CN106017371A - Surface defect opening width measurement apparatus and method based on laser ultrasonic sound - Google Patents

Surface defect opening width measurement apparatus and method based on laser ultrasonic sound Download PDF

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Publication number
CN106017371A
CN106017371A CN201610524370.4A CN201610524370A CN106017371A CN 106017371 A CN106017371 A CN 106017371A CN 201610524370 A CN201610524370 A CN 201610524370A CN 106017371 A CN106017371 A CN 106017371A
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laser
probe
defect
workpiece
pulse laser
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CN106017371B (en
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居冰峰
王传勇
薛茂盛
朱吴乐
孙泽清
孙安玉
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Zhejiang University ZJU
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention discloses a surface defect opening width measurement apparatus and method based on laser ultrasonic sound. The method comprises the following steps: 1, a pulse laser probe and a laser interferometer probe are placed at one side, provided with a defect, on the surface of a workpiece; 2, a pulse laser excites surface acoustic waves on the surface of the workpiece, a laser interferometer respectively measures direct surface signals R1 and surface wave signals RR1 reflected from the defect; 3, a two-dimensional displacement platform moves under control to enable the pulse laser probe and the laser interferometer probe to be at the other side of the surface defect; 3, the second step is repeated, the interferometer measures direct surface wave signals R2 and surface wave signals RR2 reflected from the defect; and 5, an opening width of the surface defect is calculated through arrival time of the direct surface signals and the defect echo signals measured by the interferometer for two times and a motion displacement d of a two-dimensional motion platform. The measurement apparatus and method can be applied to in-place detection and can accurately measure widths of openings for opening defects with different internal shapes.

Description

The measurement apparatus of surface defect A/F based on laser-ultrasound and method thereof
Technical field
The present invention relates to field of non destructive testing, special envoy relates to a kind of surface defect A/F based on laser-ultrasound Measurement apparatus and method thereof.
Background technology
Now, in fields such as machine-building, metallurgy, Aero-Space, the crudy of material is required more and more higher.Material The defect caused in early defect or the course of processing should be timely detected out and process removal or scrap, if using band Defective workpiece, in use, owing to material stress heat damage can constantly accumulate final catastrophic failure, gives national warp Ji is brought huge loss and brings threat to people's life security.So, fault in material is carried out economic and practical, the most effective Non-Destructive Testing seem particular importance.Exploitation carries out the technology of Non-Destructive Testing and has also attracted increasing pass fault in material Note.
Surface defect is that strong phenomenon is opened on the top layer that material produces under capillary effect.Many scholars are devoted to use Surface acoustic wave detection surface defect, because acoustic surface wave energy is concentrated mainly near surface, and has non-dispersive, unattenuated etc. Feature.Sudden change based on material this body structure harmony impedance property when utilizing surface acoustic wave to reach surface defect areas and produce The features such as reflection, diffraction and decay carry out the information such as the position of inverting defect, the degree of depth and trend.Surface acoustic wave can use surface wave Transducer produces, but owing to needs use couplant, can not accomplish real non-cpntact measurement.Laser-ultrasound is to use pulse Laser produces ultrasonic at material internal, has non-contacting feature, is devoted to research for these a lot of scholars and uses laser-ultrasound inspection The method surveying surface defect.
In existing research, Copper uses pulsed line-source laser excitating surface ripple, with capacitance type sensor, in experiment On observed the scattering waveform occurred when surface wave runs into surface rectangle groove, and obtained calculating square by the surface wave echo time The formula of shape groove depth size；Tittmann etc. select the chi of the Rayleigh wave detection surface tiny flaw of upper frequency experimentally Very little；It is ultrasonic that Achenbach etc. have invented scanning laser line source laser, can quickly detect surface defect positions, and for little Defect in surface wave wavelength also has preferable effect；But more scholar is also directed to study the degree of depth of surface defect, By surface wave quantitative relationship between the reflection and transmission coefficients and the surface defect degree of depth of fault location.
For some occasion, need to measure the A/F of surface defect.After to Surface Flaw depth survey, as Surface defect A/F to be measured by fruit, needs in workpiece again clamping to other measurement systems, inefficiency.For This is it is proposed that a kind of surface defect A/F detection method based on laser-ultrasound, can be in clamped one time, with swashing After the light ultrasonic method detection surface defect degree of depth, the method is used to obtain the A/F of surface defect.
Summary of the invention
It is an object of the invention to, in some occasion needing to measure surface defect A/F, overcome workpiece to measure at other What in system, secondary clamping caused is time-consuming, it is provided that the measurement apparatus of a kind of surface defect A/F based on laser-ultrasound and Method.Its concrete scheme is as follows:
The measuring method of a kind of surface defect A/F based on laser-ultrasound, comprises the following steps:
1) pulse laser probe and laser interferometer probe placement are in the side of Surface Flaw, and laser interferometer Pop one's head between pulse laser probe and surface defect；
2) utilizing pulse laser probe to motivate surface acoustic wave at surface of the work, recycling laser interference instrument probe is successively Record through surface wave signal R respectively1With the surface wave signal RR returned from defect reflection1, then obtain through surface wave signal R1 Arrive the time t of interferometer probeR1And the surface wave signal RR returned from defect reflection1Arrive the time t of interferometer probeRR1；
3) by pulse laser probe and laser interferometer probe placement at the opposite side of Surface Flaw, and laser is done Interferometer probe is between pulse laser probe and surface defect；Repeat step 2), obtain through surface wave signal R2With from The surface wave signal RR that defect reflection returns2, then obtain through surface wave signal R2Arrive the time t of interferometer probeR2And The surface wave signal RR returned from defect reflection2Arrive the time t of interferometer probeRR2；
4) popped one's head in through surface wave signal that twice measurement obtain and flaw echoes time of advent by interferometer, with And step 1) and 3) in pulse laser probe distance between the supersonic source that surface of the work motivates, then calculate twice survey The A/F w of the surface defect on interferometer probe detection point line in amount.
As preferably, described workpiece is placed on two-dimension moving platform, by the mobile change step of two-dimension moving platform Rapid 1) and 3) in the supersonic source that motivates at surface of the work of pulse laser probe relative to the position of surface defect, and supersonic source Parallel with the moving direction of surface defect with the line of sensing point.
As preferably, the exciting method of described supersonic source is: it is saturating through post that pulse laser probe sends pulse laser Mirror is focused into line source laser, is radiated at surface of the work and motivates surface acoustic wave.
Further, the opening of described surface defect is rectangular, and described line source laser and surface defect length side To parallel.
As preferably, described described step 4) in the A/F w computing formula of surface defect be:
w = d - 1 2 v R ( t R 1 + t R R 1 + t R R 2 - t R 2 )
Wherein d is step 1) and 3) in pulse laser probe distance between the supersonic source that surface of the work motivates, vR For surface acoustic wave spread speed within the workpiece.
As preferably, described surface defect interior shape does not limits.
As preferably, described thickness of workpiece is more than 5mm.
A kind of measurement apparatus of the surface defect A/F based on laser-ultrasound realizing said method, including: pulse Laser instrument, laser interference instrument probe and oscillograph；Wherein pulse laser is for motivating surface acoustic wave at surface of the work；Laser Interferometer probe is connected with oscillograph, for receiving through surface wave signal and the surface wave signal returned from defect reflection.
As preferably, described workpiece is positioned on two-dimension moving platform, is used for driving workpiece relative to pulse laser Move with laser interference instrument probe.
As preferably, the distance of the position of described laser interference instrument probe to surface of the work is on laser interference instrument probe The focal length of condenser lens.
The present invention having the beneficial effect that in the occasion needing to measure the A/F of surface defect relative to prior art. Traditional measurement method is, after to Surface Flaw depth survey, is surveyed by workpiece again clamping to surface defect A/F In amount system (such as microscopic system), inefficiency.The present invention proposes a kind of surface defect opening width based on laser-ultrasound Degree detection devices and methods therefor, with after the laser-ultrasound method detection surface defect degree of depth, can use this in clamped one time The method that invention proposes obtains the A/F of surface defect.
Accompanying drawing explanation
Fig. 1 is the measurement apparatus of surface defect A/F based on laser-ultrasound and a kind of detection state of method is shown It is intended to；
Fig. 2 is the measurement apparatus of surface defect A/F based on laser-ultrasound and method another kind detection state is shown It is intended to；
Fig. 3 is the measurement apparatus of surface defect A/F based on laser-ultrasound and method line source laser thereof and sensing point Schematic diagram；
In figure, workpiece 1, two-dimension moving platform 2, pulse laser probe 3, laser interference instrument probe 4, oscillograph 5, surface Defect 6, line source laser 7, sensing point 8.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is illustrated.
Embodiments of the present invention relate to a kind of surface defect A/F based on laser-ultrasound detection device and Method, the method utilizes the pulse laser being focused into line source to produce surface wave at surface of the work, and surface wave runs into defect and produces Scatter echo signal, by laser interferometer to incidence surface ripple signal and the reception of scattered signal and calculating, thus realize right The detection of Surface Flaw A/F.
As it is shown in figure 1, the measurement apparatus used in the present invention, including: pulse laser 3, laser interference instrument probe 4 and show Ripple device 5；Wherein pulse laser 3 is for going out surface acoustic wave at workpiece 1 surface actuator；Laser interference instrument probe 4 and oscillograph 5 phase Even, for receiving through surface wave signal and the surface wave signal returned from defect reflection.Workpiece 1 is positioned over two-dimension moving platform 2 On, it is used for driving workpiece 1 to move relative to pulse laser 3 and laser interference instrument probe 4.The position of laser interference instrument probe 4 The focal length that distance is the condenser lens on laser interference instrument probe 4 to workpiece 1 surface.
The detection method basic principle of the surface defect A/F based on laser-ultrasound of the present invention and summary of the invention portion Divide consistent, specifically comprise the following steps that
1) workpiece 1 with surface defect 6 is placed on two-dimension moving platform 2, make the long limit of workpiece and minor face respectively with Two directions of motion of two-dimension moving platform 2 are parallel；Pulse laser probe 3 and laser interference instrument probe 4 are placed on workpiece The left side (as shown in Figure 1) of surface defect 6, laser interference instrument probe 4 pulse laser probe 3 and surface defect 6 between, and Laser interference instrument probe 4 is vertical with the Opening length direction of surface defect 6 (such as Fig. 1 institute with the line of pulse laser probe 3 Show)；
2) pulse laser probe 3 sends pulse laser, in alignment through post lens focus, and line source laser 7 with Surface defect 6 Opening length direction parallel (as shown in Figure 3), line source laser 7 is radiated at workpiece 1 surface actuator and goes out surface acoustic wave, Laser interference instrument probe 4 successively records through surface wave signal R respectively1With the surface wave signal RR returned from defect reflection1, and show Show in oscillograph 5, obtain through surface wave signal R1Arrive the time t of interferometer probe 4R1, the surface returned from defect reflection Ripple RR1Arrive the time t of interferometer probe 4RR1；
3) control the two-dimension displacement platform 2 negative direction moving displacement d to x-axis, make pulse laser probe 3 and laser interference Instrument probe 4 is on the right side (as shown in Figure 2) of surface defect；
4) step 2 is repeated), interferometer probe 4 successively records through surface wave signal R2With the surface returned from defect reflection Ripple signal RR2, it is similarly obtained through surface wave signal R2Arrive the time t of interferometer probe 4R2, the surface returned from defect reflection Ripple RR2Arrive the time t of interferometer probe 4RR2；
5) the through surface wave signal obtained by interferometer probe 4 twice measurement and the surface wave returned from defect reflection are believed Number time of advent, and two-dimension moving platform move distance, calculating the A/F w of surface defect, computing formula is as follows:
w = d - 1 2 v R ( t R 1 + t R R 1 + t R R 2 - t R 2 )
Certain aluminium block surface defect A/F is detected by method described above, wherein the long 100mm of aluminium block, wide 50mm, Thick 10mm, obtaining surface defect width with KEYENCE VHX-600 measurement is that 873.18 μm are as reference.Aluminium block is placed on two On maintenance and operation moving platform, and excite with the left side of pulse laser probe and the interferometer probe surface defect on aluminium block respectively and Receiving surface ripple, interferometer probe successively will receive the surface wave R directly arrived from excitaton source and the table returned from defect reflection Face ripple RR, the signal detected is transferred to oscillograph, data is preserved and read on computers, obtaining surface by interferometer probe Ripple direct wave time tR1With echo time tRR1.Control two-dimension moving platform moving displacement d so that pulse laser probe and Interferometer probe completes above-mentioned steps on the right side of defect and obtains tR2And tRR2。
Final measurement and relative error thereof are as shown in the table:
As can be seen from the table, the present invention has the highest essence for the A/F testing result of System of Detecting Surface Defects For Material Degree.The present invention needs to take off testing sample from processing to be put into district to be measured unlike being measured microscopically, and the present invention can be real Position detection now, improves detection efficiency.

Claims (10)

1. the measuring method of a surface defect A/F based on laser-ultrasound, it is characterised in that comprise the following steps:
1) pulse laser probe (3) and laser interference instrument probe (4) are placed on the side of workpiece (1) surface defect, and laser Interferometer probe (4) is between pulse laser probe (3) and surface defect (6)；
2) utilize pulse laser probe (3) to go out surface acoustic wave at workpiece (1) surface actuator, recycle laser interference instrument probe (4) successively through surface wave signal R is recorded respectively1With the surface wave signal RR returned from defect reflection1, then obtain through surface Ripple signal R1Arrive the time t of interferometer probe (4)R1And the surface wave signal RR returned from defect reflection1Arrival interferometer is visited The time t of head (4)RR1；
3) pulse laser probe (3) and laser interference instrument probe (4) are placed on the opposite side of workpiece (1) surface defect, and Laser interference instrument probe (4) is between pulse laser probe (3) and surface defect (6)；Repeat step 2), obtain through table Face ripple signal R2With the surface wave signal RR returned from defect reflection2, then obtain through surface wave signal R2Arrival interferometer is popped one's head in (4) time tR2And the surface wave signal RR returned from defect reflection2Arrive the time t of interferometer probe (4)RR2；
4) by the interferometer probe through surface wave signal that obtains of (4) twice measurement and flaw echoes time of advent, with And step 1) and 3) in pulse laser probe (3) distance between the supersonic source that workpiece (1) surface actuator goes out, then calculate The A/F w of the surface defect on interferometer probe (4) sensing point (8) line in twice measurement.
2. the method for claim 1, it is characterised in that: described workpiece (1) is placed on two-dimension moving platform (2), By the mobile change step 1 of two-dimension moving platform (2)) and 3) in pulse laser probe (3) go out at workpiece (1) surface actuator Supersonic source relative to the position of surface defect (6), and the movement of the line of supersonic source and sensing point (8) and surface defect (6) Direction is parallel.
3. the method for claim 1, it is characterised in that: the exciting method of described supersonic source is: pulse laser is visited Head (3) sends pulse laser and becomes line source laser (7) through post lens focus, is radiated at workpiece (1) surface and motivates surface sound Ripple.
4. method as claimed in claim 3, it is characterised in that: the opening of described surface defect (6) is rectangular and described Line source laser (7) is parallel with surface defect (6) length direction.
5. the method for claim 1, it is characterised in that: described described step 4) in the A/F of surface defect W computing formula is:
w = d - 1 2 v R ( t R 1 + t R R 1 + t R R 2 - t R 2 )
Wherein d is step 1) and 3) in pulse laser probe (3) distance between the supersonic source that workpiece (1) surface actuator goes out, vR For surface acoustic wave spread speed in workpiece (1).
6. the method for claim 1, it is characterised in that: described surface defect (6) interior shape does not limits.
Method the most according to claim 1, it is characterised in that described workpiece (1) thickness is more than 5mm.
8. realize a measurement apparatus for the surface defect A/F based on laser-ultrasound of method described in claim 1, its It is characterised by, including: pulse laser (3), laser interference instrument probe (4) and oscillograph (5)；Wherein pulse laser (3) is used In going out surface acoustic wave at workpiece (1) surface actuator；Laser interference instrument probe (4) is connected with oscillograph (5), is used for receiving through table Face ripple signal and the surface wave signal returned from defect reflection.
9. the measurement apparatus of surface defect A/F based on laser-ultrasound as claimed in claim 8, it is characterised in that institute The workpiece (1) stated is positioned on two-dimension moving platform (2), is used for driving workpiece (1) to do relative to pulse laser (3) and laser Interferometer probe (4) is mobile.
10. the measurement apparatus of surface defect A/F based on laser-ultrasound as claimed in claim 8, it is characterised in that The position of described laser interference instrument probe (4) is that the focusing on laser interference instrument probe (4) is saturating to the distance on workpiece (1) surface The focal length of mirror.
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CN107356674A (en) * 2017-08-17 2017-11-17 福建省永正工程质量检测有限公司 A kind of construction steel structure supersonic detection device
CN107688051A (en) * 2017-08-15 2018-02-13 浙江大学 A kind of measuring method of the subsurface defect width based on Laser thermo-elastic generated surface acoustic waves
CN107747922A (en) * 2017-09-30 2018-03-02 浙江大学 A kind of sub-surface based on laser-ultrasound lacks the measuring method of buried depth
CN108181241A (en) * 2018-01-02 2018-06-19 北京汽车股份有限公司 A kind of Pendant Structure Of Vehicle defect detecting system and detection method
CN111735774A (en) * 2020-07-14 2020-10-02 西安交通大学 Method for quantifying size of crack defect based on time-distance curve of laser ultrasonic surface wave
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CN114113133A (en) * 2021-10-09 2022-03-01 宝宇(武汉)激光技术有限公司 Non-planar workpiece surface defect nondestructive testing device
CN114280157A (en) * 2021-12-28 2022-04-05 杭州电子科技大学 Sub-surface crack length quantitative detection method based on laser excitation surface wave
CN114295731A (en) * 2021-12-28 2022-04-08 杭州电子科技大学 Method for measuring depth of subsurface defect based on laser excitation longitudinal wave
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CN107688051A (en) * 2017-08-15 2018-02-13 浙江大学 A kind of measuring method of the subsurface defect width based on Laser thermo-elastic generated surface acoustic waves
CN107688051B (en) * 2017-08-15 2019-08-16 浙江大学 A kind of measurement method of the subsurface defect width based on Laser thermo-elastic generated surface acoustic waves
CN107356674A (en) * 2017-08-17 2017-11-17 福建省永正工程质量检测有限公司 A kind of construction steel structure supersonic detection device
CN107747922A (en) * 2017-09-30 2018-03-02 浙江大学 A kind of sub-surface based on laser-ultrasound lacks the measuring method of buried depth
CN107747922B (en) * 2017-09-30 2020-05-08 浙江大学 Method for measuring subsurface defect buried depth based on laser ultrasound
CN108181241A (en) * 2018-01-02 2018-06-19 北京汽车股份有限公司 A kind of Pendant Structure Of Vehicle defect detecting system and detection method
CN111735774A (en) * 2020-07-14 2020-10-02 西安交通大学 Method for quantifying size of crack defect based on time-distance curve of laser ultrasonic surface wave
CN111735774B (en) * 2020-07-14 2021-11-19 西安交通大学 Method for quantifying size of crack defect based on time-distance curve of laser ultrasonic surface wave
CN113848035A (en) * 2021-09-17 2021-12-28 中国石油大学(华东) Multifunctional jet flow generation test equipment
CN113848035B (en) * 2021-09-17 2023-12-05 中国石油大学(华东) Multifunctional jet flow generation test equipment
CN114113133A (en) * 2021-10-09 2022-03-01 宝宇(武汉)激光技术有限公司 Non-planar workpiece surface defect nondestructive testing device
CN114280157A (en) * 2021-12-28 2022-04-05 杭州电子科技大学 Sub-surface crack length quantitative detection method based on laser excitation surface wave
CN114295731A (en) * 2021-12-28 2022-04-08 杭州电子科技大学 Method for measuring depth of subsurface defect based on laser excitation longitudinal wave
CN114295731B (en) * 2021-12-28 2023-02-21 杭州电子科技大学 Method for measuring subsurface defect depth based on laser excitation longitudinal wave
CN115406384A (en) * 2022-09-05 2022-11-29 天津大学 Method for measuring opening width of crack on machined surface based on laser surface acoustic wave
CN115406384B (en) * 2022-09-05 2024-03-12 天津大学 Machining surface crack opening width measuring method based on laser surface acoustic waves

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