CN208298782U - A kind of device improving vacuum cavity cleanliness - Google Patents
A kind of device improving vacuum cavity cleanliness Download PDFInfo
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- CN208298782U CN208298782U CN201821115561.6U CN201821115561U CN208298782U CN 208298782 U CN208298782 U CN 208298782U CN 201821115561 U CN201821115561 U CN 201821115561U CN 208298782 U CN208298782 U CN 208298782U
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- ion source
- source chamber
- valve
- delivery pipe
- controlling terminal
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Abstract
The utility model provides a kind of device for improving vacuum cavity cleanliness, including ion source chamber, detection chambers, dry vacuum pump, turbine pump, the first valve, delivery pipe and controlling terminal；Air inlet port is provided in delivery pipe, elemental gas is provided by the air inlet port in delivery pipe, it is then turned on turbine pump elemental gas is delivered in ion source chamber room, the elemental gas is electrolysed from so that the noise degree in ion source chamber room increases by ion source chamber.Controlling terminal is receiving in detection chambers after noise degree information, controls the first valve opening or closing according to noise degree at this time, and then control noise degree in ion source chamber room, realizes and do not shut down operation automatically.At the same time, it opens dry vacuum pump to purge ion source chamber, from the noise degree reduced in ion source chamber room, to realize the purpose of dynamic circulation purging, and then increases the indoor cleanliness of cavity, that is, reduce its noise degree.
Description
Technical field
The utility model relates to Varian (Varian) field of ion implanters more particularly to a kind of improvement vacuum cavity are clean
The device of cleanliness.
Background technique
Existing Varian ion implantation apparatus, in its ionization chamber room to the element gas ion of injection be electrolysed from
When, some pollutants can be generated, and then increase the indoor noise degree of ionization chamber, and then influence the injection of Varian ion implantation apparatus
Intensity then influences the quality of product.
Utility model content
For this reason, it may be necessary to provide a kind of device for improving vacuum cavity cleanliness, solves existing Varian ion implantation apparatus and exist
Be electrolysed in ionization chamber room from when, be easy to increase noise the problem of spending.
To achieve the above object, a kind of device for improving vacuum cavity cleanliness, including ion source chamber are inventor provided
Room, detection chambers, dry vacuum pump, turbine pump, the first valve, delivery pipe and controlling terminal；The delivery pipe is arranged in ion
Between the entrance of source chamber room and the output end of turbine pump, pipe connection setting, defeated between the outlet and detection chambers of ion source chamber
Send and be provided with air inlet port on pipe, dry vacuum pump line connection be arranged in delivery pipe, dry vacuum pump be located at air inlet port and
Between turbine pump, the first valve is arranged in delivery pipe, and controlling terminal is electrically connected with the first valve, controlling terminal and detection chambers
Electrical connection.
Further, it is provided with air intake branch in the delivery pipe, the second valve, controlling terminal are provided on air intake branch
It is electrically connected with the second valve.
Further, the input terminal of the dry vacuum pump is provided with third valve.
Further, the output end of the ion source chamber is provided with the 4th valve.
Further, filament is provided in the ion source chamber room, filament is used for the gas being input in ion source chamber room
Body be electrolysed from.
Further, it is provided with detector in the detection chambers, detector is electrically connected with controlling terminal.
It is different from the prior art, above-mentioned technical proposal provides elemental gas by the air inlet port in delivery pipe, then makes
Elemental gas is delivered in ion source chamber room with turbine pump, by ion source chamber to the elemental gas be electrolysed from.?
Be electrolysed from when can improve noise degree in ion source chamber room, controlling terminal can receive noise degree information in detection chambers at this time,
If noise degree increases at this time, closes the first valve and to keep apart between turbine pump and ion source chamber, reach automatic starting
Or the effect of valve is closed, operation is not shut down automatically to realize.At the same time, open dry vacuum pump to ion source chamber into
Row purging to realize the purpose of dynamic circulation purging, and then increases in pouch chamber from the noise degree reduced in ion source chamber room
Cleanliness, that is, reduce its noise degree.
Detailed description of the invention
Fig. 1 is the schematic diagram of the device of improvement vacuum cavity cleanliness described in specific embodiment.
Description of symbols:
10, ion source chamber；101, the 4th valve；102, filament；
11, detection chambers；111, detector；
12, dry vacuum pump；121, third valve；
13, turbine pump；
14, the first valve；
15, delivery pipe；151, air inlet port；152, air intake branch；1521, the second valve；
16, controlling terminal；
Specific embodiment
Technology contents, construction feature, the objects and the effects for detailed description technical solution, below in conjunction with specific reality
It applies example and attached drawing is cooperated to be explained in detail.
Referring to Fig. 1, the present embodiment provides a kind of device for improving vacuum cavity cleanliness, including ion source chamber 10,
Detection chambers 11, dry vacuum pump 12, turbine pump 13, the first valve 14, delivery pipe 15 and controlling terminal 16；The delivery pipe is set
It sets between the entrance of ion source chamber and the output end of turbine pump, pipe connects between the outlet of ion source chamber and detection chambers
It is arranged, air inlet port 151 is provided in delivery pipe, the connection of dry vacuum pump line is arranged in delivery pipe, and dry vacuum pump is located at
Between air inlet port and turbine pump, the first valve is arranged in delivery pipe, and controlling terminal is electrically connected with the first valve, controlling terminal
It is electrically connected with detection chambers, controlling terminal is host computer, laptop, mobile phone or tablet computer etc..
Elemental gas is provided by the air inlet port in delivery pipe in the present embodiment, is said in the present embodiment with nitrogen
It is bright, then nitrogen is delivered in ion source chamber room using turbine pump, the elemental gas is electrolysed by ion source chamber
From.Electrolysis from when can improve noise degree in ion source chamber room, controlling terminal can receive noise degree in detection chambers at this time
Information closes the first valve and to keep apart between turbine pump and ion source chamber, reach automatic if noise degree increases at this time
Starting or the effect for closing valve do not shut down operation to realize automatically.At the same time, dry vacuum pump is opened to ion source chamber
Room is pumped, and dry vacuum pump, which with pumping gas can sweep, blows operation, and then is carried out to ion source chamber comprehensive clear
It is clean, improve the cleanliness in ion source chamber room.Specifically, dry vacuum pump can carry out pumping operation at atmosheric pressure, together
When pumped gas can be exhausted directly in atmosphere, oil-free or other working medias in its pump chamber.Therefore ion is being reduced
While the indoor noise of source chamber is spent, realizes the purpose of dynamic circulation purging, and then increase the indoor cleanliness of cavity, that is, reduce
Its noise degree.
Ion source chamber is that the element vapour particles for that will need to inject are ionized into ion, and then determine to inject ion
Type and beam intensity.The electronics that ion source direct-current discharge or high-frequency discharge generate is as projectile, when foreign electron
When energy is higher than the ionization potential of atom, ionize element by collision.After collision other than original electron, also occur just
Electronics and secondary electron.Cation enters the ion that mass analyzer selects needs, obtains higher-energy using accelerator, by
Quadrupole lenses enter after focusing drives in chamber, carries out ion implanting.
It is provided with air intake branch 152 in delivery pipe described in the present embodiment, the second valve 1521 is provided on air intake branch,
Controlling terminal is electrically connected with the second valve.The pipeline that can make delivery pipe by air intake branch and provide nitrogen output carries out pipe
Connection, i.e., air intake branch can be with external nitrogen storing tank, and then provides nitrogen for ion source chamber, reuses the control of the second valve
Opening and closing of air intake branch, and being controlled by controlling terminal, reach automatically control air intake branch air inlet or without
Purpose, not shut down operation automatically and providing guarantee.
The input terminal of dry vacuum pump described in the present embodiment is provided with third valve 121.The ion source chamber it is defeated
Outlet is provided with the 4th valve 101.Dry vacuum pump can be regulated and controled by third valve.That is, working as the first of turbine pump
When valve opening, third valve closure；And when the first valve closure, third valve opening, reaches automatic control and dynamic is followed
The effect that circular blow is swept.First valve, the second valve, third valve and the 4th valve can be electromagnetic valve.
It is provided with filament 102 in ion source chamber room described in the present embodiment, filament is used for being input in ion source chamber room
Gas be electrolysed from.It is powered by filament, and then the nitrogen in ion source chamber room is electrolysed from turn by filament
It is injected the electronics as the particle of bombardment in detection chambers, and then the injection process of ion.
Detector 111 is provided in detection chambers described in the present embodiment, detector is electrically connected with controlling terminal.Detector
Can be Faraday detector, faraday itself is used to detect beam energy, while it to detect other height frequency electrics miscellaneous
Signal.Specifically, monitoring the indoor electronic beam current of test chamber by faraday, and then the electronic beam current of the detection is converted into electricity
Signal is flowed, and sends the signal to controlling terminal, by the processing of controlling terminal, retransmits signal to the first valve, second
Noise degree in valve and third valve control ion source chamber room, achievees the purpose that improve cleanliness in vacuum cavity.
It should be noted that being not intended to limit although the various embodiments described above have been described herein
The scope of patent protection of the utility model.Therefore, based on the innovative idea of the utility model, embodiment described herein is carried out
Change and modification or equivalent structure or equivalent flow shift made based on the specification and figures of the utility model, directly
Or above technical scheme is used in other related technical areas indirectly, it is included in the protection model of the utility model patent
Within enclosing.
Claims (6)
1. a kind of device for improving vacuum cavity cleanliness, it is characterised in that: true including ion source chamber, detection chambers, dry type
Empty pump, turbine pump, the first valve, delivery pipe and controlling terminal；
The delivery pipe is arranged between the entrance of ion source chamber and the output end of turbine pump, the outlet and inspection of ion source chamber
Pipe connection setting between chamber is surveyed, air inlet port is provided in delivery pipe, the connection of dry vacuum pump line is arranged in delivery pipe, does
Formula vacuum pump is located between the air inlet port and turbine pump of delivery pipe, and the first valve is arranged in delivery pipe, controlling terminal and the
The electrical connection of one valve, controlling terminal are electrically connected with detection chambers.
2. a kind of device for improving vacuum cavity cleanliness according to claim 1, it is characterised in that: in the delivery pipe
It is provided with air intake branch, the second valve is provided on air intake branch, controlling terminal is electrically connected with the second valve.
3. a kind of device for improving vacuum cavity cleanliness according to claim 1, it is characterised in that: the dry vacuum
The input terminal of pump is provided with third valve.
4. a kind of device for improving vacuum cavity cleanliness according to claim 1, it is characterised in that: the ion source chamber
The output end of room is provided with the 4th valve.
5. a kind of device for improving vacuum cavity cleanliness according to claim 1, it is characterised in that: the ion source chamber
Interior is provided with filament, filament be used to be electrolysed the gas being input in ion source chamber room from.
6. a kind of device for improving vacuum cavity cleanliness according to claim 1, it is characterised in that: the detection chambers
It is inside provided with detector, detector is electrically connected with controlling terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821115561.6U CN208298782U (en) | 2018-07-13 | 2018-07-13 | A kind of device improving vacuum cavity cleanliness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821115561.6U CN208298782U (en) | 2018-07-13 | 2018-07-13 | A kind of device improving vacuum cavity cleanliness |
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| Publication Number | Publication Date |
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| CN208298782U true CN208298782U (en) | 2018-12-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821115561.6U Active CN208298782U (en) | 2018-07-13 | 2018-07-13 | A kind of device improving vacuum cavity cleanliness |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110496825A (en) * | 2019-08-22 | 2019-11-26 | 上海华力集成电路制造有限公司 | The remove device and method of vacuum chamber pollution particle |
-
2018
- 2018-07-13 CN CN201821115561.6U patent/CN208298782U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110496825A (en) * | 2019-08-22 | 2019-11-26 | 上海华力集成电路制造有限公司 | The remove device and method of vacuum chamber pollution particle |
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