CN105992929B - 用于非接触式光学测距的装置 - Google Patents

用于非接触式光学测距的装置 Download PDF

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Publication number
CN105992929B
CN105992929B CN201480064945.8A CN201480064945A CN105992929B CN 105992929 B CN105992929 B CN 105992929B CN 201480064945 A CN201480064945 A CN 201480064945A CN 105992929 B CN105992929 B CN 105992929B
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CN
China
Prior art keywords
optical
lens
light
measuring head
face
Prior art date
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CN201480064945.8A
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English (en)
Chinese (zh)
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CN105992929A (zh
Inventor
赫伯特·格罗斯
B·梅塞施米特
钟敏仪
马塞尔·孔泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micro Epsilon Messtechnik GmbH and Co KG
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Micro Epsilon Messtechnik GmbH and Co KG
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Publication of CN105992929A publication Critical patent/CN105992929A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201480064945.8A 2013-11-29 2014-11-12 用于非接触式光学测距的装置 Active CN105992929B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013113265.0A DE102013113265B4 (de) 2013-11-29 2013-11-29 Vorrichtung zur berührungslosen optischen Abstandsmessung
DE102013113265.0 2013-11-29
PCT/EP2014/074348 WO2015078693A1 (de) 2013-11-29 2014-11-12 Vorrichtung zur berührungslosen optischen abstandsmessung

Publications (2)

Publication Number Publication Date
CN105992929A CN105992929A (zh) 2016-10-05
CN105992929B true CN105992929B (zh) 2019-04-19

Family

ID=51871075

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480064945.8A Active CN105992929B (zh) 2013-11-29 2014-11-12 用于非接触式光学测距的装置

Country Status (7)

Country Link
US (1) US10634485B2 (ja)
EP (1) EP3074719B1 (ja)
JP (1) JP6258491B2 (ja)
KR (1) KR101890047B1 (ja)
CN (1) CN105992929B (ja)
DE (1) DE102013113265B4 (ja)
WO (1) WO2015078693A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI127908B (en) * 2015-09-22 2019-05-15 Teknologian Tutkimuskeskus Vtt Oy Method and apparatus for measuring surface height
KR101899711B1 (ko) 2017-02-07 2018-09-17 한국광기술원 색수차 렌즈를 이용한 공초점 영상 구현 장치
EP3564734A1 (en) * 2018-05-02 2019-11-06 Cern An optical system for producing a structured beam
EP3567339A1 (en) * 2018-05-10 2019-11-13 Nanovea, Inc. 3d surface scanning white light axial chromatism device and method
CN109059762B (zh) * 2018-08-07 2019-08-23 西安交通大学 一种菲涅尔波带片光谱共焦测量方法
CN110567379B (zh) * 2019-09-26 2021-03-30 合肥工业大学 一种基于啁啾光纤光栅的光谱共焦位移传感器
CN113176208B (zh) * 2021-04-30 2022-05-20 谱诉光电科技（苏州）有限公司 用于材料透光率检测装置的光源模组及透光率检测装置

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US5785651A (en) 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
JP2000275027A (ja) 1999-03-23 2000-10-06 Takaoka Electric Mfg Co Ltd スリット共焦点顕微鏡とそれを用いた表面形状計測装置
DE102004011189B4 (de) 2004-03-04 2011-05-05 Carl Mahr Holding Gmbh Optischer Messkopf
DE102005023351A1 (de) 2005-05-17 2006-11-30 Micro-Epsilon Messtechnik Gmbh & Co Kg Vorrichtung und Verfahren zum Vermessen von Oberflächen
DE102006007170B4 (de) * 2006-02-08 2009-06-10 Sirona Dental Systems Gmbh Verfahren und Anordnung zur schnellen und robusten chromatisch konfokalen 3D-Messtechnik
US7215478B1 (en) * 2006-03-06 2007-05-08 Olympus Corporation Immersion objective optical system
DE102006017400B4 (de) 2006-04-13 2010-01-07 Precitec Optronik Gmbh Vorrichtung und Verfahren zur berührungslosen Vermessung wenigstens einer gekrümmten Fläche
US7626705B2 (en) 2007-03-30 2009-12-01 Mitutoyo Corporation Chromatic sensor lens configuration
US7990522B2 (en) * 2007-11-14 2011-08-02 Mitutoyo Corporation Dynamic compensation of chromatic point sensor intensity profile data selection
DE102008029459B4 (de) * 2008-06-20 2011-07-14 MEL Mikroelektronik GmbH, 85386 Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
US7873488B2 (en) * 2008-12-08 2011-01-18 Mitutoyo Corporation On-site calibration method and object for chromatic point sensors
US8194251B2 (en) 2010-08-26 2012-06-05 Mitutoyo Corporation Method for operating a dual beam chromatic point sensor system for simultaneously measuring two surface regions
US8212997B1 (en) 2011-02-23 2012-07-03 Mitutoyo Corporation Chromatic confocal point sensor optical pen with extended measuring range
JP5790178B2 (ja) 2011-03-14 2015-10-07 オムロン株式会社 共焦点計測装置
FR2981160A1 (fr) * 2011-10-10 2013-04-12 Altatech Semiconductor Dispositif et procede d'inspection et de controle de plaquettes semi-conductrices.
GB2497792A (en) * 2011-12-21 2013-06-26 Taylor Hobson Ltd Metrological apparatus comprising a confocal sensor
US8736817B2 (en) * 2012-05-25 2014-05-27 Mitutoyo Corporation Interchangeable chromatic range sensor probe for a coordinate measuring machine
US9068822B2 (en) * 2013-07-03 2015-06-30 Mitutoyo Corporation Chromatic range sensor probe detachment sensor

Also Published As

Publication number Publication date
WO2015078693A1 (de) 2015-06-04
EP3074719B1 (de) 2017-11-08
US20160377411A1 (en) 2016-12-29
KR101890047B1 (ko) 2018-08-20
KR20160117415A (ko) 2016-10-10
DE102013113265B4 (de) 2019-03-07
JP2016540243A (ja) 2016-12-22
EP3074719A1 (de) 2016-10-05
JP6258491B2 (ja) 2018-01-10
DE102013113265A1 (de) 2015-06-25
US10634485B2 (en) 2020-04-28
CN105992929A (zh) 2016-10-05

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