CN105806186A - Target material detection platform, target material detection device and target material detection method - Google Patents
Target material detection platform, target material detection device and target material detection method Download PDFInfo
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- CN105806186A CN105806186A CN201410855622.2A CN201410855622A CN105806186A CN 105806186 A CN105806186 A CN 105806186A CN 201410855622 A CN201410855622 A CN 201410855622A CN 105806186 A CN105806186 A CN 105806186A
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Abstract
The invention provides a target material detection platform, a target material detection device and a target material detection method. The target material detection platform is a cuboid. Two strip-type grooves which are mutually parallel are arranged on the upper surface of the target material detection platform, wherein the strip-type grooves are along the width direction of the upper surface of the rectangle. When a forklift places a target material on the upper surface of the target material detection platform, fork strips of the forklift are accommodated in the grooves. When the target material detection platform which is provided by the invention is used to carry out target material curvature detection, the forklift can be used to place the target material on the upper surface of the target material detection platform, which is more convenient and safe than manual target material handling in the existing technology. The invention further provides the target material detection method. The method comprises the steps that the target material is placed on the upper surface of the target material detection platform; a feeler gauge is inserted in a gap between the upper surface of the target material detection platform and the target material; the height of the gap between the upper surface of the target material detection platform and the target material is measured; and the method has the advantages of low cost, fast measurement and improved production efficiency.
Description
Technical field
The invention belongs to field of semiconductor technology, particularly relate to a kind of target detection platform, target detecting device and target detection method.
Background technology
In quasiconductor and LCD industry, target material assembly is generally adopted to carry out the sputtering technology of metallic diaphragm.Target material assembly is generally made up of the target part meeting sputtering performance and the back board part with some strength.
The flexibility of target material assembly is had higher requirement by sputtering technology.For LCD target, after flexibility corrects, it is necessary to target material assembly is placed in detection platform, the flexibility of target face Yu backboard face is detected respectively.Mostly existing LCD target flexibility detection technique is CMM (three coordinates) detection technique, adopts CMM to detect the equipment target material assembly to being positioned in detection platform and carries out optical coordinate detection.But it is higher that CMM detects equipment cost, up to hundreds of thousands unit, and it is longer to detect the time during volume production.The detection platform of prior art is unfavorable for that LCD target is carried, and personnel transport is inconvenient to there is potential safety hazard.
Additionally, the impact of the flatness detecting examined platform of target material assembly flexibility.Therefore the flatness of detection platform is had higher requirements by the detection of target flexibility, and the flatness of usual detection platform needs less than 0.5mm and surface abrasion resistance.
Summary of the invention
The problem that this invention address that is to provide a kind of target detection platform, target detecting device and target detection method, with described target detection platform, target material assembly degree of being curved is detected, the measurement time can be shortened, reduce testing cost, and reduce target carrying difficulty.
For this, the invention provides a kind of target detection platform, for detecting the flexibility of target,
Described target detection platform is cuboid；
Upper surface in described target detection platform is provided with two widths along rectangle upper surface and the strip groove being parallel to each other, for when target is placed on target detection platform upper surface by fork truck, holding the fork bar of fork truck.
Optionally, said two strip groove runs through described target along the width of described rectangle upper surface
Material detection platform.
Optionally, described strip groove is equal to the distance on described rectangle upper surface both sides.
Optionally, the groove width of described strip groove is in the scope of 180 to 230 millimeters, and the degree of depth is in the scope of 60 to 80 millimeters.
Optionally, described target detection platform is of a size of:
The length of described cuboid target detection platform is in the scope of 3000 to 3500 millimeters, and width is in the scope of 2000 to 2500 millimeters, and height is in the scope of 200 to 500 millimeters.
Optionally, described target detection platform is of a size of:
The length of described cuboid target detection platform is in the scope of 2700 to 3500 millimeters, and width is in the scope of 250 to 300 millimeters.
Optionally, the distance between described strip groove is in the scope of 700 to 800 millimeters.
Optionally, the material of described target detection platform is marble.
Optionally, the flatness of described target detection platform upper surface is less than 0.5 millimeter.
The present invention also provides for a kind of target detecting device, including: target detection platform provided by the invention, it is used for placing target material assembly；
Clearance gauge, for detecting the height in the space between target detection platform upper surface and target material assembly.
Optionally, the precision of described clearance gauge is 0.1 millimeter.
The present invention also provides for the method for a kind of target detection, including: target material assembly and target detecting device provided by the invention are provided；
Described target material assembly is placed on described target detection platform upper surface；
Insert in the space between target detection platform upper surface and target material assembly with clearance gauge, measure target detection platform upper surface various location, the space height between target material assembly and target detection platform upper surface.
Optionally, described target material assembly includes target part and back board part, in the step that described target material assembly is placed on described target detection platform upper surface, target part and target detection platform upper surface is oppositely arranged；Target detection platform upper surface various location is being measured with clearance gauge, in the step of the space height between target material assembly and target detection platform upper surface, target detection platform upper surface various location, the space height between target part and target detection platform upper surface is measured with clearance gauge；
Or, in the step that described target material assembly is placed on described target detection platform upper surface, back board part and target detection platform upper surface are oppositely arranged, are measuring target detection platform upper surface various location with clearance gauge；In the step of the space height between target material assembly and target detection platform upper surface, measure target detection platform upper surface various location, the space height between back board part and target detection platform upper surface with clearance gauge.
Compared with prior art, target detection platform provided by the present invention, target detecting device and target detection method have the advantage that
Target detection platform provided by the present invention is cuboid, and described target detection platform has smooth rectangle upper surface；It is provided with two widths along rectangle upper surface and the strip groove being parallel to each other, for when target is placed on target detection platform upper surface by fork truck, holding the fork bar of fork truck at described target detection platform upper surface.Therefore, when adopting target detection platform provided by the present invention to do the detection of target flexibility, it is possible to adopt fork truck that target is placed into target detection platform upper surface, compared with the more convenient safety of a dead lift target of prior art.
Additionally, the method for target of the present invention detection, including: described target detecting device is provided；Described target is placed on described target detection platform upper surface；Insert in the space between target detection platform upper surface and target with clearance gauge, measure target detection platform upper surface various location, the space height between target and target detection platform upper surface.The method of target of the present invention detection only with target detection platform and clearance gauge as measurement device, with low cost, and it is shorter to measure the time, improves production efficiency.
Further alternative, the material of described target detection platform is marble.Marble is comparatively wear-resisting, and anti-pressure ability is strong, it is not easy to be deformed.Adopting marble target detection platform as a reference plane, the flexibility measuring target is more accurate.
Further alternative, the flatness of described target detection platform upper surface is less than 0.5 millimeter.Adopting the flatness target detection platform less than 0.5 millimeter as a reference plane, the error of the flexibility measuring target is less.
Accompanying drawing explanation
Fig. 1 is the axonometric chart of target detection platform one embodiment of the present invention；
Fig. 2 to Fig. 3 is the schematic diagram of method one embodiment of target of the present invention detection.
Detailed description of the invention
As stated in the Background Art, existing target flexibility detection technique is relatively costly, and the detection time is longer, and the process being placed into by target material assembly in detection platform is dangerous.
Target detection platform provided by the invention is cuboid, it is provided with two widths along rectangle upper surface at described target detection platform upper surface, and the strip groove being parallel to each other, for when target material assembly is placed on target detection platform upper surface by fork truck, holding the fork bar of fork truck.Therefore, when adopting target detection platform provided by the present invention to do the detection of target flexibility, it is possible to adopt fork truck that target material assembly is placed into target detection platform upper surface, compared with the more convenient safety of a dead lift target of prior art.
Additionally, the method for target of the present invention detection includes: provide described target detecting device；Described target material assembly is placed on described target detection platform upper surface；Insert in the space between target detection platform upper surface and target material assembly with clearance gauge, measure target detection platform upper surface various location, the space height between target material assembly and target detection platform upper surface.The method of target of the present invention detection only with target detection platform and clearance gauge as measurement device, with low cost, and it is shorter to measure the time, improves production efficiency.
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
Present invention firstly provides a kind of target detection platform, for detecting the flexibility of target.Refer to the axonometric chart that Fig. 1, Fig. 1 are target detection platform one embodiment provided by the present invention.
As it is shown in figure 1, the present embodiment target detection platform 100 is cuboid, described target detection platform 100 has smooth rectangle upper surface.
It is provided with two widths along rectangle upper surface and the strip groove being parallel to each other, for when target is placed on target detection platform 100 upper surface by fork truck, holding the fork bar of fork truck at described target detection platform upper surface.
When adopting the present embodiment target detection platform 100 to do the detection of target flexibility, it is possible to adopt fork truck that target is placed into target detection platform 100 upper surface, compared with the more convenient safety of a dead lift target of prior art.
The target detection platform 100 of the present embodiment is for detecting the flexibility of LCD target material assembly.The length and width of target detection platform 100 upper surface of the present embodiment is all higher than the length and width of existing LCD target material assembly, the cuboid target detection platform 100 making the present embodiment can be placed in prior art LCD target material assembly, for G8.5 for line, G6 for line, G5 for target material assembly for line of line and G4.5, namely above-mentioned several target material assembly degree of being curved can be detected by the cuboid target detection platform 100 of the present embodiment.
Prior art LCD target material assembly is logical to be included for following several sizes:
G8.5 is about 2500 (length) * 230 (width) mm for the size of line Splittable target material assembly；
G6 is about 2200 (length) * 1700 (width) mm for the size of the one-piece type target material assembly of line；
G6 is about 2650 (length) * 210 (width) mm for the size of line Splittable target material assembly；
G5 is about 2050 (length) * 1500 (width) for the size of the one-piece type assembly of line；
G4.5 is about 1170 (length) * 1300 (width) for the size of the one-piece type assembly of line.
Wherein, one-piece type target material assembly can separately as substrate carries out the target that sputtering technology adopts, and multiple (such as 12 or 10) Splittable target material assembly is combined together as substrate is being carried out the target material assembly that sputtering technology adopts.
The length of the cuboid target detection platform 100 of the present embodiment is more than 3000 millimeters, and width is more than 2300 millimeters.If but the length and width of cuboid target detection platform 100 is excessive, then it is unfavorable for the conveyance of target, therefore, optionally, the length A3 of described cuboid target detection platform 100 is in the scope of 3000 to 3500 millimeters, and width A2 is in the scope of 2000 to 2500 millimeters.In the present embodiment, the height A1 of described cuboid target detection platform 100 is in the scope of 200 to 500 millimeters.The small volume of so described cuboid target detection platform 100, it is easy to produce the better upper surface of flatness, if the volume of described cuboid target detection platform 100 is excessive, then the technology difficulty making the higher upper surface of flatness strengthens.
Specifically, in the present embodiment, the length A3 of described cuboid target detection platform 100 is 3200 millimeters, and width A2 is 2000 millimeters, and height A1 is 250 millimeters.
It should be noted that, the size of cuboid target detection platform 100 of the present invention correspondingly can adjust according to the size of target material assembly and type, such as, when being mainly used in Splittable target material assembly size degree of being curved is detected, or when being mainly used in six generation line target material assemblies and smaller one-piece type target material assembly degree of being curved are detected, the width of described cuboid target detection platform 100 can be reduced accordingly, or reduce the length and width of described cuboid target detection platform 100 simultaneously, to save the cost of cuboid target detection platform 100, and provide facility for transporting target material assembly in cuboid target detection platform 100.
Such as, G6 is about 2650 (length) * 210 (width) mm for the size of line Splittable target material assembly, in other embodiments, described cuboid target detection platform 100 can only be used for G6 and detect for the flexibility of line Splittable target material assembly, can make the length A3 of described cuboid target detection platform 100 can in the scope of 2700 to 3500 millimeters, width A2 is in the scope of 250 to 300 millimeters, so can save the cost of cuboid target detection platform 100, and provide facility for transporting target material assembly in cuboid target detection platform 100.
For only for the cuboid target detection platform 100 of the target material assembly of other sizes, size all can be adjusted accordingly to be applicable to place the target material assembly of other sizes.
In the present embodiment, the strip groove that said two is parallel to each other is the first groove 101 and the second groove 102.
In the present embodiment, as it is shown in figure 1, the upper surface in described target detection platform 100 is rectangle, described first groove 101 and the second groove 102 run through described target detection platform 100 along the width of described rectangle upper surface.So, when adopting fork truck that target is placed on target detection platform 100 upper surface, the fork bar of fork truck can insert the first groove 101 and the second groove 102 from arbitrary side on the long limit of cuboid target detection platform 100 upper surface so that the conveyance of target material assembly is convenient.But the invention is not limited in this regard, in other embodiments, described first groove 101 and the second groove 102 can not also run through described target detection platform 100 along the width of described rectangle upper surface, and the fork bar of fork truck can insert the first groove 101 and the second groove 102 from the fixing side on the long limit of cuboid target detection platform 100 upper surface.
In order to make the fork bar of fork truck be inserted in the first groove 101 and the second groove 102, the distance between described first groove 101 and the groove width of the second groove 102, the degree of depth and the first groove 101 and the second groove 102 needs to match with existing conventional fork truck size.
Optionally, the distance between described first groove 101 and the second groove 102 is in the scope of 700 to 800 millimeters, and the groove width of described first groove 101 and the second groove 102 is in the scope of 180 to 230 millimeters, and the degree of depth is in the scope of 60 to 80 millimeters.
Specifically, in the present embodiment, the groove width A4 of the first groove 101 and the second groove 102 is 210 millimeters, and degree of depth A5 is 70 millimeters.Distance A6 between described first groove 101 and the second groove 102 is at 740 millimeters.
It should be noted that in the present embodiment, described first groove 101 and the second groove 102 are equal to the distance on the both sides of described rectangle upper surface.The rectangle upper surface of such first groove 101 and second 102 target detection platform 100 of groove is divided into three sections, wherein the distance between the first groove 101 and the second groove 102 is at 740 millimeters, therefore, the first groove 101 and the second groove 102 each arrive the distance of its nearside is 1020 millimeters.
Described first groove 101 and the second groove 102 are in that to the equidistant effect on the both sides of described rectangle upper surface, first groove 101 and the second groove 10 are comparatively uniform in the distribution of described rectangle upper surface, when target material assembly is placed into target detection platform 100 upper surface, target material assembly is more uniform to the pressure ratio of target detection platform 100 upper surface, it is not easy to deformation.
In the present embodiment, the material of described target detection platform 100 is marble.Marble is comparatively wear-resisting, and anti-pressure ability is strong, it is not easy to be deformed.Adopting marble target detection platform as a reference plane, the flexibility measuring target material assembly is more accurate.
In the present embodiment, the flatness of described target detection platform 100 upper surface is less than 0.5 millimeter.Adopting the flatness target detection platform less than 0.5 millimeter as a reference plane, the error of the flexibility measuring target is less.
It should be noted that, in the present embodiment, described target detection platform 100 upper surface processes through grinding and polishing, specifically, described target detection platform 100 upper surface is ground polishing, makes target detection platform 100 thickness, the flatness of target detection platform 100 upper surface, glossiness reach flexibility and measure required requirement.
The step of described grinding and polishing treatment process includes: the corase grind smoothing being sequentially carried out, half fine grinding, fine grinding, fine grinding and polishing.Target detection platform 100 upper surface processed through such grinding and polishing has good flatness, but the concrete steps of described grinding and polishing treatment process are not limited by the present invention.
To sum up, target detection platform 100 shape of the present invention is relatively simple, it is easy to make, with low cost.When adopting target detection platform provided by the present invention to do the detection of target flexibility, it is possible to adopt fork truck that target material assembly is placed into target detection platform upper surface, compared with the more convenient safety of a dead lift target material assembly of prior art.
The present invention also provides for a kind of target detecting device, including: the target detection platform as described in above-described embodiment, it is used for placing target material assembly.
Clearance gauge, for detecting the height in the space between target detection platform upper surface and target material assembly.
It should be noted that the clearance gauge of the present embodiment is the clearance gauge that prior art is common, with low cost, the precision of described clearance gauge is 0.1 millimeter.
Target detection platform and the cost of clearance gauge in target detecting device of the present invention are all comparatively cheap, and therefore, target detecting device of the present invention is with low cost.
The present invention also provides for a kind of target detection method, and target detection method of the present invention can be, but not limited to adopt target detecting device provided by the invention to carry out target flexibility detection.
Fig. 2 and Fig. 3 illustrates the schematic diagram of target detection method one embodiment of the present invention.
The present embodiment target detection method includes: provide target material assembly 200 and the target detecting device described in above-described embodiment.
Described target material assembly 200 includes target part 201 and back board part 202.The standard flexibility of usual target part 201 and back board part 202 is 1 millimeter.
Described target material assembly 200 is placed on described target detection platform 100 upper surface.
As shown in Figure 2, in the present embodiment, described target material assembly 200 is placed in the layout of described target detection platform 100 upper surface, first target part 201 and target detection platform 100 upper surface are oppositely arranged, target detection platform 100 upper surface various location, the space height between target part 201 and target detection platform 100 upper surface is measured with clearance gauge 300.
In the present embodiment, the precision of described clearance gauge 300 is 0.1 millimeter, and range is 1 millimeter.Clearance gauge includes multiple measurement thin slice, and the precision of clearance gauge 300 is 0.1 millimeter, and namely the thinnest thin slice is 0.1 millimeter.Range is 1 millimeter, and referring to the thickest thin slice is 1 millimeter.In measurement process, it is possible to the position of maximum interspace between range estimation target part 201 and target detection platform 100 upper surface, the thickest thin slice is used to insert space, and pull clearance gauge, if easily pulled, illustrate that space is more than 1 millimeter, then the flexibility of target part 201 is defective.If being not easy to pull, then change thinner thin slice and insert space.Can also first being inserted by the thinnest thin slice in target part 201 one of them space with target detection platform 100 upper surface, if easily pulled, then change thicker thin slice and insert, until being difficult to pull clearance gauge, now the thickness of thin slice be the size in space.It should be noted that, can after clearance gauge 300 be inserted space, edge along target material assembly 200 horizontally slips, until measuring the size in space, all regions between target part 201 and target detection platform 100 upper surface, and the result whether flexibility to obtain target part 201 is up to specification.
As shown in Figure 3, the present embodiment target detection method also includes: back board part 202 and target detection platform 100 upper surface are oppositely arranged, target detection platform 100 upper surface various location is being measured with clearance gauge 300, in the step of the space height between target material assembly 200 and target detection platform 100 upper surface, target detection platform 100 upper surface various location, the space height between back board part 202 and target detection platform 100 upper surface is measured with clearance gauge 300.
Measuring back board part 202 identical with the method for the space height between target detection platform 100 upper surface and the space height between measurement target part 201 and target detection platform 100 upper surface, the present invention does not repeat them here.
The method of target of the present invention detection only with target detection platform 100 and clearance gauge 300 as measurement device, with low cost, and it is shorter to measure the time, is effectively increased production efficiency.
The foregoing is only specific embodiments of the invention; in order that make those skilled in the art be better understood from the spirit of the present invention; but protection scope of the present invention is not specifically described as restriction scope with this specific embodiment; any those skilled in the art is without departing from the spirit of the scope of the invention; specific embodiments of the invention can be made an amendment, without deviating from protection scope of the present invention.
Claims (13)
1. a target detection platform, for detecting the flexibility of target, it is characterised in that
Described target detection platform is cuboid；
Upper surface in described target detection platform is provided with two widths along rectangle upper surface and the strip groove being parallel to each other, for when target is placed on target detection platform upper surface by fork truck, holding the fork bar of fork truck.
2. target detection platform as claimed in claim 1, it is characterised in that described strip groove runs through described target detection platform along the width of described rectangle upper surface.
3. target detection platform as claimed in claim 1, it is characterised in that said two strip groove is equal to the distance on described rectangle upper surface both sides.
4. target detection platform as claimed in claim 1, it is characterised in that the groove width of described strip groove is in the scope of 180 to 230 millimeters, and the degree of depth is in the scope of 60 to 80 millimeters.
5. target detection platform as claimed in claim 1, it is characterised in that described target detection platform is of a size of:
The length of described cuboid target detection platform is in the scope of 3000 to 3500 millimeters, and width is in the scope of 2000 to 2500 millimeters, and height is in the scope of 200 to 500 millimeters.
6. target detection platform as claimed in claim 1, it is characterised in that described target detection platform is of a size of:
The length of described cuboid target detection platform is in the scope of 2700 to 3500 millimeters, and width is in the scope of 250 to 300 millimeters.
7. target detection platform as claimed in claim 1, it is characterised in that the distance between described strip groove is in the scope of 700 to 800 millimeters.
8. target detection platform as claimed in claim 1, it is characterised in that the material of described target detection platform is marble.
9. target detection platform as claimed in claim 1, it is characterised in that the flatness of described target detection platform upper surface is less than 0.5 millimeter.
10. a target detecting device, it is characterised in that including: target detection platform as claimed in any one of claims 1-9 wherein, is used for placing target material assembly；
Clearance gauge, for detecting the height in the space between target detection platform upper surface and target material assembly.
11. target detecting device as claimed in claim 10, it is characterised in that the precision of described clearance gauge is 0.1 millimeter.
12. the method for a target detection, it is characterised in that including: the target detecting device described in target material assembly and claim 10 or 11 is provided；
Described target material assembly is placed on described target detection platform upper surface；
Insert in the space between target detection platform upper surface and target material assembly with clearance gauge, measure target detection platform upper surface various location, the space height between target material assembly and target detection platform upper surface.
13. the method for target detection as claimed in claim 12, it is characterized in that, described target material assembly includes target part and back board part, in the step that described target material assembly is placed on described target detection platform upper surface, target part and target detection platform upper surface is oppositely arranged；Target detection platform upper surface various location is being measured with clearance gauge, in the step of the space height between target material assembly and target detection platform upper surface, target detection platform upper surface various location, the space height between target part and target detection platform upper surface is measured with clearance gauge；
Or, in the step that described target material assembly is placed on described target detection platform upper surface, back board part and target detection platform upper surface are oppositely arranged, are measuring target detection platform upper surface various location with clearance gauge；In the step of the space height between target material assembly and target detection platform upper surface, measure target detection platform upper surface various location, the space height between back board part and target detection platform upper surface with clearance gauge.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410855622.2A CN105806186A (en) | 2014-12-31 | 2014-12-31 | Target material detection platform, target material detection device and target material detection method |
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| CN201410855622.2A CN105806186A (en) | 2014-12-31 | 2014-12-31 | Target material detection platform, target material detection device and target material detection method |
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| CN105806186A true CN105806186A (en) | 2016-07-27 |
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| CN201410855622.2A Pending CN105806186A (en) | 2014-12-31 | 2014-12-31 | Target material detection platform, target material detection device and target material detection method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112097612A (en) * | 2020-09-07 | 2020-12-18 | 韶关市欧莱高新材料有限公司 | Straightness detection equipment for ITO (indium tin oxide) rotary target and use method of straightness detection equipment |
| CN113624110A (en) * | 2021-06-30 | 2021-11-09 | 沪东中华造船(集团)有限公司 | Method for detecting flatness of liquid cargo tank of LNG ship |
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| JPH0814806A (en) * | 1994-06-28 | 1996-01-19 | Kubota Corp | Seal member position inspecting device in pipe coupling |
| CN202013170U (en) * | 2011-04-14 | 2011-10-19 | 福州福享汽车工业有限公司 | Detection pin used for detecting profile tolerance of automobile sheet metal parts |
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| CN113624110A (en) * | 2021-06-30 | 2021-11-09 | 沪东中华造船(集团)有限公司 | Method for detecting flatness of liquid cargo tank of LNG ship |
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Effective date of registration: 20170720 Address after: The New District of Hefei City, Anhui Province, East Road and road intersection southwest corner station Yu Industrial Park A District E group dormitory building 15 Applicant after: Hefei Jiang Feng Electronic Materials Co., Ltd. Address before: 315400 Ningbo, Yuyao province science and Technology Industrial Park Road, No. 198, No. Applicant before: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. |
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Application publication date: 20160727 |