CN105811120A - Continuously adjustable degradable terahertz meta-material based on optical driving and preparation method thereof - Google Patents
Continuously adjustable degradable terahertz meta-material based on optical driving and preparation method thereof Download PDFInfo
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- CN105811120A CN105811120A CN201610283734.4A CN201610283734A CN105811120A CN 105811120 A CN105811120 A CN 105811120A CN 201610283734 A CN201610283734 A CN 201610283734A CN 105811120 A CN105811120 A CN 105811120A
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- sodium alginate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q17/00—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/361—Organic materials
- G02F1/3619—Organometallic compounds
Abstract
The invention provides a continuously adjustable degradable terahertz meta-material based on optical driving and preparation method thereof. The degradable terahertz meta-material comprises a sodium alginate substrate, a metal layer and a semiconductor film which are arranged on the sodium alginate substrate; the patterns of the metal layer and the semiconductor film are completely same: three equally spaced openings are formed on the outer ring, two equally spaced openings are formed on the middle ring, and one opening is formed on the inner ring; one of the three openings on the outer ring is aligned with one opening on the middle ring, and the other opening on the middle ring is aligned with the opening on the inner ring. Since the concentrations of carriers produced by the semiconductor film under different optical power excitations are different, the continuous tuning on the electromagnetically responded resonance strength from different conductivities is realized. The meta-material provided by the invention is simple in structure and processing technique, has degradable property and can be used for biomolecule detection, so that the incident electromagnetic wave of the terahertz meta-material has a plurality of frequency bands with continuously tuned strength in the terahertz waveband transmission.
Description
Technical field
The present invention relates to the device of a kind of micro-nano technology technique, concrete, relate to a kind of based on continuously adjustable degradable Terahertz Meta Materials of optical drive and preparation method thereof.
Background technology
THz wave refers to frequency electromagnetic wave within the scope of 0.1～10THz, and corresponding wavelength is 3mm to 30 μm, and its wave band is in electromagnetic spectrum between microwave and infrared waves.Material includes abundant physics, chemistry and bio information at the frequency response of THz wave band.THz wave has that energy is low, be with the characteristics such as wide, penetrance is strong, has important application in the field such as communication, biomedicine, detection imaging, Non-Destructive Testing.But owing to long-wave band microwave direction relies primarily on electronics technologies, the infrared waves direction of short-wave band relies primarily on optical technology, the problem making the THz wave source between two ripples is not well solved always, one of this main factor just becoming the modern THz wave technology development of restriction.Some seminar utilize Meta Materials to regulate and control THz wave in recent years, occur successively based on electromagnetism Meta Materials Terahertz switch, wave filter and wave absorbing device etc., become the study hotspot of the integrated of Terahertz system and miniaturization.
Meta Materials perfect lens, negative refraction and stealthy etc. in there is the application prospect having people.It is utilize magnetic resonators and electrical resonator to realize negative magnetoconductivity and negative permittivity respectively about Meta Materials great majority, realizes " double; two negative " by forming array simultaneously.Meta Materials is by periodicity metal open loop resonance (SplitRingResonator, SRR) micro structure array and semi-conducting material composition, and this periodic SRR array exists certain resonance electromagnetic response, it is possible to use this feature designs sensing device.
The essentially all electromagnetic wave absorber based on metamaterial structure is all passive type at present, once prepare, its absorbent properties also determine that.And day by day complicated electromagnetic application need for environment is active tunable electromagnetism meta-material absorber, such as electromagnetism meta-material absorber can be controlled to electromagnetic absorbance etc. according to the change of electromagnetic environment.Controlling the amplitude of terahertz emission, the manipulator of frequency or phase place or switch needs the electromagnetic response of electromagnetism Meta Materials can active control, this by or directly by semi-conducting material the preparation of SRR resonator is introduced electromagnetism metamaterial structure on the semiconductor base of doping, can realize in conjunction with bias or light stimulus.Mechanism is the carrier concentration utilizing outfield regulation and control quasiconductor, changes electrical conductivity, affects LC equivalent circuit electric capacity, thus regulating SRR EMR electromagnetic resonance, controls the transmission of THz ripple.Photosensitive semiconductor is inserted, it is possible to use photoconduction lures that resonance mode transition effects realizes frequency modulation(PFM) at the outer openings place of the electrical resonator structure based on SRR.Change another approach that ambient temperature is the regulation and control super medium electromagnetic response of electromagnetism.Utilize the hot expansibility that bi-material is different, control cantilever bending degree by temperature, change the angle of SRR place plane and incidence wave direction, make transmitted wave intensity that notable change to occur.Additionally, utilize some dielectric material character also can realize the super medium of electromagnetism of electromagnetic performance temperature-controllable with the characteristic that temperature significantly changes, for instance VO2Metal can be changed into by insulator under thermal excitation, use VO2The super medium of electromagnetism of structure can realize the temperature modulation of the strength of resonance and frequency.Except regulatory pathways such as optical, electrical and temperature, externally-applied magnetic field can also realize the modulation to the super dielectric resonance intensity of electromagnetism and frequency, and obtains experiment confirmation in microwave section.Considering from application angle, operation is easy in the regulation and control of electricity, light, has more advantage, and especially electric field regulation and control, are therefore also paid attention to most.
Finding by prior art documents, XiaoguangZhang et al. writes articles " Opticallytunablemetamaterialperfectabsorberonhighlyflexi blesubstrate " (" the magic eye meta-material absorber in super flexible substrate ") in " SensorsandActuatorsA:Physical " (2015).In this article, polyimides is as substrate, owing to polyimides is water insoluble, therefore this device cannot be applied to biomolecule detection field.GovindDayalandSAnanthaRamakrishna writes articles " Designofmulti-bandmetamaterialperfectabsorberswithstacke dmetal-dielectricdisks " (" the multiband perfection absorber that metal medium disk is formed " " Acta Optica ") in " JOURNALOFOPTICS " 7,055106 (2013).The method proposing to realize multiband in this article is that " three-decker " (metal clad medium) superposition can be formed the meta-material absorber of multiband together.However, it is desirable to change different medium layer just can obtain the frequency band of different frequency ranges, the continuous tuning of resonant frequency can not be carried out.
Summary of the invention
For prior art above shortcomings, it is an object of the invention to provide a kind of based on continuously adjustable degradable Terahertz Meta Materials of optical drive and preparation method thereof, double frequency-band and resonant frequency continuous tuning can be realized by the control of light simultaneously, degradable flexible substrate makes the Meta Materials device that performance is more excellent.
The present invention is achieved by the following technical solutions:
According to the first aspect of the invention, it is provided that a kind of based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, including sodium alginate substrate, and it is arranged on sodium alginate substrate patterned metal level and semiconductive thin film；
Described metal level is identical with the figure of described semiconductive thin film, annulus by three concentrics forms, three annulus respectively outer shroud, medium ring and internal ring from outside to inside, wherein: on outer shroud, have three openings being equally spaced, medium ring has two openings being equally spaced, internal ring has an opening, and outer shroud, medium ring are all identical with the openings of sizes on internal ring；In three openings one and a register on medium ring, another opening on medium ring and the register on internal ring on outer shroud.
Preferably, the semiconductive thin film of described Terahertz Meta Materials excites lower generation carrier at light, and the electrical conductivity controlling Terahertz Meta Materials by changing the power of light realizes the continuous tuning of the resonant frequency to electromagnetic response.
It is highly preferred that described Terahertz Meta Materials excites generation photo-generated carrier through light, along with the change of photo-generated carrier number, the electrical conductivity of quasiconductor changes；After light removes, the photo-generated carrier compound of generation, return to original state after a period of time, namely realize reversible tuning.
Preferably, described sodium alginate substrate is biodegradable.Life science has been deep into molecular level, and the advantage utilizing the device that may be used for biomolecule detection that biodegradable material makes is that catabolite is disposable.
Preferably, described sodium alginate substrate is flexible substrate, and relatively low in terahertz wave band loss.
It is highly preferred that the thickness of described sodium alginate substrate is 5-200 μm.Described sodium alginate substrate is alginate films, is a kind of flexible substrate.The thickness of alginate films can affect frequency and the intensity of transmission spectrum absworption peak.
Preferably, described metal level and the outer shroud of semiconductive thin film, medium ring, internal ring width according to selected metal and quasiconductor optimizing regulation.
It is highly preferred that the diameter of described outer shroud is less than the length of side of sodium alginate substrate.
Preferably, described semiconductive thin film is spherical, lamellar, the difformity such as flower-shaped.
Preferably, the material of described metal level is Mo, Zn etc..
Preferably, the material of described semiconductive thin film is ZnO, SnO2Deng.
According to the second aspect of the invention, it is provided that a kind of above-mentioned preparation method based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, described method comprises the steps:
S1: sodium alginate substrate is made in glass substrate；
S2: use Si mask first to deposit metal level on sodium alginate substrate；
S3: spray semiconductive thin film spherical, lamellar, any one shape flower-shaped on the metal layer；
S4: semiconductor layer, metal level and sodium alginate substrate are peeled off glass substrate.
Preferably, described sodium alginate substrate is alginate films, described alginate films by sodium alginate soln spin coating on a glass substrate, is then put into and is dried moisture in baking oven and formed, and the thickness of alginate films can be determined by sodium alginate soln spin coating rotating speed on the glass sheet.
Compared with prior art, the method have the advantages that
The present invention adopts sodium alginate substrate, and utilize three split rings and between coupling, change frequency and the intensity of the absworption peak of transmission spectrum, it is achieved multiband.Further, utilizing Terahertz Meta Materials quasiconductor to excite lower generation carrier at light, the electrical conductivity controlling Terahertz Meta Materials by changing the power of light realizes the continuous tuning of the resonant frequency to electromagnetic response.
Further, sodium alginate substrate of the present invention is biodegradable, has good bio-compatibility, can be used for biomolecule detection.
Accompanying drawing explanation
By reading detailed description non-limiting example made with reference to the following drawings, the other features, objects and advantages of the present invention will become more apparent upon:
Fig. 1 is the three-dimensional overall structure schematic diagram of one embodiment of the invention；
Fig. 2 is the structure top view of one embodiment of the invention；
Fig. 3 is the structural side view of one embodiment of the invention；
In figure: sodium alginate substrate 1, metal level 2, semiconductive thin film 3.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.Following example will assist in those skilled in the art and are further appreciated by the present invention, but do not limit the present invention in any form.It should be pointed out that, to those skilled in the art, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement.These broadly fall into protection scope of the present invention.
At present, the metamaterial structure that the multiple performance such as wideband, multiband, amplitude modulation, different driving mode is concentrated is focus and the challenge in current Meta Materials field.The invention provides one kind of multiple performances concentrate, based on the continuously adjustable degradable Terahertz Meta Materials of optical drive.
As shown in Figure 1-Figure 3, a kind of based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, including: sodium alginate substrate 1, metal level 2, semiconductive thin film 3, wherein: patterned semiconductive thin film 3 and metal level 2 may be contained within sodium alginate substrate 1；Metal level 2 is identical with the figure of semiconductive thin film 3, is made up of the annulus of three concentrics, and the diameter of outmost turns annulus is less than the length of side of sodium alginate substrate 1.
As shown in Figure 2, it is possible to it is further seen that metal level 2 and semiconductive thin film 3 described in the present embodiment are symmetrical structure.Elementary cell in the present embodiment, the i.e. device being made up of sodium alginate substrate 1, metal level 2 and semiconductive thin film 3 period profile in OXY plane shown in Fig. 1.Three annulus, namely outer shroud, medium ring, Beihuan have three, two and an opening respectively, and openings of sizes is all identical, wherein: three openings of outer shroud are equally distributed on outer shroud, two openings of medium ring are equally distributed on medium ring, and a register of one of them opening of outer shroud and medium ring, the opening of internal ring and another register of medium ring.
In the present invention, adopting sodium alginate substrate 1, sodium alginate (SA) is as a kind of cationic polyelectrolyte, owing to its good biocompatibility, raw material are easy to get and low price.
Described sodium alginate substrate 1 belongs to flexible substrate, have an advantage in that: (1) bendability, being different from traditional rigid substrate (such as High Resistivity Si), carrying device on flexible substrates can become the bending of definite shape, such that it is able to be fitted on the body surface of bending；(2) slim body, lightweight, is typically prepared same device and uses flexible substrate to be use glass substrate weight about 1/3rd；(3) pliability is good, and compared with glass and silicon chip, shock resistance is by force, cracky, ruggedness are better, and defect tolerant degree is also better, and (4) cost is low, can large area produce.
In one embodiment, described sodium alginate substrate 1 is low-resistivity high grade of transparency thin film one piece smooth, as the supporting layer of whole device.There is the impact of electric capacity between during due to the generation interaction of metal, quasiconductor and substrate, thus the formant of Meta Materials can be caused to offset.So when metamaterial structure is produced on the sodium alginate substrate 1 that low-resistance, low-k, thickness are little, sodium alginate substrate 1 electric capacity is little especially to the contribution of integral capacitor, the capacitance variations of Meta Materials itself is relatively big, sensitivity is corresponding just high, thus being conducive to detecting material minor variations and reducing amount of samples.
As a preferred implementation, the thickness of described sodium alginate substrate 1 is 5-200 μm.Alginate films by sodium alginate soln spin coating on the glass sheet, is then put into and is dried moisture in baking oven and formed, and the thickness of alginate films can be determined by sodium alginate soln spin coating rotating speed on the glass sheet.The thickness of alginate films can affect frequency and the intensity of transmission spectrum absworption peak.
The present invention utilize three split rings and between coupling, change the frequency of absworption peak and the intensity of transmission spectrum, it is achieved multiband.Described semiconductive thin film, excites lower generation carrier at light, and the electrical conductivity controlling Terahertz Meta Materials by changing the power of light realizes the continuous tuning of the strength of resonance to electromagnetic response.Described Terahertz Meta Materials excites generation photo-generated carrier through light, and along with the change of photo-generated carrier number, the electrical conductivity of quasiconductor changes；After light removes, the photo-generated carrier compound of generation, return to original state after a period of time, namely realize reversible tuning.
Further, based on the degradable Terahertz Meta Materials of said structure, its preparation method can adopt following steps:
S1: alginate films is made in glass substrate；The thickness of described sodium alginate substrate 1 is 5-200 μm；
Described alginate films by sodium alginate soln spin coating on a glass substrate, is then put into and is dried moisture in baking oven and formed, and the thickness of alginate films is determined by sodium alginate soln spin coating rotating speed on the glass sheet.
S2: use Si mask first to deposit metal level on alginate films；The material of described metal level is Mo or Zn；
S3: spray spherical, lamellar, flower-shaped difform semiconductive thin film on the metal layer；The material of described semiconductive thin film is ZnO or SnO2；
S4: semiconductor layer, metal level and alginate films are peeled off glass substrate.
The present invention is based on alginate films and adopts hard mask, namely makes the figure of metal or metal-oxide on the glass substrate, and it can be used as photomask.If application softmask, except the problem that film-strength is weak, there is also the problems such as bulge effect.Adopting the hard mask can be high temperature resistant, select higher, hard mask be hardly along with thickness change produces deformation.
The present invention adopts micro-nano technology technique to prepare based on the continuously adjustable degradable Terahertz Meta Materials of optical drive in conjunction with micro-electromechanical technology, utilize the mode of hard mask at deposited on substrates metal level and semiconductor ultra-thin film, double frequency-band and resonant frequency continuous tuning can be realized, at the Meta Materials device that degradable flexible substrate (alginate films) upper making performance is more excellent by the control of light simultaneously.Compared with existing Meta Materials device, its simple in construction, make easily, volume reduces, degradable, and can realize resonant frequency continuous tuning by the control of light simultaneously.
To sum up, the present invention have devised the Meta Materials that the multiple performances such as a kind of wideband, multiband, amplitude modulation, different driving mode are concentrated, structure and processing technique are simple, and the continuous tuning of multiband resonances intensity can be realized by the control of luminous power, its ultimate principle is magic eye, namely semi-conducting material excites lower generation carrier at light, and the electrical conductivity controlling Terahertz Meta Materials by changing the power of light realizes the continuous tuning of the strength of resonance to electromagnetic response.Additionally, the relatively rotation place between annulus makes the electromagnetic different polarization directional response of vertical incidence different in this structure, i.e. the change of resonant frequency.Therefore, this structure can be used for realizing functional device, such as wave filter, bonder, switch and sensor etc..
Above specific embodiments of the invention are described.It is to be appreciated that the invention is not limited in above-mentioned particular implementation, those skilled in the art can make various deformation or amendment within the scope of the claims, and this has no effect on the flesh and blood of the present invention.
Claims (10)
1. one kind based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, it is characterised in that including: sodium alginate substrate, and is arranged on sodium alginate substrate patterned metal level and semiconductive thin film；
Described metal level is identical with the figure of described semiconductive thin film, annulus by three concentrics forms, three annulus respectively outer shroud, medium ring and internal ring from outside to inside, wherein: on outer shroud, have three openings being equally spaced, medium ring has two openings being equally spaced, internal ring has an opening, and outer shroud, medium ring are all identical with the openings of sizes on internal ring；In three openings one and a register on medium ring, another opening on medium ring and the register on internal ring on outer shroud.
2. according to claim 1 based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, it is characterised in that described sodium alginate substrate is alginate films, for a kind of degradable flexible substrate, and low in terahertz wave band loss.
3. one according to claim 2 is based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, it is characterised in that the thickness of described sodium alginate substrate is 5-200 μm.
4. according to claim 1 based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, it is characterised in that the diameter of described outer shroud is less than the length of side of sodium alginate substrate.
5. according to any one of claim 1-4 based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, it is characterized in that, described semiconductive thin film, exciting lower generation carrier at light, the electrical conductivity controlling Terahertz Meta Materials by changing the power of light realizes the continuous tuning of the strength of resonance to electromagnetic response.
6. according to claim 5 based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, it is characterized in that, described Terahertz Meta Materials excites generation photo-generated carrier through light, and along with the change of photo-generated carrier number, the electrical conductivity of semiconductive thin film changes；After light removes, the photo-generated carrier compound of generation, return to original state after a period of time, namely realize reversible tuning.
7. according to any one of claim 1-6 based on the continuously adjustable degradable Terahertz Meta Materials of optical drive, it is characterised in that the material of described metal level is Mo or Zn；The material of described semiconductive thin film is ZnO or SnO2。
8. the preparation method based on the continuously adjustable degradable Terahertz Meta Materials of optical drive described in an any one of claim 1-7, it is characterised in that: described method comprises the steps:
S1: sodium alginate substrate is made in glass substrate；
S2: use Si mask first to deposit metal level on sodium alginate substrate；
S3: spray semiconductive thin film on the metal layer；
S4: semiconductor layer, metal level and sodium alginate substrate are peeled off glass substrate.
9. the preparation method based on the continuously adjustable degradable Terahertz Meta Materials of optical drive according to claim 8, it is characterized in that: described sodium alginate substrate is alginate films, described alginate films is by sodium alginate soln spin coating on a glass substrate, then putting into and dry moisture in baking oven and formed, the thickness of alginate films is determined by sodium alginate soln spin coating rotating speed on the glass sheet.
10. the preparation method based on the continuously adjustable degradable Terahertz Meta Materials of optical drive according to claim 8, it is characterised in that: described semiconductive thin film is spherical, lamellar or flower-shaped.
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| CN112134027A (en) * | 2020-09-25 | 2020-12-25 | 合肥工业大学 | Metamaterial wave-absorbing device formed on basis of mutual intersection of three-dimensional resonance rings |
| CN112886259A (en) * | 2021-01-12 | 2021-06-01 | 之江实验室 | Adjustable reflective linear polarization controller and method |
| CN112886259B (en) * | 2021-01-12 | 2022-06-17 | 之江实验室 | Adjustable reflective linear polarization controller and method |
| CN113422184A (en) * | 2021-06-11 | 2021-09-21 | 西安电子科技大学 | Gain-adjustable radio frequency attenuation device based on split ring resonator |
| CN113422184B (en) * | 2021-06-11 | 2022-05-17 | 西安电子科技大学 | Gain-adjustable radio frequency attenuation device based on split ring resonator |
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