CN106298431B - A kind of power-off protection apparatus and method of on-line mass spectroscopy detection - Google Patents
A kind of power-off protection apparatus and method of on-line mass spectroscopy detection Download PDFInfo
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- CN106298431B CN106298431B CN201610836457.5A CN201610836457A CN106298431B CN 106298431 B CN106298431 B CN 106298431B CN 201610836457 A CN201610836457 A CN 201610836457A CN 106298431 B CN106298431 B CN 106298431B
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- power
- solenoid valve
- plc
- programmable logic
- power supply
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
Abstract
The present invention relates to the power-off protection apparatus and method of a kind of detection of on-line mass spectroscopy.The power-off protection apparatus includes solenoid valve for sampling, outlet solenoid valve, protective gas filling solenoid valve, programmable logic controller (PLC) and stand-by power supply; the stand-by power supply is electrically connected with the programmable logic controller (PLC), and the stand-by power supply is used to provide electric energy to the programmable logic controller (PLC)；The programmable logic controller (PLC) is used to control the solenoid valve for sampling, outlet solenoid valve, protective gas filling solenoid valve with the solenoid valve for sampling, outlet solenoid valve, protective gas filling solenoid valve electrical connection, the programmable logic controller (PLC) respectively.The power-off protection apparatus and method of the on-line mass spectroscopy detection of the present invention, the starting protection shutdown process, and be filled with protective gas to mass spectrograph inside immediately after accident power-off is found, the degree of automation is high, can effectively prevent infringement of the power-off to instrument.
Description
Technical field
Present invention relates generally to Mass Spectrometer Method field, and in particular to a kind of power-off protection apparatus of on-line mass spectroscopy detection and side
Method.
Background technology
Mass spectrograph is also known as mass spectrograph, separates and detect the instrument of different isotopes, i.e., according to charged particle in electromagnetic field
The principle that can be deflected, is separated and is detected the one of material composition by the quality difference of material atom, molecule or molecular fragment
Quasi-instrument.The main device of instrument is put in a vacuum.Testing principle is by gasification substance, is ionized into ion beam, is accelerated through voltage
And focusing, then it is subject to the deflection of magnetic field electric field different by magnetic field electric field region, the ion of different quality, focuses on different positions
Put, so as to obtain the mass spectrum of different isotopes.
Mass spectrometric vacuum pump system is usually to be made of turbomolecular pump and fore pump, and turbomolecular pump is using at a high speed
Momentum is transmitted to gas molecule by rotating movable vane wheel, the vacuum pump for making gas produce directed flow and being evacuated.
Part mass spectrograph fore pump is the rotary pump of oil lubrication, and mist of oil generation is had in work, when power-off causes turbine point
When son pump and fore pump stalling, because the pressure differential of vacuum chamber and pumping system, mist of oil and fluid oil may flow up into
Vacuum system, causes vacuum system to pollute.
Mass spectrometer vacuum cavity and the cleannes of turbomolecular pump job requirement are high, if keeping vacuum for a long time after power-off
The high vacuum state of chamber, then the material such as the organic matter in environment or steam can progress into vacuum chamber, when the lighter causes to vacuumize
Between it is long, severe one can influence turbomolecular pump service life in addition damage instrument core component.
Mass spectrometer detector microchannel plate, which runs into aqueous vapor, to be expanded, and then damages, no matter therefore whether work, it is micro- logical
Guidance tape all should be in the protection of vacuum or dry gas.
To prevent that vacuum system is invaded by ambient atmos or pump oil after shutdown, by technology people when mainly passing through shutdown in industry
Member is manually filled with clean nitrogen into turbomolecular pump and vacuum system.The solution that there is no for accident power-off.
In short, the major defect of the prior art is：Because instrument internal is vacuum state during generation accident power-off, beyond institute
Portion's environmental gas can gradually penetrate into vacuum chamber., it is necessary to which operating personnel constantly observe the vacuum in cavity when actively powering off
With the rotating speed of turbomolecular pump, control to adjust the output of protective gas according to indices and supervise and complete protective gas filling.
The content of the invention
It is an object of the invention to provide the power-off protection apparatus and method of a kind of detection of on-line mass spectroscopy, to solve mass spectrograph
, may be by surrounding air inside mass spectrograph if interim power-off occurs for scene when being monitored on-line applied to industry spot
Or the intrusion of the working media such as lubricating oil of instrument internal, cause asking for the core component damages such as vacuum cavity pollution or detector
Topic.Further, the present invention will also solve the problems, such as mass spectrometric power-on protection after restoring electricity.
A kind of the present invention is intended to provide power-off protection apparatus of on-line mass spectroscopy detection, it is characterised in that the power-off protection
Device includes solenoid valve for sampling, outlet solenoid valve, protective gas filling solenoid valve, programmable logic controller (PLC) and stand-by power supply,
The stand-by power supply is electrically connected with the programmable logic controller (PLC), and the stand-by power supply is used for the programmable logic control
Device processed provides electric energy；The programmable logic controller (PLC) is filled with the solenoid valve for sampling, outlet solenoid valve, protective gas respectively
Solenoid valve is electrically connected, and the programmable logic controller (PLC) is used to control the solenoid valve for sampling, outlet solenoid valve, protective gas
Fill solenoid valve.
Above-mentioned device, the stand-by power supply are uninterrupted power source or external connection battery or generator or spare with inverter
Supply line.
Above-mentioned device, the power-off protection apparatus further include electrical power monitoring device, for the stand-by power supply and can
Programmed logic controller exports power-off signal.
Above-mentioned device, the power-off protection apparatus further include power down locking device, for making the electricity of Mass Spectrometer Method system
Source is off.
Above-mentioned device, the power down locking device include earth leakage protective device, power resistor and electronic switch, the electronics
Switch is used to control the power resistor to connect and then the earth leakage protective device is worked, and the earth leakage protective device is examined for mass spectrum
The distribution line protection of examining system.
Above-mentioned device, the power down locking device include relay and contactor, and the contactor is used as Mass Spectrometer Method
Power switch, by relay described in the PLC controls, the relay controls the contactor again
Work.
Above-mentioned device, the power-off protection apparatus further include working gas solenoid valve, pass through the programmable logic control
The control work of device processed.
The present invention provides a kind of power-off protection method using above device, the method includes the steps：Work as Mass Spectrometer Method
During system cut-off, start stand-by power supply, solenoid valve for sampling and outlet solenoid valve, Zhi Houkai are closed by programmable logic controller (PLC)
Protective gas filling solenoid valve is opened, after stablizing inside vacuum cavity full of protective gas, closes the protective gas filling electricity
Magnet valve.
Above-mentioned method, the method further include：The power supply of Mass Spectrometer Method system is monitored, when the power cut-off, to
Stand-by power supply sends power off signal with programmable logic controller (PLC).
Above-mentioned method, the method further include power down lock step, i.e., by the power supply of Mass Spectrometer Method system after a loss of power
All the time open-circuit condition is in, which includes：It will pass through one between the firewire and ground wire of Mass Spectrometer Method system by electronic switch
A power resistor is connected, and turn-on current is more than the leakage current of the earth leakage protective device of Mass Spectrometer Method system so that earth leakage protective device is certainly
Dynamic tripping；The step or including：Power switch by the use of contactor as Mass Spectrometer Method system, passes through programmable logic controller (PLC)
Coordinate relay control contactor so that the contactor is off all the time.
The beneficial effects of the present invention are when Mass Spectrometer Method system cut-off occurs, using automatically controlling so that inflating dress
Put and protective gas is filled into vacuum cavity, realize the protection of vacuum cavity and critical component.The present invention have also been devised at the same time
Electric locking device, ensure that the safety of instrument after incoming call.
Brief description of the drawings
Fig. 1 is the workflow structure schematic diagram of the power-off protection apparatus of on-line mass spectroscopy of the present invention detection；
Fig. 2 is the power supply wiring schematic diagram of the power-off protection apparatus of on-line mass spectroscopy of the present invention detection.
Embodiment
Below in conjunction with drawings and examples, the embodiment of the present invention is described in more details, so as to energy
The advantages of enough more fully understanding the solution of the present invention and its various aspects.However, specific embodiments described below and reality
Example is applied to be for illustrative purposes only, rather than limitation of the present invention.
A kind of as shown in Figure 1, workflow structure of the power-off protection apparatus of on-line mass spectroscopy detection of the embodiment of the present invention
Figure, mass spectrograph 10 are arranged in system cabinet 1, and the circuit being connected with mass spectrograph 10 includes sampling pipeline 11, vent line 13 and protects
Protect gas line 12.It is equipped with sampling pipeline 11 to the separated moisture trap of sample 111, the sample introduction electromagnetism cut-off to sample
Valve 112, closes on and sample inlet 113 is equipped with mass spectrograph.Sampling pump 131 and outlet solenoid valve 132 are equipped with vent line 13,
Sample outlet 133 is equipped with mass spectrograph 10 closing on.Protective gas storage device and protection are equipped with protective gas pipeline 12
Gas fills solenoid valve 121, and gas atmosphere inlet 122 is equipped with mass spectrograph 10 closing on.
Power-off protection apparatus system composition includes：Normally closed solenoid valve, uninterrupted power source, programmable logic controller (PLC) (PLC),
Power down locking device.Wherein power down locking device is not required, and is set for further power-on protection.
Wherein normally closed solenoid valve includes solenoid valve for sampling 112, outlet solenoid valve 132, protective gas filling solenoid valve 121,
It may also comprise working gas solenoid valve (not shown in figure 1).
Solenoid valve for sampling 112 is installed on the sample introduction path of Mass Spectrometer Method, for after a loss of power to the timely of detection sample
Shut-off.
Outlet solenoid valve 132 is arranged on the passing away of detection sample.Sample be able to will be detected when discharging by sampling pump 131
The sample extraction sensing chamber of survey, after installation outlet solenoid valve 132, can cut off the aspiration phases of sample passing away when power is off.
It is corresponding as shown in Fig. 2, sample the work of disengaging break-make by programmable controller to the reagent valve on its pipeline and always
Valve is controlled.
A few thing gas can be passed through when detecting sample sometimes to sensing chamber, thus working gas solenoid valve is used for cutting off work
Make the passage of gas, be arranged in the input channel of working gas.
As shown in Figure 1, protective gas filling solenoid valve 121 connects the detection of protective gas storage device and mass spectrograph 10
Room.After sensing chamber is cut off with other extraneous paths, protective gas is opened by controlling protective gas to fill solenoid valve 121
Input, makes it fill sensing chamber.Accordingly as shown in Fig. 2, the work can be controlled nitrogen gas control valve by programmable controller.
Lead in mass spectrometer vacuum cavity on all pipelines of outside and normally closed solenoid valve is installed, for controlling all kinds of work gas
The break-make and vacuum cavity of body are to exterior conducting gas circuit.In power process, each normally closed solenoid valve according to shutdown process successively
Close, after completing to protect shutdown process, vacuum cavity is all isolated with contacting in terms of extraneous whole gas circuits by normally closed solenoid valve.
Normally closed solenoid valve is in system cut-off using the reason for normally closed solenoid valve, uninterrupted power source can be with the case of also stopping power supply
Off state is always maintained at, maintains vacuum cavity and extraneous isolation.
When being powered off outside generation, uninterrupted power source is used to provide a system to electric energy to complete to fill protection gas and close electromagnetism
The various actions such as valve.
Certainly all electric power in protection shutdown process implementation procedure are except from uninterrupted power source or with inverter
The stand-by power supply such as external connection battery, generator or stand-by power supply circuit.
Programmable logic controller (PLC) (PLC) be used for be automatically performed protection shutdown process in operations (such as fill protection gas,
Close solenoid valve etc.).Programmable controller can be used in combination with other display devices such as display or industrial personal computer, to export signal
Parameter, as shown in Figure 2.
As shown in Figure 2, specifically, the work relationship between each module is as follows:Programmable logic controller (PLC) is powered off protecting
Command centre, programmable logic controller (PLC) receive the information from power supply monitoring module, to judge whether to be powered off.When
So, if being not provided with automated watch-keeping facility, programmable logic controller (PLC) can be manually booted.
Programmable logic controller (PLC) controls Power Supply Assembly (referring to breaker or earth leakage protective device) and each solenoid valve respectively, with
Realize the action in protection shutdown process.
Programmable logic controller (PLC) receives the control of incoming call reset switch, in the case where power down locking device is activated,
Receiving user instruction makes mass spectrograph be powered.
Stand-by power supply is mass spectrograph, power-off protection apparatus and other electrical appliances provide uninterruptible power protection.
The present invention power-off protection apparatus protection shutdown process be：Working gas (if any) is closed, closes sample introduction
Solenoid valve and outlet solenoid valve, wait some time, are then turned on protective gas filling solenoid valve, wait inside vacuum cavity full of guarantor
After protecting gas and stablizing, protective gas filling solenoid valve, last mass spectrograph power-off are closed.
In view of the power-on protection of system after sending a telegram here again, system carries power down locking device, as the device is activated, then comes
The artificial Mass Spectrometer Method system that unlocks is needed just to work on power when electric.
The realization of power down locking device can be in the following ways：As shown in Fig. 2, utilize prime earth leakage protective in distribution line
The residual current protection function of device, i.e., after the action of all protection shutdown process is completed, with electronic switch such as relay by instrument
Connected between the firewire and ground wire of system by a power resistor, turn-on current is more than the leakage current of earth leakage protective device so that
Earth leakage protective device automatic trip, removes non-operator hand-reset earth leakage protective device after tripping, otherwise instrument can not power.
The realization of power down locking device can also use：By the use of contactor as mass spectrometric power switch, with PLC coordinate after
Electrical equipment control contactor, contactor is all the time in (not power supply state) is disconnected after PLC electrifying startups, only when operating personnel press
After the button to unlock, contactor can just be powered to mass spectrograph, realize the function of power down locking.During power-off, PLC is according to operation
Flow closes solenoid valve successively, finally disconnects general supply.After restoring electricity, all solenoid valves and contactor are all failure to actuate, until
Field Force presses reset switch, and after unlocking, all solenoid valves are just opened successively.
As shown in Fig. 2, stand-by power supply is electrically connected with the programmable logic controller (PLC) during wiring, the programmable logic
Controller fills the relay of solenoid valve, power down locking device with the solenoid valve for sampling, outlet solenoid valve, protective gas respectively
Device, contactor or electronic switch and earth leakage protective device and power supply monitoring module, reset switch, stand-by power supply etc. are electrically connected.
Power supply monitoring module is also electrically connected with stand-by power supply.When needing to provide man-machine interface, programmable logic controller (PLC) can also be with
Display or industrial personal computer electrical connection, while stand-by power supply is also electrically connected with display or industrial personal computer.Stand-by power supply can pass through
Power outlet controls the electric appliance component of each connection.
Completing the mass spectrograph state after protection shutdown process is：All solenoid valves are closed, and inside is full of 0.12~0.15MPa
Protective gas, power down locking device is in the lock state.
The pressure of internal protection gas should be slightly above atmospheric pressure, to prevent environmental gas from invading instrument internal.Its realization side
Method be require control in system installation and debugging protect gas output pressure be 1.2~1.5 atmospheric pressure.It can be nitrogen to protect gas
The gas of the moisture-frees such as gas, synthesis of air, helium, organic matter and corrosive elements.
The power-off signal of the system can be sent by electrical power monitoring device, when Mass Spectrometer Method power cut-off, power supply monitoring dress
Put to stand-by power supply and programmable logic controller (PLC) and send power off signal.
The present invention utilizes protective gas automatic filling system protection mass spectrograph, the starting protection immediately after accident power-off is found
Shutdown process, i.e., be filled with protective gas automatically according to operating process to mass spectrograph inside.Further, protective device also carries
Electric lock function, occurs power-off when restoring electricity again, and Mass Spectrometer Method instrument will not automatic start, it is necessary to after manually unlocking
It can start shooting again, it is therefore prevented that instrument damages caused by operating condition does not possess start or repeated switching.
In short, the degree of automation of the present invention is high, can more efficiently prevent from powering off the infringement to instrument.
Finally it should be noted that：Obviously, above-described embodiment is only intended to clearly illustrate example of the present invention, and simultaneously
The non-restriction to embodiment.For those of ordinary skill in the field, can also do on the basis of the above description
Go out other various forms of changes or variation.There is no necessity and possibility to exhaust all the enbodiments.And thus drawn
Among the obvious changes or variations that Shen goes out is still in protection scope of the present invention.
Claims (9)
1. a kind of power-off protection apparatus of on-line mass spectroscopy detection, it is characterised in that the power-off protection apparatus includes sample introduction electromagnetism
Valve, outlet solenoid valve, protective gas filling solenoid valve, programmable logic controller (PLC), electrical power monitoring device and stand-by power supply；
The electrical power monitoring device, for exporting power-off signal to the stand-by power supply and programmable logic controller (PLC)；
The stand-by power supply is electrically connected with the programmable logic controller (PLC), and the stand-by power supply is used to patrol to described may be programmed
Collect controller and electric energy is provided；
The programmable logic controller (PLC) is electric with the solenoid valve for sampling, outlet solenoid valve, protective gas filling solenoid valve respectively
Gas connects, and the programmable logic controller (PLC) is used to control the solenoid valve for sampling, outlet solenoid valve, protective gas filling electromagnetism
Valve.
2. device as claimed in claim 1, it is characterised in that the stand-by power supply is outer for uninterrupted power source or with inverter
Connect battery or generator or stand-by power supply circuit.
3. device as claimed in claim 1, it is characterised in that the power-off protection apparatus further includes power down locking device, uses
It is off in making the power supply of Mass Spectrometer Method system.
4. device as claimed in claim 3, it is characterised in that the power down locking device includes earth leakage protective device, power electricity
Resistance and electronic switch, the electronic switch are used to control the power resistor to connect and then the earth leakage protective device is worked, institute
State the distribution line protection that earth leakage protective device is used for Mass Spectrometer Method system.
5. device as claimed in claim 3, it is characterised in that the power down locking device includes relay and contactor, institute
State contactor be used as Mass Spectrometer Method power switch, by relay described in the PLC controls, it is described after
Electric appliance controls the contactor to work again.
6. device as claimed in claim 1, it is characterised in that the power-off protection apparatus further includes working gas solenoid valve,
Worked by the control of the programmable logic controller (PLC).
A kind of 7. power-off protection method using any one of claim 1 to 6 described device, it is characterised in that the method bag
Include step：
When electrical power monitoring device monitors Mass Spectrometer Method system cut-off, start stand-by power supply, pass through programmable logic controller (PLC)
Solenoid valve for sampling and outlet solenoid valve are closed, protective gas filling solenoid valve is opened afterwards, treats inside vacuum cavity full of protection
Gas and after stablizing, closes the protective gas filling solenoid valve.
8. the method for claim 7, it is characterised in that the method further includes：
The power supply of Mass Spectrometer Method system is monitored, when the power cut-off, is sent to stand-by power supply and programmable logic controller (PLC)
Power off signal.
9. the method for claim 7, it is characterised in that the method further includes power down lock step, i.e., examines mass spectrum
The power supply of examining system is in open-circuit condition all the time after a loss of power, which includes：By electronic switch by Mass Spectrometer Method system
Connected between firewire and ground wire by a power resistor, turn-on current is more than the electric leakage of the earth leakage protective device of Mass Spectrometer Method system
Stream so that earth leakage protective device automatic trip；Or the step includes：Power switch by the use of contactor as Mass Spectrometer Method system,
Relay control contactor is coordinated by programmable logic controller (PLC) so that the contactor is off all the time.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610836457.5A CN106298431B (en) | 2016-09-21 | 2016-09-21 | A kind of power-off protection apparatus and method of on-line mass spectroscopy detection |
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|---|---|---|---|
| CN201610836457.5A CN106298431B (en) | 2016-09-21 | 2016-09-21 | A kind of power-off protection apparatus and method of on-line mass spectroscopy detection |
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| CN106298431A CN106298431A (en) | 2017-01-04 |
| CN106298431B true CN106298431B (en) | 2018-05-04 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108584872A (en) * | 2018-06-19 | 2018-09-28 | 张家港氢云新能源研究院有限公司 | The safe shutdown protective device of hydrogen making by natural gas reformation system |
| CN112782262A (en) * | 2020-12-01 | 2021-05-11 | 广西电网有限责任公司电力科学研究院 | Device and method for improving vacuum efficiency of portable mass spectrometer |
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| Publication number | Publication date |
|---|---|
| CN106298431A (en) | 2017-01-04 |
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