CN106058394A - Terahertz three-wave-band narrow-band band-pass filter based on metamaterial - Google Patents

Terahertz three-wave-band narrow-band band-pass filter based on metamaterial Download PDF

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CN106058394A
CN106058394A CN201610659935.XA CN201610659935A CN106058394A CN 106058394 A CN106058394 A CN 106058394A CN 201610659935 A CN201610659935 A CN 201610659935A CN 106058394 A CN106058394 A CN 106058394A
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band
metal
terahertz
square ring
filter
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CN106058394B (en
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李海鹏
付文悦
沈晓鹏
韩奎
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China University of Mining and Technology CUMT
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China University of Mining and Technology CUMT
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01PWAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00Auxiliary devices
    • H01P1/20Frequency-selective devices, e.g. filters

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Abstract

The invention discloses a Terahertz three-wave-band narrow-band band-pass filter based on a metamaterial. The filter comprises three nested metal square ring resonance units and a filter unit formed by a dielectric layer and a cross metal resonance unit. In the invention, through using the filter unit, a terahertz wave band is used to realize a three-wave-band narrow-band band-pass filter. A structure unit of the filter possesses rotation symmetry, and the filter is insensitive to terahertz wave incidence polarization and large angle incidence and still maintains a good three-wave-band filtering characteristic. The three-wave-band filtering characteristic of the composite structure is from linear superposition of filtering characteristics corresponding to the three square ring resonance units respectively. Through changing a geometrical size of each square ring resonance unit, a corresponding filtering frequency range is regulated and controlled. Based on the above condition, more wave band filtering can be realized in the terahertz wave band. The design of the filter is simple, the size is small, processing is convenient and a high practical value is possessed in terahertz technologies of terahertz communication, imaging, spectral analysis and the like.

Description

Terahertz three-band narrow-band-pass filter based on metamaterial
Technical Field
The invention belongs to the technical field of terahertz waves, and particularly relates to a terahertz three-band narrow-band-pass filter based on metamaterial.
Background
Terahertz waves, also known as submillimeter waves, are electromagnetic waves having a wavelength between millimeter waves and infrared light waves. In recent years, with the continuous development of terahertz wave generation and detection technologies, the application of terahertz waves in the fields of imaging, communication, biological detection, national defense security inspection and the like is receiving much attention. In order to enable the terahertz wave to be widely and generally applied, the design and implementation of the terahertz wave band device are necessary preconditions.
In a communication system, a band-pass filter is an important device, which can transmit signals in a specific frequency range, and block signals outside the frequency range to achieve the purpose of selective transmission. An ideal band pass filter has the following characteristics: smooth as possible in the passband, high transmittance as possible, good out-of-band rejection as possible, insensitive polarization, stable large angle incidence, etc. Due to the simplicity of sample preparation and testing, researchers have made intensive studies on microwave band bandpass filters. However, since materials that can effectively act on terahertz waves in nature are very limited, the design of a terahertz band pass filter, particularly a multi-band pass filter, is very lacking in the conventional terahertz technology.
Recently, a rapidly developing field provides a new idea for the realization of terahertz devices, which is a metamaterial. The metamaterial is an electromagnetic material which can be manually designed and meets the requirements of specific equivalent dielectric constant and magnetic permeability. Each structural element of the metamaterial acts as a resonator, the performance of the individual structures is optimized in the design, and then the structural elements are arranged together periodically in a certain way, constituting a filter for spatial filtering of electromagnetic waves. For example, a typical design concept is based on a metal-dielectric-metal (MDM) sandwich structure, and a square-ring slot resonant structure is used to generate coupling response to incident electromagnetic waves, thereby realizing single-band broadband filtering. However, the multiband band-pass filter has the advantages of flexible function, stable wide-angle incidence, good passband selection and the like, and has greater application potential in a terahertz communication system, so that the terahertz multiband band-pass filter has very important significance in research and manufacture.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects of the existing terahertz single-waveband band-pass filter, the invention provides a terahertz three-waveband narrow-band-pass filter based on metamaterial, and the filter has the advantages of multiband filtering, insensitive polarization, stable wide-angle incidence, good passband selection and the like, and is simple in design, small in size, convenient to process and high in practical value in the terahertz technology.
The technical scheme is as follows: in order to achieve the purpose, the invention adopts the technical scheme that:
a terahertz three-band narrow-band-pass filter based on metamaterial comprises more than one band-pass filter module which is arranged in a square space period mode, wherein the band-pass filter module comprises a first structured metal layer, a dielectric layer and a second structured metal layer, and the first structured metal layer, the dielectric layer and the second structured metal layer are sequentially arranged to form a metal-dielectric-metal sandwich structure; the first structured metal layer is a metal surface formed by three nested metal square ring resonance units which are arranged according to a square period, and the three nested metal square ring resonance units are a first square ring resonance unit (1), a second square ring resonance unit (2) and a third square ring resonance unit (3) respectively; the second structured metal layer is a metal grid formed by arranging single cross-shaped metal resonance units (6) according to a square period; wherein, the three nested metal square ring resonance units respectively form a filter unit with the dielectric layer (5) and the cross-shaped metal resonance unit (6).
Preferably: the first structured metal layer and the second structured metal layer are respectively plated on two sides of the dielectric layer.
Preferably: the number of the band-pass filter modules is 25 × 25, and the 25 × 25 filter units are arranged in a square space period.
Preferably: the first structured metal layer and the second structured metal layer are made of copper.
Preferably: the dielectric layer (5) is made of polyimide, the relative dielectric constant of the dielectric layer (5) is 2.9, and the loss tangent tan (), is 0.02.
Preferably: the thicknesses of the first structured metal layer and the second structured metal layer are both 180-220nm, and the thickness of the dielectric layer (5) is 5 mu m.
Preferably: the outer side lengths of the three nested metal square ring resonance units from outside to inside are 57.2-58.2 micrometers, 42.8-43.2 micrometers and 30.8-31.2 micrometers respectively, the widths of the three nested metal square ring resonance units are 2.8-3.2 micrometers respectively, the length of each cross-shaped metal resonance unit is 59.8-60.2 micrometers, and the width of each cross-shaped metal resonance unit is 0.8-1.2 micrometers.
Preferably: the length of the outer side of each three nested metal square ring resonance units from outside to inside is 58 micrometers, the length of the outer side of each nested metal square ring resonance unit is 43 micrometers, the length of each nested metal square ring resonance unit is 31 micrometers, the width of each nested metal square ring resonance unit is 3 micrometers, the length of each nested metal square ring resonance unit is 60 micrometers, and the width of each nested metal square ring resonance unit is 1 micrometer.
Has the advantages that: compared with the prior art, the terahertz three-band metamaterial narrow-band-pass filter provided by the invention has the following beneficial effects:
1. the terahertz three-band metamaterial narrow-band-pass filter has the characteristics of multi-band filtering, insensitive polarization, stable large-angle incidence, good passband selection and the like, and is expected to play an important role in terahertz communication technology, spectral analysis and the like.
2. Compared with the traditional pass filter, the terahertz three-band metamaterial narrow-band pass filter can simultaneously work in three frequency bands, and is stable in performance, high in pass band selectivity and low in insertion loss.
3. The terahertz three-band metamaterial narrow-band-pass filter is simple in structural design, and the periodic etching square rings and the cross-shaped metal resonance units on the two sides of the dielectric plate can be easily realized. The model optimization process is simple and convenient, and the required filtering performance can be achieved by adjusting the length and the width of each square ring.
Drawings
FIG. 1 is a front view of a filter building block and parameter dimensions of the present invention;
FIG. 2 is a perspective view of a filter building block of the present invention;
FIG. 3 is a diagram of a physical model of multiple reflection-interference process of the filter of the present invention at oblique incidence of electromagnetic waves;
FIG. 4 is a filter P of the present invention2Air interface and P1Amplitude profile of transmission and reflection at the air interface;
FIG. 5 is a filter P of the present invention2Air interface and P1Phase profile of transmission and reflection at the/air interface;
FIG. 6 is a transmission spectrum S of the filter of the present invention, which is a transmission spectrum obtained by simulation (solid line) and theoretical calculation (dotted line) when an electromagnetic wave is perpendicularly incident21F, wherein S21Is the transmission coefficient, f is the frequency, in THz;
FIG. 7 shows the multi-angle incident (0-30) transmission spectrum S of the electromagnetic wave under TE polarization of the electromagnetic wave of the filter of the present invention21-f;
FIG. 8 shows the multi-angle incident (0-30) transmission spectrum S of the electromagnetic wave under the TM polarization of the filter21-f。
Detailed Description
The present invention is further illustrated by the following description in conjunction with the accompanying drawings and the specific embodiments, it is to be understood that these examples are given solely for the purpose of illustration and are not intended as a definition of the limits of the invention, since various equivalent modifications will occur to those skilled in the art upon reading the present invention and fall within the limits of the appended claims.
The invention provides a terahertz three-band metamaterial narrow-band-pass filter, which comprises more than one band-pass filter module which is square arranged in a space period, wherein the band-pass filter module comprises a first structured metal layer (4), a dielectric layer (5) and a second structured metal layer, and a typical metal-dielectric-metal (MDM) sandwich structure is adopted. The two sides of the dielectric layer (5) are plated with metal layers which are respectively a first structured metal layer (4) and a second structured metal layer, the first structured metal layer (4) is a metal surface formed by three nested metal square ring resonance units which are arranged according to a square period, and the three nested metal square ring resonance units are respectively a first square ring resonance unit (1), a second square ring resonance unit (2) and a third square ring resonance unit (3). The second structured metal layer is a metal grid formed by arranging single cross-shaped metal resonance units 6 according to a square period. The three metal square ring resonance units, the dielectric layer (5) and the cross-shaped metal resonance unit (6) which are correspondingly nested form a filter unit. The 25 × 25 band-pass filter modules are arranged in a square mode in a space period to form the terahertz three-band metamaterial narrow-band-pass filter.
The first structured metal layer and the second structured metal layer are made of copper.
The dielectric layer (5) is made of polyimide, the relative dielectric constant of the dielectric layer (5) is 2.9, and the loss tangent tan (), is 0.02.
The thicknesses of the first structured metal layer and the second structured metal layer are both 180-220nm, and the thickness of the dielectric layer (5) is 5 mu m.
The length of the outer side of each of the three nested metal square ring resonance units from outside to inside is 57.2-58.2 micrometers, 42.8-43.2 micrometers and 30.8-31.2 micrometers, the width of each of the three nested metal square ring resonance units is 2.8-3.2 micrometers, the length of each of the cross-shaped metal resonance units is 59.8-60.2 micrometers, the width of each of the cross-shaped metal resonance units is 0.8-1.2 micrometers, and the electromagnetic wave coupling of the filter with the size is small. The optimal size is as follows: the length of the outer side of each three nested metal square ring resonance units from outside to inside is 58 micrometers, the length of the outer side of each nested metal square ring resonance unit is 43 micrometers, the length of each nested metal square ring resonance unit is 31 micrometers, the width of each nested metal square ring resonance unit is 3 micrometers, the length of each nested metal square ring resonance unit is 60 micrometers, and the width of each nested metal square ring resonance unit is 1 micrometer.
The invention applies large three-dimensional electromagnetic simulation software CST Microwave StudioTMAnd carrying out filtering characteristic simulation on the filter to obtain optimized geometric parameters of the structural unit. As shown in fig. 1, the structural unit of the filter of the present invention has a front view, a unit period p is 60 μm, and the length of the outer edge of the metal square ring resonant unit (1) is sl158 μm and width w13 mu m, the length of the outer edge of the metal square ring resonant unit (2) is sl243 μm with a width w23 mu m, the outer side length of the metal square ring resonance unit (3) is sl331 μm and a width w33 mu m, the length of the cross-shaped metal resonance unit (6) is sl460 μm, width w41 μm. As shown in FIG. 2, the filter structure unit of the present invention has a schematic perspective view showing the first and second structuresThe thickness of the metallized layer is tm180-220nm, and the thickness of the dielectric layer is td=5μm。
In an embodiment of the present invention, the first and second structured metal layers are made of copper, and the dielectric layer is made of PI (polyimide, having a relative dielectric constant of 2.9 and a loss tangent tan () of 0.02).
In order to clarify the physical mechanism of the filter, the invention adopts the multiple reflection-interference theory to theoretically calculate the electromagnetic characteristic of the band-pass filter of the invention and compares the electromagnetic characteristic with the simulation result of CST software.
As shown in fig. 3, the physical model of the multiple reflection-interference process of the filter of the present invention is schematically shown when the electromagnetic wave is obliquely incident. The physical model contains two interfaces: upper metal super surface P1And a lower metal grid P2Assume a beam of incident angle αiIs incident on the filter of the present invention, in air/P1At the interface, the incident wave is divided into two parts, one of which is reflected into the air, with a corresponding reflection coefficient ofWhile another part is transmitted into the medium, corresponding to a transmission coefficient ofThe transmitted electromagnetic wave is then incident on P2Air interface, a part of which is reflected by the medium to P1Corresponding reflection coefficient ofAnother part passes through P2Transmitted into the air with a corresponding transmission coefficient ofLikewise, the reflection and transmission of the whole process are at the corresponding air/P1Interface and P2Superposition of multiple reflections and transmissions at the air interface:
t ~ = t 12 t 23 e i ( θ 12 + θ 23 + β ) 1 - r 21 r 23 e i ( φ 21 + φ 23 + 2 β ) . - - - ( 1 )
wherein all variables and meanings are indicated in FIG. 3,representing the complex form of the transmission coefficient, t12Representing air/P1Magnitude of transmission coefficient at interface, t23Represents P2Amplitude of transmission coefficient at air interface, theta12Representing air/P1Phase of transmission coefficient at interface, theta23Represents P2Phase of transmission coefficient at air interface, r21Representing air/P1Magnitude of reflection coefficient at interface, r23Represents P2Amplitude of reflection coefficient at air interface, phi21Representing air/P1Phase of reflection coefficient at interface, phi23Represents P2The phase of the reflection coefficient at the/air interface, i denotes the imaginary unit, β is the phase difference of the incident wave propagating back and forth in the medium, i.e.:
β = - k 0 d ϵ ~ s p a c e r cosα s , - - - ( 2 )
sinα s = sinα i ϵ ~ s p a c e r . - - - ( 3 )
wherein k is0Representing the wave vector of free space, d representing the thickness of the dielectric layer,representing the complex form of the dielectric constant of the dielectric layer material, αsRepresents P2Angle of reflection at the air interface.
The filter transmission coefficient T of the present invention is calculated as:
T = t ~ t ~ * . - - - ( 4 )
wherein,representing transmission coefficientComplex conjugation of (a).
The theoretical calculation of the filter utilizes CST simulation software to establish a decoupling model to calculate air/P1Interface and P2Transmission and reflection coefficients at the/air interface. Removing P in a filter structure unit1To calculate P2Amplitude and phase distribution of transmission and reflection at air interface, removalP2To calculate P1Amplitude and phase distribution of transmission and reflection at the/air interface.
As shown in fig. 4 and 5, the filter P of the present invention2Air interface and P1Amplitude and phase distribution of transmission and reflection at the/air interface. The filter transmission coefficient of the present invention is calculated by substituting the corresponding parameter value in the figure into equation (4).
As shown in FIG. 6, the transmission spectrum S of the filter of the present invention is measured by CST simulation (solid line) and theoretical calculation (dotted line) when the electromagnetic wave is vertically incident21F, wherein S21Is the transmission coefficient, f is the frequency, and the unit is THz. The results of theoretical calculations and CST simulations agree well. Because the filter structure has rotational symmetry, the band-pass filter of the invention is at the frequency f when the electromagnetic wave is vertically incident1=0.42THz、f2=1.26THz、f3Three transmission peaks exist at 1.86THz, the passband is narrow, the filter belongs to a narrow-band-pass filter, the passband selectivity is high, and the insertion loss is low.
The filter has good performance when the electromagnetic wave is vertically incident, and has stable performance when the electromagnetic wave is incident at a large angle. The simulation is carried out by CST software to obtain the transmission spectrum S of the filter of the invention under the two polarization modes of TE and TM, the electromagnetic wave is incident from multiple angles (0 degree to 30 degrees)21-f. As shown in fig. 7 and 8, the transmission spectra S of electromagnetic waves with multi-angle incidence (0-30 °) under TE and TM polarization, respectively21-f. It can be seen that, although under large-angle incidence, the three transmission peaks still maintain high transmittance, and no obvious frequency shift occurs at the positions of the transmission peaks, which indicates that the terahertz three-band-pass filter has the advantages of stable large-angle incidence and no polarization dependence.
The relation between the structural unit of the filter and the transmission spectrum of the filter is analyzed, and a three-band filtering mechanism of the narrow-band-pass filter is disclosed. We have found that: frequency f of three transmission peaks1、f2、f3Respectively from the first square ring resonance unit (1) The second square ring resonance unit (2) and the third square ring resonance unit (3) are independently resonated, and the resonance frequency is inversely proportional to the side length of the square ring. Therefore, the design of a multiband filter can be realized by utilizing the nested combination of a plurality of closed rings, and meanwhile, the corresponding filtering frequency band is regulated and controlled by changing the geometric dimension of the square ring resonant unit. The terahertz multiband band-pass filter also provides important reference for the design of other terahertz multiband band-pass filters.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.

Claims (8)

1. A terahertz three-band narrow-band-pass filter based on metamaterial is characterized in that: the band-pass filter module comprises more than one band-pass filter module which is arranged in a square space period, wherein the band-pass filter module comprises a first structured metal layer, a dielectric layer and a second structured metal layer, and the first structured metal layer, the dielectric layer and the second structured metal layer are sequentially arranged to form a metal-dielectric-metal sandwich structure; the first structured metal layer is a metal surface formed by three nested metal square ring resonance units which are arranged according to a square period, and the three nested metal square ring resonance units are a first square ring resonance unit (1), a second square ring resonance unit (2) and a third square ring resonance unit (3) respectively; the second structured metal layer is a metal grid formed by arranging single cross-shaped metal resonance units (6) according to a square period; wherein, the three nested metal square ring resonance units respectively form a filter unit with the dielectric layer (5) and the cross-shaped metal resonance unit (6).
2. The terahertz three-band metamaterial narrow-band bandpass filter of claim 1, wherein: the first structured metal layer and the second structured metal layer are respectively plated on the front surface and the back surface of the dielectric layer.
3. The terahertz three-band metamaterial narrow-band bandpass filter of claim 1, wherein: the number of the band-pass filter modules is 25 × 25, and the 25 × 25 filter units are arranged in a square space period.
4. The terahertz three-band metamaterial narrow-band bandpass filter of claim 1, wherein: the first structured metal layer and the second structured metal layer are made of copper.
5. The terahertz three-band metamaterial narrow-band bandpass filter of claim 1, wherein: the dielectric layer (5) is made of polyimide, the relative dielectric constant of the dielectric layer (5) is 2.9, and the loss tangent tan (), is 0.02.
6. The terahertz three-band metamaterial narrow-band bandpass filter of claim 1, wherein: the thicknesses of the first and second structured metal layers are both 180-220 nm.
7. The terahertz three-band metamaterial narrow-band bandpass filter of claim 1, wherein: the outer side lengths of the three nested metal square ring resonance units from outside to inside are 57.2-58.2 micrometers, 42.8-43.2 micrometers and 30.8-31.2 micrometers respectively, the widths of the three nested metal square ring resonance units are 2.8-3.2 micrometers respectively, the length of each cross-shaped metal resonance unit is 59.8-60.2 micrometers, and the width of each cross-shaped metal resonance unit is 0.8-1.2 micrometers.
8. The terahertz three-band metamaterial narrow-band bandpass filter of claim 1, wherein: the length of the outer side of each three nested metal square ring resonance units from outside to inside is 58 micrometers, the length of the outer side of each nested metal square ring resonance unit is 43 micrometers, the length of each nested metal square ring resonance unit is 31 micrometers, the width of each nested metal square ring resonance unit is 3 micrometers, the length of each nested metal square ring resonance unit is 60 micrometers, and the width of each nested metal square ring resonance unit is 1 micrometer.
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CN107957604A (en) * 2017-12-01 2018-04-24 天津大学 Terahertz chirality modulator based on super structure pore structure
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WO2018107142A1 (en) * 2016-12-09 2018-06-14 Brown University Polarizing beam splitter for thz radiation
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CN109031493A (en) * 2018-07-26 2018-12-18 华中科技大学 Surpass the narrow band filter and preparation method thereof of surface texture based on medium

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WO2018107142A1 (en) * 2016-12-09 2018-06-14 Brown University Polarizing beam splitter for thz radiation
US11054662B2 (en) 2016-12-09 2021-07-06 Brown University Polarizing beam splitter for THz radiation
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CN108089251B (en) * 2018-01-24 2023-05-12 厦门大学嘉庚学院 Terahertz wave band quadruple photonic crystal band-stop filter
CN108879039A (en) * 2018-06-28 2018-11-23 郑州大学 A kind of bandstop filter based on Meta Materials
CN109031493A (en) * 2018-07-26 2018-12-18 华中科技大学 Surpass the narrow band filter and preparation method thereof of surface texture based on medium
CN108957876A (en) * 2018-09-19 2018-12-07 苏州晶萃光学科技有限公司 A kind of adjustable Terahertz wavefront modulator and preparation method thereof
CN108957876B (en) * 2018-09-19 2021-05-18 苏州晶萃光学科技有限公司 Adjustable terahertz wave front modulator and preparation method thereof

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