CN105891246B - A kind of x-ray fluorescence detection device - Google Patents
A kind of x-ray fluorescence detection device Download PDFInfo
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- CN105891246B CN105891246B CN201610465363.1A CN201610465363A CN105891246B CN 105891246 B CN105891246 B CN 105891246B CN 201610465363 A CN201610465363 A CN 201610465363A CN 105891246 B CN105891246 B CN 105891246B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
Abstract
The present invention relates to a kind of x-ray fluorescence detection devices, which is characterized in that described device includes bracket, and X-ray generating system, the X-ray being arranged on bracket receive system peace and move rotation system and information analysis and control system.Wherein, the X-ray receives system and is oppositely arranged with X-ray generating system, the X-fluorescence generated for sample to be tested after receiving the x-ray bombardment issued through X-ray generating system；The translation rotation system, including translation mechanism and rotating mechanism, the translation mechanism drive the X-ray reception system and/or the X-ray generating system to translate in the horizontal direction；The rotating mechanism drives X-ray to receive system and rotates along the axis perpendicular to horizontal direction.X-ray fluorescence detection device provided by the invention can satisfy the test of various forms sample and greatly improve the accuracy of test result.
Description
Technical field
The present invention relates to detection device fields, in particular to a kind of x-ray fluorescence detection device.
Background technique
With constantly improve for x-ray fluorescence technology, the development of Xray fluorescence spectrometer equipment is driven.As a kind of fast
Speed, accurate, economic, lossless material element composition analysis method, be widely used in metallurgy, geology, building materials, mine survey, stone
The numerous areas such as oil, chemical industry, electrical, biology, medical treatment, criminal investigation, archaeology, luxury goods identification.Sample detection device is x-ray fluorescence
Important component in spectrometer.Detection device in the prior art, sample bin use integral type fixed pan structured testing face
Plate and fixed nonadjustable positioning system are detected, more demanding to sample to be tested apparent form, are only applicable to plane configuration
Sample to be tested.And for the sample to be tested of special non-planar, the base surface area to be checked of out-of-flatness easily will be horizontal when test
Face oriented film compressive strain, or even by sample disc/plate pressure from center position, and be difficult to detect the region fallen in, thus
Cause test result inaccurate.So needing to penetrate existing X to meet the test result accuracy requirement of various forms sample
The sample bin positioning system of line Fluorescence Spectrometer improves, and proposes functional structure more rationally, using more convenient, testing result more
Accurate sample bin X-ray receives system adjustable apparatus, realizes that function is adjusted in positioning system, can be by adjusting X-ray
The horizontal displacement of reception system improves sample tested surface height with rotation angle, and guarantees the X-ray intensity highest received,
To which plane sample can not only be suitable for, also can be suitably used for the detection of non-planar sample, and by information analysis system and
Control system reaches precise positioning, guarantees the accuracy of testing result.
In view of this, the present invention is specifically proposed.
Summary of the invention
The first object of the present invention is to provide a kind of x-ray fluorescence detection device, the x-ray fluorescence detection device
It can be suitably used for plane sample, also can be suitably used for the detection of non-planar sample and using information analysis and control system and control
Motor processed realizes precise positioning, ensure that the high accuracy of testing result.
In order to realize above-mentioned purpose of the invention, spy uses following technical scheme：
The present invention relates to a kind of x-ray fluorescence detection devices, which is characterized in that described device includes bracket, and setting is being propped up
X-ray generating system, X-ray on frame receive system peace and move rotation system and information analysis and control system, wherein
The X-ray receives system and is oppositely arranged with X-ray generating system, issues for receiving through X-ray generating system
X-ray bombardment after sample to be tested generate X-fluorescence；
The translation rotation system, including translation mechanism and rotating mechanism, the translation mechanism drive the X-ray to receive
System and/or the X-ray generating system translate in the horizontal direction；The rotating mechanism drives X-ray to receive system and/or X
Ray generating system is rotated along the axis perpendicular to horizontal direction.
Preferably, the translation mechanism includes setting a pair of of sliding rail on the bracket, is arranged on the sliding rail
First group of sliding block and translation control motor；The both ends of the X-ray generating system are separately fixed on first group of sliding block, described flat
It moves control first group of sliding block of motor control and then the X-ray generating system is driven to translate along the sliding rail.
Preferably, one end of the X-ray generating system is equipped with the first rotation and controls motor.
Preferably, the rotating mechanism includes the rotating mechanism that X-ray receives system, and the X-ray receives the rotation of system
Rotation mechanism includes the horizontal axis being arranged on bracket and the second rotation control motor, and the second rotation control motor is fixed on described
To control horizontal axis rotation, the X-ray receives system setting on transverse axis for one end of horizontal axis.
Preferably, it includes horizontal axis and the second rotation control motor that the X-ray, which receives the rotating mechanism of system, and described second
Rotation control motor is fixed on one end of the horizontal axis to control horizontal axis rotation, and the X-ray receives system setting on transverse axis,
Second group of sliding block is provided on the sliding rail, the both ends of the horizontal axis are arranged on second group of sliding block.
Preferably, the X-ray generating system include X-ray emission source, the standard that is arranged in above the X-ray emission source
Straight device and collimator control motor, and the collimator control motor is moved to the X-ray emission for controlling the collimator
The surface in source.
Preferably, the X-ray generating system further includes 1-5 optical filter, optical filter adjuster and light source control motor,
The optical filter is arranged in side by side on optical filter adjuster, and the light source control motor is for controlling the optical filter adjuster
Top in the X-ray emission source is mobile.
Preferably, it is provided with laser emitting source (2) on the optical filter adjuster, the optical filter adjuster can drive
The laser emitting source (2) is moved to the surface in the X-ray emission source.
Preferably, photosensitive sensor, sensor control motor and photosensitive sensor are provided in the X-ray reception system
Moving guide rail, the sensor control motor are horizontal along the photosensitive sensor moving guide rail for controlling the photosensitive sensor
It is moved to the receiver hole position directly above that the X-ray receives system.
Preferably, the information analysis is connect with control system with the translation rotation system, and controls translation rotation system
The operating of system.
Compared with prior art, beneficial effects of the present invention are：
1) x-ray fluorescence detection device provided by the invention drives X-ray to receive system or X by translation rotation system
Ray generating system translates in the horizontal direction, or rotates along the axis perpendicular to horizontal direction, avoids when sample to be tested is tested not
Smooth base surface area to be checked is easily by horizontal plane oriented film compressive strain, or even by sample disc pressure from center position, Er Qienan
To detect that the region fallen in so as to cause the problem of test result inaccuracy, can satisfy the test of various forms sample simultaneously
Greatly improve the accuracy of test result；
2) present invention is realized using laser emitting source (2), photosensitive sensor, information analysis and control system and control motor
Precise positioning ensure that the high accuracy of testing result；
3) functional structure of the present invention more rationally, using more convenient, testing result is more accurate.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the partial enlarged view of Fig. 1；
Fig. 3 is the principle of the present invention schematic diagram.
Appended drawing reference：
1-X ray generating system, 2- laser emitting source, 3- light source control motor, 4- sliding block, 5- guide rail, 6- horizontal axis, 7- are passed
Sensor controls motor, 8- sensor moving guide rail, 9-X ray and receives system, 10- photosensitive sensor, 11- bracket, 12- translation control
Motor processed, 13- rotation control motor, 14- optical filter adjuster, 15-X ray emission source, 16- collimator, the control of 17- collimator
Motor, 18- information receives and control system, 19- tested surface.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ", only
For descriptive purposes, it is not understood to indicate or imply relative importance.Wherein, term " first position " and " second position "
For two different positions.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ",
" connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally connect
It connects；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, can also indirectly connected through an intermediary, it can
To be the connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood with concrete condition
Concrete meaning in the present invention.
One aspect of the present invention is related to a kind of x-ray fluorescence detection device, and described device includes bracket (11), and setting exists
X-ray generating system (1), X-ray on bracket (11) receive system (9) peace and move rotation system and information analysis and control
System processed, wherein the X-ray receives system (9) and is oppositely arranged with X-ray generating system (1), sends out for receiving through X-ray
The X-fluorescence that sample to be tested generates after the x-ray bombardment that raw system (1) issues；
The translation rotation system, including translation mechanism and rotating mechanism, the translation mechanism drive the X-ray to receive
System (9) and/or the X-ray generating system (1) translate in the horizontal direction；The rotating mechanism drives X-ray to receive system
(9) it is rotated along the axis perpendicular to horizontal direction.
The device of the invention, due to being provided with translation rotation system, the X-ray generating system (1) and/or the X are penetrated
Line receives system (9) can realize the movement on horizontal position and the rotation of axial direction under its drive, and being designed in this way can make
The device of the invention is not limited only to the product to be tested of the more regular plane configuration of detection exterior appearance, can also be special to detect
Non-planar product to be tested.In addition, information analysis in the present invention and control system can be not only used for information collection and
Analysis, can also react on translation rotation system, instruct its operating, so that X-ray, which receives system (9), can receive letter
Number strongest X-ray, to improve the accuracy of detection.
In a preferred embodiment of the present invention, the X-ray generating system (1) and the X-ray receive system
(9) it is connect respectively with the first translation rotation system and the second translation rotation system, the X-ray is driven to receive system respectively
(9) it moves and can be rotated along the axis perpendicular to horizontal direction on horizontal position with the X-ray generating system (1).
Further, the translation mechanism includes a pair of of the sliding rail being arranged on the bracket (11), is arranged in the cunning
First group of sliding block on rail controls motor (12) with the translation being arranged on first group of sliding block；The X-ray generating system
(1) both ends are separately fixed on first group of sliding block, and translation control motor (12) controls first group of sliding block and then drive institute
X-ray generating system (1) is stated to translate along the sliding rail.
In the present invention, the X-ray receives system (9) and X-ray generating system (1) is oppositely arranged, the sliding rail setting
System (9) and two sides with X-ray generating system (1), the both ends difference of X-ray generating system (1) are received in the X-ray
Be fixed on first group of sliding block, by translation control motor (12) control X-ray generating system (1) along sliding rail close to or far from
The side that the X-ray receives system (9) translates up, and so as to adjust optimal detection position, improves the accuracy of detection.
Further, one end of the X-ray generating system (1) is equipped with the first rotation and controls motor.
In a preferred embodiment of the present invention, first translation control motor (12) is arranged in first group of sliding block
On, one end of the X-ray generating system (1) is fixed on the first rotation control motor, controls motor band by the first rotation
It is moved to rotate along the axis perpendicular to horizontal direction.
The present invention drives the X-ray generating system (1) to carry out horizontal displacement and/or rotation angle by translation rotation system
Degree to improve sample tested surface height, and guarantees the X-ray intensity highest received, to can not only be suitable for plane pattern
Product also can be suitably used for the detection of non-planar sample, guarantee the accuracy of testing result.
In a preferred embodiment of the present invention, it is provided with boss on first sliding block, be arranged on the boss
There is riveting fixation kit, the X-ray emission and the boss are riveted and fixed on the slide block, and the sliding block can lead to
Cross translation control motor (12) energy supply, drive X-ray emission sliding translation on horizontal position along the sliding rail.
The X-ray receives system (9) by designing the sliding that may be implemented on horizontal position above, is preferably implementing
, can be with axial-rotation in mode, therefore its applicable range is more extensive.
Rotation control motor can control X-ray generating system (1) and axially rotate.
Further, the rotating mechanism includes the rotating mechanism that X-ray receives system (9), and the X-ray receives system
(9) rotating mechanism includes the horizontal axis (6) being arranged on bracket (11) and the second rotation control motor, the second rotation control
Motor processed is fixed on one end of the horizontal axis (6) to control horizontal axis (6) rotation, and the X-ray receives system (9) and is arranged in horizontal axis
(6) on.
In a preferred embodiment of the present invention, the rotating mechanism includes riveting fixation kit and is arranged in horizontal axis
(6) the riveting protrusion at both ends, the horizontal axis (6) connect with the riveting fixation kit, and the rotation control motor is fixed on cross
One section of axis (6) and the rotation of dynamic Control horizontal axis (6) can be provided, X-ray receives system (9) and is unremovably fixed on
On horizontal axis (6), it is preferable that it is in unitary design that the X-ray, which receives system (9) and horizontal axis (6),.
In a preferred embodiment of the present invention, the rotating mechanism includes connecting and fixing component and being arranged in horizontal axis
(6) the clamping protrusion at both ends, it is described connect and fix component be with the boss of clamping groove being recessed inwardly, the clamping protrusion and
The clamping groove is connected and can be axially rotated, and one end of horizontal axis (6) is connect with rotation control motor, and the rotation controls motor
The rotation of dynamic Control constant weight can be provided, x-ray system is unremovably fixed on horizontal axis (6), it is preferable that the X
It is in unitary design that ray, which receives system (9) and horizontal axis (6),.
X-ray reception system (9) is fixed on horizontal axis (6) to be arranged oppositely with X-ray generating system (1), therefore X is penetrated
The X-ray that line generating system (1) projects accurately can receive system (9) by X-ray and receive, and X-ray receives system (9) energy
Enough realize that rotation helps to receive the strongest X-ray of signal by horizontal axis (6), to improve measurement accuracy.
Further, it includes that horizontal axis (6) and the second rotation control motor that the X-ray, which receives the rotating mechanism of system (9),
The second rotation control motor is fixed on one end of the horizontal axis (6) to control horizontal axis (6) rotation, and the X-ray receives system
Unite (9) be arranged on horizontal axis (6), be provided with second group of sliding block on the sliding rail, the both ends setting of the horizontal axis (6) is described the
On two groups of sliding blocks.
In a preferred embodiment of the present invention, boss is respectively equipped on second group of sliding block, on the boss
Equipped with cylindric invagination clamping groove, the both ends of the horizontal axis (6) are equipped with clamping protrusion and are clamped with the boss, the horizontal axis
(6) one end is equipped with rotation control motor (13), and rotation control motor (13) can control the horizontal axis (6) rotation, institute
It states sliding block and is equipped with translational movement motor, the translational movement motor can control the sliding block and drive horizontal axis (6) flat along sliding rail
It moves.
In a preferred embodiment of the present invention, boss is respectively equipped on second group of sliding block, on the boss
Equipped with riveting slot, the both ends of the horizontal axis (6) are equipped with riveting component and rivet with the boss, one end of the horizontal axis (6)
Motor (13) are controlled equipped with rotation, rotation control motor (13) can control the horizontal axis (6) rotation, set on the sliding block
There is translational movement motor, the translational movement motor can control the sliding block and horizontal axis (6) is driven to translate along sliding rail.
By designing above, X-ray receives system (9) and can translate in axial-rotation and along sliding rail, therefore can be with
It more accurately positions to obtain optimal detection accuracy.
Further, the X-ray generating system (1) includes X-ray emission source (15), is arranged in the X-ray emission
Collimator (16) and collimator (16) above source (15) control motor, and collimator (16) the control motor is described for controlling
Collimator (16) is moved to the surface of the X-ray emission source (15).
In a preferred embodiment of the present invention, the X-ray generating system (1) is sliding equipped with collimator (16)
Rail, the collimator (16) can slide into the surface of X-ray emission source (15) along the sliding rail.In detection application, by believing
Breath receives and control system (18) control collimator (16) sliding motor makes collimator (16) accurately along the collimator (16)
Sliding rail is moved to the surface of X-ray emission source (15).
In a preferred embodiment of the present invention, 4 different holes, the hole are provided on the collimator (16)
The surface of X-ray emission source (15) accurately can be driven and slid into according to demand by collimator (16).
Further, the X-ray generating system (1) further includes 1-5 optical filter, optical filter adjuster (14) and light source
It controls motor (3), the optical filter is juxtaposed on optical filter adjuster (14), and the light source control motor (3) is used
It is mobile in the top of the X-ray emission source (15) in controlling the optical filter adjuster (14).
In a preferred embodiment of the present invention, the optical filter adjuster (14) is equipped with 4 optical filters, institute
It states optical filter to be set side by side, is additionally provided with adjuster sliding rail on the X-ray generating system (1).In detection application, received by information
Controlling the light source control motor (3) with control system (18) slides optical filter adjuster (14) along adjuster sliding rail, can root
According to demand to be arranged on sliding rail it is a certain needed for optical filter slide into the surfaces of X-ray emission source (15).
Further, in an embodiment of the invention, the optical filter adjuster (14) is equipped with 1 optical filtering
Piece；In yet another embodiment of the present invention, the optical filter adjuster (14) is equipped with 5 optical filters.
In use process, optical filter adjuster (14) drive needed for optical filter slide into X-ray emission source (15) just on
Side, rear collimator (16) slide into the surface of X-ray emission source (15) and selected optical filter along collimator (16) sliding rail,
Project required X-ray in X-ray emission source (15).
Further, it is provided with laser emitting source (2) on the optical filter adjuster (14), the optical filter adjuster
(14) laser emitting source (2) can be driven to be moved to the surface of the X-ray emission source (15).
In, information is received and control system (18) starting light source control motor (3) drives optical filter adjuster (14)
Sliding, makes the laser emitting source (2) be moved to the surface of X-ray emission source (15), after accurate positioning, starts Laser emission
Source (2) emits laser along fixed angle.
It is that being accurately positioned and find X-ray receives system (9) most using the purpose of laser emitting source (2) transmitting laser
Good horizontal position and angle.
Further, the X-ray, which receives, is provided with photosensitive sensor (10), sensor control motor (7) on system (9)
With photosensitive sensor (10) moving guide rail (8), sensor control motor (7) is for controlling the photosensitive sensor (10) edge
Photosensitive sensor (10) moving guide rail (8) is moved horizontally to the X-ray and receives position right above the receiver hole of system (9)
It sets.
In, information receives and control system (18) starting sensor control motor (7), makes photosensitive sensor (10) edge
Sensor moving guide rail (8) is moved to the receiver hole position directly above that X-ray receives system (9).Information receives afterwards and control is
(18) starting translation of uniting controls motor (12), and translation control motor (12) drives X-ray to receive system (9) along guide rail in level
It is moved on direction, until photosensitive sensor (10) receives laser signal, then runs through signal wire and be transferred to information system
And control system, make control system be immediately controlled translation control motor (12) it is out of service, due to photosignal transmission it is ultrafast
Speed can realize that X-ray receives the precise positioning of system (9) in the horizontal direction.X-ray receives system (9) in the horizontal direction
After precise positioning, starting rotation control motor (13), rotation control motor (13) drives the X-ray on horizontal axis (6) to receive system
(9) it rotates, constantly adjusts laser pick-off angle, until photosensitive sensor (10) receives strongest laser signal, then rapidly
It is transferred to information system and control system by signal wire, makes control system that rotation control motor (13) be immediately controlled and stops fortune
Row, since the ultrafast speed of photosignal transmission can realize the precise positioning of X-ray receiving angle.
By designing above, the complete accurate positioning that X-ray receives system (9) may be implemented, guarantee X-ray emission
It can receive the X-ray of peak signal and thereby improve detection accuracy.
Further, the information analysis is connect with control system with the translation rotation system, and controls translation rotation
The operating of system.
It is an advantage of the current invention that being adjusted by precise positioning, X-ray reception system (9) can receive strongest X and penetrate
Line, obtained detection data is more accurate, and is adjusted and met for out-of-flatness tested surface concave area by laser assisted positioning
The detection demand in domain makes it that can not only be suitable for plane sample, also can be suitably used for the detection of non-planar sample, reached function
Energy more reasonable structure uses more convenient, the more accurate equipment improvement purpose of testing result.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Present invention has been described in detail with reference to the aforementioned embodiments for pipe, those skilled in the art should understand that：Its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (9)
1. a kind of x-ray fluorescence detection device, which is characterized in that described device includes bracket, and the X-ray hair on bracket is arranged in
Raw system, X-ray receive system peace and move rotation system and information analysis and control system, wherein
The X-ray receives system and is oppositely arranged with X-ray generating system, penetrates for receiving the X issued through X-ray generating system
The X-fluorescence that sample to be tested generates after line irradiation；
The translation rotation system, including translation mechanism and rotating mechanism, the translation mechanism drive the X-ray to receive system
And/or the X-ray generating system translates in the horizontal direction；The rotating mechanism drives X-ray to receive system along perpendicular to water
Square to axis rotation；
The translation mechanism include setting a pair of of sliding rail on the bracket, first group of sliding block being arranged on the sliding rail and
Translation control motor；The both ends of the X-ray generating system are separately fixed on first group of sliding block, and the translation controls motor control
It makes first group of sliding block and then the X-ray generating system is driven to translate along the sliding rail.
2. the apparatus according to claim 1, which is characterized in that one end of the X-ray generating system is equipped with the first rotation
Control motor.
3. the apparatus according to claim 1, which is characterized in that the rotating mechanism includes the rotation that X-ray receives system
Mechanism, the rotating mechanism that the X-ray receives system includes that the horizontal axis being arranged on bracket and the second rotation control motor, described
Second rotation control motor is fixed on one end of the horizontal axis to control horizontal axis rotation, and the X-ray receives system and is arranged in cross
On axis.
4. the apparatus according to claim 1, which is characterized in that the rotating mechanism that the X-ray receives system includes horizontal axis
With the second rotation control motor, the second rotation control motor is fixed on one end of the horizontal axis to control horizontal axis rotation, institute
It states X-ray and receives system setting on transverse axis, second group of sliding block is provided on the sliding rail, the both ends of the horizontal axis are arranged in institute
It states on second group of sliding block.
5. device according to claim 4, which is characterized in that the X-ray generating system includes X-ray emission source, sets
The collimator and collimator control motor above the X-ray emission source are set, the collimator control motor is for controlling institute
State the surface that collimator is moved to the X-ray emission source.
6. device according to claim 5, which is characterized in that the X-ray generating system further include 1-5 optical filter,
Optical filter adjuster and light source control motor, the optical filter are juxtaposed on optical filter adjuster, the light source control
It is mobile in the top in the X-ray emission source that motor processed is used to control the optical filter adjuster.
7. device according to claim 6, which is characterized in that it is provided with laser emitting source on the optical filter adjuster,
The optical filter adjuster can drive the laser emitting source to be moved to the surface in the X-ray emission source.
8. device according to claim 6, which is characterized in that be provided in the X-ray reception system photosensitive sensor,
Sensor controls motor and photosensitive sensor moving guide rail, and the sensor control motor is for controlling the photosensitive sensor edge
The photosensitive sensor moving guide rail is moved horizontally to the receiver hole position directly above that the X-ray receives system.
9. the apparatus according to claim 1, which is characterized in that the information analysis and control system and the translation rotate
System connection, and control the operating of translation rotation system.
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| CN201610465363.1A CN105891246B (en) | 2016-06-23 | 2016-06-23 | A kind of x-ray fluorescence detection device |
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| CN206020312U (en) * | 2016-06-23 | 2017-03-15 | 北京至一恒盛技术服务有限公司 | A kind of XRF detection device |
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| JP3928656B2 (en) * | 2003-07-11 | 2007-06-13 | 学校法人早稲田大学 | Energy dispersive X-ray diffraction / spectrometer |
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| CN1829910A (en) * | 2003-06-02 | 2006-09-06 | X射线光学系统公司 | Method and apparatus for implement XANES analysis |
| CN102770753A (en) * | 2009-12-17 | 2012-11-07 | 赛默飞世尔科技(埃居布朗)有限公司 | Method and apparatus for performing X-ray analysis of a sample |
| CN104849295A (en) * | 2014-02-18 | 2015-08-19 | 帕纳科有限公司 | X-ray analysis apparatus |
| CN104000617A (en) * | 2014-04-18 | 2014-08-27 | 西安电子科技大学 | Multi-modal in-vivo imaging system for small animals and small animal imaging method |
| CN206020312U (en) * | 2016-06-23 | 2017-03-15 | 北京至一恒盛技术服务有限公司 | A kind of XRF detection device |
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