CN106092802B - A kind of EL-QCM-D array fluid detection system that the sharp electricity of light picks up - Google Patents
A kind of EL-QCM-D array fluid detection system that the sharp electricity of light picks up Download PDFInfo
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- CN106092802B CN106092802B CN201610307151.0A CN201610307151A CN106092802B CN 106092802 B CN106092802 B CN 106092802B CN 201610307151 A CN201610307151 A CN 201610307151A CN 106092802 B CN106092802 B CN 106092802B
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- quartz crystal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
- G01G3/165—Constructional details
Abstract
The invention discloses a kind of light to swash the EL-QCM-D array fluid detection system that electricity picks up, and system includes excitation light source, detection chambers, quartz crystal oscillator, receiving coil and signal processing unit.Detection system uses venturi-type structural system, detects so as to realize in detection process to the compatibility of gas phase and liquid phase.The present invention is detected using transient response method, pumping signal swashs mode by self-resonance light and obtains, prism is set among quartz crystal oscillator array, so that the light through laser entrance may be dispersed into above each quartz crystal oscillator, electrodeless quartz crystal oscillator array is motivated by Fabry-Perot model, generates resonance.Under conditions of contactless, the available corresponding vibration signal of receiving coil is simultaneously converted to the electric signal in coil, and then send signal processing unit to and obtain characteristic parameter, including frequency response and dissipation factor, to realize wireless activation and the detection of wireless QCM-D.This programme is suitable for sensor detection field.
Description
Technical field
The present invention relates to sensor detection fields, swash the EL-QCM-D array fluid that electricity picks up more particularly, to a kind of light and examine
Examining system.
Background technique
The measuring principle of QCM (quartz crystal microbalance) is based on piezoelectric effect, when the electrode of QCM connects with test substance
When touching, the property (such as quality, viscosity, density) of test substance will change the resonance frequency of QCM, the change of QCM resonance frequency
Change is linear with the quality of test substance, thus the variation of test substance can be measured by the variation of resonance frequency.
Quartz crystal microbalance may be one of quartz resonance microbalance sensor of present most study.A kind of this biography
What sensor utilized is the mass-sensitive characteristic of quartz-crystal resonator.Nineteen ninety-five, G.Z.Sauerbrey are deduced for the first time
The relationship of quartz-crystal resonance frequency f and surface quality variation m have been depicted with simple formula, has established for Sauerbrey equation
Quartz crystal microbalance is applied to the theoretical basis of sensor technology, is allowed to be widely used.
Wherein f0For quartz crystal oscillator resonance frequency, A is the rate of mechanical wave propagation in quartz crystal oscillator, ρqFor quartz crystal oscillator
Density, μqFor the piezoelectricity modulus of shearing of quartz crystal oscillator, Δ f is the variation of frequency in the effective piezo area range of quartz crystal oscillator, Δ m
For the variation of quartz crystal oscillator surface quality.
Mass change is converted frequency variation output by quartz crystal microbalance technology, and testing equipment structure is simple, experiment
Process is easy to operate, the detection of detection accuracy height dissipation factor D in addition, quality, form, the viscoplasticity of available test substance
Variation.
So-called vibrational excitation is exactly to convert electrical energy into the process of mechanical energy using circuit appropriate and mechanical structure.Electricity
Magnetic pumping is to be acted in magnetic field by Lorentz force using current conductor and generate forced vibration, stable and reliable in work, is tradition
Resonance be the energisation mode at most used in sensor.But it since this detection mode must utilize magnetic field, is sensing
Device micromation aspect can be relatively difficult.
The research of qcm sensor detection method is concentrated mainly on the design side of gas phase and liquid stable detection device at present
Face, these installation methods often due to it is complicated for operation, time-consuming, precision is low, use condition is stringent etc., and factors limit its reality
Border application.
Summary of the invention
The present invention mainly solve the prior art present in it is complicated for operation, time-consuming, precision is low, use condition strictly with
And for technical problems such as the unicity of test object, a kind of device simple, easy to operate EL-QCM-D (electrodeless consumption are provided
Dissipate type quartz crystal microbalance) array fluid detection system, may be implemented wireless activation and detection and a variety of objects can
Compatible processing.
The present invention is mainly addressed by following technical proposals in view of the above technical problems: a kind of light swashs what electricity picked up
EL-QCM-D array fluid detection system, comprising:
Excitation light source: transmitting laser motivates quartz crystal oscillator, and type of laser is He-Ne laser；
Detection chambers: fluid flows through detection chambers, realizes the compatibility detected to gas phase and liquid phase；
Quartz crystal oscillator: being arranged in the medium position of detection chambers, generates alternating electromagnetic field under the excitation of laser；
Receiving coil: it receives the alternating electromagnetic field that quartz crystal oscillator generates and generates electric signal, and send signal for electric signal
Processing unit；
Signal processing unit: enhanced processing is filtered to the electric signal received from receiving coil, passes through oscillograph
It is shown, can reflect the characteristic parameter of measurand to a certain extent, then measurand is obtained by PC processed signal stream
Characteristic parameter, characteristic parameter includes frequency response and dissipation factor.
Due to using electrodeless quartz crystal oscillator, while light source being motivated not connect directly with receiving coil and quartz crystal oscillator array
Touching, so as to realize wireless activation and the detection of QCM-D array.
Preferably, laser is self-resonance excitation to the motivational techniques of quartz crystal oscillator.
Preferably, the detection chambers are venturi tube structure, including sequentially connected thread segment, entrance, contraction
Section, venturi, diffuser and outlet section, quartz crystal oscillator have several, are arranged in venturi around cell array is constituted, each quartz
Crystal oscillator is corresponding with a receiving coil.
The detection chambers of venturi tube structure are easy to implement at the compatibility detected in detection process to gas phase and liquid phase
Reason, while Venturi effect can also improve absorption and desorption performance in detection process.
Preferably, four quartz crystal oscillators are symmetrical two-by-two there are four the quartz crystal oscillators, each quartz crystal oscillator and adjacent
Quartz crystal oscillator is vertical.
Preferably, the outlet section is equipped with laser entrance, it is provided with semi-permeable membrane on laser entrance, laser enters from laser
Mouth is overlapped after entering detection chambers with the center line of cell array, and cell array, which is provided centrally with, makes laser projection to each stone
Prism on English crystal oscillator.
Detection system uses non-modulation monochromatic source, penetrant method using the self-resonance motivational techniques in light stimulus
Fabry-Perot-type model can obtain stable optical standing wave energy, Jin Ershi in the semi-permeable membrane of laser entrance and quartz crystal oscillator surface
Now quartz crystal oscillator array is motivated.Simultaneously in order to realize QCM-D array, it is provided with prism at cell array center, into
And it can make on laser projection to each quartz wafer.After quartz crystal oscillator array realizes resonance, the reception of corresponding crystal oscillator corresponding position
Coil receives the vibration signal of crystal oscillator, is converted to the electric signal in coil, is transmitted to signal processing unit, and then obtains corresponding
Characteristic parameter.
Preferably, receiving coil is mutually isostructural planar spiral structures coil, penetralia coil diameter is 8mm-
12mm, most external coil diameter are 16mm-24mm, and planar spiral structures coil turn is 10-14；Planar spiral structures coil electricity
Capacitance is 6.074nF, admittance 1.144mS.
Preferably, quartz crystal oscillator is the quartzy bare die of electrodeless AT cut type, it is the convex column structure of asymmetric single side, stone
English crystal oscillator includes integrally formed pilum part and pillar part, and pilum part and pillar part are all cylindrical, pilum part
It is overlapped with the center line of pillar part, pillar portion of upper surface is coated with sensitive membrane, and the fundamental frequency of quartz crystal oscillator is 6.0MHz, pillar
Section diameter is 2-3mm, and with a thickness of 0.3mm, the diameter of pilum part is 4mm-6mm for pillar part, pilum part with a thickness of
0.15mm-0.2mm。
Quartz crystal oscillator used in this programme, from the point of view of the material composed structure of sensing element, quartz crystal oscillator used uses group
Structure is closed, one layer of sensitive membrane is added on quartz crystal oscillator surface, will form good acoustical coupling between sensitive membrane and resonator, it will be quick
Interaction between sense material and measured parameter is converted to the equivalent parameters variation of resonator.In practical operation, according to experiment
The difference of experimental subjects in the process can be used different sensitive material films, improve the scope of application of device.
Preferably, the signal processing unit includes filter amplification circuit, oscillograph and PC machine, the filter and amplification electricity
The input terminal on road connects receiving coil, and output end connects oscillograph, and oscillograph is connect with PC machine.
Filter amplification circuit (fundamental frequency adjusting circuit board) mainly realizes function: fundamental frequency adjusts circuit board and regulated power supply phase
Even, operating voltage 12V is filtered for the electric signal that receiving coil receives, and extracts useful crystal oscillator decaying
Vibration signal filters out noise jamming；Meanwhile the useful signal of filtering being extracted and is amplified, facilitate the data observation in later period to handle.Filter
Wave amplifying circuit filters electric signal, extracts, amplification is then delivered to oscillograph, the crystal oscillator vibrational waveform figure shown on oscillograph
It is sent to PC machine terminal to be analyzed and processed, realizes the calculating of characteristic parameter (frequency response, dissipation factor).
Bring substantial effect of the present invention has been to provide a kind of EL-QCM-D array fluid detection system that the sharp electricity of light picks up
System, realizes wireless activation and the monitoring of the QCM-D array type sensor to gas phase and liquid phase compatible processing, simplifies experiment and set
Standby, experimental implementation is simple, facilitates the non-destructive testing for expanding the application range and biosystem of QCM detection.
Detailed description of the invention
Fig. 1 is a kind of circuit block diagram of the invention；
Fig. 2 is a kind of detection chambers structural schematic diagram of the invention；
Fig. 3 is a kind of cross-sectional view of detection chambers venturi of the invention；
Fig. 4 is a kind of quartz crystal oscillator main view of the invention；
Fig. 5 is a kind of quartz crystal oscillator top view of the invention；
In figure: 1.He-Ne laser emitter, 2. quartz crystal oscillators, 3. receiving coils, 4. filter amplification circuits, 5. oscillographs,
6.PC machine, 7. fluid inlets, 8. thread segments, 9. entrances, 10. contraction sections, 11. quartz crystal oscillators, 12. laser entrances, 13. fluids
Outlet, 14. prisms, 15. venturis, 16. diffusers, 17. outlet sections, 18. pilum parts, 19. pillar parts.
Specific embodiment
Below with reference to the embodiments and with reference to the accompanying drawing the technical solutions of the present invention will be further described.
Embodiment: a kind of light of the present embodiment swashs the EL-QCM-D array fluid detection system that electricity picks up, as shown in Figure 1,
Include:
Excitation light source: transmitting laser motivates quartz crystal oscillator, and it is He-Ne Laser emission that light source is motivated in the present embodiment
Device 1；
Detection chambers: fluid flows through detection chambers, realizes the compatibility detected to gas phase and liquid phase；
Quartz crystal oscillator 2: being arranged in the medium position of detection chambers, generates alternating electromagnetic field under the excitation of laser；
Receiving coil 3: it receives the alternating electromagnetic field that quartz crystal oscillator generates and generates electric signal, and send signal for electric signal
Processing unit；
Signal processing unit: enhanced processing is filtered to the electric signal received from receiving coil, passes through oscillograph
It is shown, can reflect the characteristic parameter of measurand to a certain extent, then measurand is obtained by PC processed signal stream
Characteristic parameter, characteristic parameter includes frequency response and dissipation factor.
Signal processing unit includes filter amplification circuit 4, oscillograph 5 and PC machine 6, the input terminal connection of filter amplification circuit
Receiving coil, output end connect oscillograph, and oscillograph is connect with PC machine.
Due to using electrodeless quartz crystal oscillator, while light source being motivated not connect directly with receiving coil and quartz crystal oscillator array
Touching, so as to realize wireless activation and the detection of QCM-D array.
As shown in Fig. 2, detection chambers are venturi tube structure, including sequentially connected thread segment 8, entrance 9, contraction section
10, venturi 15, diffuser 16 and outlet section 17.As shown in figure 3, quartz crystal oscillator there are 4, it is arranged around cell array is constituted in larynx
In road, four quartz crystal oscillators are symmetrical two-by-two, and each quartz crystal oscillator is vertical with adjacent quartz crystal oscillator.Each quartz crystal oscillator is corresponding with
One receiving coil.
The detection chambers of venturi tube structure are easy to implement at the compatibility detected in detection process to gas phase and liquid phase
Reason, while Venturi effect can also improve absorption and desorption performance in detection process.
Outlet section is equipped with laser entrance 12, is provided with semi-permeable membrane on laser entrance, laser enters detection from laser entrance
It is overlapped after chamber with the center line of cell array, cell array, which is provided centrally with, to be made on laser projection to each quartz crystal oscillator
Prism 14.
Detection system uses non-modulation monochromatic source, penetrant method using the self-resonance motivational techniques in light stimulus
Fabry-Perot-type model can obtain stable optical standing wave energy, Jin Ershi in the semi-permeable membrane of laser entrance and quartz crystal oscillator surface
Now quartz crystal oscillator array is motivated.Simultaneously in order to realize QCM-D array, it is provided with prism at cell array center, into
And it can make on laser projection to each quartz wafer.After quartz crystal oscillator array realizes resonance, the reception of corresponding crystal oscillator corresponding position
Coil receives the vibration signal of crystal oscillator, is converted to the electric signal in coil, is transmitted to signal processing unit, and then obtains corresponding
Characteristic parameter.
Receiving coil is mutually isostructural planar spiral structures coil, and penetralia coil diameter is 8mm-12mm, outermost
Portion's coil diameter is 16mm-24mm, and planar spiral structures coil turn is 10-14；Planar spiral structures coil capacity value is
6.074nF, admittance 1.144mS.
As shown in Figure 4 and Figure 5, quartz crystal oscillator is the quartzy bare die of electrodeless AT cut type, is asymmetric single side pillar formula
Structure, quartz crystal oscillator include integrally formed pilum part 18 and pillar part 19, and pilum part and pillar part are all cylinder
The center line of shape, pilum part and pillar part is overlapped, and pillar portion of upper surface is coated with sensitive membrane, and the fundamental frequency of quartz crystal oscillator is
6.0MHz, pillar section diameter are 2-3mm, and pillar part is 4mm-6mm, pilum portion with a thickness of 0.3mm, the diameter of pilum part
Point with a thickness of 0.15mm-0.2mm.
Quartz crystal oscillator used in this programme, from the point of view of the material composed structure of sensing element, quartz crystal oscillator used uses group
Structure is closed, one layer of sensitive membrane is added on quartz crystal oscillator surface, will form good acoustical coupling between sensitive membrane and resonator, it will be quick
Interaction between sense material and measured parameter is converted to the equivalent parameters variation of resonator.In practical operation, according to experiment
The difference of experimental subjects in the process can be used different sensitive material films, improve the scope of application of device.
Filter amplification circuit (fundamental frequency adjusting circuit board) mainly realizes function: fundamental frequency adjusts circuit board and regulated power supply phase
Even, operating voltage 12V is filtered for the electric signal that receiving coil receives, and extracts useful crystal oscillator decaying
Vibration signal filters out noise jamming；Meanwhile the useful signal of filtering being extracted and is amplified, facilitate the data observation in later period to handle.Filter
Wave amplifying circuit filters electric signal, extracts, amplification is then delivered to oscillograph, the crystal oscillator vibrational waveform figure shown on oscillograph
It is sent to PC machine terminal to be analyzed and processed, realizes the calculating of characteristic parameter (frequency response, dissipation factor).
This experimental provision realizes compatibility detection to gas phase and liquid phase environment using venturi tube structure, passes through fluid
Helicitic texture at entrance 7 is docked with fluid passage conduit realization, and corresponding fluids are discharged from fluid outlet 13, facilitate varying environment
QCM-D detection.
In the present solution, not contacted directly between excitation light source and quartz crystal oscillator, between quartz crystal oscillator and receiving coil,
It is wirelessly to transmit signal, has expanded the suitable environment of sensor significantly, reduced installation requirement；Venturi tube knot
The fluid detection chamber of structure substantially increases the range of QCM-D practical application, it can be achieved that under compatible processing gas phase and liquid phase environment
Object.
Specific implementation process described herein only illustrates that spirit of the invention.Technology belonging to the present invention
The technical staff in field can do various modifications or additions to described specific implementation process or use similar side
Formula substitution, however, it does not deviate from the spirit of the invention or beyond the scope of the appended claims.
Although the terms such as quartz crystal oscillator, laser emitter, oscillograph are used more herein, it is not precluded and uses it
A possibility that its term.The use of these items is only for be more convenient to describe and explain essence of the invention；They are solved
Being interpreted into any additional limitation is disagreed with spirit of that invention.
Claims (5)
1. a kind of light swashs the EL-QCM-D array fluid detection system that electricity picks up characterized by comprising
Excitation light source: transmitting laser motivates quartz crystal oscillator, and type of laser is He-Ne laser；
Detection chambers: fluid flows through detection chambers, realizes the compatibility detected to gas phase and liquid phase；
Quartz crystal oscillator: being arranged in the medium position of detection chambers, generates alternating electromagnetic field under the excitation of laser；
Receiving coil: it receives the alternating electromagnetic field that quartz crystal oscillator generates and generates electric signal, and send signal processing for electric signal
Unit；
Signal processing unit: enhanced processing is filtered to the electric signal received from receiving coil, is carried out by oscillograph
It has been shown that, then by the characteristic parameter of PC processed signal stream acquisition measurand, characteristic parameter includes frequency response and dissipation factor；
The detection chambers are venturi tube structure, including sequentially connected thread segment, entrance, contraction section, venturi, diffuser
And outlet section, there are four quartz crystal oscillators, is arranged in venturi around cell array is constituted, each quartz crystal oscillator is corresponding with one and connects
Take-up circle；
Four quartz crystal oscillators are symmetrical two-by-two, and each quartz crystal oscillator is vertical with adjacent quartz crystal oscillator；
The outlet section is equipped with laser entrance, is provided with semi-permeable membrane on laser entrance, laser enters test chamber from laser entrance
It is overlapped after room with the center line of cell array, cell array is provided centrally with the rib made on laser projection to each quartz crystal oscillator
Mirror.
2. a kind of light according to claim 1 swashs the EL-QCM-D array fluid detection system that electricity picks up, which is characterized in that
Laser is self-resonance excitation to the motivational techniques of quartz crystal oscillator.
3. a kind of light according to claim 1 swashs the EL-QCM-D array fluid detection system that electricity picks up, which is characterized in that
The receiving coil is planar spiral structures coil, and penetralia coil diameter is 8mm-12mm, and most external coil diameter is 16mm-
24mm, planar spiral structures coil turn are 10-14；Planar spiral structures coil capacity value is 6.074nF, and admittance is
1.144mS。
4. a kind of light according to claim 1 swashs the EL-QCM-D array fluid detection system that electricity picks up, which is characterized in that
The quartz crystal oscillator is electrodeless AT cut type quartz bare die, and quartz crystal oscillator includes integrally formed pilum part and convex pillar part
Point, pilum part and pillar part are all cylindrical, the center line coincidence of pilum part and pillar part, pillar portion of upper surface
Coated with sensitive membrane, the fundamental frequency of quartz crystal oscillator is 6.0MHz, and pillar section diameter is 2-3mm, pillar part with a thickness of 0.3mm,
The diameter of pilum part is 4mm-6mm, and pilum segment thickness is 0.15mm-0.2mm.
5. a kind of light according to claim 1 swashs the EL-QCM-D array fluid detection system that electricity picks up, which is characterized in that
The signal processing unit includes filter amplification circuit, oscillograph and PC machine, and the input terminal of the filter amplification circuit connects
Take-up circle, output end connect oscillograph, and oscillograph is connect with PC machine.
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| CN107917955B (en) * | 2017-12-07 | 2019-12-03 | 江苏大学 | Novel light auxiliary quartz crystal microbalance and its detection method |
| CN115065415B (en) * | 2022-04-24 | 2023-04-11 | 南昌航空大学 | Method for obtaining micro-mass spectrum based on modulated optical signal |
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