CN108646350B - Mechanical vibrator microcavity coupling body and the optical circulators for using it - Google Patents
Mechanical vibrator microcavity coupling body and the optical circulators for using it Download PDFInfo
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- CN108646350B CN108646350B CN201810304614.7A CN201810304614A CN108646350B CN 108646350 B CN108646350 B CN 108646350B CN 201810304614 A CN201810304614 A CN 201810304614A CN 108646350 B CN108646350 B CN 108646350B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
Abstract
The present invention provides mechanical vibrator microcavity coupling body and use its optical circulators.The mechanical vibrator microcavity coupling body includes: optical microcavity；Two micronano optical waveguides are provided with optical microcavity between two micronano optical waveguides；Packaging body is packaged with the coupled structure of optical microcavity and two micronano optical waveguides；The center of optical microcavity is supported by the support column based on substrate, and its edge is made to be in vacant state, and the hanging optical microcavity in the edge forms mechanical vibrator microcavity；Successively there are substrate, support column, mechanical vibrator microcavity coupling body from bottom to top in packaging body.Utilize the interaction of light field in mechanical vibrator and Whispering-gallery-mode travelling-wave cavity, the effect for having reached light annular delivery realizes the optical circulators without magneto-optic memory technique that can be integrated, and does not need additional other biasings (magnetic field, electric field etc.), to reduce costs, practicability is also improved.
Description
Technical field
The present invention relates to field of optoelectronic devices, and in particular to a kind of mechanical vibrator microcavity coupling body and the optics using it
Circulator, it is especially a kind of that the mechanical vibrator microcavity coupling body of optical signal directionality in device is realized by full photocontrol and is made
With its optical circulators.
Background technique
Optical circulators are a kind of nonreciprocal devices of multiport input and output, it makes optical signal can only be along defined end
Mouth sequential delivery, to be of great significance in the processing of classical and quantum information.It is main in traditional optical circulators part
The directionality of optical signal is realized by the Faraday effect of magneto-optical crystal, such as in the optical circulators of three ports, light meeting
It is transmitted, i.e., can be emitted from the light of 3 incidence of port 1, port 2 and port from port 2, port 3 and port 1 in a manner of " annular ",
It can be namely emitted from the incident light in port 1 from port 2, can be emitted from the incident light in port 2 from port 3, is incident from port 3
Light can be emitted from port 1, so that realizing route is the function of the optical circulators of 1-2-3-1.This function may be implemented passing through
The two-way processing of signal in allusion quotation or quantum calculation and communication is conducive to improve channel capacity and reduces power consumption.However, such
Optical circulators based on magneto-optic memory technique, the loss for serving not only as performance indicator, which is still faced at the integrated aspect of device greatly, chooses
War, specifically, the magnitude that magneto-optic memory technique is 100dB/cm or so with very high transmission loss in optical frequency range；Magneto-optic material
Material is mismatched with conventional semiconductor material, is needed when integrated by bonding chip, and makes higher cost, and production efficiency is lower, can
Scalability is poor.Thus, how to realize that the optical circulators without magneto-optic memory technique that can be integrated are the major issues in the field.
Disclosure
(1) technical problems to be solved
The present invention provides a kind of mechanical vibrator microcavity coupling body and using its optical circulators, at least partly to solve
Technical problem set forth above.
(2) technical solution
According to an aspect of the invention, there is provided a kind of mechanical vibrator microcavity coupling body, mechanical vibrator microcavity coupling
Body includes: optical microcavity；Two micronano optical waveguides are provided with optical microcavity between two micronano optical waveguides；Encapsulation
Body is packaged with the coupled structure of optical microcavity and two micronano optical waveguides；The center of optical microcavity is by the support based on substrate
Column support, and its edge is made to be in vacant state, the hanging optical microcavity in the edge forms mechanical vibrator microcavity；Packaging body from
It is lower successively to have substrate, support column and mechanical vibrator microcavity coupling body upwards.
Mechanical vibrator microcavity of the invention supports mechanical oscillation mode and traveling wave Whispering-gallery-mode.
In some embodiments of the invention, optical microcavity is the shape of rotational symmetry, and the radius of optical microcavity is micron
Magnitude, the material of optical microcavity are silica, silicon nitride, silicon.
In some embodiments of the invention, the cross sectional dimensions of micronano optical waveguide is wavelength magnitude, micronano optical wave
It leads using material identical with optical microcavity.
In some embodiments of the invention, the distance between optical microcavity and micronano optical waveguide are wavelength magnitude, light
Microcavity is Whispering-gallery-mode travelling-wave cavity, and support column is the component formed and performing etching to substrate.
According to another aspect of the present invention, a kind of optical circulators are provided, which includes: the above
Mechanical vibrator microcavity coupling body；First optical fiber polarization controller~the 4th optical fiber polarization controller, respectively with two micro-nano light
Each end being located at outside mechanical vibrator microcavity coupling body for learning waveguide is connected；Optical-fiber bundling device is located at the first optical fiber polarization controller
Between one end of micronano optical waveguide；Excitation light source, the excitation of the mechanical oscillation for mechanical vibrator microcavity；In optical-fiber bundling
First optical fiber polarization controller side of device is connected with excitation light source via the 5th optical fiber polarization controller.
In some embodiments of the invention, the first to the 5th optical fiber polarization controller makes the exciting light from excitation light source
It is identical with from the external incident polarization direction of signal light.
In some embodiments of the invention, excitation light source is laser of narrowband light source, and laser power is milliwatt magnitude, laser
Line width is smaller than the line width of the resonant frequency of mechanical vibrator microcavity and the traveling wave Echo Wall optical mode of optical microcavity, preferably smaller than
MHz magnitude, more preferably 300kHz or so.
(3) beneficial effect
It can be seen from the above technical proposal that mechanical vibrator microcavity coupling body of the present invention and using it optical circulators extremely
Have the advantages that less one of them or in which a part:
(1) using the interaction of light field in mechanical vibrator and Whispering-gallery-mode travelling-wave cavity, light annular delivery has been reached
Effect, this is because realizing and controlling the directionality of circulator, by the way that excitation light source is fully utilized to avoid traditional optical ring
The magneto-optic effect and externally-applied magnetic field of shape device.Hereby it is achieved that the optical circulators without magneto-optic memory technique that can be integrated.
(2) optical microcavity and micronano optical waveguide are prepared using mature semiconducter process, prepared optics is micro-
Chamber and micronano optical waveguide dimensions are all micron dimension, to realize the optical circulators without magneto-optic memory technique that can be integrated, are had
The features such as small in size, at low cost, low in energy consumption；In addition, it is not necessary that additional other biasings (magnetic field, electric field etc.), to also improve
Practicability is particularly suitable in the occasion to magnetic field and electric field-sensitive.
Detailed description of the invention
Fig. 1 is the schematic diagram of the optical circulators of the embodiment of the present invention.
Fig. 2 is the schematic diagram of the mechanical vibrator microcavity coupling body in the optical circulators of the embodiment of the present invention.
Fig. 3 is the cross-sectional view of the mechanical vibrator microcavity coupling body in the optical circulators of the embodiment of the present invention.
[main element of embodiment of the present invention symbol description in attached drawing]
1- excitation light source；2- optical fiber polarization controller；3- optical-fiber bundling device；
4- micronano optical waveguide；5- mechanical vibrator microcavity；
6- mechanical vibrator microcavity coupling body；
P1- first port；P2- second port；P3- third port；
The 4th port P4-.
Specific embodiment
The present invention realizes the nothing that can be integrated using the interaction of light field in mechanical vibrator and Whispering-gallery-mode travelling-wave cavity
The optical circulators of magneto-optic memory technique, the device can full photocontrol, additional other biasings (magnetic field, electric field etc.) are not needed, to drop
Low cost, also improves practicability.
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
In a specific embodiment of the present invention, a kind of mechanical vibrator microcavity coupling body is provided and using machinery vibration
The optical circulators of sub- microcavity coupling body.In the present embodiment, the function that mechanical vibrator microcavity plays mechanical vibrator also functions to back
The function of sound wall mode travelling-wave cavity, the resonant frequency of mechanical vibrator are slightly to count MHz-GHz, the resonance frequency of Whispering-gallery-mode travelling-wave cavity
Rate is slightly to count THz.
Fig. 1 is the schematic diagram of the optical circulators of the embodiment of the present invention.Fig. 2 is in the optical circulators of the embodiment of the present invention
Mechanical vibrator microcavity coupling body schematic diagram.Fig. 3 is the mechanical vibrator microcavity in the optical circulators of the embodiment of the present invention
The cross-sectional view of coupling body.As shown in Figure 1, the optical circulators of the present embodiment include:
Mechanical vibrator microcavity coupling body 6 includes mechanical vibrator microcavity 5 and micronano optical waveguide 4 and 5 He of mechanical vibrator microcavity
Micronano optical waveguide 4 is packaged in packaging body, and 5 edge of mechanical vibrator microcavity is hanging, and between two micronano optical waveguides 4, two is micro-
It receives optical waveguide 4 respectively while mechanical vibrator microcavity 5 is coupled；Multiple optical fiber polarization controllers 2, respectively with micronano optical
Each end of waveguide 4 being located at outside mechanical vibrator microcavity coupling body 6 is connected；Optical-fiber bundling device 3 is located at some optical fiber polarization controller
Between 2 and one end of micronano optical waveguide 4；The excitation light source 1 of mechanical oscillation for mechanical vibrator, in the optical-fiber bundling device 3
2 side of optical fiber polarization controller be connected with excitation light source 1 via another optical fiber polarization controller 2.Specifically, mechanical vibrator is micro-
Mechanical vibrator microcavity 5 in chamber coupling body 6 is with the hanging mode in edge and upper and lower two micronano opticals waveguide, 4 direct-coupling, up and down
Each end of two micronano optical waveguides 4 being located at outside mechanical vibrator microcavity coupling body 6 becomes optics via optical fiber polarization controller 2
Port P1, P2, P3, P4 of circulator, and in optical fiber polarization controller 2 corresponding with first port P1 and upper micronano optical wave
It leads and is also connected with optical-fiber bundling device 3 between 4, it is inclined via another optical fiber in 2 side of optical fiber polarization controller of the optical-fiber bundling device 3
Vibration controller 2 is also connected with the narrow-band light source as excitation light source 1 of the mechanical oscillation for exciting mechanical vibrator.Such
In optical circulators, from the signal light frequency of each port P1, P2, P3, P4 incidence and the resonance frequency of Whispering-gallery-mode travelling-wave cavity
It can be coupled into Whispering-gallery-mode travelling-wave cavity (being also referred to as " microcavity " sometimes) when consistent, when the frequency of signal light and exciting light
Difference is equal to the resonant frequency of mechanical vibrator, and when direction is identical, can be with the vibration of resonant excitation mechanical vibrator.Here direction
The identical direction of propagation for referring to light field in microcavity is identical.In addition, one kind is up time there are two types of the direction of propagation of the light field in microcavity
Needle direction and it is another for counterclockwise, in turn, the light entered on the left of upper micronano optical waveguide is in microcavity along clockwise
Direction is propagated, and the light entered on the left of lower micronano optical waveguide is propagated in microcavity along counterclockwise.
Hereinafter, being carried out respectively from the situation of port P1, P2, P3, P4 incidence to signal light in such optical circulators detailed
It describes in detail bright.
Firstly, the exciting light from narrow-band light source is in signal light before P1, P2, P3, P4 the beam incident optical circulator of port
Mechanical vibrator microcavity 5 is coupled by micronano optical waveguide 4 via optical fiber polarization controller 2, optical-fiber bundling device 3.
Next, when signal light is incident from first port P1 and via optical fiber polarization controller 2, optical-fiber bundling device 3 and by
Micronano optical waveguide 4 is coupled into mechanical vibrator microcavity 5, the vibration of signal light and exciting light resonant excitation mechanical vibrator microcavity,
Exciting light is influenced by the mechanical oscillation of mechanical vibrator microcavity and generates scattering, the scattering light and signal light coherent phase in microcavity
Disappear, so that no signal light field exists in microcavity 5, thus signal light is emitted from second port P2.
Next, mechanical vibrator microcavity 5 is coupled into when signal light is incident from second port P2, because of the inverse time of signal light
Needle propagates the propagation contrary clockwise with exciting light, therefore can not excite the vibration of tool oscillator microcavity, this principle can use momentum
Conservation condition explains, contrary light due to momentum it is not identical thus can not resonant excitation mechanical oscillation.To which signal light exists
Whispering-gallery-mode traveling wave inner cavity surface is continuously totally reflected and coherent superposition forms mode of resonance in a manner of propagating counterclockwise from the
Three port P3 outgoing.
Next, signal light is incident from third port P3 and enters mechanical vibrator microcavity 5, signal light and the equal up time of exciting light
Needle is propagated, and the mechanical oscillation of mechanical vibrator microcavity influence signal light and make signal light coherent subtraction, is present in regard to no signal light field
In microcavity 5, thus signal light is emitted from the 4th port P4.
Next, signal light is incident from the 4th port P4 and enters mechanical vibrator microcavity 5, because of the propagation counterclockwise of signal light
With the propagation contrary clockwise of exciting light, therefore the mechanical oscillation of tool oscillator microcavity can not be excited, so that signal light is propagated counterclockwise
And it is emitted from first port P1.
It is carrying out in this way as a result, reach the effect of light annular delivery, i.e. the realizing route optical circulators that are 1-2-3-4-1
Function.
It can be seen that in the above technical solution, the direction of circulator is realized and controlled by the way that excitation light source is fully utilized
Property, to avoid the magneto-optic effect and externally-applied magnetic field of traditional optical circulator, it is thus achieved that can integrate without magneto-optic memory technique
Optical circulators.In addition, it is not necessary that additional other biasings (magnetic field, electric field etc.), to also improve practicability, are particularly suitable for
To the occasion in magnetic field and electric field-sensitive.
It should be noted that the mechanical vibrator microcavity 5 of the present embodiment by by Whispering-gallery-mode traveling wave cavity edge it is hanging and
At.That is, the center of Whispering-gallery-mode travelling-wave cavity is supported with support column.The hanging Whispering-gallery-mode traveling wave in such edge
The function that chamber can not only play itself can also play the function of mechanical vibrator, in the present invention that such edge is hanging
Whispering-gallery-mode travelling-wave cavity is known as mechanical vibrator microcavity.Such mechanical vibrator microcavity supports mechanical oscillation mode and traveling wave echo
Wall optical mode, and vibration mode is coupled with optical mode presence.Such mechanical vibrator microcavity can be support mechanical oscillation
The on piece optical microcavity of mode and traveling wave Whispering-gallery-mode, but it is also not limited on piece structure.
The optical fiber polarization controller of the embodiment of the present invention plays the role of carrying out Polarization Control to light field, and respectively will
The polarization direction of the light field of control object is controlled into identical direction, in order to which exciting light and signal are optically coupled into microcavity,
And the mechanical oscillation of resonant excitation mechanical vibrator microcavity.
In addition, the rotationally symmetric shape of Whispering-gallery-mode travelling-wave cavity, such as annulus chamber, disk can be enumerated
The shapes such as chamber, spherical cavity.In addition, the radius of the microcavity is micron dimension, such as usually several microns to tens microns.Further more, should
The material of microcavity can enumerate silicon systems material and various semiconductor materials, such as can be silicon, silica, nitridation
Silicon .....
In addition, the micronano optical waveguide of the present embodiment is manufactured from the same material, and the size of micronano optical waveguide is with transversal
Face size meter can there are evanscent fields in wavelength magnitude, and outside waveguide surface.In addition, micronano optical waveguide fabrication material can
To be enumerated as the materials such as silicon, silica, silicon nitride, material preferably identical with microcavity.In addition, micronano optical waveguide passes through light
Fibre is connect with Polarization Controller or bundling device, and such connection can be realized by uv-curable glue.Polarization Controller and conjunction beam
Device is also possible on piece structure.
In addition, excitation light source 1 can use narrow-band light source, which can be on piece semiconductor light source, preferably
On piece semiconductor laser light resource, traveling wave echo of the more preferable laser linewidth than the resonant frequency and optical microcavity of mechanical vibrator microcavity
The line width of wall optical mode is small, generally less than order of megahertz.
In the above-mentioned technical solutions, optical microcavity and micronano optical waveguide are prepared using mature semiconducter process,
Prepared optical microcavity and micronano optical waveguide dimensions is all micron dimension, to realize the light without magneto-optic memory technique that can be integrated
Circulator is learned, is had the characteristics that small in size, at low cost, low in energy consumption.
It should be further noted that the micronano optical waveguide of the present embodiment and the coupling of mechanical vibrator microcavity belong near field
Coupling, and in order to guarantee their efficient coupling is necessary to consider the conditions such as the distance between they and phase matched.Example
Such as, in the present embodiment, the distance between waveguide and microcavity are adjusted in a manner of making signal light fully enter microcavity；In order to eliminate
As caused by the different materials and geometry dispersion of waveguide and microcavity only the drawbacks of there are phase matcheds for narrow spectral region, therefore
Identical material is used to micronano optical waveguide and mechanical vibrator microcavity in the present embodiment, for example, being silica.
Illustrate the setting position for being used to support the support column at the center of optical microcavity and shape further combined with Fig. 2 and Fig. 3
At mode.As shown in figure 3, as stablize support shape gusseted post support optical microcavity and with the edge of optical microcavity
The mode for being in vacant state relative to micronano optical waveguide forms mechanical vibrator microcavity 5.More specifically, by for shape
At the substrate of optical microcavity, micronano optical waveguide, (substrate is interpreted as being located in Fig. 3 by three below mechanical vibrator microcavity 5
The connecting line and its upper and lower that the gusseted post of angle support column and its left and right sides is attached) it performs etching to obtain by base
The support column arrangement that bottom material is constituted has in support column arrangement and is used to support the support column of optical microcavity (such as mechanical vibrator is micro-
The gusseted post of the lower section of chamber 5), have support column (such as the gusseted of the left and right sides for being used to support micronano optical waveguide
Column).In addition, substrate is usually 500 microns thick silicon wafer.
So far, attached drawing is had been combined the embodiment of the present invention is described in detail.It should be noted that in attached drawing or saying
In bright book text, the implementation for not being painted or describing is form known to a person of ordinary skill in the art in technical field, and
It is not described in detail.In addition, the above-mentioned definition to each element and method be not limited in mentioning in embodiment it is various specific
Structure, shape or mode, those of ordinary skill in the art simply can be changed or be replaced to it, such as:
(1) optical-fiber bundling device plays the role of signal light and excitation combiner, therefore can be used with the same function
Upper Y-shaped structure micro-nano optical waveguide substitution；
(2) optical circulators of the invention, mechanical vibrator microcavity, micronano optical waveguide are not limited on piece structure, can also
With to be prepared by optical fiber Microsphere Cavities and optical taper waveguide.
According to above description, those skilled in the art to mechanical vibrator microcavity coupling body of the present invention and should use the coupling
The optical circulators of body have clear understanding.
In conclusion the present invention is provided a kind of mechanical vibrator microcavity coupling body and is coupled using the mechanical vibrator microcavity
The optical circulators of body, the main characteristic of the invention lies in that: (1) by by the center of Whispering-gallery-mode travelling-wave cavity support column branch
It supports and forms the hanging Whispering-gallery-mode travelling-wave cavity in edge, to obtain mechanical vibrator microcavity；(2) mechanical vibrator microcavity is supported mechanical
Vibration mode and traveling wave Echo Wall optical mode, and vibration mode is coupled with optical mode presence；(3) micro- using the mechanical vibrator
The optical circulators of chamber, can full photocontrol, do not need additional other biasings (magnetic field, electric field etc.), to reduce costs, mention yet
High practicability.Thus, it is possible to be widely used in many necks such as Bright Source Protection, quantum device, light two-way communication, highly sensitive detection
Domain is particluarly suitable for the occasion to magnetic field and electric field-sensitive.
It should also be noted that, identical element is indicated by same or similar appended drawing reference in attached drawing.It may lead
When the understanding of the present invention being caused to cause to obscure, conventional structure or construction will be omitted.
And the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate the embodiment of the present invention
Content.
It unless there are known entitled phase otherwise anticipates, the numerical parameter in this specification and appended claims is approximation, energy
Characteristic changing needed for the content of enough bases through the invention is resulting.Specifically, all be used in specification and claim
The middle content for indicating composition, the number of reaction condition etc., it is thus understood that repaired by the term of " about " in all situations
Decorations.Under normal circumstances, the meaning expressed refers to include by specific quantity ± 10% variation in some embodiments, some
± 5% variation in embodiment, ± 1% variation in some embodiments, in some embodiments ± 0.5% variation.
Furthermore word "comprising" does not exclude the presence of element or step not listed in the claims.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (9)
1. a kind of mechanical vibrator microcavity coupling body, comprising:
Optical microcavity；
Two micronano optical waveguides are provided with the optical microcavity between two micronano optical waveguides；
Packaging body, the packaging body are packaged with the coupled structure of the optical microcavity and described two micronano optical waveguides；
The center of the optical microcavity is supported by the support column based on substrate, and its edge is made to be in vacant state, and the edge is outstanding
Empty optical microcavity forms the mechanical vibrator microcavity for supporting mechanical oscillation mode and traveling wave Echo Wall optical mode；
Wherein, successively there are the substrate, the support column and mechanical vibrator microcavity coupling from bottom to top in the packaging body
Body.
2. mechanical vibrator microcavity coupling body according to claim 1, wherein
The optical microcavity is the shape of rotational symmetry；
The radius of the optical microcavity is micron dimension；
The material of the optical microcavity is silica, silicon nitride, silicon.
3. mechanical vibrator microcavity coupling body according to claim 1, wherein
The cross sectional dimensions of the micronano optical waveguide is wavelength magnitude；
The micronano optical waveguide uses material identical with the optical microcavity.
4. mechanical vibrator microcavity coupling body according to claim 3, wherein
The distance between the optical microcavity and the micronano optical waveguide are wavelength magnitude.
5. mechanical vibrator microcavity coupling body according to any one of claim 1 to 4, wherein
The optical microcavity is Whispering-gallery-mode travelling-wave cavity；
The support column is the component formed by etching the substrate.
6. a kind of optical circulators, comprising:
Mechanical vibrator microcavity coupling body described in any one of claims 1 to 5；
First optical fiber polarization controller~the 4th optical fiber polarization controller is located at described two micronano optical waveguides respectively
Each end outside the mechanical vibrator microcavity coupling body is connected；
Optical-fiber bundling device, between first optical fiber polarization controller and one end of the micronano optical waveguide；
Excitation light source is used for the excitation of the mechanical oscillation of the mechanical vibrator microcavity；
It is connected in the first optical fiber polarization controller side of the optical-fiber bundling device via the 5th optical fiber polarization controller described
Excitation light source.
7. optical circulators according to claim 6, wherein
First optical fiber polarization controller to the 5th optical fiber polarization controller make exciting light from the excitation light source and from
The polarization direction of external incident signal light is identical, and the polarization direction with the traveling wave Echo Wall optical mode of the optical microcavity
It is identical.
8. optical circulators according to claim 6, wherein
The excitation light source is laser of narrowband light source, and laser power is milliwatt magnitude, and laser linewidth is than the mechanical vibrator microcavity
Resonant frequency and the optical microcavity traveling wave Echo Wall optical mode line width it is small.
9. optical circulators according to claim 8, wherein
The laser linewidth is less than order of megahertz.
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| CN112363278B (en) * | 2020-11-04 | 2022-03-18 | 南京大学 | On-chip integrated optical microcavity coupling structure and preparation method thereof |
| CN112928593B (en) * | 2021-01-26 | 2022-01-25 | 北京邮电大学 | Echo wall micro-cavity resonance frequency modulation method of magneto-optical nanosphere |
| CN113465515B (en) * | 2021-06-30 | 2022-02-08 | 中国人民解放军国防科技大学 | Optical mechanical microcavity structure with all-optical integration and nonlinear mechanical oscillator |
| CN113252085B (en) * | 2021-06-30 | 2021-09-17 | 中国人民解放军国防科技大学 | Opto-mechanical microcavity structure containing nonlinear mechanical oscillator, measurement system and measurement method |
| CN114153032B (en) * | 2021-12-22 | 2023-08-15 | 哈尔滨工业大学（深圳） | Three-dimensional asymmetric microcavity device for light field regulation and integration device thereof |
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| CN101793520A (en) * | 2010-01-30 | 2010-08-04 | 中北大学 | Integrated optical waveguide gyroscope based on optical microcavity |
| CN101957479A (en) * | 2010-07-27 | 2011-01-26 | 中北大学 | Method for realizing output of optical microcavity coupling system by temperature modulation and coupling structure thereof |
| CN102003959A (en) * | 2010-10-09 | 2011-04-06 | 浙江大学 | Annular optical microcavity type optical fiber gyro |
| CN102798624A (en) * | 2012-08-08 | 2012-11-28 | 中国科学院长春光学精密机械与物理研究所 | Near-field Raman biosensor based on echo wall mode |
| CN103592782A (en) * | 2013-10-24 | 2014-02-19 | 复旦大学 | Nanometer biological optical tweezers based on optical micro-flow annular resonant cavity |
| CN104133270A (en) * | 2014-07-18 | 2014-11-05 | 南京大学 | On-chip tunable optical isolator based on active-passive optical micro cavity coupling system |
| CN104466620A (en) * | 2014-12-25 | 2015-03-25 | 武汉邮电科学研究院 | Frequency stabilization type photoproduction microwave signal source based on optical microcavity |
| CN104934850A (en) * | 2015-07-03 | 2015-09-23 | 安徽大学 | A tunable optical micro-cavity Raman laser and a tunable optical micro-cavity doped laser |
| CN105652378A (en) * | 2016-01-22 | 2016-06-08 | 南京大学 | Optical circulator |
| CN105790070A (en) * | 2016-04-20 | 2016-07-20 | 安徽大学 | Micro cavity chip-type laser self-mixing distance sensing method and system |
| CN105896235A (en) * | 2016-06-08 | 2016-08-24 | 中国科学技术大学 | Optoelectronic oscillator based on multilayer film echo wall mode optical microcavity |
| CN107389611A (en) * | 2017-06-23 | 2017-11-24 | 哈尔滨工业大学深圳研究生院 | A kind of inexpensive biochemical sensor based on narrow linewidth microcavity and wide frequency light source |
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