CN105842727B - Species transmissive flat soft x-ray radiation in response to the flow measuring means - Google Patents

Species transmissive flat soft x-ray radiation in response to the flow measuring means Download PDF

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CN105842727B
CN105842727B CN 201610385141 CN201610385141A CN105842727B CN 105842727 B CN105842727 B CN 105842727B CN 201610385141 CN201610385141 CN 201610385141 CN 201610385141 A CN201610385141 A CN 201610385141A CN 105842727 B CN105842727 B CN 105842727B
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cylinder
ring
provided
connected
head
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CN105842727A (en )
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侯立飞
杜华冰
车兴森
杨轶濛
杨国洪
杨家敏
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中国工程物理研究院激光聚变研究中心
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Abstract

本发明提供了种透射式平响应软X射线辐射流测量装置,所述装置中的阳极后端外围固定设置有锥体,锥体的外围设置有输出头,输出头与外壳连接,卡环的外围固定设置有内筒,薄膜阴极通过卡环压紧在内筒内,内筒的外围设置有外筒,内筒与外筒之间设置有绝缘层,外筒的外围设置有锁紧环,绝缘环通过锁紧环压紧在锥体外筒内,外筒通过连接环与输出头连接,外壳固定连接有高压管,高压管中轴线上依次连接有陶瓷可阀、连接针、绝缘筒、高压头,限流电阻分别与内筒、陶瓷可阀连接。 The present invention provides a kind of a transmission level in response to the soft X-ray radiation flow measuring device, the anode of the rear end of the peripheral apparatus is provided with a fixed cone, the peripheral head cone provided with an output, the first output connected to the housing, the collar the inner cylinder is provided with a fixed perimeter, the inner cylinder pressing film cathode by a snap ring, the inner periphery of the outer cylinder is provided with a cylinder, an insulating layer is provided between the inner tube and the outer tube, the outer periphery of the cylinder is provided with a locking ring, insulating ring by a locking ring pressed against extrapyramidal cylinder, the outer cylinder is connected to the output head via a connecting ring, the housing is fixedly connected with a high-pressure pipe, pressure pipe central axis can be sequentially connected with a ceramic valve, connection pin, the insulating tube, the high pressure the first current-limiting resistor are connected to the inner tube, the valve can be ceramic. 本发明中的薄膜阴极能为光电子后续处理提供条件,将应用中的平响应滤片与XRD探测器集成体,结构更紧凑,能实现惯性约束聚变领域软X射线辐射流测量。 The cathode film of the present invention can provide an optoelectronic subsequent processing conditions, the application level response XRD detector with integrated filter body, a more compact, to achieve the soft X-ray radiation flow measurement Inertial Confinement Fusion.

Description

一种透射式平响应软X射线辐射流测量装置 A light transmission type flat soft X-ray radiation in response to the flow measuring means

技术领域 FIELD

[0001] 本发明属于软X射线辐射流测量领域,具体涉及一种透射式平响应软X射线辐射流测量装置。 [0001] The present invention is in the soft X-ray radiation field of flow measurement, in particular to a flat transmissive soft X-ray radiation in response to the flow measuring device.

背景技术 Background technique

[0002] 在激光聚变研究中,辐射流存在于整个物理过程之中,包括黑腔物理的X光辐射流,内爆物理的靶丸自发光等。 [0002] In laser fusion research, the radiation flow exists in the entire physical process, including a physical cavity black X-radiation flow implosion physics of light emission from the pellet. 为了研究黑腔辐射源的强度、辐射温度,以及内爆辐照对称性与热核燃烧过程等,辐射流的测量不可或缺。 In order to study the strength of the black cavity radiation source, radiation temperature, irradiation and implosion symmetry and thermonuclear combustion processes, etc., indispensable flow measuring radiation.

[0003] 目前对辐射流测量的主要设备有平响应X光二极管(FXRD)、X光二极管(XRD)阵列组成的软X光能谱仪(SXS)等设备。 [0003] There X LED flat response (FXRD) to the main stream of radiation measurement apparatus, X LED (XRD) soft X-ray spectrometer (SXS) and the like array of equipment. 平响应XRD是一种利用复合滤片和XRD来实现X光平响应的探测器。 XRD is a flat response filter using the composite sheet and XRD X-ray detector to achieve a flat response. XRD阴极灵敏度随X光能量呈下降趋势,而滤片透过率则随X光能谱呈上升趋势。 XRD X-ray energy sensitivities of the cathode decreased, and the transmittance of the filter with X-ray spectroscopy rise. 利用两者的互补关系,不同面积配比的复合滤片对X光进行权重配比,再结合XRD响应,即可实现理想的平响应特性。 Using both complementary relationship, different areas of the composite ratio of the X-ray filter for weighting ratio, XRD combined response, to achieve the desired level of response characteristic. 中国工程物理研究院激光聚变研究中心利用金阴极XRD与金组合滤片实现了0.1 keV-5 keV范围的平响应,包含金M带在内。 Chinese Academy of Engineering Physics Laser Fusion Research Center, with gold using a gold cathode composition XRD filter response to achieve a level of 0.1 keV-5 keV range, comprising a band including gold M. 复合滤片为形状相同的400 nm 与50 nm两种厚度的金膜构成,其面积配比为1:6.5。 The composite filter of 400 nm with the same shape as two thicknesses 50 nm gold film, an area ratio of 1: 6.5. 为实现该面积配比,利用光刻技术在400 nm厚金膜上刻蚀小孔阵列。 In order to achieve the area ratio by using a photolithography technique in a thickness of 400 nm gold film etching an array of holes. 而软X光能谱仪是应用滤波法分光进行能谱测量的。 While the soft X-ray spectrometer is the application of spectral filtering of the measured energy spectrum. 滤波法分光是采用某些元素在各自的L或K吸收边能量处的透过率突变,将一个连续的X光谱“切害Γ成若干个窄的谱段。滤光片配置XRD探测器,构成软X光探测道系统。为了抑制滤片-XRD 探测道高能尾部,在低能道还配置有X光平面镜。最终,阵列中配置高压电源系统的XRD,通过微波电缆将信号传送至数字示波器,完成数据采集。 The spectral filtering method is the use of certain elements in the respective transmittance L or K absorption edge energy of the mutation, a continuous X-ray spectrum "cut into several harm Γ narrow spectral The filter configuration XRD detector, constituting the soft X-ray detection track system. in order to suppress filter -XRD sounding channel high energy tail in the low energy channel further configured with an X-ray mirror. eventually, an array configuration XRD high-voltage power supply system, will be transmitted through the microwave cable signal to a digital oscilloscope, complete data acquisition.

[0004] 这些装置的探测部件均为真空X光二极管。 [0004] The detecting means of these means are vacuum X LED. 目前使用的X光二极管为无窗平板结构的光电探测器,具有响应时间快,抗干扰性能好,便于灵敏度标定等优点。 X is currently used LED photodetector windowless plate structure, having a fast response time, good resistance to interference, etc. to facilitate sensitivity calibration. 探测器工作时,脉冲光子群穿过网状阳极,打在阴极上,产生光电子群,光电子在阴阳极间强电场加速下,迅速返回阳极,从而在输出电路中感应出脉冲电流输出电脉冲。 When the operation of the detector, pulsed light through the group of mesh anode, cathode hit, group generate photoelectrons, the photoelectrons accelerated very strong electric field between Yin and Yang, quickly return to the anode, thereby inducing a pulse current output pulse in the output circuit. 这种XRD也称之为反射式二极管,其时间分辨为几十皮秒量级。 This is also referred to as XRD reflection-type diode, the time resolution of the order of tens of picoseconds.

[0005] 尽管这些装置在X射线辐射流测量中可实现高精度的定量测量,能满足研究需要, 但是存在以下不足:(1)无法对探测器产生的电子进行后续处理。 [0005] While these devices in the X-ray radiation flow measurement with high accuracy can be achieved in the quantitative measurement, research to meet the needs, but the following deficiencies: Electronic (1) can not be produced by the detector for subsequent processing. 对于反射式探测器,X射线穿过栅网结构的阳极,照射至阴极,产生光电子。 The reflection type detectors, X-rays through the anode grid structure, is irradiated to the cathode, generating photoelectrons. 在电场的作用下,光电子向栅网运动,产生输出电流。 In the electric field, the photoelectrons moving grid, generating an output current. 由于结构与工作特点,探测器产生的光电子无法进行后续处理。 Since the structure and operation characteristics, photoelectrons can not be generated by the detector for subsequent processing. (2)装置结构不够紧凑。 (2) The apparatus structure is not compact. 装置构成元件很多,标定环节多,安装复杂,各种不确定性因素导致测量结果不确定度偏大。 Many elements constituting the apparatus, calibration of multiple links, installation complexity, lead to various uncertainties of measurement uncertainty is too large.

发明内容 SUMMARY

[0006] 本发明的目的是为了解决已有技术中软X射线辐射流定量测量中存在的无法对探测器产生的电子进行后续处理、结构复杂的问题,提供一种透射式平响应软X射线辐射流测量装置。 [0006] The object of the present invention is to solve the electron detector can not produce a quantitative measure of prior art soft X-ray radiation present in the stream for subsequent processing, a complicated structure, there is provided a transmissive flat soft X-ray radiation in response to flow measuring device. 本发明的透射式平响应软X射线辐射流测量装置能为光电子后续处理提供条件,结构更紧凑,能实现惯性约束聚变领域,黑腔物理、辐射输运、辐射烧蚀、辐射不透明度以及内爆动力学的软X射线辐射流测量。 Transmissive flat response of the present invention the soft X-ray radiation conditions can provide a flow measuring device photoelectron subsequent processing, more compact structure can be realized ICF art, physical black cavity radiation scattering radiation ablation, radio-opacity and an inner soft X-ray radiation flow measurement burst kinetics.

[0007] 本发明的技术方案如下: [0007] aspect of the present invention is as follows:

[0008] 本发明的透射式平响应软X射线辐射流测量装置,其特点是,所述的测量装置包括外壳、输出头、锥体、阳极、薄膜阴极、卡环、内筒、绝缘层、绝缘环、锁紧环、外筒、连接环、限流电阻、高压管、陶瓷可阀、连接针、绝缘筒、连接筒、高压头,所述外壳为环状,阳极由三段不同直径的金属圆柱体构成。 [0008] The present invention is a transmission level in response to the soft X-ray radiation flow measuring device, characterized in that said measuring device includes a housing, an output head, a cone, an anode, a cathode film, snap ring, the inner cylinder, the insulating layer, an insulating ring, a locking ring, the outer tube, connecting ring, the current limiting resistor, a high-pressure pipe, the valve can be a ceramic, a connection pin, the insulating tube, the connecting tube, high head, the housing is a ring, the anode consists of three sections of different diameters constituting the metal cylinder. 其连接关系是,在外壳内中心轴线上设置有输出头、锥体、阳极、外筒、绝缘层、薄膜阴极、卡环、内筒、绝缘环,阳极后端外围固定设置有锥体,锥体的外围固定设置有输出头,输出头通过螺钉与外壳连接。 Connection relationship which is disposed on the central axis within the housing with an output head, cone, an anode, an outer tube, an insulating layer, a cathode film, the collar, the inner tube, an insulating ring, the anode is provided with a rear end fixed to the periphery of a cone, the cone fixed to the outer housing is provided with a first output, an output head is connected to the housing by screws. 卡环的外围固定设置有内筒,薄膜阴极通过卡环压紧在内筒内。 Peripheral card is provided with a ring fixed to the inner cylinder, the inner cylinder thin cathode by a snap ring pressing. 内筒的外围设置有外筒,内筒与外筒之间设置有绝缘层,外筒的外围设置有锁紧环,绝缘环通过锁紧环压紧在锥体外筒内。 The inner periphery of the cylinder is provided with an outer cylinder, an insulating layer is provided between the inner tube and the outer tube, the outer periphery of the cylinder is provided with a locking ring, the locking ring by insulating ring pressed against the taper outer cylinder. 外筒通过连接环与输出头连接。 An outer cylinder and an output connected by the connecting ring head. 所述的薄膜阴极与阳极间有一间隙。 Between the cathode and anode films with a gap. 外壳固定连接有高压管,高压管中轴线上依次设置有陶瓷可阀、连接针、绝缘筒、高压头。 A housing fixedly connected to the high-pressure pipe, pressure pipe central axis can be successively provided with a ceramic valve, connected to pins, insulating cylinder, a high pressure head. 连接针包裹在绝缘筒内。 Connecting needle encased in an insulating cylinder. 陶瓷可阀的下端与高压管固定连接,上端通过连接针与高压头连接。 The lower end of the ceramic valve may be fixedly connected to the high-pressure pipe, the upper end connected by a connecting pin with high head. 高压头通过连接筒与高压管连接。 High pressure connected by the connecting tube and the first high-pressure pipe. 限流电阻的一端与内筒连接,另一端与陶瓷可阀中的芯针固定连接。 One end of the inner cylinder limiting resistor is connected to the other end of the ceramic core needle valve may be fixedly connected.

[0009] 所述的薄膜阴极与阳极间的间隙为l-3mm。 [0009] The gap between the cathode and the anode is a thin film l-3mm.

[0010] 所述的薄膜阴极由底层的硅环、中层的金属膜、上层的带针孔阵列金属膜构成。 [0010] The film of the cathode ring by the underlying silicon, the middle layer metal film, a pinhole array with the upper metal film.

[0011] 所述的输出头接头为SM型、N型、BNC型中的一种。 [0011] The output of the joint head of SM type, N-type, BNC type one.

[0012] 所述的阳极、锥体到输出头的阻抗均为50 Ω。 [0012] The anode, the output impedance of the cone head are 50 Ω.

[0013] 所述的阳极的材料采用铜、铝、金中的一种。 [0013] The anode material of copper, aluminum, gold one.

[0014] 本发明的有益效果是,本发明中的薄膜阴极,其产生的光电子与入射X光光路不干涉,为光电子的后续处理提供了条件,能实现惯性约束聚变领域,黑腔物理、辐射输运、辐射烧蚀、辐射不透明度以及内爆动力学的软X射线辐射流测量。 [0014] Advantageous effects of the present invention, the film of the present invention is the cathode, which generates photoelectrons incident light path does not interfere with X, provided the conditions for subsequent processing photoelectrons can be achieved ICF art, physical black cavity, radiation soft X-ray radiation transport flow measurement, radiation ablation, radio-opacity and the implosion. 本发明将应用中的平响应滤片与XRD探测器集成一体,结构更紧凑,减少了滤片安装与标定工作,使得辐射流测量更方便。 The application of the present invention, a flat detector response filter integrally with XRD, more compact, and reduces the demarcation filter is mounted such that the radiation flow measurement easier.

[0015] 下面通过附图和实施例,对本发明的技术方案做进一步的详细描述。 [0015] The following drawings and embodiments, detailed description of the further aspect of the present invention.

附图说明 BRIEF DESCRIPTION

[0016] 图1为本发明的透射式平响应软X射线辐射流测量装置的结构示意图。 [0016] FIG. 1 of the present invention a transmission level schematic structural diagram of the soft X-ray radiation in response to the flow measuring device.

[0017] 图2为本发明中的透射阴极的结构示意图。 [0017] The schematic structure of transmissive cathode in FIG. 2 of the present invention.

[0018] 图中,1.外壳2.输出头3.锥体4.阳极5.薄膜阴极6.卡环7.内筒8.绝缘层9. 绝缘环10.锁紧环11.外筒12.连接环13.限流电阻14.高压管15.陶瓷可阀16.连接针17.绝缘筒18.连接筒19.高压头20.硅环21.金属膜22.带针孔阵列金属膜。 [0018] FIG, 1 housing 2. Output cone head 3. 4. 5. anodic film cathode 6. 7. 8. cylindrical inner collar insulating ring 10. The insulating layer 9. The outer cylinder 11. The locking ring 12 The connecting ring 13 limiting resistor 14. The high-pressure pipe 15. A valve 16 may be connected to the ceramic insulating tube 18. The connecting pin 17. The cylinder head 19. The high-pressure metal film 20. The silicon ring 21. The pinhole array 22 with a metal film.

具体实施方式[0019] 实施例1 DETAILED DESCRIPTION Example 1 [0019]

[0020]图1为本发明的透射式平响应软X射线辐射流测量装置的结构示意图,图2为本发明中的透射阴极的结构示意图。 [0020] FIG. 1 of the present invention a transmission level in response to the soft X-ray radiation schematic view of the flow measuring device, a schematic structure of transmissive cathode in FIG. 2 of the present invention. 在图1、2中,本发明的透射式平响应软X射线辐射流测量装置,包括外壳1、输出头2、锥体3、阳极4、薄膜阴极5、卡环6、内筒7、绝缘层8、绝缘环9、锁紧环10、 外筒11、连接环12、限流电阻13、高压管14、陶瓷可阀15、连接针16、绝缘筒17、连接筒18、 高压头19,所述外壳1为环状,阳极4由三段不同直径的金属圆柱体构成。 In FIG. 2, the present invention is a transmissive flat soft X-ray radiation in response to the flow measurement apparatus comprises a housing 1, an output head 2, a cone 3, an anode 4, a cathode film 5, the collar 6, the inner tube 7, insulating layer 8, an insulating ring 9, the locking ring 10, the outer cylinder 11, the connecting ring 12, the current limiting resistor 13, the high-pressure pipe 14, valve 15 may be a ceramic, a connection pin 16, the insulating tube 17, connection tube 18, a high pressure head 19, the annular housing 1, an anode 4 consists of three sections of different diameter metal cylinder. 其连接关系是,在外壳1内中心轴线上设置有输出头2、锥体3、阳极4、外筒11、绝缘层8、薄膜阴极5、卡环6、内筒7、绝缘环9,阳极4后端外围固定设置有锥体3,锥体3的外围固定设置有输出头2,输出头2 通过螺钉与外壳1连接。 The connection is that the output is provided with a head 2, a cone 3 on the central axis within the housing 1, an anode 4, an outer cylinder 11, the insulating layer 8, a cathode film 5, the collar 6, the inner tube 7, an insulating ring 9, an anode 4 is provided with a rear end fixed to the periphery of the cone 3, 3 fixed to the periphery of the cone head 2 is provided with an output, the output connected to the housing 1 by screws 2. 卡环6的外围固定设置有内筒7,薄膜阴极5通过卡环6压紧在内筒7 内。 Peripheral card is provided with a ring 6 fixed to the inner cylinder 7, a cathode film 5 by a snap ring 6 pressed against the inner cylinder 7. 内筒7的外围设置有外筒11,内筒7与外筒11之间设置有绝缘层8,外筒11的外围设置有锁紧环10,绝缘环9通过锁紧环10压紧在锥体外筒11内。 The peripheral inner tube 7 is provided with an outer cylinder 11, the inner cylinder 7 is provided with an insulating layer between the outer tube 118, the outer peripheral cylinder 11 is provided with a locking ring 10, insulating ring 9 by the locking ring 10 pressed against the cone the inner cylinder 11 in vitro. 外筒11通过连接环12与输出头2连接。 The outer cylinder 11 through the connecting ring 12 is connected to the output head 2. 所述的薄膜阴极5与阳极4间有一间隙。 The film cathode 5 and the anode 4 with a gap. 外壳1固定连接有高压管14,高压管14中轴线上依次设置有陶瓷可阀15、连接针16、绝缘筒17、高压头19。 A housing fixedly connected with a high-pressure pipe 14, the central axis 14 is provided with a ceramic high-pressure pipes can be successively valve 15, connecting pin 16, the insulating tube 17, a high pressure head 19. 连接针16包裹在绝缘筒17内。 Connecting needle 16 encased within the insulating tube 17. 陶瓷可阀15的下端与高压管14固定连接,上端通过连接针16与高压头19连接。 Lower ceramic valve may be fixedly connected with the high-pressure pipe 14 is 15, an upper end connected by a connecting pin 16 to a high pressure head 19. 高压头19通过连接筒18与高压管14连接。 High head 19 is connected to the high-pressure cylinder 18 is connected by a pipe 14. 限流电阻13的一端与内筒7连接,另一端与陶瓷可阀15中的芯针固定连接。 One end of the current limiting resistor 7 is connected to the inner cylinder 13, the other end of the ceramic core may be a needle valve 15 is fixedly connected.

[0021] 所述的薄膜阴极5由底层的硅环20、中层的金属膜21、上层的带针孔阵列金属膜22 构成。 [0021] The film 5 made of silicon underlying cathode ring 20, the middle of the metal film 21, the upper metal film 22 with the pinhole array configuration.

[0022] 所述的阳极4、锥体3到输出头2的阻抗均为50 Ω。 [0022] The anode 4, funnel 3 to the output impedance of the head 2 are 50 Ω.

[0023] 本实施例中,所述的薄膜阴极5与阳极4间的间隙为2 _,输出头2接头为SMA型,阳极4的材料采用铜。 [0023] In this embodiment, the cathode film and the anode 5 as the gap 4 _ 2, the first output connector of SMA type 2, the anode material 4 copper.

[0024] 外壳1材料为采用不锈钢,锥体3材料采用铝,卡环6材料为铝,内筒7材料采用不锈钢,绝缘层8材料采用聚四氟乙烯,绝缘环9材料采用聚四氟乙烯,锁紧环10材料采用铜,夕卜筒11材料采用铜,连接环12材料采用铜,限流电阻13电阻值为10ΜΩ,高压管14材料采用不锈钢,连接针16材料采用银,绝缘筒17材料采用聚四氟乙烯,连接筒18材料采用铜。 [0024] The housing 1 is made of stainless steel materials, aluminum materials cone 3, the collar 6 material is aluminum, stainless steel material of the inner tube 7, insulating layer 8 Material PTFE, PTFE material insulating ring 9 , a locking ring 10 made of copper material, the barrel 11 Bu Xi copper material, copper material connecting ring 12, the resistance value of the current limiting resistor 13 10ΜΩ, 14 high-pressure tube of stainless steel material, a silver material, a connection pin 16, the insulation barrel 17 PTFE material, the material tube 18 is connected copper.

[0025] 所述的薄膜阴极5为直径为10 mm的圆形。 [0025] The cathode film 5 having a diameter of 10 mm circular. 薄膜阴极5的中层金属膜21为50 nm厚度的金膜,上层的带针孔阵列金属膜22为厚度400nm的金膜。 The cathode film 21 of the middle metal film 5 to a thickness of 50 nm gold film, a pinhole array with the upper metal film 22 having a thickness of 400nm gold film. 带针孔阵列金属膜22上刻蚀有针孔阵列,针孔阵列由100x100个直径为35μπι的小孔构成。 With a metal film on the pinhole array 22 etched with a pinhole array, a pinhole array of 100x100 35μπι diameter of the small holes.

[0026] 本发明的透射式平响应软X射线辐射流测量装置工作流程如下: [0026] The present invention is a transmission level in response to the soft X-ray radiation flow measuring device works as follows:

[0027] 本发明中的输出头2通过电缆与示波器连接。 Output head [0027] 2 according to the present invention is connected via a cable to an oscilloscope. 高压头19通过电缆与直流电源连接, 电源提供-2000V偏压,在薄膜阴极5与阳极4之间施加电场,同时为内筒7、绝缘层8、外筒11 构成的储能电容充电,保证瞬间信号输出有足够电荷量。 High pressure head 19 by a cable connected to a DC power supply, power supply -2000V bias field is applied between the anode 5 and the cathode film 4, while the inner cylinder 7, insulating layer 8, the charge storage capacitor 11 composed of the outer cylinder, to ensure instant a sufficient amount of charge signal output. 当X射线照射至薄膜阴极5,电子产生并在电场作用下飞行至阳极4,通过锥体3、输出头2、电缆传输至示波器。 When the X-ray 5 is irradiated to the thin film cathode, electrons are generated and flying to the anode in the electric field 4, 3, 2 first outputs, to the oscilloscope via cable transmission cone. 根据公式, According to the formula,

Figure CN105842727BD00051

其中:#_为辐射流,贫为信号衰减倍数爲为示波器阻抗,.《为本发明的探测装置响应函数,Ω为立体角,能够计算得到辐射流随时间变化结果。 Wherein: #_ radiation flow, is a signal attenuation factor for the lean oscilloscope impedance, "in response to the detection device of the present invention functions, solid angle [Omega], can be calculated to obtain the results of a stream of radiation over time.

[0028] 实施例2 [0028] Example 2

[0029] 本实施例与实施例1的结构相同,不同之处是,薄膜阴极5与阳极4间的间隙为1 mm,输出头2接头为N型,阳极4的材料采用金。 [0029] Embodiment of the present embodiment is the same as the structure of Example 1, except that the film of the cathode 5 and the anode gap 4 is 1 mm, the output of the first N-type connector 2, the anode material 4 with gold.

[0030] 实施例3 [0030] Example 3

[0031] 本实施例与实施例1的结构相同,不同之处是,薄膜阴极5与阳极4间的间隙为3 _,输出头2接头为BNC型,阳极4的材料采用铝。 [0031] Embodiment of the present embodiment is the same as the structure of Example 1, except that, a cathode film and the anode 5 is a gap between the 3 _ 4, the first output of BNC type connector 2, the anode material 4 is made of aluminum.

[0032] 最后说明的是:以上所述仅为本发明的优选实施例而已,并不用于限制本发明,尽管参照前述实施例对本发明进行了详细的说明,对于本领域的技术人而言,其依然可以对前述实施例所记载的技术方案进行修改,或者对其中部分特征等同替换,所做的任何修改、 等同替换、改进等,均应包含在本发明的保护范围之内。 [0032] Finally is noted that: the above embodiments are only preferred embodiments of the present invention, but not intended to limit the present invention, although the present invention has been described in detail with reference to the foregoing embodiments, the skilled person in the art, Examples which may still aspect of the described embodiment may be modified or equivalents to part features, any modifications, equivalent replacements, improvements, etc., should be included within the scope of the present invention.

Claims (6)

  1. 1. 一种透射式平响应软X射线辐射流测量装置,其特征在于,所述的测量装置包括外壳(1)、输出头(2)、锥体(3)、阳极(4)、薄膜阴极(5)、卡环(6)、内筒(7)、绝缘层(8)、绝缘环(9)、锁紧环(10)、外筒(11)、连接环(12)、限流电阻(13)、高压管(14)、陶瓷可阀(15)、连接针(16)、绝缘筒(17)、连接筒(18)、高压头(19),所述外壳⑴为环状,阳极⑷由三段不同直径的金属圆柱体构成;其连接关系是,在外壳(1)内中心轴线上设置有输出头(2)、锥体(3)、 阳极⑷、外筒(I 1)、绝缘层(8)、薄膜阴极(5)、卡环(6)、内筒(7)、绝缘环(9),阳极⑷后端外围固定设置有锥体(3),锥体(3)的外围固定设置有输出头(2),输出头(2)通过螺钉与外壳(1)连接;卡环(6)的外围固定设置有内筒(7),薄膜阴极(5)通过卡环(6)压紧在内筒(7) 内;内筒⑺的外围设置有外筒(11),内筒⑺与外筒(11) A transmissive flat soft X-ray radiation in response to the flow measuring device, characterized in that said measuring means comprises a housing (1), the first output (2), a cone (3), an anode (4), a cathode film (5), the collar (6), the inner tube (7), an insulating layer (8), an insulating ring (9), locking ring (10), an outer cylinder (11), the connecting ring (12), a current limiting resistor (13), the high-pressure pipe (14), may be a ceramic valve (15), the connection pin (16), the insulating tube (17), connecting tube (18), a high pressure head (19), said housing ⑴ an annular anode ⑷ metal cylinder consists of three sections of different diameters; connected relationship, provided with an output head (2), a cone (3), an anode ⑷, the outer cylinder (the I 1) in the housing (1) within the central axis, an insulating layer (8), a cathode film (5), the collar (6), the inner tube (7), the insulating ring (9), fixed to the periphery of the anode is provided with a rear end ⑷ cone (3), a cone (3) peripheral fixedly provided with an output head (2), an output head (2) is connected by screws to the housing (1); a peripheral snap ring (6) fixedly provided inner cylinder (7), a thin film cathode (5) by a snap ring (6 ) pressing the inner cylinder (7); the inner periphery of the outer cylinder is provided with ⑺ cylinder (11), the inner tube and the outer tube ⑺ (11) 间设置有绝缘层(8),外筒(11) 的外围设置有锁紧环(10),绝缘环(9)通过锁紧环(10)压紧在外筒(I 1)内;外筒(I 1)通过连接环(12)与输出头(2)连接;所述的薄膜阴极(5)与阳极(4)间有一间隙;外壳(1)固定连接有高压管(14),高压管(14)中轴线上依次设置有陶瓷可阀(15)、连接针(16)、绝缘筒(17)、 高压头(19);连接针(16)包裹在绝缘筒(17)内;陶瓷可阀(15)的下端与高压管(14)固定连接,上端通过连接针(16)与高压头(19)连接;高压头(19)通过连接筒(18)与高压管(14)连接;限流电阻(13)的一端与内筒(7)连接,另一端与陶瓷可阀(15)中的芯针固定连接。 Is provided between the insulating layer (8), the periphery of the outer cylinder (11) is provided with a locking ring (10), an insulating ring (9) by a lock ring (10) pressing the outer tube (I 1) therein; outer cylinder ( the I 1) connected by a connecting ring (12) and an output head (2); the film cathode (5) and the anode (with a gap 4) between; a housing (1) is fixedly connected with a high-pressure pipe (14), high-pressure pipe ( 14) with a central axis are sequentially disposed may be a ceramic valve (15), the connection pin (16), the insulating tube (17), a high pressure head (19); a connector pin (16) enclosed within the insulating cylinder (17); a ceramic valve may be (15) the lower end of the high-pressure pipe (14) is fixedly connected to an upper end connected to the high head (19) through the connection pin (16); high head (19) connected by a connecting tube (18) and the high-pressure pipe (14); flow restrictor resistor (13) one end of the inner tube (7) is connected, the other end may be a ceramic valve (15) is fixedly connected to the needle core.
  2. 2. 根据权利要求1所述的透射式平响应软X射线辐射流测量装置,其特征在于,所述的薄膜阴极(5)与阳极(4)间的间隙为1-3 mm。 A transmission according to claim 1, in response to the level of the soft X-ray radiation flow measuring device, characterized in that said cathode film (5) and the gap between (4) the anode is 1-3 mm.
  3. 3. 根据权利要求1所述的透射式平响应软X射线辐射流测量装置,其特征在于,所述的薄膜阴极(5)由底层的硅环(20)、中层的金属膜(21)、上层的带针孔阵列金属膜(22)构成。 A transmission according to claim 1, in response to the level of the soft X-ray radiation flow measuring device, characterized in that said cathode film (5) by the underlying silicon ring (20), the middle metal film (21), the upper metal film with a pinhole array (22).
  4. 4. 根据权利要求1所述的透射式平响应软X射线辐射流测量装置,其特征在于,所述的输出头⑵接头为SM型、N型、BNC型中的一种。 A transmission according to claim 1, in response to the level of the soft X-ray radiation flow measuring device, characterized in that said output connector is ⑵ head SM type, N-type, one kind of type BNC.
  5. 5. 根据权利要求1所述的透射式平响应软X射线辐射流测量装置,其特征在于,所述的阳极⑷、锥体⑶到输出头⑵的阻抗均为50 Ω。 A transmission according to claim 1, in response to the level of the soft X-ray radiation flow measuring device, characterized in that said anode ⑷, the output impedance of the cone head ⑵ ⑶ are 50 Ω.
  6. 6. 根据权利要求1所述的透射式平响应软X射线辐射流测量装置,其特征在于,所述的阳极(4)的材料采用铜、铝、金中的一种。 A transmission according to claim 1, in response to the level of the soft X-ray radiation flow measuring device, characterized in that said anode (4) used as a material of copper, aluminum, gold one.
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EP2544026A1 (en) * 2011-07-07 2013-01-09 Fei Company Silicon Drift Detector for use in a charged particle apparatus
CN105158789A (en) * 2015-09-11 2015-12-16 中国工程物理研究院激光聚变研究中心 Spatial distinguishing radiant flux detection apparatus
CN105204059A (en) * 2015-09-11 2015-12-30 中国工程物理研究院激光聚变研究中心 Device and method for quantitative measurement of soft X-ray radiant flows in local area
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