CN106053476B - The method that the cartridge structure and detecting substrate integrality of substrate integrality can be detected - Google Patents
The method that the cartridge structure and detecting substrate integrality of substrate integrality can be detected Download PDFInfo
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- CN106053476B CN106053476B CN201610480493.2A CN201610480493A CN106053476B CN 106053476 B CN106053476 B CN 106053476B CN 201610480493 A CN201610480493 A CN 201610480493A CN 106053476 B CN106053476 B CN 106053476B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
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Abstract
The method of the cartridge structure and detecting substrate integrality of substrate integrality can be detected the present invention provides one kind.The cartridge structure for detecting substrate integrality includes outline border, support member, detecting unit and signal processing unit, the support member is arranged at intervals on the outline border to limit the accommodating space for being used for bearing substrate, the detecting unit is set at least partly support member and generates the inductive signal for indicating substrate integrality, the signal processing unit connect with the detecting unit and handles the inductive signal, to realize the detection to the integrality of substrate in cartridge structure, it can effectively avoid incomplete substrate and enter subsequent processing and threaten to production efficiency and production security.
Description
Technical field
The present invention relates to field of display technology, in particular to a kind of cartridge structure that can detect substrate integrality and detecting base
The method of plate integrality.
Background technique
In process of production, since complex procedures, step are various, the glass substrate as substrate needs multiple display panel
It travels to and fro between each relatively independent production equipment.Usually using the cassette that can carry multiple substrates in actual production
(Cassette) as the bogey for storing and transporting substrate.
Fig. 1 is that a kind of structural schematic diagram of cassette, Fig. 2 are the main view of card lock bearing substrate shown in Fig. 1 in the prior art,
As depicted in figs. 1 and 2, multiple spaced support portions are each provided on the opposite two sides in 10 inside of outline border of cartridge structure
Part 11, these support members 11 are arranged by layer to limit several accommodating spaces 11 ', to accommodate simultaneously supporting substrate 20.
Loading or unloading operation is carried out to substrate 20 usually using manipulator, specifically, manipulator can protrude between support member 11
Accommodating space 11 ' in realize to the loading or unloading operation of substrate 20.Under normal circumstances, manipulator is run between support member 11
Predetermined position, to substrate 20 carry out loading or unloading operation.But in the actual production process, it is understood that there may be the feelings such as position of manipulator offset
Under condition, such substrate 20 will hit card lock to there is the case where substrate breakage.Alternatively, manipulator is before fetching substrate,
Substrate is just due to being occurred substrate breakage by destructive external force in transport or technical process.When substrate is in card lock
It damages, and when technique board can not identify whether it ruptures, after rupture substrate enters processing chamber, process risk will be generated
Such as fragment, this will expend the great time, manpower goes clean chips, influence production efficiency.
However, current card lock can not detect the substrate that it is carried whether there is rupture (i.e. whether complete), therefore
It is urgent to provide the methods that one kind can detect the cartridge structure of substrate integrality and detect substrate integrality, to solve above-mentioned skill
Art problem.
Summary of the invention
The purpose of the present invention is to provide the detection method of a kind of cassette and cassette, can effectively detect whether substrate is complete
It is whole, it avoids incomplete substrate from entering subsequent processing and threatens to production efficiency and production security.
In order to solve the above technical problems, the present invention provides a kind of cartridge structure that can detect substrate integrality, including outline border,
Support member and detecting unit and signal processing unit, the support member are arranged at intervals on the outline border to limit for holding
The accommodating space of carried base board, the detecting unit are set at least partly support member and generate the sense for indicating substrate integrality
Induction signal, the signal processing unit connect with the detecting unit and handle the inductive signal, to realize to card
The detection of the integrality of substrate in box structure.
Optionally, in the cartridge structure, the detecting unit is pressure detection unit, the pressure detection unit
It is set on the surface of the support member bearing substrate；When the substrate carried in the support member is complete, the support
Pressure detection unit pressure value on component is within the scope of default value；When the substrate carried in the support member is endless
When whole, the pressure detection unit pressure value in the support member exceeds default value range.
Optionally, in the cartridge structure, the detecting unit is optical detecting unit, the optical detecting unit
Including light emitting members and light-receiving member, the light emitting members are used to emit detection light to the light-receiving member, together
The light emitting members and light-receiving member of one optical detecting unit are set in two adjacent support members and are located at same appearance
Between emptying on two opposite sides；When the substrate carried in the support member is complete, the corresponding light emitting portion of the substrate
It is predetermined that the difference of the light intensity for the detection light that the light intensity and light-receiving member of the detection light of part transmitting receive is less than or equal to one
Threshold value；When the substrate carried in the support member is imperfect, the detection light of the corresponding light emitting members transmitting of the substrate
Light intensity and light-receiving member receive detection light light intensity difference be greater than a predetermined threshold.
Optionally, in the cartridge structure, the detecting unit includes pressure detection unit and optical detecting list
Member；The pressure detection unit is set on the surface of the support member bearing substrate；When what is carried in the support member
When substrate is complete, the pressure detection unit pressure value in the support member is within the scope of default value；When the support
When the substrate carried on component is imperfect, the pressure detection unit pressure value in the support member exceeds default value model
It encloses；The optical detecting unit includes light emitting members and light-receiving member, and the light emitting members are used for the light-receiving
Component transmitting detection light, the light emitting members and light-receiving member of same optical detecting unit are set to two adjacent supports
On component and it is located on two opposite sides of one accommodation space；It, should when the substrate carried in the support member is complete
The light intensity for the detection light that the light intensity and light-receiving member of the detection light of the corresponding light emitting members transmitting of substrate receive
Difference is less than or equal to a predetermined threshold；When the substrate carried in the support member is imperfect, the corresponding light emitting of the substrate
The difference of the light intensity for the detection light that the light intensity and light-receiving member of the detection light of component transmitting receive is greater than a predetermined threshold
Value.
Optionally, in the cartridge structure, the pressure detection unit be electromagnetic relay or pressure sensor, often
Several pressure detection units are provided in a support member.
Optionally, in the cartridge structure, the detection light is infrared ray, laser or ultraviolet light, Mei Gesuo
It states and is provided with several light emitting members and several light-receiving members in support member.
Optionally, in the cartridge structure, the cartridge structure further includes display unit and alarm unit, described aobvious
Show that unit and alarm unit are electrically connected with the signal processing unit, the display unit is used for the integrality of display base plate
Information, the alarm unit are used in the imperfect alarm of the substrate.
Another side according to the present invention also provides a kind of method for detecting substrate integrality, comprising: be set to support member
On detecting unit generate indicate substrate integrality inductive signal；Signal processing unit receives the inductive signal and to described
Inductive signal is handled, to judge the integrality of substrate in cartridge structure.
Compared with prior art, the present invention is sentenced by the way that detecing element is arranged on card lock support unit using detecing element
Whether the substrate carried in disconnected card lock is intact, for example the case where whether there is fragmentation (broken unfilled corner) or crackle, passes through place
Reason module handles above-mentioned inductive signal, to realize to the detection of the integrality of the substrate in cassette, can effectively avoid
Incomplete substrate enters subsequent processing and threatens to production efficiency and production security.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of cassette in the prior art；
Fig. 2 is the main view of card lock bearing substrate shown in Fig. 1；
Fig. 3 is the schematic diagram for the first cartridge structure that the embodiment of the present invention one provides；
Fig. 4 is the main view of card lock bearing substrate shown in Fig. 3；
Fig. 5 is the schematic diagram for second of cartridge structure that the embodiment of the present invention one provides；
Fig. 6 is the schematic diagram for the third cartridge structure that the embodiment of the present invention one provides；
Fig. 7 is the schematic diagram for the 4th kind of cartridge structure that the embodiment of the present invention one provides；
Fig. 8 is the schematic diagram for the 5th kind of cartridge structure that the embodiment of the present invention one provides；
Fig. 9 is the schematic diagram for the 6th kind of cartridge structure that the embodiment of the present invention one provides；
Figure 10 is the schematic diagram for the 7th kind of cartridge structure that the embodiment of the present invention one provides；
Figure 11 is the schematic diagram for the 8th kind of cartridge structure that the embodiment of the present invention one provides；
Figure 12 is the schematic diagram of cartridge structure provided by Embodiment 2 of the present invention；
Figure 13 is the main view of card lock bearing substrate shown in Figure 12；
Figure 14 is the main view for the card lock bearing substrate that the embodiment of the present invention three provides；
In Fig. 1~2: 10- outline border；11- support member；11 '-accommodating spaces；20- substrate；
In Fig. 3~14: 101- cross tube；102- sheer pole；The first vertical bar of 103a-；The second vertical bar of 103b-；104- bar；
105- barrier；106- track；106 '-location holes；110- support member；110 '-accommodating spaces；120- pressure detection unit；
130- optical detecting unit；131- light emitting members；132- light-receiving member；200- substrate.
Specific embodiment
As stated in the background art, whether complete card lock in the prior art can not detect the substrate that it is carried, without
If complete substrate can all threaten to production efficiency and production security into subsequent processing.Applicant studies for a long period of time
It was found that the incomplete situation of relatively common substrate includes that fragmentation (substrate crushing unfilled corner) and substrate are cracked etc..Herein
On the basis of, applicant provides the cartridge structure and detecting substrate integrity measure that one kind can detect substrate integrality, described
The cartridge structure that substrate integrality can be detected includes outline border, support member, detecting unit and signal processing unit, the support portion
Part is arranged at intervals on the outline border to limit several accommodating spaces for bearing substrate, the detecting unit be set to
In small part support member and generate the inductive signal for indicating substrate integrality, the signal processing unit and the detecting unit
It connects and the inductive signal is handled, to realize the detection to the integrality of substrate in cartridge structure.The present invention passes through
Detecing element is set on card lock support unit, judges whether the substrate carried in card lock is intact using detecing element, than
Such as whether there is the case where broken unfilled corner or crackle, above-mentioned inductive signal is handled by processing module, thus realization pair
The detection of the integrality of substrate in cassette can effectively avoid incomplete substrate and enter subsequent processing to production efficiency and production
Safety threatens.
Cartridge structure proposed by the present invention is described in further detail below in conjunction with the drawings and specific embodiments.Under
Face explanation and claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplification
Form and use non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Embodiment one
The present embodiment is described in detail so that detecting unit is pressure detection unit as an example.Fig. 3 is provided in this embodiment
The schematic diagram of cartridge structure, Fig. 4 are the main view of card brake structure bearing substrate shown in Fig. 3.As shown in Figure 3 and Figure 4, cartridge structure
Including outline border, support member 110, pressure detection unit 120 and signal processing unit (not shown).The support member
110 are arranged at intervals on two sides opposite inside the outline border, these support members 110 are arranged several to limit by layer
A accommodating space 110 ', thus bearing substrate 200.The pressure detection unit 120 is set to the support member 110 and carries base
On the surface of plate, and generate the pressure sensitive signal for indicating substrate integrality.The signal processing unit and the pressure detection
Unit 120 connects, and handles to receive the pressure sensitive signal, and to above-mentioned pressure sensitive signal, thus realization pair
The detection of the integrality of substrate in cassette.
With continued reference to shown in Fig. 3, the outline border includes 4 cross tubes, 101,4 sheer poles 102 and 6 vertical bars, described
Vertical bar connects cross tube 101 and sheer pole 102 constitutes frame structure.The identical support member of quantity is provided on 6 vertical bars, and
Support member position on 6 vertical bars is corresponding to constitute a plane to common supporting substrate.In practical applications, one
The quantity of support member on vertical bar can for 20 perhaps 40 define 20 or 40 accommodating spaces accordingly, into
And accommodate 20 or 40 substrates.For simplification, 10 support members, but this field skill are only schematically indicated in attached drawing
Art personnel should be appreciated that the quantity of support member is not limited to the example above.Specifically, 6 vertical bars include 4 first
Vertical bar 103a and 2 second vertical bar 103b, wherein the first vertical bar 103a is separately connected end and the sheer pole of cross tube 101
102 end, the second vertical bar 103b are then separately connected the intermediate position of cross tube 101 and the intermediate position of sheer pole 102.In order to
Carried substrate is avoided to skid off outline border, opposite side is provided with stop member with the opening of outline border, and e.g. 2 connect
The bar 104 at the intermediate position at the intermediate position and sheer pole 102 of cross bar 101.Certainly, the present invention does not limit stop member
Quantity and structure, the stop member are also possible to one or more baffles.
Effect is preferably detected in order to obtain, is preferably respectively provided with pressure detection unit 120 in each support member 110,
In this way can be more accurate detect whether substrate ruptures.The number for the pressure detection unit 120 that each support member 110 is arranged
Depending on amount can be according to detecting situation, one (as shown in Figure 3) can be only set, also can be set multiple.It should be understood that can also
Pressure detection unit 120 is only set in part support member 110, to simplify card brake structure.For example, being only located at outline border quadrangle
4 first vertical bar 103a on be arranged pressure detection unit 120, as shown in Figure 5；Alternatively, being only located at the 2 of outline border middle position
Pressure detection unit 120 is set on the second vertical bar of root 103b, as shown in Figure 6；Again alternatively, only at 2 first of outline border diagonally opposing corner
Pressure detection unit 120 is set on vertical bar 103a, as shown in Figure 7.
For Fig. 3 into Fig. 7,6 vertical bar connection cross tubes 101 and sheer pole 102 constitute frame structure, but in fact, vertical bar
Quantity can also corresponding change.For example, it is 8 that the quantity of the vertical bar, which increases, that is, it is 4 that the quantity of the second vertical bar 103b, which increases,
Root, as shown in Figure 8.For another example, only with the end of the end of 4 first vertical bar 103a connection cross tubes 101 and sheer pole 102
Portion, and and not set second vertical bar, as shown in Figure 9.In the case, equally pressure can be respectively provided in each support member 110
Force detection unit 120, alternatively, pressure detection unit 120 is arranged in selectivity in part support member 110, it is no longer superfluous herein
It states.
In order to adapt to the different sizes of substrate, as shown in Figure 10, barrier 105 and track are additionally provided with inside the outline border
106, several location holes 106 ' are provided on the track 106, can make the barrier 105 solid by the location hole 106 '
Fixed, the position restriction of the barrier 105 goes out the stowing dimensions of the cassette, can thus cope with the need of various substrate sizes
It asks, improves the utilization rate of Ka Zha.It is again provided with support member 110 on the grid 105, in such cases, on barrier 105
Also pressure detection unit 120 can be set in support member 110.It certainly, can be on barrier 105 in all support members 110
It is respectively provided with pressure detection unit 120, alternatively, pressure detection is arranged in the part support member 110 on barrier 105 in selectivity
Unit 120.
Above-mentioned is to describe the cartridge structure so that support member 110 is the support bar being located on vertical bar as an example, but should recognize
It arriving, the structure of the support member 110 can also change, for example, using plate support structure, as shown in figure 11, support
Component 110 connects 2 adjacent vertical bars, is provided with one or more pressure detection units 120 in each support member 110.It is excellent
Choosing, multiple pressure detection units 120 are set in each support member 110, also, these pressure detection units 120 are uniformly set
It sets and is used for the surface of bearing substrate in support member 110.
In the present embodiment, electricity of the pressure detection unit 120 using electromagnetic relay, in each layer of support member
Magnetic relay is connected to the signal processing unit after can connecting.When substrate does not completely have fragmentation, in support member 110
Electromagnetic relay pressure value is within the scope of default value, electromagnetic relay conducting, generates the complete pressure sensitive letter of substrate
Number.If the imperfect such as fragmentation of substrate, electromagnetic relay pressure value exceeds default value range, and electromagnetic relay is not led
It is logical, then generate the incomplete pressure sensitive signal of substrate.The above-mentioned whether complete pressure sensitive signal of expression substrate is by the letter
Number processing unit is received and is handled.The signal processing unit preferably includes programmable logic controller (PLC), is used to receive
The pressure sensitive signal sent with processing pressure detecting unit 120.Programmable logic controller (PLC) has programming simple and reliable
Property high advantage so that cartridge structure is simple and can quickly and accurately handle the information of substrate, so that card
Casket can detect the integrality for depositing in substrate therein.Testing result can be shown by a display unit.This
The case where sample improves the accuracy of detection efficiency and detection, producers is enabled timely and accurately to grasp substrate.
The card brake structure preferably includes an alarm unit, when judging situation incomplete there are substrate in card release lock,
The alarm unit alarm is to prompt operator to handle.The type of alarm can be the sides such as sound prompting, alarm lamp flashing
Formula.
Correspondingly, the present embodiment also provides a kind of method for detecting substrate integrality, comprising:
Pressure detection unit generates the pressure sensitive signal for indicating substrate integrality；And
Signal processing unit receives the pressure sensitive signal and handles the pressure sensitive signal, to judge card
The integrality of substrate in box structure.
It is electromagnetic relay, signal processing unit with pressure detection unit 120 is programmable below with reference to shown in Fig. 3 and 4
For logic controller, the integrality (this refers to substrates whether there is fragmentation) of the substrate in substrate cartridge is detected
Process introduction.For the ease of confirming the position of substrate, the electromagnetic relay being set in each layer of support member 110 can be carried out
The specific location (namely specific location of substrate storage) of number, the number and support member 110 corresponds.Work as support member
When all substrates of 110 carryings complete (not being crushed unfilled corner), suffered by all electromagnetic relays in this layer of support member 110
For pressure value within the scope of default value, all electromagnetic relay conductings generate the complete pressure sensitive signal of substrate；Work as support
There are incomplete substrate on component 110, the corresponding electromagnetic relay pressure value of the substrate exceeds default value range, will
Generate the incomplete pressure sensitive signal of substrate.These pressure sensitive signals are transmitted to signal processing unit, by signal processing list
Member handles above-mentioned pressure sensitive signal.Specifically, signal processing unit includes the elements such as programmable logic controller (PLC), right
Programmable logic controller (PLC) carries out parameter setting, after programmable logic controller (PLC) receives above-mentioned pressure sensitive signal, to pressure
Inductive signal is handled, and the integrity information and location information of the substrate stored in cassette are obtained.Above- mentioned information can transport to
Display unit shows above- mentioned information by display unit, to realize the detection to the substrate integrality in cassette.Further,
When judging situation incomplete there are substrate in card release lock, the alarm unit alarm is to prompt operator to handle.
It is complete to cartridge structure detecting substrate of the invention by taking pressure detection unit 120 is electromagnetic relay as an example above
The process of property is described, it should be appreciated that pressure detection unit 120 can also be other sensing elements, such as pressure sensing
Device, when there are the pressure value that when incomplete situation, corresponding pressure sensor is detected exception, then capable of emitting expression bases for substrate
The detection to the substrate integrality in cassette equally can be achieved to signal processing unit in the incomplete pressure sensitive signal of plate.
Embodiment two
The present embodiment is described in detail so that detecting unit is optical detecting unit as an example.Figure 12 is provided in this embodiment
The schematic diagram of cartridge structure, Figure 13 are the main view of card brake structure bearing substrate shown in Figure 12.As shown in Figure 12 and Figure 13, cassette
Structure includes outline border, support member 110, optical detecting unit 130 and signal processing unit (not shown).The support
Component 110 is arranged at intervals on two sides opposite inside the outline border, these support members 110 are arranged by layer to limit
Multiple accommodating spaces 110 ', to accommodate simultaneously supporting substrate 200.The optical detecting unit 130 is set in support member 110
And be located on two opposite sides of accommodating space 110 ', to generate the light intensity inductive signal for indicating substrate integrality.It is described
Signal processing unit is connect with the optical detecting unit 130, to receive the light intensity inductive signal, and to above-mentioned light intensity sense
Induction signal is handled, to realize the detection to the integrality of the substrate in cassette.
Specifically, the quantity of light emitting members 131 is identical with the quantity of light-receiving member 132, and light emitting members 131
It is corresponded with light-receiving member 132.The quantity of light emitting members 131 can be one or more, correspondingly, light receiver
The quantity of part 132 may be one or more.
Light emitting members 131 are used to emit detection light to light-receiving member 132, and light-receiving member 132 is for receiving institute
State detection light.The light intensity judgement for the detection light that the signal processing unit is used to be received according to light-receiving member 132 should
Whether the substrate in accommodating space 110 ' is complete (there are crackles), and same 130 light emitting members 131 of optical detecting unit and light connect
Component 132 is received to be respectively arranged at two adjacent support members 110 and be located at two opposite sides of the same accommodating space 110 '
On face (as shown in dotted line frame in Figure 12), specifically, light emitting members 131 are located at the lower surface of upper one layer of support member 110
Upper (i.e. the upper side of accommodating space 110 '), and light-receiving member 132 is located on the upper surface of next layer of support member 110 (i.e.
The downside of the accommodating space 110 ').The light-receiving member 132 of the signal processing unit and the optical detecting unit 130
Connection.
Effect is preferably detected in order to obtain, is preferably respectively provided with optical detecting unit 130 in each support member 110,
Depending on the quantity for the optical detecting unit 130 that each support member 110 is arranged can be according to detecting situation, it can only be arranged one
(as shown in figure 12) also can be set multiple.By taking an optical detecting unit 130 is arranged in each support member 110 as an example, light hair
The quantity of the quantity, light-receiving member 132 of penetrating component 131 is identical with the quantity of support member 110, and each support member 110 is right
Ying Yuyi light emitting members 131 and light-receiving member 132 corresponding with the light emitting members 131, that is, a light emitting members
131 and light-receiving member 132 correspond to a support member 110.It should be understood that can also be only in part support member 110
Upper setting optical detecting unit 130.For example, optical detecting list is only arranged on 4 first vertical bar 103a for being located at outline border quadrangle
Member 130；Alternatively, optical detecting unit 130 is only arranged on 2 second vertical bar 103b for being located at outline border middle position；Again alternatively,
Optical detecting unit 130 is only set on 2 first vertical bar 103a of outline border diagonally opposing corner.The specific row of optical detecting unit 130
Mode for cloth can be found in the arrangement mode of pressure detection unit 120 in embodiment one, and which is not described herein again.
In the present embodiment, the detection light that light emitting members 131 emit is infrared ray, and correspondingly, light emitting members 131 are
Infrared transmitter, light-receiving member 132 are infrared remote receiver.It is to be understood that the detection light is also possible to laser, accordingly
Ground, light emitting members 131 are laser emitter, and light-receiving member 132 is laser pickoff.The detection light can also be purple
Outer light, correspondingly, light emitting members 131 are ultra violet light emitter, and light-receiving member 132 is UV light receiver.
Correspondingly, the present embodiment also provides a kind of method for detecting substrate integrality, comprising:
Optical detecting unit generates the optical sensor signal for indicating substrate integrality；
Signal processing unit receives the optical sensor signal and handles the optical sensor signal, to judge card
The integrality of substrate in box structure.
Below with reference to shown in Figure 12 and 13, light emitting members 131 and light-receiving member are included with optical detecting unit 130
132, for signal processing unit is programmable logic controller (PLC), the integrality to the substrate in substrate cartridge (is mainly here
Referring to that substrate whether there is crackle) process that is detected is introduced.Firstly, can be to being set in each layer of support member 110
Optical detecting unit 130 be numbered, the specific location of the number and support member 110 (namely the specific position of substrate storage
Set) it corresponds.Light emitting members 131 emit detection light to light-receiving member 132, which passes through substrate and reach light
Receiving part 132, light-receiving member 132 receive detection light and the detection light received are converted to light intensity inductive signal,
And then the light intensity inductive signal is sent to signal processing unit by light-receiving member.Since detection light can be produced when passing through substrate
Raw loss, therefore signal processing unit calculates the light for the detection light that light emitting members 131 emit according to the light intensity inductive signal
The difference of the light intensity of the detection light received with light-receiving member 132 by force, and the difference is compared with predetermined threshold, if
Difference is greater than predetermined threshold and then shows the substrate in cassette support member there are crackle etc. is abnormal, if difference is less than or equal to predetermined threshold
Value then shows the substrate in cassette support member, and there is no abnormal.The predetermined threshold can be determined by experiment, for example, test corresponds to
The received detection light linear light of light-receiving member institute of several integrated substrates is strong, and calculates the detection of the transmitting of light emitting members 131
The difference of the light intensity for the detection light that the light intensity and light-receiving member 132 of light receive, to obtain the predetermined threshold.Letter
After number processing unit handles above-mentioned light intensity inductive signal, integrity information and the position of the substrate stored in cassette are obtained
Information, and above- mentioned information are delivered to display unit, above- mentioned information are shown by display unit, to realize to the substrate in cassette
The detection of integrality.Further, when judging situation incomplete there are substrate in card release lock, alarm unit alarm with
Prompt operator's processing.Certainly, the above-mentioned introduction for optical detecting cell operation process is only citing, in fact, also not
Must be only by difference compared with the size of predetermined threshold to determine whether being also possible to directly there are crackle by light-receiving
The light intensity for the detection light that component 132 receives is compared with a default light intensity, as long as the difference of the two exceeds preset range,
Then show that substrate has abnormal such as crackle.
Embodiment three
The present embodiment is described in detail so that detecting unit includes simultaneously pressure detection unit and optical detecting unit as an example.
Figure 14 is the main view of cassette bearing substrate provided in this embodiment.As shown in figure 14, cartridge structure includes outline border, support member
110, pressure detection unit 120, optical detecting unit 130 and signal processing unit (not shown).The pressure detection
Unit 120 is set on the surface of 110 bearing substrate of support member, and generates the pressure sensitive letter for indicating substrate integrality
Number.The signal processing unit is connect with the pressure detection unit 120, to receive the pressure sensitive signal, and to upper
Pressure sensitive signal is stated to be handled.The optical detecting unit 130 is set to support member 110 and is located at accommodating space 110 '
On two opposite surfaces, and generate the light intensity inductive signal for indicating substrate integrality.The signal processing unit and the light
It learns detecting unit 130 to connect, be handled to receive the light intensity inductive signal, and to above-mentioned light intensity inductive signal.This reality
It applies in example, while pressure detection unit 120 and optical detecting unit 130 is set, realized jointly using the two to the base in cassette
The detection of the integrality of plate, more fully, precision is higher for testing result.
It is preferred that being respectively provided with pressure detection unit 120 in each support member 110, can more comprehensively detect in this way
Whether each position of substrate ruptures.The quantity for the pressure detection unit 120 that each support member 110 is arranged can be according to detecting feelings
Depending on condition, it can only be arranged one, also can be set multiple.Likewise, it is preferred that being respectively provided with optics in each support member 110
Detecting unit 130, can more comprehensively detect so each position of substrate whether crackle.Each support member 110 is arranged
Pressure detection unit 120 quantity can according to detecting situation depending on, can only be arranged one, also can be set multiple.But
It should be understood that pressure detection unit 120 can only be arranged in part support member 110, can also only be set in part support member 110
Set optical detecting unit 130.Also, the quantity of pressure detection unit 120 and the quantity of optical detecting unit 130 can be identical,
It can not also be identical.For example, pressure detection unit 120 can be provided in a part of support member 110, and in another part
Optical detecting unit 130 is provided in support member 110；Pressure detection can also be provided in whole support members 110
Unit 120, and optical detecting unit 130 is provided in a part of support member 110, alternatively, can be in a part of support portion
It is provided with pressure detection unit 120 on part 110, and is provided with optical detecting unit 130 in whole support members 110.
The signal processing unit may include the first signal processing unit and second signal processing unit, first letter
Number processing unit is connect with the pressure detection unit 120, to receive the pressure sensitive signal, and to above-mentioned pressure sensitive
Signal is handled.The second signal processing unit is connect with the optical detecting unit 130, to receive the light intensity sense
Induction signal, and above-mentioned light intensity inductive signal is handled.First signal processing unit and second signal processing unit are to above-mentioned
After inductive signal is handled, the integrity information and location information of the substrate stored in cassette are obtained, and above- mentioned information are defeated
It send to display unit, above- mentioned information is shown by display unit, to realize the detection to the substrate integrality in cassette.Further
, when judging situation incomplete there are substrate in card release lock, alarm unit is alarmed to prompt operator to handle.
Correspondingly, the present embodiment also provides a kind of method for detecting substrate integrality, comprising: pressure detection unit generates table
Show that the pressure sensitive signal of substrate integrality, optical detecting unit generate the optical sensor signal for indicating substrate integrality；Signal
Processing unit receives the pressure sensitive signal and optical sensor signal, and to the pressure sensitive signal and optical sensor signal
It is handled, to judge the integrality of substrate in cartridge structure.The course of work and embodiment of the pressure detection unit are a kind of
Seemingly, the course of work of the optical detecting unit is similar with embodiment two, and details are not described herein.
In conclusion the present invention judges Ka Zha using detecing element by the way that detecing element is arranged on card lock support unit
Whether the substrate of interior carrying is intact, for example whether there is the case where being crushed unfilled corner or crackle, by processing module to above-mentioned
Inductive signal is handled, to realize to the detection of the integrality of the substrate in cassette, can effectively avoid incomplete substrate
It threatens into subsequent processing to production efficiency and production security.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For method disclosed in embodiment
For, due to corresponding to the methods disclosed in the examples, so being described relatively simple, related place is referring to method part illustration
?.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (7)
1. one kind can detect the cartridge structure of substrate integrality, including outline border and support member, the support member interval setting
In the accommodating space for being used for bearing substrate on the outline border with restriction, which is characterized in that the cartridge structure further includes that detecting is single
Member and signal processing unit, the detecting unit are set at least partly support member and generate the sense for indicating substrate integrality
Induction signal, the signal processing unit connect with the detecting unit and handle the inductive signal, to realize to card
The detection of the integrality of substrate in box structure；The detection of the substrate integrality inspection cracked including fragmentation and substrate
It surveys；
The detecting unit includes that can be used to detect substrate with the presence or absence of the pressure detection unit of fragmentation and can be used to detect substrate
With the presence or absence of the optical detecting unit of crackle；
The pressure detection unit is set on the surface of the support member bearing substrate；Pressure in the support member
When detecting unit pressure value is within the scope of default value, determine that the substrate carried in the support member does not have fragmentation；When
When pressure detection unit pressure value in the support member exceeds default value range, determines and held in the support member
There are fragmentations for the substrate of load；
The optical detecting unit includes light emitting members and light-receiving member, and the light emitting members are used for the light-receiving
Component transmitting detection light, the light emitting members and light-receiving member of same optical detecting unit are set to two adjacent supports
On component and it is located on two opposite sides of one accommodation space；When the corresponding light hair of the substrate carried in the support member
The difference of the light intensity for the detection light that the light intensity and light-receiving member for penetrating the detection light of component transmitting receive is less than or equal to one
Predetermined threshold determines that the substrate carried in the support member is not cracked；When the substrate carried in the support member
The difference of the light intensity for the detection light that the light intensity and light-receiving member of the detection light of corresponding light emitting members transmitting receive
Greater than a predetermined threshold, determine that the substrate carried in the support member is cracked.
2. cartridge structure as described in claim 1, which is characterized in that the pressure detection unit is electromagnetic relay or pressure
Sensor.
3. cartridge structure as described in claim 1, which is characterized in that be provided with several pressures in each support member
Force detection unit.
4. cartridge structure as described in claim 1, which is characterized in that the detection light is infrared ray, laser or ultraviolet
Line.
5. cartridge structure as described in claim 1, which is characterized in that be provided with several light in each support member
Emission element and several light-receiving members.
6. cartridge structure as described in claim 1, which is characterized in that the cartridge structure further includes that display unit and alarm are single
Member, the display unit and alarm unit are electrically connected with the signal processing unit, and the display unit is for showing base
The integrity information of plate, the alarm unit are used in the imperfect alarm of the substrate.
7. a kind of method for detecting substrate integrality, using cartridge structure described in any one of claims 1 to 6, feature
It is, which comprises
Detecting unit generates the inductive signal for indicating substrate integrality；And
Signal processing unit receives the inductive signal and handles the inductive signal, to judge substrate in cartridge structure
Integrality.
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| CN106597709A (en) * | 2017-01-06 | 2017-04-26 | 武汉华星光电技术有限公司 | Substrate detecting device and display panel processing system and method |
| CN107357236A (en) * | 2017-08-28 | 2017-11-17 | 京东方科技集团股份有限公司 | Substrate bearing device and apparatus for transporting substrate |
| CN110906980B (en) * | 2019-11-14 | 2021-10-08 | 深圳市华星光电半导体显示技术有限公司 | Detection system and detection method |
| CN112945084B (en) * | 2019-12-10 | 2023-01-24 | 合肥欣奕华智能机器股份有限公司 | Line scanning sensor, line scanning detection system and line scanning detection method |
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Application publication date: 20161026 Assignee: Yungu (Gu'an) Technology Co., Ltd.|Bazhou Yungu Electronic Technology Co., Ltd.|Kunshan Institute of technology new flat panel display technology center Co., Ltd Assignor: Kunshan Guo Xian Photoelectric Co., Ltd. Contract record no.: X2019990000157 Denomination of invention: Cartridge structure capable of sensing completeness of substrate and method for sensing completeness of substrate Granted publication date: 20190628 License type: Common License Record date: 20191031 |
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Effective date of registration: 20191206 Address after: No. 2 Xiangshan Avenue, Yongning Street, Zengcheng District, Guangzhou, Guangdong province (the core of Zengcheng economic and Technological Development Zone) Patentee after: Guangzhou Guoxian Technology Co., Ltd Address before: 215300, No. 1, Longteng Road, Kunshan Development Zone, Jiangsu, Suzhou, 4 Patentee before: Kunshan Guo Xian Photoelectric Co., Ltd. |