CN106017301A - Large array resistance-type strain gauge automatic detection and shape modifying method - Google Patents

Large array resistance-type strain gauge automatic detection and shape modifying method Download PDF

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Publication number
CN106017301A
CN106017301A CN201610648799.4A CN201610648799A CN106017301A CN 106017301 A CN106017301 A CN 106017301A CN 201610648799 A CN201610648799 A CN 201610648799A CN 106017301 A CN106017301 A CN 106017301A
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foil gauge
vacuum
slide unit
data collecting
pin
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CN106017301B (en
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秦伟
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Shaanxi University of Technology
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Shaanxi University of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34—Sorting according to other particular properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/22—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming
    • H01C17/24—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material
    • H01C17/245—Apparatus or processes specially adapted for manufacturing resistors adapted for trimming by removing or adding resistive material by mechanical means, e.g. sand blasting, cutting, ultrasonic treatment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

The invention discloses a large array resistance-type strain gauge automatic detection and shape modifying method. A device adopted by the method comprises an automatic detection device, an automatic shape modifying device and a computer, wherein the automatic detection comprises a detection rack, a detection positioning fixing mechanism and a detection mechanism, and the automatic shape modifying device comprises a shape modifying rack, a shape modifying positioning fixing mechanism and a shape modifying mechanism; the method comprises the following steps of step one, large array resistance-type strain gauge automatic detection; step two, large array resistance-type strain gauge automatic shape modifying. According to the method, the steps are simple, the working reliability is high, the production efficiency can be improved, the worker labor intensity and the product production cost are reduced, and the popularization and application value is high.

Description

A kind of big array resistors formula foil gauge detects automatically, correction method
Present patent application is 2015 applyings date December 31 days, application number 201511025029.6, innovation and creation The application for a patent for invention of entitled " a kind of big array resistors formula foil gauge detects automatically, modification device and method " point Case application.
Technical field
The invention belongs to resistance strain plate production technical field, be specifically related to a kind of big array resistors formula Foil gauge detects automatically, correction method.
Background technology
Resistance strain plate is Analysis of Experimental Stress, test and measuring technology, automatic Test and control And weigh or the key element of force cell, have that size is little, creep is little, good resisting fatigue The features such as performance and well stability, are widely used in various machinery and engineering structure intensity and life-span Diagnosis and assessment, be also used for detection and the metering of multiple physical quantity, it is achieved production process and science are real Test measurement and the control of process.Resistance strain plate is mainly pasted onto the surface of elastomer, and elastomer exists The micro-strain (elongating or shortening) that rear surface loaded produces, makes to be pasted onto the foil gauge on its surface Also in company with being deformed, after resistance strain gage deformation, its resistance will change (increase or reduce), Then through corresponding measuring circuit, this resistance variations is converted to the signal of telecommunication (voltage or electric current) output, Measure the change of resistance, the strain of surface of elastomer, and corresponding stress can be calculated by formula.
As shown in figure 14, resistance strain plate is mainly by sensitive grid 41, substrate 42, cover layer 43 With lead-in wire 44 composition, sensitive grid 41 binding agent 45 is bonded between substrate 42 and cover layer 43. In foil gauge production process, being first tightly adhered to by foil in substrate 42, substrate 42 material leads to Is often glued membrane (phenol-formaldehyde resin modified, polyimide resin, epoxy resin etc.), thickness be about 0.02mm～ 0.04mm；Sensitive grid 41 material is the metal alloy foil that thickness is about 0.0025mm～0.005mm, Foil is usually constantan foil, karma foil material, annealing constantan foil etc.；The molding of sensitive grid 41 is Foil is carried out photoetching, corrosion according to certain circuit requirement, finally remains in the electricity in substrate 42 Resistance silk is sensitive grid 41.In order to improve sensitive grid 41 working stability in use further Property and service life, in addition it is also necessary on sensitive grid 41 increase cover layer 43, the material of general cover layer 43 Expecting identical with base material, thickness is about 0.01mm～0.02mm, and the gross thickness of resistance strain plate is about For 0.035mm～0.05mm.
Resistance strain plate is according to certain arrangement on the metal foil plate of a 102mm × 115mm Regular figure etching forms, and a metal foil plate generally has the figure of multiple product.A kind of big battle array Multiple resistance strain plate unit by array arrangement, Mei Ge electricity is had on row resistance strain plate diaphragm Resistive foil gauge unit draws 4 electrodes, measures point as 4.
Need from justifying, separate single foil gauge product in the foil gauge production later stage, and Single foil gauge product is detected, sorts finally according to testing result, need it static Resistance value, magnitude of voltage, sensitivity, thermal output, transverse sensitivity ratio, creep, strain limit and tired The multinomial operating characteristic such as labor life-span are tested.Wherein Static Electro resistance, magnitude of voltage, sensitivity technique Belonging to one hundred percent inspection, other performance indications belong to bulk sampling inspection.At present, correction of the flank shape is artificial use Single product is pruned by shears along the outer rim of product, and this method not only production efficiency is low, Labor strength is big, and it is low to prune dimensional accuracy, and the overall dimensions of same batch products exists relatively Great fluctuation process, is unfavorable for the stability contorting to product quality；And, resistance, the voltage of foil gauge is surveyed Amount is completely dependent on manual testing, and owing to foil gauge yield is big, the workman of needs is many, causes labor intensity Greatly, production cost is high, and testing efficiency is low, easily makes mistakes, and be also unfavorable for product quality is steady Qualitative contrlol.
Summary of the invention
The technical problem to be solved is for above-mentioned deficiency of the prior art, it is provided that one Kind of method step is simple, realize big array resistors formula foil gauge convenient, that detection is high with correction of the flank shape efficiency certainly Dynamic detection, correction method.
For solving above-mentioned technical problem, the technical solution used in the present invention is: a kind of big array resistors formula Foil gauge detects automatically, correction method, and the big array resistors formula foil gauge used automatically detects, repaiies Shape device includes automatic detection device, automatic modification device and computer, described automatic detection device bag Including detection frame, detection and location fixed mechanism and testing agency, described automatic modification device includes correction of the flank shape Frame, correction of the flank shape location fixed mechanism and correction of the flank shape mechanism, described computer is connected to data collecting plate card and Desk type digital universal meter, the signal output part of described data collecting plate card is connected to export amplification board；Described Detection frame includes the most spaced first upper plate and the first lower shoe, and is supported on first The first pillar between upper plate and the first lower shoe；Described detection and location fixed mechanism includes being arranged on The first two-dimensional movement platform at the first lower shoe top, it is arranged on the of the first two-dimensional movement table top One vacuum adsorption table and for the first vac sorb loop to the first vacuum adsorption table evacuation, described First two-dimensional movement platform includes the first X-axis mobile motor, the first Y-axis mobile motor, the first X-axis Moving grating chi and the first Y-axis moving grating chi, described first vacuum adsorption table include mutually fastening and Fixing the first absorptive table lower cover connected and the first absorptive table upper cover, described first absorptive table lower cover and the It is the first vacuum chamber that one absorptive table upper cover fastens the space formed, the upper table of described first absorptive table upper cover The first adsorption hole it is provided with on face；Described first vac sorb loop includes by the first vacuum tube successively First vacuum pump of connection, the first vacuum filter, the first vacuum regulation valve and the first vacuum electromagnetic Valve, described first vacuum tube is connected with described first vacuum chamber, on described first vacuum regulation valve Connect and have the first vacuum meter；Described first X-axis moving grating chi and the first Y-axis moving grating chi all with The signal input part of data collecting plate card connects, and described first X-axis mobile motor, the first Y-axis move Motor and the first vacuum solenoid are all connected with the outfan exporting amplification board；Described testing agency includes The slide unit of the first cylinder slide unit and the first cylinder slide unit that are horizontally set on the first upper plate top connects Cylinder slide unit installing plate and the second cylinder slide unit of being connected with cylinder slide unit installing plate, and the first gas Dynamic loop；Connected by probe box connecting plate on the slide unit of described second cylinder slide unit and have probe box, institute State probe box and be internally provided with testing circuit plate, described testing circuit plate is provided with multichannel foil gauge electricity Resistance voltage detecting circuit and the signals collecting end with multichannel foil gauge resistive voltage testing circuit is connected and Pass downwards the spring probe array of probe box；Described first pneumatic circuit includes being depended on by the first trachea First air pump of secondary connection, the first air filter, the first air relief valve and the first Pressure gauge, described One cylinder slide unit is connected by the first air-operated solenoid valve and the first trachea, and described second cylinder slide unit passes through Second air-operated solenoid valve and the first trachea connect；Described first air-operated solenoid valve and the second air-operated solenoid valve All outfans with output amplification board are connected, the control signal of multichannel foil gauge resistive voltage testing circuit Input is all connected with the signal output part of data collecting plate card, multichannel foil gauge resistive voltage detection electricity The signal output part on road is all connected with desk type digital universal meter by signal output interface；Described correction of the flank shape machine Frame includes the most spaced second upper plate and the second lower shoe, and is supported on the second upper plate And the second pillar that second between lower shoe；Described correction of the flank shape location fixed mechanism includes being arranged on second time The second two-dimensional movement platform at base plate top, it is arranged on the second vacuum of the second two-dimensional movement table top Absorptive table and for the second vac sorb loop to the second vacuum adsorption table evacuation, the described 2nd 2 Dimension mobile platform includes that the second X-axis mobile motor, the second Y-axis mobile motor, the second X-axis move light Grid chi and the second Y-axis moving grating chi, described second vacuum adsorption table includes mutually fastening and the company of fixing The the second absorptive table lower cover connect and the second absorptive table upper cover, described second absorptive table lower cover and the second absorption It is the second vacuum chamber that platform upper cover fastens the space formed, and the upper surface of described second absorptive table upper cover sets It is equipped with the second adsorption hole of multiple spread configuration；Described second vac sorb loop includes by second true The second vacuum pump that blank pipe is sequentially connected with, the second vacuum filter, the second vacuum regulation valve and second Vacuum solenoid, described second vacuum tube is connected with described second vacuum chamber, described second vacuum Connect on regulation valve and have the second vacuum meter；Described second X-axis moving grating chi and the second Y-axis move light Grid chi is all connected with the signal input part of data collecting plate card, described second X-axis mobile motor, second Y-axis mobile motor and the second vacuum solenoid are all connected with the outfan exporting amplification board；Described correction of the flank shape Mechanism includes that the straight line being vertically arranged on the second upper plate swings combined cylinders and is connected to straight line pendulum Knife rest on the piston rod of dynamic combined cylinders, and the second pneumatic circuit；Described knife rest is positioned on second The lower section of top board, described knife rest is provided with horizontally disposed 3rd cylinder slide unit, described 3rd cylinder It is fixedly connected with direct current generator support on the slide unit of slide unit, described direct current generator support is provided with direct current Motor, the output shaft of described direct current generator is fixedly connected with circular knife, and the bottom of described knife rest is passed through Rubber column is fixedly connected with pressing plate, and the bottom of described pressing plate is pasted with rubber, on described pressing plate and rubber On be provided with for circular knife through and gathering sill that circular knife is guided；Described second pneumatic time The second air pump that road includes being sequentially connected with by the second trachea, the second air filter, the second air relief valve With the second Pressure gauge, and first liang be connected in parallel with the second trachea being positioned at the second Pressure gauge rear end Position five electric change valves, the second two five electric change valves and the 3rd two five-way electromagnetic switch Valve, described straight line swings clockwise oscillation air inlet and the counter-clockwise swing air inlet difference of combined cylinders Being connected with two gas outlets of the first two five electric change valves, described straight line swings combined cylinders Stretch out motion air inlet and retraction movement air inlet respectively with the two of the second two five electric change valves Individual gas outlet connects, and the forward of described 3rd cylinder slide unit moves into QI KOU and reversely moves into QI KOU and divide It is not connected with two gas outlets of the 3rd two five electric change valves；Described direct current generator, first liang Position five electric change valves, the second two five electric change valves and the 3rd two five electric change valves All outfans with output amplification board are connected；It is characterized in that, the method comprises the following steps:
Step one, big array resistors formula foil gauge detect automatically, and detailed process is:
Big array resistors formula foil gauge diaphragm is manually placed on the first vacuum by step 101, operator After on absorptive table, the fixed instruction of input absorption on computers, and start the first vacuum pump, data acquisition Collection board drives the first vacuum solenoid to open by output amplification board output signal, the first vacuum pumping Vacuum produces negative pressure in making described first vacuum chamber, by fixing for the absorption of big array resistors formula foil gauge diaphragm On the upper surface of the first absorptive table upper cover；
Step 102, on computers input start detection instruction, and first, data collecting plate card passes through Output amplification board output signal drives the first air-operated solenoid valve to open, and the first cylinder slide unit is sliding by cylinder Platform installing plate drives the second cylinder slide unit and spring probe array horizontal movement；Then, data acquisition board Blocking and drive the second air-operated solenoid valve to open by output amplification board output signal, the second cylinder slide unit passes through Probe box connecting plate drives spring probe array to move downward, and makes spring probe array arrive to be detected At first group of resistance-strain blade unit；
Step 103, operation computer, computer is by desk type digital universal meter and foil gauge resistance electricity Pressure testing circuit, enters resistance and the voltage of each resistance strain gage in first group of resistance-strain blade unit Row is measured, and measurement result is exported to computer by desk type digital universal meter, computer by measurement result with Examination criteria compares, and records comparative result；
After step 104, comparative result record complete, first, data collecting plate card is amplified by output Plate output signal drives the second air-operated solenoid valve commutation, and the second cylinder slide unit connects strip by probe box Spring probe array of moving moves upward, and makes spring probe array leave to be detected first group resistance-strain Blade unit；Then, data collecting plate card drives the first Y-axis to move by output amplification board output signal Motor, the first Y-axis mobile motor drives the first vacuum adsorption table to move, the first Y-axis moving grating chi Displacement is fed back to computer by data collecting plate card, until moving one group of resistance strain gage Stop after the width distance of unit；
Step 105, data collecting plate card drive second pneumatic again by output amplification board output signal Electromagnetic valve commutates, and the second cylinder slide unit drives spring probe array to transport downwards by probe box connecting plate Dynamic, make spring probe array arrive at next group resistance-strain blade unit to be detected；
Repetition step 103 is to step 105, until all of resistance-strain blade unit has detected；
Step 2, the big array resistors automatic correction of the flank shape of formula foil gauge, detailed process is:
Big array resistors formula foil gauge diaphragm is manually placed on the second vacuum by step 201, operator After on absorptive table, the fixed instruction of input absorption on computers, and start the second vacuum pump, data acquisition Collection board drives the second vacuum solenoid to open by output amplification board output signal, the second vacuum pumping Vacuum produces negative pressure in making described second vacuum chamber, by fixing for the absorption of big array resistors formula foil gauge diaphragm On the upper surface of the second absorptive table upper cover；
Step 202, on computers input start correction of the flank shape instruction, to big array resistors formula foil gauge film Sheet carries out correction of the flank shape, and detailed process is:
Step 2021, the correction of the flank shape of Y direction, detailed process is:
Step 20211, data collecting plate card drive the second two five by output amplification board output signal Electric change valve is connected, and straight line swings the motion air inlet that stretches out of combined cylinders and connects, and straight line swings The piston rod band movable knife rack of combined cylinders moves downward, and makes pressing plate compress big array resistors formula foil gauge film Sheet；
Step 20212, data collecting plate card drive DC motor start by output amplification board output signal Dynamic, direct current generator drives circular knife to rotate；
Step 20213, data collecting plate card drive the 3rd two five by output amplification board output signal Electric change valve is connected, and the forward of the 3rd cylinder slide unit moves into QI KOU and connects, the 3rd cylinder slide unit Slide unit drive the overall forward of direct current generator and circular knife to move, the circular knife of rotation cuts big array Resistance strain plate diaphragm；
Step 20214, data collecting plate card drive the second two five by output amplification board output signal Electric change valve commutates, and straight line swings the retraction movement air inlet of combined cylinders and connects, and straight line swings The piston rod band movable knife rack of combined cylinders moves upward, and makes pressing plate leave big array resistors formula foil gauge film Sheet also returns initial position；
Step 20215, data collecting plate card drive the 3rd two five by output amplification board output signal Electric change valve commutates, and the QI KOU that reversely moves into of the 3rd cylinder slide unit is connected, the 3rd cylinder slide unit Slide unit drive the overall the most mobile of direct current generator and circular knife, make direct current generator and circular knife return Initial position；
Step 20216, data collecting plate card drive the second Y-axis to move by output amplification board output signal Galvanic electricity machine, the second Y-axis mobile motor drives the second vacuum adsorption table to move, the second Y-axis moving grating Displacement is fed back to computer by data collecting plate card by chi, until the second vacuum adsorption table moves Stop after distance a；Wherein, a is resistance strain plate width in the Y-axis direction；
Repeat step 20211～20216, until completing big array resistors formula foil gauge diaphragm Y direction Till all of cutting；
Step 2022, the second vacuum adsorption table reset: data collecting plate card is exported by output amplification board Signal drives the second Y-axis mobile motor, the second Y-axis mobile motor to drive the second vacuum adsorption table to move, Displacement is fed back to computer by data collecting plate card by the second Y-axis moving grating chi, until the Two vacuum adsorption table return initial position；
Step 2023, the correction of the flank shape of X-direction, detailed process is:
Step 20231, data collecting plate card drive the first two five by output amplification board output signal Electric change valve is connected, and straight line swings the clockwise oscillation air inlet of combined cylinders and connects, and straight line is put The piston rod band movable knife rack of dynamic combined cylinders turns clockwise 90 °, and knife rest drives direct current generator and dise knife The entirety of sheet turns clockwise 90 °；
Step 20232, data collecting plate card drive the second two five by output amplification board output signal Electric change valve is connected, and straight line swings the motion air inlet that stretches out of combined cylinders and connects, and straight line swings The piston rod band movable knife rack of combined cylinders moves downward, and makes pressing plate compress big array resistors formula foil gauge film Sheet；
Step 20233, data collecting plate card drive the 3rd two five by output amplification board output signal Electric change valve is connected, and the forward of the 3rd cylinder slide unit moves into QI KOU and connects, the 3rd cylinder slide unit Slide unit drive the overall forward of direct current generator and circular knife to move, the circular knife of rotation cuts big array Resistance strain plate diaphragm；
Step 20234, data collecting plate card drive the second two five by output amplification board output signal Electric change valve commutates, and straight line swings the retraction movement air inlet of combined cylinders and connects, and straight line swings The piston rod band movable knife rack of combined cylinders moves upward, and makes pressing plate leave big array resistors formula foil gauge film Sheet also returns initial position；
Step 20235, data collecting plate card drive the 3rd two five by output amplification board output signal Electric change valve commutates, and the QI KOU that reversely moves into of the 3rd cylinder slide unit is connected, the 3rd cylinder slide unit Slide unit drive the overall the most mobile of direct current generator and circular knife, make direct current generator and circular knife return Initial position；
Step 20236, data collecting plate card drive the second X-axis to move by output amplification board output signal Galvanic electricity machine, the second X-axis mobile motor drives the second vacuum adsorption table to move, the second X-axis moving grating Displacement is fed back to computer by data collecting plate card by chi, until the second vacuum adsorption table moves Stop after distance b；Wherein, b is resistance strain plate width in the X-axis direction；
Repeat step 20232～20236, until completing big array resistors formula foil gauge diaphragm X-direction Till all of cutting；
Step 203, back to zero reset, and detailed process is:
Step 20301, data collecting plate card drive direct current generator to stop by output amplification board output signal Spline is moved, and circular knife stops operating；
Step 20302, data collecting plate card drive the first two five by output amplification board output signal Electric change valve is connected, and straight line swings the counter-clockwise swing air inlet of combined cylinders and connects, and straight line is put The piston rod band movable knife rack half-twist counterclockwise of dynamic combined cylinders, knife rest drives direct current generator and dise knife The overall half-twist counterclockwise of sheet, returns to initial position；
Step 20303, data collecting plate card drive the second X-axis to move by output amplification board output signal Galvanic electricity machine, the second X-axis mobile motor drives the second vacuum adsorption table to move, the second X-axis moving grating Displacement is fed back to computer by data collecting plate card by chi, until the second vacuum adsorption table returns Initial position.
The present invention compared with prior art has the advantage that
1, the present invention big array resistors formula foil gauge automatically detect, the compact conformation of modification device, if Count new reasonable, convenient processing and manufacture.
2, the present invention big array resistors formula foil gauge automatically detect, modification device simple to operate, suitable Wide by scope, it is possible to realize detection and the correction of the flank shape automatically of the big array resistors formula foil gauge of different model.
3, the big array resistors formula foil gauge of the present invention automatically detect, modification device, have employed precision Machine driving, computer control and Pneumatic Control Technology, compared with existing manual detection, correction of the flank shape, Have be quick on the draw, work efficiency is high, it is little to pollute and attaches troops to a unit in periphery, and adnexa is few, realize low cost etc. Plurality of advantages.
4, present invention employs the two-dimensional movement platform with grating scale, it is achieved be absorbed and fixed at vacuum The movement of the big array resistors formula foil gauge on absorptive table, displacement controllable precision can reach 0.001mm.
5, the present invention uses computer to be controlled, it is achieved that big array resistors formula foil gauge unit Automatically detection, correction of the flank shape, it is to avoid the anthropic factor impact on product correction of the flank shape, and detect, correction of the flank shape speed Degree is fast, detection, correction of the flank shape accuracy height.
6, the vacuum adsorption table of the present invention is capable of the big array resistors formula foil gauge of different model Absorption is fixing, and the abrasion to big array resistors formula foil gauge is little, and absorption fixed efficiency is high, it is little to pollute.
7, the present invention big array resistors formula foil gauge automatically detect, the method step of correction method simple, It is convenient to realize, detection, correction of the flank shape efficiency height.
8, the present invention can improve the detection of big array resistors formula foil gauge, correction of the flank shape efficiency, Jin Erti High efficiency, reduces labor strength, stability contorting product quality, the competitiveness of enterprise.
9, the present invention be capable of big array resistors formula foil gauge detection rapid, accurate, automatic and Correction of the flank shape, quickly detection, correction of the flank shape to solving in resistance strain plate batch production process have important Meaning, practical, using effect is good, and application value is high.
In sum, the present invention is novel in design rationally, it is achieved low cost, and functional reliability is high, practical Property strong, it is possible to increase production efficiency, reduce labor strength and production cost, popularization and application It is worth height.
Below by drawings and Examples, technical scheme is described in further detail.
Accompanying drawing explanation
Fig. 1 be the present invention big array resistors formula foil gauge automatically detect, the overall structure frame of modification device Figure.
Fig. 2 is the part-structure schematic diagram of automatic detection device of the present invention.
Fig. 3 is the structural representation of the present invention the first vacuum adsorption table.
Fig. 4 is the attachment structure schematic diagram of spring probe array of the present invention and testing circuit plate.
Fig. 5 is the annexation signal of the present invention the first vacuum adsorption table and the first vac sorb loop Figure.
Fig. 6 is that the connection of the present invention the first cylinder slide unit and the second cylinder slide unit and the first pneumatic circuit is closed It it is schematic diagram.
Fig. 7 is the circuit theory diagrams of foil gauge resistive voltage testing circuit of the present invention.
Fig. 8 is the part-structure schematic diagram of the automatic modification device of the present invention.
Fig. 9 is the structural representation of the present invention the second vacuum adsorption table.
Figure 10 is the annexation signal of the present invention the second vacuum adsorption table and the second vac sorb loop Figure.
Figure 11 be correction of the flank shape mechanism of the present invention structural representation (not shown in figure straight line swing combination gas Cylinder).
Figure 12 is that straight line of the present invention swings combined cylinders and the 3rd cylinder slide unit and the second pneumatic circuit Annexation schematic diagram.
Figure 13 is the annexation schematic diagram of computer of the present invention and other each parts.
Figure 14 is the structural representation of existing resistance strain plate.
Detailed description of the invention
As shown in Fig. 1 and Figure 13, the big array resistors formula foil gauge of the present invention detects automatically, correction of the flank shape dress Putting, including automatic detection device 1, automatic modification device 2 and computer 4, described automatic detection fills Put 1 to include detecting frame, detection and location fixed mechanism and testing agency, described automatic modification device 2 Including correction of the flank shape frame, correction of the flank shape location fixed mechanism and correction of the flank shape mechanism, described computer 4 is connected to data Analog input card 10 and desk type digital universal meter 37, the signal output part of described data collecting plate card 10 connects There is output amplification board 11；
In conjunction with Fig. 2, described detection frame includes the most spaced first upper plate 1-1 and first Lower shoe 1-17, and it is supported on first between the first upper plate 1-1 and the first lower shoe 1-17 Pillar；
Described detection and location fixed mechanism includes the first two dimension being arranged on the first lower shoe 1-17 top Mobile platform 1-11, it is arranged on first vacuum adsorption table at the first two-dimensional movement platform 1-11 top 1-13 and for the first vac sorb loop to the first vacuum adsorption table 1-13 evacuation, described the One two-dimensional movement platform 1-11 includes the first X-axis mobile motor 1-16, the first Y-axis mobile motor 1-15, the first X-axis moving grating chi 1-12 and the first Y-axis moving grating chi 1-10, in conjunction with Fig. 3, Described first vacuum adsorption table 1-13 includes mutually fastening and fixing the first absorptive table lower cover connected 1-13-1 and the first absorptive table upper cover 1-13-2, described first absorptive table lower cover 1-13-1 and first inhale It is the first vacuum chamber that attached upper cover 1-13-2 fastens the space formed, described first absorptive table upper cover The first adsorption hole 1-13-3 it is provided with on the upper surface of 1-13-2；In conjunction with Fig. 5, described first vacuum is inhaled Attached loop includes the first vacuum pump 1-30, the first vacuum being sequentially connected with by the first vacuum tube 1-31 Filter 1-29, the first vacuum regulation valve 1-28 and the first vacuum solenoid 1-25, described first Vacuum tube 1-31 is connected with described first vacuum chamber, and described first vacuum regulation valve 1-28 connects It is connected to the first vacuum meter 1-27；Described first X-axis moving grating chi 1-12 and the first Y-axis move light Grid chi 1-10 all signal input parts with data collecting plate card 10 are connected, and described first X-axis moves electricity Machine 1-16, the first Y-axis mobile motor 1-15 and the first vacuum solenoid 1-25 all with output amplification board The outfan of 11 connects；
Described testing agency includes the first cylinder slide unit being horizontally set on the first upper plate 1-1 top Cylinder slide unit installing plate 1-3 that the slide unit of 1-2 and the first cylinder slide unit 1-2 connects and sliding with cylinder The second cylinder slide unit 1-4 that platform installing plate 1-3 connects, and the first pneumatic circuit；Described second gas Connected by probe box connecting plate 1-5 on the slide unit of cylinder slide unit 1-4 and have probe box 1-6, in conjunction with Fig. 4, Described probe box 1-6 is internally provided with testing circuit plate 1-8, and described testing circuit plate 1-8 is arranged Have multichannel foil gauge resistive voltage testing circuit 1-40 and with multichannel foil gauge resistive voltage testing circuit The signals collecting end of 1-40 connects and passes downwards the spring probe array 1-9 of probe box 1-6；In conjunction with Fig. 6, described first pneumatic circuit includes the first air pump being sequentially connected with by the first trachea 1-24 1-20, the first air filter 1-21, the first air relief valve 1-22 and the first Pressure gauge 1-23, described First cylinder slide unit 1-2 is connected by the first air-operated solenoid valve 1-26 and the first trachea 1-24, described Second cylinder slide unit 1-4 is connected by the second air-operated solenoid valve 1-32 and the first trachea 1-24；Described First air-operated solenoid valve 1-26 and the second air-operated solenoid valve 1-32 all with output amplification board 11 output End connects, and the control signal input of multichannel foil gauge resistive voltage testing circuit 1-40 is all and data The signal output part of analog input card 10 connects, the letter of multichannel foil gauge resistive voltage testing circuit 1-40 Number outfan is all connected with desk type digital universal meter 37 by signal output interface 1-39；It is embodied as Time, described first cylinder slide unit 1-2 is bolted to connection at the first upper plate 1-1 top, gas Cylinder slide unit installing plate 1-3 connects by the slide unit of bolt and the first cylinder slide unit 1-2 is fixing, probe box Connecting plate 1-5 connects by the slide unit of bolt and the second cylinder slide unit 1-4 is fixing, described probe box 1-6 It is connected by bolt is fixing with probe box connecting plate 1-5.
As shown in Figure 8, described correction of the flank shape frame includes the most spaced second upper plate 2-7 and Two lower shoe 2-21, and be supported between the second upper plate 2-7 and the second lower shoe 2-21 Two pillars；
Described correction of the flank shape location fixed mechanism includes the second two dimension being arranged on the second lower shoe 2-21 top Mobile platform 2-29, it is arranged on second vacuum adsorption table at the second two-dimensional movement platform 2-29 top 2-33 and for the second vac sorb loop to the second vacuum adsorption table 2-33 evacuation, described the Two two-dimensional movement platform 2-29 include the second X-axis mobile motor 2-36, the second Y-axis mobile motor 2-37, the second X-axis moving grating chi 2-35 and the second Y-axis moving grating chi 2-28, in conjunction with Fig. 9, Described second vacuum adsorption table 2-33 includes mutually fastening and fixing the second absorptive table lower cover connected 2-33-1 and the second absorptive table upper cover 2-33-2, described second absorptive table lower cover 2-33-1 and second inhale It is the second vacuum chamber that attached upper cover 2-33-2 fastens the space formed, described second absorptive table upper cover The second adsorption hole 2-33-3 of multiple spread configuration it is provided with on the upper surface of 2-33-2；In conjunction with Figure 10, Described second vac sorb loop includes the second vacuum pump being sequentially connected with by the second vacuum tube 2-12 2-13, the second vacuum filter 2-27, the second vacuum regulation valve 2-30 and the second vacuum solenoid 2-18, described second vacuum tube 2-12 are connected with described second vacuum chamber, described second vacuum On regulation valve 2-30, connection has the second vacuum meter 2-31；Described second X-axis moving grating chi 2-35 All signal input parts with data collecting plate card 10 are connected with the second Y-axis moving grating chi 2-28, institute State the second X-axis mobile motor 2-36, the second Y-axis mobile motor 2-37 and the second vacuum solenoid 2-18 All outfans with output amplification board 11 are connected；
In conjunction with Figure 11, described correction of the flank shape mechanism includes the straight line pendulum being vertically arranged on the second upper plate 2-7 Dynamic combined cylinders 2-9 and the knife rest 2-5 being connected on the piston rod of straight line swing combined cylinders 2-9, And second pneumatic circuit；Described knife rest 2-5 is positioned at the lower section of the second upper plate 2-7, described knife rest Horizontally disposed 3rd cylinder slide unit 2-3, the cunning of described 3rd cylinder slide unit 2-3 are installed on 2-5 It is fixedly connected with direct current generator support 2-26 on platform, described direct current generator support 2-26 is provided with straight Stream motor 2-23, the output shaft of described direct current generator 2-23 is fixedly connected with circular knife 2-24, institute The bottom stating knife rest 2-5 is fixedly connected with pressing plate 2-2, described pressing plate 2-2 by rubber column 2-22 Bottom be pasted with rubber 2-1, be provided with for circular knife on described pressing plate 2-2 and on rubber 2-1 The gathering sill that 2-24 passes and guides circular knife 2-24；In conjunction with Figure 12, described second pneumatic Loop includes the second air pump 2-34, the second air filter being sequentially connected with by the second trachea 2-32 2-38, the second air relief valve 2-39 and the second Pressure gauge 2-40, and be positioned at the second Pressure gauge 2-40 The first two five electric change valve 2-15 that second trachea 2-32 of rear end is connected in parallel, second liang Position five electric change valve 2-16 and the 3rd two five electric change valve 2-17, described straight line swings The clockwise oscillation air inlet 2-9-1 and counter-clockwise swing air inlet 2-9-2 of combined cylinders 2-9 is respectively Being connected with two gas outlets of the first two five electric change valve 2-15, described straight line swings combination Cylinder 2-9 stretch out motion air inlet 2-9-3 and retraction movement air inlet 2-9-4 respectively with second liang Two gas outlets of position five electric change valve 2-16 connect, and described 3rd cylinder slide unit 2-3 is just To moving into QI KOU 2-3-1 and reversely moving into QI KOU 2-3-2 and change with the 3rd two five-way electromagnetism respectively Connect to two gas outlets of valve 2-17；Described direct current generator 2-23, the first two five-way electromagnetism change To valve 2-15, the second two five electric change valve 2-16 and the 3rd two five electric change valves 2-17 is all connected with the outfan exporting amplification board 11.During use, rubber 2-1 can be to being placed on Big array resistors formula foil gauge diaphragm 14 in second vacuum adsorption table 2-33 plays the effect of protection, Pressing plate 2-2 can be played the effect of vibration damping, buffering by rubber column 2-22.
As in figure 2 it is shown, in the present embodiment, described first pillar is connected into the of frame structure by many One aluminium section bar 1-19 makes, and described first aluminium section bar 1-19 and the first aluminium section bar 1-19 passes through first Triangle connecting rack 1-18 is fixing to be connected, and described first aluminium section bar 1-19 and the first upper plate 1-1 leads to Crossing the fixing connection of screw bolt and nut, described first aluminium section bar 1-19 and the first lower shoe 1-17 passes through spiral shell Bolt, nut and the first triangle connecting rack 1-18 are fixing to be connected；As shown in Figure 8, in the present embodiment, Described second pillar is made up of many second aluminium section bar 2-20 connecting into frame structure, and described second Aluminium section bar 2-20 and the second aluminium section bar 2-20 connects by the second triangle connecting rack 2-19 is fixing, Described second aluminium section bar 2-20 and the second upper plate 2-7 connects by screw bolt and nut is fixing, described Second aluminium section bar 2-20 and the second lower shoe 2-21 is by bolt, nut and the second triangle connecting rack 2-19 is fixing to be connected.
As it is shown on figure 3, in the present embodiment, described first absorptive table lower cover 1-13-1 and first absorption The first sealing gasket 1-13-4, described first absorptive table lower cover it is provided with between platform upper cover 1-13-2 1-13-1, the first sealing gasket 1-13-4 and the first absorptive table upper cover 1-13-2 are by the first absorptive table even Connecting bolt 1-13-5 is fixing to be connected, and the side of described first absorptive table lower cover 1-13-1 is provided with first Screwed hole 1-13-6, described first vacuum tube 1-31 pass through the first pneumatic joint 1-33 and the first screw thread Hole 1-13-6 connects；It is provided with a plurality of first on the upper surface of described first absorptive table upper cover 1-13-2 Level is to groove and a plurality of first vertically to groove, and a plurality of described first level is to groove and a plurality of described First vertically intersects to groove defines multiple first projection 1-13-7, described first adsorption hole The quantity of 1-13-3 is multiple, and multiple first adsorption hole 1-13-3 are distributed in multiple first projection On 1-13-7；Described first absorptive table upper cover 1-13-2 upper surface be shaped as rectangle, described first The first reference location line 1-13-8 all it is carved with on four feet of absorptive table upper cover 1-13-2 upper surface.Logical Cross and the first sealing gasket 1-13-4 is set, it is possible to avoid the first absorptive table lower cover 1-13-1 and first absorption Gap air leak between platform upper cover 1-13-2, needed for affecting described first vacuum chamber, vacuum is quick Formed and keep；By arranging the first reference location line 1-13-8, facilitating should to big array resistors formula Become sheet diaphragm 14 to be accurately positioned.
As it is shown in figure 9, in the present embodiment, described second absorptive table lower cover 2-33-1 and second absorption The second sealing gasket 2-33-4, described second absorptive table lower cover it is provided with between platform upper cover 2-33-2 2-33-1, the second sealing gasket 2-33-4 and the second absorptive table upper cover 2-33-2 are by the second absorptive table even Connecting bolt 2-33-5 is fixing to be connected, and the side of described second absorptive table lower cover 2-33-1 is provided with second Screwed hole 2-33-6, described second vacuum tube 2-12 pass through the second pneumatic joint 2-48 and the second screw thread Hole 2-33-6 connects；It is provided with a plurality of second on the upper surface of described second absorptive table upper cover 2-33-2 Level is to groove and a plurality of second vertically to groove, and a plurality of described second level is to groove and a plurality of described Second vertically intersects to groove defines multiple second projection 2-33-7, multiple described second absorption Hole 2-33-3 is distributed on multiple second projection 2-33-7；Described second absorptive table upper cover 2-33-2 Upper surface be shaped as rectangle, on four feet of described second absorptive table upper cover 2-33-2 upper surface all It is carved with the second reference location line 2-33-8.By arranging the second sealing gasket 2-33-4, it is possible to avoid Gap air leak between two absorptive table lower cover 2-33-1 and the second absorptive table upper cover 2-33-2, affects institute Needed for stating the second vacuum chamber, vacuum is quickly formed and keeps；By arranging the second reference location line 2-33-8, facilitates and is accurately positioned big array resistors formula foil gauge diaphragm 14.
As shown in Figure 4, in the present embodiment, described first cylinder slide unit 1-2 is Rodless cylinder slide unit, The quantity of described testing circuit plate 1-8 is two pieces, and two pieces of described testing circuit plate 1-8 lead to one on the other Cross the fixing connection of copper stud 1-7 and screw 1-34, described spring probe array 1-9 and the inspection on top Slowdown monitoring circuit plate 1-8 passes probe box 1-6 after welding and penetrate the testing circuit plate 1-8 of bottom still further below.
As shown in figs. 4 and 7, in the present embodiment, described spring probe array 1-9 by organizing spring more Probe groups is constituted, often group spring probe group by for when measuring with four of a resistance strain gage Measure four spring probe compositions of some correspondence contact；Every road foil gauge resistive voltage testing circuit 1-40 All include that model is the chip S1 of ADG84, chip S2 and chip S3, described signal output interface 1-39 is the Wiring port P1 with four pins；1st pin and the power supply of described chip S1 Outfan VCC connect, and by electric capacity C1 ground connection, the 4th pin and the 8th of described chip S1 Pin connects and is the first control signal input IN1 of foil gauge resistive voltage testing circuit 1-40, 5th pin of described chip S1 is connected with first measurement point of described resistance strain gage, described core The 6th pin ground connection of sheet S1, the 7th pin of described chip S1 and the second of described resistance strain gage Individual point of measuring connects；1st pin of described chip S2 connects with the outfan VCC of power supply, And by electric capacity C2 ground connection, the 4th pin of described chip S2 and the 8th pin connect and are foil gauge The second control signal input IN2 of resistive voltage testing circuit 1-40, the 5th of described chip S2 Pin is connected with the 3rd measurement point of described resistance strain gage, and the 6th pin of described chip S2 connects Ground, the 7th pin of described chip S2 is connected with the 4th measurement point of described resistance strain gage；Institute The 1st pin stating chip S3 connects with the outfan VCC of power supply, and by electric capacity C3 ground connection, 4th pin of described chip S3 and the 8th pin connect and are foil gauge resistive voltage testing circuit The 3rd control signal input IN3 of 1-40, the 5th pin of described chip S3 should with described resistance First the measurement point becoming sheet connects, the 6th pin ground connection of described chip S3, described chip S3's 7th pin is connected with second measurement point of described resistance strain gage；Described foil gauge resistive voltage is examined The first control signal input IN1 of slowdown monitoring circuit 1-40, the second control signal input IN2 and the 3rd Control signal input IN3 all signal output parts with data collecting plate card 10 are connected, described chip 3rd pin of S1 is the first signal output part D1 of foil gauge resistive voltage testing circuit 1-40, institute State the secondary signal outfan that the 9th pin is foil gauge resistive voltage testing circuit 1-40 of chip S1 3rd pin of D2, described chip S2 and the 3rd pin of described chip S3 connects and for foil gauge electricity The 3rd signal output part D3 of resistance voltage detecting circuit 1-40, the 9th pin of described chip S2 and institute State the 9th pin of chip S3 to connect and for the 4th signal of foil gauge resistive voltage testing circuit 1-40 Outfan D4, the first signal output part D1 of every road foil gauge resistive voltage testing circuit 1-40 all with 1st pin of described Wiring port P1 connects, every road foil gauge resistive voltage testing circuit 1-40's Secondary signal outfan D2 all the 2nd pins with described Wiring port P1 are connected, every road foil gauge electricity Resistance voltage detecting circuit 1-40 the 3rd signal output part D3 all with the 3rd of described Wiring port P1 Pin connect, the 4th signal output part D4 of every road foil gauge resistive voltage testing circuit 1-40 all with 4th pin of described Wiring port P1 connects.
In the present embodiment, described desk type digital universal meter 37 is Keithley 2000 type desktop digital general-purpose Table 37, the 1st pin of described Wiring port P1 and described Keithley 2000 type desk type digital universal meter The INPUT HI interface of 37 connects, the 2nd pin of described Wiring port P1 and described Keithley 2000 The INPUT LO interface of type desk type digital universal meter 37 connects, and the 3rd of described Wiring port P1 is drawn Foot connects with the SENSE Ω 4WIRE HI interface of described Keithley 2000 type desk type digital universal meter 37 Connect, the 4th pin of described Wiring port P1 and described Keithley 2000 type desk type digital universal meter 37 SENSE Ω 4WIRE LO interface connect.
Specifically, as it is shown in fig. 7, described resistance strain gage to be equivalent to resistance bridge R1, described electricity Two connection ends on one diagonal of resistance bridge R1 are respectively first with described resistance strain gage Measure measurement end 1S1B corresponding to point and measure the survey that point is corresponding with the second of described resistance strain gage Amount end 1S2B, two connection ends on another diagonal of described resistance bridge R1 are respectively with described Measurement end 2S1B that the 3rd of resistance strain gage measurement point is corresponding and with the of described resistance strain gage Measure the measurement end 2S2B that point is corresponding for four.
In the present embodiment, chip S1, chip S2 and chip S3 are internal containing two independent hilted broadswords The switching device of commutator, this device has ultralow conducting resistance, little in whole temperature range In 0.4 Ω.
Time specifically used, computer 4 timesharing is to multichannel foil gauge resistive voltage testing circuit 1-40 even First measurement point of each resistance strain gage connect and second measures the resistance between point, and each electricity 3rd measurement point of resistance foil gauge and the 4th zero-point voltage measured between point measure, to the most not It is the foil gauge resistive voltage testing circuit 1-40 of the resistance strain gage connection measured, output " 1 " logic high is to the first control signal input of foil gauge resistive voltage testing circuit 1-40 IN1, the second control signal input IN2 and the 3rd control signal input IN3；To the most entering Row measures the foil gauge resistive voltage testing circuit 1-40 that the resistance strain gage of resistance connects, and exports " 0 " Logic low, " 1 " logic high, " 0 " logic low give foil gauge resistive voltage respectively The first control signal input IN1 of testing circuit 1-40, the second control signal input IN2 and Three control signal input IN3；Connect the resistance strain gage the most measuring voltage should Become sheet resistance voltage detecting circuit 1-40, output " 0 " logic low, " 0 " logic low, " 1 " logic high is defeated to first control signal of foil gauge resistive voltage testing circuit 1-40 respectively Enter to hold IN1, the second control signal input IN2 and the 3rd control signal input IN3.
When the first control signal input IN1 is " 0 " logic low, the second control signal input End IN2 is " 1 " logic high and the 3rd control signal input IN3 is " 0 " logic low Time, the S1B pin of described chip S1 and the conducting of S2B pin, the 5th pin of the most described chip S1 With the 7th pin conducting, the S1A pin of described chip S2 and the conducting of S2A pin, the most described chip 2nd pin of S2 and the conducting of the 10th pin, the S1B pin of described chip S3 and the conducting of S2B pin, 5th pin of the most described chip S3 and the conducting of the 7th pin, described foil gauge resistive voltage detection electricity The measurement end 1S1B of the first signal output part D1 and described resistance bridge R1 of road 1-40 connects, described The secondary signal outfan D2's and described resistance bridge R1 of foil gauge resistive voltage testing circuit 1-40 Measure end 1S2B to connect, the 3rd signal output part of described foil gauge resistive voltage testing circuit 1-40 The measurement end 1S1B of D3 and described resistance bridge R1 connects, described foil gauge resistive voltage testing circuit The measurement end 1S2B of the 4th signal output part D2 and described resistance bridge R1 of 1-40 connects, now, Computer 4 exports four-wire ohm measurement instruction, it is possible to measure the measurement end 1S1B of described resistance bridge R1 And the resistance measured between end 1S2B two ends, i.e. measured resistance strain gage the first measurement point and Second measures the resistance between point.
When the first control signal input IN1 is " 0 " logic low, the second control signal input End IN2 is " 0 " logic low and the 3rd control signal input IN3 is " 1 " logic high Time, the S1B pin of described chip S1 and the conducting of S2B pin, the 5th pin of the most described chip S1 With the 7th pin conducting, the S1B pin of described chip S2 and the conducting of S2B pin, the most described chip 5th pin of S2 and the conducting of the 7th pin, the S1A pin of described chip S3 and the conducting of S2A pin, 2nd pin of the most described chip S3 and the conducting of the 10th pin, described foil gauge resistive voltage detection electricity The measurement end 1S1B of the first signal output part D1 and described resistance bridge R1 of road 1-40 connects, described The secondary signal outfan D2's and described resistance bridge R1 of foil gauge resistive voltage testing circuit 1-40 Measure end 1S2B to connect, the 3rd signal output part of described foil gauge resistive voltage testing circuit 1-40 The measurement end 2S1B of D3 and described resistance bridge R1 connects, described foil gauge resistive voltage testing circuit The measurement end 2S2B of the 4th signal output part D2 and described resistance bridge R1 of 1-40 connects, now, Computer 4 exports four-wire ohm measurement instruction, described Keithley 2000 type desk type digital universal meter 37 To the measurement end 1S1B of described resistance bridge R1 and the electric current of measurement end 1S2B output 1mA, described Ji Time profit 2000 type desk type digital universal meters 37 can measure the measurement end 2S1B of described resistance bridge R1 And the zero-point voltage measured between end 2S2B two ends, i.e. measure the 3rd measurement of resistance strain gage Point and the 4th measures the zero-point voltage between point.
As shown in Figure 8, in the present embodiment, described straight line is swung combined cylinders 2-9 and is installed by flange Part 2-8 and bolt are fixedly connected on the second upper plate 2-7 top；As shown in figure 11, described knife rest 2-5 is fixedly connected on straight line by flange nut 2-14 and bolt and swings the piston rod of combined cylinders 2-9 On；Cylinder slide unit connecting plate 2-6, described 3rd cylinder slide unit 2-3 it is provided with on described knife rest 2-5 It is arranged on knife rest 2-5 by the way of fixing with cylinder slide unit connecting plate 2-6 and being connected；Described dise knife Sheet 2-24 is ultra-thin wolfram steel circular knife, and described circular knife 2-24 is fixed by blade union joint 2-25 It is connected on the output shaft of direct current generator 2-23.
In the present embodiment, the model of described data collecting plate card 10 is NI PCI6509, described output The model of amplification board 11 is HSF16M.
The big array resistors formula foil gauge of the present invention detects automatically, correction method, comprises the following steps:
Step one, big array resistors formula foil gauge detect automatically, and detailed process is:
It is true that big array resistors formula foil gauge diaphragm 14 is manually placed on first by step 101, operator After on empty absorptive table 1-13, input absorption fixed instruction on the computer 4, and start the first vacuum Pump 1-30, data collecting plate card 10 drives the first vacuum electromagnetic by output amplification board 11 output signal Valve 1-25 opens, and the first vacuum pump 1-30 evacuation produces negative pressure in making described first vacuum chamber, will Big array resistors formula foil gauge diaphragm 14 is absorbed and fixed at the upper surface of the first absorptive table upper cover 1-13-2 On；
Step 102, on the computer 4 input start detection instruction, first, data collecting plate card 10 Driving the first air-operated solenoid valve 1-26 to open by output amplification board 11 output signal, the first cylinder is sliding Platform 1-2 drives the second cylinder slide unit 1-4 and spring probe array by cylinder slide unit installing plate 1-3 1-9 horizontal movement；Then, data collecting plate card 10 is driven by output amplification board 11 output signal Second air-operated solenoid valve 1-32 opens, and the second cylinder slide unit 1-4 is carried by probe box connecting plate 1-5 The spring probe array 1-9 that moves moves downward, and makes spring probe array 1-9 arrive to be detected first group At resistance-strain blade unit；In the most described spring probe array 1-9 four in each group spring probe Corresponding four the measurement point cantact with a corresponding resistance strain gage of spring probe branch.
Step 103, operation computer 4, computer 4 is by desk type digital universal meter 37 and foil gauge Resistive voltage testing circuit 1-40, to the electricity of each resistance strain gage in first group of resistance-strain blade unit Resistance and voltage measure, and measurement result is exported to computer 4 by desk type digital universal meter 37, calculates Measurement result is compared by machine 4 with examination criteria, and records comparative result；When being embodied as, institute Stating examination criteria is GB/T 13992-92 " strain ga(u)ge " standard.
After step 104, comparative result record complete, first, data collecting plate card 10 is put by output Big plate 11 output signal drives the second air-operated solenoid valve 1-32 commutation, and the second cylinder slide unit 1-4 passes through Probe box connecting plate 1-5 drives spring probe array 1-9 to move upward, and makes spring probe array 1-9 Leave to be detected first group resistance-strain blade unit；Then, data collecting plate card 10 is by output Amplification board 11 output signal drives the first Y-axis mobile motor 1-15, the first Y-axis mobile motor 1-15 Driving the first vacuum adsorption table 1-13 to move, displacement is led to by the first Y-axis moving grating chi 1-10 Cross data collecting plate card 10 and feed back to computer 4, until moving the width of one group of resistance-strain blade unit Degree is apart from rear stopping；So, spring probe array 1-99 just reaches next group resistance to be detected The surface of foil gauge unit；
Step 105, data collecting plate card 10 drive the again by output amplification board 11 output signal Two air-operated solenoid valve 1-32 commutations, the second cylinder slide unit 1-4 is driven by probe box connecting plate 1-5 Spring probe array 1-9 moves downward, and makes spring probe array 1-9 arrive next group electricity to be detected At resistance foil gauge unit；
Repetition step 103 is to step 105, until all of resistance-strain blade unit has detected；
Step 2, the big array resistors automatic correction of the flank shape of formula foil gauge, detailed process is:
It is true that big array resistors formula foil gauge diaphragm 14 is manually placed on second by step 201, operator After on empty absorptive table 2-33, input absorption fixed instruction on the computer 4, and start the second vacuum Pump 2-13, data collecting plate card 10 drives the second vacuum electromagnetic by output amplification board 11 output signal Valve 2-18 opens, and the second vacuum pump 2-13 evacuation produces negative pressure in making described second vacuum chamber, will Big array resistors formula foil gauge diaphragm 14 is absorbed and fixed at the upper surface of the second absorptive table upper cover 2-33-2 On；
Step 202, on the computer 4 input start correction of the flank shape instruction, to big array resistors formula foil gauge Diaphragm 14 carries out correction of the flank shape, and detailed process is:
Step 2021, the correction of the flank shape of Y direction, detailed process is:
Step 20211, data collecting plate card 10 drive second by output amplification board 11 output signal Two five electric change valve 2-16 connect, and straight line swing combined cylinders 2-9 stretches out motion air inlet Mouth 2-9-3 connects, and straight line swings the piston rod band movable knife rack 2-5 of combined cylinders 2-9 and moves downward, Pressing plate 2-2 is made to compress big array resistors formula foil gauge diaphragm 14；
Step 20212, data collecting plate card 10 drive direct current by output amplification board 11 output signal Motor 2-23 starts, and direct current generator 2-23 drives circular knife 2-24 to rotate；
Step 20213, data collecting plate card 10 drive the 3rd by output amplification board 11 output signal Two five electric change valve 2-17 connect, and the forward of the 3rd cylinder slide unit 2-3 moves into QI KOU 2-3-1 connects, and the slide unit of the 3rd cylinder slide unit 2-3 drives direct current generator 2-23 and circular knife 2-24 Overall forward move, the circular knife 2-24 of rotation cuts big array resistors formula foil gauge diaphragm 14；
Step 20214, data collecting plate card 10 drive second by output amplification board 11 output signal Two five electric change valve 2-16 commutations, straight line swings the retraction movement air inlet of combined cylinders 2-9 Mouth 2-9-4 connects, and straight line swings the piston rod band movable knife rack 2-5 of combined cylinders 2-9 and moves upward, Pressing plate 2-2 is made to leave big array resistors formula foil gauge diaphragm 14 and return initial position；
Step 20215, data collecting plate card 10 drive the 3rd by output amplification board 11 output signal Two five electric change valve 2-17 commutations, the 3rd cylinder slide unit 2-3 reversely moves into QI KOU 2-3-2 connects, and the slide unit of the 3rd cylinder slide unit 2-3 drives direct current generator 2-23 and circular knife 2-24 Overall the most mobile, make direct current generator 2-23 and circular knife 2-24 return initial position；
Step 20216, data collecting plate card 10 drive second by output amplification board 11 output signal Y-axis mobile motor 2-37, the second Y-axis mobile motor 2-37 drive the second vacuum adsorption table 2-33 to move Dynamic, displacement is fed back to meter by data collecting plate card 10 by the second Y-axis moving grating chi 2-28 Calculation machine 4, until stopping after the second vacuum adsorption table 2-33 displacement a；Wherein, a is resistance-type Foil gauge width in the Y-axis direction；
Repeat step 20211～20216, until completing big array resistors formula foil gauge diaphragm 14Y axle side Till all of cutting；
Step 2022, the second vacuum adsorption table 2-33 reset: data collecting plate card 10 is put by output Big plate 11 output signal drives the second Y-axis mobile motor 2-37, the second Y-axis mobile motor 2-37 Driving the second vacuum adsorption table 2-33 to move, displacement is led to by the second Y-axis moving grating chi 2-28 Cross data collecting plate card 10 and feed back to computer 4, until the second vacuum adsorption table 2-33 returns initial Position；
Step 2023, the correction of the flank shape of X-direction, detailed process is:
Step 20231, data collecting plate card 10 drive first by output amplification board 11 output signal Two five electric change valve 2-15 connect, and straight line swings the clockwise oscillation of combined cylinders 2-9 and enters QI KOU 2-9-1 is connected, and straight line swings the piston rod band movable knife rack 2-5 dextrorotation of combined cylinders 2-9 Turning 90 °, knife rest 2-5 drives the entirety of direct current generator 2-23 and circular knife 2-24 to turn clockwise 90 °；
Step 20232, data collecting plate card 10 drive second by output amplification board 11 output signal Two five electric change valve 2-16 connect, and straight line swing combined cylinders 2-9 stretches out motion air inlet Mouth 2-9-3 connects, and straight line swings the piston rod band movable knife rack 2-5 of combined cylinders 2-9 and moves downward, Pressing plate 2-2 is made to compress big array resistors formula foil gauge diaphragm 14；
Step 20233, data collecting plate card 10 drive the 3rd by output amplification board 11 output signal Two five electric change valve 2-17 connect, and the forward of the 3rd cylinder slide unit 2-3 moves into QI KOU 2-3-1 connects, and the slide unit of the 3rd cylinder slide unit 2-3 drives direct current generator 2-23 and circular knife 2-24 Overall forward move, the circular knife 2-24 of rotation cuts big array resistors formula foil gauge diaphragm 14；
Step 20234, data collecting plate card 10 drive second by output amplification board 11 output signal Two five electric change valve 2-16 commutations, straight line swings the retraction movement air inlet of combined cylinders 2-9 Mouth 2-9-4 connects, and straight line swings the piston rod band movable knife rack 2-5 of combined cylinders 2-9 and moves upward, Pressing plate 2-2 is made to leave big array resistors formula foil gauge diaphragm 14 and return initial position；
Step 20235, data collecting plate card 10 drive the 3rd by output amplification board 11 output signal Two five electric change valve 2-17 commutations, the 3rd cylinder slide unit 2-3 reversely moves into QI KOU 2-3-2 connects, and the slide unit of the 3rd cylinder slide unit 2-3 drives direct current generator 2-23 and circular knife 2-24 Overall the most mobile, make direct current generator 2-23 and circular knife 2-24 return initial position；
Step 20236, data collecting plate card 10 drive second by output amplification board 11 output signal X-axis mobile motor 2-36, the second X-axis mobile motor 2-36 drive the second vacuum adsorption table 2-33 to move Dynamic, displacement is fed back to meter by data collecting plate card 10 by the second X-axis moving grating chi 2-35 Calculation machine 4, until stopping after the second vacuum adsorption table 2-33 displacement b；Wherein, b is resistance-type Foil gauge width in the X-axis direction；
Repeat step 20232～20236, until completing big array resistors formula foil gauge diaphragm 14X axle side Till all of cutting；
Step 203, back to zero reset, and detailed process is:
Step 20301, data collecting plate card 10 drive direct current by output amplification board 11 output signal Motor 2-23 stops operating, and circular knife 2-24 stops operating；
Step 20302, data collecting plate card 10 drive first by output amplification board 11 output signal Two five electric change valve 2-15 connect, and straight line swings the counter-clockwise swing of combined cylinders 2-9 and enters QI KOU 2-9-2 is connected, and straight line swings the piston rod band movable knife rack 2-5 of combined cylinders 2-9 and revolves counterclockwise Turning 90 °, knife rest 2-5 drives the overall half-twist counterclockwise of direct current generator 2-23 and circular knife 2-24, Return to initial position；
Step 20303, data collecting plate card 10 drive second by output amplification board 11 output signal X-axis mobile motor 2-36, the second X-axis mobile motor 2-36 drive the second vacuum adsorption table 2-33 to move Dynamic, displacement is fed back to meter by data collecting plate card 10 by the second X-axis moving grating chi 2-35 Calculation machine 4, until the second vacuum adsorption table 2-33 returns initial position.
The above, be only presently preferred embodiments of the present invention, not impose any restrictions the present invention, all It is any simple modification, change and equivalence above example made according to the technology of the present invention essence Structure changes, and all still falls within the protection domain of technical solution of the present invention.

Claims (9)

1. big array resistors formula foil gauge automatically detect, a correction method, the big array used electricity Resistive foil gauge detects automatically, modification device includes automatic detection device (1), automatic modification device (2) and computer (4), described automatic detection device (1) includes detecting frame, detection and location Fixed mechanism and testing agency, described automatic modification device (2) includes correction of the flank shape frame, correction of the flank shape location Fixed mechanism and correction of the flank shape mechanism, described computer (4) is connected to data collecting plate card (10) and platform Formula digital multimeter (37), the signal output part of described data collecting plate card (10) is connected to output and puts Big plate (11)；Described detection frame includes the most spaced first upper plate (1-1) and One lower shoe (1-17), and it is supported on the first upper plate (1-1) and the first lower shoe (1-17) Between the first pillar；Described detection and location fixed mechanism includes being arranged on the first lower shoe (1-17) The first two-dimensional movement platform (1-11) at top, it is arranged on the first two-dimensional movement platform (1-11) top First vacuum adsorption table (1-13) in portion and for the first vacuum adsorption table (1-13) evacuation First vac sorb loop, described first two-dimensional movement platform (1-11) includes that the first X-axis moves electricity Machine (1-16), the first Y-axis mobile motor (1-15), the first X-axis moving grating chi (1-12) With the first Y-axis moving grating chi (1-10), described first vacuum adsorption table (1-13) includes mutually Fasten and fix the first absorptive table lower cover (1-13-1) and the first absorptive table upper cover (1-13-2) connected, Described first absorptive table lower cover (1-13-1) and the first absorptive table upper cover (1-13-2) fasten formation Space is the first vacuum chamber, and the upper surface of described first absorptive table upper cover (1-13-2) is provided with One adsorption hole (1-13-3)；Described first vac sorb loop includes by the first vacuum tube (1-31) The first vacuum pump (1-30) of being sequentially connected with, the first vacuum filter (1-29), the first vacuum Regulation valve (1-28) and the first vacuum solenoid (1-25), described first vacuum tube (1-31) and Described first vacuum chamber is connected, and the described first upper connection of vacuum regulation valve (1-28) has first true Empty table (1-27)；Described first X-axis moving grating chi (1-12) and the first Y-axis moving grating chi (1-10) all signal input parts with data collecting plate card (10) are connected, and described first X-axis moves Motor (1-16), the first Y-axis mobile motor (1-15) and the first vacuum solenoid (1-25) are equal It is connected with the outfan of output amplification board (11)；Described testing agency includes being horizontally set on first The first cylinder slide unit (1-2) at top board (1-1) top and the cunning of the first cylinder slide unit (1-2) Platform connect cylinder slide unit installing plate (1-3) and be connected with cylinder slide unit installing plate (1-3) second Cylinder slide unit (1-4), and the first pneumatic circuit；The slide unit of described second cylinder slide unit (1-4) On by probe box connecting plate (1-5) connect have probe box (1-6), described probe box (1-6) Being internally provided with testing circuit plate (1-8), described testing circuit plate (1-8) is provided with multichannel should Become sheet resistance voltage detecting circuit (1-40) and with multichannel foil gauge resistive voltage testing circuit (1-40) Signals collecting end connect and pass downwards the spring probe array (1-9) of probe box (1-6)；Institute State the first air pump (1-20) that the first pneumatic circuit includes being sequentially connected with by the first trachea (1-24), First air filter (1-21), the first air relief valve (1-22) and the first Pressure gauge (1-23), Described first cylinder slide unit (1-2) is by the first air-operated solenoid valve (1-26) and the first trachea (1-24) Connecting, described second cylinder slide unit (1-4) is by the second air-operated solenoid valve (1-32) and the first gas Pipe (1-24) connects；Described first air-operated solenoid valve (1-26) and the second air-operated solenoid valve (1-32) All outfans with output amplification board (11) are connected, multichannel foil gauge resistive voltage testing circuit (1-40) Control signal input all signal output parts with data collecting plate card (10) be connected, multichannel strains The signal output part of sheet resistance voltage detecting circuit (1-40) is all by signal output interface (1-39) Connect with desk type digital universal meter (37)；Described correction of the flank shape frame includes on the most spaced second Top board (2-7) and the second lower shoe (2-21), and it is supported on the second upper plate (2-7) and The second pillar between two lower shoes (2-21)；Described correction of the flank shape location fixed mechanism includes being arranged on the The second two-dimensional movement platform (2-29) at two lower shoes (2-21) top, it is arranged on the second two dimension and moves Second vacuum adsorption table (2-33) at moving platform (2-29) top and for the second vacuum adsorption table (2-33) the second vac sorb loop of evacuation, described second two-dimensional movement platform (2-29) bag Include the second X-axis mobile motor (2-36), the second Y-axis mobile motor (2-37), the second X-axis shifting Dynamic grating scale (2-35) and the second Y-axis moving grating chi (2-28), described second vacuum adsorption table (2-33) include that mutually fastening and fix the second absorptive table lower cover (2-33-1) connected and second inhales Attached upper cover (2-33-2), described second absorptive table lower cover (2-33-1) and the second absorptive table upper cover (2-33-2) fastening the space formed is the second vacuum chamber, described second absorptive table upper cover (2-33-2) Upper surface on be provided with second adsorption hole (2-33-3) of multiple spread configuration；Described second vacuum The second vacuum pump (2-13) that absorption loop includes being sequentially connected with by the second vacuum tube (2-12), Second vacuum filter (2-27), the second vacuum regulation valve (2-30) and the second vacuum solenoid (2-18), described second vacuum tube (2-12) is connected with described second vacuum chamber, and described second The upper connection of vacuum regulation valve (2-30) has the second vacuum meter (2-31)；Described second X-axis moves Grating scale (2-35) and the second Y-axis moving grating chi (2-28) all with data collecting plate card (10) Signal input part connect, described second X-axis mobile motor (2-36), the second Y-axis mobile motor (2-37) He the second vacuum solenoid (2-18) is all connected with the outfan exporting amplification board (11)； Described correction of the flank shape mechanism includes that the straight line being vertically arranged on the second upper plate (2-7) swings combined cylinders (2-9) with the knife rest (2-5) on the piston rod being connected to straight line swing combined cylinders (2-9), And second pneumatic circuit；Described knife rest (2-5) is positioned at the lower section of the second upper plate (2-7), institute State and horizontally disposed 3rd cylinder slide unit (2-3), described 3rd cylinder are installed on knife rest (2-5) Direct current generator support (2-26), described direct current generator it is fixedly connected with on the slide unit of slide unit (2-3) Direct current generator (2-23), the output of described direct current generator (2-23) are installed on support (2-26) Being fixedly connected with circular knife (2-24) on axle, rubber column (2-22) is passed through in the bottom of described knife rest (2-5) Being fixedly connected with pressing plate (2-2), the bottom of described pressing plate (2-2) is pasted with rubber (2-1), Described pressing plate (2-2) above and is provided with on rubber (2-1) and passes and right for circular knife (2-24) Circular knife (2-24) carries out the gathering sill guided；Described second pneumatic circuit includes by the second trachea (2-32) the second air pump (2-34) of being sequentially connected with, the second air filter (2-38), second Air relief valve (2-39) and the second Pressure gauge (2-40), and be positioned at the second Pressure gauge (2-40) The first two five electric change valves (2-15) that second trachea (2-32) of rear end is connected in parallel, The second two five electric change valves (2-16) and the 3rd two five electric change valves (2-17), Described straight line swings the clockwise oscillation air inlet (2-9-1) of combined cylinders (2-9) and puts counterclockwise Dynamic air inlet (2-9-2) with the first two five electric change valves (2-15) two respectively give vent to anger Mouth connects, and described straight line swings stretching out motion air inlet (2-9-3) and contracting of combined cylinders (2-9) Backhaul dynamic air inlet (2-9-4) respectively with two of the second two five electric change valves (2-16) Gas outlet connects, and the forward of described 3rd cylinder slide unit (2-3) moves into QI KOU (2-3-1) and instead To move into QI KOU (2-3-2) respectively with two of the 3rd two five electric change valve (2-17) Gas outlet connects；Described direct current generator (2-23), the first two five electric change valves (2-15), The second two five electric change valves (2-16) and the 3rd two five electric change valve (2-17) are equal It is connected with the outfan of output amplification board (11)；It is characterized in that, the method comprises the following steps:
Step one, big array resistors formula foil gauge detect automatically, and detailed process is:
Big array resistors formula foil gauge diaphragm (14) is manually placed on by step 101, operator After one vacuum adsorption table (1-13) is upper, in computer (4) upper input absorption fixed instruction, and open Dynamic first vacuum pump (1-30), data collecting plate card (10) is exported by output amplification board (11) Signal drives the first vacuum solenoid (1-25) to open, and the first vacuum pump (1-30) evacuation makes institute Produce negative pressure in stating the first vacuum chamber, big array resistors formula foil gauge diaphragm (14) is absorbed and fixed at On the upper surface of the first absorptive table upper cover (1-13-2)；
Step 102, start detection instruction, first, data collecting plate card in the upper input of computer (4) (10) the first air-operated solenoid valve (1-26) is driven to open by output amplification board (11) output signal, First cylinder slide unit (1-2) drives the second cylinder slide unit (1-4) by cylinder slide unit installing plate (1-3) With spring probe array (1-9) horizontal movement；Then, data collecting plate card (10) is by output Amplification board (11) output signal drives the second air-operated solenoid valve (1-32) to open, the second cylinder slide unit (1-4) spring probe array (1-9) is driven to move downward by probe box connecting plate (1-5), Spring probe array (1-9) is made to arrive at first group of resistance-strain blade unit to be detected；
Step 103, operation computer (4), computer (4) passes through desk type digital universal meter (37) With foil gauge resistive voltage testing circuit (1-40), in first group of resistance-strain blade unit each electricity Resistance and the voltage of resistance foil gauge measure, and measurement result is exported by desk type digital universal meter (37) To computer (4), measurement result is compared with examination criteria, and records ratio by computer (4) Relatively result；
After step 104, comparative result record complete, first, data collecting plate card (10) is by defeated Going out amplification board (11) output signal drives the second air-operated solenoid valve (1-32) to commutate, and the second cylinder is sliding Platform (1-4) drives spring probe array (1-9) to move upward by probe box connecting plate (1-5), Spring probe array (1-9) is made to leave to be detected first group resistance-strain blade unit；Then, number The first Y-axis mobile motor is driven by output amplification board (11) output signal according to analog input card (10) (1-15), the first Y-axis mobile motor (1-15) drives the first vacuum adsorption table (1-13) mobile, Displacement is fed back to by the first Y-axis moving grating chi (1-10) by data collecting plate card (10) Computer (4), until stopping after moving the width distance of one group of resistance-strain blade unit；
Step 105, data collecting plate card (10) are again by output amplification board (11) output signal Driving the second air-operated solenoid valve (1-32) to commutate, the second cylinder slide unit (1-4) is by probe box even Fishplate bar (1-5) drives spring probe array (1-9) to move downward, and makes spring probe array (1-9) At next group resistance-strain blade unit that arrival is to be detected；
Repetition step 103 is to step 105, until all of resistance-strain blade unit has detected；
Step 2, the big array resistors automatic correction of the flank shape of formula foil gauge, detailed process is:
Big array resistors formula foil gauge diaphragm (14) is manually placed on by step 201, operator After two vacuum adsorption table (2-33) are upper, in computer (4) upper input absorption fixed instruction, and open Dynamic second vacuum pump (2-13), data collecting plate card (10) is exported by output amplification board (11) Signal drives the second vacuum solenoid (2-18) to open, and the second vacuum pump (2-13) evacuation makes institute Produce negative pressure in stating the second vacuum chamber, big array resistors formula foil gauge diaphragm (14) is absorbed and fixed at On the upper surface of the second absorptive table upper cover (2-33-2)；
Step 202, start correction of the flank shape instruction in the upper input of computer (4), big array resistors formula is strained Sheet diaphragm (14) carries out correction of the flank shape, and detailed process is:
Step 2021, the correction of the flank shape of Y direction, detailed process is:
Step 20211, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic the second two five electric change valves (2-16) are connected, and straight line swings combined cylinders (2-9) Stretching out motion air inlet (2-9-3) to connect, straight line swings the piston rod of combined cylinders (2-9) and drives Knife rest (2-5) moves downward, and makes pressing plate (2-2) compress big array resistors formula foil gauge diaphragm (14)；
Step 20212, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic direct current generator (2-23) starts, and direct current generator (2-23) drives circular knife (2-24) to rotate；
Step 20213, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic 3rd two five electric change valve (2-17) is connected, the forward of the 3rd cylinder slide unit (2-3) Moving into QI KOU (2-3-1) to connect, the slide unit of the 3rd cylinder slide unit (2-3) drives direct current generator (2-23) Moving with the overall forward of circular knife (2-24), the circular knife (2-24) of rotation cuts big array electricity Resistive foil gauge diaphragm (14)；
Step 20214, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic the second two five electric change valves (2-16) commutations, straight line swings combined cylinders (2-9) Retraction movement air inlet (2-9-4) is connected, and straight line swings the piston rod of combined cylinders (2-9) and drives Knife rest (2-5) moves upward, and makes pressing plate (2-2) leave big array resistors formula foil gauge diaphragm (14) And return initial position；
Step 20215, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic 3rd two five electric change valve (2-17) commutation, the 3rd cylinder slide unit (2-3) reverse Moving into QI KOU (2-3-2) to connect, the slide unit of the 3rd cylinder slide unit (2-3) drives direct current generator (2-23) Overall with circular knife (2-24) reversely moves, and makes direct current generator (2-23) and circular knife (2-24) Return initial position；
Step 20216, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic second Y-axis mobile motor (2-37), the second Y-axis mobile motor (2-37) drives the second vacuum Absorptive table (2-33) is mobile, and displacement is passed through data by the second Y-axis moving grating chi (2-28) Analog input card (10) feeds back to computer (4), until the second vacuum adsorption table (2-33) is mobile Stop after distance a；Wherein, a is resistance strain plate width in the Y-axis direction；
Repeat step 20211～20216, until completing big array resistors formula foil gauge diaphragm (14) Y Till all of cutting of direction of principal axis；
Step 2022, the second vacuum adsorption table (2-33) reset: data collecting plate card (10) passes through Output amplification board (11) output signal drives the second Y-axis mobile motor (2-37), the second Y-axis to move Galvanic electricity machine (2-37) drives the second vacuum adsorption table (2-33) mobile, the second Y-axis moving grating chi (2-28) displacement is fed back to computer (4) by data collecting plate card (10), until Second vacuum adsorption table (2-33) returns initial position；
Step 2023, the correction of the flank shape of X-direction, detailed process is:
Step 20231, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic the first two five electric change valves (2-15) are connected, and straight line swings combined cylinders (2-9) Clockwise oscillation air inlet (2-9-1) is connected, and straight line swings the piston rod band of combined cylinders (2-9) Movable knife rack (2-5) turns clockwise 90 °, and knife rest (2-5) drives direct current generator (2-23) and circle The entirety of blade (2-24) turns clockwise 90 °；
Step 20232, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic the second two five electric change valves (2-16) are connected, and straight line swings combined cylinders (2-9) Stretching out motion air inlet (2-9-3) to connect, straight line swings the piston rod of combined cylinders (2-9) and drives Knife rest (2-5) moves downward, and makes pressing plate (2-2) compress big array resistors formula foil gauge diaphragm (14)；
Step 20233, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic 3rd two five electric change valve (2-17) is connected, the forward of the 3rd cylinder slide unit (2-3) Moving into QI KOU (2-3-1) to connect, the slide unit of the 3rd cylinder slide unit (2-3) drives direct current generator (2-23) Moving with the overall forward of circular knife (2-24), the circular knife (2-24) of rotation cuts big array electricity Resistive foil gauge diaphragm (14)；
Step 20234, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic the second two five electric change valves (2-16) commutations, straight line swings combined cylinders (2-9) Retraction movement air inlet (2-9-4) is connected, and straight line swings the piston rod of combined cylinders (2-9) and drives Knife rest (2-5) moves upward, and makes pressing plate (2-2) leave big array resistors formula foil gauge diaphragm (14) And return initial position；
Step 20235, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic 3rd two five electric change valve (2-17) commutation, the 3rd cylinder slide unit (2-3) reverse Moving into QI KOU (2-3-2) to connect, the slide unit of the 3rd cylinder slide unit (2-3) drives direct current generator (2-23) Overall with circular knife (2-24) reversely moves, and makes direct current generator (2-23) and circular knife (2-24) Return initial position；
Step 20236, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic second X-axis mobile motor (2-36), the second X-axis mobile motor (2-36) drives the second vacuum Absorptive table (2-33) is mobile, and displacement is passed through data by the second X-axis moving grating chi (2-35) Analog input card (10) feeds back to computer (4), until the second vacuum adsorption table (2-33) is mobile Stop after distance b；Wherein, b is resistance strain plate width in the X-axis direction；
Repeat step 20232～20236, until completing big array resistors formula foil gauge diaphragm (14) X Till all of cutting of direction of principal axis；
Step 203, back to zero reset, and detailed process is:
Step 20301, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic direct current generator (2-23) stops operating, and circular knife (2-24) stops operating；
Step 20302, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic the first two five electric change valves (2-15) are connected, and straight line swings combined cylinders (2-9) Counter-clockwise swing air inlet (2-9-2) is connected, and straight line swings the piston rod band of combined cylinders (2-9) Movable knife rack (2-5) half-twist counterclockwise, knife rest (2-5) drives direct current generator (2-23) and circle The overall half-twist counterclockwise of blade (2-24), returns to initial position；
Step 20303, data collecting plate card (10) are driven by output amplification board (11) output signal Dynamic second X-axis mobile motor (2-36), the second X-axis mobile motor (2-36) drives the second vacuum Absorptive table (2-33) is mobile, and displacement is passed through data by the second X-axis moving grating chi (2-35) Analog input card (10) feeds back to computer (4), until the second vacuum adsorption table (2-33) returns Initial position.
2. automatically detect according to a kind of big array resistors formula foil gauge described in claim 1, correction of the flank shape side Method, it is characterised in that: described first pillar is by many first aluminium section bars connecting into frame structure (1-19) making, described first aluminium section bar (1-19) and the first aluminium section bar (1-19) are by first Triangle connecting rack (1-18) is fixing to be connected, described first aluminium section bar (1-19) and the first upper plate (1-1) connecting by screw bolt and nut is fixing, described first aluminium section bar (1-19) is gone to the bottom with first Plate (1-17) connects by bolt, nut and the first triangle connecting rack (1-18) are fixing；Described Second pillar is made up of many second aluminium section bars (2-20) connecting into frame structure, described second aluminum Section bar (2-20) is fixed by the second triangle connecting rack (2-19) with the second aluminium section bar (2-20) Connecting, described second aluminium section bar (2-20) and the second upper plate (2-7) are solid by screw bolt and nut Fixed connection, described second aluminium section bar (2-20) and the second lower shoe (2-21) are by bolt, nut Connection fixing with the second triangle connecting rack (2-19).
3. automatically detect according to a kind of big array resistors formula foil gauge described in claim 1, correction of the flank shape side Method, it is characterised in that: described first absorptive table lower cover (1-13-1) and the first absorptive table upper cover (1-13-2) the first sealing gasket (1-13-4), described first absorptive table lower cover it are provided with between (1-13-1), the first sealing gasket (1-13-4) and the first absorptive table upper cover (1-13-2) are by the One absorptive table connecting bolt (1-13-5) is fixing to be connected, described first absorptive table lower cover (1-13-1) Side be provided with the first screwed hole (1-13-6), described first vacuum tube (1-31) pass through first Pneumatic joint (1-33) is connected with the first screwed hole (1-13-6)；Described first absorptive table upper cover (1-13-2) a plurality of first level it is provided with on upper surface to groove and a plurality of first vertically to recessed Groove, a plurality of described first level vertically intersects to groove to groove and a plurality of described first and defines Multiple first projections (1-13-7), the quantity of described first adsorption hole (1-13-3) is multiple, many Individual first adsorption hole (1-13-3) is distributed on multiple first projection (1-13-7)；Described first inhales Attached upper cover (1-13-2) upper surface be shaped as rectangle, described first absorptive table upper cover (1-13-2) The first reference location line (1-13-8) all it is carved with on four feet of upper surface.
4. automatically detect according to a kind of big array resistors formula foil gauge described in claim 3, correction of the flank shape side Method, it is characterised in that: described second absorptive table lower cover (2-33-1) and the second absorptive table upper cover (2-33-2) the second sealing gasket (2-33-4), described second absorptive table lower cover it are provided with between (2-33-1), the second sealing gasket (2-33-4) and the second absorptive table upper cover (2-33-2) are by the Two absorptive table connecting bolts (2-33-5) are fixing to be connected, described second absorptive table lower cover (2-33-1) Side be provided with the second screwed hole (2-33-6), described second vacuum tube (2-12) pass through second Pneumatic joint (2-48) is connected with the second screwed hole (2-33-6)；Described second absorptive table upper cover (2-33-2) a plurality of second level it is provided with on upper surface to groove and a plurality of second vertically to recessed Groove, a plurality of described second level vertically intersects to groove to groove and a plurality of described second and defines Multiple second projections (2-33-7), multiple described second adsorption holes (2-33-3) are distributed in multiple On two projections (2-33-7)；Described second absorptive table upper cover (2-33-2) upper surface be shaped as square Shape, four feet of described second absorptive table upper cover (2-33-2) upper surface is all carved with second with reference to fixed Bit line (2-33-8).
5. automatically detect according to a kind of big array resistors formula foil gauge described in claim 1, correction of the flank shape side Method, it is characterised in that: described first cylinder slide unit (1-2) is Rodless cylinder slide unit, described detection The quantity of circuit board (1-8) is two pieces, and two pieces of described testing circuit plates (1-8) are passed through one on the other Copper stud (1-7) and the fixing connection of screw (1-34), described spring probe array (1-9) is with upper The testing circuit plate (1-8) in portion is worn after welding and penetrate the testing circuit plate (1-8) of bottom still further below Go out probe box (1-6).
6. automatically detect according to a kind of big array resistors formula foil gauge described in claim 1, correction of the flank shape side Method, it is characterised in that: described spring probe array (1-9) is constituted by organizing spring probe group, often more Group spring probe group is by for measuring with the four of a resistance strain gage when measuring, point is corresponding to be connect The four spring probe compositions touched；Every road foil gauge resistive voltage testing circuit (1-40) all includes type Number it is the chip S1 of ADG84, chip S2 and chip S3, described signal output interface (1-39) For having the Wiring port P1 of four pins；1st pin of described chip S1 is defeated with power supply Go out and hold VCC to connect, and by electric capacity C1 ground connection, the 4th pin of described chip S1 and the 8th pin Connect and be the first control signal input IN1 of foil gauge resistive voltage testing circuit (1-40), 5th pin of described chip S1 is connected with first measurement point of described resistance strain gage, described core The 6th pin ground connection of sheet S1, the 7th pin of described chip S1 and the second of described resistance strain gage Individual point of measuring connects；1st pin of described chip S2 connects with the outfan VCC of power supply, And by electric capacity C2 ground connection, the 4th pin of described chip S2 and the 8th pin connect and are foil gauge The of second control signal input IN2 of resistive voltage testing circuit (1-40), described chip S2 5 pins are connected with the 3rd measurement point of described resistance strain gage, and the 6th pin of described chip S2 connects Ground, the 7th pin of described chip S2 is connected with the 4th measurement point of described resistance strain gage；Institute The 1st pin stating chip S3 connects with the outfan VCC of power supply, and by electric capacity C3 ground connection, 4th pin of described chip S3 and the 8th pin connect and are foil gauge resistive voltage testing circuit (1-40) the 3rd control signal input IN3, the 5th pin of described chip S3 and described resistance First measurement point of foil gauge connects, the 6th pin ground connection of described chip S3, described chip S3 Second measurement point of the 7th pin and described resistance strain gage be connected；Described foil gauge resistive voltage First control signal input IN1 of testing circuit (1-40), the second control signal input IN2 All signal output parts with data collecting plate card (10) are connected with the 3rd control signal input IN3, First signal that 3rd pin is foil gauge resistive voltage testing circuit (1-40) of described chip S1 Outfan D1, the 9th pin of described chip S1 is foil gauge resistive voltage testing circuit (1-40) Secondary signal outfan D2, the 3rd pin of described chip S2 and the 3rd pin of described chip S3 Connect and for the 3rd signal output part D3 of foil gauge resistive voltage testing circuit (1-40), described core 9th pin of sheet S2 and the 9th pin of described chip S3 connects and for foil gauge resistive voltage detect 4th signal output part D4 of circuit (1-40), every road foil gauge resistive voltage testing circuit (1-40) The first signal output part D1 all the 1st pins with described Wiring port P1 be connected, every road foil gauge The secondary signal outfan D2 of resistive voltage testing circuit (1-40) is all with described Wiring port P1's 2nd pin connects, the 3rd signal output part of every road foil gauge resistive voltage testing circuit (1-40) D3 all the 3rd pins with described Wiring port P1 are connected, every road foil gauge resistive voltage testing circuit (1-40) the 4th signal output part D4 all the 4th pins with described Wiring port P1 are connected.
7. automatically detect according to a kind of big array resistors formula foil gauge described in claim 6, correction of the flank shape side Method, it is characterised in that: described desk type digital universal meter (37) is Keithley 2000 type desktop digital Circuit tester (37), the 1st pin of described Wiring port P1 and the described Keithley 2000 desk-top number of type The INPUT HI interface of word circuit tester (37) connects, the 2nd pin of described Wiring port P1 and institute The INPUT LO interface stating Keithley 2000 type desk type digital universal meter (37) connects, described wiring 3rd pin of port P1 and the SENSE Ω of described Keithley 2000 type desk type digital universal meter (37) 4WIRE HI interface connects, the 4th pin of described Wiring port P1 and described Keithley 2000 type platform The SENSE Ω 4WIRE LO interface of formula digital multimeter (37) connects.
8. automatically detect according to a kind of big array resistors formula foil gauge described in claim 1, correction of the flank shape side Method, it is characterised in that: described straight line swings combined cylinders (2-9) by flange installed part (2-8) It is fixedly connected on the second upper plate (2-7) top with bolt；Described knife rest (2-5) passes through flange spiral shell Female (2-14) and bolt are fixedly connected on straight line and swing on the piston rod of combined cylinders (2-9)；Institute State and on knife rest (2-5), be provided with cylinder slide unit connecting plate (2-6), described 3rd cylinder slide unit (2-3) It is arranged on knife rest (2-5) by the way of be connected fixing with cylinder slide unit connecting plate (2-6)；Institute Stating circular knife (2-24) is ultra-thin wolfram steel circular knife, and described circular knife (2-24) is connected by blade Head (2-25) is fixedly connected on the output shaft of direct current generator (2-23).
9. automatically detect according to a kind of big array resistors formula foil gauge described in claim 1, correction of the flank shape side Method, it is characterised in that: the model of described data collecting plate card (10) is NI PCI6509, described defeated The model going out amplification board (11) is HSF16M.
CN201610648799.4A 2015-12-31 2015-12-31 A kind of big array resistors formula foil gauge detects automatically, correction method Expired - Fee Related CN106017301B (en)

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