CN106058640A - Stable and directional output microcavity laser - Google Patents
Stable and directional output microcavity laser Download PDFInfo
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- CN106058640A CN106058640A CN201610647891.9A CN201610647891A CN106058640A CN 106058640 A CN106058640 A CN 106058640A CN 201610647891 A CN201610647891 A CN 201610647891A CN 106058640 A CN106058640 A CN 106058640A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/1042—Optical microcavities, e.g. cavity dimensions comparable to the wavelength
Abstract
A stable and directional output microcavity laser comprises a substrate, a circular resonant cavity and an output waveguide, wherein the circular resonant cavity is made on the substrate and a circumference of the circular resonant cavity possesses a notch or a protruded port; and the output waveguide is in a strip shape, is made on the substrate and is located on one side of the circular resonant cavity or below the circular resonant cavity. The laser can maintain a high quality factor and stable and directional output characteristics are realized.
Description
Technical field
The present invention relates to semiconductor optoelectronic integration field, particularly relate to a kind of stable, orientation output micro-cavity laser.
Background technology
The performance for solving processor that proposes of integreted phontonics and optoelectronic intagration continues to provide along " Moore's Law " development
Practicable scheme, and receive the very big concern of research worker.Silica-based light based on SOI platform the most in the last few years
Sub-integrated technology, owing to it is expected to realize high density of integration, high transfer rate, low cost with the compatible advantage of CMOS technology
Silicon optical integrated chip.Wherein, micro-cavity laser is owing to having Low threshold, small size and to be easy to integrated advantage be as sheet glazing
One of the ideal chose in source.Pattern within this microcavity is Whispering-gallery-mode, is at high index of refraction microcavity by pattern light
Occur total reflection to realize the restriction to pattern light field on interface, thus realize the highest quality factor.Should as on-chip optical interconnection
Miniature, be usually use waveguide coupling mode realize light output, be broadly divided into waveguide lateral with circular resonant cavity
Coupling output and waveguide and circular resonant cavity vertical coupled output two ways.
But, owing to complete disk or circular ring type micro-cavity laser inside exist (CW) and counterclockwise (CCW) two clockwise
Plant row wave mode.And both row wave modes are complete degeneracys, its mode quality factor is identical with mode field distribution.
Therefore, under external process makes precision or test condition changes, vying each other between both patterns can cause microcavity to swash
The phenomenon of light device output concussion.And for waveguide and the side-coupled output of circular resonant cavity or waveguide and circular resonant
For the vertical coupled output in chamber, clockwise and inverse owing to existing inside output waveguide existence two outfans, and microcavity simultaneously
The row wave mode of two kinds of complete degeneracys of hour hands, result in and power all can be had from output waveguide two ends to export, and output is big
Little essentially identical.So for the complete disk or circular ring type micro-cavity laser of waveguide coupling output, at waveguide output end
Two-way, unstable power can be occurred to export, which increase the power consumption of device and limit its application in the middle of reality.Closely
Over a little years, research worker proposes a kind of helix (spiral) type micro-cavity structure can realize orienting output characteristics, but phase
Ratio is in complete disk or annular microcavity, and spiral yarn shaped resonator cavity has been badly deformed, and therefore quality factor is relatively low, is unfavorable for reality
The orientation output laser of existing Low threshold.
Summary of the invention
In view of this, it is an object of the invention to propose one stablize, orient output micro-cavity laser, this micro-cavity laser
It is to achieve stable, the orientation output from output waveguide based on disk or the annular resonator cavity with recess or tang, due to
Resonator cavity maintains complete disk or toroidal, simply introduces a recess or tang structure on circular resonant cavity circumference, because of
This can keep the highest quality factor, and achieves stable, orientation output characteristics.
The advantage a kind of stable, orientation output micro-cavity laser that the present invention proposes is by disk or annulus resonance
Recess or tang is produced, so that occur between the internal clockwise mode of circular resonant cavity and counter-clockwise pattern on the circumference of chamber
Coupling, thus eliminate mode competition therebetween.And recess or the reflection end face of tang on circular resonant cavity can be right
The light field component of the CW direction of propagation has reflection, thus changes its direction of propagation, makes the light field component of the CW direction of propagation become
For the light field component of the CCW direction of propagation, therefore by with the circular resonant cavity horizontal direction of recess or tang or Vertical Square
Connect up output waveguide and can realize stable, the micro-cavity laser of orientation output.
The one that the present invention proposes is stable, orientation output micro-cavity laser, including:
One substrate；
One circular resonant cavity, it is produced on above substrate, the circumference of this circular resonant cavity has a recess or has
One tang；
One output waveguide, this output waveguide is bar shaped, and it is produced on above substrate, be positioned at circular resonant cavity side or
Below.
According to structural design scheme set forth above, it can be seen that stable, the orientation output micro-cavity laser proposed
Mainly there is a following characteristics:
Circular resonant cavity includes a recess or a tang, comprises two directions of propagation of CW Yu CCW inside circular resonant cavity
Light field component, by the reflection end at recess or tang in the face of the reflection of the light field component of the CW direction of propagation, can make
Obtain and couple between internal CW and the CCW pattern of circular resonant cavity, thus eliminate the output that mode competition therebetween causes
The problem that power is unstable；Reflection end face on recess or tang can have reflection to the light field component of the CW direction of propagation,
The light field component making the CW direction of propagation becomes the light field component of the CCW direction of propagation, and will not change the propagation of CW light field component
Direction, so that the light field within circular resonant cavity is based on the light field component of the CCW direction of propagation；By by circular resonant cavity
Be connected with output waveguide can obtain from output waveguide CCW end output more than the output of CW end, thus real
Show stable, the orientation output from output waveguide CCW output port；Additionally, due to recess or the circular resonant cavity of tang
Structure remains the shape function of complete circle resonator cavity, therefore can realize the highest quality factor.
Accompanying drawing explanation
In order to the technology contents of the present invention is more clearly described, below in conjunction with the drawings and specific embodiments to the present invention
It is described in detail, wherein:
Fig. 1 a is first embodiment of the invention band jagged circular resonant cavity schematic diagram；Wherein, in circular resonant cavity two
Individual arrow represents the light field component of two directions of propagation of CW and CCW respectively；
Fig. 1 b is the second embodiment of the invention circular resonant cavity schematic diagram with tang；
Fig. 2 a and Fig. 2 b is stable, orientation output micro-cavity laser stereochemical structure signal with lateral coupling output waveguide
Figure；Wherein, output waveguide is with two output ports of CW and CCW, and correspondence exports the light field of two directions of propagation of CW and CCW respectively
Component；
Fig. 3 a and Fig. 3 b is stable, orientation output micro-cavity laser solid knot with vertical evanescent wave coupling output waveguide
Structure schematic diagram；
Fig. 4 a is to utilize Finite Element Method (finite-element-method, FEM) calculated based on recess with convex
The normalized intensity of the circular resonant cavity interior lights field mode of mouth is along with the variation relation of angular momentum index.Wherein circular resonant cavity
Radius R=20 μm, the width of the reflection end face of recess or tang is d=500nm, and the inner refractive index of circular resonant cavity is
3.2, the external refractive index is 1；
Fig. 4 b is stable, the orientation output micro-cavity laser CW and CCW two output from output waveguide that the present invention proposes
The output that port obtains is with the variation relation curve of injection current.Radius R with recess or the circular resonant cavity of tang
The width d=500nm of the reflection end face on=20 μm, recess or tang, output waveguide is the side coupled by vertical evanescent wave
Formula is connected with circular resonant cavity, and output waveguide is multimode waveguide, and width is 2 μm.
Detailed description of the invention
Referring to shown in Fig. 1 a, Fig. 1 b, Fig. 2 a, Fig. 2 b, Fig. 3 a and Fig. 3 b, the present invention provides a kind of stable, orientation output
Micro-cavity laser, including:
One substrate 4, the mixing material that material is silicon, silicon oxide, InP, GaAs or different materials of described substrate 4；
One circular resonant cavity 1, it is produced on above substrate 4, described circular resonant cavity 1 be shaped as disc-shape or
Toroidal.Circular resonant cavity 1 is cylindrical structural on the direction being perpendicular to substrate 4, and the circumference of this circular resonant cavity 1 has
Having a recess 2 or have a projection 2 ', with reference to Fig. 1 a and Fig. 1 b, they show respectively ties with recess 2 structure and tang 2 '
The structural representation of the circular resonant cavity 1 of structure.Wherein circular resonant cavity 1 includes but not limited to following six layers: contact electrode layer, on
Limiting layer, limit hetero junction layer, MQW or body material active area respectively, limit hetero junction layer, lower limit layer respectively；Wherein
Active area can be SQW, can also be quantum dot or other semi-conducting material, for the generation of light.At circular resonant cavity 1
The internal light field produced comprises (CW) and the light field component of (CCW) two directions of propagation counterclockwise clockwise.Circular resonant cavity 1
There is a reflection end face, it is possible to change the direction of propagation of CW light field component on recess 2 or projection 2 ', can be by the CW direction of propagation
Light field component become the light field component of the CCW direction of propagation.Therefore CW and CCW that be internally formed at circular resonant cavity 1 propagates
The CGCM of direction light field component composition, and in CGCM, light field component with the CCW direction of propagation accounts for mastery reaction,
Thus eliminate the competition between CW and CCW row wave mode, it is achieved that stable, the orientation output of CCW direction of propagation light field component.
One output waveguide 3, this output waveguide 3 is bar shaped, and it is produced on above substrate 4, is positioned at the one of circular resonant cavity 1
Side or following.Spacing between output waveguide 3 and circular resonant cavity 1 is contact condition or separated by a distance, for by circle
The light produced in resonator cavity 1 carries out coupling output.Output waveguide 3 comprises two output ports of CW and CCW, corresponding to circular resonant
The light field component of two directions of propagation of CW and CCW within chamber 1, is respectively used to two direction of propagation light field components of CW and CCW
Carry out coupling output.The Output optical power of 3 two output ports of output waveguide is different, due to inside circular resonant cavity 1
Light field be to be auxiliary CGCM based on CCW direction of propagation light field component, CW direction of propagation light field component, therefore in output
In waveguide 3, the luminous power of CCW end output is more than the Output optical power of CW end, it is achieved thereby that steady from the CCW end of silicon waveguide 3
Fixed, the light output of orientation.Described output waveguide 3 is single mode waveguide, or multimode waveguide.
In concrete processing technology, it is necessary first to preparation, for the semiconductor epitaxial wafer of laser fabrication, can use gold
Belonging to the Material growth technology such as organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), its material can be InP-base quantum
The materials such as trap, quantum dot or quanta cascade, it is also possible to be the semi-conducting material of GaAs base or other substrate, as long as enabling to circle
Shape resonator cavity 1 realizes lasing.With reference to Fig. 2 a and Fig. 2 b, it illustrates two specific embodiments of the present invention, is growing
After semiconductor epitaxial wafer, utilize photoetching technique and sense coupling (ICP) technology, semiconductor epitaxial wafer is carried out
It is etched to substrate 4 layers, produces with recess 2 or the circular resonant cavity 1 of tang 2 ' structure, side-coupled output waveguide 3
Making completes during etching circular resonant cavity 1 simultaneously.Output waveguide 3 can be single mode waveguide can also be multimode
Waveguiding structure, and output waveguide 3 is to enter in the way of side-coupled on the circumference of circular resonant cavity 1 with circular resonant cavity 1
The output of row optical coupling.Coupling space between output waveguide 3 and circular resonant cavity 1 is by concrete photoetching and etched program control
System, can be direct contact condition, it is also possible in a distance, and in order to ensure high coupling efficiency, coupling space is generally less than
500nm.Its operation principle and advantage are that light produces in circular resonant cavity 1, and light exists CW and CCW two in circular resonant cavity
Under the effect of the reflection end face of the light field mode of the individual direction of propagation, recess 2 on circular resonant cavity 1 circumference or tang 2 ', make
The direction of propagation of the light field mode obtaining CW there occurs change, becomes the light field mode of the CCW direction of propagation, therefore in circular resonant
Light field within chamber 1 be have the light field component of the CCW direction of propagation be main, the light field component of the CW direction of propagation be auxiliary coupling light field
Pattern, this CGCM eliminates the competition between CW and CCW row wave mode due to the effect of recess 2 or tang 2 ', it is ensured that
The power output of laser stabilization.By connecting an output waveguide 3 on the circumference of circular resonant cavity 1, utilize light field lateral
The mode of coupling, enters in output waveguide 3 to export by the optical coupling produced in circular resonant cavity 1.Due in circular resonant cavity 1
Light field account for mastery reaction with the light field component of the CCW direction of propagation, it is achieved that from the output of the CCW port of output waveguide 3
Power is more than the purpose of the output of CW port, it is thus achieved that from the stable orientation output characteristics of the CCW port of output waveguide 3.
With reference to Fig. 3 a and Fig. 3 b, it illustrates two other embodiment of the present invention.With two represented in Fig. 2 a and Fig. 2 b
Individual embodiment difference is the difference of the coupled modes of output waveguide 3.In two embodiments that Fig. 3 a and Fig. 3 b represents,
Output waveguide 3 is to realize being of coupled connections between circular resonant cavity 1 by the way of vertical evanescent wave couples.In view of circle
The light field integrated distribution of shape resonator cavity 1 is at circumference, and therefore output waveguide 3 is positioned at the lower section of circular resonant cavity 1 circumference.At tool
The technique of body can utilize bonding techniques to realize on making.First have to make the material used in substrate 4 and circular resonant cavity 1,
Its substrate 4 can use silicon (SOI) material on insulator or the material of other structures, and etches needs on the substrate 4
Output waveguide 3.Subsequently, the bonding techniques substrate 4 by semiconductor gain chip with output waveguide 3 structure is utilized to be bonded in
Together.Finally, the semiconducter process such as photoetching and ICP technology is utilized to produce on bonding pad required with recess 2
Or the circular resonant cavity 1 of tang 2 ' structure, meanwhile achieve the vertical right of circular resonant cavity 1 and the output waveguide 3 of lower section
Quasi-coupling.Wherein, output waveguide 3 there is also two output ports, and respectively CW and CCW output port corresponds respectively to circular humorous
The light field component of two directions of propagation of CW and CCW shaken in chamber 1.Realize from the CCW output port of output waveguide 3 is stable, fixed
To luminous power output.
Fig. 4 a be utilize Finite Element Method (finite-element-method, FEM) calculated with recess 2 or
The normalized intensity of the interior lights field mode of the circular resonant cavity 1 of tang 2 ' structure is bent along with the variation relation of angular momentum index
Line.Wherein, CW represents the direction of propagation clockwise (clockwise) light field component, and CCW represents the direction of propagation counterclockwise
(counter-clockwise) light field component.With the radius R=20 μm of recess 2 or the circular resonant cavity 1 of tang 2 ' structure,
The width d=500nm of the reflection end face of recess 2 or tang 2 ', the refractive index within circular resonant cavity 1 is 3.2, circular resonant cavity
Refractive index outside 1 is 1.Result of calculation shows, near a length of 1555nm of mode wave, owing to recess 2 or tang 2 ' are to circle
The impact of the mode field distribution within resonator cavity 1 so that couple between two patterns of CW with CCW in circular resonant cavity 1,
Eliminate the phenomenon of output concussion, it is achieved that stable output.And CW can be passed by the reflection end face on recess 2 or tang 2 '
The light field component broadcasting direction plays reflection, changes the direction of propagation of CW light field component, and the light field becoming the CCW direction of propagation is divided
Amount, therefore can be seen that from Fig. 4 a that the intensity of light field component of the CCW direction of propagation in CGCM is higher than the CW direction of propagation
Light field component intensity, it is achieved thereby that export from the orientation of the CCW end of output waveguide 3.
In order to the invention effect of the present invention is described, Fig. 4 b be stable, the orientation output micro-cavity laser that proposes of the present invention from
The output that two output ports of CW and CCW of output waveguide 3 obtain is with the variation relation curve of injection current.Wherein, band
There is the radius R=20 μm of the circular resonant cavity 1 of recess 2 or tang 2 ', the width d=of the reflection end face on recess 2 or tang 2 '
500nm, output waveguide 3 is to be connected with circular resonant cavity 1 by the way of vertical evanescent wave couples, and output waveguide 3 is many
Mould waveguide, width is 2 μm.It is found that by the structure using the circular resonant cavity 1 with recess 2 or tang 2 ', Ke Yishi
Now from the CCW output port of output waveguide 3 stable, orientation output.Wherein, defeated from the CCW output port of output waveguide 3
Go out power and be significantly larger than the output of CW output port.
In the present invention, above-described detailed description of the invention provides four kinds humorous with the circle with recess or tang
Stable, the structure of orientation output micro-cavity laser in chamber of shaking and preparation scheme, but the present invention is not only limited to this, can be according to reality
Structure and preparation method that the present invention is illustrated by border demand and structure design carry out the change of relevant parameter, as long as ensure that circle
Shape resonator cavity has recess or tang structure.Such as:
In the present embodiment, the photoetching of application, ICP etch preparation technology, actual can also be with other semiconducter process
Replace, as long as breach circular resonant cavity configuration can be etched.
The present embodiment being accomplished that, the CCW end from output waveguide obtains stable, orientation output.In practical devices structure
In, it is also possible to realizing stable, orientation output from the CW end of output waveguide, this is the side with the recess in circular resonant cavity or tang
To relevant, the direction of recess in circular resonant cavity or court of tang institute is different, then the reflection end on recess or tang is in the face of mould
The influence of formula is the most different, as long as the output of the one end that only can make from output waveguide is more than the output work of the other end
Rate.
The present embodiment is accomplished that the laser structure of simplification, can be according to pump mode in practical devices structure
Structure in embodiment is optimized by difference, can increase injecting electrode structure or other laser structure, as long as can keep
Laser resonant cavity is the breach circular resonant cavity with defective otch.
Stable, the orientation output microcavity that give the side-coupled and vertical coupled two kinds of structures of output waveguide in this enforcement swash
Light device structure and preparation method thereof, in practical devices design process, can be in conjunction with the actual requirement coupling side to output waveguide
Formula is modified, if can guarantee that output waveguide carry out coupling with the circular resonant cavity with recess or tang realize stable, fixed
To output characteristics.
Particular embodiments described above, has been carried out the purpose of the present invention, technical scheme and beneficial effect the most in detail
Describe in detail bright it should be understood that the foregoing is only the specific embodiment of the present invention, be not limited to the present invention, all
Within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. done, should be included in the protection of the present invention
Within the scope of.
Claims (9)
1. stable, an orientation output micro-cavity laser, including:
One substrate；
One circular resonant cavity, it is produced on above substrate, the circumference of this circular resonant cavity has a recess or to have one convex
Mouthful；
One output waveguide, this output waveguide is bar shaped, and it is produced on above substrate, be positioned at circular resonant cavity side or under
Face.
Stable, orientation output micro-cavity laser the most according to claim 1, the material of wherein said substrate is silicon, oxygen
SiClx, InP or GaAs, or the mixing material of different materials.
Stable, orientation output micro-cavity laser the most according to claim 1, being shaped as of wherein said circular resonant cavity
Disc-shape or toroidal.
Stable, orientation output micro-cavity laser the most according to claim 3, the wherein said light within circular resonant cavity
Field comprises the light field component of two directions of propagation clockwise and anticlockwise.
Stable, orientation output micro-cavity laser the most according to claim 1, the recess of wherein said circular resonant cavity or
Tang has a reflection end face, it is possible to change the direction of propagation of light field component clockwise, can be by the direction of propagation clockwise
Light field component becomes the direction of propagation counterclockwise component.
Stable, orientation output micro-cavity laser the most according to claim 1, wherein said output waveguide and circular resonant
Spacing between chamber is contact condition or separated by a distance.
Stable, orientation output micro-cavity laser the most according to claim 6, wherein said output waveguide comprises clockwise
With two output ports counterclockwise, respectively the light field of two directions of propagation clockwise and anticlockwise within circular resonant cavity is divided
Amount carries out coupling output.
Stable, orientation output micro-cavity laser the most according to claim 7, two outfans of wherein said output waveguide
The Output optical power of mouth is different, and wherein the luminous power of end output counterclockwise is more than the Output optical power of end clockwise.
Stable, orientation output micro-cavity laser the most according to claim 8, wherein said output waveguide is single mode ripple
Lead, or multimode waveguide.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108415125A (en) * | 2018-04-19 | 2018-08-17 | 哈尔滨工业大学深圳研究生院 | A kind of microcavity coupled system and preparation method thereof of high efficiency, low cost |
| CN110048303A (en) * | 2019-03-18 | 2019-07-23 | 深圳市速腾聚创科技有限公司 | A kind of laser and Optical Maser System |
| CN110265870A (en) * | 2018-10-15 | 2019-09-20 | 中国科学院半导体研究所 | Laser light source for laser display |
| CN114153032A (en) * | 2021-12-22 | 2022-03-08 | 哈尔滨工业大学（深圳） | Three-dimensional asymmetric microcavity device for optical field regulation and control and integrated device thereof |
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| CN114153032A (en) * | 2021-12-22 | 2022-03-08 | 哈尔滨工业大学（深圳） | Three-dimensional asymmetric microcavity device for optical field regulation and control and integrated device thereof |
| CN114153032B (en) * | 2021-12-22 | 2023-08-15 | 哈尔滨工业大学（深圳） | Three-dimensional asymmetric microcavity device for light field regulation and integration device thereof |
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