CN108619833A - A kind of front end washing spray device being suitable for sour gas, dust atmosphere - Google Patents
A kind of front end washing spray device being suitable for sour gas, dust atmosphere Download PDFInfo
- Publication number
- CN108619833A CN108619833A CN201810792629.2A CN201810792629A CN108619833A CN 108619833 A CN108619833 A CN 108619833A CN 201810792629 A CN201810792629 A CN 201810792629A CN 108619833 A CN108619833 A CN 108619833A
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- Prior art keywords
- flange
- washing
- washing cavity
- cavity
- spray device
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- 238000005406 washing Methods 0.000 title claims abstract description 107
- 239000007921 spray Substances 0.000 title claims abstract description 36
- 239000000428 dust Substances 0.000 title claims abstract description 32
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 title claims abstract description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 76
- 239000002351 wastewater Substances 0.000 claims abstract description 23
- 238000003466 welding Methods 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 6
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 5
- 239000003365 glass fiber Substances 0.000 claims description 5
- 210000000481 breast Anatomy 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 57
- 238000012423 maintenance Methods 0.000 description 8
- 241000196324 Embryophyta Species 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 239000002912 waste gas Substances 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000003111 delayed effect Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 241000233855 Orchidaceae Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009510 drug design Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/06—Spray cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1456—Removing acid components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/1456—Removing acid components
- B01D53/1481—Removing sulfur dioxide or sulfur trioxide
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/204—Inorganic halogen compounds
- B01D2257/2047—Hydrofluoric acid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2066—Fluorine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/30—Sulfur compounds
- B01D2257/302—Sulfur oxides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/40—Nitrogen compounds
- B01D2257/404—Nitrogen oxides other than dinitrogen oxide
Abstract
The invention discloses one kind being suitable for sour gas, the front end washing spray device of dust atmosphere, it is related to that the technical field of process gas processing equipment is made in semiconductor fabrication, including washing cavity, air inlet flange, gas outlet flange and delivery port flanges, air inlet flange and gas outlet flange are welded on top left side and the right side of washing cavity vertically, delivery port flanges are welded on the bottom of washing cavity vertically, the lower section for washing cavity is equipped with waste water tank, the top of waste water tank is equipped with water inlet flange, the water inlet flanged joint that delivery port flanges pass through connecting tube and waste water tank, horizontal welding is connected to water jet flange one and water jet flange two respectively for the left upper portion of washing cavity and lower part, the lower right side level of washing cavity is welded with water jet flange three, nozzle is equipped in water jet flange.After the washing spray device of front end, dust is combined with water to be fallen to bottom of device and is flushed in waste water tank along flow the dust contained in exhaust gas.
Description
Technical field
The present invention relates to the technical fields that process gas processing equipment is made in semiconductor fabrication, and in particular to a kind of
Suitable for sour gas, the front end washing spray device of dust atmosphere.
Background technology
It arranges, also has big outside the harmful exhausts such as existing sulfur dioxide, nitrogen oxides, fluoro-gas in semiconductor fabrication
The dust of amount is discharged into exhaust gas in environment, causes environmental air pollution.Apply the conventional exhaust processing in semicon industry
Equipment can shorten equipment in long-play because the dust contained in exhaust gas causes waste gas treatment equipment reaction chamber to block
Maintenance period influences the production capacity of factory, meanwhile, it can be because of the sour gas accelerated corrosion equipment in exhaust gas in long-play
Metal tubes and connect factory service air draft metal tubes, cause gas to leak, lead to security incident.
Chinese Patent Application No. be CN104258664A disclose a kind of dust and waste gas treatment device, mainly by support base,
Lower casing, upper casing, pedestal composition, support base are located on pedestal, and lower casing, upper casing are semicircle cavity and pass through welding
Casing is constituted, the motor set on support base and transmission axis connection, transmission shaft pass through casing center and be located at branch by fixed seat
It supports on seat, rotating wheel and fixed ring is equipped in casing, rotating wheel is arranged by transmission device and transmission axis connection, fixed ring in machine
On shell, rotating wheel is radially staggered with fixed ring, and rotating vane is respectively equipped in rotating wheel, the axial stem of fixed ring, is consolidated
Fixed blade, the diametrical position of solvent shower nozzle set on casing are corresponding with rotating vane.
Chinese Patent Application No. is that CN107758375A discloses a kind of dust processing equipment, including rack, is set in rack
There are material storage tube and surge drum, discharge nozzle is communicated on material storage tube, shaft is equipped on the outside of discharge nozzle, shaft is fixedly connected with flexible axle,
Flexible axle one end is put in discharge nozzle；Dredging switch and impeller are equipped in surge drum；Annular groove and ring gear are fixedly provided in rack,
The tooth form of ring gear is taper, and bevel gear is equipped in the gear hole of ring gear, and bevel gear is rotatably connected in rack, ring gear with
Gear shaft is equipped between bevel gear, gear shaft lower end is fixedly connected with compressor arm；Clockwork spring, clockwork spring inner end and cone are equipped in annular groove
Gear upper surface eccentric part is fixedly connected, and clockwork spring inner end is fixed with the first magnet, and the second magnetic is installed on annular groove inner wall
Iron is fixedly connected with connecting rod in shaft outer circle, and connecting rod is fixedly connected with clockwork spring outer end.
By being found after being carefully analyzed to above-mentioned documents：Mistake in involved technical solution structure in documents 1
In complexity, maintenance cost is higher, meanwhile, device the space occupied is also larger；Involved technical solution can only in documents 2
Realization handles dust in exhaust gas, and can not be removed to the sour gas in exhaust gas, therefore, to being applied to semiconductor manufacturing
Process gas processing equipment needs are made in the process and re-start more rational design.
Invention content
The purpose of the present invention is to provide it is a kind of suitable for sour gas, dust atmosphere front end washing spray device, with
It solves the above-mentioned multiple defects caused by the prior art.
A kind of front end washing spray device being suitable for sour gas, dust atmosphere, including wash cavity and be mounted on water
Air inlet flange, gas outlet flange and the delivery port flanges on cavity are washed, the air inlet flange and gas outlet flange erect respectively
Straight to be welded on washing cavity top left side and right side, the delivery port flanges are welded on the bottom of washing cavity, the water vertically
The lower section for washing cavity is equipped with waste water tank, is welded with water inlet flange at the top of the waste water tank, the delivery port flanges pass through company
The water inlet flanged joint with waste water tank is taken over, horizontal welding is connected to water jet respectively for the left upper portion of the washing cavity and lower part
The lower right side level of flange one and water jet flange two, the washing cavity is welded with water jet flange three, the water jet
Nozzle is equipped in flange one, water jet flange two and water jet flange three.
Preferably, the bosom of the washing cavity is vertically-mounted baffle, the top of the baffle and washing cavity
It connects and the inside for washing cavity is separated into left and right two chambers.
Preferably, the front side of the washing cavity is correspondingly provided with the observation panel of rectangle, the sight in each nozzle installation place
Self-clinching nut is uniformly welded on the inside of Cha Kou, the outside at the observation is equipped with transparent panel by lock-screw, described
Gasket is added between transparent panel and washing cavity, the material of the gasket is the polytetrafluoroethylene (PTFE) containing glass fibre
Composite material.
Preferably, the lower section of the inside of the washing cavity is equipped with filter plate, and the lower section of the filter plate is equipped with support plate
And be welded on the inner wall of washing cavity, the filter plate is horizontally arranged at by support plate in washing cavity.
Preferably, the left lower of the washing cavity also is provided with the observation panel of rectangle, the bottom of the observation panel and branch
Fagging is in identical level height.
Preferably, the inside of the washing cavity and the weldment of inside do polytetrafluorethylecoatings coatings covering treatment, described
Weldment includes support plate and self-clinching nut.
Preferably, the quantity of the air inlet flange and gas outlet flange is respectively four and one.
The advantage of the invention is that：Exhaust gas enters the left chamber of washing cavity by air inlet flange, then passes through water jet method
Nozzle in orchid one and water jet flange two sprays water to exhaust gas, and dust in exhaust gas is made to be combined to fall to water and wash cavity
Bottom is simultaneously flushed to along flow in waste water tank, and then exhaust gas enters back into the right chamber of washing cavity, then passes through water jet flange three
In nozzle water spray dust is carried out again to exhaust gas, then, exhaust gas is set by gas outlet flange into subsequent exhaust-gas treatment
It being handled in standby reaction chamber, it is therefore prevented that the blocking of reaction chamber extends twice of plant maintenance period or more, and in exhaust gas
For sour gas after the front end washing spray device in the present invention, sour gas is dissolved in water, becomes liquid from gaseous state, then suitable
Flow to be flushed in waste water tank.
By being correspondingly provided with the observation panel of rectangle, the inside of observation panel in each nozzle installation place in the front side of washing cavity
It is uniformly welded with self-clinching nut, the outside at observation is equipped with transparent panel by lock-screw, convenient for inside personal observations
Working condition, and by adding gasket between transparent panel and washing cavity, the material of gasket is to contain glass fibers
The ptfe composite of dimension avoids leakage of the exhaust gas between transparent panel and washing cavity from installation gap, meanwhile,
The corrosion resistance of the gasket of this material is stronger, longer life expectancy.By to wash cavity inside and inner weldment in prop up
Fagging and self-clinching nut do polytetrafluorethylecoatings coatings covering treatment, and sour gas has been delayed to wash spray to the front end in the present invention
The corrosion of device extends the plant maintenance period.By the way that multiple air inlet flanges are arranged on washing cavity, can once access
Multiple exhaust gas sources improve the front end washing spray device in the present invention to the work containing sour gas and the exhaust-gas treatment of dust
Efficiency reduces semiconductor production cost.
Description of the drawings
Fig. 1 is the whole structural schematic diagram of the present invention.
Fig. 2 is the structural schematic diagram faced that cavity is washed in the present invention.
Fig. 3 is the structural schematic diagram of the left view of washing cavity in the present invention.
Fig. 4 is the structural schematic diagram of the bottom of washing cavity in the present invention.
Wherein, 1- washes cavity；2- air inlet flanges；The gas outlets 3- flange；4- delivery port flanges；5- connecting tubes；6- is useless
Water tank；7- water jets flange one；8- water jets flange two；9- water jets flange three；10- lock-screws；11- gaskets；12- is saturating
Bright panel；13- support plates；14- filter plates；15- nozzles；16- baffles；17- water inlet flanges；18- self-clinching nuts.
Specific implementation mode
To make the technical means, the creative features, the aims and the efficiencies achieved by the present invention be easy to understand, with reference to
Specific implementation mode, the present invention is further explained.
Embodiment 1
As shown in Figures 1 to 4, a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, including washing
Cavity 1 and air inlet flange 2, gas outlet flange 3 and delivery port flanges 4 on washing cavity 1, the air inlet flange
2 and gas outlet flange 3 be welded on vertically respectively washing cavity 1 top left side and right side, the delivery port flanges 4 vertically weld
It is equipped with waste water tank 6 in the lower section of the bottom of washing cavity 1, the washing cavity 1, the top of the waste water tank 6 is welded with into water
Mouth flange 17, the delivery port flanges 4 pass through the water inlet flange 17 of connecting tube 5 and waste water tank 6 and connect, the washing cavity 1
Left upper portion and horizontal welding is connected to water jet flange 1 and water jet flange 28 respectively for lower part, the right side of the washing cavity 1
Side lower part level is welded with water jet flange 39, the water jet flange 1, water jet flange 28 and water jet flange 39
It is interior to be equipped with nozzle 15.
In the present invention, the bosom of the washing cavity 1 is vertically-mounted baffle 16, the baffle 16 and washing chamber
The top of body 1 connects and the inside for washing cavity 1 is separated into left and right two chambers.
In the present invention, the quantity of the air inlet flange 2 and gas outlet flange 3 is respectively four and one.
The operation principle of the present invention：Exhaust gas enters the left chamber of washing cavity 1 by air inlet flange 2, then passes through water jet
Nozzle 15 in flange 1 and water jet flange 28 sprays water to exhaust gas, so that dust is combined with water and falls to washing
The bottom of cavity 1 is simultaneously flushed to along flow in waste water tank 6, and then exhaust gas enters back into the right chamber of washing cavity 1, then passes through water spray
Nozzle 15 in mouth flange 39 carries out water spray dust again to exhaust gas, and finally, exhaust gas is entered follow-up by gas outlet flange 3
Waste gas treatment equipment reaction chamber in handled, it is therefore prevented that the blocking of reaction chamber, extend twice of plant maintenance period with
On, and the sour gas in exhaust gas, after the front end washing spray device in the present invention, sour gas is dissolved in water, from gaseous state
Become liquid, then is flushed in waste water tank 6 along flow.
Embodiment 2
As shown in Figures 1 to 4, a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, including washing
Cavity 1 and air inlet flange 2, gas outlet flange 3 and delivery port flanges 4 on washing cavity 1, the air inlet flange
2 and gas outlet flange 3 be welded on vertically respectively washing cavity 1 top left side and right side, the delivery port flanges 4 vertically weld
It is equipped with waste water tank 6 in the lower section of the bottom of washing cavity 1, the washing cavity 1, the top of the waste water tank 6 is welded with into water
Mouth flange 17, the delivery port flanges 4 pass through the water inlet flange 17 of connecting tube 5 and waste water tank 6 and connect, the washing cavity 1
Left upper portion and horizontal welding is connected to water jet flange 1 and water jet flange 28 respectively for lower part, the right side of the washing cavity 1
Side lower part level is welded with water jet flange 39, the water jet flange 1, water jet flange 28 and water jet flange 39
It is interior to be equipped with nozzle 15.
In the present invention, the bosom of the washing cavity 1 is vertically-mounted baffle 16, the baffle 16 and washing chamber
The top of body 1 connects and the inside for washing cavity 1 is separated into left and right two chambers.
In the present invention, the front side of the washing cavity 1 is correspondingly provided with the observation panel of rectangle in 15 installation place of each nozzle,
Self-clinching nut 18 is uniformly welded on the inside of the observation panel, the outside at the observation is equipped with transparent by lock-screw 10
Panel 12, adds gasket 11 between the transparent panel 12 and washing cavity 1, the material of the gasket 11 is to contain glass
The ptfe composite of glass fiber.
In the present invention, the lower section of the inside of the washing cavity 1 is equipped with filter plate 14, and the lower section of the filter plate 14 is set
There is support plate 13 and be welded on the inner wall of washing cavity 1, the filter plate 14 is horizontally arranged at washing chamber by support plate 13
In body 1.
In the present invention, the left lower of the washing cavity 1 also is provided with the observation panel of rectangle, the bottom of the observation panel
It is in identical level height with support plate 13.
In the present invention, the inside of the washing cavity 1 and the weldment of inside do polytetrafluorethylecoatings coatings covering treatment,
The weldment includes support plate 13 and self-clinching nut 18.
In the present invention, the quantity of the air inlet flange 2 and gas outlet flange 3 is respectively four and one.
The operation principle of the present invention：Exhaust gas enters the left chamber of washing cavity 1 by air inlet flange 2, then passes through water jet
Nozzle 15 in flange 1 and water jet flange 28 sprays water to exhaust gas, so that dust is combined with water and falls to washing
The bottom of cavity 1 is simultaneously flushed to along flow in waste water tank 6, and then exhaust gas enters back into the right chamber of washing cavity 1, then passes through water spray
Nozzle 15 in mouth flange 39 carries out water spray dust again to exhaust gas, and finally, exhaust gas is entered follow-up by gas outlet flange 3
Waste gas treatment equipment reaction chamber in handled, it is therefore prevented that the blocking of reaction chamber, extend twice of plant maintenance period with
On, and the sour gas in exhaust gas, after the front end washing spray device in the present invention, sour gas is dissolved in water, from gaseous state
Become liquid, then is flushed in waste water tank 6 along flow.
By being correspondingly provided with the observation panel of rectangle in 15 installation place of each nozzle in the front side of washing cavity 1, observation panel
Inside is uniformly welded with self-clinching nut 18, and the outside at observation is equipped with transparent panel 12 by lock-screw 10, is convenient for personnel
Working condition inside observation, and by adding gasket 11 between transparent panel 12 and washing cavity 1, gasket 11
Material is the ptfe composite containing glass fibre, and exhaust gas is avoided to pacify between transparent panel 12 and washing cavity 1
The leakage at gap is filled, meanwhile, the corrosion resistance of the gasket 11 of this material is stronger, longer life expectancy.By to washing cavity 1
Support plate 13 and self-clinching nut 18 do polytetrafluorethylecoatings coatings covering treatment in internal and inner weldment, have delayed sour gas
Corrosion of the body to the front end washing spray device in the present invention, extends the plant maintenance period.By being arranged on washing cavity 1
Multiple air inlet flanges 2 can once access multiple exhaust gas sources, improve the front end washing spray device in the present invention to containing acid
Property gas and dust exhaust-gas treatment working efficiency, reduce semiconductor production cost.
Based on above-mentioned, in the present invention, exhaust gas enters the left chamber of washing cavity 1 by air inlet flange 2, then passes through water spray
Nozzle 15 in mouthful flange 1 and water jet flange 28 sprays water to exhaust gas, so that dust is combined with water and falls to water
It washes the bottom of cavity 1 and is flushed in waste water tank 6 along flow, then exhaust gas enters back into the right chamber of washing cavity 1, then passes through spray
Nozzle 15 in mouth of a river flange 39 carries out water spray dust again to exhaust gas, finally, after exhaust gas is entered by gas outlet flange 3
It is handled in the reaction chamber of continuous waste gas treatment equipment, it is therefore prevented that the blocking of reaction chamber extends twice of plant maintenance period
More than, and the sour gas in exhaust gas, after the front end washing spray device in the present invention, sour gas is dissolved in water, from gas
State becomes liquid, then is flushed in waste water tank 6 along flow.
Therefore, embodiment disclosed above, all things considered are all merely illustrative, not the only.It is all
It is included in the invention within the scope of the present invention or in the change being equal in the scope of the present invention.
Claims (7)
1. a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, it is characterised in that：Including washing cavity
(1) and mounted on air inlet flange (2), gas outlet flange (3) and the delivery port flanges (4) washed on cavity (1), the air inlet
Mouth flange (2) and gas outlet flange (3) are welded on top left side and the right side of washing cavity (1), the water outlet vertically respectively
Flange (4) is welded on the bottom of washing cavity (1) vertically, and the lower section of the washing cavity (1) is equipped with waste water tank (6), described useless
It is welded with water inlet flange (17) at the top of water tank (6), the delivery port flanges (4) pass through connecting tube (5) and waste water tank (6)
Water inlet flange (17) connects, and horizontal welding is connected to water jet flange one respectively for the left upper portion of the washing cavity (1) and lower part
(7) and water jet flange two (8), the lower right side level of the washing cavity (1) is welded with water jet flange three (9), described
Nozzle (15) is equipped in water jet flange one (7), water jet flange two (8) and water jet flange three (9).
2. according to claim 1 a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, feature
It is：The bosom of the washing cavity (1) is vertically-mounted a baffle (16), the baffle (16) and washes cavity (1)
Top connects and the inside for washing cavity (1) is separated into left and right two chambers.
3. according to claim 1 a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, feature
It is：The front side of the washing cavity (1) is correspondingly provided with the observation panel of rectangle, the observation panel in each nozzle (15) installation place
Inside be uniformly welded with self-clinching nut (18), the outside at the observation is equipped with transparent panel by lock-screw (10)
(12), gasket (11) is added between the transparent panel (12) and washing cavity (1), the material of the gasket (11) is
Ptfe composite containing glass fibre.
4. according to claim 1 a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, feature
It is：The lower section of the inside of the washing cavity (1) is equipped with filter plate (14), and the lower section of the filter plate (14) is equipped with support plate
(13) it and is welded on the inner wall of washing cavity (1), the filter plate (14) is horizontally arranged at washing chamber by support plate (13)
In body (1).
5. a kind of front end washing spray device being suitable for sour gas, dust atmosphere according to claim 3 or 4,
It is characterized in that：The left lower of the washing cavity (1) also is provided with the observation panel of rectangle, the bottom of the observation panel and support plate
(13) it is in identical level height.
6. according to claim 1 a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, feature
It is：The inside of the washing cavity (1) and the weldment of inside do polytetrafluorethylecoatings coatings covering treatment, the weldment packet
Include support plate (13) and self-clinching nut (18).
7. according to claim 1 a kind of suitable for sour gas, the front end washing spray device of dust atmosphere, feature
It is：The quantity of the air inlet flange (2) and gas outlet flange (3) is respectively four and one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810792629.2A CN108619833A (en) | 2018-07-18 | 2018-07-18 | A kind of front end washing spray device being suitable for sour gas, dust atmosphere |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810792629.2A CN108619833A (en) | 2018-07-18 | 2018-07-18 | A kind of front end washing spray device being suitable for sour gas, dust atmosphere |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108619833A true CN108619833A (en) | 2018-10-09 |
Family
ID=63689207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810792629.2A Pending CN108619833A (en) | 2018-07-18 | 2018-07-18 | A kind of front end washing spray device being suitable for sour gas, dust atmosphere |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108619833A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5685886A (en) * | 1994-10-29 | 1997-11-11 | Friatec Aktiengesellschaft Keramik- Und Kunstoffwerke | Apparatus for gas washing |
| KR200361527Y1 (en) * | 2004-06-25 | 2004-09-13 | 김수복 | Dust collector of water filter type |
| KR20090003597A (en) * | 2007-07-03 | 2009-01-12 | 민용기 | Filter device for exhanst gas |
| CN203935761U (en) * | 2014-07-03 | 2014-11-12 | 常州大恒环保科技有限公司 | Trimethylamine waste gas purification apparatus |
| CN206435006U (en) * | 2016-12-10 | 2017-08-25 | 新昌县智昌科技有限公司 | A kind of waste gas purification environmental protection equipment |
| CN206715603U (en) * | 2017-05-24 | 2017-12-08 | 山东冠县华恒工贸有限公司 | A kind of stove flue-gas purification equipment |
| CN207102252U (en) * | 2017-08-12 | 2018-03-16 | 迅展机械（无锡）有限公司 | Environmentally friendly waste gas rinsing type processing unit |
| CN207507200U (en) * | 2017-11-20 | 2018-06-19 | 惠博新型材料有限公司 | A kind of zinc-plated washing soda Flash Gas Compression Skid System |
| CN208990456U (en) * | 2018-07-18 | 2019-06-18 | 安徽京仪自动化装备技术有限公司 | It is a kind of suitable for sour gas, the front end washing spray device of dust atmosphere |
-
2018
- 2018-07-18 CN CN201810792629.2A patent/CN108619833A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5685886A (en) * | 1994-10-29 | 1997-11-11 | Friatec Aktiengesellschaft Keramik- Und Kunstoffwerke | Apparatus for gas washing |
| KR200361527Y1 (en) * | 2004-06-25 | 2004-09-13 | 김수복 | Dust collector of water filter type |
| KR20090003597A (en) * | 2007-07-03 | 2009-01-12 | 민용기 | Filter device for exhanst gas |
| CN203935761U (en) * | 2014-07-03 | 2014-11-12 | 常州大恒环保科技有限公司 | Trimethylamine waste gas purification apparatus |
| CN206435006U (en) * | 2016-12-10 | 2017-08-25 | 新昌县智昌科技有限公司 | A kind of waste gas purification environmental protection equipment |
| CN206715603U (en) * | 2017-05-24 | 2017-12-08 | 山东冠县华恒工贸有限公司 | A kind of stove flue-gas purification equipment |
| CN207102252U (en) * | 2017-08-12 | 2018-03-16 | 迅展机械（无锡）有限公司 | Environmentally friendly waste gas rinsing type processing unit |
| CN207507200U (en) * | 2017-11-20 | 2018-06-19 | 惠博新型材料有限公司 | A kind of zinc-plated washing soda Flash Gas Compression Skid System |
| CN208990456U (en) * | 2018-07-18 | 2019-06-18 | 安徽京仪自动化装备技术有限公司 | It is a kind of suitable for sour gas, the front end washing spray device of dust atmosphere |
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Application publication date: 20181009 |