CN105977127B - Ion gun vacuum suitable for time of-flight mass spectrometer interconnects self-locking system - Google Patents
Ion gun vacuum suitable for time of-flight mass spectrometer interconnects self-locking system Download PDFInfo
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- CN105977127B CN105977127B CN201610526341.1A CN201610526341A CN105977127B CN 105977127 B CN105977127 B CN 105977127B CN 201610526341 A CN201610526341 A CN 201610526341A CN 105977127 B CN105977127 B CN 105977127B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/022—Circuit arrangements, e.g. for generating deviation currents or voltages ; Components associated with high voltage supply
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Abstract
Self-locking system is interconnected the invention discloses a kind of ion gun vacuum suitable for time of-flight mass spectrometer, including microprocessor, hatch door status switch, the control circuit being made up of the first vacuum electromagnetic valve controling circuit, the second vacuum electromagnetic valve controling circuit, the 3rd vacuum electromagnetic valve controling circuit；The high potential contact of the hatch door status switch is connected with dc source VCC, and the low potential contact of hatch door status switch is grounded by resistance R1.The invention has the advantages that solving the problems, such as that external noise disturbs the working condition of vacuum solenoid, maloperation of the software to vacuum solenoid is prevented.Ensure that all vacuum solenoids are remained closed when hatch door is not closed, three vacuum solenoids there cannot be two valves to be opened simultaneously, and three vacuum solenoids are closed at protecting vacuum if having；Vacuum safety when drastically increasing MALDI-TOF-MS instrument ion gun turnover target.
Description
Technical field
The present invention relates to time of-flight mass spectrometer, more particularly, to the ion gun vacuum interconnection suitable for time of-flight mass spectrometer
Self-locking system.
Background technology
Time of-flight mass spectrometer is a kind of new surface laser resolves mass spectrum, and instrument is mainly made up of two parts：Matrix is auxiliary
Help laser desorption ionisation ion gun（MALDI）And TOF（TOF）.Ion when time of-flight mass spectrometer works
High vacuum state is in inside source（10-7mbar）, to reach that so high vacuum needs to be taken out with " mechanical pump+molecular pump " series connection
Gas.Normal work, sample target are exited sample target out of cavity inside ion gun vacuum cavity, sample target is externally entering cavity
These three interior courses of work, all need the hatch door state monitoring switch and three vacuum solenoids of ion gun vacuum cavity to coordinate and cut
Change, can just make sample target in the inside and outside smooth transition turnover of ion gun vacuum cavity.Time of-flight mass spectrometer ion gun vacuum system
As shown in figure 1, mainly including mechanical pump 1, molecular pump 2, sample target 3, hatch door 4, the first vacuum solenoid 5, the second vacuum electromagnetic
Valve 6, the 3rd vacuum solenoid 7, hatch door status switch 8.Mechanical pump 1 and molecular pump 2 are serially connected with cavity 9, in the gas outlet of molecular pump 2
Place is provided with the first vacuum solenoid 5 to control gas path on-off between molecular pump 2 and mechanical pump 1；Mechanical pump 1 is to ion gun cavity
9 flows vacuumized are first to open the first vacuum solenoid 5, the air in cavity 9 are extracted with mechanical pump 1, when vacuum in cavity 9
Degree reaches 10-2Molecular pump 2 is opened during the mbar orders of magnitude, the mode for concatenating molecular pump 2 with mechanical pump 1 reaches vacuum in cavity 9
To 10-7mbar。
Go out target process, sample target 3 is moved to the position of hatch door 4, now hatch door 4 and the formation of sample target 3 one is isolated from cavity 9
Small cavity（Because the upper lid of cavity 9 is very thick, hatch door 4 is covered in the upper surface of cavity 9, and sample target 3 can be attached in cavity
Below wall, when being moved to 4 position of hatch door, surrounded between the hatch door 4 and sample target 3（Formed）Space）, referred to as cabin
Room 10.When entering target, sample target 3 is toward moving inside cavity 9, and cabin 10 forms one with cavity 9.Hatch door 4 has individual hatch door shape below
State switch 8, can perceive the opening and closing of hatch door 4.Second vacuum solenoid 6 connects cabin 10 and air, opens second
Air can be put into cabin 10 by vacuum solenoid 6；3rd vacuum solenoid 7 connects cabin 10 and mechanical pump 1, opens the 3rd
The mechanical pump 1 of vacuum solenoid 7 can be evacuated to cabin 10.
When going out target, sample target 3 is moved to the position of hatch door 4, now closes the first vacuum solenoid 5, opens the second vacuum electric
Magnet valve 6, closes the second vacuum solenoid 6 after air is put into cabin 10, makes cabin 10 identical with external ambient air pressure, now
Just hatch door 4 can be opened and change sample target 3.
When entering target, the first vacuum solenoid 5 and the second vacuum solenoid 6 are closed, opening the 3rd vacuum solenoid 7 makes machinery
Pump 1 is evacuated to cabin 10.When being extracted into 10-2During the mbar orders of magnitude, close the 3rd vacuum solenoid 7 and stop taking out cabin 10
Gas；Open the first vacuum solenoid 5 and control sample target 3 toward the internal motion of ion gun cavity 9, the cabin 10 of rough vacuum and chamber
Body 9 forms one.Before one is formed, the vacuum of cabin 10 has reached 10-2The mbar orders of magnitude, and the volume of cabin 10 is very
It is small, therefore very little is influenceed on the internal vacuum of cavity 9, and the mode pumping speed of the concatenation molecular pump 2 of mechanical pump 1 is very big, soon can be with
The internal vacuum of cavity 9 is recovered.
Learnt by the analysis that target flow is passed in and out to ion gun cavity 9：1st, hatch door 4 just may be used after must being formed in cabin 10
To open, and during the opening of hatch door 4, three vacuum solenoids 5,6,7 must Close All；2nd, three vacuum solenoids 5,6,7 are not
There can be any two to open simultaneously, if must be by three Close Alls of vacuum solenoid 5,6,7 when occurring this situation；3rd, full
1 above foot, under 2 two requirement conditions, three vacuum solenoids 5,6,7 be able to must be controlled individually.
At present, the control of above three vacuum solenoid 5,6,7, is to each vacuum electromagnetic by PC control slave computer
Valve is individually controlled, and slave computer is not also isolated with the drive circuit of vacuum solenoid.Its exist deficiency be：1st, host computer and
Software used in slave computer all occurs leak, deadlock, runs situations such as flying, once vacuum solenoid easily occurs for software anomaly
Misoperation situation；2nd, do not realized and be electrically isolated with the drive circuit of vacuum solenoid due to slave computer, electromagnetism certainly will be produced and done
Disturb and cause vacuum solenoid misoperation.Above-mentioned deficiency can all cause vacuum leak destruction work environment, impact molecule
Pump and mechanical pump, cause molecular pump, mechanical pump hardware damage, instrument paralysis.
The content of the invention
Present invention aims at provide a kind of ion gun vacuum suitable for time of-flight mass spectrometer to interconnect self-locking system.
To achieve the above object, the present invention takes following technical proposals：
Ion gun vacuum of the present invention suitable for time of-flight mass spectrometer interconnects self-locking system, including microprocessor, cabin
Door state is switched, and is controlled by the first vacuum electromagnetic valve controling circuit, the second vacuum electromagnetic valve controling circuit, the 3rd vacuum solenoid
The control circuit of circuit composition；The high potential contact of the hatch door status switch is connected with dc source VCC, hatch door status switch
Low potential contact be grounded by resistance R1；
The first vacuum electromagnetic valve controling circuit includes triode Q1, power field effect pipe Q4, photoelectrical coupler U1, the
One vacuum solenoid；The emitter stage of the triode Q1 is connected with dc source VCC, triode Q1 colelctor electrode and the photoelectricity
Coupler U1 light emitting diode negative pole connection, the positive pole of triode Q1 base stage by resistance R3 respectively with diode D1, D2
Connection, the negative pole of the diode D1 is connected with the output control signal CLI3 of the microprocessor, and the diode D2's is negative
Pole and the output control signal CLI2 connections of microprocessor, light emitting diode positive pole and the hatch door of the photoelectrical coupler U1
The low potential contact portion of status switch, photoelectrical coupler U1 light emitting diode negative pole is defeated by resistance R5 and microprocessor
Go out control signal CLI1 connections；The driving coil of photoelectrical coupler U1 phototriode emitter stage and the first vacuum solenoid is low
Potential end is connected, and photoelectrical coupler U1 phototriode colelctor electrode passes through resistance R11 and power field effect pipe Q4 grid
Pole is connected, and power field effect pipe Q4 grid is connected by resistance R8 with the volt power supply of direct current+24, power field effect pipe Q4 source electrode
It is connected with the volt of direct current+24 power supply, power field effect pipe Q4 drain electrode and the driving coil of first vacuum solenoid are high
Potential end is connected；Ground terminal+the 24GND of the driving coil cold end of first vacuum solenoid and+24 volt power supply connects
Connect；
The second vacuum electromagnetic valve controling circuit includes triode Q2, power field effect pipe Q5, photoelectrical coupler U2, the
Two vacuum solenoids；The emitter stage of the triode Q2 is connected with dc source VCC, triode Q2 colelctor electrode and the photoelectricity
Coupler U2 light emitting diode negative pole connection, the positive pole of triode Q2 base stage by resistance R4 respectively with diode D3, D4
Connection, the negative pole of the diode D3 is connected with the output control signal CLI3 of the microprocessor, and the diode D4's is negative
Pole and the output control signal CLI1 connections of microprocessor, light emitting diode positive pole and the hatch door of the photoelectrical coupler U2
The low potential contact portion of status switch, photoelectrical coupler U2 light emitting diode negative pole is defeated by resistance R6 and microprocessor
Go out control signal CLI2 connections；The driving coil of photoelectrical coupler U2 phototriode emitter stage and the second vacuum solenoid is low
Potential end is connected, and photoelectrical coupler U2 phototriode colelctor electrode passes through resistance R12 and power field effect pipe Q5 grid
Pole is connected, and power field effect pipe Q5 grid is connected by resistance R9 with the volt power supply of direct current+24, power field effect pipe Q5 source electrode
It is connected with the volt of direct current+24 power supply, power field effect pipe Q5 drain electrode and the driving coil of second vacuum solenoid are high
Potential end is connected；Ground terminal+the 24GND of the driving coil cold end of second vacuum solenoid and+24 volt power supply connects
Connect；
The 3rd vacuum electromagnetic valve controling circuit includes triode Q3, power field effect pipe Q6, photoelectrical coupler U3, the
Three vacuum solenoids；The emitter stage of the triode Q3 is connected with dc source VCC, triode Q3 colelctor electrode and the photoelectricity
Coupler U3 light emitting diode negative pole connection, the positive pole of triode Q3 base stage by resistance R2 respectively with diode D5, D6
Connection, the negative pole of the diode D5 is connected with the output control signal CLI2 of the microprocessor, and the diode D6's is negative
Pole and the output control signal CLI1 connections of microprocessor, light emitting diode positive pole and the hatch door of the photoelectrical coupler U3
The low potential contact portion of status switch, photoelectrical coupler U3 light emitting diode negative pole is defeated by resistance R7 and microprocessor
Go out control signal CLI3 connections；The driving coil of photoelectrical coupler U3 phototriode emitter stage and the 3rd vacuum solenoid is low
Potential end is connected, and photoelectrical coupler U3 phototriode colelctor electrode passes through resistance R13 and power field effect pipe Q6 grid
Pole is connected, and power field effect pipe Q6 grid is connected by resistance R10 with the volt power supply of direct current+24, power field effect pipe Q6 source
Pole is connected with the volt of direct current+24 power supply, power field effect pipe Q6 drain electrode and the driving coil of the 3rd vacuum solenoid
Hot end is connected；The driving coil cold end of 3rd vacuum solenoid and the ground terminal+24GND of+24 volt power supply
Connection.
The invention has the advantages that using cleverly circuit design, solving the work shape that external noise disturbs vacuum solenoid
State problem, has prevented maloperation of the software to vacuum solenoid.Ensure that all vacuum solenoids keep closing when hatch door is not closed
Close, three vacuum solenoids there cannot be two valves to be opened simultaneously, three vacuum solenoids are closed at protecting if having
Vacuum.Either external disturbance, software misoperation or artificial maloperation are all without the vacuum leak thing for causing ion gun cavity
Therefore.Vacuum safety when drastically increasing MALDI-TOF-MS instrument ion gun turnover target.
Brief description of the drawings
Fig. 1 is the ion gun vacuum system structural representation of existing time of-flight mass spectrometer.
Fig. 2 is the circuit principle structure block diagram of the present invention.
Fig. 3 is the circuit theory diagrams of the present invention.
Embodiment
As shown in Figure 2,3, the ion gun vacuum of the present invention suitable for time of-flight mass spectrometer interconnects self-locking system, including
Microprocessor, hatch door status switch 8, by the first vacuum electromagnetic valve controling circuit, the second vacuum electromagnetic valve controling circuit, the 3rd true
The control circuit of empty solenoid valve control circuit composition；The high potential contact of the hatch door status switch 8 connects with dc source VCC
Connect, the low potential contact of hatch door status switch 8 is grounded by resistance R1；
The first vacuum electromagnetic valve controling circuit includes triode Q1, power field effect pipe Q4, photoelectrical coupler U1, the
One vacuum solenoid；The emitter stage of the triode Q1 is connected with dc source VCC, triode Q1 colelctor electrode and the photoelectricity
Coupler U1 light emitting diode negative pole connection, the positive pole of triode Q1 base stage by resistance R3 respectively with diode D1, D2
Connection, the negative pole of the diode D1 is connected with the output control signal CLI3 of the microprocessor, and the diode D2's is negative
Pole and the output control signal CLI2 connections of microprocessor, light emitting diode positive pole and the hatch door of the photoelectrical coupler U1
The low potential contact portion of status switch 8, photoelectrical coupler U1 light emitting diode negative pole passes through resistance R5 and microprocessor
Output control signal CLI1 connections；The drives line of photoelectrical coupler U1 phototriode emitter stage and the first vacuum solenoid 5
Cold end connection is enclosed, photoelectrical coupler U1 phototriode colelctor electrode passes through resistance R11 and the power field effect pipe Q4
Grid connection, power field effect pipe Q4 grid is connected by resistance R8 with the volt power supply of direct current+24, power field effect pipe Q4's
Source electrode is connected with the volt of direct current+24 power supply, power field effect pipe Q4 drain electrode and the drives line of first vacuum solenoid 5
Enclose hot end connection；The driving coil cold end of first vacuum solenoid 5 is connected with the ground terminal+24GND of+24 volt power supplys；
The second vacuum electromagnetic valve controling circuit includes triode Q2, power field effect pipe Q5, photoelectrical coupler U2, the
Two vacuum solenoids；The emitter stage of the triode Q2 is connected with dc source VCC, triode Q2 colelctor electrode and the photoelectricity
Coupler U2 light emitting diode negative pole connection, the positive pole of triode Q2 base stage by resistance R4 respectively with diode D3, D4
Connection, the negative pole of the diode D3 is connected with the output control signal CLI3 of the microprocessor, and the diode D4's is negative
Pole and the output control signal CLI1 connections of microprocessor, light emitting diode positive pole and the hatch door of the photoelectrical coupler U2
The low potential contact portion of status switch 8, photoelectrical coupler U2 light emitting diode negative pole passes through resistance R6 and microprocessor
Output control signal CLI2 connections；The drives line of photoelectrical coupler U2 phototriode emitter stage and the second vacuum solenoid 6
Cold end connection is enclosed, photoelectrical coupler U2 phototriode colelctor electrode passes through resistance R12 and the power field effect pipe Q5
Grid connection, power field effect pipe Q5 grid is connected by resistance R9 with the volt power supply of direct current+24, power field effect pipe Q5's
Source electrode is connected with the volt of direct current+24 power supply, power field effect pipe Q5 drain electrode and the drives line of second vacuum solenoid 6
Enclose hot end connection；The driving coil cold end of second vacuum solenoid 6 is connected with the ground terminal+24GND of+24 volt power supplys；
The 3rd vacuum electromagnetic valve controling circuit includes triode Q3, power field effect pipe Q6, photoelectrical coupler U3, the
Three vacuum solenoids；The emitter stage of the triode Q3 is connected with dc source VCC, triode Q3 colelctor electrode and the photoelectricity
Coupler U3 light emitting diode negative pole connection, the positive pole of triode Q3 base stage by resistance R2 respectively with diode D5, D6
Connection, the negative pole of the diode D5 is connected with the output control signal CLI2 of the microprocessor, and the diode D6's is negative
Pole and the output control signal CLI1 connections of microprocessor, light emitting diode positive pole and the hatch door of the photoelectrical coupler U3
The low potential contact portion of status switch 8, photoelectrical coupler U3 light emitting diode negative pole passes through resistance R7 and microprocessor
Output control signal CLI3 connections；Photoelectrical coupler U3 phototriode emitter stage and the drives line of the 3rd vacuum solenoid 7
Cold end connection is enclosed, photoelectrical coupler U3 phototriode colelctor electrode passes through resistance R13 and the power field effect pipe Q6
Grid connection, power field effect pipe Q6 grid is connected by resistance R10 with the volt power supply of direct current+24, power field effect pipe Q6
Source electrode be connected with the volt of direct current+24 power supply, power field effect pipe Q6 drain electrode and the driving of the 3rd vacuum solenoid 7
Coil hot end is connected；The driving coil cold end of 3rd vacuum solenoid 7 and the ground terminal+24GND of+24 volt power supplys
Connection.
Operation principle of the present invention is summarized as follows：
When hatch door 4 is opened, hatch door status switch 8 is disconnected, and hatch door status signal Cabin is connected to the ground through resistance R1, defeated
Go out low level, three photoelectrical coupler U1（Model：TLP521）、U2（Model：TLP521）、U3（Model：TLP521）It is luminous
Diode cathode is grounded, and is low level.Now no matter which kind of output control signal CLI1, CLI2, CLI3 of microprocessor be
Level, three photoelectrical couplers U1, U2, U3 light emitting diode is turned off being not turned on, therefore, three photoelectrical coupler U1, U2,
It is also switched off being not turned between U3 phototriode colelctor electrode and emitter stage.Then direct current+24V power supplys are through resistance R8, R11, photoelectricity
The branch road that coupler U1 phototriode colelctor electrode, emitter stage are constituted is not turned on；Direct current+24V power supplys are through resistance R9, R12, light
Electric coupler U2 colelctor electrodes（4 pin C）, emitter stage（3 pin E）To+24VGND, this road is not turned on；+ 24V through resistance R10, R13,
The branch road that photoelectrical coupler U3 phototriode colelctor electrode, emitter stage are constituted is not turned on yet.Then power field effect pipe Q4（Type
Number：IRF9530NS）Source S, do not have pressure difference between grid G, therefore Q4 source S, drain D can not be turned on, i.e., direct current+
24V power supplys are not powered to the driving coil of the first vacuum solenoid 5, and the first vacuum solenoid 5 can not be opened；Power field effect pipe
Q5（Model：IRF9530NS）Source S, between grid G also without pressure difference, therefore power field effect pipe Q5 source S, drain D
It can not turn on, i.e., direct current+24V power supplys are not powered to the driving coil of the second vacuum solenoid 6, and the second vacuum solenoid 5 can not
Open；Power field effect pipe Q6（Model：IRF9530NS）Source S, between grid G also without pressure difference, therefore power field effect
Pipe Q6 source S, drain D can not be turned on, i.e., direct current+24V power supplys are not powered to the driving coil of the 3rd vacuum solenoid 7, the
Three vacuum solenoids 7 can not be opened.
When hatch door 4 is closed, hatch door status switch 8 is closed, and hatch door status signal Cabin is connected with dc source VCC, output
High level, three photoelectrical couplers U1, U2, U3 light emitting diode positive pole is all connected to dc source VCC.Now：
（1）When microprocessor output control signal CLI2, CLI3 be high level when, diode D1, D2 reversely by,
Triode Q1（Model：S8550）It is not turned on.If now microprocessor output control signal CLI1 low levels, photoelectrical coupler
U1 light emitting diode positive pole is turned on negative pole；Photoelectrical coupler U1 phototriode colelctor electrode is turned on emitter stage, then directly
The branch road that stream+24V power supplys are constituted through resistance R8, R11, photoelectrical coupler U1 phototriode colelctor electrode, emitter stage is turned on, then
10V or so pressure differences, therefore power field effect pipe Q4 source S, drain electrode are had between power field effect pipe Q4 source S, grid G
D just can be turned on, i.e. the driving coil of direct current+24V power supplys to the first vacuum solenoid 5 is powered, and the first vacuum solenoid 5 is opened.
I.e. when microprocessor output control signal CLI1 is that low level, microprocessor output control signal CLI2, CLI3 are high level,
First vacuum solenoid 5 is opened.Similarly, when microprocessor output control signal CLI2 is that low level, CLI1, CLI3 are high electricity
Usually, the second vacuum solenoid 6 is opened；When microprocessor output control signal CLI3 is that low level, CLI1, CLI2 are high electricity
Usually, the 3rd vacuum solenoid 7 is opened.
（2）When microprocessor output control signal CLI2, CLI3, any one is low level, or two are low level
When, corresponding at least one forward conduction of diode D1, D2, triode Q1 conductings, photoelectrical coupler U 1 light emitting diode
Negative pole is just high level, identical with photoelectrical coupler U1 light emitting diode anodic potentials, and now no matter microprocessor output is controlled
Which kind of level signal CLI1 processed is, photoelectrical coupler U1 light emitting diode positive terminal is not turned on negative pole, therefore, first
Vacuum solenoid 5 is not turned on.That is, when microprocessor output control signal CLI2, CLI3 is not high level, first
Vacuum solenoid 5 can not be opened.Similarly, when microprocessor output control signal CLI1, CLI3 is not high level, second
Vacuum solenoid 6 can not be opened；When microprocessor output control signal CLI1, CLI2 is not high level, the 3rd vacuum
Magnetic valve 7 can not be opened.
In Fig. 3, resistance R1, R2, R3, R4, R5, R6, R7 play metering function；Electric capacity C1, C2, C3, C4, C5, C6 are in circuit
In strobe；Diode D7, D8, D9 play afterflow, to protect the element beyond correspondence vacuum solenoid not damaged
It is bad.
From figure 3, it can be seen that microprocessor output control signal CLI1, CLI2, CLI3 and rear class give correspondence vacuum electromagnetic
Direct current+24V the power circuits that valve is powered are electrically isolated completely to photoelectrical coupler U1, U2, U3, have taken precautions against prime control signal not
The risk of vacuum solenoid misoperation caused by stable.
Claims (1)
1. a kind of ion gun vacuum suitable for time of-flight mass spectrometer interconnects self-locking system, including microprocessor, hatch door state is opened
Close（8）, by the first vacuum electromagnetic valve controling circuit, the second vacuum electromagnetic valve controling circuit, the 3rd vacuum electromagnetic valve controling circuit
The control circuit of composition；The hatch door status switch（8）High potential contact be connected with dc source VCC, hatch door status switch
（8）Low potential contact be grounded by resistance R1；It is characterized in that：
The first vacuum electromagnetic valve controling circuit includes triode Q1, power field effect pipe Q4, photoelectrical coupler U1, first true
Empty magnetic valve；The emitter stage of the triode Q1 is connected with dc source VCC, triode Q1 colelctor electrode and the photoelectric coupling
Device U1 light emitting diode negative pole connection, the positive pole of triode Q1 base stage by resistance R3 respectively with diode D1, D2 is connected,
The negative pole of the diode D1 is connected with the output control signal CLI3 of the microprocessor, the negative pole of the diode D2 with it is micro-
The output control signal CLI2 connections of processor, the light emitting diode positive pole of the photoelectrical coupler U1 is opened with the hatch door state
Close（8）Low potential contact portion, the output that photoelectrical coupler U1 light emitting diode negative pole passes through resistance R5 and microprocessor
Control signal CLI1 connections；Photoelectrical coupler U1 phototriode emitter stage and the first vacuum solenoid（5）Driving coil
Cold end is connected, and photoelectrical coupler U1 phototriode colelctor electrode passes through the resistance R11's and power field effect pipe Q4
Grid is connected, and power field effect pipe Q4 grid is connected by resistance R8 with the volt power supply of direct current+24, power field effect pipe Q4 source
Pole is connected with the volt of direct current+24 power supply, power field effect pipe Q4 drain electrode and first vacuum solenoid（5）Drives line
Enclose hot end connection, the first vacuum solenoid（5）Driving coil cold end and+24 volt power supply ground terminal+24GND
Connection；
The second vacuum electromagnetic valve controling circuit includes triode Q2, power field effect pipe Q5, photoelectrical coupler U2, second true
Empty magnetic valve；The emitter stage of the triode Q2 is connected with dc source VCC, triode Q2 colelctor electrode and the photoelectric coupling
Device U2 light emitting diode negative pole connection, the positive pole of triode Q2 base stage by resistance R4 respectively with diode D3, D4 is connected,
The negative pole of the diode D3 is connected with the output control signal CLI3 of the microprocessor, the negative pole of the diode D4 with it is micro-
The output control signal CLI1 connections of processor, the light emitting diode positive pole of the photoelectrical coupler U2 is opened with the hatch door state
Close（8）Low potential contact portion, the output that photoelectrical coupler U2 light emitting diode negative pole passes through resistance R6 and microprocessor
Control signal CLI2 connections；Photoelectrical coupler U2 phototriode emitter stage and the second vacuum solenoid（6）Driving coil
Cold end is connected, and photoelectrical coupler U2 phototriode colelctor electrode passes through the resistance R12's and power field effect pipe Q5
Grid is connected, and power field effect pipe Q5 grid is connected by resistance R9 with the volt power supply of direct current+24, power field effect pipe Q5 source
Pole is connected with the volt of direct current+24 power supply, power field effect pipe Q5 drain electrode and second vacuum solenoid（6）Drives line
Enclose hot end connection；Second vacuum solenoid（6）Driving coil cold end and+24 volt power supply ground terminal+
24GND connections；
The 3rd vacuum electromagnetic valve controling circuit includes triode Q3, power field effect pipe Q6, photoelectrical coupler U3, the 3rd true
Empty magnetic valve；The emitter stage of the triode Q3 is connected with dc source VCC, triode Q3 colelctor electrode and the photoelectric coupling
Device U3 light emitting diode negative pole connection, the positive pole of triode Q3 base stage by resistance R2 respectively with diode D5, D6 is connected,
The negative pole of the diode D5 is connected with the output control signal CLI2 of the microprocessor, the negative pole of the diode D6 with it is micro-
The output control signal CLI1 connections of processor, the light emitting diode positive pole of the photoelectrical coupler U3 is opened with the hatch door state
Close（8）Low potential contact portion, the output that photoelectrical coupler U3 light emitting diode negative pole passes through resistance R7 and microprocessor
Control signal CLI3 connections；Photoelectrical coupler U3 phototriode emitter stage and the 3rd vacuum solenoid（7）Driving coil
Cold end is connected, and photoelectrical coupler U3 phototriode colelctor electrode passes through the resistance R13's and power field effect pipe Q6
Grid is connected, and power field effect pipe Q6 grid is connected by resistance R10 with the volt power supply of direct current+24, power field effect pipe Q6's
Source electrode is connected with the volt of direct current+24 power supply, power field effect pipe Q6 drain electrode and the 3rd vacuum solenoid（7）Driving
Coil hot end is connected；3rd vacuum solenoid（7）Driving coil cold end and+24 volt power supply ground terminal
+ 24GND connections.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610526341.1A CN105977127B (en) | 2016-07-06 | 2016-07-06 | Ion gun vacuum suitable for time of-flight mass spectrometer interconnects self-locking system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610526341.1A CN105977127B (en) | 2016-07-06 | 2016-07-06 | Ion gun vacuum suitable for time of-flight mass spectrometer interconnects self-locking system |
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| CN106298431B (en) * | 2016-09-21 | 2018-05-04 | 北京雪迪龙科技股份有限公司 | A kind of power-off protection apparatus and method of on-line mass spectroscopy detection |
| EP3627534B1 (en) * | 2017-05-17 | 2021-01-20 | Shimadzu Corporation | Ion detection device and mass spectrometer |
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| CN203963189U (en) * | 2014-07-03 | 2014-11-26 | 河南伯晋电子科技有限公司 | Be applied to the self locking type control circuit that valve is controlled |
| CN105304455A (en) * | 2015-09-25 | 2016-02-03 | 中国工程物理研究院核物理与化学研究所 | Vacuum arc ion source time-of-flight mass spectrometer |
| CN205810758U (en) * | 2016-07-06 | 2016-12-14 | 安图实验仪器(郑州)有限公司 | Be suitable to the ion source vacuum interconnection self-locking system of time of-flight mass spectrometer |
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| JP4407486B2 (en) * | 2004-11-12 | 2010-02-03 | 株式会社島津製作所 | Time-of-flight mass spectrometer |
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|---|---|---|---|---|
| CN203963189U (en) * | 2014-07-03 | 2014-11-26 | 河南伯晋电子科技有限公司 | Be applied to the self locking type control circuit that valve is controlled |
| CN105304455A (en) * | 2015-09-25 | 2016-02-03 | 中国工程物理研究院核物理与化学研究所 | Vacuum arc ion source time-of-flight mass spectrometer |
| CN205810758U (en) * | 2016-07-06 | 2016-12-14 | 安图实验仪器(郑州)有限公司 | Be suitable to the ion source vacuum interconnection self-locking system of time of-flight mass spectrometer |
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