CN106065495B - Diffusion source device - Google Patents
Diffusion source device Download PDFInfo
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- CN106065495B CN106065495B CN201610681849.9A CN201610681849A CN106065495B CN 106065495 B CN106065495 B CN 106065495B CN 201610681849 A CN201610681849 A CN 201610681849A CN 106065495 B CN106065495 B CN 106065495B
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- Prior art keywords
- nozzle
- diffusion source
- holder
- group
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Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/04—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the liquid state
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
- B05D1/005—Spin coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/228—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a liquid phase, e.g. alloy diffusion processes
Abstract
The present invention relates to a kind of diffusion source devices.Diffusion source device is used for coated sample, including rotating mechanism, fixed frame, holder and nozzle array, rotating mechanism is connect with fixed frame, holder is connect with rotating mechanism, and nozzle array is connect with holder, and nozzle array includes multiple nozzles, multiple nozzles may be contained on holder, when diffusion source device coats sample, rotating mechanism drives holder rotation, makes to be arranged the rotation of the nozzle on holder and is diffused source coating to sample.Above-mentioned diffusion source device can improve coating effect and processing efficiency, save diffusion source material, reduce process costs.
Description
Technical field
The present invention relates to coating equipment fields, more particularly to a kind of diffusion source device.
Background technology
The painting source technology in diffusion technique and diffusion source has a wide range of applications in the fields such as microelectronics and photovoltaic.Diffusion source can
To be divided into gaseous source, Solid Source and liquid source, wherein liquid state diffusion source has simple for process, equipment operation conveniently and operation danger
The advantages such as dangerous coefficient is low.In addition, the painting source technology in liquid state diffusion source is applied on efficient solar battery, meeting technology
It is required that while, it can be substantially reduced device hardware requirement, and then reduce equipment cost and later maintenance cost.
In general, the painting source technology in the liquid state diffusion source generally used for spin coating or spraying process, mainly uses single-point
The painting method in rotation or the reciprocating spray source of single-point is in sample surfaces coating diffusion source behind drop source.Using what is rotated behind single-point drop source
In the sample behind heart position dropwise addition diffusion source, sample is rotated in sample surfaces to throw diffusion source away to be applied coating method
It covers, using the above method it cannot be guaranteed that the uniformity of diffusion source, and the processing technology time is long, and capacity efficiency is low, in addition,
The utilization rate in the diffusion source that the mode rotated behind single-point drop source uses is very low, and diffusion source material waste is serious；It is reciprocal using single-point
Spraying method needs back and forth to be added dropwise diffusion source in sample surfaces, and the diffusion source material of long processing time and needs is more.Therefore, liquid
The painting method in diffusion source exist coating effect is poor, processing efficiency is low, source material waste seriously and the technique thus brought at
This high problem.
Invention content
Based on this, it is necessary to for above-mentioned liquid state diffusion source painting method coating effect it is poor, processing efficiency is low, source material
Waste and the high problem of process costs, provide a kind of diffusion source device.
A kind of diffusion source device is used for coated sample, including rotating mechanism, fixed frame, holder and nozzle array, rotation
Rotation mechanism is connect with fixed frame, and holder is connect with rotating mechanism, and nozzle array is connect with holder, and nozzle array includes multiple sprays
Mouth, multiple nozzles may be contained on holder, and when diffusion source device coats sample, rotating mechanism drives holder rotation
Turn, makes to be arranged the rotation of the nozzle on holder and source coating is diffused to sample.
Above-mentioned diffusion source device will be arranged comprising the nozzle array of multiple nozzles on holder, holder and whirler
Structure connects, and when being coated to sample, rotating mechanism drives holder rotation, to drive the nozzle array on holder in sample
Top rotates, and nozzle array can cover entire sample by rotation, and diffusion source is dropped evenly in sample surfaces, diffusion source is made
It uniformly spreads apart in sample surfaces, the coating effect of sample surfaces can be improved, while spreading source and being carried out by multiple nozzles
Rotation is added dropwise, and can improve the utilization rate in diffusion source, reduces the dosage of diffusion source material and then reduces production cost.
The portion nozzle in multiple nozzles forms first jet group, another part nozzle sets in one of the embodiments,
At second nozzle group, multiple nozzles in first jet group linearly arrange, and multiple nozzles in second nozzle group are linearly arranged
Row, first jet group are mutually parallel with second nozzle group, the position of nozzle and the nozzle in second nozzle group in first jet group
Staggeredly.
In one of the embodiments, in first jet group the quantity of nozzle and nozzle in second nozzle group quantity phase
Deng.
Include solution feed pump and multiple liquid feeding pipelines in one of the embodiments, one end of each liquid feeding pipeline is and feed flow
The other end of pump connection, each liquid feeding pipeline is connected with corresponding nozzle respectively.
Solution feed pump includes in the first solution feed pump and the second solution feed pump, with first jet group in one of the embodiments,
The liquid feeding pipeline of nozzle connection is connected to the first solution feed pump, and the liquid feeding pipeline being connect with the nozzle in second nozzle group is connected to the
Two solution feed pumps.
Regulating valve is provided on liquid feeding pipeline in one of the embodiments, regulating valve is for controlling corresponding nozzle
Drop velocity.
Nozzle includes blast tube and nozzle water dropper in one of the embodiments, and one end of blast tube is connect with holder, spray
The other end of mouth pipe is detachably connected with nozzle water dropper.
Rotating mechanism includes rotary shaft, bearing, driving mechanism and driving member in one of the embodiments, bearing with it is solid
Determine frame connection, rotary shaft passes through bearing and is socketed with bearing, and one end of rotary shaft is connect with holder, and the other end of rotary shaft passes through
Driving member is connect with driving mechanism.
Fixed frame includes sliding seat, fixed seat, crane and servo motor, sliding base sleeve in one of the embodiments,
It is connected to the outside of fixed seat, one end of crane is connect with sliding seat, and the other end of crane is connect with rotating mechanism, servo electricity
Machine is connect with sliding seat.
Holder is detachably connected with rotating mechanism in one of the embodiments,.
Description of the drawings
Fig. 1 is the structural schematic diagram of diffusion source device in one embodiment；
Fig. 2 is the structural schematic diagram of the single-nozzle liquid feeding pipeline of diffusion source device shown in FIG. 1；
Fig. 3 is the cross-sectional view of nozzle array in one embodiment shown in FIG. 1；
Fig. 4 is the cross-sectional view of nozzle array in another embodiment.
Drawing reference numeral：
10, rotating mechanism；11, rotary shaft；12, bearing；13, driving mechanism；14, driving member；20, fixed frame；21, fixed
Seat；22, crane；23, sliding seat；24, servo motor；30, holder；40, nozzle array；41, first jet group；42, second
Nozzle sets；50, solution feed pump；60, liquid feeding pipeline；61, regulating valve；70, sample；400, nozzle；401, blast tube；402, nozzle drips
Head.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
As shown in Figure 1, the diffusion source device of an embodiment, is used for coated sample, diffusion source device includes
Rotating mechanism 10, fixed frame 20, holder 30 and nozzle array 40, rotating mechanism 10 are connect with fixed frame 20, holder 30 and rotation
Mechanism 10 connects, and nozzle array 40 is connect with holder 30, and nozzle array 40 includes multiple nozzles 400, and multiple nozzles 400 are set to
On holder 30, when diffusion source device coats sample, rotating mechanism 10 drives holder 30 to rotate, and makes to be set to holder
The rotation of nozzle 400 on 30 is diffused source coating to sample.
In one embodiment, rotating mechanism 10 includes rotary shaft 11, bearing 12, driving mechanism 13 and driving member 14, axis
It holds 12 to connect with fixed frame 20, rotary shaft 11 passes through bearing 12 and is socketed with bearing 12, and one end and the holder 30 of rotary shaft 11 connect
It connects, the other end of rotary shaft 11 is connect by driving member 14 with driving mechanism 13.Specifically, offering installation on fixed frame 20
Hole, bearing 12 are mounted in the mounting hole of fixed frame 20, and rotary shaft 11 is passed through from 12 inside of bearing and is socketed in bearing 12
Side, the inner hollow of rotary shaft 11.One end of rotary shaft 11 is connect with holder 30, and rotary shaft 11 is connected by fastener and holder 30
It connects, fastener can be bolt, nut and screw etc..The other end of rotary shaft 11 is connect with driving member 14, driving member 14 and drive
Motivation structure 13 connects.In the present embodiment, driving member 14 is drive link, and driving mechanism 13 is driving motor, but needs to illustrate
It is that transmission mechanism can be the transmission parts such as driving belt, driving mechanism 13 can be the driving devices such as cylinder, can be according to need
Specifically to be arranged, however it is not limited to the present embodiment.When work, driving motor operation driving drive rod rotation, drive link drives rotation
Axis 11 is rotated, and rotary shaft 11 drives the nozzle array 40 on holder 30 and holder 30 connected to it to be rotated.
In one embodiment, fixed frame 20 includes sliding seat 23, fixed seat 21, crane 22 and servo motor 24, is slided
Dynamic seat 23 is socketed on the outside of fixed seat 21, and one end of crane 22 is connect with sliding seat 23, the other end of crane 22 and rotation
Rotation mechanism 10 connects, and servo motor 24 is connect with sliding seat 23.Specifically, one end of crane 22 is offered for installing bearing
12 mounting hole, by bearing 12 be mounted on mounting hole in after so that crane 22 connect with rotating mechanism 10, crane 22 it is another
One end is connect with sliding seat 23, and sliding seat 23 is set in the outside of fixed seat 21, and sliding seat 23 can carry out in fixed seat 21
It slides up and down, sliding seat 23 is connect with servo motor 24, and servo motor 24 is for driving sliding seat 23 to be carried out in fixed seat 21
Sliding, sliding seat 23 drive crane 22 to move up and down, and crane 22 drives holder 30 to move up and down, so as to adjust
The height of holder 30 and the nozzle array 40 that is arranged on holder 30 apart from sample surfaces.
In another embodiment, fixed frame 20 includes fixed seat 21, crane 22 and servo motor 24, in fixed seat 21
It is provided with sliding rail, sliding shoe is provided on sliding rail, one end of crane 22 is connect with rotating mechanism 10, the other end of crane 22
It is connect with sliding rail, servo motor 24 is connect with sliding shoe.Specifically, one end of crane 22 is offered for installing bearing 12
Mounting hole, so that crane 22 is connect with rotating mechanism 10 after bearing 12 is mounted in mounting hole, the other end of crane 22
It is connect with the sliding shoe on sliding rail, for servo motor 24 for driving sliding shoe to be slided on sliding rail, sliding shoe drives lifting
Frame 22 moves up and down, and crane 22 drives holder 30 to move up and down, and so as to adjusting bracket 30 and is arranged in holder 30
On height of the nozzle array 40 apart from sample surfaces.
It, can be by adjusting the height of crane 22 come the nozzle array in adjusting bracket 30 before being coated to sample
Height of the row 40 apart from sample surfaces makes nozzle array 40 be located at the position for being appropriate for spin coating, to reach better coating
Effect.In the present embodiment, altitude range of the nozzle 400 in nozzle array 40 apart from sample is 1cm~5cm, it is preferred that spray
Height of the mouth apart from sample is 1cm.
As shown in Fig. 2, the portion nozzle 400 in multiple nozzles 400 forms first jet group 41, another part nozzle 400
Second nozzle group 42 is formed, multiple nozzles 400 in first jet group 41 linearly arrange, multiple sprays in second nozzle group 42
Mouth 400 linearly arranges, and first jet group 41 is mutually parallel with second nozzle group 42, the nozzle 400 in first jet group 41 and
The position of nozzle 400 in second nozzle group 42 interlocks.Specifically, being offered on holder 30 multiple for installing nozzle 400
Through-hole, will the nozzle 400 of first jet group 41 and second nozzle group 42 be inserted into holder 30 through-hole in carry out installation fixation.The
Each nozzle 400 in one nozzle sets 41 close to two adjacent nozzles 400 in second nozzle group 42 and is located at two nozzles
Between the gap formed between 400, each nozzle 400 in second nozzle group 42 is also close to two phases in first jet group 41
Between adjacent nozzle 400 and the gap formed between two nozzles 400.In one embodiment, in first jet group 41
The quantity of nozzle 400 is equal with the quantity of nozzle 400 in second nozzle group 42.Further, first jet group 41 and second is sprayed
The length of mouth group 42 is more than cornerwise length of sample 70 to be sprayed, it is possible thereby to ensure that nozzle array 40 is carrying out rotation drop
During adding, diffusion source can be paved with 70 surface of entire sample, keep diffusion source uniform in 70 diffusion into the surface of sample coating.
In another embodiment, as shown in figure 3, the portion nozzle 400 in multiple nozzles 400 forms multiple first jets
Group 41, another part nozzle 400 forms multiple second nozzle groups 42, multiple first jet groups 41 and multiple 42 phases of second nozzle group
Mutually parallel, multiple nozzles 400 in first jet group 41 linearly arrange, and multiple nozzles 400 in second nozzle group 42 are in line
Property arrangement, nozzle 400 and the position of the nozzle 400 in second nozzle group 42 in first jet group 41 interlock.First jet group
Each nozzle in 41 is formed close to two adjacent nozzles 400 in second nozzle group 42 and between two nozzles 400
Gap between, each nozzle 400 in second nozzle group 42 is also close to two adjacent nozzles 400 in first jet group 41
And between the gap formed between two nozzles 400.In one embodiment, in first jet group 41 nozzle 400 number
Amount is equal with the quantity of nozzle 400 in second nozzle group 42.Further, the length of first jet group 41 and second nozzle group 42
Close to the length of side of sample 70 to be coated, the array-width for the nozzle array 40 that first jet group 41 and second nozzle group 42 are formed
Close to the length of side of coated sample 70, setting can be in the case where nozzle array 40 be without rotation in this way, and nozzle array 40 exists
During diffusion source is added dropwise, 70 surface of sample can be paved with by diffusion source, and rotation can accelerate the speed being added dropwise.
In above-described embodiment, pass through the form for being arranged in an array multiple nozzles 400, it is ensured that nozzle array 40 into
During row rotation is added dropwise, diffusion source, which is added dropwise, to be paved with entire sample 70 to be coated, and this mode is dripped compared to single-point
The mode for adding diffusion is more advantageous to diffusion source and uniformly spreads apart on 70 surface of sample, can largely improve diffusion source
The uniformity of coating and coating effect on 70 surface of sample.
In one embodiment, holder 30 is detachably connected with rotating mechanism 10.The form that nozzle array 40 is arranged is different
The type of corresponding holder 30 also differs, and according to specific coating needs that nozzle array 40 can be selected, will prop up
Frame 30 is arranged to be detachably connected with rotating mechanism 10, is conducive to replace different types of holder 30 and different types of nozzle
Array 40.
As shown in figure 4, diffusion source device further includes solution feed pump 50 and multiple liquid feeding pipelines 60, each liquid feeding pipeline 60
One end is connect with solution feed pump 50, and the other end of each liquid feeding pipeline 60 is connected with corresponding nozzle 400 respectively.Each nozzle
400 all connect with a liquid feeding pipeline 60, and liquid feeding pipeline 60 is connect with solution feed pump 50, and solution feed pump 50 is by liquid feeding pipeline 60 to spray
Mouth 400 conveys liquid diffusion source, and the total diffusion source material supplied to nozzle array 40 is previously set in solution feed pump 50
Metering, can accurately control the amount of the diffusion source material of supply.Further, it is provided with tune on each liquid feeding pipeline 60
Valve 61 is saved, regulating valve 61 is used to control the drop velocity of corresponding nozzle 400, and each nozzle 400 of nozzle array 40 can lead to
The regulating valve 61 on liquid feeding pipeline 60 connected to it is overregulated to control rate when liquid is added dropwise in nozzle 400, by nozzle array
The regulating valve 61 of all nozzles 400 in row 40 is all adjusted to identical position, and the drop velocity of each nozzle 400 is made to keep one
It causes, can be dropped evenly at various locations convenient for diffusion source when rotation.It can be learnt by experiment and sample surfaces are paved with needs
Diffusion source amount, the metering in total diffusion source of dropwise addition is accurately controlled by solution feed pump 50, so as to make the profit in diffusion source
Reach highest with rate, avoids the waste of diffusion source material, reduce cost.
Further, solution feed pump 50 includes the nozzle in the first solution feed pump and the second solution feed pump, with first jet group 41
The liquid feeding pipeline 60 of 400 connections is connected to the first solution feed pump, the liquid feeding pipeline 60 being connect with the nozzle 400 in second nozzle group 42
It is connected to the second solution feed pump.First solution feed pump is to the identical liquid of all nozzle liquid supplies of first jet group 41, the second solution feed pump
Identical liquid is supplied to all nozzles 400 of second nozzle group 42, what the first solution feed pump and the second solution feed pump were supplied is different
Liquid.Main valve by controlling the first solution feed pump and the second solution feed pump can control their working condition, the first solution feed pump
Feed flow work can be individually carried out with the second solution feed pump, feed flow work can also be carried out at the same time.
In one embodiment, it before coating sample, needs to clean sample, at this moment the first solution feed pump
The liquid of middle offer is cleaning solution, and the liquid provided in the second solution feed pump is diffusion source material.It is first turned on the first solution feed pump
Main valve, and make rotating mechanism 10 that nozzle array 40 be driven to carry out rotation dropwise addition, at this moment only first jet group 41 works, the first spray
Cleaning solution is added dropwise in nozzle 400 in mouth group 41 on sample, and the main valve of the first solution feed pump is closed after cleaning, opens second and supplies
The main valve of liquid pump makes second nozzle group 42 work independently, and the nozzle 400 of second nozzle group 42 rotates on sample is added dropwise diffusion source
Sample is coated.
In another embodiment, when needing to sample while two different diffusion sources be added dropwise, the first solution feed pump and
Two solution feed pumps supply two different diffusion sources to first jet group 41 and second nozzle group 42 respectively, when being coated, simultaneously
The main valve of the first solution feed pump and the second solution feed pump is opened, nozzle array 40 is rotated, first jet group 41 and second nozzle group
42 work at the same time, and nozzle array 40 is added dropwise two different diffusion sources simultaneously in sample surfaces and is coated to sample surfaces.
By being arranged two solution feed pumps 50 and two kind of nozzle array 40, two nozzle arrays 40 can independent alternately work
Make, work can also be carried out at the same time, need not be replaced when needing to coat two kinds of liquid, in coating procedure or washer jet
400, it saved coating time, simplified operation, reduced labour, and improve the working efficiency of coating.
In one embodiment, nozzle 400 includes blast tube 401 and nozzle water dropper 402, one end of blast tube 401 and branch
Frame 30 connects, and the other end and the nozzle water dropper 402 of blast tube 401 are detachably connected, and blast tube 401 and nozzle water dropper 402 are removable
Connection is unloaded convenient for nozzle water dropper 402 is replaced and cleaned, the process that oozes in the slave nozzle in diffusion source is made to keep smooth.
The process of diffusion source device coated to sample surfaces is specific as follows：
Sample is fixed on board, by adjusting the height of crane 22 on fixed frame 20 by the nozzle array on holder 30
Row 40 are adjusted to the height for being appropriate for coating, start the driving mechanism 13 of rotating mechanism 10, and driving mechanism 13 drives transmission parts
To drive rotary shaft 11 to rotate, rotary shaft 11 drives holder 30 and the nozzle array 40 being arranged on holder 30 to be revolved for transmission
Turn, open simultaneously solution feed pump 50, solution feed pump 50 provides diffusion source by liquid feeding pipeline 60 to nozzle array 40, spreads source from nozzle
400 nozzle water dropper 402 oozes arrival sample surfaces, and diffusion source is tiled uniformly in sample surfaces by rotation, is added dropwise
Afterwards, the diffusion source of each position spreads apart to come in sample surfaces, uniformly coat on sample.In one embodiment, sample board
On be also equipped with rotating mechanism 10, the rotating mechanism 10 of board rotates drive rotary sample, the direction of rotary sample and spray simultaneously
The direction of mouth array rotation can accelerate the speed that coating is added dropwise in diffusion source on the contrary, the two rotates simultaneously, improve working efficiency.
Diffusion source device in above-described embodiment is included the nozzle array 40 of multiple nozzles 400 by setting, works as spray
When mouth array 40 rotate and coated to sample, nozzle array 40 can cover entire sample by rotation, will spread
Source is dropped evenly in sample surfaces, and diffusion source is made uniformly to spread apart in sample surfaces, can improve the coating effect of sample surfaces
Fruit, while spreading source and carrying out rotation dropwise addition by multiple nozzles 400 and the total metering in diffusion source is accurately controlled by solution feed pump 50,
The utilization rate in diffusion source can be improved, the dosage of diffusion source material is reduced and then reduces production cost.
Each technical characteristic of embodiment described above can be combined arbitrarily, to keep description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (8)
1. a kind of diffusion source device is used for coated sample, which is characterized in that including rotating mechanism, fixed frame, holder and spray
Mouth array, the rotating mechanism are connect with the fixed frame, and the holder is connect with the rotating mechanism, the nozzle array with
The holder connection, the nozzle array includes multiple nozzles, and multiple nozzles may be contained on the holder, further includes supplying
One end of liquid pump and multiple liquid feeding pipelines, each liquid feeding pipeline is connect with the solution feed pump, each liquid feeding pipeline it is another
One end is connected with the corresponding nozzle respectively, and the nozzle of the part in multiple nozzles forms first jet group, another
The part nozzle forms second nozzle group, and the solution feed pump includes the first solution feed pump and the second solution feed pump, with first spray
The liquid feeding pipeline of nozzle connection in mouth group is connected to first solution feed pump, with the institute in the second nozzle group
The liquid feeding pipeline for stating nozzle connection is connected to second solution feed pump, and the diffusion source device carries out the sample
When coating, the rotating mechanism drives the holder rotation, and the nozzle of setting on the bracket is made to rotate to the sample
Product are diffused source coating.
2. diffusion source device according to claim 1, which is characterized in that multiple described in the first jet group
Nozzle linearly arranges, and multiple nozzles in the second nozzle group linearly arrange, the first jet group with it is described
Second nozzle group is mutually parallel, the position of the nozzle in the first jet group and the nozzle in the second nozzle group
It sets staggeredly.
3. diffusion source device according to claim 2, which is characterized in that nozzle described in the first jet group
Quantity is equal with the quantity of nozzle described in the second nozzle group.
4. diffusion source device according to claim 1, which is characterized in that be provided with adjusting on the liquid feeding pipeline
Valve, the regulating valve are used to control the drop velocity of the corresponding nozzle.
5. diffusion source device according to claim 1, which is characterized in that the nozzle includes blast tube and nozzle drop
Head, one end of the blast tube are connect with the holder, and the other end of the blast tube is detachably connected with the nozzle water dropper.
6. diffusion source device according to claim 1, which is characterized in that the rotating mechanism includes rotary shaft, axis
Hold, driving mechanism and driving member, the bearing are connect with the fixed frame, the rotary shaft pass through the bearing and with the axis
Bearing sleeve connects, and one end of the rotary shaft is connect with the holder, the other end of the rotary shaft by the driving member with it is described
Driving mechanism connects.
7. diffusion source device according to claim 1, which is characterized in that the fixed frame includes sliding seat, fixation
Seat, crane and servo motor, the sliding base sleeve are connected to the outside of the fixed seat, one end of the crane and the cunning
Dynamic seat connection, the other end of the crane are connect with the rotating mechanism, and the servo motor is connect with the sliding seat.
8. diffusion source device according to claim 1, which is characterized in that the holder and the rotating mechanism are removable
Unload connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610681849.9A CN106065495B (en) | 2016-08-17 | 2016-08-17 | Diffusion source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610681849.9A CN106065495B (en) | 2016-08-17 | 2016-08-17 | Diffusion source device |
Publications (2)
| Publication Number | Publication Date |
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| CN106065495A CN106065495A (en) | 2016-11-02 |
| CN106065495B true CN106065495B (en) | 2018-10-23 |
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| CN201610681849.9A Expired - Fee Related CN106065495B (en) | 2016-08-17 | 2016-08-17 | Diffusion source device |
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Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7387455B2 (en) * | 2002-06-07 | 2008-06-17 | Tokyo Electron Limited | Substrate processing device, substrate processing method, and developing device |
| TWI242663B (en) * | 2002-07-09 | 2005-11-01 | Seiko Epson Corp | Jetting method of liquid, jetting apparatus of liquid, production method of substrate for electro-optical apparatus and production method of electro-optical apparatus |
| JP3685158B2 (en) * | 2002-07-09 | 2005-08-17 | セイコーエプソン株式会社 | Liquid material discharge method and liquid material discharge device |
| US7431040B2 (en) * | 2003-09-30 | 2008-10-07 | Tokyo Electron Limited | Method and apparatus for dispensing a rinse solution on a substrate |
| JP4760516B2 (en) * | 2005-12-15 | 2011-08-31 | 東京エレクトロン株式会社 | Coating apparatus and coating method |
| JP5312879B2 (en) * | 2008-09-02 | 2013-10-09 | 芝浦メカトロニクス株式会社 | Substrate processing apparatus and substrate processing method |
| WO2010079645A1 (en) * | 2009-01-06 | 2010-07-15 | シャープ株式会社 | Jet device and droplet arranging method |
| US20120207934A1 (en) * | 2009-10-19 | 2012-08-16 | University Of Western Cape | Spray Coating Device |
| JP5384437B2 (en) * | 2010-06-18 | 2014-01-08 | 東京エレクトロン株式会社 | Application method |
| JP6203098B2 (en) * | 2013-03-29 | 2017-09-27 | 芝浦メカトロニクス株式会社 | Substrate processing apparatus and substrate processing method |
| CN204685340U (en) * | 2015-05-19 | 2015-10-07 | 深圳市恒湖科技有限公司 | Rotatable film spray valve |
| CN205954152U (en) * | 2016-08-17 | 2017-02-15 | 上海大族新能源科技有限公司 | Diffuse source coating device |
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2016
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