CN105849627A - 一种基于石墨烯的电吸收光学调制器及其制备方法 - Google Patents

一种基于石墨烯的电吸收光学调制器及其制备方法 Download PDF

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CN105849627A
CN105849627A CN201480070187.0A CN201480070187A CN105849627A CN 105849627 A CN105849627 A CN 105849627A CN 201480070187 A CN201480070187 A CN 201480070187A CN 105849627 A CN105849627 A CN 105849627A
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graphene
refractive index
layer
index material
material layer
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CN105849627B (zh
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王健
胡晓
贺继方
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Huawei Technologies Co Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction
    • G02F1/025—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements with at least one potential jump barrier, e.g. PN, PIN junction in an optical waveguide structure

Abstract

一种基于石墨烯的电吸收光学调制器及其制造方法。该光学调制器制作在衬底(10)上，包括基于石墨烯的长程SPP波导结构、第一电极(301)、第二电极(302)、光输入端和光输出端；其中基于石墨烯的长程SPP波导结构包括依次形成于衬底(10)上的第一高折射率材料层(201)、第一石墨烯层(202)、第一低折射率材料层(203)、金属薄膜层(204)、第二低折射率材料层(205)、第二石墨烯层(206)、第二高折射率材料层(207)。该光学调制器基于长程SPP波导和电介质加载的SPP波导两种波导结构，因此兼且调制深度大，插入损耗小，品质因子高，对光场的限制作用强的优点。该基于石墨烯的电吸收光学调制器的制备方法，工艺简单，适于规模化生产。

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PCT国内申请，说明书已公开。

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  1. PCT国内申请，权利要求书已公开。
CN201480070187.0A 2014-04-11 2014-04-11 一种基于石墨烯的电吸收光学调制器及其制备方法 Active CN105849627B (zh)

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CN109633798A (zh) * 2019-01-02 2019-04-16 电子科技大学 一种调控金属天线-石墨烯复合超表面光电导的方法
CN112382923A (zh) * 2021-01-11 2021-02-19 武汉敏芯半导体股份有限公司 电吸收调制激光器

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CN109298547A (zh) * 2017-07-24 2019-02-01 中兴光电子技术有限公司 一种太赫兹调制器和调制方法
CN109901254B (zh) * 2019-04-26 2022-12-13 电子科技大学中山学院 一种提高石墨烯上表面等离激元耦合强度的结构

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108363129A (zh) * 2018-04-20 2018-08-03 南开大学 多结构组合人工电磁表面
CN109633798A (zh) * 2019-01-02 2019-04-16 电子科技大学 一种调控金属天线-石墨烯复合超表面光电导的方法
CN109633798B (zh) * 2019-01-02 2020-09-25 电子科技大学 一种调控金属天线-石墨烯复合超表面光电导的方法
CN112382923A (zh) * 2021-01-11 2021-02-19 武汉敏芯半导体股份有限公司 电吸收调制激光器
CN112382923B (zh) * 2021-01-11 2021-03-23 武汉敏芯半导体股份有限公司 电吸收调制激光器

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