CN105865359A - Plate bending measuring device and plate bending measuring method thereof - Google Patents
Plate bending measuring device and plate bending measuring method thereof Download PDFInfo
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- CN105865359A CN105865359A CN201510027433.0A CN201510027433A CN105865359A CN 105865359 A CN105865359 A CN 105865359A CN 201510027433 A CN201510027433 A CN 201510027433A CN 105865359 A CN105865359 A CN 105865359A
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Abstract
The invention discloses a plate bending measuring device and a plate bending measuring method thereof. The method is used to measure a to-be-measured object which is placed on a measurement carrier. The method comprises: an image is projected on the to-be-measured object, and the image includes a plurality of reference points; an image capturing module is used to capture a measurement image of the image projected on the to-be-measured object, wherein the measurement image includes a plurality of measurement points corresponding to the reference points; the position of each of the measurement points in the measurement image is used by a conversion function of each corresponding reference point to calculate the height of the to-be-measured object at the position of the corresponding measurement point; and the plate bending situation of the to-be-measured object is compensated according to the height of the to-be-measured object at the position of each corresponding measurement point. Via the above way, the height of the to-be-measured object at each corresponding measurement point can be obtained, optical focal length compensation can be quickly done, and a reference point pattern can be transformed through a digital projection method, so that the local plate bending can be known according to local reference point positions, and corresponding height compensation can be conducted.
Description
Technical field
The present invention relates to a kind of curved measuring equipment of plate, and particularly to a kind of, there is projects images projective module on object under test
The curved measuring equipment of plate of block.
Background technology
Reduce due to component size in recent years, develop much automated high-precision detection equipment, be used for detecting electronic component
Outward appearance, connection, alignment etc. are the most appropriate.Wherein such as automatic tin cream detection machine (Solder Paste Inspection, SPI)
It is widely adopted in the tin cream amount produced on line on accurate measurement substrate, using necessity as printed circuit board (PCB) processing procedure management and control
Instrument.
In actual application, printed circuit board (PCB) is probably due to there is the phenomenon of sheet material bending in external stress or gravity impact.Plate is curved existing
As measuring equipment 200 can be caused to decline in the accuracy measuring object under test, such as, there is Vertical Square because plate is curved because of object under test
Skew upwards, makes to make a reservation on object under test, in the position not optimal capture Jiao's section in image extraction module of measurement, cause acquirement
Image have fuzzy situation to occur.
It is conventionally used to the curved mode of measuring plate and can pass through triangle method for measurement, utilize laser projection determinand swashing by reflection
Light calculates the height of determinand, and then judges that the situation whether object under test has plate curved occurs.But, by the side of laser
Formula can only calculate the height of object under test fraction area, the whole height of object under test to be obtained must by laser by
Sequence is incident upon each part of object under test, and when such practice can cause measuring, efficiency is the poorest, spends the too many time.
Summary of the invention
Therefore, in order to solve above-mentioned problem, the present invention is to be to provide a kind of curved method for measurement of plate and the curved measuring equipment of plate,
For promoting efficiency and the accuracy of the curved situation of plate measuring object under test.
It is an aspect of the invention to provide a kind of curved method for measurement of plate.The curved method for measurement of plate is used for measuring object under test, wherein
Object under test is placed on measurement carrier.The curved method for measurement of plate comprises: being incident upon on object under test by image, wherein image comprises
Multiple reference points；It is projeced into measurement image during object under test by image extraction module acquisition image, wherein measures image and comprise many
Individual measuring point corresponding described reference point respectively；Each measuring point in described measuring point is being measured the position of image by right
The transfer function answering each reference point in described reference point calculates to obtain the object under test position at corresponding described measuring point
The height put；And the curved compensation of plate of corresponding object under test is produced according to the object under test height in the position of corresponding described measuring point
Image, so as to compensating the curved situation of plate of object under test.
According to one embodiment of present invention, before measuring described object under test, the curved method for measurement of described plate comprises: by institute
State image and be incident upon the correcting plate being placed on described measurement carrier；Have multiple at described image extraction module relative to described correcting plate
During calibrated altitude, it is projeced into multiple correcting images during correcting plate by the described image extraction module described image of acquisition, wherein said
Each correcting image in correcting image comprises multiple check point corresponding described reference point respectively；Measure the every of described check point
One check point height in corresponding described correcting image；And according in each correcting image in described correcting image
The position of the check point of corresponding same reference point and highly determine described transfer function.
According to one embodiment of present invention, the curved method for measurement of described plate also comprises: to be measured according on described object under test
Measurement region is chosen from described measurement image in region；The neighbouring N number of effective dose measuring point measuring region is chosen from described measuring point,
Wherein N 3；Corresponding district to be measured is produced according to the described object under test height in the position of corresponding described N number of effective dose measuring point
Oblique/the curved surface in territory compensates image, so as to compensating the deformation situation in region to be measured of described object under test.
According to one embodiment of present invention, described reference point comprises at least one first reference point and multiple second reference point.
The pattern of at least one the first reference point described is different from the pattern of described second reference point.
According to one embodiment of present invention, described image comprises a plurality of First Line, a plurality of second line.Described First Line and institute
State the second line described reference point of formation interlaced with each other.
It is another aspect of the invention to provide a kind of curved measuring equipment of plate, be used for measuring object under test.Plate curved measuring equipment bag
Containing measuring carrier, projection module, image extraction module and processing module.Measure carrier to be used for carrying object under test.Projection module is used
In projects images on object under test, wherein image comprises multiple reference point.Image extraction module is used for capturing image and is projeced into be measured
Measurement image during object, wherein measures image and comprises multiple measuring point corresponding described reference point respectively.Processing module is used for will
Each measuring point in described measuring point is measuring the position of image by each reference point in corresponding described reference point
Transfer function calculate to obtain the object under test height in the position of corresponding described measuring point, and according to object under test in correspondence
The height of the position of described measuring point produces the plate curved compensation image of corresponding object under test, so as to compensating the curved feelings of plate of object under test
Condition.
According to one embodiment of present invention, before measuring described object under test, the curved measuring equipment of described plate is used for determining institute
State transfer function.Described measurement carrier is used for carrying correcting plate.Described projection module is for being incident upon correcting plate by described image
On.Described image extraction module, for when described image extraction module has multiple calibrated altitude relative to described correcting plate, captures described
Image is projeced into multiple correcting images during described correcting plate, and each correcting image in wherein said correcting image comprises many
Individual check point corresponding described reference point respectively；Described processing module is for measuring each check point of described check point in correspondence
Described correcting image in height, and according to same reference point corresponding in each correcting image in described correcting image
The position of check point and highly determine described transfer function.
According to one embodiment of present invention, described processing module be additionally operable to according on described object under test region to be measured from
Measurement region chosen by described measurement image, and chooses the N number of effective dose measuring point adjacent to described measurement region from described measuring point,
Wherein N 3；Produce according to the described object under test height in the position of corresponding described N number of effective dose measuring point and treat described in correspondence
Oblique/the curved surface surveying region compensates image, so as to compensating the deformation situation in region to be measured of described object under test.
According to one embodiment of present invention, described reference point comprises at least one first reference point and multiple second reference point.
The pattern of at least one the first reference point described is different from the pattern of described second reference point.
According to one embodiment of present invention, described image comprises a plurality of First Line, a plurality of second line.Described First Line and institute
State the second line described reference point of formation interlaced with each other.
It is an aspect of the invention to provide a kind of curved method for measurement of plate.The curved method for measurement of plate is used for measuring object under test, wherein
Object under test is placed on measurement carrier.The curved method for measurement of plate comprises: being incident upon on object under test by image, wherein image comprises
Multiple reference points；It is projeced into measurement image during object under test by image extraction module acquisition image, wherein measures image and comprise many
Individual measuring point corresponding described reference point respectively；By each measuring point in measuring point in the position of described measurement image by looking into
Look for table (Lookup table) to obtain the object under test height in the position of corresponding described measuring point；And according to object under test right
The height answering the position of described measuring point produces the plate curved compensation image of corresponding object under test, curved so as to compensating the plate of object under test
Situation.
According to one embodiment of present invention, before measuring described object under test, the curved method for measurement of described plate comprises: by institute
State image and be incident upon the correcting plate being placed on described measurement carrier；Relative to correcting plate, there is multiple correction at described image extraction module
Time highly, it is projeced into multiple correcting images during correcting plate, wherein said correction by the described image extraction module described image of acquisition
Each correcting image in image comprises multiple check point corresponding described reference point respectively；Measure each of described check point
Check point height in corresponding described correcting image；And record in each correcting image in described correcting image corresponding
The position of the check point of same reference point and height are to produce described look-up table (Lookup table).
In sum, produced by projection module and there is the image of special style and reference point on object under test, and according to taking
The measuring point measured in image captured as module and the correspondence position of the reference point in image, can quickly judge that object under test is
The no situation having plate curved occurs, and can adjust the burnt fragment position of image extraction module rapidly.Then, by transfer function or
The modes such as look-up table (Lookup table), can quickly obtain the height of object under test, and the curved situation of plate of measuring targets is entered
Row compensates and compensates image to produce.On the other hand, by the deformation method for measurement of the present invention, determinand can be judged further
The local dip of body or bending situation, and correct accurately and compensate.
Accompanying drawing explanation
For the above and other purpose of the present invention, feature, advantage can be become apparent with embodiment, the explanation of appended accompanying drawing
As follows:
Fig. 1 is the flow chart according to the curved method for measurement of a kind of plate in one embodiment of the present of invention；
Fig. 2 be according to the curved method for measurement of the plate in one embodiment of the present of invention can with the use of the curved measuring equipment of a kind of plate
Schematic diagram；
Fig. 3 A is the schematic diagram of a kind of image produced according to projection module in one embodiment of the present of invention；
Fig. 3 B is a kind of schematic diagram measuring image captured according to image extraction module in one embodiment of the present of invention；
Fig. 3 C is the another kind of schematic diagram measuring image captured according to image extraction module in one embodiment of the present of invention；
Fig. 3 D is the another kind of schematic diagram measuring image captured according to image extraction module in one embodiment of the present of invention；
Fig. 4 A is the schematic diagram of the another kind of image produced according to projection module in one embodiment of the present of invention；
Fig. 4 B is the schematic diagram of the another kind of image produced according to projection module in one embodiment of the present of invention；
Fig. 4 C is the schematic diagram of the another kind of image produced according to projection module in one embodiment of the present of invention；
Fig. 5 A be according to the curved method for measurement of the plate in one embodiment of the present of invention can with the use of another kind of plate curved measure dress
The schematic diagram put；
Fig. 5 B be according to the curved method for measurement of the plate in one embodiment of the present of invention can with the use of another kind of plate curved measure dress
The schematic diagram put；
Fig. 6 is the flow chart according to a kind of transfer function production method in one embodiment of the present of invention；
Fig. 7 is to capture the schematic diagram of correcting image according to image extraction module under calibrated altitudes different in one embodiment of the present of invention；
Fig. 8 A is according to the schematic diagram of the correcting image under a calibrated altitude in one embodiment of the present of invention；
Fig. 8 B is according to the schematic diagram of the correcting image under another calibrated altitude in one embodiment of the present of invention；
Fig. 8 C is according to the schematic diagram of the correcting image under another calibrated altitude in one embodiment of the present of invention；
Fig. 9 is the flow chart according to a kind of deformation method for measurement in one embodiment of the present of invention；
Figure 10 A is the schematic diagram according to a kind of measurement region measured in image in one embodiment of the present of invention；
Figure 10 B is the schematic diagram according to a kind of another measurement region measured in image in one embodiment of the present of invention；
And
Figure 10 C is according to the schematic diagram compensated by the deformation method for measurement of Fig. 9 in one embodiment of the present of invention.
Detailed description of the invention
Hereafter coordinate appended accompanying drawing to elaborate for embodiment, but the embodiment provided is not intended to limit the present invention is contained
The scope of lid, and describing of structure control is non-for limiting its order performed, any structure reconfigured by element, institute
Produce the device with impartial effect, be all the scope that the present invention is contained.Additionally, accompanying drawing is the most for the purpose of description, not
Map according to life size.For making to readily appreciate, in the description below, similar elements will illustrate with identical symbology.
About " about " used herein, the error of " about " or " substantially " commonly exponential quantity or scope at percentage
20 within, be preferably to be the most then within 5 percent within 10.Wen Zhongruo is without specifically
Bright, its mentioned numerical value all regards as approximation, such as can error as represented by " about ", " about " or " substantially "
Or scope, or other approximations.
In this article, use the vocabulary of first, second and the 3rd etc., be for describe various element, assembly, region,
Layer and/or block be it is understood that.But these elements, assembly, region, layer and/or block should not be by these arts
Language is limited.These vocabulary are only limited to for distinguishing single element, assembly, region, layer and/or block.Therefore, below
In the first element, assembly, region, floor and/or block be also referred to as the second element, assembly, region, floor and/or district
Block, without deviating from the original idea of the present invention.
Below will be with multiple embodiments of the open present invention of accompanying drawing, as clearly stated, many concrete details will with
Lower narration illustrates in the lump.It should be appreciated, however, that these concrete details shall not be applied to limit the present invention.It is to say,
In some embodiments of the present invention, these concrete details are non-essential.Additionally, for the sake of simplifying accompanying drawing, some are public
Know that usual structure and element will describe in the accompanying drawings in the way of simple signal.
Refer to Fig. 1 and Fig. 2, Fig. 1 is according to the curved method for measurement of a kind of plate 100 in one embodiment of the present of invention
Flow chart.Fig. 2 be according to the curved method for measurement of the plate in one embodiment of the present of invention 100 can with the use of the curved amount of a kind of plate
Survey the schematic diagram of device 200, but the curved measuring equipment of plate 200 in Fig. 2 is only illustrative, the curved measurement of plate of the present invention
Method 100 is not limited with the hardware framework of the curved measuring equipment of plate 200 of Fig. 2.
As in figure 2 it is shown, the curved measuring equipment of plate 200 comprise measurement carrier 210, projection module 220, image extraction module 230 with
And processing module 240.Measure carrier 210 and can comprise carrier platform 211 and mobile unit 212.Carrier platform 211 is used for
Carrying object under test 250.Mobile unit 212 is used for driving carrier platform 211 to vertically move.Whereby, carrier platform 211
Object under test 250 can be driven to vertically move, but the present embodiment is not limited thereto.In another embodiment, it is possible to vertical
The position of mobile image extraction module 230 so that it is phase measuring targets 250 vertically moves, to change and the hanging down of object under test 250
Straight height.Projection module 220 is arranged at measures the top of carrier 210 and with a direction or angle towards object under test 250.
Image extraction module 230 is then provided in measuring the surface of carrier 210.
In one embodiment, the object under test 250 measured by the curved measuring equipment of plate 200 can comprise circuit board, optics sheet material
Or other substrate.
In the present embodiment, projection module 220 can be digital projection device, for producing the image with special pattern.Please
It is a kind of image 300A produced according to projection module in one embodiment of the present of invention 220 in the lump with reference to Fig. 3 A, Fig. 3 A
Schematic diagram.Image 300A can comprise multiple reference point RP1～RP9.For convenience of explanation, reference point RP1～RP9
It is evenly distributed on image 300A, and shape size is the most roughly the same, but the present embodiment is not limited thereto.Should be noted
Being that the image 300A of Fig. 3 A is only illustrative, in other words, the shape of image 300A, size, it comprises
The quantity of reference point and the position of reference point all can change according to the actual requirements, and the present invention is not limited thereto.
As it is shown in figure 1, in the curved method for measurement of plate 100, first, in step s 110, will by projection module 220
The image (such as: image 300A) with special style is incident upon on object under test 250.Then, in step s 130,
Measurement image when image 300A is incident upon object under test 250 is captured by image extraction module 230.Owing to measuring image for figure
As 300A is incident upon the image on object under test 250, therefore measure image and also comprise corresponding reference point RP～the quantity of RP9
Measuring point.
Please with reference to Fig. 3 B and Fig. 3 C.Fig. 3 B is to capture according to image extraction module in one embodiment of the present of invention 230
A kind of schematic diagram measuring image 300B, Fig. 3 C be according to image extraction module in one embodiment of the present of invention 230 capture another
A kind of schematic diagram measuring image 300C.Specifically, if object under test 250 does not have the situation that plate is curved, then capture
The measurement image that module 230 captures should be the measurement image 300B of Fig. 3 B.In other words, measure in image 300B
Measuring point MP1～MP9 is evenly distributed on measurement image 300B as reference point RP1～RP9 of image 300.
But, if object under test 250 has the situation that plate is curved, as in figure 2 it is shown, then image extraction module 230 captures the measurement arrived
The part of measuring point corresponding object under test 250 projection in image, can produce the situation of skew.In other words, capture mould
The measurement image that block 230 captures can be similar to the measurement image 300C such as Fig. 3 C.In fig. 3 c, image 300C is measured same
Sample comprises measuring point MP1'～MP9' of the quantity of corresponding reference point RP～RP9.But, measuring point MP4'～MP6' is
Deviation position originally, in other words, the object under test 250 position relative to measuring point MP4'～MP6' has generation plate curved
Situation.
Furthermore, it is understood that along with the height of object under test 250 is different, image extraction module 230 capture arrive measurement image (such as:
Measure image 300C) in the position of measuring point also can follow difference.Therefore, by each measuring point (such as: measuring point
MP1'～MP9') side-play amount calculate, i.e. may know that the height of the position of object under test 250 each measuring point relative.
Therefore, in step S150, can further by processing module 240 by measuring point (such as: measuring point MP1'～
MP9') in the position measuring image (such as: measure image 300C), by the most corresponding reference point RP1～the conversion of RP9
Function calculates, to obtain the object under test 250 height in the position of corresponding amount measuring point (such as: measuring point MP1'～MP9').
Specifically, measuring point (such as: measuring point MP1'～MP9') can measured image (such as: measure by processing module 240
Image 300C) coordinate, be converted into height by corresponding transfer function respectively.
Then, in step S170, the curved compensation of plate is produced according to the object under test 250 height in the position of corresponding amount measuring point
Image, so as to compensating the curved situation of plate of object under test 250.Specifically, if the position of object under test 250 corresponding amount measuring point
Height all similar, then represent object under test 250 and not there is the situation that plate is curved, the most now image extraction module 230 captures
To the image of object under test 250 be that correct image is without further compensating.Relatively, if object under test 250
The height of position of corresponding part measuring point (such as: measuring point MP4'～MP6') has with the height of the position of other measuring point
Difference, then representing object under test 250 may have the curved situation of plate, and now image extraction module 230 captures the object under test 250 arrived
Image be incorrect image.Owing to can quickly obtain the object under test 250 position at corresponding amount measuring point by transfer function
The actual height put, therefore processing module 240 can compensate for difference in height rapidly, just to obtain object under test 250
True image.
In the present embodiment, reference point RP1 that image 300A comprises～the shape of RP9, size are the most roughly the same, and all
It is distributed in image 300A evenly.But, when the side-play amount of the measuring point of corresponding reference point is the biggest, it is likely that cause
Processing module 240 produces the situation of erroneous judgement and occurs.For example, refer to Fig. 3 D, Fig. 3 D is according to the present invention
The another kind of schematic diagram measuring image 300D that in embodiment, image extraction module 230 captures.In the present embodiment, due to skew
Measure excessive so that image extraction module 230 cannot capture corresponding reference point RP1～measuring point MP1～MP3 of RP3.Another
Aspect, processing module 240 and cannot judge measuring point MP4 now be correspond to image 300A reference point RP1 or
RP4.In this embodiment, processing module 240 likely judges measuring point MP1～MP3 by accident is corresponding reference point RP1～RP3.
In this case, processing module 240 will be produced according to the object under test 250 altimetric compensation in the position of corresponding amount measuring point
Raw problem.
Refer to Fig. 4 A, Fig. 4 A is the another kind of image produced according to projection module in one embodiment of the present of invention 220
The schematic diagram of 400A.As shown in Figure 4 A, image 400A comprises reference point RP1～RP16.In the present embodiment, reference
Point RP1～RP16 is also not uniformly distributed on image 400A, and reference point RP1～RP16 comprise multiple reference point (example
Such as reference point RP2, RP8, RP10, RP11 and RP13) with other reference point (such as: reference point RP1, RP3～
RP7, RP9 and RP12) pattern (such as: shape, size and color etc.) and differ.Described pattern can comprise shape
Shape, size and color etc., in the present embodiment as a example by shape difference, the right present invention is not limited thereto.Whereby, when
When the position of the measuring point measured in image captured by image extraction module 230 is different from the reference point of image 400A, locate
According to the measuring point of the reference point of corresponding different patterns, reason module 240 can come decision content measuring point is to correspond to which reference point,
And the situation avoiding erroneous judgement occurs.Then, processing module 240 is further according to the skew of the measuring point of the correct reference point of correspondence
Amount compensates the curved situation of plate of object under test 250.
Refer to Fig. 4 B, Fig. 4 B is the another kind of image produced according to projection module in one embodiment of the present of invention 220
The schematic diagram of 400B.As shown in Figure 4 B, image 400B comprises reference point RP1～RP16 are evenly distributed in image
400B, and shape, size are the most roughly the same with color.But, the place different from the image 300A of Fig. 3 is, image
400B also comprises straight line 410 between reference point RP5～RP8 and reference point RP9～RP12.Whereby, process
Module 240 can measure the straight line in image according to correspondence, judges the measuring point measured in image is to correspond to which reference point.
It is noted that the image 400B of the present embodiment is as a example by straight line, the right present invention is not limited thereto.
Refer to Fig. 4 C, Fig. 4 C is the another kind of image produced according to projection module in one embodiment of the present of invention 220
The schematic diagram of 400C.As shown in Figure 4 C, unlike image 300A, 400A and 400B, image 400C comprises many
Bar line 420～470.In the present embodiment, line 420～470 is as a example by straight line, but the present invention is not limited thereto.Every
The zone distance of line all differs.The thickness of line 420,430 and 440 and line 450,460 and 470 also differs, and that
This is staggered to form reference point RP1～RP9.Whereby, processing module 240 can measure the line 420～470 in image according to correspondence,
Judge the measuring point measured in image is to correspond to which reference point.
Illustrating it is noted that the embodiment of above-mentioned image is only, so it is not intended to limit this disclosure；In other words,
Any those skilled in the art, without departing from the spirit and scope of present invention, can make various different selection and amendment.
It is noted that due to the present invention propose the curved method for measurement of plate 100 in be to produce image by projection module 220.
Projection module 220 can be the projection arrangements such as digital-code projector, and therefore generation and the replacing of image is all easy to.Work as processing module
240 when cannot judge according to the measurement image that a certain image produces, and user can utilize projection module 220 to produce at any time
Another group image (such as: have the image of the quantity of relatively multiple reference points) measures.Due to traditional plate curved measurement method, throw
The instrument penetrating light need to comprise grating, and according to object under test and the difference of the mode of measurement, need to change different gratings, its
Complexity and the cost of operation are the highest.Therefore, the method that the present invention proposes is the easiest, also has more elasticity.
Refer to Fig. 5 A, Fig. 5 A be according to the curved method for measurement of the plate in one embodiment of the present of invention 100 can with the use of
The schematic diagram of another kind of plate curved measuring equipment 500A, but the curved method for measurement of the plate of the present invention 100 is not with the curved amount of plate of Fig. 5 A
The hardware framework surveying device 500A is limited.As shown in Figure 5A, it is similar to the curved measuring equipment of plate 200 of Fig. 2, the curved measurement of plate
Device 500A comprises measurement carrier 510, multiple projection module 521 and 522, multiple image extraction module 531 and 532 and place
Reason module 540, its operation is similar to the measurement carrier 210 of Fig. 2, projection module 220, image extraction module 230 and processes mould
Block 240, does not describe at this.
In the present embodiment, the curved measuring equipment of plate 500 comprises multiple projection module 521 and 522, multiple image extraction module 531
With 532.For convenience of explanation, the projection module of the present embodiment and the quantity of image extraction module are two, the right present invention not with
This is limited.In fig. 2, owing to projection module 210 is partial to the specific direction of object under test 250, when projection module 210
Projects images is when object under test 250, it is possible to because higher element makes image extraction module 230 take in object under test 250
The hypographous situation of measurement image obtained occurs.
But, in the present embodiment, projection module 521 and 522 is arranged at the top measuring carrier 510, and projection module
522 are arranged at and the position of projection module 521 different directions.In other words, projection module 522 can be differently configured from projective module
The projecting direction projects images of block 521 is on object under test 250.Image extraction module 531 can be used for capturing projection module 521 and throws
Penetrating the image at object under test 250, image extraction module 532 can be used for capturing projection module 522 and is incident upon object under test 250
Image.Whereby, the situation being produced shade by single image extraction module capture can be avoided to occur.It addition, processing module 540 also may be used
Dispersion processes the measurement image that image extraction module 531 and 532 captures, and accelerates to judge the speed of the curved situation of plate.
Refer to Fig. 5 B, Fig. 5 B be according to the curved method for measurement of the plate in one embodiment of the present of invention 100 can with the use of
The schematic diagram of another kind of plate curved measuring equipment 500B, but the curved method for measurement of the plate of the present invention 100 is not with the curved amount of plate of Fig. 5 B
The hardware framework surveying device 500B is limited.As shown in Figure 5 B, the operation of plate curved measuring equipment 500B is similar to Fig. 5 A's
Plate curved measuring equipment 500A, does not describe at this.
In the present embodiment, projection module 521 and 522 is arranged at the surface measuring carrier.Image extraction module 531 and 532
It is arranged at and measures the above of carrier and in different directions in the face of object under test 250.In other words, compared to the curved measuring equipment of plate
500A, the position of its projection module 521 and 52 and image extraction module 531 and 532 is exchanged.In other words, the present invention proposes
The curved measuring equipment of plate being applied to the curved method for measurement of plate 100 can determine the position of projection module and image extraction module according to the actual requirements
Putting, the present invention is not limited thereto.
Refer to Fig. 6, Fig. 6 is the flow process according to a kind of transfer function production method 600 in one embodiment of the present of invention
Figure.Specifically, transfer function production method 600 pre-build each reference point before measuring object under test 250
Transfer function, whereby when measuring object under test 250, after learning the measuring point measuring image, can quickly obtain to be measured
Object 250 is at the height of the position of corresponding amount measuring point.
Transfer function production method 600 can coordinate the plate curved measuring equipment 500A of the curved measuring equipment of plate 200 of Fig. 2, Fig. 5 A
Or the plate curved measuring equipment 500B of Fig. 5 B, and the figure of image 400A, Fig. 4 B of image 300A, Fig. 4 A of Fig. 3 A
Image 400C as 400B or Fig. 4 C.In the present embodiment, transfer function production method 600 is with the curved measurement of plate of Fig. 2
As a example by the image 300A of device 200 and Fig. 3 A, but the present invention is not limited thereto.
First, in step S610, correcting plate is placed on carrier platform 211.Then, in step S630, pass through
The image (such as: image 300A) with special style is incident upon on correcting plate by projection module 220.Then, carrier is changed
Platform 211 and the distance of image extraction module 230 (such as: by driving mobile unit 212 or mobile image extraction module 230), make
Image extraction module 230 when there is multiple calibrated altitude relative to carrier platform 211, capture image 300 by image extraction module 230
It is projeced into multiple correcting images during correcting plate.Similarly, each correcting image comprises multiple check point correspondence image respectively
Reference point RP1 of 300A～RP9.
Then, in step S650, each check point height when the position of corresponding correcting image, and record are measured
Each check point is at the position of corresponding correcting image and height.In one embodiment, can be measured by triangle method for measurement
Each check point height when the position of corresponding correcting image.Then, in step S670, according to every correction shadow
The position of the check point of corresponding same reference point and highly obtain the transfer function of corresponding described reference point in Xiang.
Please with reference to Fig. 7, Fig. 8 A, Fig. 8 B and Fig. 8 C.Fig. 7 is according to corrections different in one embodiment of the present of invention
The schematic diagram of the correcting image that image extraction module 230 captures under height.Fig. 8 A be according in one embodiment of the present of invention one
The schematic diagram of the correcting image 800A captured under individual calibrated altitude HC1, Fig. 8 B is according in one embodiment of the present of invention
The schematic diagram of the correcting image 800B captured under another calibrated altitude HC2, Fig. 8 C is a reality according to the present invention
Execute the schematic diagram of the correcting image 800C captured under another calibrated altitude HC3 in example.As it is shown in fig. 7, user can
By projection module 220, the image (such as: image 300A) with special style is incident upon on correcting plate 710.Then,
User can be by driving mobile unit 212 or mobile image extraction module 230 so that image extraction module 230 is relative to correcting plate
710 have multiple calibrated altitude HC1～HC3.And capture correcting plate 710 respectively at correction height by image extraction module 230
Correcting image 800A～800C during degree HC1～HC3.Similarly, under normal conditions, correcting image 800A can
Comprise the quantity of the reference point (such as: reference point RP～RP9) of correspondence image (such as: image 300A) check point CP1～
CP9.Correcting image 800B can comprise the reference point (such as: reference point RP～RP9) of correspondence image (such as: image 300A)
Check point CP1'～CP9' of quantity.Correcting image 800C can comprise the reference point (example of correspondence image (such as: image 300A)
Such as reference point RP～RP9) the check point CP1 "～CP9 " of quantity.
Owing to the angle of projection module 220 projection is constant, therefore when calibrated altitude difference, the check point in correcting image is i.e.
The situation of skew can be produced.As shown in Fig. 8 A, Fig. 8 B and Fig. 8 C.Distance when correcting plate 710 with image extraction module 230
When calibrated altitude HC1 moves to calibrated altitude HC3, the position of the check point CP1 "～CP9 " of correcting image 600C and
The position of the position of check point CP1'～CP9' of correcting image 600B check point CP1～CP9 relative to correcting image 600A
Put and the most change.
It addition, the position of the check point of every correcting image (such as: coordinate) can be noted down by processing module 240, and correct
The height of point also can be measured by three angle measurements methods and obtain.Therefore, same reference point is corresponded to by every correcting image
The position of check point and height, i.e. can get position and the relation of height of described check point, that is, corresponding described reference point
Transfer function.
In one embodiment, obtain the position information of reference point according to different height, and utilize homing method to obtain one
Transfer function.The pattern of transfer function can be once or more high-order moment, trigonometric function and exponential function etc., this
Bright it is not limited thereto.Furthermore, it is understood that the pattern of transfer function is to correspond to same reference point according to every correcting image
The position of check point and height and the scope of error determine, when the position of check point and the complexity of height are the highest, and think
More hour, the pattern of transfer function is the most likely the function of more Gao Xiangci to resultant error to be measured, could solve every whereby
Correcting image corresponds to position and the relation of height of the check point of same reference point.
As an example it is assumed that transfer function is that (x, y)=ax+by, wherein (x, y) is the height of check point to h to h, and (x y) is check point
Coordinate.In correcting image 800A, the coordinate of the check point CP1 of corresponding reference point RP1 is (3 ,-3), check point CP1's
It is highly 300 millimeters (mm)；In correcting image 800B, the coordinate of the check point CP1' of corresponding reference point RP1 is (2.5 ,-4),
The height of check point CP1' is 350 millimeters (mm).Above-mentioned available parameter is substituted into above-mentioned formula solution simultaneous equations, can
Obtaining is h (x, y)=100/3*x-200/3*y corresponding to the transfer function of reference point RP1.Whereby, when by the curved method for measurement of plate
During 100 measurement object under test 250, the coordinate measuring the measuring point corresponding to reference point RP1 in image can be substituted into it right
(x, y)=100/3*x-200/3*y can quickly obtain the object under test 250 height corresponding to described measuring point to the transfer function h answered
Degree.
But, for correcting image 800C, if the check point CP1 of corresponding reference point RP1 " coordinate be (2 ,-5), school
CP1 on schedule " height be 380 millimeters.But, by above-mentioned transfer function h, (x, y)=100/3*x-200/3*y obtain ideal
The height of the check point of corresponding reference point RP1 is 400 millimeters, i.e. has 20 millimeters with the actual height 380 millimeters measured
Error, now, then may assume transfer function be the multinomial time of more Gao Xiangci or other function (such as: trigonometric function
Or exponential function etc.) corresponding reference point in every correcting image (such as: correcting image 800A, 800B and 800C) could be solved
Check point CP1, CP1' and CP1 of RP1 " position and height relation.
Therefore, by transfer function production method 600, can obtain corresponding to each ginseng in image (such as: image 300A)
The transfer function of examination point (such as: reference point RP1～RP9).Therefore, object under test is being measured by the curved method for measurement of plate 100
When 250, the position of each measuring point measured in image captured can be passed through the transfer function of the reference point of its correspondence
Calculate, the most quickly obtain the height of the position of the measuring point of object under test 250 correspondence.In one embodiment, projective module
Therefore the area of the image of block 220 projection can quickly obtain object under test 250 more than or equal to the area of object under test 250
Overall height substantially, that is, can judge whether object under test 250 has the curved situation of plate rapidly, and adjusts rapidly
The burnt fragment position of image extraction module 230.If object under test 250 has a situation that plate is curved, then processing module 240 can be according to obtaining
Difference in height makes altimetric compensation rapidly.
It is noted that in the present invention, the curved method for measurement of plate 100 obtains object under test 250 right by transfer function
Answer the height of the position of measuring point.But, in another embodiment, user is used as look-up table (Lookup table)
Mode obtain the object under test 250 height in the position of corresponding amount measuring point.Specifically, carry out measure object under test it
Before, can first pass through and be corrected correcting plate compensating with the multiple correcting images obtaining corresponding a certain image.Then, record is every
Individual check point is in the position of corresponding correcting image with highly in look-up table (Lookup table).Whereby, at measuring targets
When measuring, after obtaining measuring image, processing module can be by the position of look-up table (Lookup table) queries measuring point
Put and quickly obtain the height of its correspondence, then judge the curved situation of plate of object under test and compensate.In other words, this
The height that the curved method for measurement of bright plate 100 does not obtain object under test with transfer function is limited.
It is noted that in the case of reality, object under test 250 is circuit board, optics sheet material or other substrate, substrate
On be welded with tin cream.Owing to the height of tin cream is the least compared to the height of substrate, therefore produced by the curved method for measurement of plate 100
The compensation that plate is curved can't be caused too much influence by raw error.And the curved method for measurement of plate 100 is treated owing to can disposably obtain
Survey object height, compared to tradition must sequentially mobile projector device with measure object under test method, its efficiency and scanning
Time can effectively promote.
In one embodiment, the curved measuring equipment of the plate of Fig. 2 200 can be additionally used in the region to be measured measured in object under test 250
Deformation situation and compensate.Refer to Fig. 9.Fig. 9 is to measure according to a kind of deformation in one embodiment of the present of invention
The flow chart of method 900.For convenience of explanation, deformation method for measurement 900 is with the curved measuring equipment of the plate 200 and Fig. 3 A of Fig. 2
Image 300A as a example by, but the present invention is not limited thereto.
As it is shown in figure 9, first, in step S910, processing module 240 can be measured according on object under test 250
Measurement region is chosen from measuring image in region.In other words, measure region be measure corresponding region to be measured in image position and
Scope.Specifically, user can select to be measured treating according to the deformation situation of certain part of object under test 250 to be measured
Survey region.Processing module 240 then can find out the amount in corresponding region to be measured in image that measures according to the region to be measured that user chooses
Survey region.
Then, in step S930, processing module 240 can choose neighbouring measurement district from all measuring points measuring image
N number of effective dose measuring point in territory, wherein N 3.Specifically, as long as there being three points can determine a plane, therefore only
Near neighbouring measurement region, to choose three measuring points i.e. to can determine whether to measure whether region has the situation of inclination (also at this
That is, inclined-plane is produced).On the other hand, if the quantity of the measuring point chosen is the most, also can determine whether that measuring region at this is
The no situation (that is, producing curved surface) with bending.In other words, those skilled in the art can select according to the actual requirements
The quantity of taken amount measuring point, the present invention is not limited thereto.
Then, in step S950, produce according to the height of the position of the corresponding described N number of effective dose measuring point of object under test 250
Oblique/the curved surface in raw corresponding region to be measured compensates image, so as to compensating the deformation situation in region to be measured of object under test 250.Tool
For body, if the situation that object under test 250 does not deform upon on region to be measured, then measure the N number of effective dose in image
The position of measuring point should the position of reference point of corresponding image identical.But, if object under test 250 is on region to be measured
Situation about deforming upon, the reference of the image that the position of the part effective dose measuring point in the most N number of effective dose measuring point should be corresponding
The position of point can produce skew.Therefore, processing module 240 can produce tiltedly/curved surface according to the side-play amount of N number of effective dose measuring point
Compensate image, so as to compensating the deformation situation in region to be measured of object under test 250.
Specifically, N number of effective dose measuring point can be calculated to obtain by processing module 240 by the transfer function of corresponding reference point
To the object under test height in the position of corresponding described N number of effective dose measuring point, and judge that object under test is being treated according to its difference in height
Survey tilt quantity or the amount of bow in region, then produce tiltedly/curved surface according to tilt quantity or amount of bow and compensate image.
Please with reference to Figure 10 A, Figure 10 B and Figure 10 C.Figure 10 A is according to a kind of amount in one embodiment of the present of invention
Survey in image and measure the schematic diagram of region 1000A.Figure 10 B is according to a kind of amount in one embodiment of the present of invention
The schematic diagram of another measurement region 1000B in survey image.Figure 10 C is according to passing through figure in one embodiment of the present of invention
The schematic diagram that the deformation method for measurement 900 of 9 compensates.
Specifically, if object under test does not have bending or situation about tilting in local (the i.e. corresponding region to be measured measuring region)
Occur, as shown in Figure 10 A, then the measurement region 1000A measured in image that image extraction module obtains, the position of its measuring point
Do not offset relative to reference point, and the element 1100 (such as: connection pad (PAD)) measured in the 1000A of region is not sent out
The situation of raw deformation.But, if object under test has bending or the situation generation tilted in local, as shown in Figure 10 B, then take
The measurement region 1000B measured in image obtained as module, the position of its measuring point has produced skew relative to reference point,
And measure the situation that the element 1100 in the 1000V of region also deforms upon.In this case, by the shape of the present invention
Become method for measurement 900, the situation of its deformation can be judged according to the side-play amount adjacent to the measuring point measuring region, then will amount
Measuring point is modified to correspond to the position of reference point, so as to the deformation situation of compensating element, 1100, and produces compensation image.
If it is understood that select the quantity adjacent to the measuring point measuring region the most, its estimation object under test is in district to be measured
The deformation degree in territory is the most accurate, and the accuracy that tiltedly/curved surface compensates image is the highest.
If it is noted that by a certain specific image the entirety that cannot effectively measure object under test, user can
The image selecting other pattern separately is replaced, for the generation of its image need to arrange different gratings compared to tradition, its
Required cost also can efficiently reduce.For example, if image extraction module 230 captures image 300A and is incident upon object under test
Time the image that measures lack the measuring point of corresponding reference point RP1, then user can replace other image (such as: have 16
The image of individual reference point) it is incident upon on object under test, then capture this image and be incident upon the measurement image of object under test, to treat
Survey the curved compensation of plate of object.
In sum, the curved method for measurement of plate that the present invention proposes, produce tool by projection module (such as: digital projection device)
Have the image of special style and reference point on object under test, and the measuring point measured in image captured according to image extraction module with
The correspondence position of the reference point in image, can quickly judge that the situation whether object under test has plate curved occurs, and can be rapidly
Adjust the burnt fragment position of image extraction module.Then, by modes such as transfer function or look-up tables (Lookup table), can be quick
Obtain the height of object under test, and the curved situation of plate of measuring targets carries out altimetric compensation.On the other hand, the present invention is passed through
Deformation method for measurement, local dip or the bending situation of object under test can be judged further, and correct accurately and mend
Repay.
Although the present invention is open the most as above with embodiment, so it is not intended to limit the present invention, any those skilled in the art,
Without departing from the spirit and scope of the present invention, various different selection and amendment can be made, therefore protection scope of the present invention by
Claims and equivalents thereof are limited.
Claims (12)
1. the curved method for measurement of plate, is used for measuring object under test, it is characterised in that described object under test is placed in measurement carrier
On, the curved method for measurement of described plate comprises:
Being incident upon by image on described object under test, wherein said image comprises multiple reference point；
Measurement image when described image is projeced into described object under test, wherein said measurement image bag is captured by image extraction module
Containing multiple measuring points corresponding the plurality of reference point respectively；
By each measuring point in the plurality of measuring point in the position of described measurement image by corresponding the plurality of reference point
In each reference point transfer function calculate to obtain the described object under test height in the position of corresponding the plurality of measuring point
Degree；And
The plate of corresponding described object under test is produced according to the described object under test height in the position of corresponding the plurality of measuring point
Curved compensation image, so as to compensating the curved situation of plate of described object under test.
2. the curved method for measurement of plate as claimed in claim 1, it is characterised in that before measuring described object under test, comprise:
Described image is incident upon the correcting plate being placed on described measurement carrier；
When described image extraction module has multiple calibrated altitude relative to described correcting plate, captured described by described image extraction module
Image is projeced into multiple correcting images during described correcting plate, and each correcting image in wherein said multiple correcting images comprises
Multiple check points corresponding the plurality of reference point respectively；
Measure each check point of the plurality of check point height in corresponding the plurality of correcting image；And
The position of the check point according to same reference point corresponding in each correcting image in the plurality of correcting image and height
Degree determines described transfer function.
3. the curved method for measurement of plate as claimed in claim 1, it is characterised in that the curved method for measurement of described plate also comprises:
Measurement region is chosen from described measurement image according to the region to be measured on described object under test；
N number of effective dose measuring point in neighbouring described measurement region, wherein N 3 are chosen from the plurality of measuring point；And
Corresponding described region to be measured is produced according to the described object under test height in the position of corresponding described N number of effective dose measuring point
Tiltedly/curved surface compensates image, so as to compensating the deformation situation in described region to be measured of described object under test.
4. the curved method for measurement of plate as claimed in claim 1, it is characterised in that the plurality of reference point comprise at least one the
The sample of one reference point and multiple second reference point, the pattern of at least one the first reference point described and the plurality of second reference point
Formula is different.
5. the curved method for measurement of plate as claimed in claim 1, it is characterised in that described image comprises a plurality of First Line, a plurality of
Second line, described a plurality of First Line and the described a plurality of second line the plurality of reference point of formation interlaced with each other.
6. the curved measuring equipment of plate, is used for measuring object under test, it is characterised in that the curved measuring equipment of described plate comprises:
Measuring carrier, it is used for carrying described object under test；
Projection module, it comprises multiple reference point for projects images at described object under test, wherein said image；
Image extraction module, it is for capturing measurement image when described image is projeced into described object under test, wherein said measurement shadow
As comprising multiple measuring point corresponding the plurality of reference point respectively；And
Processing module, it is described by correspondence in the position of described measurement image by each measuring point in the plurality of measuring point
The transfer function of each reference point in multiple reference points calculates to obtain the described object under test position at corresponding described measuring point
The height put, and produce plate curved compensation image according to the described object under test height in the position of corresponding the plurality of measuring point,
So as to compensating the curved situation of plate of described object under test.
7. the curved measuring equipment of plate as claimed in claim 6, it is characterised in that before measuring described object under test, described
The curved measuring equipment of plate is used for determining that described transfer function, described measurement carrier are used for carrying correcting plate；Described projection module is used for
Described image is incident upon on described correcting plate；Described image extraction module is for having relative to described correcting plate at described image extraction module
When having multiple calibrated altitude, capture multiple correcting images when described image is projeced into described correcting plate, wherein said multiple schools
Each correcting image in positive image comprises multiple check point corresponding the plurality of reference point respectively；The described processing module amount of being used for
Survey each check point of the plurality of check point height in corresponding the plurality of correcting image, and according to the plurality of school
The position of the check point of corresponding same reference point and highly determine described transfer function in each correcting image in positive image.
8. the curved measuring equipment of plate as claimed in claim 6, it is characterised in that described processing module is additionally operable to according to described
Measurement region is chosen from described measurement image in region to be measured on object under test, and chooses neighbouring institute from the plurality of measuring point
State the N number of effective dose measuring point measuring region, wherein N 3, and according to described object under test in corresponding described N number of effective measurement
The height of the position of point produces the oblique/curved surface in corresponding described region to be measured and compensates image, so as to compensate described object under test in institute
State the deformation situation in region to be measured.
9. the curved measuring equipment of plate as claimed in claim 6, it is characterised in that the plurality of reference point comprise at least one the
The sample of one reference point and multiple second reference point, the pattern of at least one the first reference point described and the plurality of second reference point
Formula is different.
10. the curved measuring equipment of plate as claimed in claim 6, it is characterised in that described image comprises a plurality of First Line, a plurality of
Second line, described a plurality of First Line and the described a plurality of second line the plurality of reference point of formation interlaced with each other.
11. 1 kinds of curved method for measurement of plate, are used for measuring object under test, it is characterised in that described object under test is placed in measurement and carries
On tool, the curved method for measurement of described plate comprises:
Being incident upon by image on described object under test, wherein said image comprises multiple reference point；
Measurement image when described image is projeced into described object under test, wherein said measurement image bag is captured by image extraction module
Containing multiple measuring points corresponding the plurality of reference point respectively；
Each measuring point in the plurality of measuring point is treated by look-up table in the position of described measurement image described in obtaining
Survey the object height in the position of corresponding the plurality of measuring point；And
The plate of corresponding described object under test is produced according to the described object under test height in the position of corresponding the plurality of measuring point
Curved compensation image, so as to compensating the curved situation of plate of described object under test.
12. a kind of curved method for measurement of plate as claimed in claim 11, it is characterised in that before measuring described object under test,
Comprise:
Described image is incident upon the correcting plate being placed on described measurement carrier；
When described image extraction module has multiple calibrated altitude relative to described correcting plate, captured described by described image extraction module
Image is projeced into multiple correcting images during described correcting plate, and each correcting image in wherein said multiple correcting images comprises
Multiple check points corresponding the plurality of reference point respectively；
Measure each check point of the plurality of check point height in corresponding the plurality of correcting image；And
Record position and the height of the check point of corresponding same reference point in each correcting image in the plurality of correcting image
Degree is to produce described look-up table.
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Cited By (1)
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|---|---|---|---|---|
| CN107621743A (en) * | 2016-07-14 | 2018-01-23 | 张修诚 | Optical projection system and the distortion correction method of projection image |
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| US20140022357A1 (en) * | 2012-07-20 | 2014-01-23 | Test Research, Inc. | Three-dimensional image measuring apparatus |
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| JPH03135704A (en) * | 1989-10-20 | 1991-06-10 | Central Glass Co Ltd | Strain inspecting method for plate type body |
| US20110228082A1 (en) * | 2010-03-16 | 2011-09-22 | Kuang-Pu Wen | Measuring system for a 3D Object |
| CN202126249U (en) * | 2011-06-09 | 2012-01-25 | 义仓精机股份有限公司 | Measurement device for measuring distortion of base plate by utilizing base plate registration holes |
| US20130278723A1 (en) * | 2012-04-20 | 2013-10-24 | Test Research, Inc. | Three-dimensional measurement system and three-dimensional measurement method |
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