CN106092802A - A kind of light swashs the EL-QCM-D array fluid detection system that electricity picks up - Google Patents
A kind of light swashs the EL-QCM-D array fluid detection system that electricity picks up Download PDFInfo
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- CN106092802A CN106092802A CN201610307151.0A CN201610307151A CN106092802A CN 106092802 A CN106092802 A CN 106092802A CN 201610307151 A CN201610307151 A CN 201610307151A CN 106092802 A CN106092802 A CN 106092802A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
- G01G3/16—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing measuring variations of frequency of oscillations of the body
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Abstract
The invention discloses a kind of light and swash the EL QCM D array fluid detection system that electricity picks up, system includes encouraging light source, detection chambers, quartz crystal oscillator, receiving coil and signal processing unit.Detecting system uses venturi-type structural system, such that it is able to the compatibility to gas phase and liquid phase detects during realizing detection.The present invention uses transient response method to detect, pumping signal swashs mode by self-resonance light and obtains, in the middle of quartz crystal oscillator array, prism is set, make to may be dispersed into through the light of laser entrance above each quartz crystal oscillator, by Fabry Perot model, electrodeless quartz crystal oscillator array is encouraged, produce resonance.Under the conditions of contactless, receiving coil can obtain corresponding vibration signal the signal of telecommunication being converted in coil, and then send signal processing unit acquisition characteristic parameter to, including frequency response and dissipation factor, thus realize wireless activation and the detection of wireless QCM D.This programme is applicable to sensor detection field.
Description
Technical field
The present invention relates to sensor detection field, especially relate to a kind of light and swash what electricity picked up
EL-QCM-D array fluid detection system.
Background technology
The measuring principle of QCM (QCM) is based on piezoelectric effect, works as QCM
Electrode when contacting with test substance, the character of test substance is (such as quality, viscosity, density
Deng) resonant frequency of QCM, the change of QCM resonant frequency and test substance will be changed
Quality linear, thus the change of test substance can be recorded by the change of resonant frequency.
QCM is probably the quartz resonance of present most study and declines balance sensing
One of device.What this kind of sensor utilized is the mass-sensitive characteristic of quartz-crystal resonator.
Nineteen ninety-five, G.Z.Sauerbrey is deduced Sauerbrey equation first, uses simple formula
The relation of quartz-crystal resonance frequency f and surface quality change m is depicted, has established quartz
Crystal microbalance is applied to the theoretical basis of sensor technology, is allowed to be widely used.
Wherein f0For quartz crystal oscillator resonant frequency, A is the speed of mechanical wave propagation in quartz crystal oscillator,
ρqFor the density of quartz crystal oscillator, μqFor the piezoelectricity modulus of shearing of quartz crystal oscillator, Δ f is quartz crystal oscillator
The effectively change of piezo area scope upper frequency, Δ m is the change of quartz crystal oscillator surface quality.
Mass change is converted into frequency change output, testing equipment by QCM technology
Simple in construction, experimentation is simple to operate, the detection of the high dissipation factor D in addition of accuracy of detection,
The quality of test substance, form, viscoelastic change can be obtained.
So-called vibrational excitation, it is simply that use suitable circuit and frame for movement, convert electrical energy into
The process of mechanical energy.Electromagnetic excitation is to utilize Ampereconductors by Lorentz force effect in magnetic field
Producing forced vibration, stable and reliable in work, the resonance being traditional is at most to use in sensor
Energisation mode.But owing to this detection mode must utilize magnetic field, therefore it is miniaturized at sensor
Aspect can be relatively difficult.
The research of qcm sensor detection method at present is concentrated mainly on gas phase and liquid stable inspection
Surveying the design aspect of device, these installation methods are often due to operate length complicated, time-consuming, precision
The factors such as low, use condition is strict limit its actual application.
Summary of the invention
The present invention mainly solve the operation length complicated, time-consuming existing for prior art, precision low,
Use condition is strict and the technical problem such as unicity for detection object, it is provided that a kind of equipment
Simply, easy to operate EL-QCM-D (electrodeless dissipative type QCM) array
Change fluid detection system, it is possible to achieve wireless activation and detection and the compatible place of multiple object
Reason.
The present invention is directed to what above-mentioned technical problem was mainly addressed by following technical proposals:
A kind of light swashs the EL-QCM-D array fluid detection system that electricity picks up, including:
Excitation light source: launching laser and encourage quartz crystal oscillator, type of laser is He-Ne
Laser；
Detection chambers: fluid flows through detection chambers, it is achieved compatible to gas phase and Liquid Detection
Property；
Quartz crystal oscillator: be arranged on the medium position of detection chambers, produces under the excitation of laser and hands over
Electromagnetic Field；
Receiving coil: receive the alternating electromagnetic field generation signal of telecommunication that quartz crystal oscillator produces, and by electricity
Signal is sent to signal processing unit；
Signal processing unit: be filtered at amplification receiving, from receiving coil, the signal of telecommunication obtained
Reason, is shown by oscillograph, can reflect the characteristic parameter of measurand to a certain extent,
Obtained the characteristic parameter of measurand again by PC processed signal stream, characteristic parameter includes frequency
Response and dissipation factor.
Owing to using electrodeless quartz crystal oscillator, excitation light source and receiving coil and quartz-crystal simultaneously
The array that shakes is not directly contacted with, such that it is able to realize wireless activation and the detection of QCM-D array.
As preferably, laser is self-resonance excitation to the motivational techniques of quartz crystal oscillator.
As preferably, described detection chambers is venturi tube structure, including the screw thread being sequentially connected with
Section, entrance, contraction section, venturi, diffuser and outlet section, quartz crystal oscillator has several,
Being arranged in venturi around constituting cell array, each quartz crystal oscillator is to there being a receiving coil.
The detection chambers of venturi tube structure, it is simple to during realizing detection, gas phase and liquid phase are examined
The compatible process surveyed, absorption during Venturi effect can also improve detection simultaneously and de-
Attached performance.
As preferably, described quartz crystal oscillator has four, and four quartz crystal oscillators are the most symmetrical, each
Quartz crystal oscillator is vertical with adjacent quartz crystal oscillator.
As preferably, described outlet section is provided with laser entrance, laser entrance is provided with semi-transparent
Film, laser overlaps with the centrage of cell array after laser entrance enters detection chambers, brilliant
Chip arrays is provided centrally with the prism making laser projections to each quartz crystal oscillator.
Detecting system uses the self-resonance motivational techniques in light stimulus, uses non-modulation list
Color light source, penetrant method Fabry-Perot-type model, can be in the semipermeable membrane of laser entrance and quartz-crystal
The optical standing wave energy that surface acquisition of shaking is stable, and then realize quartz crystal oscillator array is encouraged.
Simultaneously in order to realize QCM-D array, at the centrally disposed prism of cell array, Jin Erke
Make laser projections to each quartz wafer.After quartz crystal oscillator array realizes resonance, corresponding crystal oscillator
The receiving coil of relevant position receives the vibration signal of crystal oscillator, is converted to the signal of telecommunication in coil,
It is sent to signal processing unit, and then obtains corresponding characteristic parameter.
As preferably, receiving coil is mutually isostructural planar spiral structures coil, penetralia
Coil diameter is 8mm-12mm, and most external coil diameter is 16mm-24mm, planar spiral structures
Coil turn is 10-14；Planar spiral structures coil capacity value is 6.074nF, and admittance is
1.144mS。
As preferably, quartz crystal oscillator is the quartzy nude film of electrodeless AT cut type, for asymmetric
The convex pole structure of one side, quartz crystal oscillator includes integrated pilum part and projection part, base
Post part and projection part are all cylindrical, and the centrage of pilum part and projection part overlaps,
Projection portion of upper surface is coated with sensitive membrane, and the fundamental frequency of quartz crystal oscillator is 6.0MHz, convex pillar part
Dividing a diameter of 2-3mm, projection segment thickness is 0.3mm, a diameter of 4mm-6mm of pilum part,
The thickness of pilum part is 0.15mm-0.2mm.
In this programme, quartz crystal oscillator used, from the point of view of the material of sensing element forms structure, used
Quartz crystal oscillator use combinative structure, quartz crystal oscillator surface add one layer of sensitive membrane, sensitive membrane with
Good acoustical coupling can be formed, mutual by between sensitive material and measured parameter between resonator
Effect is converted to the equivalent parameters change of resonator.In practical operation, according to real in experimentation
Test the difference of object, different sensitive material films can be used, improve the scope of application of device.
As preferably, described signal processing unit includes filter amplification circuit, oscillograph and PC
Machine, the input of described filter amplification circuit connects receiving coil, and outfan connects oscillograph,
Oscillograph is connected with PC.
Filter amplification circuit (fundamental frequency regulation circuit board) mainly realizes function: fundamental frequency regulates circuit
Plate is connected with regulated power supply, and running voltage is 12V, receives the telecommunications obtained for receiving coil
Number it is filtered processing, extracts useful crystal oscillator decay vibration signal, filter noise jamming；With
Time, the useful signal of filtering is extracted and amplifies, facilitate the data observation in later stage to process.Filtering is put
The signal of telecommunication filter by big circuit, extract, amplify and be then delivered to oscillograph, display on oscillograph
Crystal oscillator vibrational waveform figure be sent to PC terminal be analyzed process, it is achieved characteristic parameter is (frequently
Rate response, dissipation factor) calculating.
The substantial effect that the present invention brings has been to provide a kind of light and has swashed the EL-QCM-D that electricity picks up
Array fluid detection system, it is achieved that the QCM-D array to gas phase and liquid phase compatible processing
The wireless activation of type sensor and monitoring, simplify experimental facilities, and experimental implementation is simple, helps
In the range of application and the Non-Destructive Testing of biosystem that expand QCM detection.
Accompanying drawing explanation
Fig. 1 is a kind of circuit block diagram of the present invention；
Fig. 2 is a kind of detection chambers structural representation of the present invention；
Fig. 3 is the sectional view of a kind of detection chambers venturi of the present invention；
Fig. 4 is a kind of quartz crystal oscillator front view of the present invention；
Fig. 5 is a kind of quartz crystal oscillator top view of the present invention；
In figure: 1.He-Ne generating laser, 2. quartz crystal oscillator, 3. receiving coil, 4. filtering is put
Big circuit, 5. oscillograph, 6.PC machine, 7. fluid intake, 8. thread segment, 9. entrance, 10.
Contraction section, 11. quartz crystal oscillators, 12. laser entrances, 13. fluid issuings, 14. prisms, 15. larynxs
Road, 16. diffusers, 17. outlet sections, 18. pilum parts, 19. projection parts.
Detailed description of the invention
Below by embodiment, and combine accompanying drawing, technical scheme is made tool further
The explanation of body.
Embodiment: a kind of light of the present embodiment swashs the EL-QCM-D array fluid detection that electricity picks up
System, as it is shown in figure 1, include:
Excitation light source: launch laser and encourage quartz crystal oscillator, encourages light source in the present embodiment
For He-Ne generating laser 1；
Detection chambers: fluid flows through detection chambers, it is achieved compatible to gas phase and Liquid Detection
Property；
Quartz crystal oscillator 2: be arranged on the medium position of detection chambers, produces under the excitation of laser
Alternating electromagnetic field；
Receiving coil 3: receive the alternating electromagnetic field generation signal of telecommunication that quartz crystal oscillator produces, and will
The signal of telecommunication is sent to signal processing unit；
Signal processing unit: be filtered at amplification receiving, from receiving coil, the signal of telecommunication obtained
Reason, is shown by oscillograph, can reflect the characteristic parameter of measurand to a certain extent,
Obtained the characteristic parameter of measurand again by PC processed signal stream, characteristic parameter includes frequency
Response and dissipation factor.
Signal processing unit includes filter amplification circuit 4, oscillograph 5 and PC 6, and filtering is put
The input of big circuit connects receiving coil, and outfan connects oscillograph, oscillograph and PC
Connect.
Owing to using electrodeless quartz crystal oscillator, excitation light source and receiving coil and quartz-crystal simultaneously
The array that shakes is not directly contacted with, such that it is able to realize wireless activation and the detection of QCM-D array.
As in figure 2 it is shown, detection chambers is venturi tube structure, including the thread segment being sequentially connected with
8, entrance 9, contraction section 10, venturi 15, diffuser 16 and outlet section 17.Such as Fig. 3
Shown in, quartz crystal oscillator has 4, is arranged in venturi around constituting cell array, four quartz
Crystal oscillator is the most symmetrical, and each quartz crystal oscillator is vertical with adjacent quartz crystal oscillator.Each quartz crystal oscillator
To there being a receiving coil.
The detection chambers of venturi tube structure, it is simple to during realizing detection, gas phase and liquid phase are examined
The compatible process surveyed, absorption during Venturi effect can also improve detection simultaneously and de-
Attached performance.
Outlet section is provided with laser entrance 12, and laser entrance is provided with semipermeable membrane, laser from
Laser entrance overlaps with the centrage of cell array after entering detection chambers, cell array center
It is provided with the prism 14 making laser projections to each quartz crystal oscillator.
Detecting system uses the self-resonance motivational techniques in light stimulus, uses non-modulation list
Color light source, penetrant method Fabry-Perot-type model, can be in the semipermeable membrane of laser entrance and quartz-crystal
The optical standing wave energy that surface acquisition of shaking is stable, and then realize quartz crystal oscillator array is encouraged.
Simultaneously in order to realize QCM-D array, at the centrally disposed prism of cell array, Jin Erke
Make laser projections to each quartz wafer.After quartz crystal oscillator array realizes resonance, corresponding crystal oscillator
The receiving coil of relevant position receives the vibration signal of crystal oscillator, is converted to the signal of telecommunication in coil,
It is sent to signal processing unit, and then obtains corresponding characteristic parameter.
Receiving coil is mutually isostructural planar spiral structures coil, and penetralia coil diameter is
8mm-12mm, most external coil diameter is 16mm-24mm, and planar spiral structures coil turn is
10-14；Planar spiral structures coil capacity value is 6.074nF, and admittance is 1.144mS.
As shown in Figure 4 and Figure 5, quartz crystal oscillator is the quartzy nude film of electrodeless AT cut type,
For the convex pole structure of asymmetric one side, quartz crystal oscillator includes integrated pilum part 18 He
Projection part 19, pilum part and projection part are all cylindrical, pilum part and convex pillar part
The centrage divided overlaps, and projection portion of upper surface is coated with sensitive membrane, and the fundamental frequency of quartz crystal oscillator is
6.0MHz, a diameter of 2-3mm of projection part, projection segment thickness is 0.3mm, pilum part
A diameter of 4mm-6mm, the thickness of pilum part is 0.15mm-0.2mm.
In this programme, quartz crystal oscillator used, from the point of view of the material of sensing element forms structure, used
Quartz crystal oscillator use combinative structure, quartz crystal oscillator surface add one layer of sensitive membrane, sensitive membrane with
Good acoustical coupling can be formed, mutual by between sensitive material and measured parameter between resonator
Effect is converted to the equivalent parameters change of resonator.In practical operation, according to real in experimentation
Test the difference of object, different sensitive material films can be used, improve the scope of application of device.
Filter amplification circuit (fundamental frequency regulation circuit board) mainly realizes function: fundamental frequency regulates circuit
Plate is connected with regulated power supply, and running voltage is 12V, receives the telecommunications obtained for receiving coil
Number it is filtered processing, extracts useful crystal oscillator decay vibration signal, filter noise jamming；With
Time, the useful signal of filtering is extracted and amplifies, facilitate the data observation in later stage to process.Filtering is put
The signal of telecommunication filter by big circuit, extract, amplify and be then delivered to oscillograph, display on oscillograph
Crystal oscillator vibrational waveform figure be sent to PC terminal be analyzed process, it is achieved characteristic parameter is (frequently
Rate response, dissipation factor) calculating.
This experimental provision uses venturi tube structure to realize compatible to gas phase and liquid phase environment
Property detection, achieved a butt joint by the helicitic texture at fluid intake 7 and fluid passage conduit, phase
Answer fluid to discharge from fluid issuing 13, facilitate the QCM-D of varying environment to detect.
In this programme, between excitation light source and quartz crystal oscillator, between quartz crystal oscillator and receiving coil
The most directly contact, be all wirelessly to transmit signal, significantly expanded sensor
Suitable environment, reduces installation requirement；The fluid detection chamber of venturi tube structure is greatly improved
The scope of the actual application of QCM-D, can realize under compatible processing gas phase and liquid phase environment is right
As.
Specific implementation process described herein is only to present invention spirit explanation for example.
Described specific implementation process can be done respectively by those skilled in the art
Plant the amendment of various kinds or supplement or use similar mode to substitute, but without departing from the present invention's
Spirit or surmount scope defined in appended claims.
Although the most more employing the terms such as quartz crystal oscillator, generating laser, oscillograph,
But it is not precluded from using the probability of other term.These terms are used to be only used to more convenient
Describe and explain the essence of the present invention；Being construed as any additional restriction is all
Contrary with spirit of the present invention.
Claims (8)
1. a light swashs the EL-QCM-D array fluid detection system that electricity picks up, it is characterised in that including:
Excitation light source: launching laser and encourage quartz crystal oscillator, type of laser is He-Ne laser；
Detection chambers: fluid flows through detection chambers, it is achieved to gas phase and the compatibility of Liquid Detection；
Quartz crystal oscillator: be arranged on the medium position of detection chambers, produces alternating electromagnetic field under the excitation of laser；
Receiving coil: receive the alternating electromagnetic field generation signal of telecommunication that quartz crystal oscillator produces, and the signal of telecommunication is sent
To signal processing unit；
Signal processing unit: be filtered processing and amplifying to receiving, from receiving coil, the signal of telecommunication obtained, pass through
Oscillograph shows, then is obtained the characteristic parameter of measurand, characteristic parameter bag by PC processed signal stream
Include frequency response and dissipation factor.
A kind of light the most according to claim 1 swashs the EL-QCM-D array fluid detection system that electricity picks up,
It is characterized in that, laser is self-resonance excitation to the motivational techniques of quartz crystal oscillator.
A kind of light the most according to claim 1 swashs the EL-QCM-D array fluid detection system that electricity picks up,
It is characterized in that, described detection chambers is venturi tube structure, including the thread segment being sequentially connected with, entrance,
Contraction section, venturi, diffuser and outlet section, quartz crystal oscillator has several, arranges around constituting cell array
In venturi, each quartz crystal oscillator is to there being a receiving coil.
A kind of light the most according to claim 3 swashs the EL-QCM-D array fluid detection system that electricity picks up,
It is characterized in that, described quartz crystal oscillator has four, and four quartz crystal oscillators are the most symmetrical, each quartz crystal oscillator with
Adjacent quartz crystal oscillator is vertical.
5. the EL-QCM-D array fluid detection system swashing that electricity picks up according to a kind of light described in claim 3 or 4
System, it is characterised in that described outlet section is provided with laser entrance, and laser entrance is provided with semipermeable membrane, swashs
Light overlaps with the centrage of cell array after laser entrance enters detection chambers, and cell array is centrally disposed
There is the prism making laser projections to each quartz crystal oscillator.
6. the EL-QCM-D array fluid detection system swashing that electricity picks up according to a kind of light described in claim 1 or 3
System, it is characterised in that described receiving coil is planar spiral structures coil, and penetralia coil diameter is
8mm-12mm, most external coil diameter is 16mm-24mm, and planar spiral structures coil turn is 10-14；Flat
Surface helix structure coil capacitance is 6.074nF, and admittance is 1.144mS.
7. the EL-QCM-D array fluid detection system swashing that electricity picks up according to a kind of light described in claim 3 or 4
System, it is characterised in that described quartz crystal oscillator is electrodeless AT cut type quartz nude film, and quartz crystal oscillator includes one
Body formed pilum part and projection part, pilum part and projection part are all cylindrical, pilum part and
The centrage of projection part overlaps, and projection portion of upper surface is coated with sensitive membrane, and the fundamental frequency of quartz crystal oscillator is
6.0MHz, a diameter of 2-3mm of projection part, projection segment thickness is 0.3mm, pilum part a diameter of
4mm-6mm, pilum segment thickness is 0.15mm-0.2mm.
A kind of light the most according to claim 1 swashs the EL-QCM-D array fluid detection system that electricity picks up,
It is characterized in that, described signal processing unit includes filter amplification circuit, oscillograph and PC, described filtering
The input of amplifying circuit connects receiving coil, and outfan connects oscillograph, and oscillograph is connected with PC.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107917955A (en) * | 2017-12-07 | 2018-04-17 | 江苏大学 | New light auxiliary quartz crystal microbalance and its detection method |
| CN115065415A (en) * | 2022-04-24 | 2022-09-16 | 南昌航空大学 | Method for obtaining micro-mass spectrum based on modulated optical signal |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175764A (en) * | 2011-02-24 | 2011-09-07 | 中国科学院上海微系统与信息技术研究所 | Quality chemical sensor using functionalized mesoporous material as sensitive material and method |
| CN102507980A (en) * | 2011-11-02 | 2012-06-20 | 重庆理工大学 | Silicon micro two-dimension acceleration sensor based on self-resonant technology |
| CN104048893A (en) * | 2014-06-19 | 2014-09-17 | 中国科学院理化技术研究所 | Quartz crystal microbalance sensor for detecting HCN gas and manufacturing method and application thereof |
| CN104198321A (en) * | 2014-09-03 | 2014-12-10 | 电子科技大学 | QCM (quartz crystal microbalance) formaldehyde sensor with chemical and physical adsorption effects and preparation method thereof |
-
2016
- 2016-05-10 CN CN201610307151.0A patent/CN106092802B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102175764A (en) * | 2011-02-24 | 2011-09-07 | 中国科学院上海微系统与信息技术研究所 | Quality chemical sensor using functionalized mesoporous material as sensitive material and method |
| CN102507980A (en) * | 2011-11-02 | 2012-06-20 | 重庆理工大学 | Silicon micro two-dimension acceleration sensor based on self-resonant technology |
| CN104048893A (en) * | 2014-06-19 | 2014-09-17 | 中国科学院理化技术研究所 | Quartz crystal microbalance sensor for detecting HCN gas and manufacturing method and application thereof |
| CN104198321A (en) * | 2014-09-03 | 2014-12-10 | 电子科技大学 | QCM (quartz crystal microbalance) formaldehyde sensor with chemical and physical adsorption effects and preparation method thereof |
Non-Patent Citations (2)
| Title |
|---|
| 侯俊才等: "石英晶体微天平传感器检测香蕉成熟度的试验", 《农 业 工 程 学 报》 * |
| 魏宏雨: "电磁无线激励的QCM-D声学传感器研究", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107917955A (en) * | 2017-12-07 | 2018-04-17 | 江苏大学 | New light auxiliary quartz crystal microbalance and its detection method |
| WO2019109368A1 (en) * | 2017-12-07 | 2019-06-13 | 江苏大学 | Novel light-assisted quartz crystal microbalance and measurement method thereof |
| CN107917955B (en) * | 2017-12-07 | 2019-12-03 | 江苏大学 | Novel light auxiliary quartz crystal microbalance and its detection method |
| US11105774B2 (en) | 2017-12-07 | 2021-08-31 | Jiangsu University | Light-assisted quartz crystal microbalance and measurement method thereof |
| CN115065415A (en) * | 2022-04-24 | 2022-09-16 | 南昌航空大学 | Method for obtaining micro-mass spectrum based on modulated optical signal |
| CN115065415B (en) * | 2022-04-24 | 2023-04-11 | 南昌航空大学 | Method for obtaining micro-mass spectrum based on modulated optical signal |
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