CN106068586B - 可调谐soi激光器 - Google Patents
可调谐soi激光器 Download PDFInfo
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- CN106068586B CN106068586B CN201580002672.9A CN201580002672A CN106068586B CN 106068586 B CN106068586 B CN 106068586B CN 201580002672 A CN201580002672 A CN 201580002672A CN 106068586 B CN106068586 B CN 106068586B
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- bragg reflector
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- distributed bragg
- soi
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/125—Distributed Bragg reflector [DBR] lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
- H01S5/142—External cavity lasers using a wavelength selective device, e.g. a grating or etalon which comprises an additional resonator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/06—Construction or shape of active medium
- H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
- H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
- H01S3/0637—Integrated lateral waveguide, e.g. the active waveguide is integrated on a substrate made by Si on insulator technology (Si/SiO2)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/0206—Substrates, e.g. growth, shape, material, removal or bonding
- H01S5/021—Silicon based substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1003—Waveguide having a modified shape along the axis, e.g. branched, curved, tapered, voids
- H01S5/1007—Branched waveguides
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
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- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/3427—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in IV compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
- H01S5/1206—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers having a non constant or multiplicity of periods
- H01S5/1209—Sampled grating
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Semiconductor Lasers (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
Claims (29)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1400904.7 | 2014-01-20 | ||
GB1400904.7A GB2522410A (en) | 2014-01-20 | 2014-01-20 | Tunable SOI laser |
PCT/GB2015/050104 WO2015107365A1 (en) | 2014-01-20 | 2015-01-19 | Tunable soi laser |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106068586A CN106068586A (zh) | 2016-11-02 |
CN106068586B true CN106068586B (zh) | 2017-09-19 |
Family
ID=50239166
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201580002672.9A Active CN106068586B (zh) | 2014-01-20 | 2015-01-19 | 可调谐soi激光器 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9240673B2 (zh) |
CN (1) | CN106068586B (zh) |
GB (1) | GB2522410A (zh) |
WO (1) | WO2015107365A1 (zh) |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
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GB2522252B (en) | 2014-01-20 | 2016-04-20 | Rockley Photonics Ltd | Tunable SOI laser |
GB201418637D0 (en) * | 2014-10-20 | 2014-12-03 | Univ St Andrews | Laser |
CA3018248C (en) * | 2015-03-20 | 2023-09-12 | Universite Laval | Optical devices and method for tuning an optical signal |
CN105119141B (zh) * | 2015-09-17 | 2016-06-22 | 华中科技大学 | 一种双波长可调谐半导体激光器 |
US9997890B2 (en) | 2015-10-28 | 2018-06-12 | Rockley Photonics Limited | Discrete wavelength tunable laser |
US11699892B2 (en) * | 2016-02-19 | 2023-07-11 | Rockley Photonics Limited | Discrete wavelength tunable laser |
GB2547467A (en) | 2016-02-19 | 2017-08-23 | Rockley Photonics Ltd | Tunable laser |
WO2017200620A2 (en) * | 2016-02-29 | 2017-11-23 | Stc.Unm | Ring laser integrated with silicon-on-insulator waveguide |
US9812842B2 (en) * | 2016-04-12 | 2017-11-07 | Oracle International Corporation | Hybrid optical source with optical proximity coupling provided by an external reflector |
CN108075356A (zh) * | 2016-11-16 | 2018-05-25 | 苏州旭创科技有限公司 | 基于soi结构的热不敏感激光器 |
CN108075355A (zh) * | 2016-11-16 | 2018-05-25 | 苏州旭创科技有限公司 | 基于soi结构的热不敏感激光器 |
CN109565149B (zh) * | 2016-12-08 | 2020-06-26 | 华为技术有限公司 | 输出波长可控的激光器 |
CN108879309B (zh) * | 2017-05-09 | 2021-02-12 | 华为技术有限公司 | 用于可调激光器的反射镜结构和可调激光器 |
CN108879310B (zh) * | 2017-05-10 | 2020-07-28 | 华为技术有限公司 | 用于可调激光器的反射镜结构和可调激光器 |
US10530124B2 (en) | 2017-05-11 | 2020-01-07 | Hewlett Packard Enterprise Development Lp | Tunable laser |
CN110913762B (zh) | 2017-05-22 | 2023-06-27 | 布罗利思感测科技公司 | 用于实时监视血液成分浓度水平的可调谐混合iii-v/iv激光传感器片上系统 |
US10811848B2 (en) * | 2017-06-14 | 2020-10-20 | Rockley Photonics Limited | Broadband arbitrary wavelength multichannel laser source |
US11050215B2 (en) * | 2017-06-23 | 2021-06-29 | Mitsubishi Electric Corporation | Variable wavelength laser device and variable wavelength laser device production method |
GB2579485B (en) * | 2017-07-05 | 2023-01-11 | Rockley Photonics Ltd | Reconfigurable spectroscopy system |
US10439357B2 (en) | 2017-07-06 | 2019-10-08 | Hewlett Packard Enterprise Development Lp | Tunable laser |
US10840672B2 (en) * | 2017-08-18 | 2020-11-17 | Nokia Solutions And Networks Oy | Mode-locked semiconductor laser capable of changing output-comb frequency spacing |
CN108288818B (zh) * | 2018-02-05 | 2023-08-01 | 浙江大学 | 基于半波耦合部分反射器的可调谐半导体激光器 |
JP7269185B2 (ja) * | 2018-02-08 | 2023-05-08 | 古河電気工業株式会社 | 波長可変レーザおよび光モジュール |
CN108448379A (zh) * | 2018-03-14 | 2018-08-24 | 清华大学 | 可调谐窄线宽半导体激光器 |
US11137548B2 (en) * | 2018-11-19 | 2021-10-05 | Ayar Labs, Inc. | Retro reflector and associated methods |
US20220283308A1 (en) * | 2019-02-06 | 2022-09-08 | Rockley Photonics Limited | Optical components for imaging |
US10958038B2 (en) * | 2019-05-20 | 2021-03-23 | Microsoft Technology Licensing, Llc | Edge-emitting laser with high-frequency modulated reflector section |
FR3100936B1 (fr) * | 2019-09-12 | 2022-04-01 | Commissariat Energie Atomique | Circuit photonique à section active hybride III-V sur silicium à taper silicium inversé |
EP3799231B9 (en) * | 2019-09-27 | 2024-04-24 | ams International AG | Optical device, photonic detector, and method of manufacturing an optical device |
CN112600071A (zh) * | 2019-10-01 | 2021-04-02 | Ii-Vi特拉华有限公司 | 双卡帕分布式布拉格反射器激光器 |
US20210098970A1 (en) * | 2019-10-01 | 2021-04-01 | Ii-Vi Delaware, Inc. | Isolator-free laser |
JP7322646B2 (ja) * | 2019-10-01 | 2023-08-08 | 住友電気工業株式会社 | 波長可変レーザ素子およびその製造方法 |
CN110890691B (zh) * | 2019-11-29 | 2021-02-09 | 中国科学院长春光学精密机械与物理研究所 | 一种半导体激光器及其制备方法 |
CN111262125B (zh) * | 2020-01-19 | 2021-05-11 | 中国科学院上海微系统与信息技术研究所 | 一种硅基激光器及其制备、解理方法 |
CN113495331A (zh) * | 2020-03-18 | 2021-10-12 | 青岛海信宽带多媒体技术有限公司 | 一种光模块 |
US11929592B2 (en) * | 2020-09-17 | 2024-03-12 | Marvell Asia Pte Ltd. | Silicon-photonics-based semiconductor optical amplifier with N-doped active layer |
CN112366517B (zh) * | 2020-11-10 | 2022-04-22 | 中国科学院半导体研究所 | 调谐激光器芯片 |
WO2023075850A1 (en) * | 2021-10-25 | 2023-05-04 | GenXComm, Inc. | Hybrid photonic integrated circuits for ultra-low phase noise signal generators |
GB2612376A (en) * | 2021-11-02 | 2023-05-03 | Rockley Photonics Ltd | Laser |
CN114284867A (zh) * | 2021-12-27 | 2022-04-05 | 苏州鼎芯光电科技有限公司 | 一种宽谱可调谐半导体激光器 |
CN117096728A (zh) * | 2022-05-10 | 2023-11-21 | 华为技术有限公司 | 多模激光装置、光放大器和光发送模块 |
CN115085008B (zh) * | 2022-07-15 | 2023-04-25 | 上海新微半导体有限公司 | 基于soi和iii-v半导体的混合集成可调谐激光器 |
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US20150207296A1 (en) | 2015-07-23 |
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US9240673B2 (en) | 2016-01-19 |
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