CN105790070A - Micro cavity chip-type laser self-mixing distance sensing method and system - Google Patents

Micro cavity chip-type laser self-mixing distance sensing method and system Download PDF

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CN105790070A
CN105790070A CN201610255736.2A CN201610255736A CN105790070A CN 105790070 A CN105790070 A CN 105790070A CN 201610255736 A CN201610255736 A CN 201610255736A CN 105790070 A CN105790070 A CN 105790070A
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microcavity
optical
optical microcavity
division multiplexer
chip
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CN105790070B (en
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吕亮
曹志刚
俞本立
向荣
王德辉
周俊峰
桂华侨
刘建国
王焕钦
张道信
赵云坤
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Anhui University
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Anhui University
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1042—Optical microcavities, e.g. cavity dimensions comparable to the wavelength
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/1021—Coupled cavities

Abstract

The invention relates to the technical field of laser self-mixing sensing. According to the existing laser self-mixing vibration distance sensing system, high-precision and high-detection sensitivity sensing measurement is hard to realize, the structure is hard to be really made miniaturized, good integration with a chip in a modern communication system can not be realized, and large-scale integrated development and application can not be realized. In view of the above problems, the invention provides a micro cavity chip-type laser self-mixing distance sensing method and a system. Based on a laser self-mixing interference measurement principle and an optical micro cavity tuning principle, the method uses the optical micro cavity to build the laser self-mixing sensing system, high-precision and high-detection sensitivity sensing measurement is realized, and as the system has the miniaturization advantage, manufacturing and processing of the large-scale chip are more facilitated, field measurement in a narrow situation and complicated environment is more facilitated, thorough combination with a commercial system in current optical fiber communication can be realized, the cost is low, remote and special-application situation sensing and data processing can be realized efficiently.

Description

The chip-shaped laser of microcavity is from mixing Distance-sensing method and system
Technical field
The present invention relates to laser from mixing field of sensing technologies, be specially a kind of chip-shaped laser of microcavity from mixing Distance-sensing method and system.
Background technology
Laser self-mixing interference is measured technology and is referred in laser application system, the emergent light of laser instrument is reflected or after scattering by exterior object, a portion light feeds back to again in the resonator cavity of laser instrument, feedback light carries the status information of exterior object surface element, with the former output light Hybrid amplifier in laser cavity, cause the change of laser output power and output frequency, finally by the demodulation analysis to output or output frequency, obtain the contemporary optics sensing testing technology of the physical quantitys such as testee speed, displacement, vibration, pattern or temperature.In laser self-mixing interference system, laser instrument, not only as system source, also serving as the sensing element of detection testee surface information simultaneously, thus simplifying the structure of laser interference system, more easily collimating, and light path is simple, compact, saves cost.
Laser self-mixing interference measures technology because of its natural monochromatic light road characteristic, has measurement wide ranges, precision is high, easy to use, compact conformation is small and exquisite and the advantage such as applicable in-site measurement, thus being widely used in Distance-sensing fields of measurement.But current existing laser still there is problems in that from mixing Distance-sensing system
1. laser is still based on spatial light device and traditional fiber device from mixing Distance-sensing device, the miniaturization of real meaning cannot be accomplished, it is impossible to fully demonstrate the laser superiority from mixing Distance-sensing system other sensor-based systems (such as difference interference sensor-based system) relatively.
2. laser is highly dependent on the life time of the level of laser chamber carriers from mixing transducing signal, and laser instrument is normally due to the restriction of cavity body structure, resonator length and cavity loss, the longer life time of the level cannot be obtained, cause laser to be difficult to the sensing measurement of high accuracy, high detection sensitivity from mixing Distance-sensing system.
3., due to the system performance of itself, realize that process exists a definite limitation at distributed sensing, it is difficult to accomplish well integrated with the chip of communication system, it is impossible to large-scale integrated development and application.
Development along with optics micro-processing technology and micro-devices fabrication technology, micro-cavity laser is more and more obvious relative to the advantage of other types laser instrument, micro-cavity laser has that volume is little, energy consumption is low, factor of merit is high and can realize the advantages such as large-scale integrated, is therefore with a wide range of applications.
The present invention intends utilizing the advantage of micro-cavity laser, based on micro-cavity laser, utilizes laser self-mixing interference measuring principle, it is achieved the Distance-sensing of object is measured, and not yet has any report about the technical scheme of the method at present.
Summary of the invention
For the problems of the prior art, the present invention provides a kind of chip-shaped laser of microcavity from mixing Distance-sensing method and system.
For realizing above technical purpose, the technical scheme is that
A kind of chip-shaped laser of microcavity is from mixing Distance-sensing method, coupling pump light enters optical microcavity, the flashlight of intracavity is amplified by optical microcavity, coupling output after resonance and frequency-selecting, the signal of output returns after shining target surface to be measured, the feedback signal light carrying target information to be measured is coupled into optical microcavity again, flashlight original in optical microcavity mixes and finally exports, utilize pyroelectric effect that optical microcavity is tuned simultaneously, the power making optical microcavity final output signal light changes, by the changed power of final output signal light being carried out detection demodulation analysis, draw the range information of target to be measured.
This method for sensing has the advantage that
1. adopt optical microcavity device, it is achieved that laser is from the mixing microminiaturization of sensing technology, networking and chip；
2. adopt micro-cavity laser, overcome the shortcoming that conventional laser is difficult to from hybrid system light source combine with chip technology；
3. adopting optical microcavity coupling, coupling efficiency is high, solves conventional laser and laser high efficiency cannot be coupled into from hybrid system the difficult point of optical fiber；
4. at utmost have compressed the optical coupling portion of sensor-based system, coupled structure is more compact；
5. whole system compact conformation, light path is flexible and changeable, and certainty of measurement is high, and detectivity is high；
6. system structure is microminiaturized, is more suitable for monster chip manufacture processing, is more suitable for the in-site measurement under narrow and small occasion, complex environment；
7. fully can being combined with the commercial system in current optical-fibre communications, low cost, efficiently realization long-range and particular application sensing and data process.
As preferably, pump light and the feedback signal light carrying target information to be measured are coupled into optical microcavity from the same position of optical microcavity；Same position couples, and coupled structure is simple.
As preferably, pump light and the feedback signal light carrying target information to be measured are coupled into optical microcavity from the diverse location of optical microcavity；Diverse location couples, and the optical coupling portion of sensor-based system regulates more flexible and changeable.
For realizing above-mentioned method for sensing, the present invention provides a kind of chip-shaped laser of microcavity from mixing Distance-sensing system, and technical scheme includes two kinds:
The first technical scheme is: laser, from mixing Distance-sensing system, including pump light source, first wave division multiplexer, coupled apparatus, is had the optical microcavity of gain effect, the second wavelength division multiplexer, optical circulator, bonder, photodetector and attemperating unit by a kind of chip-shaped laser of microcavity；The outfan of described pump light source is connected with the first input end of first wave division multiplexer；The outfan of described first wave division multiplexer and the input of the second wavelength division multiplexer are coupled with optical microcavity by coupled apparatus；First outfan of described second wavelength division multiplexer is connected with the first port of optical circulator；Second port output signal light of described optical circulator is to target to be measured and receives by the flashlight of object feedback to be measured, and the 3rd port is connected with the input of bonder；First outfan of described bonder is connected with the input of photodetector, and the second outfan is connected with the second input of first wave division multiplexer；Described optical microcavity is positioned at the temperature-control range of attemperating unit.
This sensor-based system has the advantage that
1. adopt optical microcavity device, it is achieved that laser is from the mixing microminiaturization of sensing technology, networking and chip；
2. adopt micro-cavity laser, overcome the shortcoming that conventional laser is difficult to from hybrid system light source combine with chip technology；
3. adopting optical microcavity coupling, coupling efficiency is high, solves conventional laser and laser high efficiency cannot be coupled into from hybrid system the difficult point of optical fiber；
4. utilizing optical circulator to ensure the direction that feedback signal light injects, the individual event to meet light path in optical microcavity operates, and the interference that the useless reflection light opposite direction injection optics microcavity eliminating fusion point scattering and end face brings；
5. at utmost have compressed the optical coupling portion of sensor-based system, coupled structure is more compact；
6. whole system compact conformation, light path is flexible and changeable, and certainty of measurement is high, and detectivity is high；
7. system structure is microminiaturized, is more suitable for monster chip manufacture processing, is more suitable for the in-site measurement under narrow and small occasion, complex environment；
8. fully can being combined with the commercial system in current optical-fibre communications, low cost, efficiently realization long-range and particular application sensing and data process.
The second technical scheme is: a kind of chip-shaped laser of microcavity is from mixing Distance-sensing system, including pump light source, first wave division multiplexer, 2 coupled apparatuses, optical microcavity, the second wavelength division multiplexer, optical circulator, photodetector and attemperating unit；The outfan of described pump light source and the input of first wave division multiplexer are coupled with the side of optical microcavity by one of them coupled apparatus；First outfan of described first wave division multiplexer is connected with the first port of optical circulator；Second port output signal light of described optical circulator is to target to be measured and receives by the flashlight of object feedback to be measured；3rd port of described optical circulator and the input of the second wavelength division multiplexer are coupled with the opposite side of optical microcavity by another coupled apparatus；First outfan of described second wavelength division multiplexer is connected with the input of photodetector；Described optical microcavity is positioned at the temperature-control range of attemperating unit.
This sensor-based system has the advantage that except the advantage with the first technical scheme, compared with the first technical scheme: structure is more simple, and optical microcavity coupling position has two, and coupling unit regulates more flexible and changeable.
In above two sensor-based system:
As preferably, described optical microcavity is the optical microcavity doped with active gain material, and correspondingly described pump light source produces 980nm pump light or 1480nm pump light；Adopt active optics micro-cavity structure, utilize gain substance to realize optical microcavity to the amplification of pump light, resonance and frequency-selecting.
As preferably, described optical microcavity is passive microcavity, and correspondingly the luminous power of the pump light that described pump light source produces can produce Raman effect after meeting coupling pump light entrance optical microcavity；Adopt passive optical micro-cavity structure, utilize Raman effect to realize optical microcavity to the amplification of pump light, resonance and frequency-selecting.
As preferably, described coupled apparatus is any one of the optical fiber, waveguide and the prism that tiltedly polish of optical taper, one end；Multiple coupled modes are optional, it is simple to the application of different occasions.
As preferably, the structure of described optical microcavity is any one of micro-loop, microsphere, micro-dish, microtrabeculae, micro-core annulus and deformable cavity；Various structures is optional, it is simple to the application of different occasions.
As improvement, described optical microcavity inner surface has coating, described coating to be metal material coating or other materials coating；Increase coating, improve the physical characteristic of optical microcavity, increase its heat conduction efficiency, improve the attemperating unit precision to its control.
Accompanying drawing explanation
Fig. 1 is theoretical model schematic diagram of the present invention；
Fig. 2 is the structural representation of the embodiment of the present invention 1；
Fig. 3 is that in the embodiment of the present invention 1, optical taper couples schematic diagram with optical microcavity；
Fig. 4 is the structural representation of the embodiment of the present invention 2；
Fig. 5 is that in the embodiment of the present invention 2, optical taper couples schematic diagram with optical microcavity；
Accompanying drawing labelling: 1. pump light source, 2. first wave division multiplexer, 3. coupled apparatus, 4. optical microcavity, 5. the second wavelength division multiplexer, 6. optical circulator, 7. bonder, 8. photodetector, 9. attemperating unit.
Detailed description of the invention
The present invention based on theoretical principle as follows:
Due in laser production process, amplified spontaneous emission (ASE) and Amplified Spontaneous absorb (ESA) and want much weaker compared to stimulated radiation and excited absorption, ignore the impact of ASE and ESA, it is possible to setting up the optical microcavity theoretical model from mixing sensing, it is as shown in Figure 1.
In Fig. 1, coupling pump light enters optical microcavity, the flashlight of intracavity is amplified by optical microcavity, coupling output after resonance and frequency-selecting, the flashlight of output returns after shining target surface to be measured, feedback light is coupled in optical microcavity again, the former output light Hybrid amplifier with in optical microcavity, causes the change of the output of final Output of laser, achieve the self-mixed interference of laser, by the demodulation analysis of the output of Output of laser being drawn the information of target to be measured.
Based on above-mentioned theory, the present invention provides a kind of chip-shaped laser of microcavity from mixing Distance-sensing system.Again be coupled into the coupling position of optical microcavity according to feedback light, this system has two kinds of embodiments.
In conjunction with Fig. 2 and Fig. 3, describe embodiments of the invention 1 in detail, but the claim of the present invention is not done any restriction.
As shown in Figure 2, laser, from mixing Distance-sensing system, including pump light source 1, first wave division multiplexer 2, coupled apparatus 3, is had optical microcavity 4, second wavelength division multiplexer 5 of gain effect, optical circulator 6, bonder 7, photodetector 8 and attemperating unit 9 by a kind of chip-shaped laser of microcavity；The outfan of pump light source 1 is connected with the first input end of first wave division multiplexer 2；The outfan of first wave division multiplexer 2 and the input of the second wavelength division multiplexer 5 are coupled with optical microcavity 4 by coupled apparatus 3；First outfan of the second wavelength division multiplexer 5 is connected with the first port of optical circulator 6；Second port output signal light of optical circulator 6 is to target to be measured and receives by the flashlight of object feedback to be measured, and the 3rd port is connected with the input of bonder 7；First outfan of bonder 7 is connected with the input of photodetector 8, and the second outfan is connected with the second input of first wave division multiplexer 2；Optical microcavity 4 is positioned at the temperature-control range of attemperating unit 9.
Wherein, coupled apparatus 3 is optical taper, and it is 980nm pump light that pump light source 1 produces wavelength, and optical microcavity 4 is the optical microcavity of the micro-loop structure doped with active species.
Sensing process is:
Pump light enters first wave division multiplexer 2 through the first input end of first wave division multiplexer 2 and exports, then pass through optical taper and be coupled into optical microcavity 4, owing to optical microcavity 4 is doped with gain media, the flashlight of intracavity is amplified by optical microcavity 4, resonance and frequency-selecting, then by optical microcavity 4 through optical taper coupling output to the second wavelength division multiplexer 5, second wavelength division multiplexer 5 filters veiling glare, stick signal light also outputs it, the flashlight of output is entered optical circulator 6 by the first port of optical circulator 6 and is then incided target to be measured by the second port and return, the feedback signal light carrying target information to be measured incides bonder 7, photodetector 8 is exported through bonder 7 light splitting rear portion, another part is reintroduced back to optical microcavity 4 by the second input of first wave division multiplexer 2.
Utilizing attemperating unit 9 that optical microcavity 4 is carried out thermal tuning in above-mentioned transmitting procedure, the flashlight (namely from mixed signal light) that system finally exports is exported photodetector 8 by the first outfan of bonder 7.
It is demodulated analyzing by the output from mixed signal light that photodetector 8 is received, the range information of target to be measured can be drawn.
The derivation of this sensor-based system sensing principle is as follows:
As it is shown on figure 3, be that in embodiment 1, optical taper couples schematic diagram with optical microcavity.
In Fig. 3, P represents luminous power, subscript p represents pump light, subscript s represents flashlight, subscript in represents input, subscript out represents that output, seed represent the feedback light being reintroduced back to optical microcavity, and Laser represents that optical microcavity finally couples the flashlight of output, Laser1 represents the flashlight that photodetector receives, ε1And ε2Represent the decay that flashlight is caused in optical microcavity transmitting procedure by loss.
Optical taper coupling ratio is k1:(1-k1), the splitting ratio of bonder the first outfan and the second outfan is (1-k2):k2。
Can be obtained the expression formula of coupling position luminous power in optical microcavity by amplification process and rate equation is:
P p , s o u t = P p , s i n exp ( - α p , s L + ΔP p P p , s s + ΔP s P p , s s ) - - - ( 1 )
In formula (1), α is small-signal loss factor, and L is optical microcavity length, Δ PpWith Δ PsRepresent the difference power before and after pump light and flashlight incidence respectively,Represent the saturated light power of optical microcavity inside-pumping light and flashlight.
In optical microcavity, the luminous power expression formula of flashlight is:
P s i n = k 1 P s o u t + ( 1 - k 1 ) P s e e d - - - ( 2 )
P in formula (2)seedRepresenting by target reflection to be measured or be scattered back the luminous power in optical microcavity, expression formula is:
P s e e d = ( 1 - k 1 ) ( r e x t * ) 2 P s o u t - - - ( 3 )
In formula (3),Representing exocoel effective reflectivity, expression formula is:
r e x t * = r e x t k 2 exp ( 2 πL e x t / λ ) - - - ( 4 )
R in formula (4)extReflectance for target to be measured.
According to the structure of micro-cavity laser in laser instrument steady-state characteristic and figure, it can be deduced that the power expression of flashlight.Therefore, when laser parameter, pumping condition and target to be measured give timing, it is possible to obtainNumerical solution, it is possible to showing that optical microcavity finally couples the optical signal power of output is PLaserExpression formula:
P L a s e r = [ ( 1 - k 1 ) P s o u t + k 1 P s e e d ] - - - ( 5 )
The output P of the optical signal (namely from mixed signal) that so photodetector receivesLaser1Expression formula be:
According to from the phase place of mixed signal, it is possible to obtain from the relational expression of mixed signal power swing frequency Yu external cavity length:
L e x t = ΔλΔv L 4 v m - - - ( 7 )
In formula (7), Δ λ is the tuning peak-to-peak value of laser instrument, vmTuned frequency for laser instrument.
External cavity length LextAlso can with from T period of waves (=1/ Δ ν of mixed signalL) isoparametric formulations:
L e x t = Δ λ 4 v m T - - - ( 8 )
From above-mentioned derivation, utilize attemperating unit that optical microcavity is carried out thermal tuning, based on pyroelectric effect, the chamber length of optical microcavity or Refractive Index of Material can change, and then the wavelength of tuning output signal light, therefore, when extraneous target to be measured remains stationary as, when feedback signal light injects back in optical microcavity, due to wavelength tuning, the power that can cause final output signal light (namely from mixed signal light) changes, by detecting the changed power from mixed signal light, draw the frequency information that changed power is corresponding, the distance situation of target to be measured can be drawn.
In conjunction with Fig. 4 and Fig. 5, describe embodiments of the invention 2 in detail, but the claim of the present invention is not done any restriction.
As shown in Figure 4, a kind of chip-shaped laser of microcavity is from mixing Distance-sensing system, including pump light source 1,2,2 coupled apparatuses 3 of first wave division multiplexer, optical microcavity the 4, second wavelength division multiplexer 5, optical circulator 6, photodetector 8 and attemperating unit 9；The outfan of pump light source 1 and the input of first wave division multiplexer 2 are coupled with the side of optical microcavity 4 by one of them coupled apparatus 3；First outfan of first wave division multiplexer 2 is connected with the first port of optical circulator 6；Second port output signal light of optical circulator 6 is to target to be measured and receives by the flashlight of object feedback to be measured；3rd port of optical circulator 6 and the input of the second wavelength division multiplexer 5 are coupled with the opposite side of optical microcavity 4 by another coupled apparatus 3；First outfan of the second wavelength division multiplexer 5 is connected with the input of photodetector 8；Optical microcavity 4 is positioned at the temperature-control range of attemperating unit 9.
Wherein, 2 coupled apparatuses 3 are optical taper, and it is 980nm pump light that pump light source 1 produces wavelength, and optical microcavity 4 is the optical microcavity of the micro-loop structure doped with active species.
Sensing process is as follows:
Pump light is coupled into optical microcavity 4 through optical taper from the side of optical microcavity 4, owing to optical microcavity 4 is doped with gain media, the flashlight of intracavity is amplified by optical microcavity 4, resonance and frequency-selecting, then couple output from the both sides of optical microcavity 4 simultaneously, two transmission paths are respectively: the side that A. is connected with first wave division multiplexer 2: filter veiling glare through first wave division multiplexer 2, stick signal light also outputs it, the flashlight of output is entered optical circulator 6 by the first port of optical circulator 6 and is then incided target to be measured by the second port and return, the feedback signal light carrying target information to be measured is coupled into optical microcavity 4 through optical taper again from the opposite side of optical microcavity 4；B. the side being connected with the second wavelength division multiplexer 5: filter veiling glare through the second wavelength division multiplexer 5, stick signal light is also output to photodetector 8.
Utilizing attemperating unit 9 that optical microcavity 4 is carried out thermal tuning in above-mentioned transmitting procedure, the flashlight (namely from mixed signal light) that system finally exports is exported photodetector 8 by the first outfan of the second wavelength division multiplexer 5.
It is analyzed from mixed signal light by what photodetector 8 was received, the range information of target to be measured can be drawn.
The derivation of this sensor-based system sensing principle is as follows:
As it is shown in figure 5,2 optical tapers couple schematic diagram with optical microcavity in embodiment 2.
In Fig. 5, P represents that luminous power, subscript p represent pump light, and subscript s represents flashlight, subscript in represents that input, subscript out represent that output, seed represent the feedback light being reintroduced back to optical microcavity, Laser1 and Laser2 represents the final output signal light at two coupling position places of optical microcavity, ε respectively1And ε2Represent the decay that laser is caused in optical microcavity transmitting procedure by loss.2 optical taper coupling ratio respectively k1:(1-k1)、k2:(1-k2)。
The expression formula of the luminous power of two coupling positions in optical microcavity can be obtained by amplification process and rate equation to be respectively as follows:
P p , s o u t 2 = P p , s i n exp ( - α p , s L + ΔP p P p , s s + ΔP s P p , s s ) - - - ( 9 )
P p , s o u t 1 = P p , s i n exp ( - α p , s L 2 + ΔP p 2 P p , s s + ΔP s 2 P p , s s ) - - - ( 10 )
In formula (9) and formula (10), α is small-signal loss factor, and L is optical microcavity length, Δ PpRepresentWithDifference, Δ PsRepresentWithDifference.Represent the saturated light power of optical microcavity inside-pumping light and flashlight.
In optical microcavity, the luminous power expression formula of flashlight is:
P s i n = k 2 P s o u t 2 + ( 1 - k 2 ) P s e e d - - - ( 11 )
P in formula (11)seedRepresenting by target reflection to be measured or be scattered back the luminous power in optical microcavity, expression formula is:
P s e e d = ( 1 - k 1 ) ( r e x t * ) 2 P s o u t 1 - - - ( 12 )
In formula (12)Representing exocoel effective reflectivity, expression formula is:
r e x t * = r e x t exp ( 2 πL e x t / λ ) - - - ( 13 )
R in formula (13)extReflectance for target to be measured.
According to the structure of micro-cavity laser in laser instrument steady-state characteristic and figure, it can be deduced that the power expression of flashlight.Therefore, when laser parameter, pumping condition and target to be measured give timing, it is possible to obtainNumerical solution, then just can draw the output P of the optical signal (namely from mixed signal) that photodetector receivesLaser2Expression formula be:
P L a s e r 2 = ( 1 - k 2 ) P s o u t 2 + k 2 P s e e d - - - ( 14 )
According to from the phase place of mixed signal, it is possible to obtain from the relational expression of mixed signal power swing frequency Yu external cavity length:
L e x t = ΔλΔv L 4 v m - - - ( 7 )
In formula (7), Δ λ is the tuning peak-to-peak value of laser instrument, vmTuned frequency for laser instrument.
External cavity length LextAlso can with from T period of waves (=1/ Δ v of mixed signalL) isoparametric formulations:
L e x t = Δ λ 4 v m T - - - ( 8 )
From above-mentioned derivation, utilize attemperating unit that optical microcavity is carried out thermal tuning, based on pyroelectric effect, the chamber length of optical microcavity or Refractive Index of Material can change, and then the wavelength of tuning output signal light, therefore, when extraneous target to be measured remains stationary as, when feedback signal light injects back in optical microcavity, due to wavelength tuning, the power that can cause final output signal light (namely from mixed signal light) changes, by detecting the changed power from mixed signal light, draw the frequency information that changed power is corresponding, the distance situation of target to be measured can be drawn.
For above-mentioned two embodiment, it is necessary to having of attention:
1. optical microcavity is not limited to adopt the optical microcavity doped with active gain medium, passive microcavity can also be adopted to replace, correspondingly pump light source to provide enough powerful laser, laser is made to produce Raman effect after entering passive microcavity, so that optical microcavity is capable of the amplification to laser, resonance and frequency-selecting.
2. the coupled apparatus of laser entrance optical microcavity is not limited to optical taper, it would however also be possible to employ other coupled apparatuses such as optical fiber, waveguide and prism that one end tiltedly polishes.
3. the structure of optical microcavity is not limited to micro-loop structure, it is also possible to be other structures such as microsphere, micro-dish, microtrabeculae, micro-core annulus and deformable cavity.
4. attemperating unit can be electric hot tray, thermocouple etc., its heating location, it can be the bottom of optical microcavity, can also being other positions such as optical microcavity side, concrete mode of heating can adopt and directly heat, for instance electric hot tray directly contacts microcavity, indirect heating can also be adopted, for instance change the ambient temperature around optical microcavity；
5. it is not limited to the chamber length or the Refractive Index of Material that utilize temperature (pyroelectric effect) to regulate microcavity, it would however also be possible to employ other physical effects (such as piezoelectric effect) regulate chamber length or the Refractive Index of Material of microcavity；
6. can increase metal material coating or other materials coating at optical microcavity inner surface, utilize coating, improve the physical characteristic of optical microcavity, increase its heat conduction efficiency, improving the response time that optical microcavity is controlled by attemperating unit, thus improving thermal tuning speed.
In sum, the invention have the advantages that
1. adopt optical microcavity device, it is achieved that laser is from the mixing microminiaturization of sensing technology, networking and chip；
2. adopt micro-cavity laser, overcome the shortcoming that conventional laser is difficult to from hybrid system light source combine with chip technology；
3. adopting optical microcavity coupling, coupling efficiency is high, solves conventional laser and laser high efficiency cannot be coupled into from hybrid system the difficult point of optical fiber；
4. utilizing optical circulator to ensure the direction that feedback signal light injects, the individual event to meet light path in optical microcavity operates, and the interference that the useless reflection light opposite direction injection optics microcavity eliminating fusion point scattering and end face brings；
5. at utmost have compressed the optical coupling portion of sensor-based system, coupled structure is more compact；
6. whole system compact conformation, light path is flexible and changeable, and certainty of measurement is high, and detectivity is high；
7. system structure is microminiaturized, is more suitable for monster chip manufacture processing, is more suitable for the in-site measurement under narrow and small occasion, complex environment；
8. fully can being combined with the commercial system in current optical-fibre communications, low cost, efficiently realization long-range and particular application sensing and data process.
It is understood that above with respect to the specific descriptions of the present invention, be merely to illustrate the present invention and be not limited to the technical scheme described by the embodiment of the present invention.It will be understood by those within the art that, still the present invention can be modified or equivalent replacement, to reach identical technique effect；Needs are used, all within protection scope of the present invention as long as meeting.

Claims (10)

1. the chip-shaped laser of microcavity is from mixing Distance-sensing method, it is characterized in that: coupling pump light enters optical microcavity, the flashlight of intracavity is amplified by optical microcavity, coupling output after resonance and frequency-selecting, the signal of output returns after shining target surface to be measured, the feedback signal light carrying target information to be measured is coupled into optical microcavity again, flashlight original in optical microcavity mixes and finally exports, utilize pyroelectric effect that optical microcavity is tuned simultaneously, the power making optical microcavity final output signal light changes, by the changed power of final output signal light being carried out detection demodulation analysis, draw the range information of target to be measured.
2. the chip-shaped laser of microcavity according to claim 1 is from mixing Distance-sensing method, it is characterised in that: pump light and the feedback signal light carrying target information to be measured are coupled into optical microcavity from the same position of optical microcavity.
3. the chip-shaped laser of microcavity according to claim 1 is from mixing Distance-sensing method, it is characterised in that: pump light and the feedback signal light carrying target information to be measured are coupled into optical microcavity from the diverse location of optical microcavity.
4. the chip-shaped laser of microcavity is from mixing Distance-sensing system, it is characterised in that: include pump light source (1), first wave division multiplexer (2), coupled apparatus (3), laser is had the optical microcavity (4) of gain effect, the second wavelength division multiplexer (5), optical circulator (6), bonder (7), photodetector (8) and attemperating unit (9)；
The outfan of described pump light source (1) is connected with the first input end of first wave division multiplexer (2)；
The outfan of described first wave division multiplexer (2) and the input of the second wavelength division multiplexer (5) are coupled with optical microcavity (4) by coupled apparatus (3)；
First outfan of described second wavelength division multiplexer (5) is connected with the first port of optical circulator (6)；
Second port output signal light of described optical circulator (6) is to target to be measured and receives by the flashlight of object feedback to be measured, and the 3rd port is connected with the input of bonder (7)；
First outfan of described bonder (7) is connected with the input of photodetector (8), and the second outfan is connected with the second input of first wave division multiplexer (2)；
Described optical microcavity (4) is positioned at the temperature-control range of attemperating unit (9).
5. the chip-shaped laser of microcavity is from mixing Distance-sensing system, it is characterised in that: include pump light source (1), first wave division multiplexer (2), 2 coupled apparatuses (3), optical microcavity (4), the second wavelength division multiplexer (5), optical circulator (6), photodetector (8) and attemperating unit (9)；
The outfan of described pump light source (1) and the input of first wave division multiplexer (2) are coupled with the side of optical microcavity (4) by one of them coupled apparatus (3)；
First outfan of described first wave division multiplexer (2) is connected with the first port of optical circulator (6)；
Second port output signal light of described optical circulator (6) is to target to be measured and receives by the flashlight of object feedback to be measured；
3rd port of described optical circulator (6) and the input of the second wavelength division multiplexer (5) are coupled with the opposite side of optical microcavity (4) by another coupled apparatus (3)；
First outfan of described second wavelength division multiplexer (5) is connected with the input of photodetector (8)；
Described optical microcavity (4) is positioned at the temperature-control range of attemperating unit (9).
6. the chip-shaped laser of microcavity according to claim 4 or 5 is from mixing Distance-sensing system, it is characterized in that: described optical microcavity (4) is the optical microcavity doped with active gain material, correspondingly described pump light source (1) produces 980nm pump light or 1480nm pump light.
7. the chip-shaped laser of microcavity according to claim 4 or 5 is from mixing Distance-sensing system, it is characterized in that: described optical microcavity (4) is passive microcavity, correspondingly the luminous power of the pump light that described pump light source (1) produces can produce Raman effect after meeting coupling pump light entrance optical microcavity.
8. the chip-shaped laser of microcavity according to claim 4 or 5 is from mixing Distance-sensing system, it is characterised in that: any one of described coupled apparatus (3) is optical taper, one end tiltedly polishes optical fiber, waveguide and prism.
9. the chip-shaped laser of microcavity according to claim 4 or 5 is from mixing Distance-sensing system, it is characterised in that: the structure of described optical microcavity (4) is any one of micro-loop, microsphere, micro-dish, microtrabeculae, micro-core annulus and deformable cavity.
10. the chip-shaped laser of microcavity according to claim 4 or 5 is from mixing Distance-sensing system, it is characterised in that: described optical microcavity (4) inner surface has coating, described coating to be metal material coating or other materials coating.
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