CN105921445B - 具有摆动式喷头的二极管清洗装置及清洗方法 - Google Patents
具有摆动式喷头的二极管清洗装置及清洗方法 Download PDFInfo
- Publication number
- CN105921445B CN105921445B CN201610455928.8A CN201610455928A CN105921445B CN 105921445 B CN105921445 B CN 105921445B CN 201610455928 A CN201610455928 A CN 201610455928A CN 105921445 B CN105921445 B CN 105921445B
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- CN
- China
- Prior art keywords
- diode
- lifter plate
- cleaning
- rinse bath
- driving
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning In General (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610455928.8A CN105921445B (zh) | 2016-06-22 | 2016-06-22 | 具有摆动式喷头的二极管清洗装置及清洗方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610455928.8A CN105921445B (zh) | 2016-06-22 | 2016-06-22 | 具有摆动式喷头的二极管清洗装置及清洗方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105921445A CN105921445A (zh) | 2016-09-07 |
CN105921445B true CN105921445B (zh) | 2018-05-25 |
Family
ID=56831446
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610455928.8A Active CN105921445B (zh) | 2016-06-22 | 2016-06-22 | 具有摆动式喷头的二极管清洗装置及清洗方法 |
Country Status (1)
Country | Link |
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CN (1) | CN105921445B (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106393394B (zh) * | 2016-11-07 | 2019-03-22 | 九牧厨卫股份有限公司 | 一种修复陶瓷坯体高压注浆模具的方法 |
CN107116051A (zh) * | 2017-05-21 | 2017-09-01 | 厦门市优家品日用品有限公司 | 一种生物实验仪器清洗设备 |
CN108405435A (zh) * | 2018-03-30 | 2018-08-17 | 长兴宏力机械科技有限公司 | 一种机械配件加工用清洗装置 |
CN108550540B (zh) * | 2018-05-21 | 2020-11-20 | 泗县田原秸秆回收再利用有限责任公司 | 一种二极管酸洗处理系统 |
CN113327873B (zh) * | 2021-05-28 | 2022-07-15 | 华海清科股份有限公司 | 一种晶圆清洗装置及晶圆清洗方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004283777A (ja) * | 2003-03-24 | 2004-10-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN202097155U (zh) * | 2011-05-31 | 2012-01-04 | 常州佳讯光电产业发展有限公司 | 二极管表面清洗装置 |
CN102664157A (zh) * | 2012-06-04 | 2012-09-12 | 扬州扬杰电子科技股份有限公司 | 一种二极管酸处理后的震荡冲洗装置 |
CN203955599U (zh) * | 2014-04-04 | 2014-11-26 | 贵州中航聚电科技有限公司 | 一种转盘式喷淋清洗机 |
CN205701638U (zh) * | 2016-06-22 | 2016-11-23 | 贵州雅光电子科技股份有限公司 | 一种具有摆动式喷头的二极管清洗装置 |
-
2016
- 2016-06-22 CN CN201610455928.8A patent/CN105921445B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004283777A (ja) * | 2003-03-24 | 2004-10-14 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN202097155U (zh) * | 2011-05-31 | 2012-01-04 | 常州佳讯光电产业发展有限公司 | 二极管表面清洗装置 |
CN102664157A (zh) * | 2012-06-04 | 2012-09-12 | 扬州扬杰电子科技股份有限公司 | 一种二极管酸处理后的震荡冲洗装置 |
CN203955599U (zh) * | 2014-04-04 | 2014-11-26 | 贵州中航聚电科技有限公司 | 一种转盘式喷淋清洗机 |
CN205701638U (zh) * | 2016-06-22 | 2016-11-23 | 贵州雅光电子科技股份有限公司 | 一种具有摆动式喷头的二极管清洗装置 |
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Publication number | Publication date |
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CN105921445A (zh) | 2016-09-07 |
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SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Diode cleaning device with swing nozzle and cleaning method Effective date of registration: 20210610 Granted publication date: 20180525 Pledgee: Guiyang guanshanhu District Guarantee Co.,Ltd. Pledgor: GUIZHOU YAGUANG ELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: Y2021980004611 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20220808 Granted publication date: 20180525 Pledgee: Guiyang guanshanhu District Guarantee Co.,Ltd. Pledgor: GUIZHOU YAGUANG ELECTRONICS TECHNOLOGY Co.,Ltd. Registration number: Y2021980004611 |