CN105891973A - Two-dimensional array optical coupling module - Google Patents
Two-dimensional array optical coupling module Download PDFInfo
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- CN105891973A CN105891973A CN201610321253.8A CN201610321253A CN105891973A CN 105891973 A CN105891973 A CN 105891973A CN 201610321253 A CN201610321253 A CN 201610321253A CN 105891973 A CN105891973 A CN 105891973A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4249—Packages, e.g. shape, construction, internal or external details comprising arrays of active devices and fibres
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention discloses a two-dimensional array optical coupling module. The two-dimensional array optical coupling module comprises a ceramic substrate, a light receiving and transmitting chip array, a micro lens array, a driving unit array, optical fiber arrays and an optical fiber connector. According to the two-dimensional array optical coupling module of the invention, 45-degree reflecting surfaces are adopted as the coupling ends of the optical fiber arrays, and the coupling ends of the optical fiber arrays can be effectively coupled to the light receiving and transmitting chip array through micro lenses, and therefore, coupling efficiency is high, and the size of the module can be small, and packaging can be facilitated; proposed alignment and positioning methods are easy to realize, and industrial manufacture can be benefitted; the special-shaped ceramic substrate is adopted, so that the influence of optical path difference, on data transmission rate, can be decreased, and optical coupling efficiency can be improved; and the production cost of the two-dimensional array optical coupling module is relatively low compared to a polymer waveguide. With the two-dimensional array optical coupling module of the invention adopted, requirements for package miniaturization and high density of an parallel optical module can be satisfied; and the problems of high manufacturing cost, insufficient channels, difficulty in miniaturized package of the prior art can be solved. The two-dimensional array optical coupling module has a bright application prospect.
Description
Technical field
The invention belongs to optical communication field, relate to the light transceiver part in communication field, more particularly, to a kind of two-dimensional array optical coupler module.
Background technology
Along with big data and the arrival in cloud epoch, a large amount of data at a high speed need be transmitted and process.In order to tackle this demand, enterprise, country establish data center one after another.Large-scale data center typically has numerous parallel computations and storage part, and optical interconnection is one of major way of wherein data transmission.
Optical interconnection can be realized by optical cable, optical module etc., and wherein optical transceiver module converts electrical signals into optical signal at transmitting terminal by opto-electronic conversion, after signal is transmitted by optical fiber, converts optical signals into the signal of telecommunication again at receiving terminal.
In the case of equipment volume is limited, in order to tackle the demand that I/O mouth increases severely and transmission capacity constantly expands, the direction of optical module forward high density, high speed and Highgrade integration is developed, the general transmission using multi-channel parallel optical module to realize Large Copacity, high speed signal.
Parallel light transceiving module key component includes VCSEL (vertical cavity surface emitting laser) array and driving, fiber array, photodetector array and the amplifying circuit thereof of 850nm.Compared to this limit of semiconductor laser light emitting-type laser instrument, VCSEL has the advantage of its uniqueness in array application as surface-emitting type laser instrument.The vertical cavity structure of VCSEL well limits horizontal light field, it is to avoid operations such as " cleavage ", can carry out wafer scale on-line testing or installation, it is easy to make two-dimensional array as processing microelectronics silicon chip.Therefore, parallel light transceiving module use VCSEL as lasing light emitter.In the emitting portion of optical module, VCSEL array outgoing beam is vertical with circuit board, and optical module output light path is parallel to circuit board；Also circuit board it is parallel to, the 90 ° of deflections therefore relating to light beam and the problem coupled with parallel optical interface at the receiving portion of optical module, optical module input light path and photo-detector test surface.
A kind of optical coupling scheme uses flexible PCB.Circuit board is bent in 90 °, the circuit board holded up mounts VCSEL array so that VCSEL emergent light becomes being parallel to the light beam of optical fiber, thus couples with optical fiber.The shortcoming of this scheme is: in manufacture process, be difficult in ideal 90 ° of flexible PCB bending angle, and the error of bending angle can affect being directed at of VCSEL array and fiber array, and then makes coupling efficiency reduce.And vertically-mounted it being unfavorable for integrated, PCB is relatively costly, so less employing in reality.
Actual manufacture in frequently be the method for microlens array coupling.Laser beam is coupled into optical fiber by the complete deflection in 90 ° of right angle prism, and two right-angle surface of right angle prism are all pasted with microlens array to improve coupling efficiency.This kind of scheme lens are made up of resin material or glass material.For plastic lens, it is desirable to the light transmission of material is preferable, has long-term reliability, and these type of lens to realize the production in enormous quantities not a duck soup of higher qualification rate.Simultaneously as plastics are easier to aging, life-time service can make the hydraulic performance decline of parallel optical module.
It is continuously increased in view of network equipment data channel, the port number demand of parallel optical module is the most constantly increased, but it is limited to the IEC61754-7 standard of the joints of optical fibre, the most most 12 cores of the one-dimensional array joints of optical fibre, for more data transmission channel (such as 24 passages, 48 passages), parallel optical module typically uses the mode that two-dimensional array couples.The mode using microlens array coupling adds the volume of module undoubtedly, is unfavorable for encapsulating the realization of microminiaturization.
For the problems referred to above, the polymer waveguide array that a solution is two-dimentional carries out the coupling of light.45 ° of total internal reflection mirror of the built-in laser ablation of waveguide, VCSEL array emergent light enters polymer waveguide through microlens array and realizes coupling.Polymeric waveguiding layer is placed on light printed circuit board (PCB), and VCSEL array and PD array are encapsulated as opto chip together and are placed on organic carrier, and carrier is attached by BGA with light printed circuit board (PCB).See Doany F E, the article " Terabit/sec-class board-level optical interconnects through polymer waveguides using 24-channel bidirectional transceiver modules " that Schow C L, Lee B G et al. delivers.This scheme shortcoming is: the material technology of polymer waveguide requires higher, complex manufacturing process；In waveguide, ablation total internal reflection mirror is difficult to, higher to technological requirement, adds cost.
Summary of the invention
Disadvantages described above or Improvement requirement for prior art, the invention provides a kind of two-dimensional array optical coupler module, its object is to meet the encapsulation microminiaturization to parallel optical module and highdensity requirement, thus solve the problems such as the manufacturing cost height of prior art existence, available channel number is not enough, microminiaturization encapsulation difficulty.
The two-dimensional array optical coupler module that the present invention proposes, including ceramic bases (6), light transceiving chip array (5), microlens array (2), driving/amplifying unit array (7), fiber array (1) and the joints of optical fibre (4), wherein:
Described smooth transceiving chip array (5) is mounted in ceramic bases (6), is 2 × N chip array, and when being used for launching, described 2 × N chip array is VCSEL chip array；When being used for receiving, described 2 × N chip array is photo detector chip array；
Described fiber array (1) is the 2 × N fiber array corresponding with light transceiving chip array (5)；Described fiber array (1) one end incoming fiber optic adapter (4), microlens array (2) it is pasted with immediately below the other end, its fiber end face grinds to form the inclined-plane of 45 degree, making when optical coupler module is for launching, the optical signal that light transceiving chip array (5) is launched is coupled into fiber array (1) in total reflection mode；When optical coupler module is used for receiving, in fiber array (1), the optical signal of transmission is totally reflected through 45 degree of inclined-planes, transfers vertical downward transportation to, is received by light transceiving chip array (5)；
Microlens array (2) is to be produced on the single-spherical lens array etched in base plate by micro-optic and Micrometer-Nanometer Processing Technology, the plane side of each lens is close to each optical fiber of fiber array, wherein the planar central of lens is positioned on same vertical line with the center of circle on 45 degree of inclined-planes of optical fiber in fiber array (1), to guarantee that optical signal couples with the carrying out of total reflection mode；The curved surface summit of microlens array (2) each lens is then centrally located on same vertical line with outgoing (or reception) end face of each chip in light transceiving chip array (5)；
Described driving/amplifying unit array (7) and ceramic bases (6) are bonding on a printed circuit board by silver slurry, driving/amplifying unit array (7) is made up of the driving/amplifying unit of two row 1 × N, is connected with the chip one_to_one corresponding in described smooth transceiving chip array (5) by spun gold binding；When optical coupler module is used for launching, driving/amplifying unit array (7) is used for driving VCSEL chip array, and the signal of telecommunication is changed into optical signal；When optical coupler module is used for receiving, driving/amplifying unit array (7) is for amplifying the signal of photo detector chip array received；
The described joints of optical fibre (4) are connected with external fiber, are used for transmitting optical signal.
The ceramic bases of described attachment light transceiving chip array (5) is non-flat surfaces, by etch special-shaped ceramics substrate change each smooth transceiving chip array (5) height so that light beam from fiber array (1) to the equivalent optical path of light transceiving chip array (5).
Further, described 2 × N fiber array is made up of two 1 × N fiber arrays, 2 × N chip array is made up of two 1 × N chip arrays, when for realizing the function of optical coupler module transceiver, 1 × N chip array that one of them 1 × N fiber array is corresponding with immediately below it forms one and receives passage, another 1 × N fiber array and another 1 × N chip array corresponding immediately below it composition transmission channel.
Further, the coupled end reflective surface of described 2 × N fiber array can plate the anti-film of increasing, to increase the coupling efficiency of light further.
Further, the present invention also proposes fiber array aligning method in a kind of described optical coupler module, comprises the steps:
(1) making masterplate, etch plurality of parallel lines on the coordinate axes y direction of silicon base, distance between centers of tracks is each optical fiber pitch on one-dimension optical-fiber array；Coordinate axes x direction etching two parallel lines A, B, its distance between centers of tracks is the distance at the microlens array center of two row one-dimension optical-fiber arrays；
(2) first row one-dimension optical-fiber array is placed on a silicon substrate, directly over fiber array, now overlook its 45 ° of inclined-planes, because light beam is one-dimensional stain array at 45 ° of reflecting surface generation total reflection light fibre array face machined flats of one-dimension optical-fiber array, fiber array is translated in y direction, make on each bar parallel lines that stain array falls within silicon base y direction, complete y direction alignment；
(3) the coordinate axes x side in silicon base translates up one-dimension optical-fiber array so that stain array is positioned at the point of intersection of y direction parallel lines and line A, fixes the position of first row one-dimension optical-fiber array；Take secondary series one-dimension optical-fiber array, by translating in y direction so that its stain array falls within the parallel lines of y direction so that secondary series one-dimension optical-fiber array is directed on coordinate axes y direction with first row one-dimension optical-fiber array；Translate secondary series one-dimension optical-fiber array position on coordinate axes x direction again so that stain array is positioned at the point of intersection of y direction parallel lines and line B, complete arrangement.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it is an advantage of the current invention that: cost of manufacture is relatively low for polymer waveguide, the alignment of proposition and localization method are easier to realize, and are conducive to industry to manufacture；Additionally, the present invention uses special-shaped ceramics substrate, it is possible to reduce the optical path difference impact for message transmission rate, coupling efficiency is also had to certain lifting.
Accompanying drawing explanation
Fig. 1 is that photosignal of the present invention transmits schematic diagram
Fig. 2 is the structural representation of two-dimensional array optical coupler module of the present invention.
Fig. 3 is 2-D optical fibre array device architecture schematic diagram of the present invention.
Fig. 4 is the masterplate schematic diagram of two row one-dimension optical-fiber array location of the present invention.
Fig. 5 is ceramic bases structural representation of the present invention.
Fig. 6 is the structural representation of optical coupling portion of the present invention.
In all of the figs, identical reference is used for representing identical element or structure.In all of the figs, identical reference is used for representing identical element or structure, wherein:
1-fiber array, 2-microlens array, 3-optical fiber pigtail, the 4-joints of optical fibre, 5-light transceiving chip array, 6-ceramic bases, 7-driving/amplifying unit array, 8-printed circuit board (PCB).
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.As long as just can be mutually combined additionally, technical characteristic involved in each embodiment of invention described below does not constitutes conflict each other.
Two-dimensional array optical coupler module of the present invention has two kinds of application scenarios:
1. 2 × N channel: receiver module separates with transmitter module, does not share same circuit board.Receiving consistent with emitting structural, only in ceramic bases, the chip of attachment is different.Mount in transmitter module ceramic bases is the VCSEL array of 2 × N, and what receiver module mounted is the photodetector array of 2 × N.
2. the optical coupler module of 1 × N channel: launching and receiver module one, structure is as shown in Figure 2.But what two row passage string mounted is the VCSEL chip of 1 × N in ceramic bases, what another row mounted is the photo detector chip of 1 × N.
The structure of two-dimensional array optical coupler module proposed by the invention is as shown in Figure 2.Two-dimensional array optical coupler module includes fiber array 1, microlens array 2, optical fiber pigtail 3, the joints of optical fibre 4, light transceiving chip array 5, ceramic bases 6, driving/amplifying unit array 7, printed circuit board (PCB) 8.
Optical coupling transmitter module is identical with optical coupling receiver module structure, its structure is described below as a example by the 2-D optical fibre array device of light emission module, as it is shown on figure 3, the first 2-D optical fibre array device portions includes fiber array 1, microlens array 2, optical fiber pigtail 3 and the joints of optical fibre 4.
Form as it is shown on figure 3,2-D optical fibre array 1 is staggered to fit tightly by the two identical one-dimension optical-fiber arrays of row.
First in silicon-based substrates, carve V-groove, place the fiber in groove, then the end face of optical fiber and V-groove is all ground to 45 ° of inclined-planes, thus make the one-dimension optical-fiber array with 45 ° of reflectings surface.In order to promote the error margin being directed at for array in manufacture process, a microlens array 2 need to be mounted at each one-dimension optical-fiber array lower surface, add microlens array and can also make beam convergence, increase the efficiency of optical coupling.For improving the coupling efficiency of light, highly reflecting films (the most general reflectance coating using 850nm wavelength) can be plated on the reflecting surface of fiber array.Then two row one-dimension optical-fiber arrays are carried out location laminating.
Fit in location for two row one-dimension optical-fiber arrays, the present invention uses the scheme making masterplate alignment, principle is as follows: if overlooking its 45 ° of inclined-planes directly over fiber array, because light beam is totally reflected at 45 ° of reflectings surface of one-dimension optical-fiber array, i.e. without light beam from 45 ° of inclined-plane outgoing, so fiber array face machined flat is string stain, visual stain array is one-dimension optical-fiber array positioning datum.Before the laminating of location, first make alignment masterplate.For the location of two row one-dimension optical-fiber arrays, be from the standpoint of left and right alignment and offset distance two, therefore stencil structure is as shown in Figure 4.Masterplate is silicon-based substrate, and its y direction is etched with plurality of parallel lines, and distance between centers of tracks is one-dimension optical-fiber array each V-groove spacing, is also each optical fiber pitch；X direction is etched with two parallel lines A, B, and its distance between centers of tracks is the distance at microlens array 2 center of two row one-dimension optical-fiber arrays, figure it is seen that the spacing that this distance is two row VCSEL array (or photodetector array).Positioning action is as follows: be first placed on masterplate by the first dimension fiber array, by the translation in y direction, stain array is fallen within each bar parallel lines in y direction.Translate the most in the x direction so that stain array is positioned at the point of intersection of y direction parallel lines and line A, so fixes the position of first row one-dimension optical-fiber array；Take secondary series one-dimension optical-fiber array, by translating in y direction so that its stain array falls within each bar parallel lines in y direction, and the most relative with the fallen parallel lines of stain array of first row one-dimension optical-fiber array.Translate the most in the x direction so that stain array is positioned at the point of intersection of y direction parallel lines and line B.By aforesaid operations, complete the location of two row one-dimension optical-fiber arrays, then carry out laminating and form 2-D optical fibre array.Again by after the tail optical fiber 3 termination fiber stripping of 2-D optical fibre array, penetrate in the MT joints of optical fibre 4 of 2-D, after ultra-violet curing, carry out the end surface grinding of MT again.2-D optical fibre array device of the present invention is i.e. made after above-mentioned flow process.
Of the present invention it is pasted with special-shaped ceramics substrate 6 structure of light transceiving chip array (VCSEL array or photodetector array) 5 as shown in Figure 5.In above-mentioned fiber array device, two row one-dimension optical-fiber arrays in height have upper purgation to divide, if using smooth ceramic bases, then have certain optical path difference between two row laser beams.The appearance of optical path difference can affect the transfer rate of data, so needing to change the height of two row chip attachment substrates.Additionally, change shapes of substrates so that array chip height is different, it is also possible to reduce the distance of fiber array and VCSEL laser instrument (or photo-detector), makes light be more easy to assemble, thus improves coupling efficiency.
Ceramic bases 6 is one-body molded, is formed the passage of an indentation by etching, and wherein string light transceiving chip array 5 is mounted on, and another light transceiving chip array 5 is then positioned in the substrate raised.Laser pulse energy metric density and scanning speed that the depth capacity of low concave channel is used with photoetching are relevant, and wherein the general maximum etching depth of Ultra-Violet Laser etching is up to 0.16mm.
Optical coupling portion structure of the present invention is as shown in Figure 6.For guaranteeing fiber array 1 and light transceiving chip array 5 coupling effect, need to adjust displacement and the angle of 2-D optical fibre array, detected the coupling efficiency of each passage by energy meter.When adjustment reaches optimistic coupling efficiency, 2-D optical fibre array and ceramic bases 6 are bonded on printed circuit board (PCB) 8.
In said structure, when being used for launching light beam, the light beam that VCSEL laser array 5 is launched is assembled through microlens array 2 and is entered optical fiber.Light beam is totally reflected on 45 ° of reflectings surface, thus the light beam becoming parallel to circuit board enters fiber-optic transfer.Fiber array 1 is the most relative with VCSEL array 5.
In the present invention, the ceramic bases 6 being pasted with light transceiving chip array 5 is all placed on printed circuit board (PCB) 8 with driving/amplifying unit array 7.Driving/amplifying unit array 7 lays respectively at substrate 6 both sides, connects by gold thread binding is corresponding with light transceiving chip array.
In optical fiber, the level of transmission is in the 2-D optical fibre array of the light beam entrance receiving portion of printed circuit board (PCB), is changed into normal beam by total reflection and enters photodetector array.Photodetector array receives optical signal and converts optical signals to the signal of telecommunication.Across hindering amplifying unit, the signal of telecommunication is amplified to optical module outputting standard.The driver element of emitting portion converts the electrical signal to drive the current signal of VCSEL array.VCSEL array receives current signal, and is converted into optical signal launch.The light beam that VCSEL laser array is launched is assembled through microlens array and is entered optical fiber.Light beam is totally reflected on 45 ° of reflectings surface, thus the light beam becoming parallel to circuit board enters fiber-optic transfer.
The present invention uses the coupled modes of 45 ° of inclined-plane 2-D optical fibre arrays, meet for optical module multichannel, two-forty, highdensity requirement, it is to avoid polymer waveguide making, waveguide inner laser etching and other complex processes, reduces manufacturing cost；The inclined-plane plated film of fiber array and lower section attachment microlens array then considerably increase the error margin in manufacture and improve coupling efficiency.The present invention achieves the alignment to two row one-dimension optical-fiber arrays by making standard form, and method is the most with low cost.It addition, the special-shaped ceramics underlying structure that the present invention uses avoids the optical path difference between two row laser beam arrays, reduce it and increase, on while the impact of data transmission, the efficiency that laser couples with optical fiber.In a word, two-dimensional array coupling module of the present invention is a kind of efficient, structure of lower cost.
Those skilled in the art is easy to understand; the foregoing is only presently preferred embodiments of the present invention; not in order to limit the present invention, all any amendment, equivalent and improvement etc. made within the spirit and principles in the present invention, should be included within the scope of the present invention.
Claims (5)
1. a two-dimensional array optical coupler module, it is characterised in that include ceramic bases (6), light
Transceiving chip array (5), microlens array (2), driving/amplifying unit array (7), optical fiber array
Row (1) and the joints of optical fibre (4), wherein:
Described smooth transceiving chip array (5) is mounted in ceramic bases (6), is 2 × N chip array,
During for launching, described 2 × N chip array is VCSEL chip array；When being used for receiving, institute
Stating 2 × N chip array is photo detector chip array；
Described fiber array (1) is the 2 × N fiber array corresponding with light transceiving chip array (5)；
Described fiber array (1) one end incoming fiber optic adapter (4), is pasted with micro-immediately below the other end
Lens array (2), its fiber end face grinds to form the inclined-plane of 45 degree so that when optical coupler module is for sending out
When penetrating, the optical signal that light transceiving chip array (5) is launched is coupled into optical fiber array in total reflection mode
Row (1)；When optical coupler module is used for receiving, in fiber array (1), the optical signal of transmission is through 45
Degree inclined-plane is totally reflected, and transfers vertical downward transportation to, is received by light transceiving chip array (5)；
Microlens array (2) is to be produced in base plate etching by micro-optic and Micrometer-Nanometer Processing Technology
Single-spherical lens array, the plane side of each lens is close to each optical fiber of fiber array, its
The planar central of middle lens is positioned at same vertical with the center of circle on 45 degree of inclined-planes of optical fiber in fiber array (1)
On line, to guarantee that optical signal couples with the carrying out of total reflection mode；Microlens array (2) each lens
Curved surface summit then with outgoing (or receive) the end face center of each chip in light transceiving chip array (5)
It is positioned on same vertical line；
Described driving/amplifying unit array (7) and ceramic bases (6) are bonded in printing electricity by silver slurry
On the plate of road, driving/amplifying unit array (7) is made up of the driving/amplifying unit of two row 1 × N, passes through
Spun gold binding is connected with the chip one_to_one corresponding in described smooth transceiving chip array (5)；When optocoupler matched moulds
When block is used for launching, driving/amplifying unit array (7) is used for driving VCSEL chip array, by electricity
Signal is changed into optical signal；When optical coupler module is used for receiving, driving/amplifying unit array (7) is used
In the signal amplifying photo detector chip array received；
The described joints of optical fibre (4) are connected with exterior fiber optic connector, are used for transmitting optical signal.
A kind of two-dimensional array optical coupler module, it is characterised in that described
The ceramic bases of attachment light transceiving chip array (5) is non-flat surfaces, by etching special-shaped ceramics
Substrate change each smooth transceiving chip array (5) height so that light beam from fiber array (1) to light
The equivalent optical path of transceiving chip array (5).
A kind of two-dimensional array optical coupler module the most according to claim 1 or claim 2, it is characterised in that
Described 2 × N fiber array is made up of two 1 × N fiber arrays, and 2 × N chip array is by two 1
× N chip array forms, and when for realizing the function of optical coupler module transceiver, one of them is 1 years old
1 × N chip array that × N fiber array is corresponding with immediately below it forms one and receives passage, another
1 × N fiber array and another 1 × N chip array corresponding immediately below it composition transmission channel.
A kind of two-dimensional array optical coupler module the most according to claim 1 or claim 2, it is characterised in that
The anti-film of increasing can be plated, to increase light further on the coupled end reflective surface of described 2 × N fiber array
Coupling efficiency.
A kind of two-dimensional array optical coupler module the most according to claim 1 or claim 2, it is characterised in that
Described fiber array (1) arrangement comprises the steps:
(1) make masterplate, the coordinate axes y direction of silicon base etches plurality of parallel lines, distance between centers of tracks
For each optical fiber pitch on one-dimension optical-fiber array；Coordinate axes x direction etching two parallel lines A, B,
Its distance between centers of tracks is the distance at the microlens array center of two row one-dimension optical-fiber arrays；
(2) first row one-dimension optical-fiber array is placed on a silicon substrate, now directly over fiber array
Overlook its 45 ° of inclined-planes, because light beam occurs total reflection optical fiber at 45 ° of reflectings surface of one-dimension optical-fiber array
Array face machined flat is one-dimensional stain array, translates fiber array in y direction so that stain array falls
On each bar parallel lines on silicon base y direction, complete y direction alignment；
(3) the coordinate axes x side in silicon base translates up one-dimension optical-fiber array so that stain array position
In the point of intersection of y direction parallel lines Yu line A, fix the position of first row one-dimension optical-fiber array；Take
Secondary series one-dimension optical-fiber array, by translating in y direction so that its stain array falls within y direction and puts down
On line so that secondary series one-dimension optical-fiber array and first row one-dimension optical-fiber array are in coordinate axes y direction
Upper alignment；Translate secondary series one-dimension optical-fiber array position on coordinate axes x direction again so that stain
Array is positioned at the point of intersection of y direction parallel lines and line B, completes arrangement.
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Cited By (9)
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| CN106932867A (en) * | 2017-03-28 | 2017-07-07 | 中国科学院高能物理研究所 | Optical coupling structure |
| CN107561638A (en) * | 2017-09-25 | 2018-01-09 | 中山市美速光电技术有限公司 | A kind of double-layer fiber array |
| CN107589496A (en) * | 2017-09-25 | 2018-01-16 | 中山市美速光电技术有限公司 | A kind of double fiber array of individual layer |
| CN107817554A (en) * | 2017-12-07 | 2018-03-20 | 濮阳光电产业技术研究院 | It is a kind of that there is the silicon substrate V-groove preparation method assembled with selecting inclined function |
| CN107843959A (en) * | 2017-11-20 | 2018-03-27 | 武汉驿路通科技股份有限公司 | A kind of Multi-channel optical fiber array and preparation method thereof |
| CN107991743A (en) * | 2018-01-11 | 2018-05-04 | 绍兴柯芯光电技术有限公司 | A kind of optical transceiver module of integrated PLC planar waveguide-types device |
| CN108681059A (en) * | 2018-05-07 | 2018-10-19 | 中国人民解放军陆军工程大学 | Sub-microsecond two-dimensional optical observation device |
| CN109613661A (en) * | 2018-08-15 | 2019-04-12 | 苏州旭创科技有限公司 | Optical module |
| CN112782812A (en) * | 2019-11-07 | 2021-05-11 | 青岛海信宽带多媒体技术有限公司 | Optical module |
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Cited By (12)
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| CN106932867A (en) * | 2017-03-28 | 2017-07-07 | 中国科学院高能物理研究所 | Optical coupling structure |
| CN107561638A (en) * | 2017-09-25 | 2018-01-09 | 中山市美速光电技术有限公司 | A kind of double-layer fiber array |
| CN107589496A (en) * | 2017-09-25 | 2018-01-16 | 中山市美速光电技术有限公司 | A kind of double fiber array of individual layer |
| CN107843959A (en) * | 2017-11-20 | 2018-03-27 | 武汉驿路通科技股份有限公司 | A kind of Multi-channel optical fiber array and preparation method thereof |
| CN107817554A (en) * | 2017-12-07 | 2018-03-20 | 濮阳光电产业技术研究院 | It is a kind of that there is the silicon substrate V-groove preparation method assembled with selecting inclined function |
| CN107991743A (en) * | 2018-01-11 | 2018-05-04 | 绍兴柯芯光电技术有限公司 | A kind of optical transceiver module of integrated PLC planar waveguide-types device |
| CN108681059A (en) * | 2018-05-07 | 2018-10-19 | 中国人民解放军陆军工程大学 | Sub-microsecond two-dimensional optical observation device |
| CN108681059B (en) * | 2018-05-07 | 2023-12-08 | 中国人民解放军陆军工程大学 | Sub microsecond level two-dimensional optical observation device |
| CN109613661A (en) * | 2018-08-15 | 2019-04-12 | 苏州旭创科技有限公司 | Optical module |
| CN109613661B (en) * | 2018-08-15 | 2024-05-07 | 苏州旭创科技有限公司 | Optical module |
| CN112782812A (en) * | 2019-11-07 | 2021-05-11 | 青岛海信宽带多媒体技术有限公司 | Optical module |
| CN112782812B (en) * | 2019-11-07 | 2023-08-04 | 青岛海信宽带多媒体技术有限公司 | Optical module |
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