CN106098644A - 一种daf膜与垫块结合的芯片封装结构及其制造方法 - Google Patents

一种daf膜与垫块结合的芯片封装结构及其制造方法 Download PDF

Info

Publication number
CN106098644A
CN106098644A CN201610658054.6A CN201610658054A CN106098644A CN 106098644 A CN106098644 A CN 106098644A CN 201610658054 A CN201610658054 A CN 201610658054A CN 106098644 A CN106098644 A CN 106098644A
Authority
CN
China
Prior art keywords
cushion block
chip
fingerprint sensor
substrate
daf film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610658054.6A
Other languages
English (en)
Inventor
李涛涛
安强
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huatian Technology Xian Co Ltd
Original Assignee
Huatian Technology Xian Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huatian Technology Xian Co Ltd filed Critical Huatian Technology Xian Co Ltd
Priority to CN201610658054.6A priority Critical patent/CN106098644A/zh
Publication of CN106098644A publication Critical patent/CN106098644A/zh
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00Pattern recognition
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16195Flat cap [not enclosing an internal cavity]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Theoretical Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Artificial Intelligence (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Biology (AREA)
  • Evolutionary Computation (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Human Computer Interaction (AREA)
  • Multimedia (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Image Input (AREA)

Abstract

本发明公开了一种DAF膜与垫块结合的芯片封装结构及其制造方法,该封装结构包括:基板、指纹传感芯片、保护盖板、垫块,指纹传感芯片与基板之间通过键合丝进行互连,基板上表面、指纹传感芯片、键合丝、垫块及保护盖板下表面被DAF膜包裹。本发明的指纹传感芯片封装结构采用DAF膜进行保护盖板的直接贴装,无需塑封工序,优化工艺流程;且DAF膜和垫块结合用于指纹传感芯片的封装结构,使得保护盖板和指纹传感芯片表面之间的间距更好控制,保证指纹识别芯片的识别效果,提高封装良率。

Description

一种DAF膜与垫块结合的芯片封装结构及其制造方法
技术领域
本发明涉及传感器芯片封装技术领域,具体是一种DAF膜结合垫块的指纹传感芯片封装结构及其制造方法。
背景技术
随着现代社会的进步,个人身份识别以及个人信息安全的重要性逐步受到人们的关注。由于人体指纹具有唯一性和不变性,使得指纹识别技术具有安全性好,可靠性高,使用简单方便的特点,使得指纹识别技术被广泛应用于保护个人信息安全的各种领域,例如,手机、电脑、门禁、考勤及其他涉密系统等领域均出现了各式各样的指纹识别系统。
当前指纹传感芯片封装技术主要以重叠注塑和塑封工艺居多,对于塑封封装技术产品完成封装后,模组组装过程需要在指纹传感芯片表面加玻璃、蓝宝石等盖板,以保护指纹传感芯片在使用过程中不被磨损,破坏。例如,公开号为CN104051366A的专利文献,公开了一种指纹识别芯片封装结构,包括基板、耦合于基板表面的感应芯片、位于感应芯片的感应区表面的上盖层,以及位于基板和感应芯片表面的塑封层,所述塑封层暴露出所述上盖层。通过塑封料对指纹传感芯片表面进行封装,则采集指纹时感应信号需穿过塑封料、盖板或者图层,使得信号干扰大,且封装厚度及芯片表面与塑封体间距离难以控制。
发明内容
本发明的目的是针对现有的不足,提供一种DAF膜与垫块结合的芯片封装结构及其制造方法。所述芯片封装结构采用DAF膜进行保护盖板的直接贴装,无需塑封工序,优化工艺流程;且DAF膜和垫块结合用于指纹传感芯片的封装结构,使得保护盖板和指纹传感芯片表面之间的间距更好控制,保证指纹识别芯片的识别效果,提高封装良率。
为实现上述目的,本发明提供如下技术方案:
一种DAF膜与垫块结合的芯片封装结构,包括:基板、指纹传感芯片、保护盖板,所述指纹传感芯片位于所述基板的上方,所述指纹传感芯片的焊盘面向上,所述指纹传感芯片与所述基板之间通过键合丝进行互连,所述保护盖板位于所述指纹传感芯片的感应区域正上方,所述封装结构还包括垫块,所述垫块位于所述基板和所述保护盖板之间,所述基板上表面、指纹传感芯片、键合丝、垫块及保护盖板下表面被DAF膜包裹。
进一步,所述指纹传感芯片与所述基板之间通过粘结胶粘接在一起。
进一步,所述粘结胶为环氧树脂胶。
进一步,所述指纹传感芯片为电容式指纹传感芯片或电阻式指纹传感芯片。
进一步,所述保护盖板材质的介电常数大于3、硬度大于4H、粗糙度小于2μm。
进一步,所述保护盖板材质为玻璃、蓝宝石或者陶瓷材料。
进一步,所述垫块至少两个,均匀且对称分布在芯片周围。
一种DAF膜与垫块结合的芯片封装结构的制造方法,包括以下步骤:
步骤一:准备基板;
步骤二:将指纹传感芯片贴装在基板上;
步骤三:将垫块贴装在基板上;
步骤四:通过引线键合工艺,将指纹传感芯片与基板电路形成互连通路;
步骤五:用DAF膜将保护盖板直接贴装在指纹传感芯片的上方,使得DAF膜结合垫块基板上表面、指纹传感芯片和键合丝。
进一步,所述步骤一至步骤三用以下步骤代替:
步骤一:准备带有垫块的基板;
步骤二:将指纹传感芯片贴装在基板上;
与现有技术相比,本发明的有益效果是:
本发明所述的指纹传感芯片封装结构采用DAF膜进行保护盖板的直接贴装,无需塑封工序,优化工艺流程,节约成本;且DAF膜和垫块结合用于指纹传感芯片的封装结构,使得保护盖板和指纹传感芯片表面之间的间距更好控制,避免在贴装过程中因DAF膜晃动而导致保护盖板倾斜的风险,保证指纹识别芯片的识别效果,提高封装良率。
附图说明
图1为本发明所述芯片封装结构的示意图;
图2为本发明所述DAF膜的示意图;
图3为本发明所述基板示意图;
图4为本发明所述指纹传感芯片贴装在基板上的示意图;
图5为本发明所述垫块贴装在基板示意图;
图6为本发明所述键合示意图;
图7为本发明所述带垫块的基板示意图。
图中:1、基板;2、粘结胶;3、指纹传感芯片;4、垫块;5、键合丝;6、DAF膜;7、保护盖板;8、保护膜;9、功能胶膜;10、基层胶膜。
具体实施方式
下面结合附图对本发明作进一步说明。
如图1所示,一种DAF膜与垫块结合的芯片封装结构,包括:基板1、指纹传感芯片3、垫块4、保护盖板7,所述指纹传感芯片3位于基板1的上方,所述指纹传感芯片3的焊盘面向上,所述指纹传感芯片3与基板1之间通过键合丝5进行互连,所述保护盖板7位于指纹传感芯片3的感应区域正上方,所述垫块4位于所述基板1和保护盖板7之间,所述基板1上表面、指纹传感芯片3、键合丝5、垫块4及保护盖板7下表面被DAF膜6包裹。所述键合丝5优选为2根,所述垫块4优选为2个,对称的分布在指纹传感芯片3的两侧。
所述DAF膜6形态为半固态胶膜,有粘性但不会流动。该DAF膜6在半固态的状态下具有高弹性,可以将指纹传感芯片3和键合丝5包裹;通过烘烤达到Tg点后,DAF膜6变成不可逆的固态,从而保护指纹传感芯片3。如图2所示,所述DAF膜6在加工之前有三层结构,分别为:保护膜8,对功能胶膜9进行保护,便于包装、运输,加工过程中需分离;功能胶膜9,包裹指纹传感芯片3并实现保护盖板7与基板1之间的粘接;基层胶膜10,承载功能胶膜9与保护盖板7,便于封装。
所述指纹传感芯片3与所述基板1之间通过粘结胶2粘接在一起,所述粘结胶2优选为环氧树脂胶,所述指纹传感芯片3优选为电容式指纹传感芯片或电阻式指纹传感芯片。
所述保护盖板7材质的介电常数大于3、硬度大于4H、粗糙度小于2μm,优选为玻璃、蓝宝石或者陶瓷材料。
一种DAF膜与垫块结合的芯片封装结构的制造方法,包括以下步骤:
步骤一:准备基板1,如图3所示;
步骤二:将指纹传感芯片3贴装在基板1上,如图4所示;
步骤三:将垫块4贴装在基板1上,如图5所示;
步骤四:通过引线键合工艺,将指纹传感芯片3与基板1电路形成互连通路,如图6所示;
步骤五:用DAF膜6将保护盖板7直接贴装在指纹传感芯片3的上方,用DAF膜6包裹基板1上表面、指纹传感芯片3、垫块4和键合丝5,得到如图1所示的封装结构。
所述DAF膜结合垫块的指纹传感芯片封装结构还可以采用以下方法制造:
步骤一:准备带有垫块4的基板1,如图7所示;
步骤二:将指纹传感芯片3贴装在基板1上,如图5所示;
步骤三:通过引线键合工艺,将指纹传感芯片3与基板1电路形成互连通路,如图6所示;
步骤四:用DAF膜6将保护盖板7直接贴装在指纹传感芯片3的上方,用DAF膜6包裹基板1上表面、指纹传感芯片3、垫块4和键合丝5,得到如图1所示的封装结构。
本发明所述的指纹传感芯片封装结构采用DAF膜进行保护盖板的直接贴装,无需塑封工序,优化工艺流程,节约成本;且DAF膜和垫块结合用于指纹传感芯片的封装结构,使得保护盖板和指纹传感芯片表面之间的间距更好控制,避免在贴装过程中因DAF膜晃动而导致保护盖板倾斜的风险,保证指纹识别芯片的识别效果,提高封装良率。
本发明通过具体实施过程进行说明的,在不脱离本发明范围的情况下,还可以对本发明专利进行各种变换及等同代替,因此,本专利不局限于所公开的具体实施过程,而应当包括落入本发明专利权利要求范围内的全部实施方案。

Claims (9)

1.一种DAF膜与垫块结合的芯片封装结构,包括:基板、指纹传感芯片、保护盖板,所述指纹传感芯片位于基板的上方,所述指纹传感芯片的焊盘面向上,所述保护盖板位于指纹传感芯片的感应区域正上方,其特征在于:所述封装结构还包括垫块,垫块位于所述基板和所述保护盖板之间,所述基板上表面、指纹传感芯片、键合丝、垫块及保护盖板下表面被DAF膜包裹。
2.根据权利要求1所述的DAF膜与垫块结合的芯片封装结构,其特征在于:所述指纹传感芯片与基板之间通过粘结胶粘接在一起。
3.根据权利要求2所述的DAF膜与垫块结合的芯片封装结构,其特征在于:所述粘结胶为环氧树脂胶。
4.根据权利要求1所述的DAF膜与垫块结合的芯片封装结构,其特征在于:所述指纹传感芯片为电容式指纹传感芯片或电阻式指纹传感芯片。
5.根据权利要求1所述的DAF膜与垫块结合的芯片封装结构,其特征在于:所述保护盖板材质的介电常数大于3、硬度大于4H、粗糙度小于2μm。
6.根据权利要求5所述的DAF膜与垫块结合的芯片封装结构,其特征在于:所述保护盖板材质为玻璃、蓝宝石或者陶瓷材料。
7.根据权利要求1所述的DAF膜与垫块结合的芯片封装结构,其特征在于:所述垫块至少两个,均匀且对称分布在芯片周围。
8.一种DAF膜与垫块结合的芯片封装结构的制造方法,其特征在于:所述制造方法包括以下步骤:
步骤一:准备基板;
步骤二:将指纹传感芯片贴装在基板上;
步骤三:将垫块贴装在基板上;
步骤四:通过引线键合工艺,将指纹传感芯片与基板电路形成互连通路;
步骤五:用DAF膜将保护盖板直接贴装在指纹传感芯片的上方,使得DAF膜结合垫块、基板上表面、指纹传感芯片、垫块和键合丝。
9.根据权利要求8所述DAF膜与垫块结合的芯片封装结构的制造方法,其特征在于:所述步骤一至步骤三用以下步骤代替:
步骤一:准备带有垫块的基板;
步骤二:将指纹传感芯片贴装在基板上。
CN201610658054.6A 2016-08-11 2016-08-11 一种daf膜与垫块结合的芯片封装结构及其制造方法 Pending CN106098644A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610658054.6A CN106098644A (zh) 2016-08-11 2016-08-11 一种daf膜与垫块结合的芯片封装结构及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610658054.6A CN106098644A (zh) 2016-08-11 2016-08-11 一种daf膜与垫块结合的芯片封装结构及其制造方法

Publications (1)

Publication Number Publication Date
CN106098644A true CN106098644A (zh) 2016-11-09

Family

ID=57455998

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610658054.6A Pending CN106098644A (zh) 2016-08-11 2016-08-11 一种daf膜与垫块结合的芯片封装结构及其制造方法

Country Status (1)

Country Link
CN (1) CN106098644A (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108417538A (zh) * 2018-03-16 2018-08-17 上海图正信息科技股份有限公司 一种指纹传感器玻璃盖板封装工艺及结构
CN108538870A (zh) * 2018-03-12 2018-09-14 信利光电股份有限公司 一种图像传感芯片的塑封方法、塑封组件和摄像头
WO2018187963A1 (zh) * 2017-04-12 2018-10-18 深圳市汇顶科技股份有限公司 光学指纹传感器和光学指纹传感器的封装方法
CN109152196A (zh) * 2018-07-25 2019-01-04 江苏凯尔生物识别科技有限公司 一种指纹识别模组安装方法及指纹识别模组
CN109378702A (zh) * 2018-11-30 2019-02-22 华天科技(西安)有限公司 一种vcsel传感器封装结构及其封装方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120104590A1 (en) * 2010-11-02 2012-05-03 Stats Chippac, Ltd. Semiconductor Device and Method of Forming Penetrable Film Encapsulant Around Semiconductor Die and Interconnect Structure
CN104241144A (zh) * 2014-06-25 2014-12-24 中国科学院微电子研究所 一种芯片塑封结构的制造方法
CN205302323U (zh) * 2015-12-17 2016-06-08 华天科技(西安)有限公司 一种daf膜包裹指纹传感芯片的封装结构
CN205900521U (zh) * 2016-08-11 2017-01-18 华天科技(西安)有限公司 一种daf膜与垫块结合的指纹传感芯片封装结构

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120104590A1 (en) * 2010-11-02 2012-05-03 Stats Chippac, Ltd. Semiconductor Device and Method of Forming Penetrable Film Encapsulant Around Semiconductor Die and Interconnect Structure
CN104241144A (zh) * 2014-06-25 2014-12-24 中国科学院微电子研究所 一种芯片塑封结构的制造方法
CN205302323U (zh) * 2015-12-17 2016-06-08 华天科技(西安)有限公司 一种daf膜包裹指纹传感芯片的封装结构
CN205900521U (zh) * 2016-08-11 2017-01-18 华天科技(西安)有限公司 一种daf膜与垫块结合的指纹传感芯片封装结构

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018187963A1 (zh) * 2017-04-12 2018-10-18 深圳市汇顶科技股份有限公司 光学指纹传感器和光学指纹传感器的封装方法
CN108538870A (zh) * 2018-03-12 2018-09-14 信利光电股份有限公司 一种图像传感芯片的塑封方法、塑封组件和摄像头
CN108417538A (zh) * 2018-03-16 2018-08-17 上海图正信息科技股份有限公司 一种指纹传感器玻璃盖板封装工艺及结构
CN109152196A (zh) * 2018-07-25 2019-01-04 江苏凯尔生物识别科技有限公司 一种指纹识别模组安装方法及指纹识别模组
CN109378702A (zh) * 2018-11-30 2019-02-22 华天科技(西安)有限公司 一种vcsel传感器封装结构及其封装方法

Similar Documents

Publication Publication Date Title
CN106098644A (zh) 一种daf膜与垫块结合的芯片封装结构及其制造方法
CN108229340B (zh) 指纹感测模块及其制造方法、智能卡及其制造方法
CN106158780A (zh) 一种daf膜包裹指纹传感芯片的封装结构及其制造方法
CN104051367A (zh) 指纹识别芯片封装结构和封装方法
US20030011067A1 (en) Stacked chip-size package type semiconductor device capable of being decreased in size
TW200703531A (en) Methods for packaging an image sensor and a packaged image sensor
CN104183560B (zh) 电容式的指纹传感器封装结构及封装的方法
CN104779223A (zh) 具有单边沟槽的指纹识别芯片封装结构与制作方法
CN105304575B (zh) 采用垫块预防指纹传感芯片倾斜的封装结构及制造方法
TW200631153A (en) High performance IC package and method
CN205900521U (zh) 一种daf膜与垫块结合的指纹传感芯片封装结构
CN205303461U (zh) 一种防静电的指纹传感芯片封装结构
CN104538373B (zh) 三维集成传感芯片封装结构及封装方法
CN105529308B (zh) 一种垫块加底部填充的指纹芯片封装结构及制造方法
CN205302323U (zh) 一种daf膜包裹指纹传感芯片的封装结构
CN108573200B (zh) 封装结构及其制法
JP2005235191A5 (zh)
CN205264683U (zh) 一种垫块加底部填充的指纹芯片封装结构
US20140091450A1 (en) Semiconductor Housing for Smart Cards
CN205508802U (zh) 采用垫块预防指纹传感芯片倾斜的封装结构
CN204808355U (zh) 芯片封装结构
CN206741579U (zh) 指纹传感器模块
CN107438855B (zh) 指纹芯片封装模组、指纹识别模组和封装方法
JP2006074044A (ja) チップモジュール
CN206946510U (zh) 超薄防水指纹模组

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20161109