CN106093743A - Lowering or hoisting gear and thin film transistor (TFT) array detection equipment - Google Patents
Lowering or hoisting gear and thin film transistor (TFT) array detection equipment Download PDFInfo
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- CN106093743A CN106093743A CN201610439970.0A CN201610439970A CN106093743A CN 106093743 A CN106093743 A CN 106093743A CN 201610439970 A CN201610439970 A CN 201610439970A CN 106093743 A CN106093743 A CN 106093743A
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- Prior art keywords
- lifting platform
- parallel
- loading end
- horizontal plane
- lowering
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2621—Circuits therefor for testing field effect transistors, i.e. FET's
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/28—Constructional details, e.g. end stops, pivoting supporting members, sliding runners adjustable to load dimensions
Abstract
The invention discloses a kind of lowering or hoisting gear and thin film transistor (TFT) array detection equipment, belong to mechanical field.Described lowering or hoisting gear includes: lifting platform, driving assembly, detection components and adjusting part, drives assembly to be connected with lifting platform, drives assembly to be used for driving lifting platform to move up and down along gravity direction；Detection components is for detecting the state parameter of the loading end of lifting platform, and sends state parameter to adjusting part；Lifting platform, for determining whether loading end is parallel to horizontal plane according to state parameter, when loading end is not parallel to horizontal plane, is adjusted so that loading end is parallel to horizontal plane by adjusting part.The present invention solves the array base palte being positioned on lifting platform and easily falls from lifting platform, cause the problem that array base palte sustains damage, achieve and prevent the array base palte on this loading end from falling from lifting platform, and then preventing the effect that array base palte sustains damage, the present invention is for the detection of array base palte.
Description
Technical field
The present invention relates to mechanical field, particularly to a kind of lowering or hoisting gear and thin film transistor (TFT) array detection equipment.
Background technology
After the manufacture completing array base palte, it usually needs use thin film transistor (TFT) array detection equipment (English:
ThinFilmTransistorArray Test；It is called for short: the TFTArray Test) spy of the thin film transistor (TFT) in array substrate
Property detects, it is judged that whether the array base palte manufactured meets the requirements.
Example, cushion chamber that thin film transistor (TFT) array detection equipment includes being interconnected is (English: Load Lock) and very
Cavity, vacuum chamber is positioned above the position of cushion chamber, is provided with lowering or hoisting gear (English: Elevator), vacuum in cushion chamber
Intracavity is provided with transmission arm and monitor station.In correlation technique, lowering or hoisting gear can include lifting platform, electromotor and connecting rod,
Lifting platform is connected with electromotor, and the loading end of lifting platform is parallel to horizontal plane, and electromotor can drive lifting platform along gravity
Direction moves up and down.After having manufactured array base palte, array base palte can be placed on the loading end of lifting platform, and control to start
Machine drives lifting platform to move along the opposite direction of gravity direction, until concordant with the monitor station in vacuum chamber, then, control vacuum chamber
Array base palte on this lifting platform is clamped to monitor station by the interior arm that transmits, and the thin film transistor (TFT) in array substrate is carried out
Detection.
If during using lowering or hoisting gear, lifting platform produces so that loading end is not parallel to horizontal plane, now position
Array base palte on lifting platform easily falls from lifting platform, causes array base palte to sustain damage.
Summary of the invention
Array base palte in order to solve to be positioned on lifting platform easily falls from lifting platform, causes array base palte to sustain damage
Problem, the invention provides a kind of lowering or hoisting gear and thin film transistor (TFT) array detection equipment.Described technical scheme is as follows:
First aspect, it is provided that a kind of lowering or hoisting gear, described lowering or hoisting gear includes: lifting platform, driving assembly, detection components
And adjusting part,
Described driving assembly is connected with described lifting platform, and described driving assembly is used for driving described lifting platform along gravity side
To up and down motion；
Described detection components is for detecting the state parameter of the loading end of described lifting platform, and is sent by described state parameter
To described adjusting part；
According to described state parameter, described adjusting part is for determining whether described loading end is parallel to horizontal plane, described
When loading end is not parallel to horizontal plane, described lifting platform is adjusted so that described loading end is parallel to horizontal plane.
Optionally, described detection components includes: horizon sensor,
The bottom surface of described lifting platform is parallel to described loading end, and described horizon sensor is arranged on the bottom surface of described lifting platform
On, described horizon sensor is for detecting the bottom surface of described lifting platform and the angle of horizontal plane, and described state parameter includes: described
Angle；
Described adjusting part is additionally operable to: when described angle is zero, determines that described loading end is parallel to horizontal plane, described
When angle is not zero, determine that described loading end is not parallel to horizontal plane.
Optionally, described detection components includes: n range sensor, and described n is the integer more than or equal to 2,
The bottom surface of described lifting platform is parallel to described loading end, and described n range sensor is arranged at described lifting platform
Bottom surface on, each range sensor in described n range sensor is used for: detect described range sensor in described lifting
The distance of the position on the bottom surface of platform and preset plane, described state parameter includes: n that n range sensor detects individual away from
Distance values, described preset plane is parallel to horizontal plane；
Described adjusting part is additionally operable to: when described n distance value is equal to predeterminable range value, determine described loading end with
, in described n distance value, there is at least one distance value when being not equal to described predeterminable range value, determine described in plane-parallel
Loading end is not parallel with horizontal plane.
Optionally, the bottom surface of described lifting platform is rectangular, and described detection components includes: 4 range sensors, described 4
Range sensor lays respectively at 4 drift angles of described rectangle.
Optionally, described adjusting part includes: controller, regulating part and support member,
Described controller is connected with described regulating part, and one end of described support member is used for supporting described lifting platform, another
End contacts with described regulating part；
Described controller is used for: determine whether described loading end is parallel to horizontal plane according to described state parameter, described
When loading end is not parallel to horizontal plane, by controlling described regulating part so that one end of described support member is in same level
Slide, described lifting platform is adjusted.
Optionally, described regulating part includes: the first driving member and the second driving member,
Described controller is additionally operable to: by controlling described first driving member so that described support member slides to first direction,
By controlling described second driving member so that described support member slides to second direction, described first direction is perpendicular to described the
Two directions.
Optionally, the bottom surface of described lifting platform is provided with guide assembly,
Described guide assembly includes the pedestal being arranged on the bottom surface of described lifting platform, and described pedestal is away from described lifting platform
The side of bottom surface be provided with guide rail, one end of described support member can be at described slide on rails.
Optionally, described guide rail indentation.
Second aspect, it is provided that a kind of thin film transistor (TFT) array detection equipment, described thin film transistor (TFT) array detection equipment
Including the lowering or hoisting gear described in first aspect.
In sum, the invention provides a kind of lowering or hoisting gear and thin film transistor (TFT) array detection equipment, this lowering or hoisting gear
Including detection components and adjusting part, and the state parameter of the loading end of the lifting platform detected can be sent extremely by detection components
Adjusting part so that according to this state parameter, adjusting part can determine whether loading end is parallel to horizontal plane, if this loading end
Being not parallel to horizontal plane, then may determine that this lifting platform there occurs inclination, now this lifting platform can be adjusted by adjusting part
Joint so that the loading end of this lifting platform is parallel to horizontal plane, prevents the array base palte on this loading end from falling from lifting platform, enters
And prevent array base palte to sustain damage.
It should be appreciated that it is only exemplary and explanatory, not that above general description and details hereinafter describe
The present invention can be limited.
Accompanying drawing explanation
For the technical scheme being illustrated more clearly that in the embodiment of the present invention, in embodiment being described below required for make
Accompanying drawing be briefly described, it should be apparent that, below describe in accompanying drawing be only some embodiments of the present invention, for
From the point of view of those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to obtain other according to these accompanying drawings
Accompanying drawing.
The structural representation of a kind of lowering or hoisting gear that Fig. 1 provides for the embodiment of the present invention；
The structural representation of the another kind of lowering or hoisting gear that Fig. 2 provides for the embodiment of the present invention；
The upward view of a kind of lifting platform that Fig. 3 provides for the embodiment of the present invention；
The partial structurtes schematic diagram of a kind of lowering or hoisting gear that Fig. 4 provides for the embodiment of the present invention；
The structural representation of a kind of guide assembly that Fig. 5 provides for the embodiment of the present invention.
Current above-mentioned accompanying drawing, it has been shown that the embodiment that the present invention is clear and definite, hereinafter will be described in more detail.These accompanying drawings
It is not intended to current any mode with word description and limits the scope of present inventive concept, but current reference specific embodiment is
Those skilled in the art illustrate idea of the invention.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with accompanying drawing to embodiment party of the present invention
Formula is described in further detail.
As it is shown in figure 1, embodiments provide a kind of lowering or hoisting gear 0, this lowering or hoisting gear 0 may include that lifting platform
01, assembly 02, detection components 03 and adjusting part 04 are driven.
Drive assembly 02 to be connected with lifting platform 01, drive assembly 02 to be used for driving lifting platform 01 to transport up and down along gravity direction
Dynamic；
Detection components 03 is for detecting the state parameter of the loading end A of lifting platform 01, and sends state parameter to regulation
Assembly 04；
According to state parameter, adjusting part 04 is for determining whether loading end A is parallel to horizontal plane X, uneven at loading end A
Lifting platform 01, when horizontal plane X, is adjusted so that loading end A is parallel to horizontal plane X by row.
In sum, the lowering or hoisting gear provided due to the embodiment of the present invention includes detection components and adjusting part, and detection
The state parameter of the loading end of the lifting platform detected can be sent to adjusting part by assembly so that adjusting part can basis
This state parameter determines whether loading end is parallel to horizontal plane, if this loading end is not parallel to horizontal plane, then may determine that this liter
Fall platform there occurs inclination, and now this lifting platform can be adjusted by adjusting part so that the loading end of this lifting platform is parallel to
Horizontal plane, prevents the array base palte on this loading end from falling from lifting platform, and then prevents array base palte to sustain damage.
Example, the detection components 03 in Fig. 1 may include that horizon sensor (not shown in figure 1), the end of lifting platform 01
Face B can be parallel to loading end A, and horizon sensor can be arranged on the B of bottom surface (such as making to stick with glue on the B of bottom surface), level
Sensor may be used for detecting the angle of bottom surface B and horizontal plane X, so, the state parameter that this detection components detects can wrap
Include: the angle of the bottom surface B that horizon sensor detects and horizontal plane X；This adjusting part 04 can be also used for；At bottom surface B and water
When the angle of plane X is zero degree, determine that loading end A is parallel to horizontal plane X, when the angle of bottom surface B Yu horizontal plane X is not zero,
Determine that loading end A is not parallel to horizontal plane X.Owing to the bottom surface B of lifting platform 01 is parallel to loading end A, and horizon sensor can
The angle of detection bottom surface B and horizontal plane X, it is therefore contemplated that the angle of bottom surface B and horizontal plane X that horizon sensor detects
Equal to the angle of loading end A Yu horizontal plane X, and then can learn whether loading end A is parallel to level according to the size of this angle
Face X.Example, this driving assembly 02 can be that electromotor is (English: Motor) or motor etc. has the machine driving function.
The structural representation of the another kind of lowering or hoisting gear 0 that Fig. 2 provides for the embodiment of the present invention, as in figure 2 it is shown, this detection group
Part 03 may include that n range sensor 031, example, and n is the integer more than or equal to 2, and the English of sensor can be
Sensor。
The bottom surface B of lifting platform 01 can be parallel to loading end A, and n range sensor 031 all can be arranged on the B of bottom surface,
Each range sensor 031 in n range sensor 031 may be used for: the detecting distance sensor 031 position on the B of bottom surface
Putting the distance with preset plane, state parameter includes: n the distance value that n range sensor 031 detects；Adjusting part 04
Can be also used for: when n distance value is equal to predeterminable range value, determine that loading end A is parallel with horizontal plane X, at n distance value
When at least one distance value of middle existence is not equal to predeterminable range value, determine that loading end A is not parallel with horizontal plane X.Example, preset
Plane can be parallel to horizontal plane X, and this preset plane can be the bottom surface of cushion chamber (not shown in Fig. 2).Need explanation
It is that thin film transistor (TFT) array detection equipment can include cushion chamber and the vacuum chamber being interconnected, and vacuum chamber is positioned above delaying
Rush the position in chamber, lowering or hoisting gear 0 in cushion chamber, can be provided with, transmission arm and monitor station in vacuum chamber, can be provided with.
Optionally, the upward view of a kind of lifting platform that Fig. 3 provides for the embodiment of the present invention, as it is shown on figure 3, this lifting platform 01
Bottom surface B can be rectangular, detection components (not marking in Fig. 3) may include that 4 range sensors 031, and these 4 distances
Sensor 031 lays respectively at 4 drift angles of rectangle.Due to when this lifting platform 01 run-off the straight, with default at four drift angles
The amplitude of variation of the distance of plane is relatively big, therefore, and the distance value that these 4 range sensors 031 detect and predeterminable range value
Difference is relatively big, the distance value easier collected according to this 4 range sensors 031, it is judged that whether this lifting platform 01 occurs
Tilt.
The partial structurtes schematic diagram of a kind of lowering or hoisting gear 01 that Fig. 4 provides for the embodiment of the present invention, refer to Fig. 4, this tune
Joint assembly 04 may include that controller 041, regulating part 042 and support member 043, and controller 041 can be connected with regulating part 042
Connecing, one end of support member 043 is used for supporting lifting platform 01, and the other end contacts with regulating part 042.Controller 041 may be used for:
The state parameter detected according to the range sensor in detection components determines whether loading end A is parallel to horizontal plane X, in carrying
When face A is not parallel to horizontal plane X, by control and regulation part 042 so that slide in same level in one end of support member 043,
Lifting platform 01 is adjusted.Further, this adjusting part 04 can also include force piece M, and controller 041 can be by dynamic
Power part M is connected with regulating part 042, and controller 041 can provide power, regulating part by controlling force piece M to regulating part 042
042 drives support member 043 to move, and then is slided in same level in one end of support member 043, carries out lifting platform 01
Regulation.Example, this force piece M can be a kind of pneumatic means, and this controller 041 can be with each distance in detection components
Sensor 031 is set up communication connection, namely each range sensor 031 is after the state parameter of loading end being detected, permissible
This state parameter is sent to controller.
Concrete, regulating part 042 may include that the first driving member 0421 and the second driving member 0422, and controller 041 also may be used
For: by controlling the first driving member 0421 so that support member 043 slides to first direction D1, by controlling the second transmission
Part 0422 so that support member 043 slides to second direction D2, and first direction D1 is perpendicular to second direction D2.That is, support member
043 is used for supporting lifting platform 01, and controller 041 can be by control and regulation part 042 so that one end of support member 043 is same
Slide in horizontal plane, thus change position of the strong point on lifting platform 01 bottom surface B, one end of this support member 043, and then this liter
Fall platform 01 tends to balance under gravity so that the loading end A of lifting platform 01 is parallel to horizontal plane X.Example, controller
041 can be by controlling the first driving member 0421 or the second driving member 0422 so that one end of support member 043 is in same level
In, forward, backward, move to the left or to the right.
The structural representation of a kind of guide assembly 06 that Fig. 5 provides for the embodiment of the present invention, incorporated by reference to Fig. 4 and Fig. 5, bottom surface
The upper guide assembly 06 that can be provided with of B, guide assembly 06 includes the pedestal 061 being arranged on the B of bottom surface, and pedestal 061 is away from bottom surface B
Side be provided with guide rail 062, can slide on guide rail 062 in one end of support member 043.When one end of this support member 043 exists
When sliding in same level, can slide on guide rail 062, thus change the one of support member 043 in one end of this support member 043
Hold the strong point for lifting platform 01.Optionally, guide rail 062 can include the guide rail that bearing of trend is first direction, Yi Jiyan
Stretch the guide rail that direction is second direction, that is, guide rail 062 can include horizontal guide rail and longitudinal guide rail so that support member
One end of 043 can be in same level, along guide rail 062 forward, backward, move to the left or to the right.Example, guide rail 062
Can be with indentation, when one end that support member 043 contacts with guide rail 062 moves to jagged bottom, jagged guide rail
062 is prevented from support member 043 is subjected to displacement, it is therefore prevented that adjusted by loading end A to after being parallel to horizontal plane X, owing to supporting
The slip of part 043 makes lifting platform 01 run-off the straight again.Optionally, this guide assembly 06 can also include backplate 063, backplate
063 edge that can be arranged on pedestal 061, for preventing the guide rail 062 in support member 043 getaway assembly 06.
Concrete, please continue to refer to Fig. 4, support member 043 may include that push rod 0431, fixture 0432 and screw rod 0433,
Push rod 0431 is connected by fixture 0432 with screw rod 0433, and the centrage of the centrage of push rod 0431 and screw rod 0433 is altogether
Line, push rod 0431 can slide away from one end of fixture 0432 on guide rail 062, and screw rod 0433 is away from the one of fixture 0432
End contacts with driving member 042.
Example, lifting platform 01 can include m layer lifter plate 011, and m is the integer more than or equal to 1, every layer of lifter plate
011 is provided with a loading end and a bottom surface, and the loading end of every layer of lifter plate 011 may be incorporated for carrying object to be lifted
(such as substrate), and the loading end of this m layer lifter plate 011 is parallel to each other.Wherein, m layer lifter plate 011 is positioned at the lifting of the bottom
The bottom surface of plate 011 be lifting platform 01 bottom surface B, m layer lifter plate 011 in the loading end of every layer of lifter plate 011 be lifting platform 01
Loading end.Optionally, m can be equal to 2, namely this lifting platform 01 can include two-layer lift plate 011, and this two-layer lift plate
011 is parallel to each other.
In correlation technique, lowering or hoisting gear can include lifting platform, electromotor and connecting rod, and lifting platform is connected with electromotor
Connecing, and the loading end of lifting platform is parallel to horizontal plane, electromotor can drive lifting platform to move up and down along gravity direction.If making
Produce with lifting platform during lowering or hoisting gear so that loading end is not parallel to horizontal plane, is now placed on lifting platform
Object is easier to fall from lifting platform, now needs to shut down lowering or hoisting gear, and uses pad to adjust the water of lifting platform
Pingdu so that the loading end of lifting platform is parallel to horizontal plane, the mobility of lowering or hoisting gear is relatively low.In the embodiment of the present invention, detection
Assembly can be real-time the state parameter of detection loading end, and by transmission real-time for the state parameter that detects to adjusting part.
If adjusting part is according to the state parameter of loading end, determine that this loading end is not parallel to horizontal plane, then this adjusting part can be right
Lifting platform is adjusted (as adjusted support member in the position of the strong point of lifting platform bottom surface) so that loading end is parallel to level
Face, prevents the object on this loading end from falling from lifting platform.Further, the state of the loading end detected when detection components
When parameter characterization loading end is parallel to horizontal plane, this adjusting part can be forbidden being adjusted loading end, it is ensured that this loading end
All the time horizontal plane it is parallel to.
In sum, the lowering or hoisting gear provided due to the embodiment of the present invention includes detection components and adjusting part, and detection
The state parameter of the loading end of the lifting platform detected can be sent to adjusting part by assembly so that adjusting part can basis
This state parameter determines whether loading end is parallel to horizontal plane, if this loading end is not parallel to horizontal plane, then may determine that this liter
Fall platform there occurs inclination, and now this lifting platform can be adjusted by adjusting part so that the loading end of this lifting platform is parallel to
Horizontal plane, prevents the array base palte on this loading end from falling from lifting platform, and then prevents array base palte to sustain damage.
Embodiments provide a kind of thin film transistor (TFT) array detection equipment, this thin film transistor (TFT) array detection equipment
The lowering or hoisting gear 0 shown in Fig. 1 or Fig. 2 can be included.
In sum, owing to, in the thin film transistor (TFT) array detection equipment that the embodiment of the present invention provides, lowering or hoisting gear includes
Detection components and adjusting part, and detection components can be by the state parameter transmission of the loading end of the lifting platform detected to regulating
Assembly so that according to this state parameter, adjusting part can determine whether loading end is parallel to horizontal plane, if this loading end is uneven
Row in horizontal plane, then may determine that this lifting platform there occurs inclination, and now this lifting platform can be adjusted by adjusting part, makes
The loading end obtaining this lifting platform is parallel to horizontal plane, prevents the array base palte on this loading end from falling from lifting platform, Jin Erfang
Stop array base palte to sustain damage.
Those skilled in the art is it can be understood that arrive, for convenience and simplicity of description, and the system of foregoing description,
The specific works process of device and unit, is referred to the corresponding process in preceding method embodiment, does not repeats them here.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all spirit in the present invention and
Within principle, any modification, equivalent substitution and improvement etc. made, should be included within the scope of the present invention.
Claims (9)
1. a lowering or hoisting gear, it is characterised in that described lowering or hoisting gear includes: lifting platform, driving assembly, detection components and regulation
Assembly,
Described driving assembly is connected with described lifting platform, and described driving assembly is used for driving described lifting platform along gravity direction
Lower motion；
Described detection components is for detecting the state parameter of the loading end of described lifting platform, and sends described state parameter to institute
State adjusting part；
According to described state parameter, described adjusting part is for determining whether described loading end is parallel to horizontal plane, in described carrying
When face is not parallel to horizontal plane, described lifting platform is adjusted so that described loading end is parallel to horizontal plane.
Lowering or hoisting gear the most according to claim 1, it is characterised in that described detection components includes: horizon sensor,
The bottom surface of described lifting platform is parallel to described loading end, and described horizon sensor is arranged on the bottom surface of described lifting platform,
Described horizon sensor is for detecting the bottom surface of described lifting platform and the angle of horizontal plane, and described state parameter includes: described folder
Angle；
Described adjusting part is additionally operable to: when described angle is zero, determines that described loading end is parallel to horizontal plane, at described angle
When being not zero, determine that described loading end is not parallel to horizontal plane.
Lowering or hoisting gear the most according to claim 1, it is characterised in that described detection components includes: n range sensor,
Described n is the integer more than or equal to 2,
The bottom surface of described lifting platform is parallel to described loading end, and described n range sensor is arranged at the end of described lifting platform
On face, each range sensor in described n range sensor is used for: detect described range sensor at described lifting platform
Position on bottom surface and the distance of preset plane, described state parameter includes: n the distance value that n range sensor detects,
Described preset plane is parallel to horizontal plane；
Described adjusting part is additionally operable to: when described n distance value is equal to predeterminable range value, determine described loading end and level
Face is parallel, there is at least one distance value when being not equal to described predeterminable range value, determine described carrying in described n distance value
Face is not parallel with horizontal plane.
Lowering or hoisting gear the most according to claim 3, it is characterised in that
The bottom surface of described lifting platform is rectangular, and described detection components includes: 4 range sensors, and described 4 range sensors divide
It is not positioned at 4 drift angles of described rectangle.
5. according to the arbitrary described lowering or hoisting gear of Claims 1-4, it is characterised in that described adjusting part includes: controller,
Regulating part and support member,
Described controller is connected with described regulating part, and one end of described support member is used for supporting described lifting platform, the other end with
Described regulating part contacts；
Described controller is used for: determine whether described loading end is parallel to horizontal plane according to described state parameter, in described carrying
When face is not parallel to horizontal plane, by controlling described regulating part so that slide in same level in one end of described support member,
Described lifting platform is adjusted.
Lowering or hoisting gear the most according to claim 5, it is characterised in that described regulating part includes: the first driving member and second
Driving member,
Described controller is additionally operable to: by controlling described first driving member so that described support member slides to first direction, passes through
Control described second driving member so that described support member slides to second direction, and described first direction is perpendicular to described second party
To.
Lowering or hoisting gear the most according to claim 5, it is characterised in that
It is provided with guide assembly on the bottom surface of described lifting platform,
Described guide assembly includes the pedestal being arranged on the bottom surface of described lifting platform, and described pedestal is away from the end of described lifting platform
The side in face is provided with guide rail, and one end of described support member can be at described slide on rails.
Lowering or hoisting gear the most according to claim 7, it is characterised in that
Described guide rail indentation.
9. a thin film transistor (TFT) array detection equipment, it is characterised in that described thin film transistor (TFT) array detection equipment includes power
Profit requires 1 to 8 arbitrary described lowering or hoisting gear.
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| CN201610439970.0A CN106093743B (en) | 2016-06-17 | 2016-06-17 | Lifting device and thin film transistor array detection equipment |
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| CN201610439970.0A CN106093743B (en) | 2016-06-17 | 2016-06-17 | Lifting device and thin film transistor array detection equipment |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106291306A (en) * | 2016-08-18 | 2017-01-04 | 京东方科技集团股份有限公司 | The characteristic detection device of thin film transistor (TFT) and display device |
| CN106291306B (en) * | 2016-08-18 | 2018-11-23 | 京东方科技集团股份有限公司 | The characteristic detection device and display equipment of thin film transistor (TFT) |
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| CN106093743B (en) | 2020-07-17 |
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