CN105826171B - Dynamic seal rotating device - Google Patents
Dynamic seal rotating device Download PDFInfo
- Publication number
- CN105826171B CN105826171B CN201610273163.6A CN201610273163A CN105826171B CN 105826171 B CN105826171 B CN 105826171B CN 201610273163 A CN201610273163 A CN 201610273163A CN 105826171 B CN105826171 B CN 105826171B
- Authority
- CN
- China
- Prior art keywords
- dynamic
- centre bore
- seal casinghousing
- rotary device
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007789 sealing Methods 0.000 claims abstract description 37
- 238000001035 drying Methods 0.000 claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 7
- 230000005540 biological transmission Effects 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000011148 porous material Substances 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 239000007921 spray Substances 0.000 claims description 3
- 241000233855 Orchidaceae Species 0.000 claims 1
- 238000004140 cleaning Methods 0.000 abstract description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000009434 installation Methods 0.000 abstract description 2
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 2
- 238000001039 wet etching Methods 0.000 abstract description 2
- 239000000969 carrier Substances 0.000 abstract 1
- 230000007547 defect Effects 0.000 abstract 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 abstract 1
- 238000002791 soaking Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02057—Cleaning during device manufacture
- H01L21/02068—Cleaning during device manufacture during, before or after processing of conductive layers, e.g. polysilicon or amorphous silicon layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
A dynamic seal rotating device is provided, through which a motor is mounted on the upper part of a rotary cleaning and spin-drying device. The dynamic seal rotating device avoids the defect that the motor is difficult to seal when being arranged at the lower part, and simultaneously saves the manufacturing cost. The dynamic seal rotating device adopts three layers of seals at the position close to the working area. The filled nitrogen forms positive pressure protection in the sealed shell, so that the sealing performance is better; the sprayed nitrogen prevents the solution water drops remained under the tank cover from causing secondary pollution to the cleaned and dried wafer. The lower part of the motor guide shaft is provided with a carrier connecting pin, which is convenient for the installation and the disassembly of carriers such as a wafer clamp, a rotating frame and the like. The invention can complete the processes of soaking, cleaning and spin-drying in one equipment cavity in the wet etching cleaning process. The dynamic seal rotating device solves the problems of complex structure and difficult sealing of the traditional servo motor shaft sealing device, and also solves the problem of realizing the rotating output by suspending a wafer carrier on an output shaft of a servo motor.
Description
Technical field
The present invention relates to a kind of equipment to semiconductor crystal wafer cleaning, drying, more particularly to a kind of cleaning, drying equipment
The dynamic-sealing rotary device of middle servomotor.
Background technology
In IC industries, spin rinse, drying technique are the important steps of the purifying processing of wafer.Traditional spin rinse,
Servomotor in drying equipment is mounted on device bottom, and the encapsulation process difficulty of servo motor shaft is big.Thus servo motor shaft
Sealing device design it is complex, part is more, body difference is difficult to process greatly, it is of high cost to manufacture.Although take complexity
Design, but the structure is impregnated, in long-time in cleaning process, servo motor shaft still has the hidden danger that sealing is difficult to ensure that.
For this purpose, it is problem urgently to be resolved hurrily to solve servomotor sealing difficulty.
The content of the invention
The purpose of the present invention is providing, a kind of sealing structure is simple, manufacturing cost is low, the dynamic sealing of good seal performance
Rotating device.It can be mounted on above cleaning drying equipment by this dynamic-sealing rotary device servomotor, while silicon wafer carrier can
It is suspended on servo motor output shaft and realizes rotation output function.
The object of the present invention can be achieved.Dynamic-sealing rotary device of the present invention includes servomotor and motor is fixed
Plate, dynamic-sealing rotary device of the present invention are characterized in that：A box-like seal casinghousing of circle, servo electricity are connected below motor fixing plate
Machine output shaft is in through motor fixing plate in the cavity of seal casinghousing, and servo motor output shaft holds connection one tightly by sunk key
Guiding axis, the motor drive that the connection of guiding axis flange in the bottom is made of flanged joint part, optical axis portion and carrier coupling part
Axis, the shell bottom of the seal casinghousing are set there are one centre bore, and shell bottom upper surface is surrounded by a groove along centre bore, under shell
Surface is surrounded by a protrusion along centre bore, and No.1 flange bearing is inlayed in centre bore lower end, and the seal casinghousing passes through following table
The outer rim of face protrusion and the outer rim of No.1 flange bearing are connected with mounting disc, and are fixed by screws in mounting disc, described
Motor transmission shaft flanged joint part is landed in the groove above capsul body shell bottom, and optical axis portion upper end is mounted on capsul
In the axis hole set in body centre bore, No.1 flange bearing inner ring and mounting disc, optical axis portion lower end passes through No. two flange shafts
It holds in the capping, carrier coupling part is in below capping, and carrier coupling part lower end is set there are one jack, on jack
Equipped with carrier connecting pin 11.
Dynamic-sealing rotary device of the present invention, wherein the hole wall surrounding of the seal casinghousing centre bore is radially opened, there are one annulars
Chamber, annular chamber form gas chamber, are opened immediately ahead of shell bottom there are one air inlet, air inlet is connected with annular chamber, the motor transmission shaft
Axle center is equipped with hollow cavity, and the epimere of hollow cavity is radially provided with several intercommunicating pores, the hollow cavity by intercommunicating pore, annular chamber with into
Gas port connects, and the hypomere radial symmetric of the motor transmission shaft hollow cavity is set there are two gas outlet, and one is connected on each gas outlet
Root air jet pipe, the air jet pipe is in capping in the following, the air inlet, annular chamber, hollow cavity, intercommunicating pore, venthole and spray
Tracheae forms nitrogen-sealed and drying structure.
Dynamic-sealing rotary device of the present invention, wherein between the installing plate and capping be equipped with gasket, the gasket with
And No.1 flange bearing and No. two flange bearings form three-layer sealed structure.
Dynamic-sealing rotary device of the present invention, wherein the motor transmission shaft, seal casinghousing centre bore, No.1 flange bearing,
No. two flange bearings and mounting disc coaxial line.
Dynamic-sealing rotary device of the present invention, wherein the air jet pipe is equipped with several fumaroles, the fumarole exit
In capping lower surface.
Dynamic-sealing rotary device difference from prior art of the present invention is that the present invention breaks through traditional thinking, by servo
Motor above rotary-cleaning, drying equipment, is effectively avoided traditional rotary-cleaning, got rid of by dynamic-sealing rotary device
Dry equipment generates the drawbacks of sealing is difficult when motor is mounted on lower part.The present invention while leakproofness is improved, also as
Structural member is simple and has saved manufacture cost.The dynamic-sealing rotary device of the present invention is using two close to the place of working region
The three-layer sealed technology of flange bearing and a gasket；The nitrogen-sealed of design and drying structure are formed inside seal casinghousing
Positive pressure protection, sealing performance are more preferable.Nitrogen injection is in capping in the following, effectively avoiding the solution water droplet pair remained in capping
The wafer that cleaning drying finishes causes secondary pollution.Guiding axis lower part is equipped with carrier connecting pin, convenient for loads such as wafer jig, pivoted frames
Installation, the dismounting of body.The present invention can make immersion, cleaning, drying process in an equipment cavity in wet etching cleaning
It completes.Using the dynamic-sealing rotary device of the present invention, both solved that traditional servo motor shaft sealing device is complicated, sealing is tired
The problem of difficult, also completes servo motor output shaft suspension chip carrier and realizes rotation output problem.
The dynamic-sealing rotary device of the present invention is described further below in conjunction with the accompanying drawings.
Description of the drawings
Fig. 1 is the surface structure schematic diagram of dynamic-sealing rotary device of the present invention.
Fig. 2 is the A-A cross-sectional views in Fig. 1.
Fig. 3 is the B-B cross-sectional views in Fig. 2.
Fig. 4 is the three-valued structures diagrammatic cross-section of dynamic-sealing rotary device of the present invention.
Specific embodiment
As shown in Figure 1, Figure 2, Figure 3, Figure 4, dynamic-sealing rotary device of the present invention includes servomotor 1 and motor fixing plate 2.
Motor fixing plate 2 connects a box-like seal casinghousing 4 of circle below.1 output shaft of servomotor is in sealing through motor fixing plate 2
In the cavity of housing 4.1 output shaft of servomotor holds one guiding axis 3 of connection tightly by sunk key.3 flange in the bottom of guiding axis connects
The motor transmission shaft 10 being made of flanged joint part, optical axis portion and carrier coupling part.The shell bottom of seal casinghousing 4 is equipped with one
A centre bore.Shell bottom upper surface is surrounded by a groove along centre bore, shell bottom surface along centre bore be surrounded by one it is convex
It rises.Inlay No.1 flange bearing 5 in centre bore lower end.Seal casinghousing 4 passes through the outer rim of lower surface protrusion and No.1 flange bearing 5
Outer rim be connected with mounting disc 6, and be fixed by screws in mounting disc 6.10 flanged joint part of motor transmission shaft is landed in
In groove above 4 shell bottom of seal casinghousing；Optical axis portion upper end is mounted on 4 centre bore of seal casinghousing, 5 inner ring of No.1 flange bearing
And in the axis hole set in mounting disc 6；Optical axis portion lower end is mounted on through No. two flange bearing 5-1 in capping 8；Carrier connects
It connects and is partially located in below capping 8.Carrier coupling part lower end is set there are one jack, and jack is equipped with carrier connecting pin 11.
As shown in Fig. 2, Fig. 3 Fig. 4, the hole wall surrounding of 4 centre bore of seal casinghousing radially opens that there are one annular chamber b, annular chamber b
Gas chamber is formed, opens that there are one air inlet a, air inlet a to connect with annular chamber b immediately ahead of shell bottom.10 axle center of motor transmission shaft is equipped with
The epimere of hollow cavity c, hollow cavity c are radially provided with several intercommunicating pore d.Hollow cavity c passes through intercommunicating pore d, annular chamber b and air inlet a
Connection.The hypomere radial symmetric of 10 hollow cavity c of motor transmission shaft is set there are two gas outlet e, piece spray of connection on each gas outlet e
Tracheae 9.Air jet pipe 9 is in below capping 8.Air inlet a, annular chamber b, hollow cavity c, intercommunicating pore d, venthole e and air jet pipe 9
Form nitrogen-sealed and drying structure.
As shown in Figure 1, Figure 3, air jet pipe 9 is equipped with several fumaroles.Fumarole is in 8 lower surface of capping.
As shown in Figure 2 and Figure 3, gasket 7, the gasket 7 and No.1 flange shaft are equipped between installing plate 6 and capping 8
It holds 5 and No. two flange bearing 5-1 and forms three-layer sealed structure.
In dynamic-sealing rotary device of the present invention, motor transmission shaft 10,4 centre bore of seal casinghousing, No.1 flange bearing 5, two
Number 6 coaxial line of flange bearing 5-1 and mounting disc well ensures the linearity that servo motor shaft is place.
Dynamic-sealing rotary device shape of the present invention is similar to cylindrical structural, diameter about 140mm, height about 310mm, mainly by
Aluminium alloy（YH52）, stainless steel（316L）Material processing is assembled.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to the model of the present invention
It encloses and is defined, on the premise of design spirit of the present invention is not departed from, those of ordinary skill in the art are to the technical side of the present invention
The various modifications and improvement that case is made should all be fallen into the protection domain that claims of the present invention determines.
Claims (5)
1. a kind of dynamic-sealing rotary device, including servomotor（1）And motor fixing plate（2）, it is characterised in that：Motor fixing plate
（2）A box-like seal casinghousing of circle is connected below（4）, servomotor（1）Output shaft passes through motor fixing plate（2）It is in capsul
Body（4）Cavity in, servomotor（1）Output shaft holds one guiding axis of connection tightly by sunk key（3）, guiding axis（3）Bottom method
The motor transmission shaft that orchid connection is made of flanged joint part, optical axis portion and carrier coupling part（10）, the seal casinghousing
（4）Shell bottom set there are one centre bore, shell bottom upper surface is surrounded by a groove along centre bore, and shell bottom surface is along centre bore
A protrusion is surrounded by, No.1 flange bearing is inlayed in centre bore lower end（5）, the seal casinghousing（4）Pass through lower surface protrusion
Outer rim and No.1 flange bearing（5）Outer rim and mounting disc（6）Connection, and it is fixed by screws in mounting disc（6）On, institute
State motor transmission shaft（10）Flanged joint part is landed in seal casinghousing（4）In groove above shell bottom, optical axis portion upper end peace
Mounted in seal casinghousing（4）Centre bore, No.1 flange bearing（5）Inner ring and mounting disc（6）In the axis hole of upper setting, optical axis portion
Lower end passes through No. two flange bearings（5-1）Mounted on capping（8）On, carrier coupling part is in capping（8）Below, carrier connects
Socket part point lower end is set there are one jack, and jack is equipped with carrier connecting pin（11）.
2. dynamic-sealing rotary device according to claim 1, it is characterised in that：The seal casinghousing（4）The hole of centre bore
Wall surrounding is radially opened there are one annular chamber（b）, annular chamber（b）Gas chamber is formed, opens that there are one air inlets immediately ahead of shell bottom（a）, into
Gas port（a）With annular chamber（b）Connection, the motor transmission shaft（10）Axle center is equipped with hollow cavity（c）, hollow cavity（c）Epimere footpath
To equipped with several intercommunicating pores（d）, the hollow cavity（c）Pass through intercommunicating pore（d）, annular chamber（b）With air inlet（a）Connection, it is described
Motor transmission shaft（10）Hollow cavity（c）Hypomere radial symmetric set there are two gas outlet（e）, each gas outlet（e）Upper connection one
Root air jet pipe（9）, the air jet pipe（9）It is in capping（8）In the following, the air inlet（a）, annular chamber（b）, hollow cavity（c）, even
Through hole（d）, venthole（e）And air jet pipe（9）Form nitrogen-sealed and drying structure.
3. dynamic-sealing rotary device according to claim 1 or 2, it is characterised in that：The mounting disc（6）With capping（8）
Between be equipped with gasket 7, the gasket 7 and No.1 flange bearing（5）With No. two flange bearings（5-1）It forms three-layer sealed
Structure.
4. dynamic-sealing rotary device according to claim 1, it is characterised in that：The motor transmission shaft（10）, capsul
Body（4）Centre bore, No.1 flange bearing（5）, No. two flange bearings（5-1）And mounting disc（6）Coaxial line.
5. dynamic-sealing rotary device according to claim 2, it is characterised in that：The air jet pipe（9）It is equipped with several sprays
Stomata, the fumarole exit is in capping（8）Lower surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610273163.6A CN105826171B (en) | 2016-04-28 | 2016-04-28 | Dynamic seal rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610273163.6A CN105826171B (en) | 2016-04-28 | 2016-04-28 | Dynamic seal rotating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105826171A CN105826171A (en) | 2016-08-03 |
| CN105826171B true CN105826171B (en) | 2018-05-18 |
Family
ID=56528888
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610273163.6A Active CN105826171B (en) | 2016-04-28 | 2016-04-28 | Dynamic seal rotating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105826171B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109166809A (en) * | 2018-07-12 | 2019-01-08 | 深圳市华星光电技术有限公司 | Wet etching equipment |
| CN109950185B (en) * | 2019-04-18 | 2021-06-22 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Wafer spin-drying equipment |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201769204U (en) * | 2010-07-30 | 2011-03-23 | 楚天科技股份有限公司 | Sealing device of mechanical arm for cleaning machine |
| CN103752197A (en) * | 2014-01-07 | 2014-04-30 | 中国电子科技集团公司第四十八研究所 | Cutting liquid stirring system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102276144B (en) * | 2011-06-29 | 2013-08-14 | 长飞光纤光缆有限公司 | Rotary seal chuck of optical fiber preform rod deposition lathe |
| US9874213B2 (en) * | 2012-05-25 | 2018-01-23 | Andrey Yurievich Yazykov | Centrifugal multiple-impeller electric pump |
-
2016
- 2016-04-28 CN CN201610273163.6A patent/CN105826171B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201769204U (en) * | 2010-07-30 | 2011-03-23 | 楚天科技股份有限公司 | Sealing device of mechanical arm for cleaning machine |
| CN103752197A (en) * | 2014-01-07 | 2014-04-30 | 中国电子科技集团公司第四十八研究所 | Cutting liquid stirring system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105826171A (en) | 2016-08-03 |
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