CN105988424A - Semiconductor technology process information generation method and device - Google Patents
Semiconductor technology process information generation method and device Download PDFInfo
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- CN105988424A CN105988424A CN201510044192.0A CN201510044192A CN105988424A CN 105988424 A CN105988424 A CN 105988424A CN 201510044192 A CN201510044192 A CN 201510044192A CN 105988424 A CN105988424 A CN 105988424A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The application provides a semiconductor technology process information generation method and device. The semiconductor technology process information generation method comprises the steps of obtaining the number of the initial articles being processed of a machine bench and the target output total amount of the articles being processed of the machine bench, wherein the target output total amount comprises multiple batches of target output amounts; obtaining a calculation model used for calculating the number of the articles being processed on the machine bench within the to-be-predicted time; according to the number of the initial articles being processed, the target output total amount and the calculation model, calculating the number of the articles being processed on the machine bench within the to-be-predicted time; determining whether the number of the articles being processed on the machine bench is less than a preset number within the to-be-predicted time; and controlling the machine bench to stop working when the number of the articles being processed on the machine bench is less than the preset number within the to-be-predicted time. The semiconductor technology process information generation method avoids the improper shutdown maintenance decision made by a manufacturing engineer according to experiences, enables the productivity of the machine bench to be improved, and avoids the influence on a production cycle.
Description
Technical field
The application relates to technical field of manufacturing semiconductors, in particular to a kind of generation method of semiconductor technology processing procedure information
With generating means.
Background technology
During chip production, board controls department engineer and sets the maximum of board and run goods amount, production controlling part door according to
The maximum goods amount of running of 90% formulates the plan of unloading goods of monthly every day, and manufacturing sector rule of thumb makes the decision of shutdown maintenance.
The engineer of manufacturing sector can rule of thumb select goods water level in process of production relatively low and board run goods negligible amounts time enter
Row shutdown maintenance.Sometimes, the shutdown maintenance that manufacturing engineer rule of thumb makes determines and improper, and such as manufacturing sector shuts down
When doing shutdown maintenance, more in the quantity of goods, water level raises, and causes board to run goods amount and exceedes its maximum permissible value, heap occurs
The phenomenon of goods, impacted the production cycle, reduced the production capacity of board.
It addition, in the fabrication process, the load of board sometimes exceedes its maximum permissible value, and manufacturing sector is accomplished by requiring to produce control
The plan of unloading goods of every day is revised by department processed.Manufacturing sector frequently requires that the plan of unloading goods of production controlling part door amendment chip can increase work
The workload of Cheng Shi, and the production cycle can be impacted by overload frequently, reduces board production capacity.
For the above-mentioned problem being lowered with the board production capacity planning to cause of unloading goods improperly due to improper shutdown maintenance, the most not yet
Effective solution is proposed.
Summary of the invention
The application aims to provide generation method and the generating means of a kind of semiconductor technology processing procedure information, with solve in prior art by
In the problem that improper shutdown maintenance is lowered with the board production capacity planning to cause of unloading goods improperly.
To achieve these goals, according to an aspect of the application, it is provided that the generation side of a kind of semiconductor technology processing procedure information
Method, it is characterised in that above-mentioned generation method includes: obtain the quantity being initially at goods of board and above-mentioned board at goods
Target output total amount, above-mentioned target output total amount includes many batches of target output；Acquisition be used for calculating the time to be predicted in above-mentioned machine
The computation model of the quantity at goods on platform；It is initially at the quantity of goods, above-mentioned target output total amount and above-mentioned meter according to above-mentioned
Calculate the quantity at goods on the model calculating above-mentioned board within the above-mentioned time to be predicted；Judge the number at goods on above-mentioned board
Whether amount is less than predetermined number in Preset Time；And when the above-mentioned quantity at goods judged on above-mentioned board is when default
In less than above-mentioned predetermined number time, control above-mentioned board and quit work.
Further, according to above-mentioned being initially at the quantity of goods, above-mentioned target output and above-mentioned computation model calculate and treat above-mentioned
On above-mentioned board in predicted time, the quantity at goods includes: by the above-mentioned quantity being initially at goods and first mesh of first day
The summation of mark output as first day of above-mentioned board be initially at product amounts；Goods data and above-mentioned first day are run according to history
The product amounts that is initially in above-mentioned computation model, simulate the first day quantity at goods through above-mentioned board；By first day eventually
Only the quantity at goods of moment above-mentioned board and first target output of second day as second day be initially at goods number
Amount；And in above-mentioned computation model, simulate second according to the product amounts that is initially at of above-mentioned history race goods data and above-mentioned second day
It is through the quantity at goods of above-mentioned board.
Further, calculate above-mentioned according to the above-mentioned quantity of goods, above-mentioned target output total amount and the above-mentioned computation model of being initially at
On above-mentioned board in time to be predicted, the quantity at goods includes: obtain the load information of above-mentioned board；Judge that above-mentioned load is believed
Whether breath shows above-mentioned board overload；If judging, above-mentioned load information does not shows above-mentioned board overload, then count into board
Load number and current time is entered the machine time as above-mentioned at goods；Obtain above-mentioned board and process the above-mentioned process at goods
Time；And above-mentioned enter machine time and above-mentioned process time sum at goods is gone out the machine time as above-mentioned at goods.
Further, calculating upper according to the above-mentioned quantity of goods, above-mentioned target output total amount and the above-mentioned computation model of being initially at
Stating on the above-mentioned board in the time to be predicted after the quantity of goods, above-mentioned generation method also includes: bearing according to above-mentioned board
Carry, above-mentioned enter the machine time and above-mentioned go out the machine time statistics above-mentioned board goods in process inventory within a predetermined period of time change, obtain
Changing trend diagram；And export above-mentioned changing trend diagram.
Further, calculating upper according to the above-mentioned quantity of goods, above-mentioned target output total amount and the above-mentioned computation model of being initially at
Stating on the above-mentioned board in the time to be predicted after the quantity of goods, said method also includes: according in the above-mentioned time to be predicted
Above-mentioned board on goods quantity generate chip the plan of unloading goods；And the chip comparing formulation unload goods plan with above-mentioned generation
The chip plan of unloading goods, adjust the chip plan of unloading goods of above-mentioned formulation.
To achieve these goals, according to further aspect of the application, it is provided that the generation of a kind of semiconductor technology processing procedure information
Device, it is characterised in that above-mentioned generating means includes: the first acquiring unit, for obtaining the quantity being initially at goods of board
Exporting total amount with the target at goods of above-mentioned board, above-mentioned target output total amount includes many batches of target output；Second obtains list
Unit, the computation model of the quantity at goods for obtaining on above-mentioned board in calculating the time to be predicted；Computing unit, uses
In calculating within the above-mentioned time to be predicted according to the above-mentioned quantity of goods, above-mentioned target output total amount and the above-mentioned computation model of being initially at
Above-mentioned board in the quantity of goods；Judging unit, presets for judging whether the quantity at goods on above-mentioned board is less than
Quantity；And control unit, it is used for when the above-mentioned quantity at goods judged on above-mentioned board is less than above-mentioned predetermined number,
Control above-mentioned board to quit work
Further, above-mentioned computing unit includes: the first computing module, for by the above-mentioned quantity being initially at goods with first day
First target output summation as first day of above-mentioned board be initially at product amounts；First analog module, is used for
The product amounts that is initially at running goods data and above-mentioned first day according to history simulates first day end time in above-mentioned computation model
The quantity at goods of above-mentioned board；Second computing module, for by first day quantity at goods through above-mentioned board and the
The summation of first target output of two days as second day be initially at product amounts；And second analog module, for root
In above-mentioned computation model, second day is simulated through above-mentioned according to the product amounts that is initially at of above-mentioned history race goods data and above-mentioned second day
The quantity at goods of board.
Further, above-mentioned computing unit also includes: the 3rd acquisition module, for obtaining the load information of above-mentioned board；Judge
Module, is used for judging whether above-mentioned load information shows above-mentioned board overload；Enter machine logging modle, if above-mentioned for judging
Load information does not shows above-mentioned board overload, then count into board load number and using current time as above-mentioned at goods
Enter the machine time；4th acquisition module, processes the above-mentioned process time at goods for obtaining above-mentioned board；And go out machine record mould
Block, for going out machine time as above-mentioned at goods using above-mentioned enter machine time and above-mentioned process time sum at goods.
Further, above-mentioned generating means also includes: statistical module, for according to the above-mentioned quantity of goods, above-mentioned of being initially at
Target output total amount and above-mentioned computation model calculate on the above-mentioned board within the above-mentioned time to be predicted after the quantity of goods, root
According to above-mentioned board load, above-mentioned enter the machine time and above-mentioned go out the machine time add up above-mentioned board within a predetermined period of time at goods number
The change of amount, obtains changing trend diagram；Output module, is used for exporting above-mentioned changing trend diagram.
Further, said apparatus also includes: schedule module, for being initially at the quantity of goods, above-mentioned target according to above-mentioned
Output total amount and above-mentioned computation model calculate and generate chip on the above-mentioned board within the above-mentioned time to be predicted after the quantity of goods
The plan of unloading goods；And adjusting module, compare the chip plan of unloading goods of formulation and the chip plan of unloading goods of above-mentioned generation, in adjustment
State the chip plan of unloading goods of formulation.
The technical scheme of application the application, utilizes computation model, and according to the quantity being initially at goods obtained and target output
Calculate the quantity at goods on the board in the time to be predicted exactly；Judge that the quantity at goods on board is when default again
In whether less than predetermined number, if the quantity at goods on board in Preset Time less than predetermined number, the most permissible
Control board to quit work, keep in repair.The method can obtain the board quantity at goods in each moment, such that it is able to
Select board goods in process inventory less time period, control board and quit work, keep in repair, it is to avoid manufacturing engineer according to
Shutdown maintenance improperly that experience is made determines, improve the production capacity of board, it is to avoid the impact on the production cycle.
Accompanying drawing explanation
The Figure of description of the part constituting the application is used for providing further understanding of the present application, and the application's is schematic real
Execute example and illustrate for explaining the application, being not intended that the improper restriction to the application.In the accompanying drawings:
Fig. 1 shows the flow chart of the generation method of the semiconductor technology processing procedure information of a kind of preferred embodiment of the present invention；
Fig. 2 shows the change of the quantity at goods of every day in predicted time of a board of a kind of preferred embodiment of the present invention
Trendgram；
Fig. 3 show the board of the formulation of a kind of preferred embodiment from November 1 to the December production schedule curve of 1 day and meter
The change curve of the goods in process inventory of actual board in the time of drawing；
Fig. 4 show the board after the adjustment of a kind of preferred embodiment from November 1 to the December Plan Curve of 1 day
The change curve of the goods in process inventory of actual board with in planned time；And
Fig. 5 shows the schematic diagram of the semiconductor technology processing procedure information generation device of a kind of preferred embodiment.
Detailed description of the invention
It it is noted that described further below is all exemplary, it is intended to provide further instruction to the application.Unless otherwise finger
Bright, all technology used herein and scientific terminology have and are generally understood that with the application person of an ordinary skill in the technical field
Identical meanings.
It should be noted that term used herein above merely to describe detailed description of the invention, and be not intended to restricted root according to this Shen
Illustrative embodiments please.As used herein, unless the context clearly indicates otherwise, otherwise singulative is also intended to
Including plural form, additionally, it should be understood that, when using term " to comprise " in this manual and/or time " including ", its
Indicate existing characteristics, step, operation, device, assembly and/or combinations thereof.
Now, the illustrative embodiments according to the application it is more fully described with reference to the accompanying drawings.But, these exemplary enforcements
Mode can be implemented by multiple different form, and should not be construed to be limited solely to embodiments set forth herein.Should
When being understood by, it is provided that these embodiments are so that disclosure herein is thorough and complete, and by these exemplary realities
The design executing mode is fully conveyed to those of ordinary skill in the art, in the accompanying drawings, for the sake of clarity, expands layer and region
Thickness, and make to be presented with like reference characters identical device, thus description of them will be omitted.
As background technology is introduced, in prior art, in the production process of integrated circuit, owing to improper shutdown maintenance is led
The problem that the board production capacity caused is lowered, in order to solve the problems referred to above, present applicant proposes the generation of semiconductor technology processing procedure information
Method.
Fig. 1 is the flow chart of the generation method of semiconductor technology processing procedure information according to embodiments of the present invention.As it can be seen, this is raw
One-tenth method comprises the steps:
Step S102, the target at goods of the quantity being initially at goods and board that obtain board exports total amount, and target output is total
Amount includes many batches of target output；
Step S104, obtains the computation model for the quantity at goods calculated in the time to be predicted on board；
Step S106, calculates the machine within the time to be predicted according to being initially at the quantity of goods, target output total amount and computation model
In the quantity of goods on platform；
Step S108, it is judged that whether the quantity at goods on board is less than predetermined number in Preset Time；And
Step S110, when the quantity at goods judged on board is less than predetermined number in Preset Time, controls board and stops
Only work.
The generation method of above-mentioned semiconductor technology processing procedure information, for generating semiconductor technology processing procedure in semiconductor fabrication process
Information, i.e. utilizes computation model, and calculates with target output to be predicted exactly according to the quantity being initially at goods obtained
In the quantity of goods on board in time；Judge whether the quantity at goods on board is less than present count in Preset Time again
Amount, if the quantity at goods on board is less than predetermined number in Preset Time, then can control board and quit work,
Keep in repair.The method can obtain the board quantity at goods in each moment, such that it is able to select board goods in process inventory
The less time period, control board and quit work and keep in repair, it is to avoid what manufacturing engineer rule of thumb made stops improperly
Machine maintenance determines the decline of the board production capacity caused, thus improves the production capacity of board, the most also avoids upsetting the production cycle.
In order to obtain each board every day in the quantity at goods in each moment, and then more comprehensively, obtain exactly
The quantity at goods of board, the application preferably basis is initially at the quantity of goods, target output total amount and computation model and calculates and exist
On board in time to be predicted, the quantity at goods includes: will be initially at the quantity of goods and first target output of first day
The summation of amount as first day of board be initially at product amounts；It is initially at goods number according to what history ran goods data and first day
Amount simulates the first day quantity at goods through board in computation model；The number at goods by first day end time board
The summation of amount and first target output of second day as second day be initially at product amounts；And run goods number according to history
In computation model, the second day quantity at goods through board is simulated according to the product amounts that is initially at second day.
Target output total amount is the total amount of unloading goods that user sets, and the product amounts that is initially at of first day of board is that this board is first
The quantity at goods of it work start time, end time refers to board power cut-off moment every day, first day simulated
The summation of quantity and first target output of second day at goods of end time board can be as second day be initially at
Product amounts, utilizes the product amounts that is initially at of second day to calculate the quantity terminating in goods of second day, the like, according to
The method can calculate the goods in process inventory of the end time of every day in a period of time.
Another of the application preferred embodiment in, according to being initially at the quantity of goods, target output total amount and computation model
Calculate the quantity at goods on the board within the time to be predicted, including: obtain the load information of board；Judge that load information is
No display board overload；If judging, load information does not shows board overload, then count into board load number and ought
The front time is as entering the machine time at goods；Obtain board and process the process time at goods；And the machine time will be entered at goods
With process time sum as going out the machine time at goods.
Record goods enter the machine time before, first obtain the board quantity at goods now, i.e. load information, works as board
The quantity at goods now is displayed without exceeding that board can allow is maximum when the quantity of goods, then by now corresponding
Time is recorded as entering the machine time at goods, and using the quantity of goods and the summation of the board quantity at goods now as
The quantity at goods of the board after goods enter machine.Record goods go out the machine time after, the number at goods to board
Amount updates in time, and the quantity at goods that will enter the board after machine deducts the quantity at goods the machine time of record
As the quantity at goods going out machine after table.
Before machine time and calculating goods in process inventory, the board quantity at goods now was obtained recording；Recording out the machine time
After, update the quantity at goods of board in time.By simulated production in the process of goods, and obtain in a straightforward manner
After entering machine with go out the quantity at goods of the board after machine, record into the machine time with go out the machine time, according to enter the board after machine
The quantity of goods and the quantity at goods going out the machine time of record obtain the quantity at goods of machine after table so that calculate
Board on more accurate in the quantity of goods.
In order to obtain the quantity at goods of every day in each moment each board, user is facilitated to obtain required board in required time
The quantity at goods, preferably according to be initially at the quantity of goods, target output total amount and computation model calculate time to be predicted
In board on after the quantity of goods, this generation method also includes: according to the load of board, enter the machine time and go out machine time
Between add up board goods in process inventory within a predetermined period of time change, obtain changing trend diagram；And exporting change trendgram.
Engineering staff, according to the goods in process inventory on the board shown by changing trend diagram, selects the goods in process inventory on board to enter time less
Row maintenance down operates, it is to avoid the heap goods phenomenon that board is caused by improper shutdown, and then improves the production capacity of board.
Another of the application preferred embodiment in, according to be initially at the quantity of goods, target output total amount and calculate mould
Type calculates on the board within the time to be predicted after the quantity of goods, and this generation method also includes: according in the time to be predicted
Board on goods quantity generate chip the plan of unloading goods；And under the chip of the chip the comparing formulation plan of unloading goods and generation
Goods plan, adjusts the chip plan of unloading goods formulated.
This scheme, according to more accurate semiconductor technology processing procedure information, generates the plan of unloading goods of rational chip, puts further according to generation
The plan of unloading goods of hot chip, unloading goods the chip formulated does not meets the content of production law in the works and makes amendment, adjusts the core formulated
The sheet plan of unloading goods, with the utilization rate reduction of the board that the heap goods phenomenon avoiding the plan of unloading goods of irrational chip to be caused is caused,
Thus improve the utilization rate of board, and then improve production capacity and the production efficiency of board.
In order to make those skilled in the art more be clearly understood from technical scheme, below in conjunction with embodiment with accompanying drawing half-and-half
The generation method of semiconductor process processing procedure information is described in detail.
First, obtain board be initially at product amounts, target output total amount with for calculate in the time to be predicted on board in system
The computation model of the quantity of product.
This includes three aspects: one, obtain the board quantity at goods before starting prediction, i.e. board is initially at goods number
Amount, in actual operation, is initially at goods in order to make to comprise in the semiconductor technology processing procedure information of generation multiple board simultaneously
Quantity, can judge whether multiple board can quit work simultaneously, and the technical scheme of the application can obtain multiple board simultaneously
Be initially at product amounts；Two, obtaining the plan of unloading goods every day of the board that client formulates, i.e. target output total amount, this target is defeated
Going out total amount and include many batches of target output, the technological process in goods process corresponding to many batches of target output can be different, many
Individual can be in a different order through identical board at goods；Three, obtain for calculating making on board in the time to be predicted
The computation model of the quantity of product.
Then, the quantity at goods on multiple boards of first day is calculated according to computing module simulation.
Judge whether the quantity being initially at goods of first board of line of production technology process be showed more than that it allows most
The most whether the quantity of goods, show overload, if not showing, then and the quantity being initially at goods of first board and first day
Through this board first target output summation as first day of first board be initially at product amounts, and remember
The chip corresponding to the target output that the time is first day in record moment enter the machine time.
Goods data acquisition chip is run in the process time of first board, by when entering the process of machine time and first board according to history
Between be added, what the time obtained was recorded as chip goes out the machine time.The quantity at goods while recording out the machine time, to board
Updating in time, the quantity at goods of first board after will entering machine deducts the number at goods recording out the machine time
Measure as going out the quantity at goods of first board after machine.
The time interval run in goods data acquisition line of production technology between first board and second board according to history is as the
One interval, by chip go out the machine time be spaced with first add and, and judge that second board adds the time point corresponding with the time at this
The quantity being initially at goods whether be showed more than its most quantity at goods allowed, the most whether show overload, if not
Display, then the summation of first target output of the quantity being initially at goods of second board and first day is as second machine
First day of platform be initially at product amounts, and add first target output pair that the time point corresponding with the time is first day
The chip answered enter the machine time.
According to history race goods data acquisition chip in the process time of second board, the process of machine time and second board will be entered
Time is added, and what the time obtained was recorded as chip goes out the machine time.The number at goods while recording out the machine time, to board
Amount updates in time, the quantity at goods of second board after will entering machine deduct record out the machine time at goods
Quantity is as going out the quantity at goods of second board after machine.Calculating process according to first board and second board removes meter
Calculate many batches of target output entering the machine time and going out the machine time through multiple boards, obtain first day multiple board and entering the machine time
With the quantity at goods when going out the machine time.
Secondly, the quantity at goods on multiple boards of second day is simulated.
Judge whether the quantity being initially at goods of first board of line of production technology process shows at second day start time point
Exceed its most quantity at goods allowed, the most whether show overload, if not showing, then being initially at of first board
The quantity of goods and second day through the summation of first target output of this board as at the beginning of second day of first board
Beginning goods in process inventory, and chip corresponding to first target output that the time recording the moment is second day enter the machine time.
Goods data acquisition chip is run in the process time of first board, by when entering the process of machine time and first board according to history
Between be added, the time obtained.Be recorded as chip goes out the machine time.The number at goods while recording out the machine time, to board
Amount updates in time, the quantity at goods of first board after will entering machine deduct record out the machine time at goods
Quantity is as going out the quantity at goods of first board after machine.
The time interval run in goods data acquisition line of production technology between first board and second board according to history is as the
One interval, by chip go out the machine time be spaced with first add and, and judge that second board adds the time point corresponding with the time at this
The quantity being initially at goods whether be showed more than its most quantity at goods allowed, the most whether show overload, if not
Display, then the summation of first target output of the quantity being initially at goods of second board and second day is as second machine
Second day of platform be initially at product amounts, and add first target output pair that the time point corresponding with the time is second day
The chip answered enter the machine time.
Goods data acquisition chip is run in the process time of second board, by when entering the process of machine time and second board according to history
Between be added, what the time obtained was recorded as chip goes out the machine time.The quantity at goods while recording out the machine time, to board
Updating in time, the quantity at goods of second board after will entering machine deducts the number at goods recording out the machine time
Measure as going out the quantity at goods of second board after machine.
Calculating process according to first board and second board goes to calculate the entering through multiple boards of many batches of target output
The machine time with go out the machine time, obtain second day multiple board entering the machine time and the quantity at goods when going out the machine time.
Repeat first day calculating process with second day, obtain multiple boards in predicted time enter the machine time with when going out the machine time
Quantity at goods.
Again, arranging obtaining all data, the output generating the quantity at goods showing each board every day in each moment becomes
Change trendgram, Fig. 2 shows a board in the predicted time changing trend diagram of the number at goods of every day.
Finally, according to the exporting change trendgram of the quantity at goods in each board every day in each moment, find out in Preset Time
Whether the quantity at goods on board, compare it less than predetermined number；When it is less than predetermined number, controls board and stop work
Make, overhaul.
It addition, according to changing trend diagram, the plan of unloading goods of the chip of generation.Manufacturing sector is according to production controlling part door and board control portion
The plan that door is formulated, produces, but owing to the quantity of unloading goods of the every day in the works of production controlling part door formulation is the most equal, machine
The goods in process inventory of the maximum allowed that platform controls the most each board that department formulates is the most equal, due to the difference of board itself,
The maximum goods in process inventory reality allowed of each board is unequal, and the actual production quantity of every day is the most unequal, the easiest
Cause heap goods, as shown in Figure 3 so that the quantity at goods of board has exceeded the maximum quantity at goods allowed of board,
Reduce the production capacity of board, add the production cycle.The exporting change of the quantity at goods according to each board every day in each moment
Trendgram, generates the plan of unloading goods, and manufacturing sector controls department according to production controlling part door and board and is adjusted the plan formulated,
Plan Curve after adjustment is with the goods in process inventory variation tendency of board in manufacture process as shown in Figure 4.
The embodiment of the present invention additionally provides a kind of semiconductor technology processing procedure information generation device.As it is shown in figure 5, this generating means bag
Include: the first acquiring unit 10, second acquisition unit 30, computing unit 50, judging unit 70, control unit 90.Wherein,
First acquiring unit 10, the target at goods of the quantity being initially at goods and board for obtaining board exports total amount,
Target output total amount includes many batches of target output；
Second acquisition unit 30, for obtaining the computation model for the quantity at goods calculated in the time to be predicted on board；
Computing unit 50, for according to being initially at the quantity of goods, target output total amount and computation model calculating in the time to be predicted
In the quantity of goods on interior board；
Judging unit 70, for judging whether the quantity at goods on board is less than predetermined number；And
Control unit 90, for when the quantity at goods judged on board is less than predetermined number, controls board and stops work
Make.
The generating means of above-mentioned semiconductor technology processing procedure information, for generating semiconductor technology processing procedure in semiconductor fabrication process
Information, i.e. utilizes computation model, and calculates with target output to be predicted exactly according to the quantity being initially at goods obtained
In the quantity of goods on board in time；Judge whether the quantity at goods on board is less than present count in Preset Time again
Amount, if the quantity at goods on board is less than predetermined number in Preset Time, then can control board and quit work,
Keep in repair.This device can accurately control board and quit work and keep in repair, it is to avoid manufacturing engineer rule of thumb does
The shutdown maintenance improperly gone out determines the decline of the board production capacity caused, and improves the production capacity of board, the most also avoids upsetting life
The product cycle.
In order to obtain each board every day in the quantity at goods in each moment, and then more comprehensively, obtain exactly
The quantity at goods of board, the preferred computing unit of the application includes: the first computing module, for being initially at the quantity of goods
The summation of first target output with first day as first day of board be initially at product amounts；First analog module,
For simulating the board of first day end time in computation model according to the product amounts that is initially at of history race goods data and first day
The quantity at goods；Second computing module, for by first day quantity at goods through board and first of second day
The summation of target output as second day be initially at product amounts；And second analog module, for running goods number according to history
In computation model, the second day quantity at goods through board is simulated according to the product amounts that is initially at second day.
Target output total amount be the total amount of unloading goods that user sets, first day of board be initially at product amounts be board be this board
In the quantity at goods of darg start time, end time refers to board power cut-off moment every day,.Simulate
The summation of the quantity at goods and first target output of second day of first day end time board can be as second day
Be initially at product amounts, utilize the product amounts that is initially at of second day to calculate the quantity terminating in goods of second day, class successively
Push away.The goods in process inventory of the end time of every day in a period of time can be calculated in the method.
Another of the application preferred embodiment in, computing unit also includes: the 3rd acquisition module, for obtaining board
Load information；Judge module, is used for judging whether load information shows board overload；Enter machine logging modle, if for judging
Go out load information and do not show board overload, then count into board load number and using current time as at goods when entering machine
Between；4th acquisition module, processes the process time at goods for obtaining board；And go out machine logging modle, for making
The entering the machine time and process time sum as going out the machine time at goods of product.
Record goods enter the machine time before, first obtain the board quantity at goods now, i.e. load information, works as board
The quantity at goods now is displayed without exceeding the maximum quantity at goods that board can be allowed, then by time now corresponding
Between be recorded as entering the machine time at goods, and using the quantity of goods and the summation of the board quantity at goods now as
Goods enter the quantity at goods of the board after machine.Record goods go out the machine time after, the quantity at goods to board
Updating in time, the quantity at goods that will enter the board after machine deducts the quantity work at goods the machine time of record
For going out the quantity at goods of machine after table.
Before machine time and calculating goods in process inventory, the board quantity at goods now was obtained recording；Recording out the machine time
After, update the quantity at goods of board in time.By simulated production in the process of goods, and obtain in a straightforward manner
After entering machine with go out the quantity at goods of the board after machine, record into the machine time with go out the machine time, according to enter the board after machine
The quantity of goods and the quantity at goods going out the machine time of record obtain the quantity at goods of machine after table so that calculate
Board on more accurate in the quantity of goods.
In order to obtain the quantity at goods of every day in each moment each board, user is facilitated to obtain required board in required time
The quantity at goods, this generating means also includes: statistical module, for according to be initially at the quantity of goods, target output
Total amount and computation model calculate on the board within the time to be predicted after the quantity of goods, according to the load of board, enter machine time
Between and go out the machine time statistics board goods in process inventory within a predetermined period of time change, obtain changing trend diagram；Output module,
For exporting change trendgram.Engineering staff, according to the goods in process inventory on the board shown by changing trend diagram, selects on board
Goods in process inventory less time carry out maintenance down operation, it is to avoid the heap goods phenomenon that board is caused by improper shutdown, and then improve
The production capacity of board.
Another of the application preferred embodiment in, this device also includes: schedule module, according to the machine in the time to be predicted
The chip plan of unloading goods generated in the quantity of goods on platform；And adjusting module, compare the chip plan of unloading goods and the generation of formulation
The chip plan of unloading goods, adjusts the chip plan of unloading goods formulated.
This scheme, according to more accurate semiconductor technology processing procedure information, generates the plan of unloading goods of rational chip, further according to generate
The chip plan of unloading goods, unloading goods the chip formulated does not meets the content of production law in the works and makes amendment, adjusts the chip formulated
The plan of unloading goods, the utilization rate of the board that the heap goods phenomenon planning to be caused to avoid irrational chip to unload goods is caused reduces, from
And improve the utilization rate of board, and then improve production capacity and the production efficiency of board.
As can be seen from the above description, the application the above embodiments achieve following technique effect:
The generation method of the semiconductor technology processing procedure information of the application and generating means, utilize computation model, and upper according to obtain
State the quantity being initially at goods to calculate exactly on the above-mentioned board in the above-mentioned time to be predicted at goods with above-mentioned target output
Quantity；Judge whether the quantity at goods on above-mentioned board is less than predetermined number in Preset Time again, if above-mentioned board
On the above-mentioned quantity at goods in Preset Time less than above-mentioned predetermined number time, then can control above-mentioned board and quit work,
Keep in repair.The method and device can obtain the board quantity at goods in each moment, such that it is able to select board in system
The time period of product negligible amounts, it is controlled board and quits work, keep in repair, it is to avoid manufacturing engineer rule of thumb makes
Shutdown maintenance improperly determine, improve the production capacity of board, it is to avoid impact on the production cycle.
The foregoing is only the preferred embodiment of the application, be not limited to the application, for those skilled in the art
For, the application can have various modifications and variations.All within spirit herein and principle, any amendment of being made, etc.
With replacement, improvement etc., within should be included in the protection domain of the application.
Claims (10)
1. the generation method of a semiconductor technology processing procedure information, it is characterised in that including:
The target at goods of the quantity being initially at goods and described board that obtain board exports total amount, and described target exports
Total amount includes many batches of target output；
The computation model of the quantity at goods obtained on described board in calculating the time to be predicted；
Calculate described to be predicted according to the described quantity of goods, described target output total amount and the described computation model of being initially at
In the quantity of goods on described board in time；
Judge whether the quantity at goods on described board is less than predetermined number in Preset Time；And
When being less than described predetermined number in the quantity of goods in Preset Time described in judging on described board, control
Described board quits work.
Generation method the most according to claim 1, it is characterised in that be initially at the quantity of goods, described target according to described
On output and the described computation model calculating described board within the described time to be predicted, the quantity at goods includes:
Using the described quantity of goods and the summation of first target output of first day of being initially at as the first of described board
It is initially at product amounts；
The product amounts that is initially at according to history race goods data and described first day simulates first day warp in described computation model
Cross the quantity at goods of described board；
Using the quantity at goods of board described in first day end time first target output with second day as second
It is initially at product amounts；And
The product amounts that is initially at according to described history race goods data and described second day simulates second in described computation model
It is through the quantity at goods of described board.
Generation method the most according to claim 1, it is characterised in that be initially at the quantity of goods, described target according to described
In output total amount and the described computation model calculating described board within the described time to be predicted, the quantity at goods includes:
Obtain the load information of described board；
Judge whether described load information shows described board overload；
If judging, described load information does not shows described board overload, then count into the load number of board and by current
Time enters the machine time as described at goods；
Obtain described board and process the described process time at goods；And
Described enter machine time and described process time sum at goods is gone out the machine time as described at goods.
Generation method the most according to claim 3, it is characterised in that be initially at the quantity of goods, described mesh described in basis
Mark output total amount and described computation model calculate on the described board within the described time to be predicted after the quantity of goods,
Described generation method also includes:
Load according to described board, described in enter the machine time and described go out the machine time add up described board within a predetermined period of time
The change of goods in process inventory, obtain changing trend diagram；And
Export described changing trend diagram.
Generation method the most according to claim 1, it is characterised in that be initially at the quantity of goods, described mesh described in basis
Mark output total amount and described computation model calculate on the described board within the described time to be predicted after the quantity of goods,
Described method also includes:
According on the described board in the described time to be predicted goods quantity generate chip the plan of unloading goods；And
The chip plan of unloading goods of the chip relatively the formulated plan of unloading goods and described generation, adjusts the chip of described formulation and unloads goods meter
Draw.
6. the generating means of a semiconductor technology processing procedure information, it is characterised in that including:
First acquiring unit, the target at goods of the quantity being initially at goods and described board for obtaining board exports
Total amount, described target output total amount includes many batches of target output；
Second acquisition unit, the calculating of the quantity at goods for obtaining on described board in calculating the time to be predicted
Model；
Computing unit, by being initially at described in basis based on the quantity of goods, described target output total amount and described computation model
Calculate the quantity at goods on the described board within the described time to be predicted；
Judging unit, for judging whether the quantity at goods on described board is less than predetermined number；And
Control unit, for when being less than described predetermined number in the quantity of goods described in judging on described board, controlling
Make described board to quit work.
Generating means the most according to claim 6, it is characterised in that described computing unit includes:
First computing module, for by the described quantity being initially at goods and the summation of first target output of first day
As first day of described board be initially at product amounts；
First analog module, is initially at product amounts in described calculating for run goods data and described first day according to history
Model is simulated the quantity at goods of the described board of first day end time；
Second computing module, for first target by the first day quantity at goods through described board and second day
The summation of output as second day be initially at product amounts；And
Second analog module, is initially at product amounts described for run goods data and described second day according to described history
Computation model is simulated the second day quantity at goods through described board.
Generating means the most according to claim 6, it is characterised in that described computing unit also includes:
3rd acquisition module, for obtaining the load information of described board；
Judge module, is used for judging whether described load information shows described board overload；
Enter machine logging modle, if for judging that described load information does not shows described board overload, then counting into board
Load number and current time is entered the machine time as described at goods；
4th acquisition module, processes the described process time at goods for obtaining described board；And
Go out machine logging modle, for entering machine time and described process time sum as described at goods using described at goods
Go out the machine time.
Generating means the most according to claim 8, it is characterised in that described generating means also includes:
Statistical module, for being initially at the quantity of goods, described target output total amount and described computation model described in basis
Calculate on described board within the described time to be predicted after the quantity of goods, according to the load of described board, described
Enter the machine time and described go out the machine time statistics described board goods in process inventory within a predetermined period of time change, changed
Trendgram；
Output module, is used for exporting described changing trend diagram.
Generating means the most according to claim 6, it is characterised in that described device also includes:
Schedule module, for being initially at the quantity of goods, described target output total amount and described computation model described in basis
Calculate the chip plan of unloading goods generated after the quantity of goods on the described board within the described time to be predicted；And
Adjusting module, compares the chip plan of unloading goods and the chip plan of unloading goods of described generation of formulation, adjusts described formulation
The chip plan of unloading goods.
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