CN105870105B - Array substrate and preparation method thereof, display panel and display device - Google Patents

Array substrate and preparation method thereof, display panel and display device Download PDF

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Publication number
CN105870105B
CN105870105B CN201610212761.2A CN201610212761A CN105870105B CN 105870105 B CN105870105 B CN 105870105B CN 201610212761 A CN201610212761 A CN 201610212761A CN 105870105 B CN105870105 B CN 105870105B
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signal wire
array substrate
grid
transistor
line
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CN105870105A (en
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刘英明
董学
薛海林
陈小川
王海生
丁小梁
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BOE Technology Group Co Ltd
Beijing BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Beijing BOE Optoelectronics Technology Co Ltd
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Abstract

The invention discloses a kind of array substrate and preparation method thereof, display panel and display devices, belong to display field.Array substrate includes:Multiple pixel units read signal wire, first grid signal wire, second grid signal wire, data line and shielded signal line, each pixel unit includes three sub-pixel units, each sub-pixel unit includes a display subelement, and at least one pixel unit further includes a personal recognition subelement;Shielded signal line is parallel with signal wire is read, and one end ground connection other end of shielded signal line is connected with the input terminal of first grid signal wire;Display subelement is connected with first grid signal wire and data line, and personal recognition unit is connected with second grid signal wire and reading signal wire.The present invention reduces the interference that gate line is generated to reading signal wire, avoids generating parasitic capacitance on reading signal wire, improve personal recognition effect by increasing shielded signal line.

Description

Array substrate and preparation method thereof, display panel and display device
Technical field
The present invention relates to display technology field, more particularly to a kind of array substrate and preparation method thereof, display panel and aobvious Showing device.
Background technology
With the development of information technology, information security becomes particularly important.In the modern life, use for convenience, more Carrying out user more can be by information storages such as bank card information, associated person information, mailbox messages in the display.In order to preferably It protects privacy, user to wish display while realizing display function, also there is identity recognition function.Personal recognition is as one Emerging biological identification technology, because have many advantages, such as to sample simply, image information enrich, be not easy to forge, little interference by environment, It has been widely used in the display.
However, being limited to the factors such as the volume of display, preparation process, subelement is shown in pixel unit for opening Gate line is scanned always line by line, when reading signal for carrying out the reading signal wire of personal recognition, grid signal Line can have an impact to reading signal wire, cause to read jitter, parasitic capacitance is generated, to greatly affect palmmprint Recognition effect.Therefore, interference of the gate line to reading signal wire how is reduced, becomes those skilled in the art and more pays close attention to The problem of.
Invention content
In order to solve problems in the prior art, an embodiment of the present invention provides a kind of array substrates and preparation method thereof, aobvious Show panel and display device.The technical solution is as follows:
First aspect provides a kind of array substrate, and the array substrate includes:Multiple pixel units, read signal wire, First grid signal wire, second grid signal wire, data line and shielded signal line, each pixel unit include three sub-pixel lists Member, each sub-pixel unit include a display subelement, and at least one pixel unit further includes a personal recognition subelement;
The shielded signal line is parallel with the reading signal wire, one end ground connection other end of the shielded signal line and institute The input terminal for stating first grid signal wire is connected;
The display subelement is connected with the first grid signal wire and the data line, the personal recognition unit with The second grid signal wire is connected with the reading signal wire.
With reference to first aspect, in the first possible realization method of first aspect, the array substrate further includes control Power supply processed, the control power supply are connected with the personal recognition subelement.
With reference to first aspect, in second of possible realization method of first aspect, the quantity for reading signal wire It is identical as the quantity of personal recognition subelement.
With reference to first aspect, in the third possible realization method of first aspect, each pixel unit includes red Sub-pixel unit, green sub-pixels unit and blue subpixels unit.
The third possible realization method with reference to first aspect, in four kinds of possible realization methods of first aspect, The personal recognition subelement is set in the blue subpixels unit of the pixel unit.
The possible realization method of with reference to first aspect the first, in the 5th kind of possible realization method of first aspect In, the personal recognition subelement includes:The first transistor and the second crystal, the first transistor are photistor;
The grid of the first transistor and the first pole are connected with the control power supply, the second pole of the first transistor It is connected with the second transistor;
The grid of the second transistor is connected with the second grid signal wire, the second pole of the second transistor with The reading signal wire is connected.
With reference to first aspect, in the 6th kind of possible realization method of first aspect, the display subelement includes:The Three transistors and pixel electrode;
The grid of the third transistor is connected with the first grid signal wire, the first pole of the third transistor with The data line is connected, and the second pole of the third transistor is connected with the pixel electrode.
Second aspect provides a kind of display panel, and the display panel includes the array base described in above-mentioned first aspect Plate.
The third aspect provides a kind of display device, and the display device includes the display surface described in above-mentioned second aspect Plate and the signal receiving device being connected with the reading signal wire.
In conjunction with the third aspect, in the first possible realization method of the third aspect, the signal receiving device includes At least two amplifiers and a difference engine.
Fourth aspect provides a kind of preparation method of array substrate, and the method is used to prepare above-mentioned first aspect institute The array substrate stated, the method includes:
Form assignment graph on underlay substrate by a patterning processes, the assignment graph include the first metal layer, Source metal, active layer, drain metal layer and pixel electrode layer;
Second metal layer figure is formed on being formed with the assignment graph;
Wherein, the first metal layer is the corresponding film layer of the shielded signal line, and the second metal layer is the reading Take the corresponding film layer of signal wire.
In conjunction with fourth aspect, in the first possible realization method of fourth aspect, the array substrate includes:
It is sequentially formed in gate metal layer on the underlay substrate, gate insulating layer, the assignment graph, the first insulation Layer, the second metal layer, second insulating layer and touch control electrode layer.
The advantageous effect that technical solution provided in an embodiment of the present invention is brought is:
The present invention reduces the interference that gate line is generated to reading signal wire, avoids by increasing shielded signal line It reads and generates parasitic capacitance on signal wire, improve personal recognition effect.
Description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for For those of ordinary skill in the art, without creative efforts, other are can also be obtained according to these attached drawings Attached drawing.
Fig. 1 is a kind of schematic diagram of palm palmmprint provided by one embodiment of the present invention;
Fig. 2 is the schematic diagram for the personal recognition principle that another embodiment of the present invention provides;
Fig. 3 is a kind of structural schematic diagram of array substrate provided by one embodiment of the present invention;
Fig. 4 is the film layer structure schematic diagram for the existing array substrate that another embodiment of the present invention provides;
Fig. 5 is a kind of flow chart of the preparation method for array substrate that another embodiment of the present invention provides;
Fig. 6 is the film layer structure schematic diagram for the array substrate that another embodiment of the present invention provides.
Reference numeral is:31, first grid signal wire;32, second grid signal wire;33, subelement is shown;34, palmmprint Identify subelement;35, data line;36, signal wire is read;37, shielded signal line;38, power supply is controlled;39, signal receiving device; 331, third transistor;332, pixel electrode;341, the first transistor;342, second transistor;391, amplifier;392, difference Device;
41, underlay substrate;42, gate metal layer;43, gate insulating layer;412, the first metal layer;45, source metal; 46, active layer;47, drain metal layer;48, pixel electrode layer;49, the first insulating layer;410, second insulating layer;411, touch-control electricity Pole layer;44, second metal layer.
Specific implementation mode
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to embodiment party of the present invention Formula is described in further detail.
With the high speed development of information technology and network technology, information security shows unprecedented importance.Biology Identification technology is had been more and more widely used with its distinctive stability, uniqueness and convenience.Personal recognition is as a kind of Novel biological identification technology, because having many advantages, such as that sampling is simple, image information is enriched, being easy to apply, being not easy to forge by state The extensive concern of inside and outside researcher.
The palm print characteristics of palm are relatively abundanter, may include main line, gauffer, mastoid process line, minutiae point and triangle referring to Fig. 1 Point etc..Main line is most strong several most thick lines on palm, has three main clues on most of palms, is referred to as lifeline, sense Feelings line and wisdom line;Gauffer in general can be thinner than main line, shallow, and the shape of gauffer is very irregular;Mastoid process line is distributed in whole A palm can be used as characteristic value as fingerprint;Triangulation point is the central point for the Delta Region that mastoid process line is formed on palm, These Delta Regions are located at the position for referring to the close wrist in below root and middle finger lower section.Main line and gauffer are the important spies of palmmprint Sign, can extract from low resolution, lower quality image;Triangulation point and minutiae point are only in high-resolution, high quality It is extracted in image.
Personal recognition principle is:Refraction based on light and principle of reflection, when the palm of the palm pressing with palm print identification function When the display screen of line identification device, built-in light source is irradiated to valley line and crestal line on palm palmmprint, due to valley line and crestal line It is different with the light intensity reflected back to reflect wide-angle, projects it onto the electricity that will produce varying strength on photistor Stream, the position of valley line and crestal line can be identified by the signal receiving device of rear end.Specifically, when palm contacts show screen When, the crestal line in palmmprint is more easily accessible to display screen, and when built-in light source is irradiated to the crestal line in palm palmmprint, surface is complete Reflection is corrupted such that the light reflected back dies down, and when light source is irradiated to the valley line of palm, light is totally reflected back.
Referring to Fig. 2, personal recognition process can be divided into two stages, and the first stage is registration phase, and second stage is identification Stage.
In registration phase, when user's palm, which presses, shows screen, personal recognition device obtains the palm pressing letter of user Number, and signal is pressed according to the palm of user, it determines palm pressing area, that is to say palm area, out of palm pressing area Identify the palm print information of palm, which includes the information of the valley and a ridge of palmmprint, is then carried out to the palm print information of identification The palm print information of identification is such as converted to digital signal by analog signal, then digital signal is amplified processing etc. by pretreatment, Pass through in pretreated palm print information later, extracts the palm print characteristics of palm, and then according to the palm print characteristics of extraction, build data Library.
In cognitive phase, when the pressing of the palm of user to be identified shows screen, personal recognition device obtains use to be identified The palm at family presses signal, and presses signal according to palm, determines the palm pressing area of user to be identified, that is to say to be identified The palm area of user identifies the palm print information of palm out of palm pressing area, is pre-processed to the palm palmmprint, then From pretreated palm palmmprint, palm print characteristics are extracted, will be stored in the palm print characteristics of extraction and the database that builds in advance Palm print characteristics be compared, obtain recognition result.
Based on the personal recognition process described in above-mentioned palm print information shown in FIG. 1 and Fig. 2, in order to avoid first grid signal The interference that line generates reading signal wire improves personal recognition precision to read, and the embodiment of the present invention is based in cell and holds production certainly Product provide a kind of array substrate, and referring to Fig. 3, which includes:Multiple pixel units read signal wire 36, the first grid Pole signal wire 31, second grid signal wire 32, data line 35, shielded signal line 37.
Wherein, each pixel unit includes three sub-pixel units, and each sub-pixel unit includes a display subelement 33.For considering for aperture opening ratio etc. is not take up, at least one pixel unit further includes a personal recognition subelement 34, example Such as, a personal recognition subelement 34 can be set in each pixel unit, multiple pixel unit settings one can also be spaced A personal recognition subelement 34.
It referring to Fig. 3, is shown in unit 33 and is connected with first grid signal wire 31 and data line 35, for believing in first grid Display subelement 33 is turned on and off under the control of number line 31, when showing that subelement 33 is opened, 35 input data of data line letter Number.Personal recognition unit 34 is connected with second grid signal wire 32 and reading signal wire 36, is used under control of a control voltage, Palmmprint signal is acquired, and under the control of second grid signal wire 32, collected palmmprint signal is sent to reading Signal wire 36.Shielded signal line 37 is parallel with signal wire 36 is read, and shielded signal line 37 is set to and reads signal wire 37 vertically The rear of paper.Interference, one end of shielded signal line 37 are generated in order to reduce first grid signal wire 31 to reading signal wire 36 Ground connection, the other end are connected with the input terminal of first grid signal wire 31.Using this kind of design method, first grid signal wire 31 Voltage is always 0V, and when first grid signal wire progressively scans sub- display unit 33, first grid signal wire 31 is believed reading The influence of number line 36 is shielded so that the palmmprint signal of reading is more acurrate.
Referring to Fig. 3, array substrate further includes control power supply 38, and control power supply 38 is connected with personal recognition subelement 34, uses In power voltage supply in order to control.It is used to obtain palmmprint signal by second grid signal wire 32 due to reading signal wire 36, it reads Take the quantity of signal wire 36 should be identical as the quantity of personal recognition subelement 34.
In another embodiment of the present invention, each pixel unit includes red sub-pixel unit, green sub-pixels list Member and blue subpixels unit.In view of in feux rouges, blue and green light, blue light be affected by the external environment it is smaller, usually by palmmprint Identification subelement 34 is set in blue subpixels unit.
Referring to Fig. 3, personal recognition subelement 34 includes the first transistor 341 and second transistor 342.Wherein, first is brilliant Body pipe 341 is photistor, can convert different light intensity to different electric currents, the operation principle based on photistor, When controlling the voltage difference of control source, the first transistor 341 can distinguish the valley line in palmmprint according to different curent changes And crestal line.The grid of the first transistor 341 and the first pole are connected with control power supply 38, and the second pole of the first transistor is brilliant with second Body pipe 342 is connected;The grid of second transistor 342 is connected with second grid signal wire 32.
Referring to Fig. 3, display subelement 33 includes third transistor 331 and pixel electrode 332.Wherein, third transistor 331 Grid be connected with first grid signal wire 31, the first pole of third transistor 331 is connected with data line 35, third transistor 331 the second pole is connected with pixel electrode 332.The pixel electrode 332 and public electrode for showing subelement 33 constitute a capacitance, And the public electrode is connected with common voltage terminal.
It should be noted that transistor involved in the present embodiment can be P-type transistor, or N-type is brilliant Body pipe, in the whole embodiments of the present invention by taking transistor is N-type transistor as an example.For the involved crystal of the present invention Pipe, first extremely can be source electrode, and second extremely can be drain electrode, alternatively, first extremely can be drain electrode, the second extremely source electrode, this reality It applies example and specific limit is not made to the first pole of transistor and the second pole.
In addition, the present invention is based on dual source from capacitance type, first grid signal wire 31 and second grid signal wire 32 Dual source lines may be used.In the personal recognition stage, touch control electrode line can be used as and read signal wire;In touch-control rank Section, reading signal wire can use as touch control electrode line.
Array substrate provided in an embodiment of the present invention reduces gate line to reading by increasing shielded signal line The interference that signal wire generates avoids generating parasitic capacitance on reading signal wire, improves personal recognition effect.
An embodiment of the present invention provides a kind of display panel, which includes above-mentioned array substrate shown in Fig. 3.
Display panel provided in an embodiment of the present invention reduces gate line to reading by increasing shielded signal line The interference that signal wire generates avoids generating parasitic capacitance on reading signal wire, improves personal recognition effect.
An embodiment of the present invention provides a kind of display device, which includes the display surface described in above-described embodiment Plate.Theoretically, as long as the first transistor 341 of array substrate is sensitive enough, so that it may to tell the valley line and crestal line in palmmprint Absolute position, but in practical applications, the size of current that the electric current and crestal line that valley line generates generate is difficult to distinguish, in order to carry High accuracy of identification, display device further include a signal receiving device 39 being connected with reading signal wire 36.
The signal receiving device 39 includes at least two amplifiers 391 and a difference engine 392.Each amplifier 391 Input terminal connects a reading signal wire 36, and output end connects difference engine 392, the palmmprint letter read for that will read signal wire 36 Number amplification after be input to difference engine 392;Difference engine 392 is used to export the difference of at least two coupled amplifiers 391 Signal.Signal wire is correspondingly read by selection to carry out being closed access amplifier, then the exportable paddy after difference amplifier is handled Ridge difference.For example, when 34 corresponding reading signal wire 36 of two neighboring personal recognition subelement is respectively connected to two amplify After device 391, be compared by difference engine 392, can obtain leakage current between two adjacent personal recognition subelements it Between difference, and then determine the phase position between valley line and crestal line.Preferably, when by any personal recognition subelement pair It, can be with after the corresponding reading signal wire of the multiple personal recognition subelements of reading signal wire and surrounding answered is connected to amplifier 391 Compare the leakage current difference between the personal recognition subelement and all personal recognition subelements of surrounding.
In practical applications, which can be smart mobile phone, tablet computer, smart television, desktop computer, number Any product or component with display function such as photo frame machine navigator.
Display device provided in an embodiment of the present invention reduces gate line to reading by increasing shielded signal line The interference that signal wire generates avoids generating parasitic capacitance on reading signal wire, improves personal recognition effect.
Referring to Fig. 4, it illustrates the film layer structure schematic diagrames of existing array substrate, as shown in Figure 4, are used as reading signal wire 36 second metal layer 44 is arranged with source metal 45,47 same layer of drain metal layer, and second metal layer 44 is directly arranged at It is inevitable when the scanning of first grid signal wire 31 being set in gate metal layer shows subelement on gate metal layer 42 Interference can be generated to reading signal wire 36.In order to solve this problem, referring to Fig. 5, an embodiment of the present invention provides a kind of arrays The preparation method of substrate, Fig. 5 are formed by film layer structure and can be found in Fig. 6, Fig. 6 be shown in sectional view be along the AA` in Fig. 3 What cutting obtained, method flow provided in this embodiment includes:
501, gate metal layer is formed on underlay substrate.
5011, underlay substrate is cleaned using standard method.
5012, gate metal layer film is deposited on underlay substrate 41 using sputter (sputtering) equipment.
Wherein, gate metal layer film can be by the metals such as Al, Cr, W, Ti, Ta, Mo, Cu or Al, Cr, W, Ti, Ta, The metallic film that at least two metal such as Mo, Cu is constituted can also be the multiple layer film being made of multiple metal layer thin films, and The thickness range of the gate metal layer film is 200~1000nm.
5013, gate metal layer 42 is formed on underlay substrate 41 using patterning processes.
The figure for defining gate metal layer on underlay substrate 41 by photoetching process carries out the underlay substrate wet It carves, stripping photoresist forms gate metal layer on underlay substrate 41, which includes first grid signal wire 31 With second grid signal wire 32.
502, gate insulating layer is formed on the underlay substrate for completing step 501.
Using PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma enhanced chemical Vapour deposition process) equipment deposits one layer of grid insulating film on gate metal layer pattern 42, and which can be SiO2、 Si3N4、SiOxNyEtc. compositions single thin film or plural layers, and the thickness of the film be 5nm~300nm, pass through patterning processes Form gate insulating layer 42.
503, assignment graph is formed on the underlay substrate for completing step 503 by a patterning processes, the assignment graph Including the first metal layer, source metal, active layer, drain metal layer and pixel electrode layer.
Using a patterning processes, the first metal layer 44, source electrode are formed on the underlay substrate 41 for completing step 503 successively Metal layer 45, active layer 46, drain metal layer 47 and pixel electrode layer 48.Wherein, the first metal layer 412, source metal 45, The making material of drain metal layer 47 is identical, and the first metal layer 412 corresponds to shielded signal line 37.
504, the first insulating layer is formed on the underlay substrate for completing step 503.
Using PECVD device complete step 503 underlay substrate 41 on inorganic material film layer, pass through photoetching process The first layer pattern is defined, by dry etching, stripping photoresist forms the first layer pattern 49 on underlay substrate.
505, second metal layer is formed on the underlay substrate for completing step 504.
In the personal recognition stage, second metal layer 44, which corresponds to, reads signal wire 36;In the touch-control stage, second metal layer 44 Corresponding to touch control electrode line.
506, second insulating layer is formed on the underlay substrate for completing step 505.
Using PECVD device, inorganic material film layer, lithographic definition go out including the second insulation on underlay substrate 41 Layer pattern, by dry etching, stripping photoresist obtains second insulating layer 410.
507, touch control electrode layer is formed on the underlay substrate for completing step 506.
One layer of ITO (Indium Tin Oxide, tin indium oxide) film is formed on the underlay substrate that step 506 obtains, Touch control electrode layer 411 is obtained by patterning processes, touch control electrode layer 411 includes multiple touch-control sub-electrodes.
Method provided in an embodiment of the present invention reduces gate line to reading signal by increasing shielded signal line The interference that line generates avoids generating parasitic capacitance on reading signal wire, improves personal recognition effect.
One of ordinary skill in the art will appreciate that realizing that all or part of step of above-described embodiment can pass through hardware It completes, relevant hardware can also be instructed to complete by program, the program can be stored in a kind of computer-readable In storage medium, storage medium mentioned above can be read-only memory, disk or CD etc..
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all the present invention spirit and Within principle, any modification, equivalent replacement, improvement and so on should all be included in the protection scope of the present invention.

Claims (12)

1. a kind of array substrate, which is characterized in that the array substrate includes:Multiple pixel units read signal wire, the first grid Pole signal wire, second grid signal wire, data line and shielded signal line, each pixel unit include three sub-pixel units, often A sub-pixel unit includes a display subelement, and at least one pixel unit further includes a personal recognition subelement;
The shielded signal line is parallel with the reading signal wire, one end of shielded signal line ground connection other end and described the The input terminal of one gate line is connected;
The display subelement is connected with the first grid signal wire and the data line, the personal recognition unit with it is described Second grid signal wire is connected with the reading signal wire.
2. array substrate according to claim 1, which is characterized in that the array substrate further includes control power supply, described Control power supply is connected with the personal recognition subelement.
3. array substrate according to claim 1, which is characterized in that the quantity for reading signal wire is known with the palmmprint The quantity of small pin for the case unit is identical.
4. array substrate according to claim 1, which is characterized in that each pixel unit include red sub-pixel unit, Green sub-pixels unit and blue subpixels unit.
5. array substrate according to claim 4, which is characterized in that the personal recognition subelement is set to the pixel list In the blue subpixels unit of member.
6. array substrate according to claim 2, which is characterized in that the personal recognition subelement includes:First crystal Pipe and the second crystal, the first transistor are photistor;
The grid of the first transistor and the first pole are connected with the control power supply, the second pole of the first transistor and institute Second transistor is stated to be connected;
The grid of the second transistor is connected with the second grid signal wire, the second pole of the second transistor with it is described Signal wire is read to be connected.
7. array substrate according to claim 1, which is characterized in that the display subelement includes:Third transistor and Pixel electrode;
The grid of the third transistor is connected with the first grid signal wire, the first pole of the third transistor with it is described Data line is connected, and the second pole of the third transistor is connected with the pixel electrode.
8. a kind of display panel, which is characterized in that the display panel includes any one of claim 1 to 7 claim institute The array substrate stated.
9. a kind of display device, which is characterized in that the display device include display panel according to any one of claims 8 and with it is described Read the connected signal receiving device of signal wire.
10. display device according to claim 9, which is characterized in that the signal receiving device is put including at least two Big device and a difference engine.
11. a kind of preparation method of array substrate, which is characterized in that it is any that the method is used to prepare the claims 1 to 7 The array substrate, the method includes:
Assignment graph is formed on underlay substrate by a patterning processes, the assignment graph includes the first metal layer, source electrode Metal layer, active layer, drain metal layer and pixel electrode layer;
Second metal layer figure is formed on being formed with the assignment graph;
Wherein, the first metal layer is the corresponding film layer of the shielded signal line, and the second metal layer is believed for the reading Number corresponding film layer of line.
12. according to the method for claim 11, which is characterized in that the array substrate includes:
Be sequentially formed in gate metal layer on the underlay substrate, gate insulating layer, the assignment graph, the first insulating layer, The second metal layer, second insulating layer and touch control electrode layer.
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