CN105988424B - The generation method and generating means of semiconductor technology processing procedure information - Google Patents
The generation method and generating means of semiconductor technology processing procedure information Download PDFInfo
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- CN105988424B CN105988424B CN201510044192.0A CN201510044192A CN105988424B CN 105988424 B CN105988424 B CN 105988424B CN 201510044192 A CN201510044192 A CN 201510044192A CN 105988424 B CN105988424 B CN 105988424B
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Abstract
This application provides the generation methods and generating means of a kind of semiconductor technology processing procedure information.The generation method of the semiconductor technology processing procedure information includes: the quantity for being initially at product for obtaining board and the target output total amount in product of board, and it includes more batches of target outputs that target, which exports total amount,；Obtain the computation model for calculating the quantity in product in the time to be predicted on board；It is calculated on the board in the time to be predicted according to the quantity, target output total amount and computation model that are initially at product in the quantity of product；Judge whether the quantity in product on board is less than preset quantity within a preset time；And when judge on board when the quantity of product is less than preset quantity within a preset time, control board stop working.The generation method of the semiconductor technology processing procedure information avoids the improperly shutdown maintenance that manufacturing engineer rule of thumb makes and determines, improves the production capacity of board, avoid the influence to the production cycle.
Description
Technical field
This application involves technical field of manufacturing semiconductors, in particular to a kind of life of semiconductor technology processing procedure information
At method and generating means.
Background technique
During chip production, board controls the maximum race goods amount that department engineer sets board, production controlling part door
The monthly daily plan of unloading goods is formulated according to 90% maximum goods amount of running, manufacturing sector rule of thumb makes determining for shutdown maintenance
It is fixed.
The engineer of manufacturing sector can rule of thumb select that product water level is lower in process of production and board runs goods quantity
Shutdown maintenance is carried out when less.Sometimes, manufacturing engineer rule of thumb makes shutdown maintenance determines and improper, such as manufactures
More in the quantity of product when shutdown maintenance is done in department's shutdown, water level increases, and causing board to run goods amount is more than that its is maximum allowable
, there is the phenomenon that heap goods, impacts to the production cycle, reduce the production capacity of board in value.
In addition, in the fabrication process, the load of board sometimes is more than its maximum permissible value, manufacturing sector just needs to seek survival
Produce the daily plan of unloading goods of control department modification.Manufacturing sector frequently requires the plan meeting of unloading goods of production controlling part door modification chip
Increase the workload of engineer, and frequent overload can impact the production cycle, reduce board production capacity.
It is above-mentioned due to improper shutdown maintenance with improperly unload goods plan caused by board production capacity be lowered aiming at the problem that, mesh
It is preceding not yet to put forward effective solutions.
Summary of the invention
The application is intended to provide the generation method and generating means of a kind of semiconductor technology processing procedure information, to solve existing skill
It unloads goods in art due to improper shutdown maintenance and improperly and plans the problem of caused board production capacity is lowered.
To achieve the goals above, according to the one aspect of the application, a kind of semiconductor technology processing procedure information is provided
Generation method, which is characterized in that above-mentioned generation method include: obtain board the quantity for being initially at product and above-mentioned board
The target of product exports total amount, and above-mentioned target output total amount includes more batches of target outputs；It obtains for calculating the time to be predicted
The computation model of the quantity in product on interior above-mentioned board；It is total according to the above-mentioned quantity for being initially at product, the output of above-mentioned target
Amount and above-mentioned computation model calculate on the above-mentioned board in the above-mentioned time to be predicted in the quantity of product；Judge on above-mentioned board
The quantity in product within a preset time whether be less than preset quantity；And it is above-mentioned in product on above-mentioned board when judging
Quantity when being less than above-mentioned preset quantity within a preset time, control above-mentioned board and stop working.
Further, it is calculated according to the above-mentioned quantity for being initially at product, above-mentioned target output and above-mentioned computation model
Quantity on above-mentioned board in the above-mentioned time to be predicted in product includes: by the above-mentioned quantity for being initially at product and first day
First day initial goods in process inventory of the summation of first target output as above-mentioned board；According to history run goods data and
Above-mentioned first day initial goods in process inventory simulates first day number in product by above-mentioned board in above-mentioned computation model
Amount；Quantity using first day above-mentioned board of end time in product is with second day first target output as second day
Initial goods in process inventory；And goods data and above-mentioned second day initial goods in process inventory are run in above-mentioned meter according to above-mentioned history
Calculate the quantity in product for simulating second day by above-mentioned board in model.
Further, it is calculated according to the above-mentioned quantity for being initially at product, above-mentioned target output total amount and above-mentioned computation model
Quantity on the above-mentioned board in the above-mentioned time to be predicted in product includes: the load information for obtaining above-mentioned board；In judgement
State whether load information shows above-mentioned board overload；If judging, above-mentioned load information does not show above-mentioned board overload,
Be included in into board load number and using current time as it is above-mentioned in product into machine time；It is above-mentioned to obtain above-mentioned board processing
In the processing time of product；And by it is above-mentioned in product into the sum of machine time and above-mentioned processing time as above-mentioned in product
The machine time out.
Further, according to the above-mentioned quantity for being initially at product, above-mentioned target output total amount and above-mentioned computation model meter
It calculates on the above-mentioned board in the above-mentioned time to be predicted after the quantity of product, above-mentioned generation method further include: according to above-mentioned
The load of board, it is above-mentioned into the machine time and it is above-mentioned go out the machine time count the goods in process inventory of above-mentioned board within a predetermined period of time
Variation, obtains trend chart；And the above-mentioned trend chart of output.
Further, according to the above-mentioned quantity for being initially at product, above-mentioned target output total amount and above-mentioned computation model meter
It calculates on the above-mentioned board in the above-mentioned time to be predicted after the quantity of product, the above method further include: according to above-mentioned to pre-
It surveys on the above-mentioned board in the time and generates the plan of unloading goods of chip in the quantity of product；And compare the chip plan of unloading goods of formulation
With the plan of unloading goods of the chip of above-mentioned generation, the chip plan of unloading goods of above-mentioned formulation is adjusted.
To achieve the goals above, according to further aspect of the application, a kind of semiconductor technology processing procedure information is provided
Generating means, which is characterized in that above-mentioned generating means include: first acquisition unit, are initially at product for obtain board
Quantity and the target in product of above-mentioned board export total amount, above-mentioned target output total amount includes more batches of target outputs；The
Two acquiring units, for obtaining the computation model for calculating the quantity in product in the time to be predicted on above-mentioned board；Meter
Unit is calculated, for calculating according to the above-mentioned quantity for being initially at product, above-mentioned target output total amount and above-mentioned computation model above-mentioned
In the quantity of product on above-mentioned board in time to be predicted；Judging unit, for judging the number in product on above-mentioned board
Whether amount is less than preset quantity；And control unit, for above-mentioned being less than in the quantity of product judge on above-mentioned board
When above-mentioned preset quantity, controls above-mentioned board and stop working
Further, above-mentioned computing unit includes: the first computing module, for by the above-mentioned quantity for being initially at product and the
First day initial goods in process inventory of the summation of one day first target output as above-mentioned board；First simulation mould
Block, for being simulated first day in above-mentioned computation model according to history race goods data and above-mentioned first day initial goods in process inventory
By the quantity in product of above-mentioned board；Second computing module, for by first day above-mentioned board of end time in product
Quantity and second day first target output summation as second day initial goods in process inventory；And second simulation
Module, for being simulated in above-mentioned computation model according to above-mentioned history race goods data and above-mentioned second day initial goods in process inventory
The second day quantity in product by above-mentioned board.
Further, above-mentioned computing unit further include: third obtains module, for obtaining the load information of above-mentioned board；
Judgment module, for judging whether above-mentioned load information shows above-mentioned board overload；Into machine logging modle, if for judging
Above-mentioned load information does not show above-mentioned board overload, then be included in into board load number and using current time as it is above-mentioned
Product into the machine time；4th obtains module, handles the above-mentioned processing time in product for obtaining above-mentioned board；And machine out
Logging modle, for by it is above-mentioned in product into the sum of machine time and above-mentioned processing time as above-mentioned in product when going out machine
Between.
Further, above-mentioned generating means further include: statistical module, for according to the above-mentioned quantity for being initially at product,
Above-mentioned target output total amount and above-mentioned computation model calculate on the above-mentioned board in the above-mentioned time to be predicted in the quantity of product
Later, according to the load of above-mentioned board, it is above-mentioned into the machine time and it is above-mentioned go out the machine time count above-mentioned board within a predetermined period of time
Goods in process inventory variation, obtain trend chart；Output module, for exporting above-mentioned trend chart.
Further, above-mentioned apparatus further include: schedule module, for according to the above-mentioned quantity for being initially at product, above-mentioned
Target exports total amount and above-mentioned computation model calculates on the above-mentioned board in the above-mentioned time to be predicted after the quantity of product
Generate the plan of unloading goods of chip；And adjustment module, the chip for comparing formulation, which is unloaded goods, plans meter of unloading goods with the chip of above-mentioned generation
It draws, adjusts the chip plan of unloading goods of above-mentioned formulation.
Using the technical solution of the application, using computation model, and according to the quantity and target for being initially at product of acquisition
Output quantity is accurately calculated on the board in the time to be predicted in the quantity of product；The quantity in product on board is judged again
Whether it is less than preset quantity within a preset time, if the quantity in product on board is less than preset quantity within a preset time
When, then it can control board and stop working, repair.The method can obtain board in the number in product at each moment
Amount controls board and stops working, repair, avoid system so as to the period for selecting board goods in process inventory less
It makes the improperly shutdown maintenance that engineer rule of thumb makes to determine, improves the production capacity of board, avoid to the production cycle
It influences.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present application, and the application's shows
Meaning property embodiment and its explanation are not constituted an undue limitation on the present application for explaining the application.In the accompanying drawings:
Fig. 1 shows a kind of flow chart of the generation method of the semiconductor technology processing procedure information of preferred embodiment of the present invention；
Fig. 2 shows a kind of quantity in product that a board of preferred embodiment is daily in predicted time of the invention
Trend chart；
Fig. 3 show a kind of board of the formulation of preferred embodiment from November 1 to the production plan curve on December 1
With the change curve of the goods in process inventory of board practical in planned time；
Fig. 4 show a kind of board adjusted of preferred embodiment from November 1 to the plan on December 1
The change curve of the goods in process inventory of practical board in curve and planned time；And
Fig. 5 shows a kind of schematic diagram of the semiconductor technology processing procedure information generation device of preferred embodiment.
Specific embodiment
It is noted that following detailed description is all illustrative, it is intended to provide further instruction to the application.Unless another
It indicates, all technical and scientific terms used herein has usual with the application person of an ordinary skill in the technical field
The identical meanings of understanding.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
Now, the illustrative embodiments according to the application are more fully described with reference to the accompanying drawings.However, these are exemplary
Embodiment can be implemented by many different forms, and should not be construed to be limited solely to embodiment party set forth herein
Formula.It should be understood that it is thoroughly and complete to these embodiments are provided so that disclosure herein, and these are shown
The design of example property embodiment is fully conveyed to those of ordinary skill in the art, in the accompanying drawings, for the sake of clarity, expands layer
With the thickness in region, and make that identical device is presented with like reference characters, thus description of them will be omitted.
As background technique is introduced, in the prior art, in the production process of integrated circuit, since improper shutdown is tieed up
The problem of board production capacity caused by repairing is lowered, to solve the above-mentioned problems, present applicant proposes semiconductor technology processing procedure information
Generation method.
Fig. 1 is the flow chart of the generation method of semiconductor technology processing procedure information according to an embodiment of the present invention.As shown,
The generation method includes the following steps:
The target in product of step S102, the quantity for being initially at product and board that obtain board export total amount, target
Exporting total amount includes more batches of target outputs；
Step S104 obtains the computation model for calculating the quantity in product in the time to be predicted on board；
Step S106 is calculated according to the quantity, target output total amount and computation model that are initially at product in the time to be predicted
In the quantity of product on interior board；
Step S108, judges whether the quantity in product on board is less than preset quantity within a preset time；And
Step S110, when judge on board when the quantity of product is less than preset quantity within a preset time, control
Board stops working.
The generation method of above-mentioned semiconductor technology processing procedure information, for generating semiconductor work in semiconductor fabrication process
Skill processing procedure information utilizes computation model, and is accurately calculated according to the quantity for being initially at product of acquisition with target output
Out in the quantity of product on the board in the time to be predicted；Judge again the quantity in product on board within a preset time whether
Less than preset quantity, if on board when the quantity of product is less than preset quantity within a preset time, can control machine
Platform stops working, and repairs.The method can obtain board in the quantity in product at each moment, so as to select machine
Platform goods in process inventory less period, control board stop working and repair, and avoid manufacturing engineer rule of thumb
The improperly shutdown maintenance made determines the decline of caused board production capacity, to improve the production capacity of board, while also keeping away
Exempt to upset the production cycle.
In order to obtain quantity in product of each board every day at each moment, and then more comprehensively, accurately
Ground obtains the quantity in product of board, and the application is preferably according to the quantity, target output total amount and calculating mould for being initially at product
It includes: that will be initially at the quantity of product and the first of first day that type, which calculates quantity on the board in the time to be predicted in product,
Criticize first day initial goods in process inventory of the summation of target output as board；Goods data and first day are run according to history
Initial goods in process inventory simulates the first day quantity in product by board in computation model；By first day end time machine
The summation of the quantity in product of platform and second day first target output was as second day initial goods in process inventory；With
And according to history run goods data and second day initial goods in process inventory simulate in computation model second day process board
The quantity of product.
It is total amount set by user of unloading goods that target, which exports total amount, and first day initial goods in process inventory of board is the board
In the quantity in product of darg start time, end time refers to board power cut-off moment every day, simulates
The quantity in product of first day end time board and the summation of second day first target output can be used as the
Two days initial goods in process inventory, using second day initial goods in process inventory calculate second day termination product quantity,
And so on, the goods in process inventory of end time daily in a period of time can be calculated in the method.
In another preferred embodiment of the application, according to the quantity, target output total amount and meter for being initially at product
It calculates model to calculate on the board in the time to be predicted in the quantity of product, comprising: obtain the load information of board；Judgement load
Whether information shows board overload；If judging, load information does not show board overload, is included in the load number into board
And using current time as in product into machine time；Board processing is obtained in the processing time of product；And it will be in product
Into machine time and processing the sum of time as the machine time out in product.
Be recorded in product into before the machine time, first obtain the quantity in product of board at this time, i.e. load information, when
The quantity in product of board at this time be displayed without it is maximum in the quantity of product more than what board can allow, then will at this time
The corresponding time was recorded as in product into the machine time, and will be in the quantity of product and the quantity in product of board at this time
Summation is as the quantity in product in product into the board after machine.After being recorded in the machine time out of product, to board
It is updated in time in the quantity of product, i.e., will subtract the machine time out of record into the quantity in product of the board after machine
Product quantity as go out machine after table the quantity in product.
It is recording into the machine time and is obtaining the quantity in product of board at this time before calculating goods in process inventory；Recording out machine
After time, the quantity in product of board is updated in time.By simulated production product process, and in a simple manner
It with the quantity in product of the board after machine out after obtaining into machine, records into machine time and machine time out, according into the machine after machine
The quantity in product for going out the machine time of the quantity and record in product of platform obtains out the quantity in product of machine after table, makes
The quantity obtained on calculated board in product is more accurate.
The quantity in product of daily each moment each board in order to obtain, board needed for facilitating user to obtain is required
The quantity in product in time is preferably calculated according to the quantity, target output total amount and computation model that are initially at product
On board in time to be predicted after the quantity of product, the generation method further include: according to the load of board, into the machine time
The variation of the goods in process inventory of machine time statistics board within a predetermined period of time out, obtains trend chart；And output becomes
Change tendency chart.Goods in process inventory of the engineering staff on the board according to trend chart, select board in product
Maintenance down operation is carried out when negligible amounts, avoids board heap goods phenomenon caused by improper shutdown, and then improve board
Production capacity.
In another preferred embodiment of the application, according to be initially at product quantity, target output total amount and
Computation model calculates on the board in the time to be predicted after the quantity of product, the generation method further include: according to pre-
It surveys on the board in the time and generates the plan of unloading goods of chip in the quantity of product；And compares the chip of formulation and unload goods plan and life
At the chip plan of unloading goods, adjust the chip plan of unloading goods of formulation.
This scheme generates the plan of unloading goods of reasonable chip according to more accurate semiconductor technology processing procedure information, further according to
The unloading goods plan of heat release chip is generated, unloading goods to the chip of formulation does not meet the content of production law in the works and make modification, adjustment
The plan of unloading goods of the chip of formulation unloads goods to avoid unreasonable chip and plans the benefit of board caused by caused heap goods phenomenon
It is reduced with rate, to improve the utilization rate of board, and then improves the production capacity and production efficiency of board.
In order to make those skilled in the art more be clearly understood from technical solution of the present invention, with reference to embodiments with it is attached
The generation method of semiconductor technology processing procedure information is described in detail in figure.
Firstly, obtaining the initial goods in process inventory of board, target output total amount and being used to calculate board in the time to be predicted
The quantity in product computation model.
This includes three aspects: one, obtaining the quantity in product of the board before starting prediction, i.e. board is initially at system
Product quantity, it is in actual operation, initial in the semiconductor technology processing procedure information generated while comprising multiple boards in order to make
Goods in process inventory, can judge whether multiple boards can stop working simultaneously, and the technical solution of the application can obtain simultaneously
The initial goods in process inventory of multiple boards；Two, obtaining the daily plan of unloading goods for the board that client formulates, i.e. target exports total amount,
This target output total amount includes more batches of target outputs, corresponding to more batches of target outputs the process flow that product passes through can
It is multiple to pass through identical board in a different order in product with difference；Three, it obtains for calculating machine in the time to be predicted
The computation model of the quantity in product on platform.
Then, the quantity in product on first day multiple board is calculated according to computing module simulation.
Judge whether the quantity for being initially at product for first board that line of production technology passes through shows to allow more than it
Whether most quantity in product, i.e., show overload, if not showing, the quantity for being initially at product of first board and
The summation of first day first target output by the board was initially at product as first day of first board
Quantity, and the time for recording the moment be first day the corresponding chip of target output into the machine time.
It, will be into machine time and first board according to history race goods data acquisition chip in the processing time of first board
The processing time be added, the obtained time be recorded as chip go out the machine time.While recording out the machine time, to making for board
The quantity of product is updated in time, i.e., will subtract into the quantity in product of first board after machine and record out the machine time
Product quantity as go out machine after first board the quantity in product.
According between the time of history run in goods data acquisition line of production technology between first board and second board
Every as the first interval, chip is gone out into machine time and the first interval adduction, and judge that second board sums it up the time pair herein
Whether whether the quantity for being initially at product at the time point answered shows the most quantity in product allowed more than it, i.e., show
Overload, if not showing, the quantity for being initially at product of second board and first day first target output it is total
With first day initial goods in process inventory as second board, and sum it up that time at corresponding time point is first day the
The corresponding chip of a collection of target output into the machine time.
It, will be into machine time and second board according to history race goods data acquisition chip in the processing time of second board
The processing time be added, the obtained time be recorded as chip go out the machine time.While recording out the machine time, to making for board
The quantity of product is updated in time, i.e., will subtract into the quantity in product of second board after machine and record out the machine time
Product quantity as go out machine after second board the quantity in product.According to the meter of first board and second board
When calculation process removes to calculate more batches of target outputs by multiple boards into machine time and machine time out, obtain first day multiple machine
Quantity in product of platform when into machine time and machine time out.
Secondly, in the quantity of product on multiple boards of simulation second day.
Judge the quantity for being initially at product for first board that line of production technology passes through in second day start time point
Whether whether display more than most quantity in product that it is allowed, i.e., shows overload, if not showing, first board
The quantity for being initially at product and second day by the board first target output summation as first board
Second day initial goods in process inventory, and the time for recording the moment is second day corresponding core of first target output
Piece into the machine time.
It, will be into machine time and first board according to history race goods data acquisition chip in the processing time of first board
The processing time be added, the obtained time.Be recorded as chip goes out the machine time.While record out the machine time, exist to board
The quantity of product is updated in time, i.e., will subtract into the quantity in product of first board after machine and record out the machine time
The quantity in product as go out machine after first board the quantity in product.
According between the time of history run in goods data acquisition line of production technology between first board and second board
Every as the first interval, chip is gone out into machine time and the first interval adduction, and judge that second board sums it up the time pair herein
Whether whether the quantity for being initially at product at the time point answered shows the most quantity in product allowed more than it, i.e., show
Overload, if not showing, the quantity for being initially at product of second board and second day first target output it is total
With second day initial goods in process inventory as second board, and sum it up that time at corresponding time point is second day the
The corresponding chip of a collection of target output into the machine time.
It, will be into machine time and second board according to history race goods data acquisition chip in the processing time of second board
The processing time be added, the obtained time be recorded as chip go out the machine time.While recording out the machine time, to making for board
The quantity of product is updated in time, i.e., will subtract into the quantity in product of second board after machine and record out the machine time
Product quantity as go out machine after second board the quantity in product.
According to the calculating process of first board and second board go to calculate more batches of target outputs by multiple machines
When platform into machine time and machine time out, obtain number in product of second day multiple board when into machine time and machine time out
Amount.
First day and second day calculating process are repeated, obtains multiple boards in predicted time in into the machine time and out machine
The quantity in product when the time.
Again, it arranges to obtaining all data, generates the quantity in product at show each board each moment daily
Output trend chart, the trend chart of Fig. 2 shows a boards in the predicted time daily number in product.
Finally, being found out according to the output trend chart of each board quantity in product at each moment daily default
The quantity in product in time on board, compares whether it is less than preset quantity；When it is less than preset quantity, board is controlled
It stops working, is overhauled.
In addition, according to trend chart, the plan of unloading goods of the chip of generation.Manufacturing sector is according to production controlling part door and board
The plan that control department formulates, is produced, but since the quantity of unloading goods daily in the works that production controlling part door is formulated is equal
Equal, the maximum goods in process inventory of the board each in the works that board control department formulates allowed is equal, due to board
The maximum goods in process inventory of the difference of itself, each board allowed is actually unequal, and daily actual production quantity is not
It is equal, it be easy to cause heap goods in this way, as shown in figure 3, make board has been more than the maximum of board allowed in the quantity of product
The quantity in product, reduce the production capacity of board, increase the production cycle.According to each board daily each moment in product
Quantity output trend chart, generate unloading goods plan, manufacturing sector according to production controlling part door and board control department pair
The plan of formulation is adjusted, goods in process inventory variation tendency such as Fig. 4 of board in Plan Curve adjusted and manufacturing process
It is shown.
The embodiment of the invention also provides a kind of semiconductor technology processing procedure information generation devices.As shown in figure 5, the generation fills
Set includes: first acquisition unit 10, second acquisition unit 30, computing unit 50, judging unit 70, control unit 90.Wherein,
First acquisition unit 10, for obtaining the quantity for being initially at product of board and the target output in product of board
Total amount, it includes more batches of target outputs that target, which exports total amount,；
Second acquisition unit 30, for obtaining the calculating for calculating the quantity in product in the time to be predicted on board
Model；
Computing unit 50, for being calculated according to the quantity, target output total amount and computation model that are initially at product to pre-
Survey the quantity on the board in the time in product；
Whether judging unit 70, the quantity in product for judging on board are less than preset quantity；And
Control unit 90, for when judging that the quantity in product on board is less than preset quantity, control board to stop
Only work.
The generating means of above-mentioned semiconductor technology processing procedure information, for generating semiconductor work in semiconductor fabrication process
Skill processing procedure information utilizes computation model, and is accurately calculated according to the quantity for being initially at product of acquisition with target output
Out in the quantity of product on the board in the time to be predicted；Judge again the quantity in product on board within a preset time whether
Less than preset quantity, if on board when the quantity of product is less than preset quantity within a preset time, can control machine
Platform stops working, and repairs.This device can accurately control board and stop working and repair, and avoid manufacturing engineering
The improperly shutdown maintenance that teacher rule of thumb makes determines the decline of caused board production capacity, improves the production capacity of board, together
When also avoid upset the production cycle.
In order to obtain quantity in product of each board every day at each moment, and then more comprehensively, accurately
Ground obtains the quantity in product of board, and the preferred computing unit of the application includes: the first computing module, for that will be initially at product
Quantity and first day first target output first day initial goods in process inventory of the summation as board；First mould
Quasi- module, for being simulated in computation model according to history race goods data and first day initial goods in process inventory by board
In the quantity of product；Second computing module, for the quantity and the of second day by first day end time board in product
The summation of a collection of target output was as second day initial goods in process inventory；And second analog module, for according to history
It runs goods data and second day initial goods in process inventory simulates the second day quantity in product for passing through board in computation model.
It is total amount set by user of unloading goods that target, which exports total amount, and first day initial goods in process inventory of board is that board is
Quantity in product of the board in darg start time, end time refer to board power cut-off moment every day,.
The summation of the quantity in product of the first day end time board simulated and second day first target output can be with
As second day initial goods in process inventory, termination in second day was calculated in product using second day initial goods in process inventory
Quantity, and so on.The goods in process inventory of end time daily in a period of time can be calculated in the method.
In another preferred embodiment of the application, computing unit further include: third obtains module, for obtaining machine
The load information of platform；Judgment module, for judging whether load information shows board overload；Into machine logging modle, if for
Judge that load information does not show board overload, is then included in the load number into board and using current time as in product
Into the machine time；4th obtains module, for obtaining board processing in the processing time of product；And machine logging modle out, it is used for
The machine time will be gone out as in product into the sum of machine time and processing time in product.
Be recorded in product into before the machine time, first obtain the quantity in product of board at this time, i.e. load information, when
The quantity in product of board at this time is displayed without the maximum quantity in product that can be allowed more than board, then will be right at this time
The time answered was recorded as in product into the machine time, and by the total of the quantity in product in the quantity of product with board at this time
With as the quantity in product in product into the board after machine.Be recorded in product go out machine time after, exist to board
The quantity of product is updated in time, i.e., will into the quantity in product of the board after machine subtract record go out the machine time
The quantity of product is as the quantity in product for going out machine after table.
It is recording into the machine time and is obtaining the quantity in product of board at this time before calculating goods in process inventory；Recording out machine
After time, the quantity in product of board is updated in time.By simulated production product process, and in a simple manner
It with the quantity in product of the board after machine out after obtaining into machine, records into machine time and machine time out, according into the machine after machine
The quantity in product for going out the machine time of the quantity and record in product of platform obtains out the quantity in product of machine after table, makes
The quantity obtained on calculated board in product is more accurate.
The quantity in product of daily each moment each board in order to obtain, board needed for facilitating user to obtain is required
The quantity in product in time, the generating means further include: statistical module, for according to quantity, the mesh for being initially at product
Mark output total amount and computation model calculate on the board in the time to be predicted after the quantity of product, according to the negative of board
It carries, the variation of into the machine time and out goods in process inventory of machine time statistics board within a predetermined period of time, obtains trend chart；
Output module, for exporting trend chart.Goods in process inventory of the engineering staff on the board according to trend chart,
It selects to carry out maintenance down operation when the goods in process inventory on board is less, avoids board heap goods caused by improper shutdown and show
As, and then improve the production capacity of board.
In another preferred embodiment of the application, the device further include: schedule module, according in the time to be predicted
Board on product quantity generate chip the plan of unloading goods；And adjustment module, compare formulation chip unload goods plan with
The plan of unloading goods of the chip of generation adjusts the chip plan of unloading goods of formulation.
This scheme generates the plan of unloading goods of reasonable chip according to more accurate semiconductor technology processing procedure information, further according to
The plan of unloading goods of the chip of generation, unloading goods to the chip of formulation does not meet the content of production law in the works and makes modification, adjustment system
The plan of unloading goods of fixed chip unloads goods to avoid unreasonable chip and plans the utilization of board caused by caused heap goods phenomenon
Rate reduces, to improve the utilization rate of board, and then improves the production capacity and production efficiency of board.
It can be seen from the above description that the application the above embodiments realize following technical effect:
The generation method and generating means of the semiconductor technology processing procedure information of the application, using computation model, and according to obtaining
The above-mentioned machine in the above-mentioned time to be predicted is accurately calculated in the above-mentioned quantity for being initially at product and above-mentioned target output that take
In the quantity of product on platform；Judge whether the quantity in product on above-mentioned board is less than preset quantity within a preset time again,
If above-mentioned when the quantity of product is less than above-mentioned preset quantity within a preset time on above-mentioned board, can control above-mentioned
Board stops working, and repairs.The method and device can obtain board in the quantity in product at each moment, so as to
With the period for selecting board goods in process inventory less, carries out control board and stop working, repair, avoid manufacturing engineering
The improperly shutdown maintenance that teacher rule of thumb makes determines, improves the production capacity of board, avoids the influence to the production cycle.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Claims (10)
1. a kind of generation method of semiconductor technology processing procedure information characterized by comprising
The target in product of the quantity for being initially at product and the board that obtain board exports total amount, and the target output is total
Amount includes more batches of target outputs；
Obtain the computation model for calculating the quantity in product in the time to be predicted on the board；
It is calculated when described to be predicted according to the quantity for being initially at product, target output total amount and the computation model
In the quantity of product on the interior board；
Judge whether the quantity in product on the board is less than preset quantity within a preset time；And
Described in judge on the board when the quantity of product is less than the preset quantity within a preset time, institute is controlled
Board is stated to stop working.
2. generation method according to claim 1, which is characterized in that according to the quantity for being initially at product, the mesh
Marking the quantity of output quantity and computation model calculating on the board in the time to be predicted in product includes:
Using the quantity for being initially at product and the summation of first day first target output as the first of the board
It initial goods in process inventory；
Goods data are run according to history and described first day initial goods in process inventory is simulated first day in the computation model and passed through
Cross the quantity in product of the board；
Quantity using board described in first day end time in product is with second day first target output as second
It initial goods in process inventory；And
Goods data are run according to the history and described second day initial goods in process inventory simulates second in the computation model
It passes through the quantity in product of the board.
3. generation method according to claim 1, which is characterized in that according to the quantity for being initially at product, the mesh
Mark exports the quantity of total amount and computation model calculating on the board in the time to be predicted in product
Obtain the load information of the board；
Judge whether the load information shows the board overload；
If judging, the load information does not show the board overload, be included in into board load number and will be current when
Between as it is described in product into the machine time；
Obtain the board processing processing time in product；And
Go out the machine time in product as described into the sum of machine time and the processing time in product for described.
4. generation method according to claim 3, which is characterized in that in the quantity, described for being initially at product according to
Target exports total amount and the computation model calculates on the board in the time to be predicted after the quantity of product,
The generation method further include:
According to the load of the board, it is described into the machine time and it is described go out the machine time count the board within a predetermined period of time
The variation of goods in process inventory, obtains trend chart；And
Export the trend chart.
5. generation method according to claim 1, which is characterized in that in the quantity, described for being initially at product according to
Target exports total amount and the computation model calculates on the board in the time to be predicted after the quantity of product,
The method also includes:
According to the plan of unloading goods for generating chip on the board in the time to be predicted in the quantity of product；And
The chip plan of unloading goods and the chip plan of unloading goods of the generation for comparing formulation, the chip for adjusting the formulation are unloaded goods meter
It draws.
6. a kind of generating means of semiconductor technology processing procedure information characterized by comprising
First acquisition unit, for obtain board the quantity for being initially at product and the board the target output in product it is total
Amount, the target output total amount includes more batches of target outputs；
Second acquisition unit, for obtaining the calculating mould for calculating the quantity in product in the time to be predicted on the board
Type；
Computing unit, quantity, target output total amount and the computation model for being initially at product according to calculate
In the quantity of product on the board in the time to be predicted；
Whether judging unit, the quantity in product for judging on the board are less than preset quantity；And
Control unit, for described on judging the board when the quantity of product is less than the preset quantity, control
The board stops working.
7. generating means according to claim 6, which is characterized in that the computing unit includes:
First computing module, for making the summation of the quantity for being initially at product and first day first target output
For first day initial goods in process inventory of the board；
First analog module, for running goods data and described first day initial goods in process inventory in the calculating mould according to history
The quantity in product of the board is passed through in simulation in type；
Second computing module, for the quantity and second day first mesh by board described in first day end time in product
The summation of output quantity is marked as second day initial goods in process inventory；And
Second analog module, by running goods data and described second day initial goods in process inventory according to the history based on described
Calculate the quantity in product for simulating second day by the board in model.
8. generating means according to claim 6, which is characterized in that the computing unit further include:
Third obtains module, for obtaining the load information of the board；
Judgment module, for judging whether the load information shows the board overload；
Into machine logging modle, if being included in for judging that the load information does not show the board overload into board
Load number and using current time as described in product into machine time；
4th obtains module, for obtaining the board processing processing time in product；And
Machine logging modle out, for by it is described in product into the sum of machine time and the processing time as described in product
The machine time out.
9. generating means according to claim 8, which is characterized in that the generating means further include:
Statistical module, based in the quantity, target output total amount and the computation model for being initially at product according to
It calculates on the board in the time to be predicted after the quantity of product, according to the load of the board, described into machine
Time and the machine time out count the variation of the goods in process inventory of the board within a predetermined period of time, obtain variation tendency
Figure；
Output module, for exporting the trend chart.
10. generating means according to claim 6, which is characterized in that described device further include:
Schedule module, based in the quantity, target output total amount and the computation model for being initially at product according to
Calculate the plan of unloading goods for generating chip after the quantity of product on the board in the time to be predicted；And
Module is adjusted, compares the chip plan of unloading goods of the chip plan of unloading goods and the generation of formulation, adjusts the core of the formulation
The piece plan of unloading goods.
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| CN111260173A (en) * | 2018-12-03 | 2020-06-09 | 鸿富锦精密电子（成都）有限公司 | Production monitoring method and device and computer readable storage medium |
| CN112116119B (en) * | 2019-06-19 | 2023-11-24 | 中芯国际集成电路制造(上海)有限公司 | Dynamic prediction method and device for machine load and computer readable storage medium |
| CN110554670B (en) * | 2019-09-06 | 2023-01-03 | 中电九天智能科技有限公司 | Multi-machine control optimization method based on flexible manufacturing |
| CN113139702B (en) * | 2021-05-28 | 2024-04-30 | 上海华力微电子有限公司 | Method and system for predicting number of products in process |
| CN116544152A (en) * | 2023-07-06 | 2023-08-04 | 粤芯半导体技术股份有限公司 | Method and device for controlling sheet feeding amount of semiconductor machine set |
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