CN106058394B - A kind of three wave band narrow band filter of Terahertz based on metamaterial - Google Patents
A kind of three wave band narrow band filter of Terahertz based on metamaterial Download PDFInfo
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- CN106058394B CN106058394B CN201610659935.XA CN201610659935A CN106058394B CN 106058394 B CN106058394 B CN 106058394B CN 201610659935 A CN201610659935 A CN 201610659935A CN 106058394 B CN106058394 B CN 106058394B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
Abstract
The invention discloses a kind of three wave band narrow band filter of Terahertz based on metamaterial, the filter cell formed including nested three metal side's ring resonant elements and dielectric layer and cross metal resonant element.The present invention utilizes the filter cell, realizes three wave band narrow band filters in terahertz wave band.The structural unit of the filter has rotational symmetry, insensitive to THz wave incident polarization and larger angle incidence, still maintains good three wave bands filtering characteristic.Three wave band filtering characteristics of this composite construction from three square ring resonant elements respectively corresponding to filtering characteristic linear superposition, and regulate and control corresponding filtering frequency range by the geometric dimension of change side's ring resonant element.Based on this filtering of more multiband can be realized in terahertz wave band.Filter design of the invention is simple, size is smaller, easy to process, has very high practical value in the Terahertz Technologies such as Terahertz communication, imaging, spectrum analysis.
Description
Technical field
The invention belongs to THz wave technology field more particularly to a kind of three wave band narrowbands of Terahertz based on metamaterial
Bandpass filter.
Background technique
THz wave, also known as submillimeter wave are the electromagnetic waves that wavelength is between millimeter wave and infrared waves.In recent years
Come, with the generation of THz wave and the continuous development of Detection Techniques, THz wave is in imaging, communication, biological detection and national defence
The application in the fields such as safety check is concerned.THz wave is set to obtain extensive and universal application, terahertz wave band device is set
Meter is necessary premise with realization.
In communication system, bandpass filter is a kind of important device, it can be by the signal in particular frequency range
The transmission past, and the signal other than this frequency range is blocked, achieve the purpose that selection transmission.Ideal bandpass filter has
Following feature：It is as smooth as possible in passband, transmitance is as high as possible, Out-of-band rejection is as well as possible, polarization is insensitive and big
Angle incidence stabilization etc..Due to sample making and the simplification of test, the more deep of researcher's research is microwave section band
Bandpass filter.But can be very limited with the material of THz wave useful effect in nature, so in existing Terahertz skill
The design of the bandpass filter of terahertz wave band in art, the especially bandpass filter of multiband band, also lack very much.
Recently, a fast-developing field provides new thinking for the realization of THz devices, and here it is super clever materials
Material.Metamaterial be it is a kind of can with engineer, meet the electromagnetic material of specific effective dielectric constant and magnetic conductivity requirement.It is super clever
Each structural unit of material is equivalent to a resonator, optimizes the performance of single structure in the design, then by structure list
Member is periodically arranged in the filter for constituting carry out space filtering to electromagnetic wave together in a manner.For example, one
Typical mentality of designing is based on the sandwich structure of metal-dielectric-metal (MDM), using square groove hole resonance structure to incidence
Electromagnetic wave generates coupling response, realizes single band wideband filtered.However, multiband bandpass filter has flexible function, width
The advantages that angle incidence is stable and passband chooses, there is bigger application potential in Terahertz communication system, so research
It has very important significance with manufacture Terahertz multiband bandpass filter.
Summary of the invention
Goal of the invention：In order to overcome the shortcomings of the single wave band bandpass filter of current Terahertz, the present invention provides a kind of base
In the design of the three wave band narrow band filter of Terahertz of metamaterial, this filter has multiband filtering, polarization not
The advantages that sensitive, broad-angle-incident stabilization and passband choose, and design is simple, size is smaller, easy to process, in Terahertz
There is very high practical value in technology.
Technical solution：To achieve the above object, the technical solution adopted by the present invention is：
A kind of three wave band narrow band filter of Terahertz based on metamaterial, including it is more than one in space periodic
The bandpass filter module of pros' arrangement, the bandpass filter module includes first structure metal layer, dielectric layer and second
Structured metal layer, the first structure metal layer, dielectric layer and the second structured metal layer set gradually to form metal-Jie
Matter-metal sandwich structure；The first structure metal layer is that three nested metal side's ring resonant elements press square period row
The metal surface constituted is arranged, these three nested metal side ring resonant elements are respectively first party ring resonant element (1), second party ring
Resonant element (2) and third party's ring resonant element (3)；Second structured metal layer is single cross metal resonant element
(6) metal grate constituted by square periodic arrangement；Wherein, three nested metal side's ring resonant elements respectively with dielectric layer
(5) and cross metal resonant element (6) forms a kind of filter cell.
Preferably：The first structure metal layer, the second structured metal layer are plated in dielectric layer two sides respectively.
Preferably：The number of the bandpass filter module is 25 × 25, and 25 × 25 filter cells are in space
The arrangement of period pros.
Preferably：The material that the first structure metal layer and the second structured metal layer use is copper.
Preferably：The material that the dielectric layer (5) uses for polyimides, and the relative dielectric constant ε of dielectric layer (5)=
2.9, loss angle tangent tan (δ)=0.02.
Preferably：The thickness of first, second structured metal layer is 180-220nm, the dielectric layer (5) with a thickness of
5μm。
Preferably：Three nested its outer side lengths of metal side's ring resonant element ecto-entad are respectively 57.2~58.2 μm,
42.8~43.2 μm and 30.8~31.2 μm, wide is 2.8~3.2 μm, and the cross metal resonant element a length of 59.8~
60.2 μm, width is 0.8~1.2 μm.
Preferably：Three nested its outer side lengths of metal side's ring resonant element ecto-entad are respectively 58 μm, 43 μm and 31 μm,
Wide is 3 μm, a length of 60 μm of the cross metal resonant element, and width is 1 μm.
Beneficial effect：Three wave band metamaterial narrow band filter of a kind of Terahertz provided by the invention, compared to existing
Technology has the advantages that：
1, three wave band metamaterial narrow band filter of Terahertz of the present invention have concurrently multiband filtering, polarize it is insensitive,
The characteristics such as large angle incidence is stable and passband chooses, are expected to play in Terahertz mechanics of communication and spectrum analysis etc. important
Effect.
2, three wave band metamaterial narrow band filter of Terahertz of the present invention, can be simultaneously compared with traditional bandpass filter
Work is in three frequency ranges, and performance is stablized, and passband selectivity is high, insertion loss is lower.
3, three wave band metamaterial narrow band filter structure of Terahertz design of the present invention is simple, in dielectric-slab two sides point
It does not periodically etch Fang Huan and cross metal resonant element can be easy to accomplish.Model optimization process is easy, adjusts each
The length and width of Fang Huan can reach required filtering performance.
Detailed description of the invention
Fig. 1 is filter construction unit front view and parameter size of the invention；
Fig. 2 is filter construction unit three-dimensional schematic diagram of the invention；
Fig. 3 is the multipath reflection-interventional procedures physical model schematic diagram of filter of the invention in electromagnetic wave oblique incidence；
Fig. 4 is filter P of the invention2/ Air Interface and P1The amplitude distribution figure for transmiting and reflecting at/Air Interface；
Fig. 5 is filter P of the invention2/ Air Interface and P1The phase distribution figure for transmiting and reflecting at/Air Interface；
Emulation (solid line) and theoretical calculation (dotted line) transmission spectrum when Fig. 6 is filter electromagnetic wave vertical incidence of the invention
S21- f, wherein S21It is transmission coefficient, f is frequency, and unit is THz；
Fig. 7 is electromagnetic wave multi-angle incidence (0 °~30 °) transmission spectrum S under filter electromagnetic wave TE of the invention polarizes21-f；
Fig. 8 is electromagnetic wave multi-angle incidence (0 °~30 °) transmission spectrum S under filter electromagnetic wave TM of the invention polarizes21-f。
Specific embodiment
In the following with reference to the drawings and specific embodiments, the present invention is furture elucidated, it should be understood that these examples are merely to illustrate this
It invents rather than limits the scope of the invention, after the present invention has been read, those skilled in the art are to of the invention various
The modification of equivalent form falls within the application range as defined in the appended claims.
Three wave band metamaterial narrow band filter of a kind of Terahertz provided by the invention, including it is more than one in sky
Between period pros arrange bandpass filter module, the bandpass filter module includes first structure metal layer (4), medium
Layer (5) and the second structured metal layer, using typical metal-dielectric-metal (MDM) sandwich structure.The dielectric layer (5)
Two sides is coated with metal layer, respectively first structure metal layer (4) and the second structured metal layer, the first structure metal
Layer (4) is that three nested metal side's ring resonant elements press the metal surface that square periodic arrangement is constituted, these three nested metal sides
Ring resonant element is respectively first party ring resonant element (1), second party ring resonant element (2) and third party's ring resonant element (3).
Second structured metal layer is the metal grate that single cross metal resonant element 6 is constituted by square periodic arrangement.
Three metal side's ring resonant elements, dielectric layer (5) and a cross metal resonant element (6) for corresponding nesting forms one kind
Filter cell.25 × 25 bandpass filter modules rearrange the three wave band Meta Materials of Terahertz in space periodic pros
Narrow band filter.
The material that the first structure metal layer and the second structured metal layer use is copper.
The material that the dielectric layer (5) uses is polyimides, and relative dielectric constant ε=2.9 of dielectric layer (5), damage
It consumes angle tangent tan (δ)=0.02.
The thickness of first, second structured metal layer is 180-220nm, the dielectric layer (5) with a thickness of 5 μm.
Three nested its outer side lengths of metal side's ring resonant element ecto-entad are respectively 57.2~58.2 μm, 42.8~43.2
μm and 30.8~31.2 μm, wide is 2.8~3.2 μm, a length of 59.8~60.2 μm of the cross metal resonant element, and width is
0.8~1.2 μm, this level of filter electromagnetic wave coupling is small.Optimal size is：Three nested metal side ring resonant elements
Its outer side length of ecto-entad is respectively 58 μm, 43 μm and 31 μm, and wide is 3 μm, a length of 60 μ of cross metal resonant element
M, width are 1 μm.
Present invention application large-scale three dimensional electromagnetic simulation software CST Microwave StudioTMSpy is filtered to filter
Property emulation, obtain the structural unit geometric parameter of optimization.As shown in Figure 1, filter construction unit front view of the invention, unit
Period is p=60 μm, a length of sl in outside of metal side's ring resonant element (1)1=58 μm, width w1=3 μm, metal side's ring is humorous
The a length of sl in outside of vibration unit (2)2=43 μm, width w2=3 μm, a length of sl in outside of metal side's ring resonant element (3)3=
31 μm, width w3=3 μm, the length of cross metal resonant element (6) is sl4=60 μm, width w4=1 μm.Such as Fig. 2
Shown, of the invention filter construction unit three-dimensional schematic diagram, the thickness of shown first, second structured metal layer is tm=
180~220nm, dielectric layer with a thickness of td=5 μm.
In present example, the material that first, second structured metal layer uses for copper, what the dielectric layer used
Material is PI (polyimides, relative dielectric constant ε=2.9, loss angle tangent tan (δ)=0.02).
In order to illustrate the physical mechanism of filter, the present invention uses multipath reflection-interference theory, filters to band logical of the invention
The electromagnetic property of wave device carries out theoretical calculation, and compares with CST software simulation result.
As shown in figure 3, multipath reflection-interventional procedures the physical model of filter of the invention in electromagnetic wave oblique incidence shows
It is intended to.It include two interfaces in physical model：The super surface P of upper layer metal1With lower metal grid P2.It is assumed that a branch of incidence angle
Degree is αiElectromagnetic wave incident to filter of the invention on, in air/P1Interface, incidence wave are divided into two parts, a part
It is reflected in air, corresponding reflection coefficient isAnother part is transmitted in medium simultaneously, corresponding saturating
Penetrating coefficient isThen the electromagnetic wave incident transmitted is to P2/ Air Interface, a part are reflected to by medium
P1, corresponding reflection coefficient isAnother part passes through P2It is transmitted in air, corresponding transmission coefficient isSimilarly, the reflection and transmission of whole process are in corresponding air/P1Interface and P2At/Air Interface
The superposition of multiple reflections and transmission:
Wherein, all variables and meaning are labeled in Fig. 3,Indicate the plural form of transmission coefficient, t12Indicate empty
Gas/P1The amplitude of interface transmission coefficient, t23Indicate P2The amplitude of transmission coefficient, θ at/Air Interface12Indicate air/P1Interface
Locate the phase of transmission coefficient, θ23Indicate P2The phase of transmission coefficient, r at/Air Interface21Indicate air/P1Reflected at interfaces system
Several amplitudes, r23Indicate P2The amplitude of reflection coefficient, φ at/Air Interface21Indicate air/P1The phase of reflected at interfaces coefficient
Position, φ23Indicate P2The phase of reflection coefficient at/Air Interface, i indicate imaginary unit, and β is that incidence wave carrys out back propagation in the medium
Phase difference, as：
Wherein, k0Indicating free space wave vector, d indicates thickness of dielectric layers,Indicate dielectric layer material dielectric constant
Plural form, αsIndicate P2Reflection angle at/Air Interface.
Filter transmission coefficient T of the invention is calculated as：
Wherein,Indicate transmission coefficientComplex conjugate.
Filter theory of the invention, which is calculated, establishes Decoupled Model using CST simulation software to calculate air/P1Interface and
P2The transmission coefficient and reflection coefficient of/Air Interface.P is removed in filter construction unit1To calculate P2It is saturating at/Air Interface
The amplitude and phase distribution penetrated and reflected, removes P2To calculate P1The amplitude and phase distribution for transmiting and reflecting at/Air Interface.
As shown in Figure 4 and Figure 5, filter P of the invention2/ Air Interface and P1The width for transmiting and reflecting at/Air Interface
Degree and phase distribution.Parameter value corresponding in figure is brought into formula (4), filter transmission coefficient of the invention is calculated.
As shown in fig. 6, CST emulation (solid line) and theoretical calculation (void when filter electromagnetic wave vertical incidence of the invention
Line) transmission spectrum S21- f, wherein S21It is transmission coefficient, f is frequency, and unit is THz.Theoretical calculation and the result of CST emulation are coincide
It is fine.Since filter construction has rotational symmetry, in electromagnetic wave vertical incidence, band-pass filter of the invention
Device is in frequency f1=0.42THz, f2=1.26THz, f3For=1.86THz there are three transmission peaks, passband is narrow, belongs to narrowband band
Bandpass filter, passband selectivity is high, and insertion loss is lower.
Filter of the present invention is not only in electromagnetic wave vertical incidence with good performance, but also in large angle incidence
Still there is very stable performance.It is emulated using CST software, obtains filter of the invention and polarize at two kinds of TE, TM
Electromagnetic wave multi-angle incidence (0 °~30 °) transmission spectrum S under mode21-f.As shown in Figure 7 and Figure 8, respectively electromagnetic wave TE and the pole TM
Change lower electromagnetic wave multi-angle incidence (0 °~30 °) transmission spectrum S21-f.Although can be seen that under large angle incidence, three transmissions
Peak still maintains higher transmitance, and apparent frequency displacement does not occur in the position of transmission peaks, shows terahertz of the invention
Hereby three wave band bandpass filters have the advantages that large angle incidence stabilization and no polarization dependence.
We analyze the relationship of filter construction unit and filter transmission spectrum, disclose narrow-band bandpass filtering of the present invention
Three wave band of device filters mechanism.We have found that：The frequency f of three transmission peaks1、f2、f3It is respectively derived from first party ring resonant element
(1), the independent resonant of second party ring resonant element (2) and third party's ring resonant element (3), and resonance frequency and square ring side length
It is inversely proportional.Therefore, it can use the nested combination of multiple close rings to realize multiwave filter design, while passing through change
The geometric dimension of square ring resonant element regulates and controls corresponding filtering frequency range.The present invention is also other Terahertz multiband bandpass filterings
The design of device provides important reference.
The above is only a preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (8)
1. a kind of three wave band narrow band filter of Terahertz based on metamaterial, it is characterised in that：Including more than one
In the bandpass filter module of space periodic pros arrangement, the bandpass filter module includes first structure metal layer, is situated between
Matter layer and the second structured metal layer, the first structure metal layer, dielectric layer and the second structured metal layer are set gradually
Form metal-dielectric-metal sandwich structure；The first structure metal layer is that three nested metal side ring resonant elements are pressed
The metal surface that square periodic arrangement is constituted, these three nested metal side ring resonant elements are respectively first party ring resonant element
(1), second party ring resonant element (2) and third party's ring resonant element (3)；Second structured metal layer is single cross
The metal grate that metal resonant element (6) is constituted by square periodic arrangement；Wherein, three nested metal side's ring resonant elements
A kind of filter cell is formed with dielectric layer (5) and cross metal resonant element (6) respectively；
Multipath reflection-interventional procedures physical model of the bandpass filter in electromagnetic wave oblique incidence includes two interfaces：Upper layer
The super surface P of metal1With lower metal grid P2；It is assumed that a branch of incident angle is αiElectromagnetic wave incident to bandpass filter on,
Air/P1Interface, incidence wave are divided into two parts, and a part is reflected in air, and corresponding reflection coefficient isAnother part is transmitted in medium simultaneously, and corresponding transmission coefficient isThen it transmits
Electromagnetic wave incident is to P2/ Air Interface, a part are reflected to P by medium1, corresponding reflection coefficient is
Another part passes through P2It is transmitted in air, corresponding transmission coefficient isSimilarly, the reflection of whole process
It is in corresponding air/P with transmission1Interface and P2The superposition of multiple reflections and transmission at/Air Interface：
Wherein,Indicate the plural form of transmission coefficient, t12Indicate air/P1The amplitude of interface transmission coefficient, t23Indicate P2/
The amplitude of transmission coefficient, θ at Air Interface12Indicate air/P1The phase of interface transmission coefficient, θ23Indicate P2/ Air Interface
Locate the phase of transmission coefficient, r21Indicate air/P1The amplitude of reflected at interfaces coefficient, r23Indicate P2System is reflected at/Air Interface
Several amplitudes, φ21Indicate air/P1The phase of reflected at interfaces coefficient, φ23Indicate P2The phase of reflection coefficient at/Air Interface
Position, i indicate imaginary unit, and β is the phase difference that incidence wave carrys out back propagation in the medium, as：
Wherein, k0Indicating free space wave vector, d indicates thickness of dielectric layers,Indicate the plural number of dielectric layer material dielectric constant
Form, αsIndicate P2Reflection angle at/Air Interface；
Bandpass filter transmission coefficient t is calculated as：
Wherein,Indicate transmission coefficientComplex conjugate.
2. three wave band metamaterial narrow band filter of Terahertz according to claim 1, it is characterised in that：Described
One structured metal layer, the second structured metal layer are plated in dielectric layer tow sides respectively.
3. three wave band metamaterial narrow band filter of Terahertz according to claim 1, it is characterised in that：The band
The number of allpass filter block is 25 × 25, and 25 × 25 filter cells are arranged in space periodic pros.
4. three wave band metamaterial narrow band filter of Terahertz according to claim 1, it is characterised in that：Described
The material that one structured metal layer and the second structured metal layer use is copper.
5. three wave band metamaterial narrow band filter of Terahertz according to claim 1, it is characterised in that：It is given an account of
The material that matter layer (5) uses is polyimides, and relative dielectric constant ε=2.9 of dielectric layer (5), loss angle tangent tan (δ)
=0.02.
6. three wave band metamaterial narrow band filter of Terahertz according to claim 1, it is characterised in that：The first,
The thickness of second structured metal layer is 180-220nm.
7. three wave band metamaterial narrow band filter of Terahertz according to claim 1, it is characterised in that：Three embedding
Covering its outer side length of metal side's ring resonant element ecto-entad is respectively 57.2~58.2 μm, 42.8~43.2 μm and 30.8~31.2
μm, wide is 2.8~3.2 μm, a length of 59.8~60.2 μm of the cross metal resonant element, and width is 0.8~1.2 μm.
8. three wave band metamaterial narrow band filter of Terahertz according to claim 1, it is characterised in that：Three embedding
Covering its outer side length of metal side's ring resonant element ecto-entad is respectively 58 μm, 43 μm and 31 μm, and wide is 3 μm, the cross
A length of 60 μm of metal resonant element, width is 1 μm.
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| WO2018107142A1 (en) * | 2016-12-09 | 2018-06-14 | Brown University | Polarizing beam splitter for thz radiation |
| CN107957604A (en) * | 2017-12-01 | 2018-04-24 | 天津大学 | Terahertz chirality modulator based on super structure pore structure |
| CN108089251B (en) * | 2018-01-24 | 2023-05-12 | 厦门大学嘉庚学院 | Terahertz wave band quadruple photonic crystal band-stop filter |
| CN108879039A (en) * | 2018-06-28 | 2018-11-23 | 郑州大学 | A kind of bandstop filter based on Meta Materials |
| CN109031493A (en) * | 2018-07-26 | 2018-12-18 | 华中科技大学 | Surpass the narrow band filter and preparation method thereof of surface texture based on medium |
| CN108957876B (en) * | 2018-09-19 | 2021-05-18 | 苏州晶萃光学科技有限公司 | Adjustable terahertz wave front modulator and preparation method thereof |
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