CN106052053A - Clean room - Google Patents
Clean room Download PDFInfo
- Publication number
- CN106052053A CN106052053A CN201610458574.2A CN201610458574A CN106052053A CN 106052053 A CN106052053 A CN 106052053A CN 201610458574 A CN201610458574 A CN 201610458574A CN 106052053 A CN106052053 A CN 106052053A
- Authority
- CN
- China
- Prior art keywords
- temperature
- clean area
- air
- toilet
- circulation system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/30—Control or safety arrangements for purposes related to the operation of the system, e.g. for safety or monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/62—Control or safety arrangements characterised by the type of control or by internal processing, e.g. using fuzzy logic, adaptive control or estimation of values
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F11/00—Control or safety arrangements
- F24F11/89—Arrangement or mounting of control or safety devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
- F24F13/28—Arrangement or mounting of filters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F2110/00—Control inputs relating to air properties
- F24F2110/10—Temperature
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
- F24F8/108—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering using dry filter elements
Abstract
The present invention discloses a clean room. The clean room comprises a clean area, air filtering equipment, an air circulation system, and also a temperature control system used for controlling the temperature of the clean area to be a set temperature based on a Proportional-Integral-Derivative (PID) control principle.
Description
Technical field
The present invention relates to the toilet that a kind of semiconductor manufacturing, optical field research and development and pharmaceuticals manufacture etc. are used, special
Do not relate to a kind of toilet.
Background technology
At manufacturer or the laboratorys of scientific research such as semiconductor manufacturing, optical field research and development and pharmaceuticals manufactures
In, the reliability of high-quality or scientific research in order to reach product, need to carry out in the environment of a high cleaning.
Meanwhile, a lot of in the case of also need to ambient temperature is controlled, make temperature fluctuation only in a scope the least, therefore,
Need to operate accordingly in the toilet have Temperature-controlled appliance.
Existing toilet is typically all by blower fan and filter (such as high efficiency particle air filter (HEPA) or ultra high efficiency
Air filter (ULPA)) purging toilet, it is achieved the minimizing to toilet's grain density；Temperature controls to be usually to be come with air-conditioning
Realize the temperature to toilet to control.Low, the low-response yet with the output change frequency of air-conditioning, thus temperature controlled
Precision is poor.
Therefore, the control accuracy how improving toilet's temperature is current problem demanding prompt solution.
Summary of the invention
In view of this, a kind of toilet of offer is provided.
The technical scheme of the embodiment of the present invention is achieved in that
Embodiments provide a kind of toilet, including clean area, air filter unit and air circulation system, institute
State toilet also to include:
Temperature control system, for controlling based on PID (PID, Proportional-Integral-Derivative)
Principle processed, and then control the temperature of described clean area at design temperature.
In such scheme, described air filter unit is arranged on the ceiling of described clean area；Described air circulation system
One end be connected with the lower section of described clean area sidewall；The other end of described air circulation system and described air filter unit phase
Logical；Or, described air filter unit is arranged on a sidewall of described clean area；One end of described air circulation system with
The lower section of another sidewall of described clean area connects；The other end of described air circulation system and described air filter unit phase
Logical；
Described air circulation system, sets for the air of described clean area carries out Temperature Treatment output to described air filtration
Standby；
Described air filter unit, after the control that described control blood circulation exports is carried out clean process, output is to described
Clean area.
In such scheme, described air filter unit has superfine fibre filtrate, plays the effect to particle filtering.
In such scheme, according to the requirement of cleanroom cleanliness and the requirement of temperature stability, described air filtration sets
The standby ceiling that can partly be paved with or be paved with completely described clean area.
In such scheme, described temperature control system includes:
Temperature inductor, for detection the first temperature, described first temperature reflects the temperature of described clean area；
Firing equipment；
PID controller, for described first temperature being compared with preset temperature, according to comparative result and computing, controls institute
State the percentage ratio (0-100%) of the output of firing equipment, so that the temperature of described clean area is maintained at described design temperature.
In such scheme, described temperature control system also includes:
The valve being arranged in air circulation system；Wherein,
Described PID controller, is additionally operable to the percentage ratio of output according to described firing equipment, controls the unlatching of described valve
Ratio, makes the portion circulated air in described air circulation system cool down without air-conditioning, to control the temperature of described clean area
It is maintained at described design temperature.
In such scheme, described firing equipment, the first circulating path and second being arranged on described air circulation system follows
Between endless path, or it is arranged between the second circulating path and filter plant, for the air to described air circulation system
Heat；Wherein,
The other end of described first circulating path is connected with blower fan；The other end of described second circulating path and described air filtration
Equipment communicates, so that the air output in described air circulation system is to described air filter unit.
In such scheme, described firing equipment, it is arranged on the air-conditioning rear of described air circulation system, for through institute
The air stating air circulation system heats, and exports to described blower fan；
The other end of described second circulating path communicates with described air filter unit, so that the sky in described air circulation system
Gas output is to described air filter unit.
In such scheme, the lower section of described clean area sidewall arranges the return path communicated with described air circulation system.
In such scheme, the number of described return path is at least one.
In such scheme, the bottom, floor of described clean area is formed with the return cavity communicated with described air circulation system
Room.
In such scheme, the number of described return chamber is at least one.
The toilet that the embodiment of the present invention provides, toilet includes: clean area, air filter unit and air circulation
System, described toilet also includes: temperature control system, and for based on PID control principle, the temperature controlling described clean area exists
Design temperature, by described temperature control system based on the control to described clean area temperature of the PID control principle, can be effectively
Keep the stability of described clean area temperature.
Accompanying drawing explanation
For the technical scheme being illustrated more clearly that in the embodiment of the present invention, in embodiment being described below required for make
Accompanying drawing be briefly described, it is clear that, below describe in accompanying drawing be only some embodiments of the present invention, for this
For the those of ordinary skill in field, on the premise of not paying creative work, it is also possible to obtain it according to these embodiments
His embodiment, wherein:
Fig. 1 is the overall structure schematic diagram of embodiment of the present invention toilet；
Fig. 2 is the first cleanroom structures schematic diagram of the embodiment of the present invention；
Fig. 3 is embodiment of the present invention the second cleanroom structures schematic diagram；
Fig. 4 is the third cleanroom structures schematic diagram of the embodiment of the present invention；
Fig. 5 is the 4th kind of cleanroom structures schematic diagram of the embodiment of the present invention；
Fig. 6 is the 5th kind of cleanroom structures schematic diagram of the embodiment of the present invention；
Fig. 7 is the 6th kind of cleanroom structures schematic diagram of the embodiment of the present invention；
Fig. 8 is the 7th kind of cleanroom structures schematic diagram of the embodiment of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings and the present invention is described in further detail by embodiment again.
Realize owing to the temperature of current toilet controls general air-conditioning, and the defect that air-conditioning exists due to self is (defeated
Go out that changed power frequency is low, low-response) so that the accuracy of temperature control of temperature is poor, the most temperature controlled poor stability.Concrete next
Saying, in the quiescent state, such as toilet does not has (outdoor ring in the case of heat load situation and outdoor environment temperature fluctuation not quite in toilet
Border temperature fluctuation can cause air conditioner refrigerating or heating efficiency fluctuation), temperature stability just can reach +/-0.5 DEG C；And toilet
In a dynamic state, there is a heat load such as toilet, and heat load has fluctuation situation or the bigger situation (ratio of outdoor temperature fluctuation ratio
As Northern Part of China day and night temperature is big, the refrigerating efficiency of air-conditioning can be affected), temperature stability does not reaches far away +/-05 DEG C, clean
The temperature stability of clean room can be worse.
Based on this, the structure of toilet is improved by the embodiment of the present invention, to realize more accurate to toilet's temperature
Control.In various embodiments of the present invention: toilet increase temperature control system, by described temperature control system based on
PID control principle, controls the temperature of described clean area at design temperature.
The embodiment of the present invention provides a kind of toilet, as it is shown in figure 1, this toilet includes: clean area 11, air filtration set
For 12, air circulation system 13 and temperature control system 14；Wherein,
Described clean area 11 is provided with manufacture equipment or scientific research apparatus M；
Described air circulation system 13 is circulated (carrying out Temperature Treatment) to the air of described clean area 11, with output to described
Air filter unit 12；
Described air filter unit 12 exports to institute after the control of described control blood circulation 13 output carries out clean process
State clean area 11；
Temperature control system 14, based on PID control principle, controls the temperature of described clean area 11 at design temperature.
Wherein, in one embodiment, as in figure 2 it is shown, described air filter unit 12 is arranged on the ceiling of described clean area
On；One end of described air circulation system 13 is connected with the lower section of described clean area 11 sidewall；Described air circulation system 13
The other end communicates with described air filter unit 12.
Described air filter unit 12 has superfine fibre filter structure, and therefore, it has the effect to particle filtering.
Specifically, as in figure 2 it is shown, described air circulation system 13 includes: first circulating path the 131, second circulating path
132, the 3rd circulating path 133, air conditioning system 135, blower fan 136.Wherein,
There is the 3rd circulating path 133 lower section of described clean area 11 sidewall, connects air conditioning system 135, sets above air conditioning system 135
Being equipped with blower fan 136, the air of toilet 11 exports to air conditioning system 135 through the 3rd circulating path 133, right by air conditioning system 135
Air exports to blower fan 136 after cooling down；Air after blower fan 136 supercharging passes sequentially through the first circulating path 131, second again
Circulating path 132, arrives High-cfficiency Filtration equipment 12, constitutes circulation；Air purging after being purified by High-cfficiency Filtration equipment 12 is clean
Clean district 11.
Here, during actual application, the 3rd circulating path 133 on sidewall can be multiple, and connects air conditioning system together
135, in this manner it is achieved that the more preferable temperature homogeneity in clean area 11 and stability.
Here, during actual application, the 3rd circulating path 133 can connect and have exhaust line 139.Connect air conditioning system
5th circulating path 134 of 135 can input fresh air, enters air circulation system 13 after air conditioning system 135.Aerofluxus
Pipeline 139 and the 5th circulating path 134 jointly play and keep clean area 11 to have the effect that fresh air supplements.
As in figure 2 it is shown, described temperature control system 14 includes:
Temperature inductor 141, for detection the first temperature, described first temperature reflects the temperature of described clean area 11；
Firing equipment 142；
PID controller 143, for described first temperature being compared with preset temperature, according to comparative result and computing, controls
The percentage ratio (0-100%) of described firing equipment 142 output, so that the temperature of described clean area 11 is maintained at described setting
Temperature.
Wherein, in described temperature inductor 141 is arranged on described 3rd circulating path 133, in order to detect the first temperature；
Described first temperature can reflect the mean temperature of clean area 11.
During actual application, described temperature inductor 141 can be thermocouple or thermal resistance.
Described firing equipment 142 can be finned Resistant heating pipe or ceramic thermal resistance (PTC), can be fast
Speed heating quickly heat exchange.
Described firing equipment 142, is arranged on the first circulating path 131 and the second circulation road of described air circulation system 13
Between footpath 132, for the air of described air circulation system is heated；Wherein,
The other end of described first circulating path 131 is connected with blower fan 136；The other end of described second circulating path 132 and institute
State air filter unit 12 to communicate, so that the air output in described air circulation system 13 is to described air filter unit 12.
(real-time sampling rate can be more than 1Hz to the temperature that described temperature inductor 141 records, and sample rate is the highest, temperature control in real time
The fastest) it is input to PID controller 143, PID controller 143 passes through temperature and the preset temperature that C.T induction apparatus 141 is measured
With according to the parameter computing preset, obtain value of feedback, the most automatically make according to value of feedback firing equipment 12 with certain heating power
(output) works.The temperature stabilization of clean area 11 can be controlled +/-0.1 DEG C in this manner.Owing to temperature controls system
System 14 has sufficiently fast response (sample rate is more than 1Hz, and corresponding response time is faster than 1 second), is the most no matter to have in clean area 11
The fluctuation of thermal source, or the refrigerating efficiency fluctuation of the air conditioning system 135 caused due to environmental temperature fluctuation, temperature control system 14
Feedback control can be carried out in time, keep the temperature stabilization of clean area 11.
In some cases, the temperature stabilization of clean area 11 to be maintained, the heating power of firing equipment 142 needs very big,
Add and produce and the cost of research.Such as, in some season northerly, day and night temperature is big, manufactures equipment or scientific research apparatus M
Diurnally using, even if air conditioning system 135 operates with lowest power at night, firing equipment 142 needs for the most high-power
Heating could maintain the preset temperature of clean area 11.
Based on this, in one embodiment, described air circulation system 13 can also include:
Valve 137；Wherein, described valve 137 is arranged in the 4th circulating path 138.
Described PID controller 143, is additionally operable to the output according to described firing equipment, and combines described first temperature,
Control the unlatching ratio of described valve 137, make portion circulated air in described air circulation system without cooling, to control
The temperature of described clean area is maintained at described design temperature.
PID controller 143 can be automatically adjusted controllable valve according to the percentage ratio height of the heating power of firing equipment 142
137 ratios opened, make portion circulated air cool down without air conditioning system 135, are directly entered air filter unit 12, carry out
Clean process.As long as so firing equipment 142 just can make clean area 11 maintain preset temperature with relatively low heating power.This
Pattern can be greatly saved operation power charge in the area that day and night temperature is bigger.
During actual application, described PID controller 143 can also individually control controllable valve 137, to realize clean area 11
Temperature control.
Described 4th circulating path 138 can be understood as a bypass circuit path.
In one embodiment, as it is shown on figure 3, described air filter unit 12 can be paved with the ceiling of described clean area 11,
This design can obtain higher cleanliness factor in clean area 11, and the more uniform temperature of clean area 11 is with stable.
In one embodiment, as shown in Figure 4, the bottom, floor 111 of described clean area 11 is formed and circulates with described air
The return chamber 112 that system communicates.
Here, during actual application, the number of described return chamber 112 can be at least one.
It is provided with return this design of chamber 112 and can obtain higher cleanliness factor in clean area 11, and clean
The more uniform temperature in district 11 is with stable.
In one embodiment, as shown in Figs. 5 to 7, described firing equipment 143, it is arranged on described air circulation system 13
Above blower fan 136, for the air of the second circulating path 132 through described air circulation system 13 is heated and defeated
Go out to described blower fan 136；
The other end of described second circulating path 136 communicates with described air filter unit 12, so that described air circulation system
Air output in 13 is to described air filter unit 12.
Blower fan 136 and air filter unit 12 are combined composition blower fan filtering unit (FFU), firing equipment 142
Place near unit.The circulating path length that this design is passed through due to the air decreasing heating, so to clean area 11
Temperature control response can faster.Also shorten the circulating path length that pressurized air passes through simultaneously, decrease windage, also reduce simultaneously
Power consumption.
It should be understood that in Fig. 2 to Fig. 7, be to purge clean area 11 from top to bottom based on pure air, in certain some life
Produce or scientific research occasion, it is also possible to pure air is laterally purged clean area 11.As all settings all, simply Fig. 2's to Fig. 7
Design drawing 90-degree rotation is placed.As shown in Figure 8, air filter unit 12 is placed on a sidewall of toilet, and cleaning is empty
Gas laterally purges clean area 11, and remaining is arranged as Fig. 2.Fig. 3 to Fig. 7 can also the rest may be inferred.
From the above description, it will be seen that the toilet that the embodiment of the present invention provides, toilet can be automatically controlled
Temperature, +/-0.1 DEG C, improves the temperature stability of toilet.
The toilet that the embodiment of the present invention provides, toilet includes: clean area, air filter unit and air circulation
System, described toilet also includes: temperature control system, and for based on PID control principle, the temperature controlling described clean area exists
Design temperature, by described temperature control system based on the control to described clean area temperature of the PID control principle, can be effectively
Keep the stability of described clean area temperature.
Described air filter unit 12 is paved with the ceiling of described clean area 11, and this design can obtain in clean area 11
Obtain higher cleanliness factor, and the more uniform temperature of clean area 11 is with stable.
Described PID controller 143, is additionally operable to the percentage ratio of output according to described firing equipment 142, controls valve
The unlatching ratio of 137, make the portion circulated air in described air circulation system without cooling, to control described clean area
Temperature is maintained at described design temperature, so, can be effectively reduced the energy consumption of equipment.
The bottom, floor 111 of described clean area 11 is formed with the return chamber 112 communicated with described air circulation system, as
This, can make clean area 11 obtain higher cleanliness factor, and the more uniform temperature of clean area 11 is with stable.
Described firing equipment 143, is arranged on above the blower fan 136 of described air circulation system 13, for through described
The air of the second circulating path 132 of air circulation system 13 heats, and exports to described blower fan 136；Described second follows
The other end of endless path 136 communicates with described air filter unit 12, so that the air output in described air circulation system 13
To described air filter unit 12, owing to decreasing the circulating path length that the air of heating passes through, so to clean area 11
Temperature control response can faster.Also shorten the circulating path length that pressurized air passes through simultaneously, decrease windage, also reduce simultaneously
Power consumption.
The above, only presently preferred embodiments of the present invention, it is not intended to limit protection scope of the present invention.
Claims (10)
1. a toilet, including clean area, air filter unit and air circulation system, it is characterised in that described cleaning
Room also includes:
Temperature control system, utilizes based on PID PID control principle, and the temperature controlling described clean area is setting temperature
Degree.
Toilet the most according to claim 1, it is characterised in that described air filter unit is arranged on described clean area
On ceiling；One end of described air circulation system is connected with the lower section of described clean area sidewall；Described air circulation system another
One end communicates with described air filter unit；Or, described air filter unit is arranged on a sidewall of described clean area；
One end of described air circulation system is connected with the lower section of another sidewall of described clean area；Another of described air circulation system
End communicates with described air filter unit；
Described air circulation system, sets for the air of described clean area carries out Temperature Treatment output to described air filtration
Standby；
Described air filter unit, after the control that described control blood circulation exports is carried out clean process, output is to described
Clean area.
Toilet the most according to claim 1 and 2, it is characterised in that described temperature control system includes:
Temperature inductor, for detection the first temperature, described first temperature reflects the temperature of described clean area；
Firing equipment；
PID controller, for described first temperature being compared with preset temperature, controls described heating according to comparative result and sets
The percentage ratio of standby output, so that the temperature of described clean area is maintained at described design temperature.
Toilet the most according to claim 3, it is characterised in that described temperature control system also includes:
The valve being arranged in air circulation system；Wherein,
Described PID controller, is additionally operable to the percentage ratio according to described firing equipment output, controls the unlatching ratio of described valve
Example, makes portion circulated air in described air circulation system without cooling, is maintained at controlling the temperature of described clean area
Described design temperature.
Toilet the most according to claim 3, it is characterised in that described firing equipment, is arranged on described air cyclic system
Between first circulating path and second circulating path of system, for the air of described air circulation system is heated；Wherein,
The other end of described first circulating path is connected with blower fan；The other end of described second circulating path and described air filtration
Equipment communicates, so that the air output in described air circulation system is to described air filter unit.
Toilet the most according to claim 3, it is characterised in that described firing equipment, is arranged on described air cyclic system
Above the blower fan of system, for the air of the second circulating path through described air circulation system is heated, and export extremely
Described blower fan；
The other end of described blower fan communicates with described air filter unit, so that the air in described air circulation system exports extremely
Described air filter unit.
Toilet the most according to claim 3, it is characterised in that the lower section of described clean area sidewall is provided with and described sky
The return path that gas blood circulation communicates.
Toilet the most according to claim 7, it is characterised in that the number of return path is at least one.
Toilet the most according to claim 3, it is characterised in that the bottom, floor of described clean area is formed and described sky
The return chamber that gas blood circulation communicates.
Toilet the most according to claim 9, it is characterised in that the number of described return chamber is at least one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610458574.2A CN106052053A (en) | 2016-06-23 | 2016-06-23 | Clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610458574.2A CN106052053A (en) | 2016-06-23 | 2016-06-23 | Clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106052053A true CN106052053A (en) | 2016-10-26 |
Family
ID=57168890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610458574.2A Pending CN106052053A (en) | 2016-06-23 | 2016-06-23 | Clean room |
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| Country | Link |
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| CN (1) | CN106052053A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108828904A (en) * | 2018-06-27 | 2018-11-16 | 深圳市华星光电半导体显示技术有限公司 | purification device and exposure machine |
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| CN201289168Y (en) * | 2008-08-06 | 2009-08-12 | 惠州中京电子科技有限公司 | Constant air conditioning punification room air treatment device |
| CN203315386U (en) * | 2013-07-02 | 2013-12-04 | 山东新华医疗器械股份有限公司 | Temperature control device of hot air sterilizer |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2739523Y (en) * | 2003-12-15 | 2005-11-09 | 宁波惠康国际工业有限公司 | Air conditioner purifying and sterilizing machine control system |
| CN1707188A (en) * | 2004-06-08 | 2005-12-14 | 东莞市广大制冷有限公司 | Whole-fresh air precision air conditioning system |
| CN201289168Y (en) * | 2008-08-06 | 2009-08-12 | 惠州中京电子科技有限公司 | Constant air conditioning punification room air treatment device |
| CN201279461Y (en) * | 2008-10-09 | 2009-07-29 | 苏州克林络姆空调系统工程有限公司 | Clean room |
| CN101476763A (en) * | 2009-01-22 | 2009-07-08 | 苏州克林络姆空调系统工程有限公司 | Energy-saving control method of clean room and clean room thereof |
| CN203315386U (en) * | 2013-07-02 | 2013-12-04 | 山东新华医疗器械股份有限公司 | Temperature control device of hot air sterilizer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108828904A (en) * | 2018-06-27 | 2018-11-16 | 深圳市华星光电半导体显示技术有限公司 | purification device and exposure machine |
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Application publication date: 20161026 |