CN112097612A - Straightness detection equipment for ITO (indium tin oxide) rotary target and use method of straightness detection equipment - Google Patents
Straightness detection equipment for ITO (indium tin oxide) rotary target and use method of straightness detection equipment Download PDFInfo
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- CN112097612A CN112097612A CN202010929160.XA CN202010929160A CN112097612A CN 112097612 A CN112097612 A CN 112097612A CN 202010929160 A CN202010929160 A CN 202010929160A CN 112097612 A CN112097612 A CN 112097612A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/24—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B5/25—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/14—Measuring arrangements characterised by the use of mechanical techniques for measuring distance or clearance between spaced objects or spaced apertures
Abstract
The invention relates to the technical field of target material production equipment, and discloses straightness detection equipment for an ITO (indium tin oxide) rotary target material, which comprises a first platform and a vertical platform, wherein a first reference surface is arranged on the top surface of the first platform, the end surface of the vertical platform is connected to the first reference surface, a vertical second reference surface is arranged on the vertical platform, the vertical platform comprises a second platform and a third platform, the second platform is provided with a vertical second reference surface, and the third platform is provided with a vertical third reference surface. The invention also provides a using method of the device, which comprises the following steps: attaching the end face of the ITO rotary target to a first reference surface; the outer side wall of the ITO rotary target is close to the vertical reference surface until the outer side wall of the ITO rotary target is abutted; and observing or measuring a gap between the vertical reference surface and the outer side wall of the ITO rotary target. The invention can ensure the detection efficiency of the straightness of the outer side wall of the ITO target, and has low price and good detection effect.
Description
Technical Field
The invention relates to the technical field of target material production equipment, in particular to straightness detection equipment for an ITO (indium tin oxide) rotary target material and a using method thereof.
Background
ITO is an N-type oxide semiconductor, indium tin oxide, and ITO thin films, i.e., transparent conductive films of indium tin oxide semiconductor, generally have two performance criteria, resistivity and transmittance. ITO is an abbreviation for Indium TinOxides. The ITO is nano indium tin metal oxide, has good conductivity and transparency, and can filter out electronic radiation, ultraviolet rays and far infrared rays which are harmful to human bodies. Therefore, indium tin oxide is generally sprayed on glass, plastic and electronic display panels to be used as a transparent conductive film while reducing electron radiation harmful to the human body and ultraviolet and infrared rays. The ITO target has high performance advantage and high thermal shock resistance, does not damage equipment in use, and has high purity. At present, a flat panel display is used in a plurality of electronic products in the market, liquid crystal computers and liquid crystal televisions enter thousands of households, the quality of liquid crystal products is high in appearance and texture, and energy consumption can be reduced.
At present, there are two kinds of ITO targets, one is planar indium tin oxide, and the other is rotary indium tin oxide. However, the utilization rate of the planar indium tin oxide target can only reach 40 percent at present, and the utilization rate of the target can reach 70 percent at present by rotation. However, the requirement for the straightness of the rotary ITO target is strict, and the current instruments for detecting the straightness in the market are expensive, and the efficiency for detecting the straightness of the rotary ITO target is low.
Disclosure of Invention
The invention aims to provide a straightness detection device of an ITO (indium tin oxide) rotary target material and a use method thereof, which can efficiently detect the straightness of the rotary ITO target material.
In order to achieve the purpose, the invention provides a straightness detection device of an ITO (indium tin oxide) rotary target, which comprises a first platform and a vertical platform, wherein a first reference surface is arranged on the top surface of the first platform, the end surface of the vertical platform is connected to the first reference surface, and a vertical second reference surface is arranged on the vertical platform.
Preferably, the vertical platform comprises a second platform and a third platform, a vertical second reference surface is arranged on the second platform, a vertical third reference surface is arranged on the third platform, and the second reference surface and the third reference surface form an included angle with each other.
The device comprises a first platform and a vertical platform, wherein a first reference surface is arranged on the top surface of the first platform, the end surface of the vertical platform is connected to the first reference surface, and a vertical second reference surface is arranged on the vertical platform.
Preferably, the vertical platform comprises a second platform and a third platform, a vertical second reference surface is arranged on the second platform, a vertical third reference surface is arranged on the third platform, and the second reference surface and the third reference surface form an included angle with each other.
Preferably, the second reference surface and the third reference surface are arranged in contact with each other.
Preferably, the second reference surface and the third reference surface form an included angle of 90 degrees.
Preferably, the first platform, the second platform and the third platform are all made of marble or granite.
Preferably, the device further comprises a feeler gauge, wherein the feeler gauge is used for measuring a gap between the outer side wall of the ITO rotary target and the second reference surface and the third reference surface.
The invention also provides a use method of the straightness detection equipment for the ITO rotary target material, which comprises the following steps:
s100, attaching the end face of the ITO rotary target to the first reference surface;
s200, enabling the outer side wall of the ITO rotary target to approach the vertical reference surface until the outer side wall of the ITO rotary target abuts against the vertical reference surface;
and S, observing or measuring a gap between the vertical reference surface and the outer side wall of the ITO rotary target.
Preferably, in step S200, the outer side wall of the ITO rotary target is brought close to the vertical reference surface or the second reference surface or the third reference surface;
and S, observing or measuring gaps between the vertical reference surface or the second reference surface and the third reference surface and the outer side wall of the ITO rotary target.
Preferably, in step S, a feeler gauge is used to measure the distance between the vertical reference surface or the second and third reference surfaces and the outer sidewall of the ITO rotary target.
The invention provides a straightness detection device of an ITO (indium tin oxide) rotary target, which comprises a first platform, a second platform and a third platform, wherein the top surface of the first platform is provided with a first reference surface, the end surfaces of the second platform and the third platform are connected to the first reference surface, the second platform is provided with a vertical second reference surface, the third platform is provided with a vertical third reference surface, and the second reference surface and the third reference surface form an included angle. Meanwhile, the detection equipment is simple in structure and low in production cost, and the economic value of the ITO target production can be improved. The invention also provides a use method of the straightness detection equipment for the ITO rotary target, the straightness detection is directly carried out on the outer side wall of the rotary target, the detection efficiency is high, the detection method is simple, the use effect of the rotary target in the use process can be improved, and the practicability is very high.
Drawings
Fig. 1 is a schematic structural diagram of a straightness detection apparatus for an ITO rotary target in embodiment 1 of the present invention;
fig. 2 is a schematic structural diagram of a straightness detection apparatus for an ITO rotary target in embodiment 2 of the present invention;
fig. 3 is a schematic structural diagram of a first platform of a straightness detection apparatus for an ITO rotary target in embodiment 2 of the present invention;
fig. 4 is a schematic structural diagram of a second stage and a third stage of a straightness detection apparatus for an ITO rotary target in embodiment 2 of the present invention;
in the figure, 100, a first platform; 101. a first reference plane; 200. a vertical platform; 201. a vertical reference plane; 210. a second platform; 211. a second reference plane; 220. a third platform; 221. a third reference plane; 400. and (3) rotating the target material by using the ITO.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
The straightness detection equipment for the ITO rotary target and the use method thereof in the preferred embodiment of the invention can improve the straightness detection efficiency of the ITO target.
Example 1
As shown in fig. 1, the straightness detection apparatus for an ITO rotary target provided in this embodiment 1 includes a first platform 100 and a vertical platform 200, where the first platform 100 is used as a bottom support platform, a first reference surface 101 is provided on a top surface of the first platform 100, the first reference surface 101 is used as an xoy reference plane, an end surface of the vertical platform 200 is connected to the first reference surface 101, and a vertical second reference surface 201 is provided on the vertical platform 200. The second reference surface 201 is used as a reference surface for detecting the outer sidewall of the target.
In producing the device, the device is produced by the following steps:
1. cutting marble at room temperature by a cutting machine to obtain a first platform with the length L1 of 500mm, the width K1 of 400mm and the thickness H1 of 100 mm;
2. cutting marble at room temperature by a cutting machine to obtain a vertical platform with the size of 500mm in height L2, 180mm in width K2 and 50mm in thickness H2;
3. drilling the first platform by percussion drilling at room temperature, position a 1: the hole diameter phi of the drill hole is 8mm and penetrates through the drill hole at the position which is 100mm away from the length edge and 150mm away from the left side of the width edge; position a 2: the length and width edges are 100mm, the width edges are 250mm (150 mm away from the edges opposite to the width direction), and the hole diameter phi of the drilled hole is 8 mm; drilling a hole in the vertical platform through a percussion drill at room temperature, wherein the drilling position is drilled on the width surface, as shown in fig. 4, the drilling position is on the middle line in the thickness direction, the width is 15mm (the drilling position is C1) and 165mm (the drilling position is C2), and the drilling specification is phi 8mm x 50 mm;
4. placing expansion screws with the diameter of 8mm into holes A1 and A2 of the first platform at room temperature;
5. aligning and placing a first reference surface of the first platform with the expansion screw and a hole at the position of the vertical platform hole at room temperature;
6. splicing the first platform and the vertical platform by using a phi 8mm expansion bolt at room temperature;
7. perpendicularity correction is carried out on the first reference surface and the vertical reference surface at room temperature, and the perpendicularity error is smaller than 1/0;
8. after the verticality is corrected at room temperature, the expansion screw is screwed down to fix the first platform and the vertical platform.
When the detection device of embodiment 1 is used, the end face of the ITO rotary target is placed on the first reference surface at room temperature, so that the outer side wall of the ITO rotary target is close to the vertical reference surface, and the gap between the outer side wall of the ITO rotary target and the vertical reference surface is visually detected at room temperature, so as to measure the straightness of the outer side wall of the ITO rotary target.
Example 2
As shown in fig. 2, based on the above technical solution, the straightness detection apparatus for an ITO rotary target provided in this embodiment includes a first platform 100, a second platform 200, and a third platform, where the first platform 100 is used as a bottom support platform, a first reference plane 101 is disposed on a top surface of the first platform 100, and the first reference plane 101 is used as an xoy reference plane.
Meanwhile, the end surfaces of the second platform 200 and the third platform are connected to the first reference surface 101, the second platform 200 and the third platform are used as vertical detection plates, the second platform 200 is provided with a vertical second reference surface 201, the third platform is provided with a vertical third reference surface 301, the second reference surface 201 and the third reference surface 301 are used as vertical detection reference surfaces, and the second reference surface 201 and the third reference surface 301 are respectively used as xoz detection reference surfaces and yoz detection reference surfaces.
The second reference surface 201 and the third reference surface 301 are arranged at an included angle, so that the second reference surface 201 and the third reference surface 301 can be matched with each other to perform straightness detection on the outer side walls of the ITO rotary target at different circumferential angles.
Preferably, the second reference surface 201 and the third reference surface 301 are arranged in contact, and during the production process, the second platform 200 and the edge of the third platform can be installed in contact, so that the second reference surface 201 and the third reference surface 301 are ensured to be in contact.
Preferably, the second reference surface 201 and the third reference surface 301 form an included angle of 90 degrees, so that the second reference surface 201 and the third reference surface 301 can simultaneously detect the straightness at the outer side wall of the ITO rotary target in two mutually perpendicular circumferential angles.
Preferably, the first platform 100, the second platform 200 and the third platform are all made of marble or granite, the linear expansion coefficient of the marble or granite is extremely small, the marble or granite is not easy to deform, the precision is high, the rigidity is good, the hardness is high, the wear-resisting property is good, the platform is suitable for being used as a detection platform, the price is low, and the production cost is saved.
Preferably, a feeler is further included, and the feeler is used for measuring the gap between the outer side wall of the ITO rotary target 400 and the second reference surface 201 and the third reference surface 301. In order to improve the detection accuracy of the straightness, a clearance between the outer side wall of the ITO rotary target 400 and the second reference surface 201 and the third reference surface 301 may be measured by using a feeler gauge
In producing the detecting device in example 2, it was produced by the following steps:
1. cutting marble at room temperature by a cutting machine to obtain a first platform with the length L1 of 500mm, the width K1 of 400mm and the thickness H1 of 100 mm;
2. cutting marble by a cutting machine at room temperature to form two vertical platforms with the size of 500mm in height L2, 180mm in width K2 and 50mm in thickness H2;
3. drilling the first platform by percussion drilling at room temperature, as shown in fig. 3, position a 1: the hole diameter phi of the drill hole is 8mm and penetrates through the drill hole at the position 100mm away from the length edge and 150mm away from the width edge; position a 2: the hole diameter phi of the drill hole is 8mm at the position 100mm away from the length edge and 250mm from the width edge (at the position 150mm away from the edge opposite to the width direction); position B1: the hole diameter phi of the drill hole is 8mm and penetrates through the drill hole at the position 100mm away from the width edge and 150mm away from the length edge; position B2: the hole diameter phi of the drill hole is 8mm from the position 100mm away from the width edge and 250mm from the length edge; two vertical platforms are drilled through the impact drill at room temperature, the drilling position is drilled on the width surface, as shown in fig. 4, the drilling position is on the middle line in the thickness direction, 15mm (drilling position C1) and 165mm (drilling position C2) in the width direction, and the drilling specification is phi 8mm x 50 mm.
4. Placing expansion screws with the diameter of 8mm into holes A1, A2, B1 and B2 of the first platform at room temperature;
5. placing a first reference surface of the first platform with the expansion screws in alignment with the hole-to-hole positions of the two vertical platform holes at room temperature;
6. splicing the first platform and the two vertical platforms by using phi 8mm expansion bolts at room temperature;
7. perpendicularity correction is carried out on the first reference surface and the two vertical reference surfaces at room temperature, and the perpendicularity error is smaller than 1/0;
8. after the verticality is corrected at room temperature, the expansion screw is screwed down to fix the first platform and the two vertical platforms.
When the detection device of the embodiment 2 is used, the end face of the ITO rotary target is placed on the first reference surface at room temperature, so that the outer side wall of the ITO rotary target is close to the two vertical reference surfaces, and the gap between the outer side wall of the ITO rotary target and the two vertical reference surfaces is visually detected at room temperature, so that the straightness of the outer side wall of the ITO rotary target is measured at different circumferential angles.
Example 3
This embodiment 3 provides a method for using the straightness detection apparatus for an ITO rotary target in embodiment 1, which includes the following steps:
s100, attaching the end face of the ITO rotary target 400 to the first reference surface 101;
s200, enabling the outer side wall of the ITO rotary target 400 to approach the vertical reference surface 201 until the outer side wall of the ITO rotary target abuts against the vertical reference surface;
and S, observing or measuring a gap between the vertical reference surface 201 and the side wall of the ITO rotary target 400.
Preferably, in step S, a clearance between the vertical reference surface 201 and the sidewall of the ITO rotary target 400 is measured using a feeler gauge.
Example 4
This embodiment 4 provides a method for using the straightness detection apparatus for an ITO rotary target in embodiment 2, which is characterized by comprising the following steps:
s100, attaching the end face of the ITO rotary target 400 to the first reference surface 101;
s200, enabling the outer side wall of the ITO rotary target 400 to approach to the second reference surface 211 and the third reference surface 221 until the outer side wall is abutted with the second reference surface;
and S, observing or measuring gaps between the second reference surface 211, the third reference surface 221 and the outer side wall of the ITO rotary target 400.
Preferably, in step S, the distances between the second reference surface 211, the third reference surface 221 and the sidewall of the ITO rotary target 400 are measured using a feeler gauge.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.
Claims (9)
1. The straightness detection equipment for the ITO rotary target is characterized by comprising a first platform (100) and a vertical platform (200), wherein a first reference surface (101) is arranged on the top surface of the first platform (100), the end face of the vertical platform (200) is connected to the first reference surface (101), and a vertical second reference surface (201) is arranged on the vertical platform (200).
2. The straightness detection apparatus for an ITO rotary target according to claim 1, wherein the vertical platform (200) comprises a second platform (210) and a third platform (220), wherein a second vertical reference plane (211) is disposed on the second platform (210), a third vertical reference plane (221) is disposed on the third platform, and the second reference plane (211) and the third reference plane (221) are disposed at an angle with respect to each other.
3. The straightness detection apparatus for an ITO rotary target according to claim 2, wherein the second reference surface (201) and the third reference surface (301) are disposed in contact with each other.
4. The straightness detection apparatus for an ITO rotary target according to claim 3, wherein the second reference surface (201) and the third reference surface (301) form an included angle of 90 degrees.
5. The straightness detection apparatus for an ITO rotary target according to claim 4, wherein the first stage (100), the second stage (200), and the third stage are made of marble or granite.
6. The straightness detection apparatus for an ITO rotary target according to claim 5, further comprising a feeler for measuring a gap between an outer sidewall of the ITO rotary target (400) and the second and third reference surfaces (201, 301).
7. The use method of the straightness detection equipment for the ITO rotary target according to any one of claims 1 to 6, wherein the straightness detection equipment comprises the following steps:
s100, attaching the end face of the ITO rotary target (400) to the first reference surface (101);
s200, enabling the outer side wall of the ITO rotary target (400) to approach the vertical reference surface (201) until the outer side wall of the ITO rotary target is abutted against the vertical reference surface;
and S, observing or measuring a gap between the vertical reference surface (201) and the side wall of the ITO rotary target (400).
8. The method for using the straightness detection equipment for the ITO rotary target according to claim 7, wherein in step S200, the outer side wall of the ITO rotary target (400) is brought close to the vertical reference surface (201) or the second reference surface (211) or the third reference surface (221);
and S, observing or measuring gaps between the vertical reference surface (201) or the second reference surface (211), the third reference surface (221) and the side wall of the ITO rotary target (400).
9. The method for using the straightness detection apparatus for an ITO rotary target according to claim 8, wherein in step S, a feeler is used to measure a distance between the vertical reference plane (201) or the second reference plane (211), the third reference plane (221) and an outer sidewall of the ITO rotary target (400).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010929160.XA CN112097612A (en) | 2020-09-07 | 2020-09-07 | Straightness detection equipment for ITO (indium tin oxide) rotary target and use method of straightness detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010929160.XA CN112097612A (en) | 2020-09-07 | 2020-09-07 | Straightness detection equipment for ITO (indium tin oxide) rotary target and use method of straightness detection equipment |
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| CN202010929160.XA Pending CN112097612A (en) | 2020-09-07 | 2020-09-07 | Straightness detection equipment for ITO (indium tin oxide) rotary target and use method of straightness detection equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113375533A (en) * | 2021-05-14 | 2021-09-10 | 广西桂景计量检测有限公司 | Multifunctional table type straightness tester |
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