CN105984656A - substrate carrier - Google Patents
substrate carrier Download PDFInfo
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- CN105984656A CN105984656A CN201510092519.1A CN201510092519A CN105984656A CN 105984656 A CN105984656 A CN 105984656A CN 201510092519 A CN201510092519 A CN 201510092519A CN 105984656 A CN105984656 A CN 105984656A
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- Prior art keywords
- carrier
- base board
- flexible member
- connecting portion
- base plate
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- 239000000758 substrate Substances 0.000 title abstract description 5
- 230000004308 accommodation Effects 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 8
- 239000000969 carrier Substances 0.000 claims 5
- 230000001934 delay Effects 0.000 claims 1
- 238000013461 design Methods 0.000 abstract description 34
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 76
- 230000003139 buffering effect Effects 0.000 description 11
- 238000013459 approach Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
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- 238000013467 fragmentation Methods 0.000 description 8
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- 238000005299 abrasion Methods 0.000 description 6
- 101100495256 Caenorhabditis elegans mat-3 gene Proteins 0.000 description 5
- 238000007667 floating Methods 0.000 description 5
- 230000002040 relaxant effect Effects 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000000452 restraining effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000000638 solvent extraction Methods 0.000 description 3
- 210000001138 tear Anatomy 0.000 description 3
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- 239000012634 fragment Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Abstract
The invention provides a substrate carrier, which comprises a carrier comprising a plurality of first structures; each first structure comprises a bottom plate and a side plate, and a plurality of elastic elements are arranged on the bottom plate; the first structures can be assembled and the side plates and the bottom plates surround a bearing space. The invention also provides a substrate carrier, which comprises a carrier and a plurality of buffer structures; the carrier comprises a bottom plate and a plurality of side plates, and a bearing space is surrounded by the side plates and the bottom plate; each buffer structure is provided with a plurality of elastic elements, and the buffer structures and the bottom plate are detachably positioned and installed by a combination unit. The structural design of the invention facilitates the detachment and assembly of the components, and when part of the components are damaged, the components can be detached and replaced respectively without eliminating the whole carrier, thereby reducing the cost of production equipment.
Description
Technical field
The present invention relates to a kind of base board carrier, particularly relate to the manufacture process of a kind of solaode is used
In the base board carrier loading wafer.
Background technology
Refering to Fig. 1,2, in the past for load the base board carrier 91 of wafer 900 generally comprise a pedestal 911,
One defined by this pedestal 911 and for wafer 900 accommodating take up space 912 and multiple with pedestal 911 1
Body formed and be located at the bolster 913 of its bottom margin, can be elastic when bolster 913 abuts against wafer 900
Swing to avoid wafer 900 to crush because of collision.
Base board carrier 91 is the feeder in solaode processing procedure, and feeder is carrying wafer 900
Machine, it comprises two towards 92, lifting moving up and down of the blow gun dress taking up space 912
Put 93 and a Handling device 94.
During use, the suction of Handling device 94 can make the wafer 900 ' of top above move, but several crystalline substances of top
Sheet 900 ' often adsorbs each other because of electrostatic.Therefore, blown by the most several wafer 900 ' of blow gun 92,
The wafer 900 ' making absorption is separated from one another, in order to Handling device 94 only siphons away a piece of of the top.But, brilliant
Often because of gas flow-disturbing, double swerve touches pedestal 911 sidewall to the upper shifting of sheet 900 ', now can be by buffering
The elastics wing of part 913 absorbs impulsive force, to slow down rocking and avoiding breaking because of collision of wafer 900 '
Sheet.
Additionally, during because moving and touch pedestal 911 sidewall on wafer 900 ', the edge of wafer 900 ' easily with buffering
Part 913 produces friction, and then makes the surface generation abrasion of bolster 913 even rupture, this abrasion or fracture
Wafer 900 ' is easily produced and injures even fragmentation by place, and is the damage avoiding wafer 900, preferably finds
When bolster 913 has abrasion or fracture, i.e. carry out the replacing of whole base board carrier 91, but so will have
The problem that cost increases.
Additionally, base board carrier 91 is to make pedestal 911 and bolster in the way of Unitary injection formed
913, but in the cooling procedure after injection, because bolster 913 is the shape of elongate strip, therefore easily have curved
The situation of bent deformation, as it is shown on figure 3, wherein the closer to the bolster 913 at pedestal 911 flanking central
Deformation of leaning forward is the most obvious, and this is because bolster 913 is connected to bottom pedestal 911 for elongated shape and the most single end
Edge, be difficult to after causing the demoulding make bolster 913 arranged vertically, the most also because save material one-tenth
This, relatively thin (the such as 2mm) often made bottom pedestal 911, the most more make these longilineal bufferings
The supportive of its bottom of part 913 is not enough, and the situation causing inclination and distortion is more serious.
It follows that because bolster 913 has the problem leaned forward, the side making wafer 900 cannot be resisted against
Disperse stress on each bolster 913, and occurring is only to be resisted against the most serious that root buffering
Part 913, makes wafer 900 edge easily rupture because of unbalance stress.Meanwhile, the problem that leans forward of bolster 913
Also operator can be made when being placed and taken out wafer, it is easier to encounter the bolster 913 of inclination and have not
The most even problem of fragmentation.
Summary of the invention
It is an object of the invention to provide and a kind of individually can change partial structurtes and reduce the base of equipment cost
Onboard tool.
The present invention provides a kind of base board carrier, and it comprises a carrier.This carrier include multiple can mutual group
The first structure joined；Respectively this first structure includes a base plate and a side plate, near this side on this base plate
Multiple flexible member it is provided with at plate；The plurality of first structure can be assembled and position and relative by the plurality of side plate
In the plurality of base plate around a bearing space.
Base board carrier of the present invention, this base board carrier also comprises a shell, and this shell has one
Accommodation space, the plurality of first structure is arranged at this accommodation space and is respectively positioned in this shell.
Base board carrier of the present invention, respectively single with at least one first location between this side plate and this shell
Unit positions.
Base board carrier of the present invention, this base board carrier also comprises a shell, the plurality of first structure
It is arranged on this shell, and respectively determines with at least one second positioning unit between this base plate and this shell
Position.
Base board carrier of the present invention, at least two in the plurality of flexible member is with a connecting portion even
Connecing, the position of this connecting portion is not higher than the 2/3 of the height of the plurality of flexible member.
Base board carrier of the present invention, the position of this connecting portion is without departing from the height of the plurality of flexible member
1/2～2/3 scope outside.
Base board carrier of the present invention, this connecting portion extends for connection to this base plate.
Base board carrier of the present invention, this connecting portion has at least one through hole.
The beneficial effects of the present invention is: carrier is distinguished into the design of multiple first structure, when wherein one
When the flexible member abrasion of individual first structure, fracture, only need to change this first structure whole without eliminating
Carrier, it is possible to decrease cost.
The present invention also provides for a kind of base board carrier, and it comprises a carrier, this carrier include a base plate and
Multiple side plates, the plurality of side plate relative to this base plate around a bearing space.This base board carrier also wraps
Containing multiple buffer structures, every side plate is provided with at least one in the plurality of buffer structure, and each slow
Rush structure and there is multiple flexible member, this base plate of the end thereof contacts of the plurality of flexible member, respectively this elasticity unit
With combining unit location and installation removably between the top of the other end of part and respectively this side plate, respectively
This flexible member is in being bent to form an elastic spring at this combining unit.
Base board carrier of the present invention, respectively this elastic spring is formed in one connection to each other.
Base board carrier of the present invention, at least two in the plurality of flexible member is with a connecting portion even
Connecing, the position of this connecting portion is not higher than the 2/3 of the height of the plurality of flexible member.
Base board carrier of the present invention, this carrier is made up of multiple the first structures that can mutually assemble.
The beneficial effects of the present invention is: respectively between the other end of this flexible member and the top of each this side plate
With combining unit location and installation removably, when the flexible member on one of them buffer structure wear and tear,
During fracture, only need to change this buffer structure without eliminating whole base board carrier, it is possible to decrease cost.
Base board carrier of the present invention, comprises a carrier, and this carrier includes a base plate and multiple side plate, should
Multiple side plates relative to this base plate around a bearing space.This base board carrier also comprises multiple buffering knot
Structure, each buffer structure has multiple flexible member, and the plurality of buffer structure is located on this base plate and corresponding
Near fixed removably with a combining unit between the plurality of side plate, and the plurality of buffer structure and this base plate
Position is installed, and one end of the plurality of flexible member of each buffer structure extends and contactless institute away from this base plate
Corresponding respectively this side plate.
Base board carrier of the present invention, at least two in the plurality of flexible member is with a connecting portion even
Connecing, the position of this connecting portion is not higher than the 2/3 of the height of the plurality of flexible member.
Base board carrier of the present invention, this carrier is made up of multiple the first structures that can mutually assemble.
The beneficial effects of the present invention is: be respectively combined with one between the other end of this flexible member with this base plate
Unit location and installation removably, when the flexible member of one of them buffer structure weares and teares, ruptures, only
This buffer structure need to be changed without eliminating whole base board carrier, it is possible to decrease cost.
Another object of the present invention is to provide a kind of structural strength good and the substrate load of fragment rate can be reduced
Tool.
Base board carrier of the present invention, comprises a carrier, and this carrier includes a base plate and multiple side plate, should
Multiple side plates relative to this base plate around a bearing space.This base board carrier also comprises multiple buffering knot
Structure, respectively this buffer structure is located on this base plate and near respectively this side plate, and respectively this buffer structure has multiple
Flexible member, one end of the plurality of flexible member extends away from this base plate；In the plurality of flexible member extremely
Few two connect with a connecting portion, and the position of this connecting portion is not higher than the height of the plurality of flexible member
2/3。
Base board carrier of the present invention, the position of this connecting portion is without departing from the height of the plurality of flexible member
1/2～2/3 scope outside.
Base board carrier of the present invention, this connecting portion extends for connection to this base plate.
Base board carrier of the present invention, this connecting portion has at least one through hole.
The beneficial effects of the present invention is: at least two in the plurality of flexible member is with a junction even
Connect, to avoid leaning forward and forming copline arrangement, so that wafer side is uniformly resisted against of flexible member
Every flexible member and uniform stressed, to reduce the fragment rate of wafer and to be easy to taking or inserting of wafer.
Accompanying drawing explanation
Fig. 1 is the axonometric chart of conventional base board carrier；
Fig. 2 is the use state sectional view that Fig. 1 base board carrier carries multiple wafers；
Fig. 3 is the top view of the base board carrier of Fig. 1；
Fig. 4 is the axonometric chart of the first embodiment of base board carrier of the present invention；
Fig. 5 is the three-dimensional exploded view of first embodiment；
Fig. 6 is the top view of first embodiment；
Fig. 7 is the partial sectional view of the A-A position of Fig. 6 of first embodiment；
Fig. 8 is the use state sectional view of the B-B position of Fig. 6 of first embodiment；
Fig. 9 is the top view of the second embodiment of base board carrier of the present invention；
Figure 10 is the three-dimensional exploded view of the carrier of the second embodiment；
Figure 11 is the axonometric chart of the 3rd embodiment the first structure of base board carrier of the present invention；
Figure 12 is the axonometric chart of the 4th embodiment the first structure of base board carrier of the present invention；
Figure 13 is the axonometric chart of the 5th embodiment the first structure of base board carrier of the present invention；
Figure 14 is the three-dimensional exploded view of the sixth embodiment of base board carrier of the present invention；
Figure 15 is the three-dimensional exploded view of the local of sixth embodiment；
Figure 16 is the top view of sixth embodiment；
Figure 17 is the partial sectional view of the C-C position of Figure 16 of sixth embodiment；
Figure 18 is that the D-D position of Figure 16 of sixth embodiment uses state sectional view；
Figure 19 is the three-dimensional exploded view of the 7th embodiment local of base board carrier of the present invention；
Figure 20 is the sectional perspective exploded view of the 8th embodiment of base board carrier of the present invention；
Figure 21 is the three-dimensional exploded view of the 9th embodiment of base board carrier of the present invention；
Figure 22 is the incomplete three-dimensional exploded view of the 9th embodiment；
Figure 23 is the top view of the 9th embodiment；
Figure 24 is that the E-E position of Figure 23 of the 9th embodiment uses state sectional view；
Figure 25 is the sectional perspective exploded view of the tenth embodiment of base board carrier of the present invention；
Figure 26 is the 11st embodiment sectional perspective exploded view of base board carrier of the present invention；
Figure 27 is the three-dimensional exploded view of the 12nd embodiment of base board carrier of the present invention；
Figure 28 is the three-dimensional exploded view of the 13rd embodiment of base board carrier of the present invention；
Figure 29 is the three-dimensional exploded view of the 14th embodiment of base board carrier of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings and embodiment the present invention is described in detail, it is noted that, following
In description, similar element represents to be identically numbered.
Refering to Fig. 4,5,6, a first embodiment of base board carrier 1 of the present invention, comprise: a carrier 11,
One shell 12, at least one first positioning unit 13 and at least one second positioning unit 14.
This carrier 11 includes multiple the first structure 2 that can mutually assemble or claim combination.Respectively this first structure 2 is wrapped
Include a base plate 3 and side plate 4, this base plate 3 is provided with multiple flexible member 5 at this side plate 4.These are many
Individual first structure 2 can be assembled location and be held around one relative to the plurality of base plate 3 by the plurality of side plate 4
Carry space 110, and the flexible member 5 of the plurality of first structure 2 is arranged at this bearing space 110 with being around
In.
This shell 12 has an accommodation space 120, and the plurality of first structure 2 is arranged at this accommodation space 120
And be respectively positioned in this shell 12, wherein, on implementing, this shell 12 and the first structure 2 are rectangle
Or similar rectangle, or can be square.And on further implementing, can be by accommodation space 120
Divide into the quartering and four corresponding the first structures 2 are combined in the accommodation space 120 of this shell 12
In.
Refering to Fig. 5,6,7, respectively with at least one first positioning unit 13 between this side plate 4 and this shell 12
Location.Each first positioning unit 13 includes being located in one of them of this side plate 4 and this shell 12
The first protuberance 131 and one be arranged at this side plate 4 and this shell 12 therein on another and removable
Liftoff the first recess 132 assembled with this first protuberance 131.
In the present embodiment, the first protuberance 131 for projection and is located on side plate 4；First recess 132 is card
Hole and be available for the first protuberance 131 plug-in card and position and be located on this shell 12.On the implementation, as long as first is convex
Portion 131 and the first recess 132 can be combined with each other removably, be not required to limit the first protuberance 131 with
The form of the first recess 132.It addition, the first protuberance 131 and the first recess 132 to arrange position interchangeable,
It is not limited to the citing of the present embodiment.
Position with at least one second positioning unit 14 between base plate 3 and shell 12.Each second positioning unit 14
It is located at base plate 3 and shell 12 the second protuberance 141 and on one of them including one and is located at base plate 3 with outer
The second recess 142 in shell 12 other in which and assembled with this second protuberance 141 removably.
In the present embodiment, the second protuberance 141 for projection and is located on base plate 3；Second recess 142 is card
Hole and for the second protuberance 141 plug-in card location, and be located on this shell 12.On the implementation, as long as second is convex
Portion 141 and the second recess 142 can be combined with each other removably, be not required to limit the second protuberance 141 with
The form of the second recess 142.It addition, the second protuberance 141 and the second recess 142 to arrange position interchangeable,
It is not limited to the citing of the present embodiment.
In the present embodiment, though this carrier 11 is by the plurality of first positioning unit 13 and/or the plurality of
Two positioning units 14 and assemble and be fixed in the accommodation space 120 of this shell 12, but on the implementation, carry
Also can adopt tight fit mode between body 11 and shell 12 to fix, be fixed in shell 12 so carrier 11 assembles
Means are not limited to the aspect disclosed by the present embodiment.
Each flexible member 5 all has a court and extends away from this base plate 3 direction and can the bullet of elastics wing
Property rod 51 (or claiming elastic rod) and one be positioned at flexible rod 51 away from one end of base plate 3 be bent to form curved
Folding part 52.In the present embodiment, the flexible rod 51 of each flexible member 5 is overall with kink 52 L-shaped.
Flexible rod 51 can be formed in one with base plate 3 and be connected, and the flexible rod 51 section in parallel mat 3 direction is square
Shape.
After the plurality of first structure 2 mutually assembles and constitutes this carrier 11, as shown in Fig. 6 top view, respectively should
The base plate 3 of the first structure 2 cooperates and constitutes a slightly plate body in tetragon, and this plate body has four angles
Falling 31, be decrescence the closer to spacing d between the flexible member 5 at corner 31, this design is available for wafer and is blown
Stroke and during separating floating, wafer and the position of collision of surrounding elastomeric element 5 often occur at corner 31, because of
When this spacing that will be close to the flexible member 5 at corner 31 reduces or arranges the most intensive, increase stress
Contact area, is conducive to relaxing the collision problem of Waffer edge corner.
Refering to Fig. 4,7,8, the present embodiment is on using, and the bearing space 110 of this base board carrier 1 is used for
Containing multiple wafer 8,8 ', base board carrier 1 is placed on a feeder, and feeder is solaode
Manufacture process is used for carrying the machine of wafer 8,8 ', and feeder comprises two difference and can spray gas
Blow gun 71, one can wear this base board carrier 1 and the lifting apparatus that wafer 8 can be made to increase up or down
72 and one can draw wafer 8,8 ' and wafer 8,8 ' is positioned in a conveyer belt (not shown)
Handling device 73.Wherein, this lifting apparatus 72 makes wafer 8 be positioned at the height of two blow guns 71, and leads to
Cross blow gun 71 to blow and make the wafer 8 ' of top separated from one another, then draw the wafer of the top with Handling device 73
8 ' to complete the action of pickup.
When the wafer 8 ' of aforementioned top is separated from one another because being brushed by air-flow, easily because of gas flow-disturbing, left and right is shaken
Move and touch the flexible member 5 of surrounding, but after life-time service, if the flexible rod 51 of flexible member 5 is subject to
The cutting at wafer 8 ' edge and form indentation, chase is when even rupturing, the flexible member 5 of visual consume is
Belong to which the first structure 2, more immediately replace this first structure 2 having damage, to avoid
The problem directly replacing whole base board carrier 1 such as traditional mode and have high cost.
It addition, in the present embodiment, the flexible rod 51 of each flexible member 5 is in the width near kink 52
The width spending closer base plate 3 is little, promotes the elasticity at flexible member 5 adjacent top end whereby.In other words
Say, by the design of this from bottom to top width decrescence (or title girth is the least), the whole of flexible rod 51 can be made
Body reaches optimal collocation between structural strength and elasticity, therefrom can promote the elasticity of flexible rod 51 again
Abut effect.And above-mentioned kink 52 is to be formed towards deviating from this bearing space 110 direction.
It addition, on implementing, flexible member 5 i.e. bends away from this base plate 3 at the end of its flexible rod 51
Forming this kink 52, thus can strengthen the structural strength at place above flexible rod 51, such design also may be used
Design with above-mentioned flexible rod 51 width decrescence (or title girth is the least) is arranged in pairs or groups mutually.
In the present embodiment, flexible rod 51 is formed in one with base plate 3.On other embodiments, bullet
The flexible rod 51 of property element 5 can be adopted the mode of plugging and is fixed on base plate 3.Now, the elasticity of flexible member 5
Rod 51 sections in this base plate 3 direction parallel are that the design of non-circular such as rectangle is preferred.If this is because of elastic
When rod 51 is circular, base plate 3 hole of its corresponding inserted also needs circle, the most easily makes flexible rod 51 in it
Middle generation rotates, and then makes the kink 52 being originally intended to arrange outwardly transfer inwardly, so generation to be picked and placeed
Even the inconvenience of sheet causes the shock of wafer 8,8 ' to rupture.
Refering to Fig. 6,7,8, in the present embodiment, the flexible member 5 section in parallel mat 3 direction in
Rectangle, the flexible rod 51 of flexible member 5 have one towards bearing space 110 and be available for wafer 8,8 ' against
Surface 511, by these surfaces 511 with the form in face for wafer 8,8 ' edge against, both contacts area
Can lower and touch impulsive force relatively greatly, to avoid wafer 8,8 ' to produce fragmentation or the surface 511 of flexible rod 51
Produce the problems such as damage.
In the present embodiment, spacing d between flexible member 5 at corner 31 is decrescence, this design
Being available for wafer 8 ' to be brushed and during separating floating, wafer 8 ' often occurs with the position of collision of surrounding elastomeric element 5
At corner 31, spacing d that therefore will be close to the flexible member 5 at corner 31 reduces or arranges the most intensive
Time, increase the contact area of stress, be conducive to relaxing the collision problem at wafer 8 ' edge corner.
Refering to Fig. 4,5,8, by above design, the use longevity of the carrier 11 of base board carrier 1 can be improved
Life, if but long-time use lower and time still there is abrasion, fracture in flexible member 5, flexible member 5 can be damaged
That bad first structure 2 is replaced, in order to avoid make wafer 8,8 ' by flexible member 5 because not changing
Impact and rupture.
From the foregoing, it will be observed that the innovation that this carrier 11 is designed to be combined by multiple first structures 2 by the present embodiment sets
Meter, can wear and tear, when rupturing, changes this first structure 2 by the flexible member 5 in certain first structure 2
, it is not necessary to as traditional approach eliminates whole carrier 11, it is possible to decrease cost.
Refering to Fig. 9,10, the second embodiment of base board carrier 1 of the present invention, itself and first embodiment substantially phase
With, the carrier 11 of the present embodiment radially distinguishes multiple first structure 2, itself and first embodiment
Difference be that the quantity of the first structure 2 is different.In the present embodiment, the quantity of the first structure 2 is eight,
So design, time alternative, if the minimum eighth part replacing whole carrier 11,
Ratio is relatively low, relative escapable cost.In addition, on implementing, the carrier 11 of the present invention can be distinguished into several
First structure 2, its partitioning scheme and quantity are not limited to the citing of more than the present embodiment, as long as can meet
The spirit of the present invention and purpose are all in this case protection domain.
Refering to Figure 11, the 3rd embodiment of base board carrier of the present invention is roughly the same with first embodiment, both
The difference at least two that is in the plurality of flexible member 5 connect with a junction 53, wherein connecting portion
53 are connected between at least two flexible rod 51.The position of connecting portion 53 is not higher than the height of flexible rod 51
2/3rds (i.e. 2/3) of h.More preferably, the position of connecting portion 53 is without departing from the height h of flexible rod 51
Outside the scope of 1/2～2/3.Wherein, the height h described in the present embodiment, is to start at bullet from the surface of base plate 3
The top of property rod 51.
Hold, be connected to the design between flexible rod 51 by connecting portion 53, can allow by ejection formation system
The flexible member 5 of the first structure 2 made is restricted in the cooling procedure in mould or after the demoulding and makes
It presents the result vertically stood upright, it is to avoid the problem that leans forward that traditional approach is derivative.The most such design is also
The surface 511 of many flexible rod 51 can be allowed the most in the same plane, can make wafer against time stress more
It is uniformly dispersed, effectively reduces because of fragmentation problem when single-point stress or lifting surface area are too small.
It addition, the position of above-mentioned connecting portion 53 also should not be the highest, this floats because top wafer separates and touches
During flexible rod 51 around, if the position of connecting portion 53 is too high, the best elastics wing will be made
Effect is affected, so that originally reducing against the effect of buffering for wafer, therefore, and connecting portion 53
Position with the 2/3 of height h or is preferred below.
If also, the position that arranges of connecting portion 53 too low and during close to base plate 3, it would be possible to produce tradition originally
The tilt problem of design, this is too high because of the overall ratio being positioned at the flexible rod 51 above connecting portion 53, thus
The problem being susceptible to inclination and distortion equally, therefore, the position of connecting portion 53 the most preferably less than flexible rod 51 is high
The 1/2 of degree h.But, if still there is the connecting portion 53 arranging other top of the connecting portion 53 at base plate 3
Time, by mutually restraining between the two, then it is avoided that the tilt problem that this place is referred to.
Refering to Figure 12, the 4th embodiment of base board carrier of the present invention, roughly the same with the 3rd embodiment,
At least two in the plurality of flexible member 5 connects with a junction 53.Both difference are connecting portion
53 extend for connection to, at base plate 3, wherein present X-shaped.
Refering to Figure 13, the 5th embodiment of base board carrier of the present invention, roughly the same with the 4th embodiment,
Difference of them is that connecting portion 53 is down extended to this base plate 3 by 2/3 position of flexible rod 51 height h,
Make entirety present a demihull shape, and connecting portion 53 has at least one through hole 530, and on implementing
As shown in figure 13, being to be designed with multiple through hole 530, this design is in addition to can saving material cost, it is possible to
The air-flow causing flow-disturbing is allowed to flow out from through hole 530, to slow down the situation that the double swerve of wafer collides.
And Figure 13 so designs and also can be effectively improved the structural strength below flexible member 5, thus behaviour can be reduced
Make damage situation when personnel are free-hand to take carrier 11 and touch flexible member 5, to increase the service life.
Refering to Figure 14,15,16,17, the sixth embodiment of base board carrier 1 of the present invention, comprise a carrier
11, shell 12, at least one first positioning unit 13, at least one second positioning unit 14, multiple buffering
Structure 15 and multiple combining unit 16.
Carrier 11 includes a base plate 3 and multiple side plate 4, and multiple side plates 4 carry around one relative to base plate 3
Space 110, buffer structure 15 is around being located in bearing space 110 around.Shell 12 has an accommodating sky
Between 120, carrier 11 is located at accommodation space 120 and is positioned this shell 12.
Position with the first positioning unit 13 between side plate 4 and shell 12.First positioning unit 13 includes that one sets
The first protuberance 131 and in one of them of side plate 4 and shell 12 is located at side plate 4 and shell 12
The first recess 132 on another and assembled with the first protuberance 131 removably therein.
In the present embodiment, the first protuberance 131 for projection and is located on side plate 4；First recess 132 is card
Hole and position and be located on shell 12 for the first protuberance 131 plug-in card.In enforcement, if the first protuberance 131 with
First recess 132 can be combined with each other removably, is not required to limit the first protuberance 131 and the first recess
The form of 132.It addition, the first protuberance 131 and the first recess 132 to arrange position interchangeable, be not limited to
The citing of the present embodiment.
Position with at least one second positioning unit 14 between base plate 3 and shell 12.Each second location is single
Unit 14 include being located at base plate 3 and shell 12 one of them on the second protuberance 141 and one be located at
Wherein another of base plate 3 and shell 12 upper and removably with the second recess of the second protuberance 141 assembling
142。
In the present embodiment, the second protuberance 141 for projection and is located on base plate 3；Second recess 142 is card
Hole and position and be located on this shell 12 for the second protuberance 141 plug-in card.On the implementation, if the second protuberance
141 and second recess 142 can be combined with each other removably, be not required to limit the second protuberance 141 and
The form of two recesses 142.It addition, the second protuberance 141 and the second recess 142 to arrange position interchangeable,
It is not limited to the citing of the present embodiment.
In the present embodiment, though carrier 11 is by multiple first positioning units 13 and multiple second positioning units
14 and assemble and be fixed in the accommodation space 120 of shell 12, but on the implementation, the most alternatively close-fitting
The fixed form closed, so the means that carrier 11 is fixed in shell 12 are not limited to disclosed by the present embodiment
Aspect.
Every side plate 4 is provided with at least one in multiple buffer structure 15, and each buffer structure 15 has
Multiple flexible members 5, the end thereof contacts base plate 3 (see Figure 17) of multiple flexible members 5.Each flexible member 5
With combining unit 16 location and installation removably between the top of the other end and each side plate 4.Each elastic unit
Part 5 is in being bent to form an elastic spring 151 at combining unit 16, and the most each elastic spring 151 is each other
Between be formed in one connection.
Each combining unit 16 include being located at buffer structure 15 and side plate 4 one of them on combination convex
Portion 161 and one be located on wherein another of buffer structure 15 and side plate 4 and removably with combine protuberance
The 161 combination recesses 162 assembled.
In the present embodiment, and it is located on buffer structure 15 for projection in conjunction with protuberance 161；In conjunction with recess 162
Supply this to combine protuberance 161 plug-in card to position and be located at for hole clipping on this side plate 4.On the implementation, as long as combining
Protuberance 161 can be combined with each other removably with combining recess 162, is not required to restriction and combines protuberance 161
With the form combining recess 162.It addition, combine protuberance 161 with combine recess 162 the position that arranges can be mutual
Change, be not limited to the citing of the present embodiment.
Each flexible member 5 all has a court and extends away from the direction of base plate 3 and can the bullet of elastics wing
Property rod 51 and one are bent to form by flexible rod 51 away from one end of this base plate 3 and connect elastic spring
The kink 52 of 151.In the present embodiment, the flexible rod 51 of each flexible member 5 and kink 52 are in L
Shape.Each flexible rod 51 section in parallel mat 3 direction is rectangular, and each flexible rod 51 is near curved
The width at width this base plate 3 closer at folding part 52 is little, and width therein can be replaced with girth.
The base plate 3 of this carrier 11 is a slightly plate body in tetragon, this plate body have four corners 31 (see
Figure 16), after the plurality of buffer structure 15 is assembled in this carrier 11 by the plurality of combining unit 16, more lean on
Spacing d between flexible member 5 at nearly the plurality of corner 31 is decrescence, this design be available for wafer brushed and
During separating floating, because the position of collision of wafer Yu surrounding elastomeric element 5 often occurs at corner 31, so
Will be close to the spacing of the flexible member 5 at corner 31 when reducing or arrange the most intensive, increase connecing of stress
Contacting surface is amassed, and is conducive to relaxing the collision problem of Waffer edge corner.
Refering to Figure 14,16,17,18, the present embodiment on using, the bearing space 110 of base board carrier 1
Having contained multiple wafer 8,8 ', base board carrier 1 is placed on a feeder, and feeder is solar-electricity
Pond manufacture process is used for carrying the machine of wafer 8,8 ', and feeder comprises two difference and can spray gas
Blow gun 71, can wear this base board carrier 1 up or down and wafer 8 lifting apparatus upwards can be made
72 and one can draw wafer 8,8 ' and wafer 8,8 ' is positioned in a conveyer belt (not shown)
Handling device 73.Wherein, this lifting apparatus 72 makes wafer 8 rise and is positioned at the height of two blow guns 71,
And make wafer 8 ' above separated from one another by the air blowing of this blow gun 71, then draw with this Handling device 73
The wafer 8 ' of the top is to complete the action of pickup.
When the wafer 8 ' of aforementioned top is separated from one another because being brushed by air-flow, easily because of gas flow-disturbing, left and right is shaken
Move and touch the flexible member 5 of surrounding, impulsive force when wherein flexible rod 51 subject wafer 8 ' touches, can
Design through the deformation of flexible rod 51 and elastic spring 151 and absorb, to avoid wafer 8 ' derivative because of collision
Rupture situation.Additionally, after life-time service, if flexible rod 51 is formed quarter by the cutting at wafer 8 ' edge
When trace, chase even rupture, the flexible member 5 of visual consume is belonging to which buffer structure 15, then
Replace the buffer structure 15 of damage, traditional approach so can be avoided directly to replace whole substrate and carry
The problem having 1 and have high cost.
It addition, in the present embodiment, the flexible rod 51 of each flexible member 5 is in the width near kink 52
It is little for spending the width at closer base plate 3, promotes the elasticity at flexible member 5 adjacent top end whereby.Change sentence
Talk about, by the design of this from bottom to top width decrescence (or title girth is the least), flexible rod 51 can be made
Entirety reaches optimal collocation between structural strength and elasticity, therefrom can promote the bullet of flexible rod 51 again
Property buffering effect.And above-mentioned kink 52 is to be formed towards deviating from this bearing space 110 direction.
It addition, on implementing, flexible member 5 i.e. bends away from this base plate 3 at the end of its flexible rod 51
Form this kink 52, thus the structural strength at flexible rod 51 upper extremity, such design can be strengthened
Also decrescence or the design that girth is the least can be claimed to arrange in pairs or groups mutually with above-mentioned flexible rod 51 width.
In the present embodiment, the flexible member 5 section in parallel mat 3 direction is rectangular, flexible member 5
Flexible rod 51 there is one towards bearing space 110 and be available for the surface 511 that wafer 8,8 ' abuts against.Pass through
These surfaces 511 with the form in face for wafer 8,8 ' edge against, contact area between the two can be made to increase
Adding, during to lower single-contact, the surface 511 of the excessive produced fragmentation of stress or flexible rod 51 produces
The problems such as damage.
Further, in the present embodiment, spacing d between flexible member 5 at corner 31 is decrescence,
This design be available for wafer 8 ' brushed and during separating floating, because of wafer 8 ' and the collision bit of surrounding elastomeric element 5
Put and often occur at corner 31, therefore spacing d that will be close to the flexible member 5 at corner 31 reduces or arranges more
For time intensive, lifting surface area herein can be increased, be conducive to relaxing the collision at wafer 8 ' edge corner and ask
Topic.
Refering to Figure 15,17,18, by above design, the making of carrier 11 of base board carrier 1 can be improved
With the life-span, if but long-time use lower and time still there is abrasion, fracture in flexible member 5, can be by elastic unit
That buffer structure 15 that part 5 damages is replaced, in order to avoid make wafer 8,8 ' by elasticity because not changing
The impact of element 5 and rupture.
From the foregoing, it will be observed that between the top of the other end of the present embodiment respectively this buffer structure 15 and respectively this side plate 4
With combining unit 16 location and installation removably, and when the flexible member 5 on certain buffer structure 15 grinds
When damage, fracture, change this buffer structure 15, it is not necessary to as traditional approach eliminates whole carrier 11,
Cost can be reduced.
Refering to Figure 19, the 7th embodiment of base board carrier 1 of the present invention is roughly the same with sixth embodiment, and two
The difference of person is in each buffer structure 15, and at least two in the plurality of flexible member 5 connects with one
Portion 53 connects.
Connecting portion 53 is connected between at least two flexible rod 51.The position of connecting portion 53 not higher than elasticity
2/3rds (i.e. 2/3) of the height h of rod 51.More preferably, the position of connecting portion 53 is without departing from flexible rod 51
The 1/2 of height h～the scope of 2/3 outside.Height h described in the present embodiment, is adjacent to this end from flexible rod 51
The top of flexible rod 51 is up started in the bottom of plate 3.
Hold, be connected to the design between flexible rod 51 by connecting portion 53, can allow by ejection formation system
In the flexible member 5 of the first structure 2 made cooling procedure in mould or after the demoulding, it is restricted in and makes
It presents the result vertically stood upright, it is to avoid the problem that leans forward that traditional approach is derivative.The most such design is also
The surface 511 of many flexible rod 51 can be allowed the most in the same plane, can make wafer against time stress more
It is uniformly dispersed, effectively reduces because of fragmentation problem when single-point stress or lifting surface area are too small.
It addition, the position of above-mentioned connecting portion 53 also should not be the highest, this floats because top wafer separates and touches
During flexible rod 51 around, if the position of connecting portion 53 is too high, easily make the deformation above flexible rod 51 empty
Between diminish, the related elastics wing effect that have impact on flexible rod 51, thus reduce originally for wafer against
The effect of buffering, therefore, the position of connecting portion 53 with the 2/3 of height h or is preferred below.
If also, the position that arranges of connecting portion 53 too low and during close to base plate 3, it would be possible to produce tradition originally
The tilt problem of design, this is too high, in system because of the overall ratio being positioned at the flexible rod 51 above connecting portion 53
By certain the restraining of connecting portion 53, and the problem of inclination and distortion cannot be susceptible to, therefore, even on work
Connect portion 53 position the most preferably less than flexible rod 51 height h 1/2.But, if arranging connection at base plate 3
Portion 53, and when the most still other connecting portions 53 being set above it, by mutually restraining between the two, then can
Avoid the tilt problem that this place is referred to.
Refering to Figure 20, the 8th embodiment of base board carrier 1 of the present invention, roughly the same with sixth embodiment,
Both difference are: this carrier 11 includes multiple the first structure 2 that can mutually assemble or claim combination.Respectively
This first structure 2 includes diapire 201 and a sidewall 202, and the plurality of first structure 2 can be assembled location
After, respectively the diapire 201 of this first structure 2 constitutes this base plate 3, and respectively the sidewall 202 of this first structure 2 is constituted
Respectively this side plate 4, and the plurality of buffer structure 15 is fixed removably by the plurality of combining unit 16 respectively
Position is installed on the sidewall 202 of respectively this first structure 2.
Respectively respectively with one first positioning unit 13 between sidewall 202 and this shell 12 of this first structure 2
Location.In the present embodiment, respectively the first protuberance 131 of this first positioning unit 13 is located on sidewall 202；
Respectively the first recess 132 of this first positioning unit 13 is available for this first protuberance 131 plug-in card location, and is located at this
On shell 12.
Respectively respectively with one second positioning unit 14 between diapire 201 and this shell 12 of this first structure 2
Location.In the present embodiment, respectively the second protuberance 141 of this second positioning unit 14 is placed on diapire 201；
Respectively the second recess 142 of this second positioning unit 14 is available for this second protuberance 141 plug-in card location, is placed in this
On shell 12.
This carrier 11 is designed to the innovative design combined by multiple first structures 2 by the present embodiment, can be at certain
When first structure 2 is damaged, change this first structure 2, it is not necessary to as traditional approach eliminates whole carrier
11 and cost can be reduced.The carrier 11 of the present invention can be distinguished into several first structure 2, its partitioning scheme with
Quantity is not limited to the citing of more than the present embodiment, as long as the spirit of the present invention can be met with purpose all at this
In case protection domain.
Refering to Figure 21,22,23,24, the 9th embodiment of base board carrier 1 of the present invention, implement with the 6th
Example is roughly the same, and both difference are: buffer structure 15 installs position and the buffer structure 15 of carrier 11
Structure.
In the present embodiment, buffer structure 15 is located on this base plate 3 and corresponding near side plate 4, buffer structure
With combining unit 16 location and installation removably between 15 and base plate 3.In the present embodiment, in conjunction with single
The combination protuberance 161 of unit 16 is for projection and is located on buffer structure 15；The combination recess 162 of combining unit 16
Supply this to combine protuberance 161 plug-in card to position and be located at for hole clipping on this base plate 3.On the implementation, in conjunction with protuberance
161 with combine recess 162 to arrange position interchangeable, be not limited to the citing of the present embodiment.
Each buffer structure 15 has multiple flexible member 5, and one end of flexible member 5 extends away from base plate 3
And the side plate 4 corresponding to contactless.Each flexible member 5 all has a court and prolongs away from this base plate 3 direction
Stretch and the flexible rod 51 (or claiming elastic rod) of elastics wing and one can be positioned at flexible rod 51 away from base plate 3
The kink 52 that is bent to form of one end, kink 52 can strengthen the structural strength at place above flexible rod 51.
The flexible rod 51 of each flexible member 5 is in the width of the closer base plate of width 3 near kink 52
For little, promote the elasticity at flexible member 5 adjacent top end whereby, by this from bottom to top width decrescence
The design of (or title girth is the least), can make the entirety of flexible rod 51 reach between structural strength and elasticity
Suitable collocation, therefrom can promote the elastic of flexible rod 51 again and abut effect.And above-mentioned kink 52 is
Formed towards deviating from this bearing space 110 direction.
In the present embodiment, the flexible member 5 section in parallel mat 3 direction is rectangular, and flexible rod 51 has
Have one towards bearing space 110 and be available for wafer 8,8 ' against surface 511.By these surfaces 511
With the form in face for wafer 8,8 ' edge against, and both contacts area are bigger, it is possible to decrease that touches rushes
The surface 511 that power of hitting produces fragmentation or flexible rod 51 to avoid described wafer 8,8 ' produces the problems such as damage.
Elastic unit after buffer structure 15 is assembled in carrier 11 by combining unit 16, at corner 31
Spacing d between part 5 is decrescence, this design be available for wafer brushed and during separating floating, wafer and surrounding
The position of collision of flexible member 5 often occurs at corner 31, therefore will be close to the flexible member 5 at corner 31
Spacing when reducing or arrange the most intensive, increase the contact area of stress, be conducive to relaxing Waffer edge
The collision problem of corner.
Further illustrate, when at least one of which flexible member 5 on certain buffer structure 15 is because making
With and when wearing and tearing, rupture, change this buffer structure 15, it is not necessary to as traditional approach eliminates whole load
Body 11 and cost can be reduced.
Refering to Figure 25, the tenth embodiment of base board carrier 1 of the present invention, roughly the same with the 9th embodiment,
At least two that both difference are in the plurality of flexible member 5 connects with a junction 53, Qi Zhonglian
Meet portion 53 to be connected between at least two flexible rod 51.The position of connecting portion 53 is not higher than flexible rod 51
2/3rds (2/3) of highly h.More preferably, the position of connecting portion 53 is without departing from the height h of flexible rod 51
1/2～2/3 scope outside.Wherein, the height h described in the present embodiment, is adjacent to this end from flexible rod 51
The top of flexible rod 51 is up started in the bottom of plate 3.The top of the flexible rod 51 of indication is with herein herein
Front and back locate end equivalent in meaning of indication.
Hold, be connected to the design between flexible rod 51 by connecting portion 53, can allow by ejection formation system
The flexible member 5 of the first structure 2 made is restricted in the cooling procedure in mould or after the demoulding and makes
It presents the result vertically stood upright, it is to avoid the problem that leans forward that traditional approach is derivative.The most such design is also
The surface 511 of many flexible rod 51 can be allowed the most in the same plane, can make wafer against time stress more
It is uniformly dispersed, effectively reduces because of fragmentation problem when single-point stress or lifting surface area are too small.On it addition,
The position stating connecting portion 53 also should not be the highest, and this floats because top wafer separates and touches the flexible rod of surrounding
When 51, if the position of connecting portion 53 is too high, the best elastics wing effect will be affected,
So that originally reducing against the effect of buffering for wafer, therefore, the position of connecting portion 53 is with height h's
2/3 or be preferred below.
If also, the position that arranges of connecting portion 53 too low and during close to base plate 3, it would be possible to produce tradition originally
The tilt problem of design, this is too high because of the overall ratio being positioned at the flexible rod 51 above connecting portion 53, and with
Sample is susceptible to the problem of inclination and distortion, therefore, the position of connecting portion 53 the most preferably less than flexible rod 51 height
The 1/2 of h.But, if still there is the connecting portion 53 arranging other top of the connecting portion 53 at base plate 3,
By mutually restraining between the two, then it is avoided that the tilt problem that this place is referred to.
Refering to Figure 26, the 11st embodiment of base board carrier 1 of the present invention, roughly the same with the 9th embodiment,
Both difference are that this carrier 11 includes multiple the first structure 2 that can mutually assemble or claim combination.Respectively should
First structure 2 includes diapire 201 and a sidewall 202, after the plurality of first structure 2 can be assembled location,
Respectively the diapire 201 of this first structure 2 constitutes this base plate 3, and respectively to constitute this each for the sidewall 202 of this first structure 2
This side plate 4, and the plurality of buffer structure 15 is positioned removably by the plurality of combining unit 16 respectively
It is installed on the diapire 201 of respectively this first structure 2.
Respectively respectively with one first positioning unit 13 between sidewall 202 and this shell 12 of this first structure 2
Location.In the present embodiment, respectively the first protuberance 131 of this first positioning unit 13 is located on sidewall 202；
Respectively the first recess 132 of this first positioning unit 13 is available for this first protuberance 131 plug-in card location, and is located at this
On shell 12.
Respectively respectively with one second positioning unit 14 between diapire 201 and this shell 12 of this first structure 2
Location.In the present embodiment, respectively the second protuberance 141 of this second positioning unit 14 is located on diapire 201；
Respectively the second recess 142 of this second positioning unit 14 is available for this second protuberance 141 plug-in card location, and is located at this
On shell 12.
This carrier 11 is designed to the innovative design combined by multiple first structures 2 by the present embodiment, can be at certain
When individual first structure 2 is worn and torn, change this first structure 2, it is not necessary to as traditional approach eliminates whole load
Body 11 and cost can be reduced.The carrier 11 of the present invention can be distinguished into several first structure 2, its partitioning scheme
With the citing that quantity is not limited to more than the present embodiment, all exist as long as the spirit of the present invention can be met with purpose
In this case protection domain.
Refering to Figure 27,1 the 12nd embodiment of base board carrier 1 of the present invention, with the 3rd embodiment (see figure
11) roughly the same, difference between the two is: this carrier 11 is formed in one.
Refering to Figure 28,1 the 13rd embodiment of base board carrier 1 of the present invention, with the 4th embodiment (see figure
12) roughly the same, difference between the two is: this carrier 11 is formed in one.
Refering to Figure 29,1 the 14th embodiment of base board carrier 1 of the present invention, with the 5th embodiment (see figure
13) roughly the same, difference between the two is: this carrier 11 is formed in one.
The various structures between different embodiments in the present invention or the design on component, all can mutually flow use
With collocation, however it is not limited to embodiment listed in the present invention and the diagram of correspondence thereof are such, and this is because of a piece
Limited, therefore more difficult all embodiments are listed in detail, in a word, if the description of the present invention and diagram
In the feature once mentioned and design, all can carry out assembling of multi-form, there is the present invention equally and be intended to
The purpose reached and effect.
Claims (19)
1. a base board carrier, comprises a carrier；It is characterized in that, this carrier include multiple can be mutual
The first structure assembled；Respectively this first structure includes a base plate and a side plate, near being somebody's turn to do on this base plate
Multiple flexible member it is provided with at side plate；The plurality of first structure can be assembled location and by the plurality of side plate
Relative to the plurality of base plate around a bearing space.
Base board carrier the most according to claim 1, it is characterised in that this base board carrier also comprises one
Individual shell, this shell has an accommodation space, and the plurality of first structure is arranged at this accommodation space and divides
It is not positioned this shell.
Base board carrier the most according to claim 2, it is characterised in that respectively this side plate and this shell it
Between position with at least one first positioning unit.
Base board carrier the most according to claim 1, it is characterised in that this base board carrier also comprises one
Individual shell, the plurality of first structure is arranged on this shell, and respectively between this base plate and this shell with at least
One the second positioning unit positions.
Base board carrier the most according to any one of claim 1 to 4, it is characterised in that the plurality of bullet
At least two in property element connects with a connecting portion, and the position of this connecting portion is not higher than the plurality of elasticity
The 2/3 of the height of element.
Base board carrier the most according to claim 5, it is characterised in that the position of this connecting portion does not surpasses
Go out outside the 1/2 of height～the scope of 2/3 of the plurality of flexible member.
Base board carrier the most according to claim 5, it is characterised in that this connecting portion extends for connection to
This base plate.
Base board carrier the most according to claim 7, it is characterised in that this connecting portion has at least one
Individual through hole.
9. a base board carrier, comprises a carrier, and this carrier includes a base plate and multiple side plate, should
Multiple side plates relative to this base plate around a bearing space；It is characterized in that, this base board carrier also wraps
Containing multiple buffer structures, every side plate is provided with at least one in the plurality of buffer structure, and each slow
Rush structure and there is multiple flexible member, this base plate of the end thereof contacts of the plurality of flexible member, respectively this elasticity unit
With combining unit location and installation removably between the top of the other end of part and respectively this side plate, respectively
This flexible member is in being bent to form an elastic spring at this combining unit.
Base board carrier the most according to claim 9, it is characterised in that respectively this elastic spring is to each other
Be formed in one connection.
11. according to the base board carrier described in claim 9 or 10, it is characterised in that the plurality of flexible member
In at least two connect with a connecting portion, the position of this connecting portion is not higher than the plurality of flexible member
The 2/3 of height.
12. according to the base board carrier described in claim 9 or 10, it is characterised in that this carrier by multiple can
The first structure mutually assembled is constituted.
13. 1 kinds of base board carriers, comprise a carrier, and this carrier includes a base plate and multiple side plate,
The plurality of side plate relative to this base plate around a bearing space；It is characterized in that, this base board carrier is also
Comprising multiple buffer structure, each buffer structure has multiple flexible member, and the plurality of buffer structure is located at
On this base plate, also correspondence is close is combined with one between the plurality of side plate, and the plurality of buffer structure with this base plate
Unit location and installation removably, one end of the plurality of flexible member of each buffer structure is away from this base plate
Extend and contactless corresponding respectively this side plate.
14. base board carriers according to claim 13, it is characterised in that in the plurality of flexible member
At least two connect with a connecting portion, the position of this connecting portion is not higher than the height of the plurality of flexible member
The 2/3 of degree.
15. according to the base board carrier described in claim 13 or 14, it is characterised in that this carrier is by multiple
The first structure that can mutually assemble is constituted.
16. 1 kinds of base board carriers, comprise a carrier, and this carrier includes a base plate and multiple side plate,
The plurality of side plate relative to this base plate around a bearing space；It is characterized in that, this base board carrier is also
Comprising multiple buffer structure, respectively this buffer structure is located on this base plate and near respectively this side plate, and respectively this delays
Rushing structure and have multiple flexible member, one end of the plurality of flexible member extends away from this base plate；The plurality of
At least two in flexible member connects with a connecting portion, and the position of this connecting portion is not higher than the plurality of bullet
The 2/3 of the height of property element.
17. base board carriers according to claim 16, it is characterised in that the position of this connecting portion is not
Outside beyond the 1/2 of height～the scope of 2/3 of the plurality of flexible member.
18. base board carriers according to claim 16, it is characterised in that this connecting portion extends connection
To this base plate.
19. according to the base board carrier according to any one of claim 16 to 18, it is characterised in that this is even
The portion of connecing has at least one through hole.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW104102525A TWI545067B (en) | 2015-01-26 | 2015-01-26 | Loading body of wafer cassette |
| TW104102525 | 2015-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105984656A true CN105984656A (en) | 2016-10-05 |
Family
ID=57038011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510092519.1A Pending CN105984656A (en) | 2015-01-26 | 2015-03-02 | substrate carrier |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN105984656A (en) |
| TW (1) | TWI545067B (en) |
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| CN109709466A (en) * | 2017-10-25 | 2019-05-03 | 吴俊杰 | Cacheable limiting device |
| CN109896157A (en) * | 2019-03-13 | 2019-06-18 | 广州出入境检验检疫局综合技术服务中心 | A kind of stem cell kit and its application method with purification function |
| CN111071597A (en) * | 2018-10-18 | 2020-04-28 | 三星显示有限公司 | Tray for carrying display panel |
| WO2020129805A1 (en) * | 2018-12-18 | 2020-06-25 | 株式会社カネカ | Substrate tray |
| CN112582316A (en) * | 2019-09-29 | 2021-03-30 | 长鑫存储技术有限公司 | Processing device and method |
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| US20240047249A1 (en) * | 2022-08-02 | 2024-02-08 | Visera Technologies Company Ltd. | Transfer system for wafer cassettes |
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| CN111071597A (en) * | 2018-10-18 | 2020-04-28 | 三星显示有限公司 | Tray for carrying display panel |
| WO2020129805A1 (en) * | 2018-12-18 | 2020-06-25 | 株式会社カネカ | Substrate tray |
| JPWO2020129805A1 (en) * | 2018-12-18 | 2021-11-04 | 株式会社カネカ | Board tray |
| JP7013592B2 (en) | 2018-12-18 | 2022-01-31 | 株式会社カネカ | Board tray |
| CN109896157A (en) * | 2019-03-13 | 2019-06-18 | 广州出入境检验检疫局综合技术服务中心 | A kind of stem cell kit and its application method with purification function |
| CN109896157B (en) * | 2019-03-13 | 2021-06-15 | 广州出入境检验检疫局综合技术服务中心 | Stem cell kit with purification function and use method thereof |
| CN112582316A (en) * | 2019-09-29 | 2021-03-30 | 长鑫存储技术有限公司 | Processing device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI545067B (en) | 2016-08-11 |
| TW201627212A (en) | 2016-08-01 |
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Application publication date: 20161005 |