CN105785490A - Light irradiation device - Google Patents

Light irradiation device Download PDF

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Publication number
CN105785490A
CN105785490A CN201511020599.6A CN201511020599A CN105785490A CN 105785490 A CN105785490 A CN 105785490A CN 201511020599 A CN201511020599 A CN 201511020599A CN 105785490 A CN105785490 A CN 105785490A
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China
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light
filter
wavelength selecting
wavelength
irradiation device
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CN201511020599.6A
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CN105785490B (en
Inventor
松川泰之
川锅保文
石飞裕和
斋藤行正
山本胜
田中大作
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Iwasaki Denki KK
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Iwasaki Denki KK
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Securing Globes, Refractors, Reflectors Or The Like (AREA)
  • Coating Apparatus (AREA)

Abstract

The invention provides a light irradiation device which employs a wavelength selection filter having incident angle dependency so as to shield light of wavelengths not required by an irradiation area. The light irradiation device is provided with a wavelength selection filter (33) which allows penetration of light required by the irradiation area, and also provided with an absorption filter (35) used for absorbing light out of a range of required wavelengths, and irradiating light penetrating the wavelength selection filter (33) and the absorption filter (35) onto a workpiece (W) in the irradiation area.

Description

Light irradiation device
Technical field
The present invention relates to a kind of light irradiation device selecting the light of light filter to be irradiated to irradiation area transmission peak wavelength.
Background technology
Generally speaking, known following a kind of photocuring technology: at the surface adhesion light curing agent of paper, plastics etc., this light curing agent being irradiated light and makes it solidify, this technology is widely used in the sealing of liquid crystal flat-panel, the parts bonding, printed base plate bonding, CD of optical lens components are fixed temporarily.Light for photocuring is different according to the kind of firming agent, condition of cure etc., except ultraviolet (ultraviolet light), sometimes also uses visible ray, near infrared ray.
Utilizing when photocuring in ultraviolet situation, the light source of light irradiation device used in photocuring technology generally uses the discharge lamp such as high-pressure mercury-vapor lamp, metal halide lamp (referring for example to patent documentation 1).
This light irradiation device is carried out arranging as follows: in order to avoid the impact of the heat from light source as far as possible, be configured with for interdicting the unwanted visible ray of irradiation area and near infrared hot line blocking light filter (referring for example to patent documentation 2).
Prior art literature
Patent documentation
Patent documentation 1: No. 4642066 publications of Japanese Patent No.
Patent documentation 2: Japanese Unexamined Patent Publication 2007-191543 publication
Summary of the invention
The problem to be solved in the present invention
But, the wavelength selecting filter of multilayer dielectric film is used as blocking light filter by stacking on the transparent substrate, and transmissison characteristic has incident angle dependency.Therefore there are the following problems: during the wavelength only adjusting needed for irradiation area with blocking light filter, for the light of oblique incidence to light filter, it is not necessary to wavelength transmission and be irradiated to irradiation area.
The present invention makes in view of the foregoing, its objective is to provide the light irradiation device of a kind of following structure: it adopts has the dependent wavelength selecting filter of incident angle, interdicts the light of the unwanted wavelength of irradiation area accurately.
Technical teaching for solving the problem was
To achieve these goals, the present invention provides following a kind of light irradiation device, this light irradiation device has the light source radiating the light comprising the wavelength needed for irradiation area, and make to comprise the light transmissive wavelength selecting filter of described required wavelength, and the light of the described wavelength selecting filter from described lit transmissive is irradiated to described irradiation area, it is characterized in that, described light irradiation device has the absorption filter of the extraneous light for absorbing described required wavelength, the light of wavelength selecting filter described in transmission and described absorption filter is irradiated to described irradiation area.
It addition, in the above-mentioned light irradiation device of the present invention, it is characterised in that described absorption filter is configured to make the light of wavelength selecting filter described in transmission incide in described absorption filter.
Additionally, in the above-mentioned light irradiation device of the present invention, it is characterized in that, described light irradiation device has reflecting mirror, and this reflecting mirror reflects in the way of the light from described light source is incided described wavelength selecting filter according to the angular range to comprise oblique incidence angle.
It addition, in the above-mentioned light irradiation device of the present invention, it is characterised in that described wavelength selecting filter is to have the dependent light filter of incident angle, and described absorption filter is not have the dependent light filter of incident angle.
It addition, in the above-mentioned light irradiation device of the present invention, it is characterised in that described absorption filter is the light filter with light absorbing material, the light in described smooth absorbing material wave-length coverage of the transmission peak wavelength territory lower limit of wavelength selecting filter described in incomplete absorption.
Additionally, in the above-mentioned light irradiation device of the present invention, it is characterized in that, between described wavelength selecting filter and described absorption filter, be fitted with liner, this liner light filter to being arranged in described light source side among wavelength selecting filter described in not transmission and described absorption filter and incide the light of another light filter and carry out shading.
Additionally, in the above-mentioned light irradiation device of the present invention, it is characterized in that, described wavelength selecting filter and described absorption filter are constituted by arranging multiple light filters respectively on the direction that each light filter extends, described liner has border light shielding part, this border light shielding part extends along constituting light filter, multiple light filters described boundary member being arranged in described light source side among described wavelength selecting filter and described absorption filter, and the light spilt from described boundary member is carried out shading.
Additionally, in the above-mentioned light irradiation device of the present invention, it is characterized in that, described light irradiation device has for receiving described light source and the casing of described wavelength selecting filter, and the opening that irradiates being located at described casing is blocked by the cover unit with described wavelength selecting filter and described absorption filter.
Invention effect
According to the present invention, owing to both having the light transmissive wavelength selecting filter making the wavelength needed for comprising irradiation area, also there is the absorption filter of extraneous light for absorbing required wavelength, the light that transmission peak wavelength selects light filter and absorption filter is irradiated to irradiation area, therefore, can adopt and there is the dependent wavelength selecting filter of incident angle, interdict the light of the unwanted wavelength of irradiation area accurately.
Accompanying drawing explanation
Fig. 1 indicates that the figure of the light irradiation device that embodiment of the present invention relates to.
Fig. 2 is the figure of the illumination unit schematically showing light irradiation device.
Fig. 3 is the exploded perspective view of the cover unit of light irradiation device.
Fig. 4 indicates that the figure of the dichroism of wavelength selecting filter and absorption filter.
Description of reference numerals
1: light irradiation device, 2: exterior body (casing), 2K: peristome (irradiation opening), 11: illumination unit, 12: straight pipe type lamp (light source), 13: mirror unit, 21: cooling unit, 31: cover unit, 33: wavelength selecting filter, 34: liner, 35: absorption filter, W: workpiece (irradiation area).
Detailed description of the invention
Hereinafter, with reference to accompanying drawing, embodiments of the present invention are illustrated.
Fig. 1 indicates that the figure of the light irradiation device 1 that embodiment of the present invention relates to.
This light irradiation device 1 is for the device irradiating visible ray with the material of visible-light curing, it is located at the top of the workpiece W as object shadow surface, substantially evenly irradiates the visible ray (by the light of short wavelength side in visible ray) of 390nm~500nm to workpiece W.
In the exterior exterior body 2 constituting this light irradiation device 1, it is accommodated with illumination unit 11, for the cooling unit 21 cooling down illumination unit 11 and the cover unit 31 being configured between illumination unit 11 and workpiece W.
Fig. 2 is the figure schematically showing illumination unit 11.
Illumination unit 11 have constitute light source straight pipe type lamp 12, the light (light is represented by dashed line in Fig. 2) radiated from straight pipe type lamp 12 (workpiece W side) downward is carried out the mirror unit 13 that reflects.The framework 14 that this mirror unit 13 is extended by the length direction along straight pipe type lamp 12 supports.
Straight pipe type lamp 12 such as enclosing the gallium lamp of the halogenide of gallium, multi output 400~450nm wavelength region in luminous tube, uses the straight pipe type lamp of the strip along the almost parallel extension of workpiece W.Various light sources can be widely used in this straight pipe type lamp 12, for instance applicable high-pressure mercury-vapor lamp or other metal halide lamps.Lamp supporting mass 12S for supporting this straight pipe type lamp 12 is combined with cover unit 31.
Mirror unit 13 is formed as the concave mirror caved in upward, vacates the underface of straight pipe type lamp 12 length direction around straight pipe type lamp 12 and along straight pipe type lamp 12 and extends.This mirror unit 13, by covering from above the whole length of straight pipe type lamp 12, does not directly emit to the light of workpiece W towards workpiece W reflection from straight pipe type lamp 12.By arranging mirror unit 13, the light quantity of the light being irradiated to workpiece W can be increased, and the utilization ratio of the light of straight pipe type lamp 12 can be improved.Additionally, mirror unit 13 is on the pair of tracks 2R that the length direction being bearing in the way of sliding freely along straight pipe type lamp 12 extends, it is possible to mirror unit 13 to be easily moved to the position being prone to be replaced waiting maintenance.
Exterior body 2 is formed by the metal casing of the peristome 2K with opening downward, has cooling radiator 21A, cooling unit 21B and cooling blower 21C etc. above mirror unit 13.Cooling radiator 21A, cooling unit 21B and cooling blower 21C are the parts constituting cooling unit 21, carry cooling air with cooling blower 21C to illumination unit 11, and each several part (straight pipe type lamp 12 and mirror unit 13 etc.) of illumination unit 11 is carried out air cooling.
It addition, the cooling fluid being respectively supplied to be located at multiple hole portion 13A of mirror unit 13 is cooled down by cooling radiator 21A and cooling unit 21B.Multiple hole portion 13A extends along the length direction of mirror unit 13, by making cooling fluid flow at each hole portion 13A respectively, can effectively mirror unit 13 be cooled down.
Thus, can carry out each several part (straight pipe type lamp 12 and mirror unit 13 etc.) of illumination unit 11 forcing cooling, can fully suppress the impact of the heat sent because of straight pipe type lamp 12 to cause that the temperature of straight pipe type lamp 12 and mirror unit 13 etc. rises.Further, since cover the peristome 2K of lamp containing box 15 with cover unit 31, accordingly, it is capable to lamp containing box 15 and space outerpace are separated, by suppressing the heat affecting of space outerpace, independent cooling space can be formed in lamp containing box 15.
Cover unit 31 is the cover of peristome 2K of the lower section covering exterior body 2, and this cover unit 31 is formed as the cover that the rectangle that extends along the length direction of straight pipe type lamp 12 is slim.The peristome 31A being formed immediately below with the rectangle that the length direction along straight pipe type lamp 12 extends at the straight pipe type lamp 12 of this cover unit 31, by the direct light making straight pipe type lamp 12 and indirect light traverse this peristome 31A reflected by mirror unit 13, irradiate light to workpiece W.That is, the peristome 31A of exterior body 2 plays the effect irradiating peristome irradiating light to workpiece W.It addition, this cover unit 31 is to be prone in the way of exterior body 2 dismounting being arranged on exterior body 2.Owing to straight pipe type lamp 12 is bearing in cover unit 31 via lamp supporting mass 12S, accordingly, it is capable to easily dismantle cover unit 31 and straight pipe type lamp 12 from exterior body 2.
At this, the light of straight pipe type lamp 12 also comprises the light of the wavelength that need not workpiece W be irradiated, and for removing the light of this unwanted wavelength, is provided with the wavelength selecting filter 33 covering peristome 31A at the peristome 31A of cover unit 31.
Wavelength selecting filter 33 is layered dielectric multilayer film and the optical light filter that formed on the transparent substrate, only makes the light transmission of wavelength (required wavelength) needed for irradiation workpiece W, it is not necessary to the light of wavelength cannot transmission.Thus, wavelength selecting filter 33 plays the effect removing the blocking light filter for the unwanted light of workpiece W.
But, the transmissison characteristic of wavelength selecting filter 33 has incident angle dependency.Therefore there is following problem: for the light of oblique incidence, even unwanted wavelength one part also can transmission.Especially the light irradiation device 1 of present embodiment, owing to configuring flat wavelength selecting filter 33 in the position separated from straight pipe type lamp 12, and the light of straight pipe type lamp 12 is reflected with the mirror unit 13 of bending, therefore, as shown in Figure 2, there is more light component oblique incidence to wavelength selecting filter 33, easily become many from the light of the unwanted wavelength of wavelength selecting filter 33 transmission.
Then, in this configuration, also setting up absorption filter 35, absorption filter 35, for absorbing the light of unwanted wavelength, only makes transmission peak wavelength select the light of the required wavelength of light filter 33 and absorption filter 35 to be irradiated to the workpiece W as irradiation area.
Fig. 3 represents the exploded perspective view of cover unit 31.
As it is shown on figure 3, cover unit 31 has: form the framework cover 32 of peristome 31A, laminated configuration at the wavelength selecting filter 33 of this framework cover 32, liner 34 and absorption filter 35 and the light filter pressing piece 36 for these wavelength selecting filter 33, liner 34 and absorption filter 35 being fixed on framework cover 32.Wavelength selecting filter 33 and absorption filter 35 are formed to be slightly larger than the writing board shape of the rectangle of peristome 31A, in the present embodiment, are formed as identical outer shape.
The material that framework cover 32 and light filter pressing piece 36 are had rigidity by metal or resin etc. is formed.The upper surface of framework cover 32 is provided with the convex strip portions 32A of the outer rim formation Continuous Rectangular framework along peristome 31A, to configure light filter pressing piece 36 from above in the way of wavelength selecting filter 33, liner 34 and absorption filter 35 on this convex strip portions 32A, with multiple secure components (for fastening bolt in this structure) 37, light filter pressing piece 36 is fixed on framework cover 32.Thus, between framework cover 32 and light filter pressing piece 36, wavelength selecting filter 33, liner 34 and absorption filter 35 it are clamped with.
In this configuration, owing to making wavelength selecting filter 33 and absorption filter 35 form one with cover unit 31, therefore, multiple wavelength selecting filter 33, absorption filter 35 are easily mounted onto on illumination unit 11 or dismantle from illumination unit 11.Further, since multiple wavelength selecting filter 33, the generally superimposed configuration of absorption filter 35, accordingly, it is capable to suppress the height with the illumination unit 31 of multiple wavelength selecting filter 33, absorption filter 35, and the height of light irradiation device 1 can be suppressed to increase.
The slack adjuster members in the gap that liner 34 is for ensuring that between stacked wavelength selecting filter 33 and absorption filter 35, is had light-proofness by PTFE (politef) etc. and flexible material is formed.By separating small gap, even if having External Force Acting in the light filter 33 or 35 of side, also it is avoided that light filter 33 and 35 contact each other, it is possible to suppress external force transmission.
Especially using as the transparent glass material (quartz glass, borosilicate glass etc.) with the high advantage of absorbance of ultraviolet-resistant material as the matrix material of wavelength selecting filter 33 and absorption filter 35 time, by arranging liner 34, even if they are carried out laminated configuration, also can effectively suppress the damage etc. of the glass material caused because of external force impact.
It addition, liner 34 is in the way of at least carrying out shading to the gap being arranged in around the wavelength selecting filter 33 of straight pipe type lamp 12 side, be formed as the frame shape of outer rim along wavelength selecting filter 33.Accordingly, it is capable to the light being reliably prevented straight pipe type lamp 12 spills from the surrounding of wavelength selecting filter 33 and incides the situation of the absorption filter 35 being configured at workpiece W side.
Additionally, as shown in Figure 3, the structure of the wavelength selecting filter 33 of straight pipe type lamp 12 side is by the light filter 33A of multiple small pieces many plates type arranged along the length direction of straight pipe type lamp 12, likely incides the minim gap between the light filter 33A of these small pieces from the light of straight pipe type lamp 12.
In the present embodiment, liner 34 has the all-in-one-piece border light shielding part 34A along the boundary member extension of the light filter 33A of the multiple small pieces constituting wavelength selecting filter 33, and the light spilt from boundary member will not incide the absorption filter 35 being configured at workpiece W side.That is, liner 34 plays the effect that the light that not transmission peak wavelength selection light filter 33 incides absorption filter 35 carries out the light-blocking member of shading, the light absorbing material deterioration of energy decrease uptake light filter 35.It addition, the injection light of straight pipe type lamp 12 comprises ultraviolet light, owing to this ultraviolet lighting can be suppressed to be mapped to absorption filter 35 with liner 34, the UV degradation of light absorbing material therefore can be suppressed.Thus, can the performance degradation of decrease uptake light filter 35 effectively, and can life-saving.
Additionally, wavelength selecting filter 33 may be used without board type structure.When adopting board type structure, the above-mentioned border light shielding part 34A of liner 34 can be removed, it is also possible to do not remove.When not removing above-mentioned border light shielding part 34A, corresponding to the quantity of border light shielding part 34A, it is easier to be properly maintained wavelength selecting filter 33 and the gap of absorption filter 35.
Fig. 4 represents wavelength selecting filter 33 and the dichroism of absorption filter 35.In the diagram, accompanying drawing labelling f1 represents the dichroism of wavelength selecting filter 33, and accompanying drawing labelling f2 represents the dichroism of absorption filter 35.Additionally, the transmission characteristics when dichroism of the wavelength selecting filter 33 shown in Fig. 4 is vertical incidence.
About wavelength selecting filter 33, as shown in the accompanying drawing labelling f1 of Fig. 4, in transmission characteristics when vertical incidence, there is the ultraviolet side that at least one of maximum transmission rate is less than the 1% blocking wavelength domain in the wave-length coverage of the blocking wavelength domain of the visible territory that at least one of maximum transmission rate is less than 1% in the wave-length coverage of transmission peak wavelength territory that the maximum transmission rate in the wave-length coverage of 390~500nm is more than 85%, 600~800nm and near infrared light side, 200~400nm.It addition, form transparency carrier by the material higher with thermostability and quartz glass, to improve the thermostability of wavelength selecting filter 33.
Specifically, the different face of the transparency carrier of the quartz glass of wavelength selecting filter 33 has the ground floor stack constituting arrowband flow-through (NBP type) light filter and constitutes the second layer stack of broadband flow-through (BBP type) light filter, be made up of ground floor stack the absorbance of short wavelength side in the transmission peak wavelength territory that maximum transmission rate is more than 85% in the wave-length coverage of 400~600nm, transmission peak wavelength territory from 85% becoming the inclination of transmittance graph of less than 5%, the absorbance of long wavelength side become from 85% less than 5% the inclination of transmittance graph.And, the ultraviolet side that at least one of minimum transmittance is less than the 1% blocking wavelength domain in the wave-length coverage of the blocking wavelength domain of visible territory that at least one of minimum transmittance in the wave-length coverage of 600~800nm is less than 1% and near infrared light side, 200~400nm it is made up of second layer stack.
Absorption filter 35 is the optical light filter that dispersion is formed for absorbing the light absorbing material of the light of provision wavelengths in transparency carrier (quartz glass, borosilicate glass etc.), same with wavelength selecting filter 33, be formed as the writing board shape of the rectangle of the peristome 31A of cover unit 31.As shown in the accompanying drawing labelling f2 of Fig. 4, the characteristic of this absorption filter 35 is configured to, the absorbance making wavelength selecting filter 33 is set to the light transmission of higher wave-length coverage (390~500nm), absorbs the light of provision wavelengths in addition, i.e. light to the unwanted wavelength of workpiece W.Absorption filter 35 does not have incident angle dependency.
More specifically, absorption filter 35 using the wave-length coverage less than 390nm as absorbing wavelength territory, using 390nm wavelength above scope as the transmission peak wavelength territory that maximum transmission rate is more than 90%.Thus, the transmission peak wavelength because of oblique incidence can be absorbed with absorption filter 35 and select the light of light filter 33 and the wavelength less than 390nm.
Additionally, as it is shown on figure 3, same with wavelength selecting filter 33, the structure of this absorption filter 35 is also the many plates type arranged along the length direction of straight pipe type lamp 12.Therefore, compared with the situation that wavelength selecting filter 33 elongated for the length direction along straight pipe type lamp 12 and absorption filter 35 are made parts, can made both easily and inexpensively make.
According to above structure, as in figure 2 it is shown, the light radiated by straight pipe type lamp 12 directly or is reflected mirror unit 13 and reflects and incide wavelength selecting filter 33 with various incident angles.The light of vertical incidence is according to the optical characteristics (with reference to accompanying drawing labelling f1 in Fig. 4) of wavelength selecting filter 33, and absorbance is set the light transmission of higher wave-length coverage (390~500nm), the transmission hardly of light in addition.Owing to transmission peak wavelength selects the light in the wave-length coverage that the absorbance of the just absorption filter 35 of light filter 33 is higher, therefore can transmission absorption light filter 35 and be irradiated to workpiece W.
On the other hand, to the light of wavelength selecting filter 33, according to the incident angle dependency of wavelength selecting filter 33, a part of transmission peak wavelength selects light filter 33 in oblique incidence.The light of this transmission incides absorption filter 35, optical characteristics (with reference to accompanying drawing labelling f2 in Fig. 4) according to absorption filter 35, absorbance is set the light transmission of higher wave-length coverage (390nm~), and the light of the wave-length coverage (less than 390nm) that absorbance is set low is absorbed by absorption filter 35.
Thus, owing to adopting wavelength selecting filter 33 and the double-deck structure of the light filter of absorption filter 35, the light of the wave-length coverage (390~500nm) needed for making workpiece W is irradiated to workpiece W, and can interdict the light of the unwanted wave-length coverage of workpiece W (especially less than 390nm) accurately.
It addition, in above-mentioned double-deck structure of the light filter, select the light of light filter 33 to incide absorption filter 35 owing to only having transmission peak wavelength, therefore can the light absorbing material deterioration of decrease uptake light filter 35, and can the performance degradation of decrease uptake light filter 35.
As described above, in the present embodiment, owing to both having the light transmissive wavelength selecting filter 33 making the wavelength needed for comprising irradiation area, there is again the absorption filter 35 of extraneous light for absorbing above-mentioned required wavelength, transmission peak wavelength is made to select the light of light filter 33 and absorption filter 35 to be irradiated to the workpiece W as irradiation area, therefore, adopt the structure with the dependent wavelength selecting filter 33 of incident angle, the light of the unwanted wavelength of irradiation area can be interdicted accurately, and the light of required wavelength can be irradiated accurately.
Select the light of light filter 33 to incide wherein further, since absorption filter 35 is configured to transmission peak wavelength, therefore can suppress to incide the amount of the light of absorption filter 35.Thus, the performance degradation of energy decrease uptake light filter 35, and the life-span of absorption filter 35 can be extended.Thus, in this configuration, by adopting the multilayer stock structure being configured to ground floor to be wavelength selecting filter 33, the second layer be absorption filter 35, the light of the unwanted wavelength of irradiation area can be interdicted accurately, and the life-span of absorption filter 35 can be extended.
But, as long as in the scope in the life-span that can guarantee absorption filter 35 fully, it is possible to absorption filter 35 is arranged in than the wavelength selecting filter 33 position near straight pipe type lamp 12 side.Adopting this structure, the light owing to only having the wave-length coverage of transmission absorption light filter 35 incides wavelength selecting filter 33, and the light of the wave-length coverage therefore absorbed by absorption filter 35 is not irradiated to workpiece W.
Additionally, owing to having the mirror unit 13 reflected in the way of the light to straight pipe type lamp 12 incides wavelength selecting filter 33 according to the angular range to comprise oblique incidence angle, therefore can improve the utilization ratio of light with mirror unit 13, and the harm that oblique incidence transmission peak wavelength due to use mirror unit 13 select the increase of the unwanted light component of light filter 33 to bring can be avoided.
Additionally, owing to straight pipe type lamp 12 and the wavelength selecting filter 33 as light source is received into the casing constituting exterior body 2, block with the cover unit 31 with wavelength selecting filter 33 and absorption filter 35 and comprise the peristome 2K irradiating opening being located at this casing, wavelength selecting filter 33 and absorption filter 35 blocking therefore can be made easily to dismount.Safeguard accordingly, it is capable to easily carry out wavelength selecting filter 33 and the dismounting of absorption filter 35, inspection etc..
Further, since exterior body 2 and surrounding can be separated with cover unit 31, the heat affecting of surrounding therefore can be suppressed to form independent cooling space in exterior body 2, and the cooling in exterior body 2 can be effectively taking place.
And, owing to being fitted with liner 34 between the wavelength selecting filter 33 of cover unit 31 and absorption filter 35, not transmission configuration is incided the light of another light filter (absorption filter 35) and carries out shading by this liner 34 at a light filter (wavelength selecting filter 33) of light source side, therefore can suppress through the light filter (wavelength selecting filter 33) of light source side, the unwanted light of irradiation area be irradiated to the situation of irradiation area, and can the performance degradation of decrease uptake light filter 35.Further, since plug-in mounting liner 34, so wavelength selecting filter 33 and absorption filter 35 can be configured to reliably separate gap, and wavelength selecting filter 33, absorption filter 35 contact etc. each other can be suppressed.
Above-mentioned embodiment is always exemplified with an embodiment of the invention, can carry out random variation and application without departing from the spirit and scope of the invention.
Such as, describe and make wavelength selecting filter 33 and absorption filter 35 and cover unit 31 shape all-in-one-piece situation, but be not limited to this, it is possible to by each wavelength selecting filter 33, absorption filter 35 either one or both be arranged in the position being different from cover unit 31.In a word, as long as being configured to select the light of light filter 33 and absorption filter 35 to be irradiated to irradiation area transmission peak wavelength by each wavelength selecting filter 33, absorption filter 35.
Alternatively, it is also possible at the surface configuration antireflection film of absorption filter 35, suppress the light component of reflection on absorption filter 35.
It addition, describe the situation of the double-deck structure of the light filter of wavelength selecting filter 33 and absorption filter 35, but also other optical light filters can be arranged in light source side or the side contrary with light source and form the structure of the light filter of more than three layers.But, from the angle guaranteeing light transmission, above-mentioned double-deck structure of the light filter is the most favourable.
Additionally, it is possible to by plural straight pipe type lamp so that each pipe axle arranged in series coaxially and be used as the light source of light irradiation device 1.It is also possible to use the light source being arranged the light-emitting components such as LED.

Claims (8)

1. a light irradiation device, there is the light source of the light of the wavelength needed for radiation comprises irradiation area and make to comprise the light transmissive wavelength selecting filter of described required wavelength, and the light from described light source is irradiated to described irradiation area via described wavelength selecting filter, it is characterized in that
Described light irradiation device has the absorption filter of the extraneous light for absorbing described required wavelength, will be irradiated to described irradiation area from the light of wavelength selecting filter and described absorption filter described in described light source transmission.
2. light irradiation device as claimed in claim 1, it is characterised in that
Described absorption filter is configured to make the light of wavelength selecting filter described in transmission incide described absorption filter.
3. light irradiation device as claimed in claim 1 or 2, it is characterised in that
Described light irradiation device has reflecting mirror, and this reflecting mirror reflects in the way of the light from described light source is incided described wavelength selecting filter according to the angular range to comprise oblique incidence angle.
4. light irradiation device as claimed any one in claims 1 to 3, it is characterised in that
Described wavelength selecting filter is to have the dependent light filter of incident angle,
Described absorption filter is not have the dependent light filter of incident angle.
5. light irradiation device as claimed in claim 4, it is characterised in that
Described absorption filter is the light filter with light absorbing material,
Light in described smooth absorbing material wave-length coverage of the transmission peak wavelength territory lower limit of wavelength selecting filter described in incomplete absorption.
6. the light irradiation device as according to any one of claim 1 to 5, it is characterised in that
Between described wavelength selecting filter and described absorption filter, be fitted with liner, this liner light filter to being arranged in described light source side among wavelength selecting filter described in not transmission and described absorption filter and incide the light of another light filter and carry out shading.
7. light irradiation device as claimed in claim 6, it is characterised in that
Described wavelength selecting filter and described absorption filter are constituted by arranging multiple light filters respectively on the direction that each light filter extends,
Described liner has border light shielding part, this border light shielding part extends along constituting light filter, multiple light filters described boundary member being arranged in described light source side among described wavelength selecting filter and described absorption filter, and the light spilt from described boundary member is carried out shading.
8. the light irradiation device as according to any one of claim 1 to 7, it is characterised in that
Described light irradiation device has for receiving described light source and the casing of described wavelength selecting filter,
The opening that irradiates being located at described casing is blocked by the cover unit with described wavelength selecting filter and described absorption filter.
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JP2015002867A JP6471503B2 (en) 2015-01-09 2015-01-09 Light irradiation device

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