CN105865915B - A kind of soft material mechanical property measuring device and method - Google Patents
A kind of soft material mechanical property measuring device and method Download PDFInfo
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- CN105865915B CN105865915B CN201610225141.2A CN201610225141A CN105865915B CN 105865915 B CN105865915 B CN 105865915B CN 201610225141 A CN201610225141 A CN 201610225141A CN 105865915 B CN105865915 B CN 105865915B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
- G01N3/38—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces generated by electromagnetic means
Abstract
The invention discloses a kind of soft material mechanical property measuring device and methods, it includes voice coil motor, controller, computer, translation stage and CCD camera, voice coil motor is installed on rack, it is controlled by controller, it includes set on its internal grid ruler, force snesor and main shaft, controller is connected with computer, it is moved in a straight line along the vertical direction according to the order-driven voice coil motor that computer is sent, and the displacement for the main shaft that grating scale and force snesor obtain and load data are sent to computer, to obtain the load-displacement relationship of soft material to be measured；Translation stage is set to the lower section of voice coil motor, is used to place soft material, the side of soft material is provided with CCD camera, which is used to shoot the deformation pattern of soft material pressurization front and back, and deformation pattern is transmitted in computer；This method is measured using the measuring device.Structure of the invention is compact, multiple functional, has many advantages, such as that measurement accuracy is high, measurement range is wide.
Description
Technical field
The invention belongs to soft material Mechanics Performance Testing fields, measure more particularly, to a kind of soft material mechanical property
Device and method.
Background technique
Soft material is the special substance of one kind between solid and perfect fluid, usually by macromolecular or micel
Cluster composition, it has two distinguishing features of flexibility and complexity.Soft material mainly includes rubber, biological tissue and liquid crystal, it
Daily life with us contacts closely, compares with general engineering material, and soft material has very unique excellent
Characteristic, if rubber have many advantages, such as it is corrosion-resistant, flexible, wear-resisting, insulation insulation, aerospace, biomaterial, Industrial Engineering with
The fields such as medicine, which have, is widely applied background.Therefore, extremely important to the test of soft material, after knowing the performance of soft material,
Can sit in the right seat, which makes it put into production, plays application value.
The mechanical property of soft material is complex, such as very sensitive to extraneous small effect, to soft substance apply compared with
Side crops industry can generate moderate finite deformation, i.e., weak influence causes to change by force, and the deformation response of soft substance has nonlinear spy
Point, including geometrical non-linearity and physical nonlinearity, in addition, Contact Boundary of the soft substance in contact problems be also it is nonlinear,
So the test of soft material mechanical property is extremely complex.
There are some research approaches for the Mechanics Performance Testing of soft material in the prior art, such as
Multipurpose in-situ micro-scale mechanics performance test methods under scanning electron microscope disclosed in CN201210319723.9 use voice coil electric
Machine avoids vibration caused by stepper motor driving method, can carry out original position stretching, compression, bending and fatigue mechanics performance and survey
Examination.However the data that this method obtains power need an additional force snesor, and need to obtain fatigue crack situation by scanning electron microscope,
Sliding block and sliding slot need to be designed for the sample of different length simultaneously, structure is complicated, inconvenient.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of measurements of soft material mechanical property to fill
It sets and method, load and the acquisition of data is realized by voice coil motor, and send order-driven voice coil electricity using computer
Machine movement contacts laboratory sample by the main shaft of voice coil motor, applies certain load to sample, obtain displacement and charge number
According to, and digital picture is combined to make further measurement to soft material, material more fully mechanical property parameters are obtained, there is measurement essence
The advantages that degree is high, and measurement range is wide, the measurement of a variety of mechanical properties suitable for a variety of soft materials.
To achieve the above object, according to one aspect of the present invention, the invention proposes a kind of surveys of soft material mechanical property
Measure device, which is characterized in that the measuring device includes voice coil motor, controller, computer, translation stage and CCD camera,
In:
The voice coil motor is installed on rack, is controlled by controller comprising set on its internal grid ruler, force snesor
And main shaft, the controller are connected with computer, are done along the vertical direction according to the order-driven voice coil motor that computer is sent
Linear motion, and the displacement for the main shaft that grating scale and force snesor obtain and load data are sent to computer, with obtain to
Survey the load-displacement relationship of soft material: S=f (F), wherein S is displacement of the main shaft relative to workpiece origin, and F is main shaft feedback
Power；
The translation stage is set to the lower section of voice coil motor, thereon for placing soft material to be measured, the one of soft material to be measured
Side is provided with CCD camera, which is used to shoot the deformation pattern of soft material pressurization front and back, and deformation pattern is passed
It transports in computer, obtains the deformation data of soft material.
As it is further preferred that the workpiece origin determines in the following way: making the main shaft of voice coil motor with high speed
Degree, low strength mode close to the surface of soft material to be measured, while location error is persistently monitored, until location error reaches setting
Value, remains unchanged the position of main shaft, using the point as workpiece origin.
As it is further preferred that the speed of the high speed is specially 8000 μm/s, low strength is specially to be lower than 10 public affairs
Gram gentle contact power.
As it is further preferred that the setting value is 50 μm.
As it is further preferred that the controller is connected with power conversion module, the power conversion module and computer
Directly by 220V Alternating Current Power Supply.
As it is further preferred that the rack includes pedestal and the vertical plate that is vertically mounted on pedestal；The control
Device and power conversion module are installed on the side of vertical plate；The voice coil motor and translation stage are installed on the other side of vertical plate.
As it is further preferred that being provided with reinforcing rib between the pedestal and vertical plate.
It is another aspect of this invention to provide that providing a kind of soft material mechanical property measurement method, the dress is utilized
It sets and measures comprising:
Computer send program instruction to controller, the main shaft of voice coil motor under the driving of controller along vertical direction
It moves in a straight line, voice coil motor is realized in a manner of soft landing to be contacted with the low force of soft material to be measured；When main shaft and softwood to be measured
When the surface of material just contacts, it is set as workpiece origin, main shaft continues to move later, and soft material produces under the load effect of main shaft
Raw deformation；The main shaft displacement and load data that grating scale and force snesor inside voice coil motor obtain are sent to computer, to
The CCD camera for surveying soft material side takes the photograph the deformation pattern of soft material pressurization front and back, and deformation pattern is transmitted in computer
To obtain deformation data；By being displaced with load data and combining the deformation data of deformation pattern, soft material is quantitatively calculated
Mechanical property parameters.
As it is further preferred that the mechanical property parameters of the soft material include elasticity modulus, hysteresis loop performance parameter
With fatigue behaviour parameter.
As it is further preferred that the elasticity modulus calculation formula is as follows:
Wherein, P is to apply load, L0For the overall length of soft material, Δ L is the deflection of soft material, and Δ A is soft material measurement
Cross-sectional area in the process.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, mainly have below
Technological merit:
1. the main shaft of voice coil motor of the invention moves in a straight line along vertical direction under the driving of controller, utilization is soft
The realization of landing function is contacted with the low force of soft material sample, while the error of sustainable monitoring position, and volume can easily be arranged
Journey zero point.
2. actuator of the invention can carry out the control of accurately position, strength, speed and acceleration, by controller
It directly drives, has very high accuracy and repeatability, it can be achieved that freely turning between power, speed and position Three models
It changes.
3. the present invention measures the deformation data of soft material under small strain by CCD camera, and feeds back with voice coil motor
Load-displacement data combine, can fast and accurately obtain material more fully mechanical property parameters.Soft material bullet can be achieved
The measurement of a variety of mechanical properties such as property modulus, mechanical property hysteresis loop, fatigue behaviour.
4. the compact overall structure of measuring device of the present invention, multiple functional, measurement accuracy is high, and measurement range is wide, is suitable for
The measurement of a variety of mechanical properties of a variety of soft materials.
Detailed description of the invention
Fig. 1 is the integral layout figure of the soft material mechanical property measuring device of the embodiment of the present invention；
Fig. 2 (a) and (b) are the perspective views of the soft material mechanical property measuring device of the embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
As shown in Figure 1, a kind of soft material mechanical property measuring device provided in an embodiment of the present invention, mainly includes voice coil
Motor 1, controller 2, computer 6, translation stage 4 and CCD camera 8, the present invention is mainly using voice coil motor as actuator, directly
It connects using the force snesor feedback force data built in voice coil motor, built-in grid ruler feeds back displacement data, thus transports in actuator
Displacement-load data while dynamic during Real-time Feedback soft material tension and compression deformation, pass through the soft landing function of voice coil motor
Workpiece origin is set to adapt to the soft material of different height.Specifically, measuring device overall dimensions be 243mm × 260mm ×
360mm。
The all parts in measuring device are described in detail separately below.
Voice coil motor 1 is installed on rack 5 as the actuator of this measuring device comprising the light internal set on it
Grid ruler, force snesor and main shaft, the grating scale are used to feed back the position of voice coil electric machine main shaft, i.e., offer location information, the power pass
Sensor is used to feed back the data of loading axis in loading procedure (i.e. main shaft) power, i.e., offer force data, the main shaft are used for soft material
It is loaded.
Voice coil motor 1 is controlled by controller 2, and the main shaft which is used to control voice coil motor moves along a straight line, and
By changing the size of main shaft displacement to change the load being applied to above soft material.Specifically, actuator voice coil motor 1 can be
It is converted between power, speed and position Three models, i.e., sends force mode instruction to controller 2, actuator main shaft will be with one
The power for determining size travels forward；To 2 transmission speed mode instruction of controller, actuator main shaft by with a certain size speed forward
Movement；Mode position instruction is sent to controller 2, actuator main shaft will be moved to relative position or absolute position.
2 one end of controller connects actuator (voice coil motor), and the other end is connected with computer (PC), and the end PC is by sequencing
Control instruction is sent on controller 2, to control the movement of voice coil motor.When being measured to soft material, according to voice coil electricity
Grid ruler and force snesor inside machine 1 obtain displacement and the load data of main shaft respectively, and the displacement and load data directly pass through
Controller acquisition, and the data of acquisition are sent in computer by controller, computer is divided according to the collected data
Analysis and processing, to obtain the load-displacement relationship f of soft material to be measured:
S=f (F)；
Wherein, S is displacement of the main shaft relative to workpiece origin, and F is the power of main shaft feedback.
Further, workpiece origin (i.e. programming zero) determines in the following way: making the main shaft of voice coil motor 1 with high speed
Degree, low strength mode close to the surface of soft material 7 to be measured, while persistently monitoring location error, i.e. the following error of main shaft, with
Dynamic error is the requirement position of motion of main shaft and the difference of physical location, reached until following error set by location error,
Such as 50 μm, it then remains unchanged the position of main shaft, sets the point as workpiece origin, execute the function after soft landing.Its
In, it is 8000 μm/s that high speed, low strength, which refer specifically to speed, and strength is the gentle contact power lower than 10 g.
More specifically, controller 2 is connected with power conversion module 3, and the power conversion module 3 and computer 6 are by same
Power supply 9 is powered, and specially directly by 220V Alternating Current Power Supply, controller 2 is installed on the same side of rack 5 with power conversion module 3.
The installation of controller 2 and power conversion module 3 only needs to play fixed function, requires without machining accuracy and cooperation, and it is reasonable only to need
It is distributed its installation site and guarantees the compactedness of structure and the integrality of appearance.
Rack 5 is fixed for realizing the installation of other component, and the stability for guaranteeing measurement comprising 51 He of pedestal
The vertical plate 52 being vertically mounted on pedestal 51, controller 2 and power conversion module 3 are set to the side of vertical plate 52, voice coil electricity
Machine 1 and translation stage 4 are set to the other side of vertical plate 52.For the ease of measuring device placement, take and measure when stability,
It need to guarantee that pedestal 51 has biggish contact area with experimental bench, and contact area needs to finish, the bottom surface selection of pedestal 51
The groove for opening a wide 143mm can reduce finishing area.
Since voice coil motor is moved along major axes orientation, it is mounted on the vertical plate of rack, main shaft is along perpendicular
Histogram is mounted on vertical plate to arrangement for example, by fillister head screw, since voice coil motor 1 is mounted on vertical plate, and sound
Circle motor 1 is the main component of soft material Mechanics Performance Testing device, its installation accuracy directly affects the experiment of whole device
Therefore precision finishes on the mounting surface of vertical plate.
It sets that there are four counter sinks for the ease of being fixedly mounted, on the pedestal of rack, this hair is fixed by mounting foot bolt
Bright test device, bolt head bottom surface need to be assembled with countersunk head hole surface, therefore countersunk head hole surface is matching surface, needs finishing
Work.In order to improve the stability of vertical plate, reinforcing rib 53 is connected with by welding procedure between pedestal and vertical plate.
Translation stage 4 is mounted below voice coil motor 1 for placing and moving horizontally test soft material, passes through installation
Foundation bolt is fixed on the pedestal of test device rack 5, and installation accuracy directly affects the experimental precision of whole device, to protect
The accuracy of test is demonstrate,proved, mounting surface will guarantee certain machining accuracy.
The side of soft material to be measured is provided with CCD camera 8, which is used to shoot soft material pressurization front and back
Deformation pattern, and deformation pattern is transmitted in computer 6.Specifically, shooting deformation front and back measured object body surface using video camera
The digital picture in face, that is, use CCD as the deflection in photoelectric sensor monitoring materials in tension and compression deformation process, and this method not only compares
The method of conventional extensometer measurement is more objective, moreover it is possible to real-time measurement soft material whole deformation process, it finally will deformation front and back number
Image carries out the deformation data, such as the width-telescopic amount of material etc. that matching obtains measured object.
Wherein, using deformation front and back digital picture carry out matching obtain measured object deformation data basic principle be
The rectangle that certain pixel size centered on certain unknown point is taken in the reference picture of CCD shooting is reference picture sub-district, is being become
It is scanned in image by certain searching method after shape, and carries out relevant calculation according to selected related coefficient, obtain phase
Relationship number takes the target image sub-district centered on certain point of extreme value, so that it is determined that the displacement of reference picture sub-district.Such as it is optional
Determining the clearest boundary point of measured material profile is unknown point, takes the rectangle of certain pixel size for reference centered on the point
Image subsection after hierarchical loading, matches deformation pattern, and when deformation front and back image subsection is the most similar, related coefficient takes minimum
Value, which is target image sub-district, so that test specimen surface profile each point deflection can be obtained.
The control of measuring device of the invention is broadly divided into two parts, is motion control and data collection and analysis control respectively
System.Motion control is completed by the communication of controller and computer, can when carrying out data communication between computer and controller
To use a variety of programming languages, these orders directly drive voice coil motor movement or are stored in memory by serial communication
In.Obtained load-displacement data in data collection and analysis control mainly acquisition soft material Mechanics Performance Testing experiment are right
Experimental data carries out analytical calculation, obtains the mechanical property parameters of soft material.
Entire measuring device of the invention is controlled by the upper computer software in computer 6, including 1 main shaft of voice coil motor
Movement, acquisition and post-processing of the pattern of the stress deformation curve of generation and experimental data etc..Translation stage 4 is manually controllable,
It is also designed to motor control.
The present invention also provides a kind of soft material mechanical property measurement method, specifically:
Computer 6 sends program instruction to controller 2, and the main shaft of voice coil motor 1 is under the driving of controller 2 along vertical
Direction moves in a straight line, and voice coil motor is realized in a manner of soft landing to be contacted with the low force of soft material 7 to be measured；When main shaft with it is to be measured
When the surface of soft material 7 just contacts, main shaft continues to move after being set as workpiece origin, and soft material is acted in the load of main shaft
Lower generation deformation；Grid ruler and force snesor inside voice coil motor 1 acquire displacement and the load data of main shaft respectively, and will displacement
It is transmitted to computer 6 with load data, the CCD camera 8 of 7 side of soft material to be measured shoots the deformation pattern of soft material pressurization front and back
Picture, and deformation pattern is transmitted in computer 6, to obtain the deformation data of soft material；By displacement and load data and tie
The deformation data of fastening deformation image quantitatively calculates the mechanical property parameters of soft material.
Below by taking soft material elasticity modulus, mechanical property hysteresis loop and fatigue test as an example, further describe of the invention
Test process.
1) elasticity modulus test
Elasticity modulus calculation formula is as follows:
Wherein, P is to apply load, and Δ L is the deflection of soft material, and Δ A is the cross-sectional area in soft material measurement process,
L0For the overall length of soft material.
In test process, the cross-sectional area of soft material is being constantly occurring change, and by digital correlation method, (i.e. CCD is taken the photograph
Camera 8) profile of material after deforming is measured in the hope of cross-sectional area Δ A.Soft material is measured by grating scale built in voice coil motor
Deflection Δ L, the application load p of material can be obtained by the force snesor built in voice coil motor, is fed back in computer
The elasticity modulus performance of you can get it under different distortion soft material.
2) mechanical property lags ring test
Measuring device of the invention can carry out material mechanical performance lag ring test, by drawing stress-strain diagram
Obtain the mechanical property hysteresis loop of soft material.Under cyclic loading, stress strain response is loaded with very big material with dullness
Difference, overall strain width include playing strain amplitude and plastic strain width:
Δ ε=Δ εe+Δεp；
Wherein, Δ ε is overall strain width, Δ εeTo play strain amplitude, Δ εpFor plastic strain width.Complete load cycle institute is right
The load-deformation curve answered surrounds a closed loop line, claims hysteresis loop or hysteresis loop.Pass through monitoring softwood in experimentation
Stress and strain value during material loading and unloading obtains the hysteretic properties of soft material.
3) fatigue test
Measuring device of the invention can carry out the fatigue test of soft material, send control to controller 2 by computer and refer to
It enables, actuator voice coil motor is made to apply alternating load to soft material, obtain intensity of the test material under alternating load, it is as tired
Labor intensity.
Wherein, R is stress ratio, σminFor minimum load, σmaxFor maximum load, pass through the software records R=- in computer
Cycle-index and application magnitude of load when material is damaged when 1, drawing out indicates that applied stress level and standard sample are tired
The S-N curve of relationship, can be obtained the fatigue behaviour of soft material between the labor service life.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. a kind of soft material mechanical property measuring device, which is characterized in that the measuring device includes voice coil motor (1), controller
(2), computer (6), translation stage (4) and CCD camera (8), in which:
The voice coil motor (1) is installed on rack (5), is controlled by controller (2), the voice coil motor is as soft material mechanical property
It is capable of measuring the actuator of device, directly feeds back force data, built-in grating scale feedback displacement number using the force snesor built in it
According to, thus voice coil motor move while Real-time Feedback soft material tension and compression deformation during displacement-load data, the voice coil
Motor includes set on its internal grating scale, force snesor and main shaft；The controller (2) is connected with computer (6), basis
The order-driven voice coil motor (1) that computer (6) is sent moves in a straight line along the vertical direction, and grating scale and force snesor are obtained
The displacement of the main shaft taken and load data are sent to computer (6), to obtain the load-displacement relationship of soft material to be measured (7): S
=f (F), wherein S is displacement of the main shaft relative to workpiece origin, and F is the power of main shaft feedback；
The translation stage (4) is set to the lower section of voice coil motor (1), thereon for placing soft material to be measured (7), in soft material to be measured
(7) side is provided with CCD camera (8), which is used to shoot the deformation pattern of soft material pressurization front and back, and
Deformation pattern is transmitted in computer (6), the deformation data of soft material is obtained, pass through displacement and load data and combines deformation
The deformation data of image quantitatively calculates the mechanical property parameters of soft material.
2. soft material mechanical property measuring device as described in claim 1, which is characterized in that the workpiece origin is using as follows
Mode determines: make the main shaft of voice coil motor (1) at a high speed, the mode of low strength close to soft material to be measured (7) surface, simultaneously
Location error is persistently monitored, until location error arrival setting value, remains unchanged the position of main shaft, is that programming is former with the point
Point.
3. soft material mechanical property measuring device as claimed in claim 2, which is characterized in that the speed of the high speed is specific
For 8000 μm/s, low strength is specially the gentle contact power for being lower than 10 g.
4. soft material mechanical property measuring device as claimed in claim 2, which is characterized in that the setting value is 50 μm.
5. soft material mechanical property measuring device as claimed in claim 4, which is characterized in that the controller (2) and power supply
Conversion module (3) is connected, and the power conversion module (3) and computer (6) are directly by 220V Alternating Current Power Supply.
6. soft material mechanical property measuring device as claimed in claim 5, which is characterized in that the rack (5) includes pedestal
(51) and the vertical plate (52) that is vertically mounted on pedestal (51)；The controller (2) is installed on perpendicular with power conversion module (3)
The side of straight panel (52)；The voice coil motor (1) and translation stage (4) are installed on the other side of vertical plate (52).
7. soft material mechanical property measuring device as claimed in claim 6, which is characterized in that the pedestal (51) and vertical plate
(52) reinforcing rib (53) are provided between.
8. a kind of soft material mechanical property measurement method, which is characterized in that it is using such as the described in any item dresses of claim 1-7
It sets and measures comprising:
Computer (6) send program instruction give controller (2), the main shaft of voice coil motor (1) under the driving of controller (2) along
Vertical direction moves in a straight line, and voice coil motor is realized in a manner of soft landing to be contacted with the low force of soft material to be measured (7)；Work as main shaft
When just contacting with the surface of soft material to be measured (7), it is set as workpiece origin, main shaft continues to move later, and soft material is in main shaft
Load effect lower generate deformation；The main shaft displacement and charge number that the internal grating scale of voice coil motor (1) and force snesor obtain
According to being sent to computer (6), the CCD camera (8) of soft material (7) side to be measured shoots the deformation pattern of soft material pressurization front and back
Picture, and deformation pattern is transmitted in computer (6) to obtain deformation data；Pass through displacement and load data and combines deformation pattern
The deformation data of picture quantitatively calculates the mechanical property parameters of soft material.
9. soft material mechanical property measurement method as claimed in claim 8, which is characterized in that the mechanical property of the soft material
Parameter includes elasticity modulus, hysteresis loop performance parameter and fatigue behaviour parameter.
10. soft material mechanical property measurement method as claimed in claim 9, which is characterized in that the elasticity modulus calculates public
Formula is as follows:
Wherein, P is to apply load, L0For the overall length of soft material, Δ L is the deflection of soft material, and Δ A is soft material measurement process
In cross-sectional area.
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| WO2010090294A1 (en) * | 2009-02-06 | 2010-08-12 | 株式会社ブリヂストン | Device and method for predicting deformation behavior of rubber materials |
| CN102788727A (en) * | 2012-08-31 | 2012-11-21 | 中国科学院力学研究所 | Multipurpose in-situ microscale mechanical property tester under scanning electron microscope |
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| CN105865915A (en) | 2016-08-17 |
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