CN106054539A - Bearing workbench - Google Patents
Bearing workbench Download PDFInfo
- Publication number
- CN106054539A CN106054539A CN201610412727.XA CN201610412727A CN106054539A CN 106054539 A CN106054539 A CN 106054539A CN 201610412727 A CN201610412727 A CN 201610412727A CN 106054539 A CN106054539 A CN 106054539A
- Authority
- CN
- China
- Prior art keywords
- workbench
- wiping device
- cleaning
- carrying workbench
- drying equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
Abstract
This invention relates to the technical field of exposure machines, and provides a bearing workbench. The bearing workbench comprises a wiping device for automatically cleaning a worktop and a drying device for drying the worktop. Since stubborn stains can be cleaned by the wiping device, the cleaning effect is good; the drying device quickens the evaporation velocity of detergents, so that the worktop is dried at once after being wiped; and the worktop can be automatically cleaned in a short time, so that the normal operations of the device and the production line are not affected.
Description
Technical field
The present invention relates to exposure machine technical field, specifically provide a kind of carrying workbench.
Background technology
Color film (Color Filter is called for short CF) is used to realize the main devices of colored display.CF is configured to substantially
The chock insulator matter that black surround matrix (BM layer), chromatic photoresist (RGB layer), Over Coat layer (OC layer), ITO conductive layer and supporting case are thick
(PS).The operations such as CF needs through being coated with, exposing in preparation process, development.Repeatedly profit is needed during whole preparation flow
Use Stage to carry out bearing substrate and complete the operations such as exposure, coating, characteristic value measurement.Stage surface exists in foreign body and Stage
There is foreign body and often bring the most serious quality problem, as coating machine base station surface often exists foreign body in support PIN surface, portion
Can there is Uncoating bad, there is foreign body and black circle etc. can be brought bad in exposure machine Stage surface, internal of exposure machine Stage
There is foreign body and also can bring such as the Mura of black circle etc to product in support PIN surface, causes the reduction of product yield.Existing
Stage does not have automated cleaning ability, needs to be cleaned inside access arrangement manually.Existing Stage inside is propped up
The cleaning mode of support PIN simply adjusts equipment manually so that support PIN is in raised configuration and manually uses non-dust cloth in turn
Wiping supports the support zone of PIN.But clean manually and often bring impact product line equipment to sow, expend a large amount of people
Power, brings the problems such as new pollution to device interior, and cleaning support PIN within Stage can be due to substrate the most manually
Oversize, manually cannot manually clean the support PIN of Stage central part, cause the reduction of cleaning effect.
Summary of the invention
(1) to solve the technical problem that
It is an object of the invention to provide one and can complete automated cleaning at short notice, do not affect equipment and produce the normal of line
The carrying workbench of operation.
(2) technical scheme
For achieving the above object, the invention provides a kind of carrying workbench, including the wiping for automatically cleaning table top
Equipment and for being dried the drying equipment of table top.
Preferably, the first guide rail being arranged in workbench side is also included；Described wiping device and the rear end of drying equipment
All it is connected with described first guide rail, for moving to the other end along described first guide rail from workbench one end.
Preferably, described wiping device and described drying equipment be perpendicular on described first guide rail direction scalable.
Preferably, described wiping device and the spaced and parallel layout of described drying equipment.
Preferably, described wiping device and described drying equipment interval 5-15cm.
Preferably, in the direction of movement, described drying equipment is arranged on the rear of described wiping device.
Preferably, also include for controlling the lifting of workbench inner support foot and the intelligent controller rotated.
Preferably, when described intelligent controller is above moving to a spike at wiping device, a spike is rotated, enters
Row rotates wiping；When being additionally operable to clean, bottom supporting surface and the work top of a spike are maintained at same plane.
Preferably, described wiping device includes cleaning device and spreader；Described spreader includes for spraying cleaning solution
Nozzle and for connecting the conduit of cleaning solution receptacle；Described nozzle spray direction is just to cleaning device, for being sprayed by cleaning solution
On cleaning device.
Preferably, described cleaning agent is volatile substances.
Preferably, described cleaning device is non-dust cloth.
Preferably, described drying equipment include heat gun, the air-out direction of described heat gun be just to table top or side before
Side.
Preferably, described wiping device include for locating table specified coordinate localizer and and set cleaning stop time
Between timer.
Preferably, the second guide rail being arranged in the parallel both sides of workbench, described wiping device and drying equipment are also included
It is movably disposed on the second guide rail described in said two.
Preferably, described second guide rail extends to outside table top.
Preferably, it is positioned at described second guide rail outside table top to downwardly extend along the sidepiece of described table top.
(3) beneficial effect
A kind of carrying workbench that the present invention provides, including for automatically cleaning the wiping device of table top and for drying table
The drying equipment in face.Can remove relatively stain by wiping device, cleaning effect is good；Cleaning agent can be accelerated by drying equipment
Evaporation rate, it is achieved i.e. wipe the most dry, automated cleaning can be completed at short notice, do not affect equipment and produce line normal operation.
Accompanying drawing explanation
Fig. 1 is that a kind of axle carrying workbench of the embodiment of the present invention surveys view one.
Fig. 2 is that a kind of axle carrying workbench of the embodiment of the present invention surveys view two.
Reference:
1, wiping device；2, drying equipment；3, the first guide rail；4, the second guide rail.
Detailed description of the invention
Below in conjunction with the accompanying drawings and embodiment, the detailed description of the invention of the present invention is described in further detail.Hereinafter implement
Example is used for illustrating the present invention, but is not limited to the scope of the present invention.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " connects " and should do
Broadly understood, connect for example, it may be fixing, it is also possible to be to removably connect, or be integrally connected；Can be to be joined directly together,
Can also be indirectly connected to by intermediary.For the ordinary skill in the art, can understand above-mentioned with concrete condition
Term concrete meaning in the present invention.
Shown in Fig. 1 and Fig. 2, a kind of carrying workbench that the embodiment of the present invention provides, including for automatic rinsing table
The wiping device 1 in face and for being dried the drying equipment 2 of table top.Wiping device 1 can remove relatively stain, and cleaning effect is good；
Drying equipment 2 can accelerate the evaporation rate of cleaning agent, is achieved in i.e. wiping the most dry, can complete automated cleaning at short notice, no
Affect equipment and produce the normal operation of line.
Wherein, this workbench the most also includes the first guide rail 3 being arranged in workbench side；Wiping device 1 sets with being dried
The rear end of standby 2 is all connected with the first guide rail 3, for moving to the other end along the first guide rail 3 from workbench one end.Only need to be at base station
One side arranges a guide rail, wiping device 1 and drying equipment 2 can be made to carry out wiping along certain track and be dried, thus can disappear
Except cleaning blind area, cleaning efficiency is high.
Further, wiping device 1 and drying equipment 2 can be perpendicular on the first guide rail 3 direction scalable.For one side
For guide rail, wiping device 1 is set to telescopic form with being dried, can stretch out at needs seasonal its of cleaning, be not required to
It is retracted to the side of table top time to be cleaned, does not affect the normal operation operation on base station.
It addition, wiping device 1 and drying equipment 2 can spaced and parallel be arranged.In the direction of the width, each it is subject to by wiping
The interval time being dried is the most identical, it is ensured that the concordance of cleannes.
And, wiping device 1 and drying equipment 2 are spaced 5-15cm.The wiping vestige that wiping device 1 stays is through of short duration
After natural evaporation, then by drying equipment 2 be dried, make final drying effect more preferably, more thorough.
In the direction of movement, drying equipment 2 is arranged on the rear of wiping device 1.First wiping, is dried, such order afterwards
More preferably cleaning effect can be realized.
The carrying workbench of the present embodiment the most also includes for controlling the lifting of workbench inner support foot and the intelligence rotated
Can controller.Propping up spike rise and rotate, the whole body is formed with wiping device 1 and contacts, it is achieved the wiping to a spike, has accomplished existing
There is the most scabrous technical barrier of manual operations.
Wherein, when intelligent controller is above moving to a spike at wiping device 1, a spike is rotated, revolves
Turn wiping；When being additionally operable to clean, bottom supporting surface and the work top of a spike are maintained at same plane.By intelligence
Controller realizes the automated cleaning of a spike, and automaticity is higher, improves cleaning efficiency.
Wiping device 1 includes cleaning device and spreader；Spreader includes the nozzle for spraying cleaning solution and for connecting
The conduit of cleaning solution receptacle；Nozzle spray direction is just to cleaning device, for cleaning solution is ejected into cleaning device.By injection
Device is continuously cleaning agent and provides cleaning agent, it is ensured that have the cleaning agent of abundance to participate on whole wiping path, it is ensured that clear
Clean effect.
And, cleaning agent is preferably volatile substances, thus can improve drying efficiency.
Cleaning device is non-dust cloth, utilizes the capillarity of non-dust cloth to be full of cleaning agent in whole non-dust cloth, does not haves
The blind area that local is not moistening.
Drying equipment 2 includes heat gun, and the air-out direction of heat gun is just to table top or front, side.Heating cooperation is blown
Stroking, drying effect is more preferably；And when blowing to front, side, be possible not only to increase sway area, make the region closer to wiping device 1 obtain
To predrying, and touch the driest hot-air farthest away from the area preference of wiping device 1, make final degree of drying more have
Ensure.
Wiping device 1 includes the localizer for locating table specified coordinate and and the timing of the setting cleaning time of staying
Device.Locators intervalometer can make wiping device 1 be positioned somewhere persistently to clean, can be obstinate to local targetedly
Spot is formed to be removed.
Also include the moveable of the second guide rail 4 being arranged in the parallel both sides of workbench, wiping device 1 and drying equipment 2
It is arranged on two the second guide rails 4.Bilateral guide rail makes wiping device 1 and drying equipment 2 run more stable.
Second guide rail 4 extends to outside table top.Wiping device 1 and drying equipment 2 is made to concede the working region of table top, not shadow
Ring the normal operation of table top.
It is positioned at the second guide rail 4 outside table top to downwardly extend along the sidepiece of table top.When need not cleaning, wiping device 1
With the side that drying equipment 2 is placed in table top, more do not interfere with the normal work of table top.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For Yuan, on the premise of without departing from the technology of the present invention principle, it is also possible to make some improvement and replacement, these improve and replace
Also should be regarded as protection scope of the present invention.
Claims (16)
1. a carrying workbench, it is characterised in that include for automatically cleaning the wiping device of table top and for being dried table top
Drying equipment.
Carrying workbench the most according to claim 1, it is characterised in that also include that be arranged in workbench side first leads
Rail；The rear end of described wiping device and drying equipment is all connected with described first guide rail, is used for along described first guide rail from work
Platform one end moves to the other end.
Carrying workbench the most according to claim 2, it is characterised in that described wiping device and described drying equipment are hanging down
Straight scalable on described first guide rail direction.
Carrying workbench the most according to claim 1, it is characterised in that described wiping device and described drying equipment interval
It is arranged in parallel.
Carrying workbench the most according to claim 4, it is characterised in that described wiping device and described drying equipment interval
5-15cm。
Carrying workbench the most according to claim 4, it is characterised in that in the direction of movement, described drying equipment is arranged
Rear at described wiping device.
Carrying workbench the most according to claim 1, it is characterised in that also include for controlling workbench inner support foot
Lifting and the intelligent controller rotated.
Carrying workbench the most according to claim 7, it is characterised in that described intelligent controller is for moving at wiping device
When moving above a spike, a spike is rotated, carry out rotating wiping；When being additionally operable to clean, the bottom of a spike is supported
Face and work top are maintained at same plane.
Carrying workbench the most according to claim 1, it is characterised in that described wiping device includes cleaning device and hydrojet
Device；Described spreader includes the nozzle for spraying cleaning solution and for connecting the conduit of cleaning solution receptacle；Described nozzle sprays
Penetrate direction just to cleaning device, for cleaning solution is ejected into cleaning device.
Carrying workbench the most according to claim 9, it is characterised in that described cleaning agent is volatile substances.
11. carrying workbench according to claim 9, it is characterised in that described cleaning device is non-dust cloth.
12. carrying workbench according to claim 1, it is characterised in that described drying equipment includes heat gun, described heat
The air-out direction of air pressure gun is just to table top or front, side.
13. carrying workbench according to claim 1, it is characterised in that described wiping device includes for locating table
The localizer of specified coordinate and and the timer of the setting cleaning time of staying.
14. carrying workbench according to claim 1, it is characterised in that also include being arranged in the parallel both sides of workbench
Being movably disposed on the second guide rail described in said two of second guide rail, described wiping device and drying equipment.
15. carrying workbench according to claim 14, it is characterised in that described second guide rail extends to outside table top.
16. carrying workbench according to claim 15, it is characterised in that be positioned at the described second guide rail edge outside table top
The sidepiece of described table top downwardly extends.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610412727.XA CN106054539B (en) | 2016-06-13 | 2016-06-13 | Carry workbench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610412727.XA CN106054539B (en) | 2016-06-13 | 2016-06-13 | Carry workbench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106054539A true CN106054539A (en) | 2016-10-26 |
| CN106054539B CN106054539B (en) | 2018-10-30 |
Family
ID=57170812
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610412727.XA Expired - Fee Related CN106054539B (en) | 2016-06-13 | 2016-06-13 | Carry workbench |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106054539B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108813932A (en) * | 2018-06-28 | 2018-11-16 | 陈萌 | A kind of workbench with cleaning function |
| CN110405489A (en) * | 2019-06-25 | 2019-11-05 | 盐城市朗力机械有限公司 | A kind of mechanical skid plateform and clean method can automatically clean guide rail |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002368065A (en) * | 2001-06-08 | 2002-12-20 | Hiroshi Akashi | Aligning device |
| JP2005044882A (en) * | 2003-07-24 | 2005-02-17 | Nikon Corp | Transporting device and aligner |
| JP2008300723A (en) * | 2007-06-01 | 2008-12-11 | Nec Electronics Corp | Processing apparatus |
| CN201811787U (en) * | 2010-07-01 | 2011-04-27 | 华东师范大学 | Handheld measuring device for photochromic performance of laser display |
| CN104174613A (en) * | 2013-05-22 | 2014-12-03 | 上海微电子装备有限公司 | Cleaning device and cleaning method for working table of mask aligner |
| CN105487352A (en) * | 2016-02-16 | 2016-04-13 | 武汉华星光电技术有限公司 | Exposure machine and method for replacing exposure lamp |
| CN105652604A (en) * | 2016-03-15 | 2016-06-08 | 武汉华星光电技术有限公司 | Exposure machine and operation method thereof |
-
2016
- 2016-06-13 CN CN201610412727.XA patent/CN106054539B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002368065A (en) * | 2001-06-08 | 2002-12-20 | Hiroshi Akashi | Aligning device |
| JP2005044882A (en) * | 2003-07-24 | 2005-02-17 | Nikon Corp | Transporting device and aligner |
| JP2008300723A (en) * | 2007-06-01 | 2008-12-11 | Nec Electronics Corp | Processing apparatus |
| CN201811787U (en) * | 2010-07-01 | 2011-04-27 | 华东师范大学 | Handheld measuring device for photochromic performance of laser display |
| CN104174613A (en) * | 2013-05-22 | 2014-12-03 | 上海微电子装备有限公司 | Cleaning device and cleaning method for working table of mask aligner |
| CN105487352A (en) * | 2016-02-16 | 2016-04-13 | 武汉华星光电技术有限公司 | Exposure machine and method for replacing exposure lamp |
| CN105652604A (en) * | 2016-03-15 | 2016-06-08 | 武汉华星光电技术有限公司 | Exposure machine and operation method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108813932A (en) * | 2018-06-28 | 2018-11-16 | 陈萌 | A kind of workbench with cleaning function |
| CN110405489A (en) * | 2019-06-25 | 2019-11-05 | 盐城市朗力机械有限公司 | A kind of mechanical skid plateform and clean method can automatically clean guide rail |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106054539B (en) | 2018-10-30 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181030 |
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| CF01 | Termination of patent right due to non-payment of annual fee |