CN105914173B - A kind of cooling conveying raceway applied to integrated circuit board detection - Google Patents
A kind of cooling conveying raceway applied to integrated circuit board detection Download PDFInfo
- Publication number
- CN105914173B CN105914173B CN201610462576.9A CN201610462576A CN105914173B CN 105914173 B CN105914173 B CN 105914173B CN 201610462576 A CN201610462576 A CN 201610462576A CN 105914173 B CN105914173 B CN 105914173B
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- Prior art keywords
- roller
- roller bearing
- bearing
- integrated circuit
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Mounting Of Bearings Or Others (AREA)
Abstract
The invention discloses a kind of cooling conveying raceways applied to integrated circuit board detection,Include the support side plate of raceway rack both sides,It is equipped with several roller bearings between support side plate,The both ends of several roller bearings are hinged with bearing block,Bearing block is fixed on support side plate,One end of roller bearing stretches out bearing block and is fixedly connected with sprocket wheel,Counterbore is formed on the end face of the roller bearing other end,Several through-holes through roller bearing outer wall are formed on the inner wall of counterbore,The roller bearing is inserted with roller,The both ends of roller are plugged with sealing ring,Sealing ring sleeve is fixed on roller bearing,Through-hole on roller bearing is located between the sealing ring at roller both ends,Several suction holes are formed on the roller,The lower section of roller is equipped with protective plate,Protective plate is fixed by the bracket in raceway rack,Protective plate is made of horizontal baffle and trapezoidal deflector,Baffle is located at the underface of roller,Deflector is distributed between the rollers.It realizes acceleration cooling in transmission process, reduces the cooling time, improves testing efficiency.
Description
Technical field：
The present invention relates to the technical fields of integrated circuit detector, being applied to integrated circuit more specifically to one kind
The cooling conveying raceway of plate detection.
Background technology：
In general, just need to carry out a series of test to integrated circuit in the manufacturing process of integrated circuit, it will be early
Integrated circuit being rejected from production procedure as early as possible of phase failure, to achieve the purpose that reduce production cost.It is used to imitate
Environment needs to heat integrated circuit usually when testing integrated circuit, is carried out in an environment of high temperature to integrated circuit
Various tests.Same integrated circuit is related to a variety of tests in the fabrication process, some integrated circuits need at different temperatures into
The different test of row, and when the adjacent temperature difference tested twice is larger, then it just needs to cool down integrated circuit, use
Temperature fall, then its cooling time is longer, influences the efficiency of test.
Invention content：
The purpose of the present invention aiming at the prior art deficiency, and provide it is a kind of applied to integrated circuit board detection
Cooling conveying raceway is realized in transmission process and accelerates cooling, reduce the cooling time, improves testing efficiency.
To achieve the above object, technical scheme is as follows：
A kind of cooling conveying raceway applied to integrated circuit board detection includes the support side plate of raceway rack both sides, props up
Several roller bearings are equipped between support side plate, the both ends of several roller bearings are hinged with bearing block, and bearing block is fixed on support side plate, roller bearing
One end stretch out bearing block be fixedly connected with sprocket wheel, counterbore is formed on the end face of the roller bearing other end, is molded on the inner wall of counterbore
There are several through-holes through roller bearing outer wall, the roller bearing to be inserted with roller, the both ends of roller are plugged with sealing ring, and sealing ring is inserted
Set is fixed on roller bearing, and the through-hole on roller bearing is located between the sealing ring at roller both ends, and several suctions are formed on the roller
Stomata, the lower section of roller are equipped with protective plate, and protective plate is fixed by the bracket in raceway rack, protective plate by horizontal baffle and
Trapezoidal deflector composition, baffle are located at the underface of roller, and deflector is distributed between the rollers.
Suction hole on the roller is equipped with multiple row, and multiple row suction hole is evenly distributed in a ring around the central axis of roller
On roller.
Through-hole on the roller bearing is linearly evenly distributed on roller bearing.
The sprocket wheel of described roller bearing one end is connected by chain, and the other end of roller bearing is articulated with aspirating air pipe.
The length of the protective plate is more than the length of roller.
The beneficial effects of the present invention are：
It accelerates cooling integrated circuit using the raceway of conveying to realize, accelerates cooling to be realized in transmission process,
The cooling time is reduced, testing efficiency is improved.
Description of the drawings：
Fig. 1 is the three-dimensional structural schematic diagram of invention；
Fig. 2 is the structural schematic diagram that invention is overlooked；
Fig. 3 is the structural schematic diagram of invention broken section.
In figure：1, side plate is supported；2, bottom bar；21, counterbore；22, through-hole；3, bearing block；4, sprocket wheel；5, roller；51, air-breathing
Hole；6, sealing ring；7, protective plate；71, baffle；72, deflector.
Specific implementation mode：
Embodiment：See shown in Fig. 1,2,3, a kind of cooling conveying raceway applied to integrated circuit board detection, including raceway
The support side plate 1 of rack both sides supports and is equipped with several roller bearings 2 between side plate 1, and the both ends of several roller bearings 2 are hinged with bearing block 3,
Bearing block 3 is fixed on support side plate 1, and one end of roller bearing 2 stretches out bearing block 3 and is fixedly connected with sprocket wheel 4,2 other end of roller bearing
Counterbore 21 is formed on end face, and several through-holes 22 through 2 outer wall of roller bearing, the roller bearing 2 are formed on the inner wall of counterbore 21
It is inserted with roller 5, the both ends of roller 5 are plugged with sealing ring 6, and 6 sleeve of sealing ring is fixed on roller bearing 2, the through-hole 22 on roller bearing 2
Between the sealing ring 6 at 5 both ends of roller, several suction holes 51 are formed on the roller 5, the lower section of roller 5, which is equipped with, prevents
Backplate 7, protective plate 7 are fixed by the bracket in (not drawn in figure) in raceway rack, and protective plate 7 is by horizontal baffle 71 and trapezoidal
Deflector 72 forms, and baffle 71 is located at the underface of roller 5, and deflector 72 is distributed between roller 5.
Suction hole 51 on the roller 5 is equipped with multiple row, and multiple row suction hole 51 is uniform in a ring around the central axis of roller 5
It is distributed on roller 5.
Through-hole 22 on the roller bearing 2 is linearly evenly distributed on roller bearing 2.
The sprocket wheel 4 of described 2 one end of roller bearing is connected by chain, and the other end of roller bearing 2 is articulated with aspirating air pipe (in figure
It does not draw).
The length of the protective plate 7 is more than the length of roller 5.
Operation principle：The present invention is the cooling conveying raceway detected applied to integrated circuit board, by roller bearing 2 and rolling
Setting through-hole 22 and suction hole 51 on cylinder 5, form suction, to absorb heat to the integrated circuit board on roller 5 in transmission process, and
It is more preferable using the roller heat absorption cooling effect of multilayer.
Claims (4)
1. a kind of cooling conveying raceway applied to integrated circuit board detection includes the support side plate (1) of raceway rack both sides, prop up
Several roller bearings (2) are equipped between support side plate (1), the both ends of several roller bearings (2) are hinged with bearing block (3), and bearing block (3) is fixed on
It supports on side plate (1), one end of roller bearing (2) stretches out bearing block (3) and is fixedly connected with sprocket wheel (4), it is characterised in that：Roller bearing (2)
Counterbore (21) is formed on the end face of the other end, and several through-holes through roller bearing (2) outer wall are formed on the inner wall of counterbore (21)
(22), the roller bearing (2) is inserted with roller (5), and the both ends of roller (5) are plugged with sealing ring (6), and sealing ring (6) sleeve is solid
It is scheduled on roller bearing (2), the through-hole (22) on roller bearing (2) is located between the sealing ring (6) at roller (5) both ends, the roller (5)
On form several suction holes (51), the lower section of roller (5) is equipped with protective plate (7), and protective plate (7) is fixed by the bracket in raceway
In rack, protective plate (7) is made of horizontal baffle (71) and trapezoidal deflector (72), and baffle (71) is located at roller (5)
Underface, deflector (72) are distributed between roller (5)；
Suction hole (51) on the roller (5) is equipped with multiple row, multiple row suction hole (51) around roller (5) central axis in a ring
It is evenly distributed on roller (5).
2. a kind of cooling conveying raceway applied to integrated circuit board detection according to claim 1, it is characterised in that：Institute
The through-hole (22) stated on roller bearing (2) is linearly evenly distributed on roller bearing (2).
3. a kind of cooling conveying raceway applied to integrated circuit board detection according to claim 1, it is characterised in that：Institute
The sprocket wheel (4) of roller bearing (2) one end stated is connected by chain, and the other end of roller bearing (2) is articulated with aspirating air pipe.
4. a kind of cooling conveying raceway applied to integrated circuit board detection according to claim 1, it is characterised in that：Institute
The length for stating protective plate (7) is more than the length of roller (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610462576.9A CN105914173B (en) | 2016-06-20 | 2016-06-20 | A kind of cooling conveying raceway applied to integrated circuit board detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610462576.9A CN105914173B (en) | 2016-06-20 | 2016-06-20 | A kind of cooling conveying raceway applied to integrated circuit board detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105914173A CN105914173A (en) | 2016-08-31 |
| CN105914173B true CN105914173B (en) | 2018-10-12 |
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ID=56758417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610462576.9A Active CN105914173B (en) | 2016-06-20 | 2016-06-20 | A kind of cooling conveying raceway applied to integrated circuit board detection |
Country Status (1)
| Country | Link |
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| CN (1) | CN105914173B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103109885A (en) * | 2012-12-26 | 2013-05-22 | 富阳市河山食品机械有限公司 | Oil-spraying sesame-scattering machine |
| CN205204029U (en) * | 2015-11-02 | 2016-05-04 | 河南金凤牧业设备股份有限公司 | Egg gathering takes transmission |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011102308A1 (en) * | 2010-02-19 | 2011-08-25 | シャープ株式会社 | Conveying roller and substrate conveying apparatus |
| CN202744066U (en) * | 2012-09-17 | 2013-02-20 | 诸暨市杰宇机电有限公司 | Material spreading rack for embroidery machine |
| CN102949167A (en) * | 2012-11-20 | 2013-03-06 | 吴江市润蕾纺织品有限公司 | Sticky roller |
-
2016
- 2016-06-20 CN CN201610462576.9A patent/CN105914173B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103109885A (en) * | 2012-12-26 | 2013-05-22 | 富阳市河山食品机械有限公司 | Oil-spraying sesame-scattering machine |
| CN205204029U (en) * | 2015-11-02 | 2016-05-04 | 河南金凤牧业设备股份有限公司 | Egg gathering takes transmission |
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| Publication number | Publication date |
|---|---|
| CN105914173A (en) | 2016-08-31 |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20180831 Address after: 362803 two, 2019 Building Materials Plaza, Xiangyun Middle Road, Quangang Town, Quanzhou, Fujian. Applicant after: Quanzhou Quangang District Gu Le Ju furniture business Address before: 523000 productivity building 406, high tech Industrial Development Zone, Songshan Lake, Dongguan, Guangdong Applicant before: Dongguan Lianzhou Intellectual Property Operation Management Co.,Ltd. |
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