CN105813449A - Mounting device, load measuring method and program thereof - Google Patents

Mounting device, load measuring method and program thereof Download PDF

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Publication number
CN105813449A
CN105813449A CN201610040711.0A CN201610040711A CN105813449A CN 105813449 A CN105813449 A CN 105813449A CN 201610040711 A CN201610040711 A CN 201610040711A CN 105813449 A CN105813449 A CN 105813449A
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China
Prior art keywords
suction nozzle
parts
loading
pressing
erecting device
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CN201610040711.0A
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Chinese (zh)
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CN105813449B (en
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井桝孝彦
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Juki Corp
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Juki Corp
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/08Monitoring manufacture of assemblages
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408Incorporating a pick-up tool

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Operations Research (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Manipulator (AREA)

Abstract

The invention relates to a mounting device, a load measuring method and a program thereof. The indentation load of setting components on a base plate is high-precisely measured without using a force sensor. The load measuring method adopts the mounting device (1) to make a spiral spring (39) arranged on a suction nozzle (35) to contract for one side, and on the other side, the indentation load from a needle to the component is measured when a component (P) absorbed by the suction nozzle is pressed on the base plate (W); the load measuring method comprises the following steps: the suction nozzle is made to move to the target control position, the component is pressed, the suction nozzle is shot at the target control position (Hb) so that a shooting image is generated, the recognition position (Ha) of the suction nozzle in the shooting image is changed to the current position (Hc) of the suction nozzle, according to a difference value of the target control position and the suction nozzle curret position, the contraction amount of the spiral spring is calculated, and based on the above, the indentation load of the component can be calculated.

Description

Erecting device, loading testing method and program thereof
Technical field
The present invention relates to the use of erecting device from adsorption head to substrate, loading testing method and program thereof that parts are carried out installing by.
Background technology
The adsorption head of erecting device uses the suction nozzle with helical spring, makes coil spring contracts will be pressed into substrate by the parts of suction, thus by component mounting to substrate.As this adsorption head, it is known that detect the adsorption head (for example, referring to patent documentation 1,2) of the loading of pressing in for parts.The adsorption head of patent documentation 1 possesses force cell, force cell detect counteracting force that when parts are pressed into suction nozzle is subject to from parts and as loading of pressing in.The amount of contraction of helical spring is detected by the adsorption head of patent documentation 2 when parts are pressed into, and calculates the loading of pressing in for parts according to the known spring constant of helical spring.
Patent documentation 1: Japanese Unexamined Patent Publication 2005-032860 publication
Patent documentation 2: Japanese Unexamined Patent Publication 2002-151893 publication
Adsorption head described in patent documentation 1 can utilize force cell detection for the loading of pressing in of parts, but there is the increase with number of components and the problem of the weight of adsorption head and cost increase.It addition, the adsorption head described in patent documentation 2, if smooth substrate, then the amount of contraction of helical spring can be multiplied by spring constant and calculate the loading of pressing in for parts simply.But, in practical situations both due to the warpage of substrate or because carrying load and the flexure that produces, it is impossible to the actual amount of contraction of helical spring is detected, it is impossible to calculate the loading of pressing in for parts accurately.
Summary of the invention
The present invention proposes in view of the foregoing, its object is to provide and for the loading of pressing in of substrate when detection part carries accurately, and can not use the erecting device of force cell, loading testing method and program thereof.
The erecting device of the present invention, it shrinks while being pressed into substrate by the parts of described suction by making the pretension portion being arranged at suction nozzle, thus by described component mounting to described substrate, this erecting device is characterised by, possess: suction nozzle shoot part, make described suction nozzle move to be pressed into by described parts to the control position of the target controlled on axle, utilize this suction nozzle shoot part in the control position of this target, described suction nozzle to be shot and generate shooting image;Evolution portion, it is by the current location that identification evolution is the described suction nozzle in real space of the described suction nozzle in shooting image;And LOAD FOR portion, the amount of contraction in its described pretension portion obtained based on the difference controlled between position and the current location of described suction nozzle according to described target, calculate the loading of pressing in for described parts.
The loading testing method of the present invention, its in erecting device, the pretension portion making to be arranged at suction nozzle is shunk while by by the parts of described suction to substrate be pressed into time the loading of pressing in for described parts detect, this loading testing method is characterised by, there is following step: make described suction nozzle move and be pressed into by described parts to the control position of the target controlled on axle, in the control position of this target, described suction nozzle is shot and generate shooting image;By the current location that identification evolution is the described suction nozzle in real space of the described suction nozzle in shooting image;And the amount of contraction based on the described pretension portion obtained according to the difference between control position and the current location of described suction nozzle of described target, calculate the loading of pressing in for described parts.
According to these structures, make when parts are pressed into pretension portion shrink and utilize parts to be pushed back by suction nozzle, therefore create deviation between the current location of the suction nozzle controlled in position and real space of the target of the suction nozzle controlled on axle when parts are pressed into.This deviation illustrates the amount of contraction in pretension portion, therefore, it is possible to the shooting image of suction nozzle when being pressed into according to parts and obtain the current location of suction nozzle, obtain the actual amount of contraction in pretension portion according to the difference controlled between position and the current location of suction nozzle of the target of suction nozzle.Thus, even if when substrate generation warpage or flexure, it is also possible to obtain the actual amount of contraction in pretension portion, therefore, it is possible to detect the loading of pressing in for parts accurately, and do not use force cell.
In above-mentioned erecting device, during the calibration before the lift-launch action of described parts of the described shoot part, repeatedly described suction nozzle being shot with the distance different at a distance of the mounting surface of described substrate, described evolution portion converts based on the corresponding relation controlled between position of described suction nozzle when identifying that position and the plurality of shooting image are taken of the described suction nozzle in multiple shooting images.
In above-mentioned loading testing method, when there is the calibration before the lift-launch action of described parts, with the step that described suction nozzle is repeatedly shot by the distance different at a distance of the mounting surface of described substrate, the step carrying out described conversion is, based on the corresponding relation controlled between position of described suction nozzle when identifying that position and the plurality of shooting image are taken of the described suction nozzle in multiple shooting images, and convert.
According to these structures, during calibration before the lift-launch action of parts, by parts, suction nozzle will not be pushed back, therefore control the suction nozzle on axle target to control position consistent with the current location of the suction nozzle in real space.Therefore, by obtaining the corresponding relation controlled between position identifying position and suction nozzle of the suction nozzle in shooting image such that it is able to by the real position that identification evolution is suction nozzle of the suction nozzle in shooting image.
In above-mentioned erecting device, possessing storage part, the shooting image of described suction nozzle when parts are pressed into by this storage part and the loading of pressing in for described parts store explicitly as tracing information.According to this structure, as the objective evidence for the fault produced when parts are pressed into being tested afterwards, it is possible to the shooting image of suction nozzle and the loading of pressing in for parts are retained explicitly.Even if it addition, when parts are pressed into, loading of pressing in creates abnormal, without again the shooting image of the parts on substrate being shot.
In above-mentioned erecting device, possessing detection unit, this detection unit is judged to exception when the loading of pressing in for described parts is more than or equal to threshold value, when being judged to abnormal in described detection unit, stops the lift-launch action of described parts.According to this structure, when for the loading of pressing in of parts abnormal automatically make lift-launch action stop, it is possible to preventing follow-up fault substrate caused because of the loading of pressing in of parts.
In above-mentioned erecting device, possess notification unit, this notification unit is judged to abnormal in described detection unit, the exception of notice loading of pressing in.According to this structure, will be pressed into the abnormal of load and notify to operator, it is possible to prompting operator carry out reason and are really set for industry.
The program of the present invention is characterised by, makes described erecting device perform each step of above-mentioned loading testing method.According to this structure, by installation procedure in erecting device such that it is able to add the detection function of loading of pressing in erecting device.Thereby, it is possible to the erecting device having to client easily imports the detection function of loading of pressing in.
The effect of invention
In accordance with the invention it is possible to the shooting image of suction nozzle when being pressed into according to parts and obtain the current location of suction nozzle, obtain the actual amount of contraction in pretension portion according to the difference controlled between position and the current location of suction nozzle of the target of suction nozzle.Thus, even if when substrate generation warpage or flexure, it is also possible to detect the loading of pressing in for parts accurately, and do not use force cell.
Accompanying drawing explanation
Fig. 1 is the schematic top plan view of the erecting device involved by present embodiment.
Fig. 2 is the explanation figure of the detection action of the loading of pressing in involved by comparative example.
Fig. 3 is the schematic diagram of the control structure of the erecting device involved by present embodiment.
Fig. 4 is the explanation figure of the detection action of the loading of pressing in involved by present embodiment.
Fig. 5 is the explanation figure of the detection action of the loading of pressing in involved by present embodiment.
The explanation of label
1 erecting device
22 suction nozzle shoot parts (shoot part)
31 adsorption heads
35 suction nozzles
39 helical springs (pretension portion)
42 evolution portions
43 LOAD FOR portions
44 storage parts
45 detection units
46 notification units
The identification position of Ha suction nozzle
The control position of Hb suction nozzle
The current location of Hc suction nozzle
P parts
W substrate
Detailed description of the invention
Below, with reference to accompanying drawing, the erecting device involved by present embodiment is illustrated.Fig. 1 is the schematic top plan view of the erecting device involved by present embodiment.Fig. 2 is the explanation figure of the detection action of the loading of pressing in involved by comparative example.Additionally, the erecting device involved by present embodiment is not limited to the structure shown in Fig. 1, it is possible to suitably change.
As it is shown in figure 1, erecting device 1 is configured to, the parts P (with reference to Fig. 2) supplied from parts supply units 13 such as belt-type feeders utilize adsorption head 31 be pressed into substrate W, thus carrying.In the substantial middle of the pedestal 11 of erecting device 1, it is configured with substrate delivery section 12 along X-direction.Substrate W before component mounting is carried and positions to assigned position by substrate delivery section 12 from the end side of X-direction, is taken out of from another side of X-direction by the substrate W after component mounting.It addition, on the base 11, across the both sides of substrate delivery section 12 along X-direction transversely arranged be configured with multiple parts supply unit 13.
Can freely loading and unloading at parts supply unit 13 place and be provided with tep reel 14, be wound with material containing band on tep reel 14, this material containing band is packaged with multiple parts P.Material containing band arranges porose portion (not shown) with determining deviation.Sprocket wheel (not shown) it is provided with, the state that the hole portion of the tooth and material containing band that become sprocket wheel engages in the leading section of parts supply unit 13.The rotation by sprocket wheel of each parts supply unit 13, extracts out parts P successively towards the delivery position picked up by adsorption head 31.At the delivery position place of adsorption head 31, the parts P in the pocket of material containing band is made to expose to outside with peeling off covering of surface from material containing band.Additionally, in the present embodiment, belt-type feeder is exemplified as parts supply unit 13 but it also may be made up of spherical feeder etc..
Being provided with XY moving part 16 on the base 11, this XY moving part 16 makes adsorption head 31 move along X-direction and Y direction.XY moving part 16 has: a pair Y-axis workbench 17, and they and Y direction extend parallel to;And X-axis workbench 18, itself and X-direction extend parallel to.The support portion (not shown) that a pair Y-axis workbench 17 is uprightly arranged by the corner at pedestal 11 supports, and X-axis workbench 18 can be movably arranged on a pair Y-axis workbench 17 along Y direction.Being provided with adsorption head 31 on X-axis workbench 18, this adsorption head 31 can move along X-direction, and adsorption head 31 is moved with the height of regulation from the upper surface of substrate W in the horizontal direction by X-axis workbench 18, Y-axis workbench 17.
Adsorption head 31 has multiple (being 3 in the present embodiment) head 32, and this head 32 possesses suction nozzle 35 described later.Head 32 utilizes Z axis motor (not shown) to make suction nozzle 35 move up and down along Z-direction, and utilizes θ motor (not shown) to make suction nozzle 35 rotate about the z axis.It addition, each suction nozzle 35 is connected with attracting source (not shown), carry out adsorbing maintenance to parts P by carrying out the captivation in self-gravitation source.It addition, be provided with helical spring 39 (with reference to Fig. 3) at suction nozzle 35 place, make helical spring 39 shrink and the parts P adsorbed by suction nozzle 35 is pressed into substrate W, thus parts P is carried to substrate W.
It addition, be provided with substrate imaging portion 21 at adsorption head 31 place, the labelling substrate W is shot by it from surface;And suction nozzle shoot part 22, the lift-launch action of its parts P undertaken by suction nozzle 35 from oblique upper shooting.In substrate imaging portion 21, identify the position of substrate W, gradient based on the shooting image of labelling, stretch, the control information of the generating unit P loading position relative to substrate W based on these recognition results.Utilize suction nozzle shoot part 22 to by before each image before being arranged in the absorption to parts P of the suction nozzle 35 of parts supply unit 13, after absorption, the lift-launch that undertaken by the suction nozzle 35 being positioned on substrate W, carry, carry after each image shoot, these each images are preserved as tracing information.
Being provided with parts shoot part 23 on the base 11, the parts P adsorbed by suction nozzle 35 is shot by this parts shoot part 23 from below.In parts shoot part 23, identify the gradient of the position deviation amount between adsorption site and the part centre of suction nozzle 35, parts P based on the shooting image of parts P, generate based on these recognition results suction nozzle 35 absorption position and towards control information.It addition, be provided with suction nozzle maintaining part (ATC:AutomaticToolChanger) 19 on the base 11, this suction nozzle maintaining part 19 maintains the suction nozzle 35 of multiple replacing.Adsorption head 31 is by moving to suction nozzle maintaining part 19 such that it is able to is pulled down by the suction nozzle 35 in installation and changes the outfit as new suction nozzle 35.
In the erecting device 1 constituted in the manner described above, make adsorption head 31 move to parts supply unit 13, the parts P pickup utilizing suction nozzle 35 will to supply from parts supply unit 13, parts P is carried the desired position to substrate W.It addition, parts P is pressed into substrate W by the erecting device 1 involved by present embodiment when to substrate W boarded parts, by the loading of pressing in applied to parts P is detected, thus notice is for the exception of the loading of pressing in of parts P.
Generally, by arranging force cell at adsorption head 31 place, thus suction nozzle 35 is detected and as loading of pressing in, but the weight of adsorption head 31 and cost increase with the increase of number of components from the parts P counteracting force being subject to.Accordingly, it is considered to following method, i.e. replace and arrange force cell, detect according to loading of pressing in when being arranged at the amount of contraction of helical spring 39 (with reference to Fig. 3) of suction nozzle 35 to component mounting.But, when there is warpage or flexure at substrate W, can correspondingly make helical spring 39 shrink redundantly with the warpage of substrate W or flexure, therefore, it is difficult to obtain the actual amount of contraction of helical spring 39, it is impossible to detect the loading of pressing in for parts P.
As shown in the left side of fig 2, when the mounting surface Wa of substrate W is smooth, if suction nozzle 35 moves the control position Hb to the target controlled on axle, then helical spring 39 is correspondingly made to shrink with the intrusion for parts P.Such as, controlling position Hb and wishing correspondingly to set to the parts P loading of pressing in applied of target, here it is set as being pressed into by parts P with 0.5mm.If suction nozzle 35 moves the control position Hb to target, then suction nozzle 35 is pushed back by the upper surface Pa of parts P and makes helical spring 39 shrink with 0.5mm.Owing to the controlled quentity controlled variable of press-in is consistent with the amount of contraction of helical spring 39, therefore, it is possible to calculate loading of pressing in by controlled quentity controlled variable is multiplied by spring constant.
On the other hand, as illustrated at the right side of figure 2, when the mounting surface Wa of substrate W high (such as, 0.3mm), if suction nozzle 35 is transferred to the control position Hb of target, then also helical spring 39 is made to shrink with the height of mounting surface Wa on the basis of the intrusion of parts P.In this case, suction nozzle 35 moves the control position Hb to target, thus suction nozzle 35 is pushed back by the upper surface Pa of parts P and makes helical spring 39 shrink with 0.8mm.Namely, although control as parts P being pressed into 0.5mm, but also can correspondingly make helical spring 39 shrink redundantly with the 0.3mm of the height value of mounting surface Wa.Owing to the controlled quentity controlled variable of press-in and the amount of contraction of helical spring 39 are inconsistent, therefore cannot calculate the loading of pressing in of reality, and exception cannot be notified.
Therefore, in the present embodiment, the shooting image of the suction nozzle 35 when being pressed into according to parts has obtained the current location Hc (with reference to Fig. 4 C) in the real space of suction nozzle 35, has obtained the actual amount of contraction of helical spring 39 according to the difference controlled between position Hb and the current location Hc of suction nozzle 35 of the target of suction nozzle 35.Thus, even if there is warpage or flexure at substrate W, it is also possible to obtain the actual amount of contraction of helical spring 39, it is possible to detect the loading of pressing in for parts P accurately, and do not use force cell.
Hereinafter, with reference to Fig. 3, the loading testing method undertaken by erecting device is described in detail.Fig. 3 is the schematic diagram of the control structure of the erecting device involved by present embodiment.Additionally, in figure 3, for the ease of illustrating, the structure relevant with the detection of loading of pressing in is only illustrated.
As it is shown on figure 3, suction nozzle axle 33 extends downwards from head 32, at suction nozzle shell 34 place of the front end of suction nozzle axle 33, suction nozzle 35 is detachably installed.The bar 38 of suction nozzle slide block 37 can be slidably inserted into and constitute in the hole of the suction nozzle inner shell 36 installed to suction nozzle shell 34 place by suction nozzle 35.At bar 38 place of suction nozzle slide block 37, helical spring 39 is installed, utilizes helical spring 39 by suction nozzle slide block 37 pretension downwards all the time.It is formed with the suction port being connected with attraction source in the front end of suction nozzle slide block 37, by the negative pressure of suction port, parts P is adsorbed.
Be arranged around suction nozzle shoot part 22 at suction nozzle 35, this suction nozzle shoot part 22 in order to suction nozzle 35 is shot and by optical axis obliquely downward.Suction nozzle 35 is shot when parts are pressed into and generates shooting image by suction nozzle shoot part 22.In this case, in the control position of the target controlled when making suction nozzle 35 move to component mounting on axle, parts P is pressed into substrate W, suction nozzle 35 is shot and shooting image during the press-in of generating unit P in the position that controls of this target.Additionally, during the calibration of the suction nozzle shoot part 22 suction nozzle 35 before the lift-launch action of parts P, suction nozzle 35 is repeatedly shot and generates multiple shooting image (with reference to Fig. 4 A) by the height distance that above-below direction is different for benchmark at the mounting surface Wa with substrate W.Additionally, can also maintain the height of the mounting surface Wa that parts P is moved to substrate W by the state of parts P at suction nozzle 35, suction nozzle 35 is repeatedly shot and generates multiple shooting image by the height distance that above-below direction is different for benchmark at the upper surface Pa with parts P.Additionally, as the suction nozzle used in calibration, it is not necessary to it is the suction nozzle with helical spring 39, is more preferably the model suction nozzle after the length management having carried out suction nozzle 35.
It addition, in erecting device 1, as the control structure relevant with the detection of loading of pressing in, be provided with drive division 41, evolution portion 42, LOAD FOR portion 43, storage part 44, detection unit 45, notification unit 46.These each portions are made up of the processor performing various process and memorizer etc..Memorizer is made up of one or more storage mediums such as ROM (ReadOnlyMemory), RAM (RandomAccessMemory) according to purposes, and the program making erecting device 1 perform loading testing method has been stored.
The movement at control axle (Z axis) place of suction nozzle 35 is controlled by drive division 41, makes suction nozzle 35 separate relative to substrate W or the close and mobile control position to target.Evolution portion 42, to shooting image real-time image processing, obtains the identification position of suction nozzle 35 according to shooting image, and by the current location of the real space (Z axis) that identification evolution is suction nozzle 35 of the shooting image of suction nozzle 35.In this case, evolution portion 42 obtains the corresponding relation identified between the control position of the suction nozzle 35 when position and the plurality of shooting image are taken of the suction nozzle 35 in multiple shooting images taken when calibration in advance, implements conversion process based on this corresponding relation.
During calibration before the lift-launch action of parts P, suction nozzle 35 will not be pushed back by parts P, and the current location of the suction nozzle 35 controlling position and reality therefore controlling suction nozzle 35 on axle is consistent.Therefore, it is possible to obtain the corresponding relation controlled between position of the suction nozzle 35 identified on position and control axle of the suction nozzle 35 shot in image, it is possible to by the real position that identification evolution is suction nozzle 35 of the suction nozzle 35 in shooting image.The corresponding relation that evolution portion 42 obtains when being used in this calibration, the current location of the suction nozzle 35 that identification evolution is real space of the suction nozzle 35 of shooting image when parts are pressed into.
In addition, corresponding relation can be following arbitrary form, that is, by with suction nozzle 35 identify the graph data drawn corresponding current location, position, identifying suction nozzle 35 the corresponding one to one list data in position and current location and being used for the identification position according to suction nozzle 35 and obtain the function information of current location.It addition, in the present embodiment, the structure of the corresponding relation obtained when being set to be used in calibration but it also may use the corresponding relation of the regulation pre-determined out.It addition, be not limited to the structure that multiple shooting images when calibrating carry out shooting as rest image, it is also possible to be the structure extracting multiple shooting image so that dynamic image shoots continuously from dynamic image.It addition, corresponding relation is stored in above-mentioned memorizer.
LOAD FOR portion 43 is calculated for the loading of pressing in of parts P when the parts press-in undertaken by suction nozzle 35.Helical spring 39 is pushed back by parts P by suction nozzle 35 and shrinks, and therefore the deviation between the current location of the suction nozzle 35 controlling position and real space of the target of suction nozzle 35 illustrates the amount of contraction of helical spring 39.Therefore, obtaining the actual amount of contraction of helical spring 39 according to the difference between the current location of the suction nozzle 35 controlling position and real space of the target of the suction nozzle 35 controlled on axle, the amount of contraction based on this helical spring 39 calculates the loading of pressing in for parts P.Additionally, loading of pressing in is calculated by the amount of contraction of helical spring 39 is multiplied by known spring constant.
The shooting image of the suction nozzle 35 when parts are pressed into by storage part 44 and the loading of pressing in for parts P store explicitly as tracing information.Accordingly, as the objective evidence for the fault produced when parts are pressed into being tested afterwards, it is possible to the shooting image of suction nozzle 35 and the loading of pressing in for parts P are retained explicitly.Even if it addition, when loading of pressing in creating abnormal when parts are pressed into, it is not necessary to utilize suction nozzle shoot part 22 again the shooting image of the parts P on substrate W to be shot, it is possible to simplify the operation of operator and quickly account for.
Detection unit 45 will become the threshold value of determinating reference and the loading of pressing in for parts P compares, and is judged to exception when the loading of pressing in for parts P is more than or equal to threshold value.It addition, detection unit 45 makes the lift-launch action stopping of the parts P undertaken by erecting device 1 when being judged to abnormal.Thus, when for the loading of pressing in of parts P abnormal automatically make lift-launch action stop, it is possible to preventing the follow-up loading of pressing in because of parts P and to the substrate W fault caused.Notification unit 46 is judged to that in detection unit 45 abnormal situation sends a notice the exception of loading of pressing in.Will be pressed into the abnormal of load to notify to operator, it is possible to prompting operator carry out reason and are really set for industry.
With reference to Fig. 4 and Fig. 5, the detection action of the loading of pressing in undertaken by erecting device is illustrated.Fig. 4 and Fig. 5 is the explanation figure of the detection action of the loading of pressing in involved by present embodiment.Additionally, the detection action of the loading of pressing in shown in Fig. 4 and Fig. 5 illustrates an example, therefore it is not limited to this structure.
First, as shown in Figure 4 A, calibration is implemented in order to make the control position on control axle and the identification position consistency on shooting image.During calibration before the lift-launch action of these parts P, the front end of suction nozzle 35 is positioned at the height of the mounting surface Wa of substrate W, makes the front end of suction nozzle 35 move along the vertical direction with the height of the mounting surface Wa of substrate W for benchmark, continuously suction nozzle 35 shot on one side.Then, as shown in Figure 4 B, each shooting image is carried out image procossing, obtain the identification position Ha of the front end of the suction nozzle 35 shot in image, obtain the corresponding relation identified between the control position Hb of the suction nozzle 35 when position Ha and the plurality of shooting image are taken of the suction nozzle 35 in multiple shooting image.
Here, the identification position Ha of suction nozzle 35 illustrates the coordinate position of the front end of the suction nozzle 35 in shooting image.The control position Hb of suction nozzle 35 illustrates and utilizes drive division 41 (with reference to Fig. 3) to make shift position that the front end of suction nozzle 35 is moved, on control axle.As noted above, when calibration, suction nozzle 35 to control position Hb consistent with the current location Hc of the suction nozzle 35 of real space, therefore this corresponding relation is obtained the control information of the current location Hc of the front end of suction nozzle 35 and is used as the identification position Ha of the front end being used for according to the suction nozzle 35 shot in image.
Then, as shown in Figure 4 C, when component mounting, towards the control position Hb of the target of the minimum point becoming press-in action, the suction nozzle 35 being adsorbed with parts P is made to move.Control position Hb and the hope of target set accordingly to the parts P loading of pressing in applied.If suction nozzle 35 moves the control position Hb to target, then make helical spring 39 shrink and utilize suction nozzle 35 to be pressed into substrate W by parts P.Now, the front end of suction nozzle 35 is pushed back by the upper surface Pa of parts P, and the front end of the suction nozzle 35 that this pushes back is shot from oblique upper by suction nozzle shoot part 22.Then, shooting image is carried out image procossing, obtains the identification position Ha of the suction nozzle 35 shot in image.
Then, as shown in Figure 4 D, above-mentioned corresponding relation is used, by the current location Hc identifying the position Ha suction nozzle 35 being transformed in real space of the suction nozzle 35 in shooting image.Then, the difference controlled between position Hb and the current location Hc of suction nozzle 35 according to the target of suction nozzle 35, calculate the actual amount of contraction of helical spring 39.Then, by the amount of contraction of helical spring 39 is multiplied by spring constant, thus calculating the loading of pressing in for parts P accurately.By above-mentioned structure, even if there is warpage or flexure at substrate W, it is also possible to calculate the loading of pressing in for parts P accurately, and do not use force cell.
Such as, even if as it is shown in figure 5, smooth or substrate W the mounting surface Wa of the mounting surface Wa of substrate W is formed high, the actual amount of contraction of helical spring 39 also can be calculated according to the difference controlled between the Hb of position of the current location Hc of suction nozzle 35 and target.As shown in the left side of Fig. 5, when the mounting surface Wa of substrate W is smooth, the 0.5mm consistent with intrusion is calculated as the amount of contraction of helical spring 39.Then, the 0.5mm of the amount of contraction of helical spring 39 is multiplied by spring constant and calculates the intrusion for parts P.In this case, make helical spring 39 shrink with the intrusion of target, therefore apply suitable loading of pressing in parts P.
On the other hand, as shown in the right side of Fig. 5, when the mounting surface Wa of substrate W is high, the 0.8mm obtained plus the height of mounting surface Wa in intrusion is calculated as the amount of contraction of helical spring 39.Then, the 0.8mm of the amount of contraction of helical spring 39 is multiplied by spring constant and calculates the intrusion for parts P.In this case, to make helical spring 39 shrink than the many 0.3mm of the intrusion of target, therefore the load bigger than suitable loading of pressing in is applied to parts P.Thus, it is determined that stop installation action for the exception of loading of pressing in, and will be pressed into the abnormal of load and point out the determination carrying out reason to operator's notice.
As previously discussed, erecting device 1 involved by present embodiment, making when parts are pressed into helical spring 39 shrink while utilizing parts P to be pushed back by suction nozzle 35, therefore producing deviation between the current location Hc of the suction nozzle controlling position Hb and real space of the target of the suction nozzle 35 controlled on axle when parts are pressed into.This deviation illustrates the amount of contraction of helical spring 39, therefore, it is possible to the shooting image of suction nozzle 35 when being pressed into according to parts and obtain the current location Hc of suction nozzle 35, obtain the actual amount of contraction of helical spring 39 according to the difference controlled between position Hb and the current location Hc of suction nozzle 35 of the target of suction nozzle 35.Thus, even if there is warpage or flexure at substrate W, it is also possible to obtain the actual amount of contraction of helical spring 39, therefore, it is possible to detect the loading of pressing in for parts P accurately, and do not use force cell.
Additionally, the present invention is not limited to above-mentioned embodiment, it is possible to carry out various change and implement.In the above-described embodiment, about the size illustrated in the accompanying drawings and shape etc., it is not limited to this, it is possible to suitably change in the scope of effect of the present invention realizing.Furthermore it is possible to suitably change in without departing from the scope of the purpose of the present invention and implement.
Such as, in the present embodiment, it is set to the structure that the front end of suction nozzle 35 is shot, but is not limited to this structure.As long as be capable of identify that the structure of the current location of suction nozzle 35 according to shooting image, for instance, it is possible to it is set to the structure that the labelling that suction nozzle 35 is subsidiary is shot.
It addition, in the present embodiment, illustrated and described helical spring 39 as pretension portion, but be not limited to this structure.Shrink while by the parts P that adsorbed by suction nozzle 35 to the substrate W structure being pressed into as long as pretension portion allows, for instance, it is also possible to it is made up of leaf spring or air spring.
It addition, in the present embodiment, it is set to utilize existing suction nozzle shoot part 22 to detect the structure used and suction nozzle 35 is shot as load, but is not limited to this structure.Can also detect with as load and shoot part is newly set.
Additionally, in the present embodiment, the front end that can make suction nozzle 35 is moved while shooting the front end of suction nozzle 35 continuously and implementing calibration along the vertical direction with the mounting surface Wa of substrate W for benchmark, can also while being moved upward from the camera site of minimum point, shooting continuously on one side and implement calibration, it is also possible to move downwards from the camera site of peak, shoot continuously on one side and implement calibration.
It addition, in the present embodiment, notification unit 46 can notify the exception of loading of pressing in, for instance, it is possible to show by the flicker of lamp, lighting, buzz, voice message, picture and notify.
Industrial applicibility
As described above, the present invention has following effect, namely, can accurately detection part to substrate carry time loading of pressing in, and do not use force cell, especially, it is effective to utilizing adsorption head to the erecting device of substrate installing component, loading testing method and program thereof.

Claims (9)

1. an erecting device, it is by making the pretension portion being arranged at suction nozzle shrink and will be pressed into substrate by the parts of described suction, thus by described component mounting to described substrate,
This erecting device is characterised by possessing:
Suction nozzle shoot part, makes described suction nozzle move and is pressed into by described parts to the control position of the target controlled on axle, utilize this suction nozzle shoot part in the control position of this target, described suction nozzle to be shot and generate shooting image;
Evolution portion, it is by the current location that identification evolution is the described suction nozzle in real space of the described suction nozzle in shooting image;And
LOAD FOR portion, the amount of contraction in its described pretension portion obtained based on the difference controlled between position and the current location of described suction nozzle according to described target, calculate the loading of pressing in for described parts.
2. erecting device according to claim 1, it is characterised in that
During the calibration before the lift-launch action of described parts of the described shoot part, repeatedly described suction nozzle is shot with the distance different at a distance of the mounting surface of described substrate,
Described evolution portion is based on the corresponding relation controlled between position of described suction nozzle when identifying that position and the plurality of shooting image are taken of the described suction nozzle in multiple shooting images, and converts.
3. erecting device according to claim 1 and 2, it is characterised in that
Possessing storage part, the shooting image of described suction nozzle when parts are pressed into by this storage part and the loading of pressing in for described parts store explicitly as tracing information.
4. erecting device according to claim 1 and 2, it is characterised in that
Possessing detection unit, this detection unit is judged to exception when the loading of pressing in for described parts is more than or equal to threshold value,
Described detection unit when being judged to abnormal, stop the lift-launch action of described parts.
5. erecting device according to claim 3, it is characterised in that
Possessing detection unit, this detection unit is judged to exception when the loading of pressing in for described parts is more than or equal to threshold value,
Described detection unit when being judged to abnormal, stop the lift-launch action of described parts.
6. erecting device according to claim 4, it is characterised in that
Possess notification unit, this notification unit is judged to abnormal in described detection unit, the exception of notice loading of pressing in.
7. erecting device according to claim 5, it is characterised in that
Possess notification unit, this notification unit is judged to abnormal in described detection unit, the exception of notice loading of pressing in.
8. a loading testing method, its in erecting device, the pretension portion making to be arranged at suction nozzle is shunk by by the parts of described suction to substrate be pressed into time the loading of pressing in for described parts detect,
This loading testing method is characterised by having following step:
Make described suction nozzle move to be pressed into by described parts to the control position of the target controlled on axle, in the control position of this target, described suction nozzle is shot and generate shooting image;
By the current location that identification evolution is the described suction nozzle in real space of the described suction nozzle in shooting image;And
The amount of contraction in the described pretension portion obtained based on the difference controlled between position and the current location of described suction nozzle according to described target, calculates the loading of pressing in for described parts.
9. loading testing method according to claim 8, it is characterised in that
When there is the calibration before the lift-launch action of described parts, with the step that described suction nozzle is repeatedly shot by the distance different at a distance of the mounting surface of described substrate,
The step carrying out described conversion is, based on the corresponding relation controlled between position of described suction nozzle when identifying that position and the plurality of shooting image are taken of the described suction nozzle in multiple shooting images, and converts.
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