CN103837472A - Micro cantilever beam deflection scanning system and method for micro cantilever beam array sensor based on multi-angle plane transmitting mirrors - Google Patents

Abstract

The invention discloses a micro cantilever beam deflection scanning system and a micro cantilever beam deflection scanning method for a micro cantilever beam array sensor based on multi-angle plane transmitting mirrors. The system comprises a laser and a group of plane transmitting mirrors which are linearly arrayed, wherein the number of the plane transmitting mirrors is equal to that of micro cantilever beams on the micro cantilever beam array sensor to be detected; different included angles are formed between all the plane transmitting mirrors and the horizontal plane. According to the micro cantilever beam deflection scanning system, the plane transmitting mirrors with different included angles are driven to form a micro-distance parallel light generation system; laser beams emitted by the laser irradiate the free end of each micro cantilever beam in a micro cantilever beam array through the micro-distance parallel light generation system, and light signals are detected by using a photoelectric position sensitive detector, so that the deflection condition of each micro cantilever beam on the micro cantilever beam array can be detected. According to the system and the method, all the micro cantilever beams can be irradiated by using one laser, system errors caused by detection through different lasers are eliminated, and high-accuracy detection is realized.

Description

Micro-cantilever deflection and scanning system and the scan method of the micro-cantilever array sensor based on multi-angle plane transmission mirror

Technical field

The invention belongs to micro-beam detection field, particularly relate to micro-cantilever deflection and scanning system and the scan method of the micro-cantilever array sensor based on multi-angle plane transmission mirror.

Background technology

The develop rapidly of the modern science and technology such as measurement, control and robotization has greatly promoted the progress of infotech, and human society has entered the information age.Sensor technology is the Main Means of acquisition of information as one of three large pillars of infotech, plays a part more and more important in the development of modern science and technology.Biochemical sensor is the important component part in Modern Transducer Technology.Be used widely at aspects such as scientific research, food security, health care, environmental monitoring, industrial and agricultural productions.Biochemical sensor is a kind of high specific, strong and cheap analysis tool, and it can detect target molecules under complicated background noise condition.Biochemical sensor is of a great variety, and character and form is different.In recent years, along with appearance and the development of MEMS (micro electro mechanical system) (MEMS) technology, for biochemical sensor provides some new selection and thinkings.Micro-cantilever is subject to extensive concern recently as a MEMS device the simplest.

Micro-cantilever sensing technology is a kind of new method for sensing developing rapidly after atomic force microscope and micro-system appearance.Micro-cantilever beam sensor, as the simplest micromechanical component, is the focus of micro-nano Research on Sensing always.Micro-cantilever beam sensor can be measured in real time to having specific biochemical reaction parameter, and in the time there is biochemical reaction on micro-cantilever surface, the upper and lower surface of micro-cantilever can produce stress difference and changes and make micro-cantilever produce flexural deformation.By Ear Mucosa Treated by He Ne Laser Irradiation micro-cantilever free end, through Optoelectronic Position Sensitive Detector, signal is surveyed after utilizing polished rod bar method to amplify the end displacement of every micro-cantilever, and then the biochemical reaction that micro-cantilever surface is occurred is studied.Micro-cantilever beam sensor as a kind of can be in real time, the detection of the direction such as high sensitivity, selectivity novel method for sensing good and non-demarcation be applied in that heavy metal ion, microbiotic, genetic test, protein conformation in explosion gas, gaseous tension, solution changes, the catalytic process of antigen-antibody binding reaction and enzyme.

A large amount of single micro-cantilever biochemical sensors that use, owing to can only test with a micro-cantilever at every turn, have been wasted the plenty of time at present; And owing to needing the contrast of many group samples in biochemical reaction, this realizes with regard to exigence the research that two many more than beam micro-cantilevers detect.

At paper (Cantilever array sensors.Materials Today, 2005.8 (4): p.30-36.), scholar utilizes vertical cavity surface emitting laser device to provide 8 array light sources to carry out sequential irradiation to 8 micro-cantilevers in micro-cantilever array.The problem that this detection method exists is that the spacing between vertical cavity surface emitting laser device light beam is fixed, therefore it can only detect for the micro-cantilever array of certain spacing specification, and the relatively independent consistance that can not ensure laser beam of each laser beam.

Previously for a kind of array micro-cantilever joist unit deflection angle measuring systems (publication number: 101261139), adopted complex optical path set up Fourier Transform System realize micro-cantilever drift angle is detected, this system light path complexity is difficult for building.

At the system and method (publication number CN101278357A) for micromechanics and nano-machine structure are detected, adopt voice coil motor to drive laser instrument to realize every micro-cantilever on micro-cantilever array is scanned, the mechanical vibration meeting of voice coil motor causes the laser beam that laser instrument sends to produce error.

At paper (Javier, T., et al., Imaging the surface stress and vibration modes of a microcantilever by laser beam deflection microscopy.Nanotechnology, 2012.23 (31): p.315501.), scholar adopts and allows the solvent cell of laying micro-cantilever carry out two dimension swing, realizes every micro-cantilever in micro-cantilever array is scanned.And solvent cell athletic meeting makes particle in reaction solution produce unnecessary motion, make to detect data and produce error.

Summary of the invention

The weak point that the present invention exists for fear of prior art, a kind of micro-cantilever deflection and scanning system and scan method of the micro-cantilever array sensor based on multi-angle plane transmission mirror are provided, this scanning system is under the prerequisite of not mobile laser instrument and solvent cell, can realize the free-ended scanning of all micro-cantilevers, for micro-cantilever deflection situation detects the sweep signal that unified light beam is provided.

Technical solution problem of the present invention adopts following technical scheme:

A micro-cantilever deflection and scanning system for micro-cantilever array sensor based on multi-angle plane transmission mirror, its design feature is to comprise:

One for the laser instrument of Emission Lasers bundle vertically downward;

One is installed in the plane transmission mirror group being arranged in a linear in horizontal shift platform side front, described plane transmission mirror group is by the 1st plane transmission mirror, the 2nd plane transmission mirror ... form with N plane transmission mirror, described N equates with the micro-cantilever quantity M on sensor micro-cantilever array to be measured, and described plane transmission mirror is corresponding one by one with micro-cantilever;

In the time that M is even number, described plane transmission mirror group plane transmission mirror is and is horizontally disposed with; From

plane transmission mirror is being obliquely installed that angle increases progressively left; From

plane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror vergence direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and surface level form meets following system of equations:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In the time that M is odd number, described plane transmission mirror group plane transmission mirror is and is horizontally disposed with; From

plane transmission mirror is being obliquely installed that angle increases progressively left successively; From

plane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror vergence direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and surface level form meets following system of equations:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M+1}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In above formula, α (N) represents the sharp angle that N plane transmission mirror and surface level form, and the laser beam irradiation that β (N) launches for laser instrument is to the emergence angle after N plane transmission mirror; N is the refractive index of plane transmission mirror; H is the thickness of plane transmission mirror; M is the quantity of micro-cantilever to be measured; N is plane transmission mirror sequential bits; D is the spacing of micro-cantilever to be measured;

Design feature of the present invention is also:

The above-mentioned plane transmission mirror group being arranged in a linear being installed on horizontal shift platform is replaced with and is installed on horizontal rotary pedestal, and array changes into centered by the rotating shaft of rotatable platform and is circumferential arrangement.

Described horizontal rotary pedestal is round-meshed shadow shield, and circular hole respectively correspondence is positioned at each plane transmission mirror dead ahead, and circular hole size makes laser instrument can be irradiated to plane transmission mirror, after plane transmission mirror, can realize the scanning to micro-beam.

Described laser instrument is semiconductor laser, and LASER Light Source is the monochromatic source within the scope of 632nm-780nm.

Described micro-cantilever array is placed on the matrix grain-clamping table in solvent cell, and solvent cell is by the turnover of induction pipe and outlet control solvent; Described solvent cell top is provided with transparent glass window.

The table top of described matrix grain-clamping table and surface level form the inclination angle within the scope of 00-100.

Described solvent cell bottom is provided with the thermostat for controlling solvent temperature.

A scan method for the micro-cantilever deflection and scanning system of the micro-cantilever array sensor based on multi-angle plane transmission mirror, its feature is to comprise the steps:

1) micro-cantilever array sensor to be measured is placed on the matrix grain-clamping table in solvent cell, matrix grain-clamping table makes micro-cantilever be vergence direction arrangement, described solvent cell is airtight, and top is provided with transparent glass window, and solvent cell is by the turnover of induction pipe and outlet control solvent;

2) adjust the also initial position of fixed laser, adjust the initial position of horizontal shift platform or horizontal rotary pedestal simultaneously, make unique horizontally disposed plane transmission mirror in plane transmission mirror group be positioned at laser instrument under, adjust the initial position of solvent cell, make in micro-cantilever array sensor micro-cantilever corresponding to described unique horizontally disposed plane transmission mirror under laser instrument, thereby make the laser beam of laser instrument be radiated at the free end of this micro-cantilever after the transmission of plane transmission mirror, thereby complete the free-ended scanning of this micro-cantilever;

3) utilize voice coil motor to drive horizontal shift platform to move reciprocatingly or utilize stepper motor to drive horizontal rotary pedestal to rotate, make each plane transmission mirror all pass through laser instrument under, the plane transmission mirror arranging by different angle makes laser beam that laser instrument is launched after transmission, be irradiated to the free end of corresponding micro-cantilever, thereby under the prerequisite of not mobile laser instrument and solvent cell, complete the scanning to all micro-cantilevers.

Compared with the prior art, beneficial effect of the present invention is embodied in:

The present invention can be realized and be utilized a laser instrument to the every free-ended irradiation of micro-cantilever by the plane transmission mirror of 8 groups of different angles of voice coil motor (or stepper motor of rotation) drive of linear reciprocating motion, eliminate the systematic error of bringing while detection due to various lasers, simultaneously by regulating the angle of plane transmission mirror, the position that laser beam is radiated on every micro-cantilever is at every turn fixed, and has realized the higher detection of accuracy.Round-meshed shadow shield can be realized fixed point scanning to micro-beam array, avoids the light path that continuous sweep micro-beam array brings to disturb.

Brief description of the drawings

The application principle figure of Fig. 1 embodiment of the present invention 1 scanning system.

Fig. 2 is that micro-cantilever array sensor is fixed on the view on the matrix grain-clamping table of inclination.

Fig. 3 is plane transmission mirror inclined design schematic diagram.

Fig. 4 a, 4b are the embodiment of the present invention 1 scanning system midplane diaphotoscope group and scanning process schematic diagram

Fig. 5 a, 5b are the embodiment of the present invention 2 scanning system midplane diaphotoscope group schematic diagram.

In figure: 1 moveable platform, 2 laser instruments, 3 horizontal shift platforms, 4, plane transmission mirror, 41 the 1st plane transmission mirrors, 42 the 2nd plane transmission mirrors, 4N N plane transmission mirror, 51 the 1st micro-cantilevers, 52 the 2nd micro-cantilevers, 5M M micro-cantilever, 6 induction pipes, 7 outlets, 8 solvent cells, 9 matrix grain-clamping tables, 10 thermostats, 11 Optoelectronic Position Sensitive Detectors, 12 data collecting cards, 13 computing machines, 14 windowpanes, 15 horizontal rotary pedestals, 16 shadow shields, 17 micro-cantilevers.

Embodiment

Below in conjunction with accompanying drawing, patent of the present invention is described in detail, so that technician understands.

Embodiment 1

As shown in Figure 1, micro-cantilever deflection and scanning system, comprising:

One for the laser instrument 2 of Emission Lasers bundle vertically downward; Laser instrument 2 is located on the moveable platform 1 of its initial position of capable of regulating; Laser instrument is semiconductor laser, and LASER Light Source is the monochromatic source within the scope of 632nm-780nm.

One is installed in the plane transmission mirror group being arranged in a linear in horizontal shift platform 3 side fronts, plane transmission mirror group is from left to right by the 1st plane transmission mirror the 41, the 2nd plane transmission mirror 42 ... form with N plane transmission mirror 4N, N equates that with the micro-cantilever quantity M on sensor micro-cantilever array to be measured sensor micro-cantilever array is from left to right by the 1st micro-cantilever the 51, the 2nd micro-cantilever 52 ... with 5M micro-cantilever composition, plane transmission mirror is corresponding one by one with micro-cantilever; The 1st plane transmission mirror 41 is corresponding with the 1st micro-cantilever 51, the 2nd plane transmission mirror 42 is corresponding with the 2nd micro-cantilever 52, and by that analogy, 4N is corresponding with 5M micro-cantilever for N plane transmission mirror.

In the time that M is even number, described plane transmission mirror group

plane transmission mirror is and is horizontally disposed with; From plane transmission mirror is being obliquely installed that angle increases progressively left; From

plane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror vergence direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and surface level form meets following system of equations:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In the time that M is odd number, described plane transmission mirror group

plane transmission mirror is and is horizontally disposed with; From

plane transmission mirror is being obliquely installed that angle increases progressively left successively; From

plane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror vergence direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and surface level form meets following system of equations:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M+1}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In above formula, as shown in Figure 3, α (N) represents the sharp angle that N plane transmission mirror and surface level form, reality is also the incident angle that the laser beam sent of laser instrument and N plane transmission mirror form, and β (N) is that the laser beam irradiation of laser instrument transmitting is to the emergence angle after N plane transmission mirror; N is the refractive index of plane transmission mirror; H is the thickness of plane transmission mirror; M is the quantity of micro-cantilever to be measured; N is plane transmission mirror sequential bits; D is the spacing of micro-cantilever to be measured.

As shown in Figure 1, micro-cantilever array is placed on the matrix grain-clamping table 9 in solvent cell 8, and solvent cell is controlled the turnover of solvent by induction pipe 6 and outlet 7; Solvent cell top is provided with transparent glass window 14; Solvent cell bottom is provided with the thermostat 10 for controlling solvent temperature.

As shown in Figure 2, the table top of matrix grain-clamping table and surface level form 0 ⁰-10 ⁰inclination angle in scope.

Embodiment 2

Embodiment 1 is installed in to the plane transmission mirror group being arranged in a linear on horizontal shift platform to be replaced with and is installed on horizontal rotary pedestal 15, and array changes into centered by the rotating shaft of rotatable platform and is circumferential arrangement, horizontal rotary pedestal is round-meshed shadow shield, circular hole respectively correspondence is positioned at each plane transmission mirror dead ahead, circular hole size makes laser instrument can be irradiated to plane transmission mirror, after plane transmission mirror, can realize the scanning to micro-beam; As shown in Fig. 5 a, 5b.

Embodiment 3

The scan method of the scanning system of embodiment 1 or 2, comprises the steps:

1) micro-cantilever array sensor to be measured is placed on the matrix grain-clamping table in solvent cell, matrix grain-clamping table makes micro-cantilever array be vergence direction arrangement, described solvent cell is airtight, and top is provided with transparent glass window, and solvent cell is by the turnover of induction pipe and outlet control solvent;

2) adjust the also initial position of fixed laser, adjust the initial position of horizontal shift platform or horizontal rotary pedestal simultaneously, make unique horizontally disposed plane transmission mirror in plane transmission mirror group be positioned at laser instrument under, adjust the initial position of solvent cell, make in micro-cantilever array sensor micro-cantilever corresponding to described unique horizontally disposed plane transmission mirror under laser instrument, thereby make the laser beam of laser instrument be radiated at the free end of this micro-cantilever after the transmission of plane transmission mirror, thereby complete the free-ended scanning of this micro-cantilever;

3) utilize voice coil motor to drive horizontal shift platform to move reciprocatingly or utilize stepper motor to drive horizontal rotary pedestal to rotate, make each plane transmission mirror all pass through laser instrument under, the plane transmission mirror arranging by different angle makes laser beam that laser instrument is launched after transmission, be irradiated to the free end of corresponding micro-cantilever, thereby under the prerequisite of not mobile laser instrument and solvent cell, complete the scanning to all micro-cantilevers.

And the hot spot that scanning micro-cantilever free end reflects enters computing machine 13 after receiving by Optoelectronic Position Sensitive Detector 11 and processes after data collecting card 12, receive each micro-cantilever deflection of beam signal in micro-cantilever array by Optoelectronic Position Sensitive Detector sequential, thereby monitor the real time reaction information occurring on each micro-cantilever.Above-described Optoelectronic Position Sensitive Detector, capture card and computing machine are processed and are all adopted prior art well known in the art.

Embodiment 4

The micro-cantilever array sensor that detects 8 micro-cantilevers taking scanning is as example, spacing (the d)=0.25mm of micro-cantilever, 8, the plane transmission mirror of selection thickness (h)=3mm, refractive index (n)=1.5, then pressed line spread on horizontal shift platform, then calculated according to following system of equations:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

The sharp angle that obtains the 1st to the 8th plane transmission mirror and surface level formation is followed successively by: 36.7923 °, 26.4182 °, 14.0033 °, 0 °, 14.0033 °, 26.4182 °, 36.7923 °, 45.4221 °.When scanning, adjust the also initial position of fixed laser by moveable platform 1, adjust the initial position of horizontal shift platform simultaneously, make the 4th plane transmission mirror in plane transmission mirror group be positioned at laser instrument under, adjust the initial position of solvent cell, make in micro-cantilever array sensor the 4th micro-cantilever under laser instrument;

Then open laser instrument, the laser beam of laser instrument transmitting is radiated at the free end of the 4th micro-cantilever after the 4th plane transmission mirror transmission, thereby completes the free-ended scanning of micro-cantilever; The laser beam of the 4th micro-cantilever reflection enters computing machine 13 after receiving by Optoelectronic Position Sensitive Detector 11 and carries out analyzing and processing after data collecting card 12;

Then drive horizontal shift platform to move right by voice coil motor, the 3rd plane transmission mirror, the 2nd plane transmission mirror, the 1st plane transmission mirror pass through successively laser instrument under, complete respectively the 3rd micro-cantilever free end, the 2nd micro-cantilever free end, the free-ended scanning of the 1st micro-cantilever, the laser beam of the 3rd micro-cantilever, the 2nd micro-cantilever, the 1st micro-cantilever reflection enters computing machine 13 after receiving by Optoelectronic Position Sensitive Detector 11 and carries out analyzing and processing after data collecting card 12.

When the 1st plane transmission mirror is after under laser instrument, voice coil motor drives horizontal shift platform to be moved to the left, the 1st plane transmission mirror, the 2nd plane transmission mirror, the 3rd plane transmission mirror ... the 8th plane transmission mirror pass through successively laser instrument under, complete respectively the 1st micro-cantilever free end, the 2nd micro-cantilever free end, the 3rd micro-cantilever free end ... the free-ended scanning of the 8th micro-cantilever, the 1st micro-cantilever free end, the 2nd micro-cantilever free end, the 3rd micro-cantilever free end ... the laser beam of the 8th micro-cantilever free end reflection enters computing machine 13 after receiving by Optoelectronic Position Sensitive Detector 11 and carries out analyzing and processing after data collecting card 12.

When the 8th plane transmission mirror is after under laser instrument, voice coil motor drives horizontal shift platform to move right again, and so forth, completes the quick Multiple-Scan to each micro-cantilever.

Claims (9)

1. a micro-cantilever deflection and scanning system for the micro-cantilever array sensor based on multi-angle plane transmission mirror, is characterized in that comprising:

One for the laser instrument of Emission Lasers bundle vertically downward;

One is installed in the plane transmission mirror group being arranged in a linear in horizontal shift platform side front, described plane transmission mirror group is by the 1st plane transmission mirror, the 2nd plane transmission mirror ... form with N plane transmission mirror, described N equates with the micro-cantilever quantity M on sensor micro-cantilever array to be measured, and described plane transmission mirror is corresponding one by one with micro-cantilever;

In the time that M is even number, described plane transmission mirror group plane transmission mirror is and is horizontally disposed with; From plane transmission mirror is left and being obliquely installed that surface level angle increases progressively; From

plane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror vergence direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and surface level form meets following system of equations:

In the time that M is odd number, described plane transmission mirror group

plane transmission mirror is and is horizontally disposed with; From

plane transmission mirror is being obliquely installed that angle increases progressively left successively; From

plane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror vergence direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and surface level form meets following system of equations:

In above formula, α (N) represents the sharp angle that N plane transmission mirror and surface level form, and the laser beam irradiation that β (N) launches for laser instrument is to the emergence angle after N plane transmission mirror; N is the refractive index of plane transmission mirror; H is the thickness of plane transmission mirror; M is the quantity of micro-cantilever to be measured; N is plane transmission mirror sequential bits; D is the spacing of micro-cantilever to be measured.

2. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 1, is characterized in that: described in the plane transmission mirror group that is arranged in a linear replace with the plane transmission mirror group that is circumferential arrangement centered by the rotating shaft of stepper motor.

3. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 2, it is characterized in that: described plane transmission mirror group front arranges horizontal rotary pedestal, horizontal rotary pedestal is round-meshed shadow shield, circular hole respectively correspondence is positioned at each plane transmission mirror dead ahead, circular hole size makes laser instrument can be irradiated to plane transmission mirror, after plane transmission mirror, can realize the scanning to micro-beam.

4. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 3, is characterized in that: described horizontal rotary pedestal is connected with the rotation axis of stepper motor.

5. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 1 and 2, it is characterized in that: described laser instrument is semiconductor laser, LASER Light Source is the monochromatic source within the scope of 632nm-780nm.

6. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 1 and 2, it is characterized in that: described micro-cantilever array is placed on the matrix grain-clamping table in solvent cell, solvent cell is by the turnover of induction pipe and outlet control solvent; Described solvent cell top is provided with transparent glass window.

7. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 6, is characterized in that: the table top of described matrix grain-clamping table and surface level form the inclination angle within the scope of 00-100.

8. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 6, is characterized in that: described solvent cell bottom is provided with the thermostat for controlling solvent temperature.

9. a scan method for the micro-cantilever deflection and scanning system of claim 1 or a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror claimed in claim 2, is characterized in that comprising the steps:

1) micro-cantilever array sensor to be measured is placed on the matrix grain-clamping table in solvent cell, matrix grain-clamping table makes micro-cantilever array be vergence direction arrangement, described solvent cell is airtight, and top is provided with transparent glass window, and solvent cell is by the turnover of induction pipe and outlet control solvent;

2) adjust the also initial position of fixed laser, adjust the initial position of horizontal shift platform or horizontal rotary pedestal simultaneously, make unique horizontally disposed plane transmission mirror in plane transmission mirror group be positioned at laser instrument under, adjust the initial position of solvent cell, make in micro-cantilever array sensor micro-cantilever corresponding to described unique horizontally disposed plane transmission mirror under laser instrument, thereby make the laser beam of laser instrument be radiated at the free end of this micro-cantilever after the transmission of plane transmission mirror, thereby complete the free-ended scanning of this micro-cantilever;

3) utilize voice coil motor to drive horizontal shift platform to move reciprocatingly or utilize stepper motor to drive horizontal rotary pedestal to rotate, make each plane transmission mirror all pass through laser instrument under, the plane transmission mirror arranging by different angle makes laser beam that laser instrument is launched after transmission, be irradiated to the free end of corresponding micro-cantilever, thereby under the prerequisite of not mobile laser instrument and solvent cell, complete the scanning to all micro-cantilevers.

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