CN105921368A - Three-cavity-layer type end cap special for vacuum suction piece mouth of spin coater tray - Google Patents
Three-cavity-layer type end cap special for vacuum suction piece mouth of spin coater tray Download PDFInfo
- Publication number
- CN105921368A CN105921368A CN201610496119.1A CN201610496119A CN105921368A CN 105921368 A CN105921368 A CN 105921368A CN 201610496119 A CN201610496119 A CN 201610496119A CN 105921368 A CN105921368 A CN 105921368A
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- CN
- China
- Prior art keywords
- cavity
- vacuum suction
- suction piece
- end cap
- piece mouth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
The invention discloses a three-cavity-layer type end cap special for a vacuum suction piece mouth of a spin coater tray. The three-cavity-layer type end cap comprises a round end face, a middle cavity body and a lower cavity body; a center round hole is formed in the center of the round end face; air pumping hole platforms are symmetrically arranged on the middle cavity body and in a circular truncated cone shape; an air pumping hole is formed in the center of the lower cavity body; and the round end face, the middle cavity body and the lower cavity body are fixedly connected in an insertion and extraction mode to form a cavity. According to the three-cavity-layer type end cap special for the vacuum suction pipe mouth of the spin coater tray, the glue blocking effect can be well achieved; the deformation of base pieces is reduced when the effective glue blocking is achieved; and therefore, performance indexes of spin coating are improved.
Description
Technical field
The invention belongs to the technical field of sol evenning machine equipment, be specifically related to one and be exclusively used in the suction of sol evenning machine tray vacuum
Three layers of cavity type end cap on sheet mouth.
Background technology
Existing photoresist glue evenning table uses the mode of vacuum suction piece to hold silicon chip, but existing silicon chip wafer-supporting platform
Cannot effectively stop that photoresist penetrates in vacuum suction piece mouth during whipping, reason is: existing skill
In art, silicon chip directly contacts with vacuum suction piece mouth, and sol evenning machine is in high-speed rotation, and photoresist is rotated
Centrifugal force and capillary synergy, be launched into thin film, be wherein thrown out of during whipping to
The glue of silicon chip edge drips, capillary due to silicon chip edge and the pressure differential of wafer-supporting platform suction piece mouth and colloid
Effect, the glue of part silicon chip edge drips and can be inhaled in vacuum suction piece mouth along the back side of silicon chip, thus blocks
Vacuum suction piece mouth, causes vacuum suction piece mouth suction not enough, thus causes the uniformity of photoresist film to be deteriorated,
Glue evenning table can be caused damage simultaneously.
In Patent No.: ZL 201310686050.5, patent of invention are entitled: sol evenning machine support holder structure
In patent, although by offering storage glue groove in the centre of silicon chip wafer-supporting platform, make photoresist quilt during whipping
The glue thrown away to silicon chip back side first flows in storage glue groove under gravity, thus stops photoresist
It is inhaled in vacuum suction piece mouth, solves suction deficiency or blocking that vacuum suction piece mouth causes because sucking photoresist
Problem.But, in practice process, owing to having one section of sky between suction mouth sheet and silicon chip load plane
Spacing, therefore, silicon chip can be inhaled outlet for lantern slide in vacuum and bear the suction of bigger effect downwards, and in hollow
Storage glue groove top but not have upwards support force support, cause the discontinuity of whole silicon chip, thus
The situation having the deformation of silicon chip concave downward occurs so that the silicon chip after processing does not meets the requirement of product.
Further, above-mentioned patent, in practice process, is not fully solved vacuum suction piece mouth because sucking photoresist
And the suction deficiency caused or the problem of blocking, reason is: be positioned at the silicon chip of the surface of vacuum suction piece mouth
The part glue at the back side drip the surface that can be in vacuum suction piece mouth, can directly drop in vacuum suction piece mouth,
Or be directly sucked in vacuum suction piece mouth by the suction of vacuum suction piece mouth, thus block vacuum suction piece mouth.
Additionally, Patent No.: ZL 201310685767.8, patent of invention are entitled: prevent glue from sucking
Sol evenning machine pallet；Patent No.: ZL 201310685554.5, patent of invention are entitled: band protection structure
Sol evenning machine pallet；In two patents, also have above-mentioned 2 problem and exist.
Summary of the invention
Goal of the invention: in order to solve the deficiency that prior art exists, the invention provides one and be exclusively used in spin coating
Three layers of cavity type end cap on machine tray vacuum suction piece mouth.
Technical scheme: a kind of three layers of cavity type end cap being exclusively used on sol evenning machine tray vacuum suction piece mouth, described
Three layers of cavity type end cap be fixedly mounted on the vacuum suction piece mouth of sol evenning machine pallet, described three layers of cavity type end
Lid includes circular end face and the middle cavity matched with described circular end face and lower chamber；
The center of described circular end face is provided with center hole；
Being symmetrically distributed with aspirating hole platform on described middle cavity, described aspirating hole platform is round table-like；
The center of described lower chamber is provided with aspirating hole；
Described circular end face, all connect by plug-in is fixing between middle cavity and lower chamber, form cavity.
As optimization: the diameter of described center hole is 5-6mm.
As optimization: the physical dimension that described aspirating hole platform is concrete: a diameter of 3-4mm, height is less than wafer-supporting platform
2-3mm, the gradient are 90 ° to 130 °.
As optimization: the diameter of described aspirating hole is 5-6mm.
Beneficial effect: the present invention can well realize hindering glue effect；Can reduce while effective resistance glue
The deformation quantity of substrate, thus improve spin coating proceeding performance indications.Further, because only opening suction piece at end cap central
Hole, so it is applicable to difform substrate.
The present invention can solve glue simultaneously and drip blocking vacuum suction piece mouth and 2 problems of silicon chip concave downward deformation,
Not only extend the service life of vacuum suction piece mouth, and the silicon chip after processing does not haves a waste material, thus greatly
Save greatly the Financial cost of enterprise.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of the present invention；
Fig. 2 is the structural representation of the circular end face of the present invention；
Fig. 3 is the structural representation of the middle cavity of the present invention；
Fig. 4 is the structural representation of the lower chamber of the present invention；
Fig. 5 is the cross-sectional view of the present invention；
Fig. 6 is the intracavity vacuum distribution situation schematic diagram of the present invention；
Fig. 7 is the substrate deformation contrast schematic diagram of pallet-free end cap and three layers of cavity type end cap in the present invention；
Fig. 8 is the substrate deformation schematic diagram of three layers of cavity type end cap in the present invention.
Detailed description of the invention
Below in conjunction with specific embodiment, the invention will be further described.
Embodiment
As Figure 1-5, a kind of three layers of cavity type end cap being exclusively used on sol evenning machine tray vacuum suction piece mouth,
Three layers of described cavity type end cap are fixedly mounted on the vacuum suction piece mouth of sol evenning machine pallet, described three layers of cavity
Type end cap includes circular end face 1 and the middle cavity 2 matched with described circular end face 1 and lower chamber 3；
The center of described circular end face 1 is provided with center hole 11, and the diameter of described center hole 11 is
5-6mm。
Being symmetrically distributed with aspirating hole platform 21 on described middle cavity 2, described aspirating hole platform 21 is in round table-like；Institute
State the physical dimension that aspirating hole platform 21 is concrete: a diameter of 3-4mm, height less than wafer-supporting platform 2-3mm, the gradient is
90 ° to 130 °.
The center of described lower chamber 3 is provided with aspirating hole 31；The diameter of described aspirating hole 31 is 5-6mm.
All connect by plug-in is fixing between described circular end face 1, middle cavity 2 and lower chamber 3, form chamber
Body.
As shown in Figure 6, the intracavity vacuum distribution situation of the present invention is as follows: it can be seen that intracavity vacuum
Negative pressure is evenly distributed, so the colloid being inhaled into can be avoided to be inhaled into vacuum suction room under the effect of pressure difference.
As Figure 7-8, contrast from the substrate deformation of pallet-free end cap and three layers of cavity type end cap and draw, shape
Variable is reduced to 0.29 μm from 65 μm, and the use of three layers of cavity type end cap substantially reduces the deformation quantity of substrate,
Thus spin coating proceeding performance indications can be improved.
The present invention can well realize hindering glue effect；The deformation of substrate can be reduced while effective resistance glue
Amount, thus improve spin coating proceeding performance indications.Further, because only opening suction piece hole at end cap central, so its
It is applicable to the substrate of difformity size.
The present invention can solve glue simultaneously and drip blocking vacuum suction piece mouth and 2 problems of silicon chip concave downward deformation,
Not only extend the service life of vacuum suction piece mouth, and the silicon chip after processing does not haves a waste material, thus greatly
Save greatly the Financial cost of enterprise.
The present invention is not limited to above-mentioned preferred forms, and anyone can draw it under the enlightenment of the present invention
His various forms of products, no matter but in its shape or structure, make any change, every have and the application
Technical scheme as same or like, within all falling within protection scope of the present invention.
Claims (4)
1. it is exclusively used in three layers of cavity type end cap on sol evenning machine tray vacuum suction piece mouth, three layers of described chamber
Build end cap is fixedly mounted on the vacuum suction piece mouth of sol evenning machine pallet, it is characterised in that: described three layers of cavity
Type end cap includes circular end face (1) and the middle cavity (2) matched with described circular end face (1) and cavity of resorption
Body (3)；
The center of described circular end face (1) is provided with center hole (11)；
Be symmetrically distributed with aspirating hole platform (21) on described middle cavity (2), described aspirating hole platform (21) in
Round table-like；
The center of described lower chamber (3) is provided with aspirating hole (31)；
All connect by plug-in is fixing between described circular end face (1), middle cavity (2) and lower chamber (3)
Connect, form cavity.
The three layers of cavity type end being exclusively used on sol evenning machine tray vacuum suction piece mouth the most according to claim 1
Lid, it is characterised in that: the diameter of described center hole (11) is 5-6mm.
The three layers of cavity type end being exclusively used on sol evenning machine tray vacuum suction piece mouth the most according to claim 1
Lid, it is characterised in that: the physical dimension that described aspirating hole platform (21) is concrete: a diameter of 3-4mm is the lowest
It it is 90 ° to 130 ° in wafer-supporting platform 2-3mm, the gradient.
The three layers of cavity type end being exclusively used on sol evenning machine tray vacuum suction piece mouth the most according to claim 1
Lid, it is characterised in that: the diameter of described aspirating hole (31) is 5-6mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610496119.1A CN105921368B (en) | 2016-06-29 | 2016-06-29 | A kind of three layers of cavity type end cap being exclusively used on sol evenning machine tray vacuum suction piece mouth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610496119.1A CN105921368B (en) | 2016-06-29 | 2016-06-29 | A kind of three layers of cavity type end cap being exclusively used on sol evenning machine tray vacuum suction piece mouth |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105921368A true CN105921368A (en) | 2016-09-07 |
| CN105921368B CN105921368B (en) | 2018-06-19 |
Family
ID=56828814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610496119.1A Expired - Fee Related CN105921368B (en) | 2016-06-29 | 2016-06-29 | A kind of three layers of cavity type end cap being exclusively used on sol evenning machine tray vacuum suction piece mouth |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105921368B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110052370A (en) * | 2019-05-15 | 2019-07-26 | 苏州美图半导体技术有限公司 | Sol evenning machine vacuum spin coating device |
| CN114211671A (en) * | 2021-12-03 | 2022-03-22 | 西南大学 | Anti-leakage sucking disc of spin coater |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6171865A (en) * | 1984-09-17 | 1986-04-12 | Konishiroku Photo Ind Co Ltd | Rotary coating apparatus |
| JPS62216229A (en) * | 1986-03-17 | 1987-09-22 | Nec Corp | Spin chuck |
| US4899685A (en) * | 1987-11-23 | 1990-02-13 | Tazmo Co., Ltd. | Substrate coating equipment |
| JPH04267969A (en) * | 1991-02-25 | 1992-09-24 | Oki Electric Ind Co Ltd | Chuck of rotary coating apparatus |
| JPH09206655A (en) * | 1996-02-07 | 1997-08-12 | Miyagi Oki Denki Kk | Sample processing device |
| CN201896027U (en) * | 2010-11-24 | 2011-07-13 | 山东科芯电子有限公司 | Vacuum sucking disc |
| CN103182359A (en) * | 2011-12-28 | 2013-07-03 | 中国科学院微电子研究所 | Microwave glue homogenizing equipment and method thereof |
| CN103531511A (en) * | 2012-07-04 | 2014-01-22 | 上海微电子装备有限公司 | Sucking disc, wafer bearing stage using same and wafer adsorption method |
| CN103706525A (en) * | 2013-12-16 | 2014-04-09 | 南通大学 | Photoresist suction prevention type spin coater tray |
-
2016
- 2016-06-29 CN CN201610496119.1A patent/CN105921368B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6171865A (en) * | 1984-09-17 | 1986-04-12 | Konishiroku Photo Ind Co Ltd | Rotary coating apparatus |
| JPS62216229A (en) * | 1986-03-17 | 1987-09-22 | Nec Corp | Spin chuck |
| US4899685A (en) * | 1987-11-23 | 1990-02-13 | Tazmo Co., Ltd. | Substrate coating equipment |
| JPH04267969A (en) * | 1991-02-25 | 1992-09-24 | Oki Electric Ind Co Ltd | Chuck of rotary coating apparatus |
| JPH09206655A (en) * | 1996-02-07 | 1997-08-12 | Miyagi Oki Denki Kk | Sample processing device |
| CN201896027U (en) * | 2010-11-24 | 2011-07-13 | 山东科芯电子有限公司 | Vacuum sucking disc |
| CN103182359A (en) * | 2011-12-28 | 2013-07-03 | 中国科学院微电子研究所 | Microwave glue homogenizing equipment and method thereof |
| CN103531511A (en) * | 2012-07-04 | 2014-01-22 | 上海微电子装备有限公司 | Sucking disc, wafer bearing stage using same and wafer adsorption method |
| CN103706525A (en) * | 2013-12-16 | 2014-04-09 | 南通大学 | Photoresist suction prevention type spin coater tray |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110052370A (en) * | 2019-05-15 | 2019-07-26 | 苏州美图半导体技术有限公司 | Sol evenning machine vacuum spin coating device |
| CN110052370B (en) * | 2019-05-15 | 2024-04-02 | 苏州美图半导体技术有限公司 | Vacuum glue homogenizing device of glue homogenizing machine |
| CN114211671A (en) * | 2021-12-03 | 2022-03-22 | 西南大学 | Anti-leakage sucking disc of spin coater |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105921368B (en) | 2018-06-19 |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Wang Qiang Inventor after: Wu Tingxi Inventor after: Chen Yun Inventor after: Deng Jie Inventor after: Zhu Haifeng Inventor before: Wei Cunlu Inventor before: Wang Qiang Inventor before: Hua Guoran Inventor before: Zhou Haifeng |
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| CB03 | Change of inventor or designer information | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190729 Address after: 226009 No. 88 Hongxing Road, Nantong Economic and Technological Development Zone, Jiangsu Province Patentee after: Lujie Machinery Co., Ltd., Nantong City Address before: 226000 Jiangsu city of Nantong province sik Road No. 9 Patentee before: Nantong University |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180619 Termination date: 20210629 |
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| CF01 | Termination of patent right due to non-payment of annual fee |