dynamic scanning type spray making herbs into wool device
It is connected；The Woolen-making liquid of the recycling of spray making herbs into wool section is connected by pipeline with Woolen-making liquid cache pool, spray head
Acid & alkali liquid is connected by acid and alkali-resistance flexible hose with Woolen-making liquid cache pool.
The dynamic scanning type spray making herbs into wool device includes support frame 1, support gear 2, synchronous toothed belt 3, synchronizes electricity
Machine or servo motor 4, spray head fixing seat 5, sliding rail 6 and spray head 7；The support gear 2 is set to support frame 1
Two sides, synchronous motor or servo motor 4 be fixedly installed on the middle part at 1 top of support frame, spray head fixing seat 5 with it is synchronous
Toothed belt Joint, the spray head fixing seat 5 for capableing of reciprocal dynamic scanning type movement is connected with sliding rail 6, described
Spray head 7 is fixedly installed on 5 lower section of spray head fixing seat, and the lower section of the spray head 7 is provided with making herbs into wool base
Bottom 8.
The number for the spray head 7 being arranged on the dynamic scanning type spray making herbs into wool device be one or two, institute
Stating distance range of the spray head 7 away from making herbs into wool substrate 8 is 30cm.
The spray head 7 is set to dynamic scanning type spray making herbs into wool device before sensing that making herbs into wool substrate 8 reaches
Side, making herbs into wool substrate 8 pass through rear spray head 7 reset.
The dynamic scanning type spray making herbs into wool device is a column or even column；The spray head 7 be spray head or
The material of fog-spray nozzle, the Woolen-making liquid cache pool and spray head 7 is resistant material.The spray spray of even column dynamic scanning type
The spray head 7 of mist making herbs into wool device mutually staggers setting, i.e., if first row is located at left side, secondary series is located at right side, with this
Analogize；The distance between two adjacent dynamic scanning type spray making herbs into wool devices are greater than 8 making herbs into wool direction maximum dimensioning of making herbs into wool substrate
Very little, the 8 making herbs into wool direction biggest size of element of making herbs into wool substrate is 0.3m.
The dynamic scanning type spray making herbs into wool section is additionally provided with strong air knife up and down, and the strong air knife up and down is passing
Defeated platform is distributed in pairs up and down, and the strong air knife up and down and transmission platform are 4cm.
Online pH detection meter is provided in the Woolen-making liquid cache pool.
Each column dynamic scanning type spray making herbs into wool device range of scanned frequencies is 20 beats/min.
The spray cleaning section includes multiple rows of spray tube, fog-spray nozzle and injection spray pipe, respectively arranges spray tube and injection spray pipe phase
Mutually interval setting, i.e. spray/spraying/spray/Sprayable, every row's injection spray pipe are uniformly connected to same pipeline by several fog-spray nozzles
Composition.
Application method: making herbs into wool substrate by it is manual or automatic upper piece to transmission platform, photoelectric sensor detects substrate in place
Afterwards, the spray head of first row making herbs into wool device is moved since side to other side scan-type, while acid and alkali-resistance flexible hose will
Making herbs into wool process Woolen-making liquid is transmitted to spray head by Woolen-making liquid cache pool, when photoelectric sensor detects that substrate is left
Afterwards, spray head is reset to beginning state and stops Woolen-making liquid transmission；Secondary series making herbs into wool device photoelectric sensor detects substrate
Start making herbs into wool process afterwards in place, technical process is similar with first row, but spray head initial position is in the transmission platform other side；
It repeats the above process to all even column making herbs into wool device making herbs into wool and finishes, even column spray device installs such as Fig. 2, equal to improve parameter
More even column making herbs into wool devices can be used in even property and production capacity.By upper lower air knife by Woolen-making liquid remaining in substrate after making herbs into wool
Basic remove drains into Woolen-making liquid cache pool completion dynamic scanning type spray making herbs into wool section process, into subsequent technique.
After substrate enters spray cleaning section, spray/spraying/spray/spray process cleaning is passed sequentially through, by substrate table
Face residual Woolen-making liquid continues dilution cleaning, and by upper and lower 2~3 pairs of strong air knifes, strong air knife and substrate transport direction are at 65
~85 degree of angles are to thoroughly remove surface residual water droplet；Baking section dries substrate table using resistance heating or infrared heating mode
Face moisture carries out static elimination to substrate by the array Xelminator of static elimination section later, bottom sheet can be used it is artificial or
Automated manner.A pair of strong air knife up and down refers to the last one work step of spray making herbs into wool section, the strong air knife of cleaning section
It is similar.
It, can distance, each column spray device scan frequency, substrate between active accommodation multiple row spray device in the process section
The technological parameters such as transmission speed, spray head pressure, making herbs into wool flow quantity, spray head and substrate distance between the surface produce to improve
Product performance parameters.
Embodiment 2
Embodiment 2 the difference from embodiment 1 is that: a kind of multiple row dynamic scanning type transparent conductive film making herbs into wool of the invention is set
It is standby, including rack, dynamic scanning type spray making herbs into wool section, spray cleaning section, baking section, eliminate electrostatic section and transmission is flat
Platform, the dynamic scanning type spray making herbs into wool section are installed on support frame, and spray spray is sequentially installed on the transmission platform 9
Mist making herbs into wool section, spray cleaning section, baking section and elimination electrostatic section, the dynamic scanning type spray making herbs into wool section include dynamic
State scan-type spray making herbs into wool device and Woolen-making liquid cache pool, the dynamic scanning type spray making herbs into wool device includes optoelectronic induction
Device, acid and alkali-resistance flexible hose, spray head 7 and support frame 1；
The number for the spray head 7 being arranged on the dynamic scanning type spray making herbs into wool device be one or two, institute
Stating distance range of the spray head 7 away from making herbs into wool substrate 8 is 5cm.
The distance between two adjacent dynamic scanning type spray making herbs into wool devices are greater than 8 making herbs into wool direction maximum geometry of making herbs into wool substrate
Size, the 8 making herbs into wool direction biggest size of element of making herbs into wool substrate are 3m.
The dynamic scanning type spray making herbs into wool section is additionally provided with strong air knife up and down, and the strong air knife up and down is passing
Defeated platform is distributed in pairs up and down, and the strong air knife up and down and transmission platform are 1cm；
Each column dynamic scanning type spray making herbs into wool device range of scanned frequencies is 100 beats/min.
Embodiment 3
Embodiment 3 the difference from embodiment 1 is that: as depicted in figs. 1 and 2, a kind of multiple row dynamic scanning type of the invention
Transparent conductive film etching device, including rack, dynamic scanning type spray making herbs into wool section, spray cleaning section, baking section, disappear
Section and transmission platform are destaticed, the dynamic scanning type spray making herbs into wool section is installed on support frame, on the transmission platform 9
It is sequentially installed with spray making herbs into wool section, spray cleaning section, baking section and eliminates electrostatic section, the dynamic scanning type spray
Spraying making herbs into wool section includes dynamic scanning type spray making herbs into wool device and Woolen-making liquid cache pool, the dynamic scanning type spray system
Suede device includes photoelectric sensor, acid and alkali-resistance flexible hose, spray head 7 and support frame 1；
The number for the spray head 7 being arranged on the dynamic scanning type spray making herbs into wool device be one or two, institute
Stating distance range of the spray head 7 away from making herbs into wool substrate 8 is 20cm.
The distance between two adjacent dynamic scanning type spray making herbs into wool devices are greater than 8 making herbs into wool direction maximum geometry of making herbs into wool substrate
Size, the 8 making herbs into wool direction biggest size of element of making herbs into wool substrate are 2.3m.
The dynamic scanning type spray making herbs into wool section is additionally provided with strong air knife up and down, and the strong air knife up and down is passing
Defeated platform is distributed in pairs up and down, and the strong air knife up and down and transmission platform are 6cm；
Each column dynamic scanning type spray making herbs into wool device range of scanned frequencies is 300 beats/min.
Specific embodiment described herein is only an example for the spirit of the invention.The neck of technology belonging to the present invention
The technical staff in domain can make various modifications or additions to the described embodiments or replace by a similar method
In generation, however, it does not deviate from the spirit of the invention or beyond the scope of the appended claims.
Although 1 rack is used more herein, 2 support gears, 3 synchronous toothed belts, 4 synchronous motors or servo motor, 5
Spray head fixing seat, 6 sliding rails, 7 spray heads, 8 making herbs into wool substrates, 9 transmission platforms, 10 the 1st column dynamic scanning types spray
Spraying making herbs into wool device arrangement, the terms such as 11 the 2nd column dynamic scanning type spray making herbs into wool devices arrangement, but be not precluded and use other arts
A possibility that language.The use of these items is only for be more convenient to describe and explain essence of the invention；It is construed as
Any additional limitation is disagreed with spirit of that invention.
Claims (7)
1. a kind of multiple row dynamic scanning type transparent conductive film etching device, including rack, dynamic scanning type spray making herbs into wool section,
Spray cleaning section, baking section, elimination electrostatic section and transmission platform, the dynamic scanning type spray making herbs into wool section are installed on
On support frame, it is sequentially installed with spray making herbs into wool section, spray cleaning section, baking section on the transmission platform (9) and disappears
Destatic section, it is characterised in that: the dynamic scanning type spray making herbs into wool section include dynamic scanning type spray making herbs into wool device,
Photoelectric sensor and Woolen-making liquid cache pool, the dynamic scanning type spray making herbs into wool device include acid and alkali-resistance flexible hose, spray
Fog-spray nozzle (7) and support frame (1)；The acid and alkali-resistance flexible hose is connected with spray head (7)；The photoelectric sensor is solid
Surely it is set on support frame (1), the dynamic scanning type spray making herbs into wool device is connected by electric connection line with photoelectric sensor
It connects；The Woolen-making liquid of the recycling of spray making herbs into wool section is connected by pipeline with Woolen-making liquid cache pool, the soda acid of spray head
Liquid is connected by acid and alkali-resistance flexible hose with Woolen-making liquid cache pool；
The dynamic scanning type spray making herbs into wool device includes support frame (1), support gear (2), synchronous toothed belt (3), synchronizes
Motor or servo motor (4), spray head fixing seat (5), sliding rail (6) and spray head (7)；The support gear (2)
The two sides of support frame (1) are set to, synchronous motor or servo motor (4) are fixedly installed on the middle part at the top of support frame (1), spray
Fog-spray nozzle fixing seat (5) and synchronous toothed belt Joint are capable of the spray head fixing seat (5) of reciprocal dynamic scanning type movement
It is connected with sliding rail (6), the spray head (7) is fixedly installed on the lower section of spray head fixing seat (5), the spray
Making herbs into wool substrate (8) are provided with below fog-spray nozzle (7)；The range of scanned frequencies of the dynamic scanning type spray making herbs into wool device is
20 ~ 300 beats/min；The dynamic scanning type spray making herbs into wool device is a column or even column；The spray head (7) is
The spray head (7) of spray head or fog-spray nozzle, even column dynamic scanning type spray making herbs into wool device mutually staggers setting, two-phase
The distance between adjacent dynamic scanning type spray making herbs into wool device is greater than making herbs into wool substrate (8) making herbs into wool direction biggest size of element, described
Making herbs into wool substrate (8) making herbs into wool direction biggest size of element is 0.3 ~ 3m.
2. multiple row dynamic scanning type transparent conductive film etching device according to claim 1, it is characterised in that: described dynamic
The number for the spray head (7) being arranged on state scan-type spray making herbs into wool device be one or two, the spray head
(7) distance range away from making herbs into wool substrate (8) is 5 ~ 30cm.
3. multiple row dynamic scanning type transparent conductive film etching device according to claim 2, it is characterised in that: the making herbs into wool
The material of liquid cache pool and spray head is resistant material.
4. multiple row dynamic scanning type transparent conductive film etching device according to claim 2, it is characterised in that: the dynamic
Scan-type spray making herbs into wool section is additionally provided with strong air knife up and down, and the strong air knife up and down is divided in pairs up and down in transmission platform
Cloth, the strong air knife up and down and transmission platform are 1-6cm.
5. multiple row dynamic scanning type transparent conductive film etching device according to claim 4, it is characterised in that: the making herbs into wool
Online pH detection meter is provided in liquid cache pool.
6. multiple row dynamic scanning type transparent conductive film etching device according to claim 2, it is characterised in that: the spray
Fog-spray nozzle (7) is set to the side of dynamic scanning type spray making herbs into wool device, making herbs into wool base before sensing that making herbs into wool substrate (8) reach
Bottom (8) is resetted by rear spray head (7).
7. multiple row dynamic scanning type transparent conductive film etching device according to claim 1, it is characterised in that: the spray
Spray clean section includes multiple rows of spray tube, fog-spray nozzle and injection spray pipe, and each row's spray tube and injection spray pipe are spaced apart from each other setting, every row's spray
Mist pipe is uniformly connected to same pipeline by several fog-spray nozzles and forms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610612594.0A CN106098850B (en) | 2016-07-29 | 2016-07-29 | A kind of multiple row dynamic scanning type transparent conductive film etching device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610612594.0A CN106098850B (en) | 2016-07-29 | 2016-07-29 | A kind of multiple row dynamic scanning type transparent conductive film etching device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106098850A CN106098850A (en) | 2016-11-09 |
| CN106098850B true CN106098850B (en) | 2018-12-04 |
Family
ID=57478844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610612594.0A Active CN106098850B (en) | 2016-07-29 | 2016-07-29 | A kind of multiple row dynamic scanning type transparent conductive film etching device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106098850B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103866259A (en) * | 2014-03-17 | 2014-06-18 | 江苏汇景薄膜科技有限公司 | Binary tree texture surface making equipment for transparent conducting film |
| CN203760438U (en) * | 2014-03-13 | 2014-08-06 | 北京京东方光电科技有限公司 | Spraying system and wet etching device |
| CN205944124U (en) * | 2016-07-29 | 2017-02-08 | 郑州航空工业管理学院 | Multiseriate dynamic scan formula transparent conducting film making herbs into wool equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06280055A (en) * | 1993-03-26 | 1994-10-04 | Taiyo Yuden Co Ltd | Etching method for transparent conductive film |
-
2016
- 2016-07-29 CN CN201610612594.0A patent/CN106098850B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203760438U (en) * | 2014-03-13 | 2014-08-06 | 北京京东方光电科技有限公司 | Spraying system and wet etching device |
| CN103866259A (en) * | 2014-03-17 | 2014-06-18 | 江苏汇景薄膜科技有限公司 | Binary tree texture surface making equipment for transparent conducting film |
| CN205944124U (en) * | 2016-07-29 | 2017-02-08 | 郑州航空工业管理学院 | Multiseriate dynamic scan formula transparent conducting film making herbs into wool equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106098850A (en) | 2016-11-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN205393078U (en) | Silicon wafers of solar cell's cleaning and drying device | |
| CN102912451A (en) | Low-cost monocrystalline silicon wafer texturing additive | |
| CN202150481U (en) | Automatic efficient solar energy battery slice etching and pickling connected device | |
| CN105118802B (en) | Cell back mirror polish water film thickness control device | |
| CN106098850B (en) | A kind of multiple row dynamic scanning type transparent conductive film etching device | |
| CN106299023B (en) | A kind of anti-PID solar cells are done over again the processing method of piece | |
| CN205944124U (en) | Multiseriate dynamic scan formula transparent conducting film making herbs into wool equipment | |
| CN202308013U (en) | Surface fluff making device for solar silicon chip | |
| CN102515248B (en) | Method for preparing ZnO nano-rod array by pulse electromagnetic field | |
| CN103341458A (en) | High-power concentrating photovoltaic conversion receiver circuit board cleaning technology | |
| CN207042910U (en) | A kind of daylighting formula glass plants house top automatic flushing device | |
| CN205959994U (en) | Heterojunction solar cell of single face polishing | |
| CN106298595A (en) | The acid dip pickle of solar battery sheet | |
| CN207603569U (en) | A kind of photovoltaic module cleannes monitoring device | |
| CN103866259B (en) | A kind of nesa coating binary tree etching device | |
| CN206727096U (en) | A kind of shrapnel device of solar cell dry method making herbs into wool | |
| CN202741360U (en) | Automatic washer used for cleaning poor screen-printed substrate | |
| CN205580930U (en) | A viscosity measurement appearance for electronic paste | |
| CN112467042B (en) | Intelligent automatic production system for perovskite solar cell module | |
| CN204448693U (en) | A kind of automatic flushing device of cell piece cleaning machine roller | |
| CN203754802U (en) | Transparent conducting film binary tree texturing equipment | |
| CN204699990U (en) | A kind of high-efficiency washing device for bell housing or wheel hub | |
| CN208570539U (en) | A kind of film layer cleaning device and film layer cleaning system | |
| CN208078958U (en) | A kind of solar energy power generating board mount of novel beautification | |
| CN205966573U (en) | Automatic quick cleaning device of wet process equipment gyro wheel |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210618 Address after: No.100 Fenyang Road, FENHU Economic Development Zone, Wujiang District, Suzhou City, Jiangsu Province Patentee after: JIMAIKE MATERIAL TECHNOLOGY (SUZHOU) Co.,Ltd. Address before: 450046 Longzihu University Park, Zhengdong New District, Zhengzhou City, Henan Province Patentee before: ZHENGZHOU INSTITUTE OF AERONAUTICAL INDUSTRY MANAGEMENT |