CN106093476B - A kind of scanning magnetic probe microscope - Google Patents
A kind of scanning magnetic probe microscope Download PDFInfo
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- CN106093476B CN106093476B CN201610425247.7A CN201610425247A CN106093476B CN 106093476 B CN106093476 B CN 106093476B CN 201610425247 A CN201610425247 A CN 201610425247A CN 106093476 B CN106093476 B CN 106093476B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/50—MFM [Magnetic Force Microscopy] or apparatus therefor, e.g. MFM probes
Abstract
The present invention relates to a kind of scanning magnetic probe microscopes, comprising: cooled cryostat is arranged in the groove of reference platform, and the temperature of its internal sample is reduced for storing liquid nitrogen；Sample levelling device is arranged in cooled cryostat, for adjusting the height of sample when sample is put into so that the sample and reference platform keeping parallelism state；The upper surface of reference platform is arranged in two-dimensional scanning platform, for adjusting the position of magnetic spy needle device so that magnetic spy needle device is in different detection positions；The top of sample levelling device is arranged in field magnet, and internal for placing sample, for providing external magnetic field for sample；In the fixed two-dimensional scanning platform of magnetic spy needle device, and it is suspended from the surface of sample levelling device；Computing module is connected with magnetic spy needle device, and the current density of sample is calculated for the magnetic field space distributed intelligence according to detected by magnetic spy needle device.The present invention can be with the critical current density of lossless continuous detection superconducting tape.
Description
Technical field
The present invention relates to measuring for materials field more particularly to a kind of scanning magnetic probe microscopes, can be widely applied to
The materials such as superconducting tape, thin magnetic film, conductive film Local Property and defects detection.
Background technique
Superconductor is not due to having resistance and can be obtained in such as power equipments such as large-scale power device with high-current carrying
To extensive use.For superconductive tape, superconducting thin film, electric current transmission performance is the most basic parameter for reflecting performance.
Currently, taking " four leads methods " measurement critical current generally to reflect the electric current transmission performance of superconductor: existing
Sample both ends loading current observes voltage signal.By being continuously increased electric current, the situation of change of voltage is observed, if sample per cm
The voltage change that product generate 1 microvolt makees the sample and quenches criterion, determines the critical current of superconducting tape.It is somebody's turn to do the original of " four leads methods "
Reason is simple, is widely used in short sample of the other length of laboratory level less than 10cm and measures.But since electric current in the measurements draws
Line and voltage lead needs are contacted with sample, it is possible to cause mechanical damage to superconducting tape.In addition, the above method is also inconvenient
The continuously and quickly measuring of the long band of hundred meter levels.
To solve the above problems, application discloses a kind of Magnetic Circuit Method detection for 201010033688.5 Chinese patent application
The method of superconducting tape current carrying capacities is realized using double aperture slit magnetic circuit and hall probe and is passed to high-temperature superconductor band electric current
The measurement of Movement Capabilities.But the above method can only measure band overall performance, and to strip width direction then without dividing
Ability is distinguished, to can not evaluate band overall performance.
Summary of the invention
For the defects in the prior art, the present invention provides a kind of scanning magnetic probe microscope, for solving the prior art
In can not local measurement superconductive tape village and the problem of lead to not to the superconducting tape overall evaluation.
In a first aspect, the present invention provides a kind of scanning magnetic probe microscopes, comprising: two-dimensional scanning platform, reference platform,
Sample levelling device, field magnet, cooled cryostat, magnetic spy needle device and computing module；
The cooled cryostat is arranged in the groove of the reference platform, for storing liquid nitrogen to reduce its internal sample
Temperature；
The sample levelling device is arranged in the cooled cryostat, for adjusted when sample is put into the height of sample with
Make the sample and the reference platform keeping parallelism state；
The upper surface of the reference platform is arranged in the two-dimensional scanning platform, for adjusting the position of the magnetic spy needle device
It sets so that the magnetic spy needle device is in different detection positions；
The top of the sample levelling device is arranged in the field magnet, and internal for placing sample, is used for as institute
It states sample and external magnetic field is provided；
In the fixed two-dimensional scanning platform of the magnetic spy needle device, and be suspended from the sample levelling device just on
Side, for detecting the magnetic field space distributed intelligence above sample when applying external magnetic field；
The computing module is connected with the magnetic spy needle device, for the sky of the magnetic field according to detected by magnetic spy needle device
Between distributed intelligence calculate the current density of the sample.
Optionally, the two-dimensional scanning platform includes two-dimensional stage vertical beam and two-dimensional stage crossbeam；The two-dimensional stage is perpendicular
Beam is fixed on the reference platform；The upper surface of the two-dimensional stage vertical beam is arranged in one end of the two-dimensional stage crossbeam,
And it can be moved along two-dimensional stage vertical beam direction.
Optionally, the two-dimensional scanning platform further includes aided two-dimensional platform beams, the aided two-dimensional platform beams
The upper surface of the two-dimensional stage vertical beam is arranged in one end, and can move along two-dimensional stage vertical beam direction.
Optionally, the magnetic spy needle device includes at least one set of probe unit, and every group of probe unit includes magnetic probe, probe
Strut and probe base, the magnetic probe are fixed on the probe base by the probe strut, the probe base
The side of the two-dimensional stage crossbeam or aided two-dimensional platform beams is set, for adjusting the check bit of the magnetic probe
It sets.
Optionally, the magnetic probe is Hall element, in giant magnetoresistance element, magnetic flux gate device, superconducting quantum interference device (SQUID)
It is a kind of.
Optionally, the magnetic spy needle device further includes at least one elastomeric element, and the elastomeric element is arranged in the spy
Between needle strut and the probe base, for being kept in contact the probe and sample surfaces.
Optionally, the sample levelling device include sample sewing platform base, multiple rigid links and with rigid link one by one
Corresponding leveling bolt, range finding probe；One end of the multiple rigid link is fixed on the sample sewing platform base, and the other end is logical
Corresponding leveling bolt is crossed to be fixed on the reference platform；The range finding probe is fixed on the side of two-dimensional stage crossbeam；
The distance between the range finding probe measurement and sample sewing platform base, then by adjusting multiple leveling bolts to adjust
The flatness of the sample sewing platform base.
Optionally, the computing module cuts down the current density that your Deconvolution Algorithm Based on Frequency obtains sample using Biot's Sa.
It optionally, further include transmission device, the transmission device is for keeping superconductive long strip and the sample sewing platform base
Parastate and pass through between the magnetic probe and the field magnet.
Optionally, the transmission device includes the first correcting wheel and the second correcting wheel；First correcting wheel and described the
Two correcting wheels are arranged on the reference platform, and the minimum point of first correcting wheel and second correcting wheel is located at together
One horizontal plane.
As shown from the above technical solution, the present invention provides a kind of scanning magnetic probe microscopes, by the way that two-dimensional scanning is arranged
The position of the adjustable magnetic spy needle device of platform can detecte so that the magnetic spy needle device is in different detection positions
Superconductor different location magnetic field space distributed intelligence is to detect the local defect of superconductor.In addition, the present invention passes through Biot
Sa cuts down local criticality's current density of your Deconvolution Algorithm Based on Frequency superconductor, thus reflect superconductor sample interior local quality,
Improve material for materialogy researcher and important analysis means are provided.
Detailed description of the invention
The features and advantages of the present invention will be more clearly understood by referring to the accompanying drawings, and attached drawing is schematically without that should manage
Solution is carries out any restrictions to the present invention, in the accompanying drawings:
Fig. 1 is a kind of microscopical structural schematic diagram of scanning magnetic probe provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram that the microscopical sample levelling device of magnetic probe is scanned in Fig. 1；
Fig. 3 is the structural schematic diagram using permanent magnet for sample excitation；
Fig. 4 is the flow diagram that the embodiment of the present invention calculates sample current density；
Fig. 5 is the magnetic field space distributed intelligence schematic diagram measured in the embodiment of the present invention；
Fig. 6 is the schematic diagram for the sample current density that magnetic field space distributed intelligence according to figure 5 calculates；
Fig. 7 is a kind of structural schematic diagram of magnetic spy needle device with elastomeric element provided in an embodiment of the present invention；
Fig. 8 is that a kind of structure of two-dimensional scanning platform with aided two-dimensional platform beams provided in an embodiment of the present invention is shown
It is intended to；
Fig. 9 is a kind of microscopical structural representation of scanning magnetic probe with transmission device provided in an embodiment of the present invention
Figure.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
The present invention provides a kind of scanning magnetic probe microscopes, comprising: two-dimensional scanning platform, reference platform, sample leveling
Device, field magnet, cooled cryostat, magnetic spy needle device and computing module；
The cooled cryostat is arranged in the groove of the reference platform, for storing liquid nitrogen to reduce its internal sample
Temperature；
The sample levelling device is arranged in the cooled cryostat, for adjusted when sample is put into the height of sample with
Make the sample and the reference platform keeping parallelism state；
The upper surface of the reference platform is arranged in the two-dimensional scanning platform, for adjusting the position of the magnetic spy needle device
It sets so that the magnetic spy needle device is in different detection positions；
The top of the sample levelling device is arranged in the field magnet, and internal for placing sample, is used for as institute
It states sample and external magnetic field is provided；
In the fixed two-dimensional scanning platform of the magnetic spy needle device, and be suspended from the sample levelling device just on
Side, for detecting the magnetic field space distributed intelligence above sample when applying external magnetic field；
The computing module is connected with the magnetic spy needle device, for the sky of the magnetic field according to detected by magnetic spy needle device
Between distributed intelligence calculate the current density of the sample.
Scanning magnetic probe microscope provided by the invention is described in detail below with reference to embodiment and attached drawing.
As shown in Figure 1, two-dimensional scanning platform includes two-dimensional stage vertical beam 1 and two-dimensional stage crossbeam 2 in the embodiment of the present invention.
The upper surface of two-dimensional stage vertical beam 1 is arranged in the two-dimensional stage crossbeam 2 setting orthogonal with two-dimensional stage vertical beam 1, one end, and
It can move along the direction of the two-dimensional stage vertical beam 1 and be moved on i.e. y-axis direction, such as two-dimensional stage vertical beam 1 and two-dimensional stage
It is connected between crossbeam 2 by sliding rail.
Magnetic spy needle device includes at least one set of probe unit in the present invention.As shown in Figure 1, being provided in the embodiment of the present invention
Magnetic spy needle device only includes the case where one group of probe unit.Magnetic spy needle device includes magnetic probe 4, probe strut 5 and probe base
Seat 6.Wherein, magnetic probe 4 is fixed on probe base 6 by probe strut 5.Two-dimensional stage crossbeam 2 is arranged in probe base 6
Side, for adjusting the detection position of magnetic probe 4 on z-axis direction or x-axis direction.
In practical application, magnetic probe 4 can select Hall element, giant magnetoresistance element, magnetic flux gate device, superconductive quantum interference
One of instrument squids.Above-mentioned multiple and different component can also be selected when there are multiple magnetic probes 4, the present invention does not limit
It is fixed.
As can be seen that magnetic spy needle device is combined with two-dimensional scanning platform in the embodiment of the present invention, can x-axis, y-axis with
Z-axis side is adjusted up the position of magnetic probe 4, it can in the surface of sample or the top detection magnetic field spatial distribution letter of sample
Breath.
As shown in Figure 1, in the groove for being provided with installation cooled cryostat 11 of reference platform 3.In the cooled cryostat 11
Portion and top are provided with sample levelling device.As shown in Figures 1 and 2, sample levelling device includes sample in the embodiment of the present invention
Sample platform pedestal 7, multiple rigid links 8 and with the one-to-one leveling bolt 9 of rigid link, range finding probe 10.Each rigidity
One end of connecting rod 8 is fixed on sample sewing platform base 7, and the other end is fixed on reference platform 3 by corresponding leveling bolt 9.
Range finding probe 10 is fixed on the side of two-dimensional stage crossbeam 2.The range finding probe 10 measurement and the different location of sample sewing platform base 7 it
Between distance, then by adjusting multiple leveling bolts 9 to adjust the flatness of sample sewing platform base 7.Flatness refers to sample stage
Difference between 7 surface of pedestal and horizontal plane, the smaller flatness of the difference is better, i.e. 7 surface of sample sewing platform base is closer to water
Plane.It should be noted that range finding probe 10 is arranged in parallel with probe strut 5 in the embodiment of the present invention.
For example, two rigid links 8 are arranged in the embodiment of the present invention on sample sewing platform base 7.One of rigid link 8
First side of sample sewing platform base 7 is set, and the other side i.e. phase of the first side of sample sewing platform base 7 is arranged in another rigid link 8
Opposite side, in this way, two sides holding can be kept horizontal by the way that the first side is turned up, or reduce by second when the first side is lower than second side
Side keeps two sides holding horizontal.Certainly, 3 groups, 4 groups of even more, sheets also can be set in the quantity of rigid link 8 and leveling bolt 9
Invention is not construed as limiting.
As shown in Fig. 2, being additionally provided with field magnet 12 on sample sewing platform base 7.It is arranged in the top of the field magnet 12
There is specimen holder 13.Sample 14 is placed above specimen holder 13, and is additionally provided with electrode 15 on the specimen holder 13, is used for placement
Sample excitation on specimen holder 14.The field magnet 12 is formed using copper wire winding, naturally it is also possible to using other metals or
Other devices of person realize that the present invention is not construed as limiting.
Include: to the mode of sample progress excitation in the embodiment of the present invention
(1) it in the case where sample does not cool down, is powered to field magnet 12 to generate magnetic field；Backward cooled cryostat 11
Interior injection liquid nitrogen.When liquid nitrogen submerges sample and sample realizes superconduction, removes magnetic field and stop being powered to field magnet 12.It needs
Illustrate, needs field magnet 12 to generate at sample in the method and penetrate one times of magnetic field amplitude at least more than sample
Magnetic field.Sample can be superconducting tape, such as high temperature super conductive conductor.High-temperature superconductor band, which penetrates magnetic field, can use the formula of Jc*d
Estimation.Wherein, Jc is the current density of superconducting tape, and d is the thickness of superconducting tape.Superconducting ring can be induced on sample at this time
Stream recycles magnetic probe 4 to carry out magnetic field two-dimensional scanning in this case.
(2) in the case where sample realizes superconduction, apply 2 times for penetrating magnetic field amplitude of sample penetrates magnetic field, then
Magnetic field is removed again.Complete penetration superconducting circulation (i.e. sample edge to sample center all thoughts can be induced on sample at this time
Answer electric current), start magnetic field two-dimensional scanning using magnetic probe 4 in this case.High-temperature superconductor band penetrates magnetic field and can use
The formula of Jc*d is estimated, wherein Jc is the current density of superconducting tape, and d is the thickness of superconducting tape.
(3) in the case where sample realizes superconduction, apply and penetrate the outer of magnetic field less than 1 times for penetrating magnetic field amplitude of sample
Add magnetic field.Then applied field strengths are adjusted from small to large, and (the edge of sample to sample from the outside to the core can be induced on sample
Center) superconducting circulation that penetrates.Externally-applied magnetic field is shielded, starts magnetic field two-dimensional scanning using magnetic probe 4 in this case.
(4) in the case where sample realizes superconduction, as shown in figure 3, using a permanent magnet in the top of sample to the sample
Product carry out excitation.The Surface field of the permanent magnet is greater than 2 times for penetrating magnetic field amplitude of sample, and permanent magnetism bulk area needs are greater than
The area of sample is to cover sample.
It (5) is that sample input electric current carries out excitation by electrode 15 in the case where sample realizes superconduction.By adjusting electricity
Stream size can observe that magnetic flux penetrates process.Start magnetic field two-dimensional scanning using magnetic probe 4 in this case.
It also needs to carry out the information when magnetic probe 4 detects the magnetic field space distributed intelligence around sample in the present invention
Processing, is indicated in the form of getting the familiar current density of user.For example, using (2) in one embodiment of the invention
Kind excitation mode carries out excitation to sample, then cuts down the electricity that your Deconvolution Algorithm Based on Frequency calculates sample using Biot's Sa as shown in Figure 4
Current density situation.It is tested to obtain under the conditions of stacking such as figure in different when sample is the superconducting tape of width 10mm, long 3cm
Magnetic field space distributed intelligence schematic diagram shown in 5 sets z-axis when computing module gets two-dimensional magnetic field space distribution information
Xy resolution ratio when distance and setting Fourier transform carries out Fourier transform to two-dimensional magnetic field space distribution information with by the real space
Data correspond in the space K.Biot's Sa is carried out in the space K and cuts down your inverse operation, carries out inverse fourier transform again then to realize
The data in the space K are mapped to the real space, judges whether to balance inside current distribution i.e. judgement sample later and whether edge
It is precipitous, if conditions are not met, xy resolution ratio rejudges when then resetting Fourier transform.If it is satisfied, then calculating gained electricity
Whether miscarriage magnetisation field and practical excitation field are in the limits of error, if resetting z-axis distance not in the limits of error and repeating
Above-mentioned steps, if export Two-dimensional current Density Distribution data in the limits of error, it is close to finally obtain electric current as shown in FIG. 6
Spend schematic diagram.
It should be noted that Biot's Sa cuts down that algorithm using following formula realization in the embodiment of the present invention:
In formula (1) and (2), bz、jx、jyIt is the magnetic field B for being z apart from sample surfaces heightz, electric current Jx, electric current JyFourier
Leaf transformation form, kx、kyIt is Fourier space coordinate,I is imaginary unit, and e is the truth of a matter of natural logrithm, μ0
It is space permeability.
As it can be seen that only needing to measure the B of sample surfaces everywhere in the present inventionz(x, y) is i.e. each using formula (1) and (2) sample
The J at placex(x,y)、Jy(x,y)。
To further increase detection accuracy, as shown in fig. 7, magnetic spy needle device further includes at least one in one embodiment of the invention
A elastomeric element 16.Each elastomeric element 16 is arranged between probe strut 5 and probe base 6, can by adjusting probe base 6
So that magnetic probe 4 is kept in contact with sample.When sample is mobile, elastomeric element 16 can be such that magnetic probe 4 remains with sample
Contact condition.The elastomeric element 16 can be spring, and one end of the spring is fixed on probe base 6, and the other end is fixed on spy
On needle strut 5, it is additionally provided with hollow pipe outside the spring, may be collapsed to hollow pipe when probe strut 5 is by external force
It is internal.When removing external force, spring can pop up probe strut 5 out of hollow pipe.It is applied to above spring by adjusting
External force can make to be kept in contact state between magnetic probe 4 and sample, thus can detecte the Distribution of Magnetic Field letter of sample surfaces
Breath.
To shorten detection time, two-dimensional scanning platform is including two-dimensional stage vertical beam 1 and two dimension in one embodiment of the invention
In the case where platform beams 2, as shown in figure 8, further including aided two-dimensional platform beams 2 '.The one of the aided two-dimensional platform beams 2 '
The upper surface of two-dimensional stage vertical beam 1 is arranged in end, and can move along the two-dimensional stage vertical beam direction direction JiyZhou.Then with
Magnetic probe 4 is set in the aided two-dimensional platform beams 2 ', so as to empty using the magnetic field of two magnetic probes while test sample
Between distributed intelligence, shorten detection time.It is of course also possible to which multiple aided two-dimensional platform beams are arranged, multiple magnetic spies are used in this way
Needle measures.
It needs to measure repeatedly when the sample of detection is long, to reduce pendulous frequency, be provided in one embodiment of the invention
Scanning magnetic probe microscope further include transmission device, the transmission device is for making superconductive long strip and sample sewing platform base keeping parallelism
State and pass through between magnetic probe 4 and field magnet 12.As shown in figure 9, the transmission device includes two correcting wheels (i.e. first
Correcting wheel 17 ' and the second correcting wheel 17 '), the first correcting wheel and the second correcting wheel are arranged on reference platform, and the first correction
The minimum point of wheel and the second correcting wheel is located at the same horizontal plane so that sample passes through between magnetic probe 4 and field magnet 12.
In addition the transmission device further includes two transmission wheel 17, for provide external force for sample so that sample sample from magnetic probe 4 and
It is moved between field magnet 12.
It should be noted that above-mentioned aided two-dimensional platform beams, elastomeric element and transmission device can be in the present invention
Meaning, which combines obtained microscope, equally can solve the technical problems to be solved by the invention, reach corresponding technical effect.
Therefore, the technical solution that said combination obtains equally is fallen under the scope of the present invention.
In the present invention, term " first ", " second ", " third " are used for description purposes only, and should not be understood as instruction or
Imply relative importance.Term " multiple " refers to two or more, unless otherwise restricted clearly.
Although the embodiments of the invention are described in conjunction with the attached drawings, but those skilled in the art can not depart from this hair
Various modifications and variations are made in the case where bright spirit and scope, such modifications and variations are each fallen within by appended claims
Within limited range.
Claims (8)
1. a kind of scanning magnetic probe microscope characterized by comprising two-dimensional scanning platform, reference platform, sample leveling dress
It sets, field magnet, cooled cryostat, magnetic spy needle device and computing module；
The cooled cryostat is arranged in the groove of the reference platform, and the temperature of its internal sample is reduced for storing liquid nitrogen
Degree；
The sample levelling device is arranged in the cooled cryostat, for adjusting the height of sample when sample is put into so that should
Sample and the reference platform keeping parallelism state；
The upper surface of the reference platform is arranged in the two-dimensional scanning platform, for adjust the position of the magnetic spy needle device with
The magnetic spy needle device is set to be in different detection positions；
The top of the sample levelling device is arranged in the field magnet, and is provided with specimen holder above the field magnet,
Sample is placed above the specimen holder, for providing external magnetic field for the sample；
In the fixed two-dimensional scanning platform of the magnetic spy needle device, and it is suspended from the surface of the sample levelling device, used
In the magnetic field space distributed intelligence when applying external magnetic field above test sample；
The computing module is connected with the magnetic spy needle device, for the magnetic field space according to detected by magnetic spy needle device point
Cloth information calculates the current density of the sample；
Wherein, the two-dimensional scanning platform includes two-dimensional stage vertical beam and two-dimensional stage crossbeam；The two-dimensional stage vertical beam is fixed
On the reference platform；The upper surface of the two-dimensional stage vertical beam is arranged in one end of the two-dimensional stage crossbeam, and can
It is moved along two-dimensional stage vertical beam direction；
The sample levelling device includes sample sewing platform base, multiple rigid links and levels spiral shell correspondingly with rigid link
Bolt, range finding probe；One end of the multiple rigid link is fixed on the sample sewing platform base, and the other end passes through corresponding tune
Flat bolt is fixed on the reference platform；The range finding probe is fixed on the side of two-dimensional stage crossbeam；
The distance between the range finding probe measurement and sample sewing platform base, it is then described to adjust by adjusting multiple leveling bolts
The flatness of sample sewing platform base.
2. scanning magnetic probe microscope according to claim 1, which is characterized in that the two-dimensional scanning platform further includes auxiliary
The upper surface of the two-dimensional stage vertical beam is arranged in assisted two-dimensional platform beams, one end of the aided two-dimensional platform beams, and
It can be moved along two-dimensional stage vertical beam direction.
3. scanning magnetic probe microscope according to claim 1 or 2, which is characterized in that the magnetic spy needle device includes
At least one set of probe unit, every group of probe unit include magnetic probe, probe strut and probe base, and the magnetic probe passes through institute
It states probe strut to be fixed on the probe base, the probe base is arranged in the two-dimensional stage crossbeam or aided two-dimensional
The side of platform beams, for adjusting the detection position of the magnetic probe.
4. scanning magnetic probe microscope according to claim 3, which is characterized in that the magnetic probe is Hall element, huge
One of magnetoresistive element, magnetic flux gate device, superconducting quantum interference device (SQUID).
5. scanning magnetic probe microscope according to claim 3, which is characterized in that the magnetic spy needle device further includes at least
One elastomeric element, the elastomeric element is arranged between the probe strut and the probe base, for making the probe
It is kept in contact with sample surfaces.
6. scanning magnetic probe microscope according to claim 1, which is characterized in that the computing module is cut down using Biot's Sa
Your Deconvolution Algorithm Based on Frequency obtains the current density of sample.
7. scanning magnetic probe microscope according to claim 1, which is characterized in that it further include transmission device, the transmission
Device for make superconductive long strip and the sample sewing platform base keeping parallelism state and from the magnetic probe and the field magnet it
Between pass through.
8. scanning magnetic probe microscope according to claim 7, which is characterized in that the transmission device includes the first correction
Wheel and the second correcting wheel；First correcting wheel and second correcting wheel are arranged on the reference platform, and described the
The minimum point of one correcting wheel and second correcting wheel is located at the same horizontal plane.
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| CN107389537B (en) * | 2017-08-31 | 2023-09-08 | 上海禹视科技有限公司 | Multichannel cell counter and multichannel cell counting system |
| CN108414791A (en) * | 2018-01-22 | 2018-08-17 | 华南理工大学 | Single-screw mandrel in-situ testing device |
| CN110736715B (en) * | 2019-10-25 | 2022-05-24 | 深圳市太赫兹科技创新研究院有限公司 | Method, device and system for preventing false touch of probe |
| CN111679100A (en) * | 2020-07-16 | 2020-09-18 | 上海华力微电子有限公司 | Nano probe testing method |
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| JP2015102500A (en) * | 2013-11-27 | 2015-06-04 | 株式会社日立ハイテクファインシステムズ | Method and apparatus for measuring surface shape of magnetic head element |
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