CN105992929B - 用于非接触式光学测距的装置 - Google Patents
用于非接触式光学测距的装置 Download PDFInfo
- Publication number
- CN105992929B CN105992929B CN201480064945.8A CN201480064945A CN105992929B CN 105992929 B CN105992929 B CN 105992929B CN 201480064945 A CN201480064945 A CN 201480064945A CN 105992929 B CN105992929 B CN 105992929B
- Authority
- CN
- China
- Prior art keywords
- optical
- lens
- light
- measuring head
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/18—Optical objectives specially designed for the purposes specified below with lenses having one or more non-spherical faces, e.g. for reducing geometrical aberration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lenses (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102013113265.0A DE102013113265B4 (de) | 2013-11-29 | 2013-11-29 | Vorrichtung zur berührungslosen optischen Abstandsmessung |
DE102013113265.0 | 2013-11-29 | ||
PCT/EP2014/074348 WO2015078693A1 (de) | 2013-11-29 | 2014-11-12 | Vorrichtung zur berührungslosen optischen abstandsmessung |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105992929A CN105992929A (zh) | 2016-10-05 |
CN105992929B true CN105992929B (zh) | 2019-04-19 |
Family
ID=51871075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201480064945.8A Active CN105992929B (zh) | 2013-11-29 | 2014-11-12 | 用于非接触式光学测距的装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10634485B2 (ja) |
EP (1) | EP3074719B1 (ja) |
JP (1) | JP6258491B2 (ja) |
KR (1) | KR101890047B1 (ja) |
CN (1) | CN105992929B (ja) |
DE (1) | DE102013113265B4 (ja) |
WO (1) | WO2015078693A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FI127908B (en) * | 2015-09-22 | 2019-05-15 | Teknologian Tutkimuskeskus Vtt Oy | Method and apparatus for measuring surface height |
KR101899711B1 (ko) | 2017-02-07 | 2018-09-17 | 한국광기술원 | 색수차 렌즈를 이용한 공초점 영상 구현 장치 |
EP3564734A1 (en) * | 2018-05-02 | 2019-11-06 | Cern | An optical system for producing a structured beam |
EP3567339A1 (en) * | 2018-05-10 | 2019-11-13 | Nanovea, Inc. | 3d surface scanning white light axial chromatism device and method |
CN109059762B (zh) * | 2018-08-07 | 2019-08-23 | 西安交通大学 | 一种菲涅尔波带片光谱共焦测量方法 |
CN110567379B (zh) * | 2019-09-26 | 2021-03-30 | 合肥工业大学 | 一种基于啁啾光纤光栅的光谱共焦位移传感器 |
CN113176208B (zh) * | 2021-04-30 | 2022-05-20 | 谱诉光电科技(苏州)有限公司 | 用于材料透光率检测装置的光源模组及透光率检测装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5785651A (en) | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
JP2000275027A (ja) | 1999-03-23 | 2000-10-06 | Takaoka Electric Mfg Co Ltd | スリット共焦点顕微鏡とそれを用いた表面形状計測装置 |
DE102004011189B4 (de) | 2004-03-04 | 2011-05-05 | Carl Mahr Holding Gmbh | Optischer Messkopf |
DE102005023351A1 (de) | 2005-05-17 | 2006-11-30 | Micro-Epsilon Messtechnik Gmbh & Co Kg | Vorrichtung und Verfahren zum Vermessen von Oberflächen |
DE102006007170B4 (de) * | 2006-02-08 | 2009-06-10 | Sirona Dental Systems Gmbh | Verfahren und Anordnung zur schnellen und robusten chromatisch konfokalen 3D-Messtechnik |
US7215478B1 (en) * | 2006-03-06 | 2007-05-08 | Olympus Corporation | Immersion objective optical system |
DE102006017400B4 (de) | 2006-04-13 | 2010-01-07 | Precitec Optronik Gmbh | Vorrichtung und Verfahren zur berührungslosen Vermessung wenigstens einer gekrümmten Fläche |
US7626705B2 (en) | 2007-03-30 | 2009-12-01 | Mitutoyo Corporation | Chromatic sensor lens configuration |
US7990522B2 (en) * | 2007-11-14 | 2011-08-02 | Mitutoyo Corporation | Dynamic compensation of chromatic point sensor intensity profile data selection |
DE102008029459B4 (de) * | 2008-06-20 | 2011-07-14 | MEL Mikroelektronik GmbH, 85386 | Verfahren und Vorrichtung zur berührungslosen Abstandsmessung |
US7873488B2 (en) * | 2008-12-08 | 2011-01-18 | Mitutoyo Corporation | On-site calibration method and object for chromatic point sensors |
US8194251B2 (en) | 2010-08-26 | 2012-06-05 | Mitutoyo Corporation | Method for operating a dual beam chromatic point sensor system for simultaneously measuring two surface regions |
US8212997B1 (en) | 2011-02-23 | 2012-07-03 | Mitutoyo Corporation | Chromatic confocal point sensor optical pen with extended measuring range |
JP5790178B2 (ja) | 2011-03-14 | 2015-10-07 | オムロン株式会社 | 共焦点計測装置 |
FR2981160A1 (fr) * | 2011-10-10 | 2013-04-12 | Altatech Semiconductor | Dispositif et procede d'inspection et de controle de plaquettes semi-conductrices. |
GB2497792A (en) * | 2011-12-21 | 2013-06-26 | Taylor Hobson Ltd | Metrological apparatus comprising a confocal sensor |
US8736817B2 (en) * | 2012-05-25 | 2014-05-27 | Mitutoyo Corporation | Interchangeable chromatic range sensor probe for a coordinate measuring machine |
US9068822B2 (en) * | 2013-07-03 | 2015-06-30 | Mitutoyo Corporation | Chromatic range sensor probe detachment sensor |
-
2013
- 2013-11-29 DE DE102013113265.0A patent/DE102013113265B4/de active Active
-
2014
- 2014-11-12 US US15/100,244 patent/US10634485B2/en active Active
- 2014-11-12 WO PCT/EP2014/074348 patent/WO2015078693A1/de active Application Filing
- 2014-11-12 CN CN201480064945.8A patent/CN105992929B/zh active Active
- 2014-11-12 EP EP14796137.9A patent/EP3074719B1/de active Active
- 2014-11-12 JP JP2016530981A patent/JP6258491B2/ja active Active
- 2014-11-12 KR KR1020167016852A patent/KR101890047B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
WO2015078693A1 (de) | 2015-06-04 |
EP3074719B1 (de) | 2017-11-08 |
US20160377411A1 (en) | 2016-12-29 |
KR101890047B1 (ko) | 2018-08-20 |
KR20160117415A (ko) | 2016-10-10 |
DE102013113265B4 (de) | 2019-03-07 |
JP2016540243A (ja) | 2016-12-22 |
EP3074719A1 (de) | 2016-10-05 |
JP6258491B2 (ja) | 2018-01-10 |
DE102013113265A1 (de) | 2015-06-25 |
US10634485B2 (en) | 2020-04-28 |
CN105992929A (zh) | 2016-10-05 |
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