CN116559116A - Liquid detection sensor chip based on dual-band electromagnetic induction transparent effect - Google Patents
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Abstract
The invention discloses a liquid detection sensor chip based on a dual-band electromagnetic induction transparent effect, which comprises a metal layer and a basal layer, wherein the metal layer is a unit structure array formed by an external metal square-opening resonator and an internal dual-circular-opening ring dimer resonator, and the unit structure array is arranged according to a square period; the substrate layer is used for placing a metal square split resonator and a double circular split ring dimer resonator of a metal layer. When terahertz waves vertically irradiate on the sensor chip, two bright-bright modes excited by the metal structure are mutually coupled to generate destructive interference, so that the electromagnetic induction transparent effect of a double-band wide window and a narrow window is realized. The invention has simple structure, easy processing and high sensitivity, and has wide application prospect in the aspects of liquid detection, qualitative detection of medicines and early screening of cancer cells.
Description
Technical Field
The invention relates to the technical field of sensing devices, in particular to a liquid detection sensor chip based on a dual-band electromagnetic induction transparent effect.
Background
Electromagnetic induction transparency (Electromagnetically induced transparency, EIT) is a physical effect in quantum systems, and due to external conditions, a narrower transparent window can be obtained in a wider opaque spectrum, which has been a hot spot in research in the field of quantum optics in recent years. Due to the generation of the narrow transparent window, the dispersion characteristic around the window is also obviously changed, and the effect of reducing the light speed is achieved. EIT effects typically occur in three-level atomic systems, which can be explained theoretically by destructive quantum interference between different transition pathways. However, the physical conditions for achieving EIT effects in quantum systems are extremely demanding, often requiring ultra-low temperature, high intensity pump light sources. Therefore, the EIT effect is greatly limited in application and research in practical engineering.
The metamaterial (materials) formed by the sub-wavelength structural units can effectively control the amplitude, the phase and the polarization of electromagnetic waves, and realize novel optical effects such as negative refraction, ideal lenses, electromagnetic stealth and the like. In recent years, with the rapid development of metamaterial technology, researchers have also found an electromagnetic induction-like transparent (Electromagnetically induced transparency-like, EIT-like) effect in artificial metamaterial structures. Normally, the bright mode or the dark mode is obtained from each part of the metamaterial structure respectively, and then near-field coupling is carried out on the bright mode or the dark mode to generate the EIT-like effect. The bright mode can be directly excited by incident waves, and has the characteristics of larger radiation loss, wider resonance bandwidth and lower Q value; the dark mode cannot be directly coupled with the incident wave, is excited by coupling the near field energy of the bright mode, and has the characteristics of small radiation loss, narrow resonance bandwidth and high Q value. By near field interference between the two modes, a distinct EIT-like window can be observed. EIT-like in metamaterials has the characteristics of slow light effect, strong nonlinearity, strong dispersion and the like, so that the EIT-like in metamaterials is focused on various application fields including sensors, slow light devices, modulation, quantum information storage, absorbers and filters.
Liquid detection sensor chips based on dual-band electromagnetic induction transparency effect generally utilize the resonance characteristics of EIT-like to detect the amount of movement of a resonance point caused by a change in refractive index of liquid with sensitivity to a change in surrounding substances.
At present, the research of the refractive index sensor applied to the dual-band field at home and abroad is few, and the liquid detection sensitivity is not high, so that the application of the terahertz sensor is greatly limited. The design of sensor chips with high detection sensitivity for multiband applications has attracted strong attention from researchers.
Disclosure of Invention
The invention aims to provide a liquid detection sensor chip based on a dual-band electromagnetic induction transparent effect, which has the advantages of simple structure, easiness in processing, multiple wave bands, high Q value and high sensitivity.
The technical solution for realizing the purpose of the invention is as follows: a liquid detection sensor chip based on a dual-band electromagnetic induction transparent effect comprises a metal layer and a basal layer;
the metal layer is a unit structure array formed by an external metal square open resonator and an internal double-circular open ring dimer resonator, and the unit structure array is arranged according to a square period;
the substrate layer is used for placing a metal square split resonator and a double-circular split-ring dimer resonator of a metal layer.
As a specific example, the metal square-shaped split resonator and the double circular split ring dimer resonator of the metal layer are each made of aluminum 2 μm thick, the optical constants of which are described by the Drude model, wherein the plasma frequency w p =2.24x10 16 rad/s, damping constant γ=1.22x10 14 rad/s。
As a specific example, the substrate layer is made of a polyimide film of a polymer material having a thickness of 20 μm, and has a dielectric constant of 3.45.
As a specific example, each sensor cell structure of the metal layer has a square cross section and a side length of 90 μm.
As a specific example, the external metal square-shaped split resonator has an inner length of 50 μm, a width of 2 μm, and a split pitch of 30 μm.
As a specific example, the internal double-circular split-ring dimer resonator comprises two split rings placed back-to-back, each having an outer diameter of 20 μm and a width of 2 μm, the upper half-ring having an inter-split moment of 2 μm and the lower half-ring having an arc of 160 °.
As a specific example, the longitudinal and lateral coupling distances of the outer metal square-shaped split resonator and the inner double round split ring dimer resonator are 3 μm and 5 μm, respectively.
As a specific example, the outer metal square-shaped split resonator and the inner double round split ring dimer resonator of the metal layer are prepared by an electron beam lithography technique and a reactive ion etching technique.
As a specific example, under the vertical irradiation of the terahertz wave, the external metal square open resonator and the internal double-circular open ring dimer resonator respectively provide two 'bright' modes, namely an electric dipole mode and an electric quadrupole mode, when the two resonators are inlaid together, two adjacent pairs of resonances can be mutually coupled to generate destructive interference, the two electric dipole resonance couplings generate broadband EIT, the two electric quadrupole couplings generate narrowband EIT, two EIT-like windows are realized, the frequency points of the two transparent peaks are respectively 0.67THz and 1.77THz, and the transparent window of the broadband EIT is 2.5 times that of the narrowband EIT.
As a specific example, the unit structure arrays are periodically arranged along the x and y directions, the electromagnetic wave is normally incident on the unit structure arrays along the z axis, and the polarization direction of the incident electric field is the x axis direction.
Compared with the prior art, the invention has the remarkable advantages that: (1) The external metal square split resonator and the internal double circular split ring dimer resonator respectively provide two bright modes, namely an electric dipole mode and an electric quadrupole mode, when the two resonators are inlaid together, two adjacent pairs of resonances are mutually coupled to generate destructive interference, the two electric dipole resonances are coupled to generate broadband EIT, the two electric quadrupole resonances are coupled to generate narrowband EIT, two EIT-like windows are realized, the enhancement of an electromagnetic field and the high Q value resonance mode are obtained, and the energy loss is reduced; (2) Modulating two EIT-like effects by adjusting structural parameters such as the opening distance and the width of an external metal square opening resonator and an internal double-circular opening ring dimer resonator, so as to detect targets with different characteristic line spectrum widths; (3) The sensing performance of the narrow window EIT-like is better than that of the wide window EIT-like, and the high sensing sensitivity characteristic is obtained in the dual-band; (4) Simple structure, convenient preparation and high sensitivity, and provides wide prospect for liquid detection, medicine qualitative detection and early cancer cell screening.
Drawings
Fig. 1 is a three-dimensional view of a unit structure in a liquid detection sensor chip based on a dual-band electromagnetic induction transparent effect according to the present invention.
Fig. 2 is a front view of a unit structure in the present invention.
FIG. 3 is a graph showing transmission spectra of an external metal square split resonator, an internal double circular split ring dimer resonator, and a double window EIT according to an embodiment of the present invention.
FIG. 4 is a graph showing the electric field and current distribution in an embodiment of the present invention.
Fig. 5 is a diagram showing the effect of main structural parameters on EIT effect in the embodiment of the present invention.
FIG. 6 is a graph showing the transmission spectra of the liquids to be tested having refractive indices of 1, 1.2, 1.4, 1.6 and 1.8 according to the embodiment of the present invention.
Detailed Description
The invention will now be described in further detail with reference to the drawings and to specific examples.
Referring to fig. 1 and 2, the liquid detection sensor chip based on the dual-band electromagnetic induction transparent effect comprises a metal layer 1 and a substrate layer 2;
the metal layer 1 is a unit structure array formed by an external metal square open resonator and an internal double-circular open ring dimer resonator, and the unit structure array is arranged according to a square period;
the substrate layer 2 is used for placing a metal square split resonator and a double circular split ring dimer resonator of the metal layer 1.
Further, the metal square-opening resonator and the double-round shape of the metal layer 1The split-ring dimer resonators were each made 2 μm thick, the optical constants of which were described by the Drude model, where the plasma frequency w p =2.24x10 16 rad/s, damping constant γ=1.22x10 14 rad/s。
Further, the base layer 2 is made of a polyimide film of a polymer material having a thickness of 20 μm, and has a dielectric constant of 3.45.
Further, each sensor cell structure of the metal layer 1 has a square cross section and a side length of 90 μm.
Further, the inner length of the outer metal square-shaped split resonator is 50 μm, the width is 2 μm, and the opening pitch is 30 μm.
Further, the internal double-circular split-ring dimer resonator comprises two split rings placed back-to-back, each having an outer diameter of 20 μm and a width of 2 μm, the opening-to-opening moment of the upper half-ring being 2 μm and the radian of the lower half-ring being 160 °.
Further, the longitudinal and lateral coupling distances of the outer metal square-shaped split resonator and the inner double round split ring dimer resonator are 3 μm and 5 μm, respectively.
Further, the outer metal square-shaped split resonator and the inner double round split ring dimer resonator of the metal layer 1 are prepared by an electron beam lithography technique and a reactive ion etching technique.
Further, under the vertical irradiation of terahertz waves, the external metal square open resonator and the internal double-circular open ring dimer resonator respectively provide two 'bright' modes, namely an electric dipole mode and an electric quadrupole mode, when the two resonators are inlaid together, two adjacent pairs of resonances can be mutually coupled to generate destructive interference, the two electric dipole resonance couplings generate broadband EIT, the two electric quadrupole couplings generate narrowband EIT, two EIT-like windows are realized, the frequency points of the two transparent peaks are respectively 0.67THz and 1.77THz, and the transparent window of the broadband EIT is 2.5 times that of the narrow-band EIT.
Further, the unit structure arrays are periodically arranged along the x-axis and the y-axis, electromagnetic waves are normally incident on the unit structure arrays along the z-axis, and the polarization direction of an incident electric field is the x-axis direction.
Example 1
Referring to fig. 1, a schematic unit structure of a liquid detection sensor chip based on a dual-band electromagnetic induction transparent effect according to this embodiment is shown, wherein the metal layer 1 includes an external metal square-shaped split resonator and an internal double-circular split ring dimer resonator, and a substrate layer 2.
Referring to fig. 2, electromagnetic waves are normally incident on the metamaterial along the z-axis, and the polarization direction of an incident electric field is along the x-axis. The perfect matching layer is set along the z-axis direction to simulate infinite space, with periodic boundary conditions set in the x-axis and y-axis directions, respectively. The metamaterial is actually prepared by an electron beam lithography technology and a reactive ion etching technology.
The metal layer 1 is made of metal aluminum, and the thickness is 2 mu m.
The dielectric layer 2 is made of polyimide film with the thickness of 20 mu m.
The inner length of the external metal square-opening resonator is L 1 =50 μm, width w=2 μm, opening pitch g 1 =30μm。
The outer diameter R of the inner double-circular split-ring dimer resonator ring O Width w=2μm, inter-opening moment g 2 2 μm, radian θ=160° of lower semicircle ring (lower arm), longitudinal and lateral coupling distance O of outer metal square split resonator and inner double round split ring dimer resonator 1 And O 2 3 μm and 5 μm respectively.
Fig. 3 (a) - (c) show transmittance spectra calculated for the outer metal square split resonator, the inner double circular split ring dimer resonator and EIT metamaterial, respectively, at normal incidence. As can be seen from fig. 3 (a), in the frequency range of 0.1THz-2.3THz, there are two distinct transmission valleys (i.e., resonances R1, R2) on the transmission spectrum of the external metal square-open resonator metamaterial, with resonance R1 around 0.64THz and resonance R2 around 1.74THz, the pair of resonance modes can be seen as a clear mode. Similarly, the internal double-circular split-ring dimer resonator metamaterial can also directly obtain a pair of sharper resonant responses, as shown in (b) of fig. 3, and the pair of resonances of the internal double-circular split-ring dimer resonator structural response (i.e., R3, R4) are respectively around 1.03THz and 1.87THz can also be considered as bright mode. Therefore, the two structures of the external metal square open resonator and the internal double-circular open ring dimer resonator can be directly coupled with the incident energy to excite two pairs of metal plasma resonances, thereby creating conditions for EIT effect formed by bright mode-bright mode coupling. When the two structures are placed in the same structural unit, strong near-field coupling occurs between the two pairs of excited bright modes, the resonance R1 of the external metal square open ring resonator and the resonance R3 of the internal double-circular open ring dimer resonator form a broadband EIT-like window through near-field interference, and the resonance R2 of the external metal square open ring resonator and the resonance R4 of the internal double-circular open ring dimer resonator form a narrowband EIT-like window. Thus, the broadband EIT and the narrowband EIT occur simultaneously in the frequency domain of 0.1-2.3THz, as in (c) of fig. 3, the four transmission valleys are generated at positions of 0.58THz,1.04THz,1.74THz and 1.93THz, respectively, the frequency points of the two transparent peaks are 0.67THz and 1.77THz, respectively, and the transparent window of the broadband EIT is approximately 2.5 times the transparent window of the narrowband EIT.
FIG. 4 shows the electric field and current distribution, the electric field (Ez) and the surface current distribution (indicated by black arrows) of an external metal square-open resonator structure (a) R1 and (b) R2; an electric field (Ez) and a surface current distribution (represented by black arrows) of the inner double-circular split-ring dimer resonator structure (c) R3 and (d) R4; electric field distribution (Ez) and surface current distribution (indicated by red arrows) of four resonance valleys (e) - (h) of EIT of the dual EIT structure. Fig. 4 (a) shows that positive and negative induced charges are respectively distributed on the left and right sides of the external metal square-shaped split resonator, and current flows from the left side to the right side, so that it can be judged that R1 is electric dipole resonance. For resonance R2, as in (b) of fig. 4, there are four electric field energy hot spots, which respectively represent two pairs of positive and negative induced charges, and can be regarded as being composed of two electric dipoles of opposite polarities, and thus can be regarded as an electric quadrupole. Similarly, R3 is an electric dipole and R4 is an electric quadrupole. These resonances are all characterized by the behavior of LC resonant modes. As shown in fig. 4 (c) - (h) showing the electric field distribution Ez and the surface current distribution (indicated by red arrows) of the four resonance valleys of the dual EIT, it can be observed that at the two resonance valley frequencies of the broadband EIT, the electric field distribution and the surface current direction on the external metal square-open resonator are exactly opposite, which implies that the two electric dipole bright mode resonances have a strong mutual coupling effect, creating a transparent window. Interestingly, the electric field and surface current distribution at the two resonant valley frequencies of the narrowband EIT appear opposite on the inner double-circular split-ring dimer resonator, indicating coherent cancellation of the electric quadrupoles on the outer metal square split resonator and the inner double-circular split-ring dimer resonator, further revealing the principle of generation of the double-window EIT effect.
FIG. 5 shows the effect of the main structural parameters on EIT effect, and FIG. 5 (a) is g 1 (b) is g 2 (c) is W and (d) is θ. When g 1 Increasing from 20 μm to 40 μm, dip1, dip2 and dip3 simultaneously blue shifted with little effect on the high frequency valley dip 4. While changing g 2 When the influence is mainly larger on dip2 and smaller on the other three resonance valleys. W increased from 1 μm to 4 μm, dip1 and dip3 red shifted, dip2 and dip4 blue shifted, and the double EIT window amplified simultaneously. By reducing θ, the narrowband EIT window for high frequencies will increase significantly, while the wideband EIT for low frequencies will be less affected.
Fig. 6 shows the variation of EIT-like transmission spectra when the liquid under test is immersed around the structure with refractive indices 1, 1.2, 1.4, 1.6, 1.8, respectively. It can be seen that a slight change in refractive index causes a significant shift in the position of the resonant mode of the EIT-like window. With the increase of the refractive index of the liquid to be measured, the four resonance valleys of the EIT-like are all red shifted. The average sensitivity S of the wide and narrow windows EIT-like is 150GHz/RIU and 237.5GHz/RIU, respectively, and the figure of merit FOM values are 7.92 and 1.67, respectively. The metamaterial sensor chip has the advantages of simple structure, easiness in processing and high sensitivity, and provides a wide prospect for application in aspects of liquid detection, qualitative detection of medicines, early screening of cancer cells and the like.
In summary, the above embodiments are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The liquid detection sensor chip based on the dual-band electromagnetic induction transparent effect is characterized by comprising a metal layer (1) and a substrate layer (2);
the metal layer (1) is a unit structure array formed by an external metal square open resonator and an internal double-circular open ring dimer resonator, and the unit structure array is arranged according to a square period;
the substrate layer (2) is used for placing a metal square split resonator and a double-circular split-ring dimer resonator of the metal layer (1).
2. The liquid detection sensor chip based on the dual band electromagnetic induction transparency effect according to claim 1, characterized in that the metal square-shaped split resonator and the double circular split-ring dimer resonator of the metal layer (1) are both made of 2 μm thick aluminum, the optical constants are described by the Drude model, wherein the plasma frequency w p =2.24x10 16 rad/s, damping constant γ=1.22x10 14 rad/s。
3. The liquid detection sensor chip based on the dual-band electromagnetic induction transparency effect according to claim 1, wherein the substrate layer (2) is made of a polymer material polyimide film with the thickness of 20 μm, and the dielectric constant is 3.45.
4. The liquid detection sensor chip based on the dual-band electromagnetic induction transparency effect according to claim 1, wherein the cross section of each sensor unit structure of the metal layer (1) is square, and the side length is 90 μm.
5. The liquid detection sensor chip based on the dual-band electromagnetic induction transparency effect according to claim 1, wherein the inner length of the external metal square-shaped split resonator is 50 μm, the width is 2 μm, and the opening pitch is 30 μm.
6. The dual band electromagnetic induction transparency effect based liquid detection sensor chip according to claim 1 wherein the inner dual circular split ring dipolymer resonator comprises two split rings placed back to back, each with an outer diameter of 20 μm, a width of 2 μm, an inter-split moment of 2 μm for the upper semicircle, and an arc of 160 °.
7. The dual band electromagnetic induction transparency effect based liquid detection sensor chip according to claim 1 wherein the longitudinal and lateral coupling distances of the outer metallic square split resonator and the inner double circular split ring dimer resonator are 3 μm and 5 μm, respectively.
8. The liquid detection sensor chip based on the dual band type electromagnetic induction transparency effect according to claim 1, wherein the outer metal square open resonator and the inner double circular open ring dimer resonator of the metal layer (1) are prepared by electron beam lithography and reactive ion etching.
9. The liquid detection sensor chip based on the dual-band electromagnetic induction transparent effect according to claim 1, wherein under the vertical irradiation of terahertz waves, the external metal square open resonator and the internal dual-circular open ring dimer resonator respectively provide two 'bright' modes, namely an electric dipole mode and an electric quadrupole mode, when two resonators are inlaid together, two adjacent pairs of resonances can be mutually coupled to generate destructive interference, the two electric dipole resonances are coupled to generate broadband EIT, the two electric quadrupole resonances are coupled to generate narrow-band EIT, two EIT-like windows are realized, the frequency points of the two transparent peaks are respectively 0.67THz and 1.77THz, and the transparent window of the broadband EIT is 2.5 times that of the narrow-band EIT.
10. The liquid detection sensor chip based on the dual-band electromagnetic induction transparency effect according to claim 1, wherein the unit structure arrays are periodically arranged along the x-axis and the y-axis, the electromagnetic waves are normally incident on the unit structure arrays along the z-axis, and the polarization direction of the incident electric field is the x-axis direction.
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